CN108896213A - Stress sensor based on porous conductive elastomer and manufacturing method thereof - Google Patents
Stress sensor based on porous conductive elastomer and manufacturing method thereof Download PDFInfo
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- CN108896213A CN108896213A CN201810377273.6A CN201810377273A CN108896213A CN 108896213 A CN108896213 A CN 108896213A CN 201810377273 A CN201810377273 A CN 201810377273A CN 108896213 A CN108896213 A CN 108896213A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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Abstract
The invention provides a stress sensor based on a porous conductive elastomer and a manufacturing method thereof. The stress sensor includes: the stress sensor comprises a planar electrode (1), a conductive elastic body (2) with a porous structure and a planar electrode (3), wherein the planar electrode (1) is connected with the upper surface of the conductive elastic body (2) in a sticking mode, the planar electrode (3) is connected with the lower surface of the conductive elastic body (2) in a sticking mode, and the planar electrode (1) and the planar electrode (3) are used as signal output ends of the stress sensor. The stress sensor based on the porous conductive elastomer can accurately respond to external stress strain through the change of the resistance, and has the advantages of high stability, high reliability and the like. Meanwhile, the micro-stress sensor has good mechanical and electrical properties, and key parameters such as sensitivity and the like of the stress sensor can be regulated, controlled and optimized by adjusting the mass fraction, the pore size and the porosity among the component proportions, so that the aim of accurately identifying external micro-stress is fulfilled.
Description
Technical field
The present invention relates to sensings, wearable, health monitoring field, and in particular to one kind is based on porous, electrically conductive elastomer
Strain gauge and preparation method thereof.
Background technique
With the fast development of wearable electronic and portable intelligent system, all kinds of flexibility stress senser elements are received more
Carry out more concerns, and is applied to the various aspects of health monitoring, human-computer interaction and safety communication.Current strain gauge
According to principle difference, the plurality of classes such as condenser type, pressure resistance type and piezoelectric type can be divided into, external world's strain can be made stable
Identification and sensing.Wherein, ambient pressure is changed into the pressure resistance type strain gauge of resistance signal, using specific high sensitivity
The functional material that structure cooperates conductivity excellent, with cheap, the detection range of stress is wide, preparation process is simple, structure
The advantages such as simple and reliable are widely used in fields such as electronic skin, array positioning, track identifications.
For the different strain gauges based on pressure resistance type working principle, many research groups have carried out a large amount of spy
Rope.However, these are not usually high as the sensitivity of the strain gauge of sensing material using polymer material, in low strain dynamic model
It is poor to enclose lower sensing stability, limits its further applying in wearable field to a certain extent.Recently, using porous sea
The novel strain gauge of silk floss cooperation conductive material is furtherd investigate, by the drop coating active material on commercial sponge skeleton,
In the case of applying extraneous stress, porous structure generates deformation, so that device resistance corresponding change, generates stable electrical response.
But the processing method of this separate type makes device stability lower, and lower for the ability of regulation and control of porous structure, limitation
The possibility that device advanced optimizes.
Summary of the invention
The embodiment provides a kind of strain gauge and preparation method thereof based on porous, electrically conductive elastomer, with
Overcome problem of the prior art.
To achieve the goals above, this invention takes following technical solutions.
According to an aspect of the invention, there is provided a kind of strain gauge based on porous, electrically conductive elastomer, including：
Plane electrode (1), conductive elastomer (2) and plane electrode (3) with porous structure, the plane electrode (1)
It pastes and connects with the upper surface of the porous, electrically conductive elastomer (2), the plane electrode (3) and the porous, electrically conductive elastomer
(2) connection, the signal output end of the plane electrode (1) and plane electrode (3) as strain gauge are pasted in lower surface.
Further, the conductive elastomer (2) includes the mixture of polymer and conductive material, and the polymer includes
Perhaps the polyaniline conductive material includes carbon nanotube or ethene dioxythiophene monomer to dimethyl silicone polymer.
Further, the plane electrode (1), plane electrode (3) are the electrode with flexible speciality.
Further, the porous structure by fill up solidify after mixture mold in add particle soluble easily in water
Induced synthesis.
According to an aspect of the invention, there is provided a kind of production side of the strain gauge based on porous, electrically conductive elastomer
Method, including：
It is added in toluene by weighing to mix CNT with the base fluid of PDMS, obtains toluene solution；
Magnetic force auxiliary stirring is carried out to the toluene solution and obtains CNT- so that CNT and PDMS are dissolved completely in toluene
The finely dispersed toluene solution of PDMS；
The crosslinking agent of PDMS and Icing Sugar particle are added in the finely dispersed toluene solution of CNT-PDMS by weighing, then
It is secondary that magnetic force auxiliary stirring is carried out to toluene solution, so that toluene volatilization, obtains CNT-PDMS- Icing Sugar mixture；
The CNT-PDMS- Icing Sugar mixture is filled among mold, by way of heating, drying, makes the base of PDMS
Liquid reacts solidification with crosslinking agent；
The mixture being fully cured is removed from the molds, is put into the beaker for filling with hot water, Icing Sugar is dissolved, is had
There is the CNT-PDMS elastomer of porous structure；
The CNT-PDMS elastomer with porous structure is taken out from beaker by way of constant temperature drying, in CNT-
The upper and lower surface of PDMS elastomer pastes one layer plane electrode of connection respectively, obtains the stress sensing based on porous, electrically conductive elastomer
Device.
Further, described to be added in toluene by weighing to mix CNT with the base fluid of PDMS, toluene solution is obtained,
Further include：
The quality of the CNT is 70-350mg, and the quality of PDMS base fluid is 1-5g, and the volume of toluene is 5-25ml.
Further, described the crosslinking agent of PDMS is added to CNT-PDMS with Icing Sugar particle to be uniformly dispersed by weighing
Toluene solution in, further include：
The quality of the PDMS crosslinking agent is 100-500mg, and the quality of the Icing Sugar is 5-25g, diameter dimension 10-
200μm。
Further, described that the CNT-PDMS- Icing Sugar mixture is filled among mold, further include：
The size of the mold is 0.25-25cm2, the depth of mold is 0.1-0.5cm.
Further, the mixture that will be fully cured is removed from the molds, and is put into the beaker for filling with hot water, is made
Icing Sugar dissolution, obtains the CNT-PDMS elastomer with porous structure, further includes：
The temperature of hot water is 75 DEG C in the beaker, and the volume of hot water is 50-250ml, and the dissolution time of the Icing Sugar is 4
Hour.
Further, described by way of heating, drying, so that the base fluid of PDMS is reacted solidification with crosslinking agent, also wraps
It includes；
Drying temperature in the step is 70 DEG C, and single drying time is 3 hours.
As can be seen from the technical scheme provided by the above-mentioned embodiment of the present invention, proposed by the present invention to be based on porous, electrically conductive bullet
Property body strain gauge, accurate response can be made by the variation of resistance to extraneous ess-strain, have stability strong
The advantages such as reliability height.There is good mechanics and electric property simultaneously, and can be by adjusting the quality between each composition ratio
Score, pore size and porosity are regulated and controled and are optimized to key parameters such as the sensitivity of strain gauge, are realized externally
The target that boundary's minimal stress accurately identifies.
The additional aspect of the present invention and advantage will be set forth in part in the description, these will become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill of field, without creative efforts, it can also be obtained according to these attached drawings others
Attached drawing.
Fig. 1 is a kind of structural schematic diagram of strain gauge provided in an embodiment of the present invention.
Fig. 2 is the stereoscan photograph of the porous elastomers structure of one kind provided in an embodiment of the present invention.
Fig. 3 is the stereoscan photograph of the CNT conductive network of one kind provided in an embodiment of the present invention.
Fig. 4 is electrical response waveform diagram of the strain gauge of one kind provided in an embodiment of the present invention under different stress.
When Fig. 5 is that the strain gauge of one kind provided in an embodiment of the present invention is placed on wrist, in the differently curved shape of wrist
Electrical response waveform diagram under state.
Specific embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and for explaining only the invention, and is not construed as limiting the claims.
Those skilled in the art of the present technique are appreciated that unless expressly stated, singular " one " used herein, " one
It is a ", " described " and "the" may also comprise plural form.It is to be further understood that being arranged used in specification of the invention
Diction " comprising " refer to that there are the feature, integer, step, operation, element and/or component, but it is not excluded that in the presence of or addition
Other one or more features, integer, step, operation, element, component and/or their group.It should be understood that when we claim member
Part is " connected " or when " coupled " to another element, it can be directly connected or coupled to other elements, or there may also be
Intermediary element.In addition, " connection " used herein or " coupling " may include being wirelessly connected or coupling.Wording used herein
"and/or" includes one or more associated any cells for listing item and all combinations.
Those skilled in the art of the present technique are appreciated that unless otherwise defined, all terms used herein (including technology art
Language and scientific term) there is meaning identical with the general understanding of those of ordinary skill in fields of the present invention.Should also
Understand, those terms such as defined in the general dictionary, which should be understood that, to be had and the meaning in the context of the prior art
The consistent meaning of justice, and unless defined as here, it will not be explained in an idealized or overly formal meaning.
In order to facilitate understanding of embodiments of the present invention, it is done by taking several specific embodiments as an example below in conjunction with attached drawing further
Explanation, and each embodiment does not constitute the restriction to the embodiment of the present invention.
Embodiment one
For the problems such as nowadays strain gauge sensitivity is low, stability is poor, the embodiment of the present invention devises a kind of new
The strain gauge with porous structure of type, by way of directly preparing the conductive elastomer with good porous structure,
The excellent mechanical performance of porous structure is combined with the advantage of the high conductivity of elastomer, obtains that there is highly sensitive and wide work
The strain gauge of range realizes the stable response to extraneous ess-strain.
The embodiment of the invention provides a kind of strain gauge based on porous, electrically conductive elastomer, the knots of the strain gauge
Structure is as shown in Figure 1, include：Plane electrode 1, conductive elastomer 2 and plane electrode 3 with porous structure, plane electrode 1 and more
Connection is pasted in the upper surface of hole conductive elastomer 2, and the lower surface stickup of plane electrode 3 and porous, electrically conductive elastomer 2 connects.It is described
Porous, electrically conductive elastomer 2 is the mixture with good conductivity, such as dimethyl silicone polymer
The polymer such as (polydimethylsiloxane, PDMS), polyaniline (polyaniline, PANI) and carbon nanotube (carbon
Nanotube, CNT), the mixtures of the conductive materials such as 3,4-rthylene dioxythiophene monomer (PEDOT).
The plane electrode 1, plane electrode 3 are the electrode with flexible speciality, for example are commercial tin indium oxide (ITO) electricity
Pole.
The porous structure by fill up solidify after mixture mold in add particle induced synthesis soluble easily in water,
Above-mentioned particle includes such as sugar, the adjustable little particle of salt equidimension.
Embodiment two
The embodiment of the invention also provides a kind of strain gauge manufacturing methods based on porous, electrically conductive elastomer, including with
Lower step：
1) it, is added in toluene by weighing to mix CNT with the base fluid of PDMS, obtains toluene solution；
The quality of CNT in the step is 70-350mg, and the quality of PDMS base fluid is 1-5g, and the volume of toluene is 5-
25ml；
2), by the method for magnetic force auxiliary stirring, toluene solution high-speed stirred under magnetic force auxiliary stirrer auxiliary makes
CNT comes into full contact with PDMS, is dissolved completely in CNT and PDMS in toluene, obtains the finely dispersed first of CNT-PDMS
Benzole soln；
The temperature of magnetic force auxiliary stirring in the step is room temperature, and mixing time is 4 hours.
3) crosslinking agent of PDMS and Icing Sugar particle, are added to the finely dispersed toluene solution of CNT-PDMS by weighing
In；
The quality of PDMS crosslinking agent is 100-500mg, and the quality of Icing Sugar is 5-25g, diameter dimension is 10-200 μm.
4), by the method for magnetic force auxiliary stirring, in the process of high-speed stirred toluene solution toluene is gradually volatilized, obtains
To CNT-PDMS- Icing Sugar mixture；
The temperature of magnetic force auxiliary stirring in the step is room temperature, and mixing time is 1 hour.
5), after the completion of toluene volatilization, CNT-PDMS- Icing Sugar mixture is filled among designed mold, by adding
The mode of heat drying, makes the base fluid of PDMS react solidification with crosslinking agent；
The size of mold in the step is 0.25-25cm2, the depth of mold is 0.1-0.5cm, and drying temperature is
70 DEG C, single drying time is 3 hours.
Above-mentioned grinding tool can be：A square hole, size are removed in acrylic board, aluminium alloy plate or resin plate, centre
As described above, as mold.
6), the mixture being fully cured is removed from the molds, is put into the beaker for filling with hot water, keeps Icing Sugar gradually molten
Solution, obtains the CNT-PDMS elastomer with porous structure；
The temperature of hot water is 75 DEG C in beaker in the step, and the volume of hot water is 50-250ml, and dissolution time is 4 small
When.
7), by way of constant temperature drying, remaining hydrone on the CNT-PDMS elastomer with porous structure is complete
Full volatilization, then the CNT-PDMS elastomer with porous structure is taken out from beaker.Then, in the upper of CNT-PDMS elastomer
One layer plane electrode of connection is pasted in lower surface respectively, obtains the strain gauge based on porous, electrically conductive elastomer.
Drying temperature in the step 7 is 40 DEG C, and drying time is 2 hours.
Made as described above step, process sequence not immobilize, according to actual needs can adjust process sequence or
Delete processing step.
Embodiment three
It is the stereoscan photograph of the porous elastomers structure of one kind provided in an embodiment of the present invention referring to Fig. 2, Fig. 2.Ginseng
According to Fig. 3, Fig. 3 is the stereoscan photograph of the CNT conductive network of one kind provided in an embodiment of the present invention.It is this referring to Fig. 4, Fig. 4
A kind of electrical response waveform diagram of the strain gauge that inventive embodiments provide under different stress.It is this referring to Fig. 5, Fig. 5
When a kind of strain gauge that inventive embodiments provide is placed on wrist, the electrical response waveform under the differently curved state of wrist
Figure.
A kind of strain gauge manufacturing method based on porous, electrically conductive elastomer that the embodiment provides, including following step
Suddenly：
Step 1：CNT powder and PDMS base fluid are obtained by weighing mode, the two is uniformly mixed and is added in toluene, is obtained
Toluene solution；
Step 2：By the method for magnetic agitation, using toluene as the mixing liquid of cosolvent high-speed stirred 4 at normal temperature
Hour, it comes into full contact with CNT with PDMS, and be dissolved completely in toluene solution, it is molten to obtain the finely dispersed toluene of CNT-PDMS
Liquid；
Step 3：Icing Sugar particle and the crosslinking agent of PDMS are obtained by weighing mode, by the crosslinking agent of Icing Sugar particle and PDMS
It is added in the finely dispersed toluene solution of above-mentioned CNT-PDMS；
Step 4：By the method for magnetic force auxiliary stirring, in the process of high-speed stirred toluene solution toluene is gradually waved
Hair, obtains finely dispersed CNT-PDMS- Icing Sugar mixture, and CNT-PDMS- Icing Sugar mixture is filled among mold；
Step 5：By way of heating, drying, after the solidification of above-mentioned CNT-PDMS- Icing Sugar mixture, by above-mentioned CNT-
PDMS- Icing Sugar mixture is removed from the molds, and into the water, removes the Icing Sugar in above-mentioned CNT-PDMS- Icing Sugar mixture.So
Afterwards, then by above-mentioned CNT-PDMS- Icing Sugar mixture it is placed in constant temperature oven, removes residual on above-mentioned CNT-PDMS- Icing Sugar mixture
After the hydrone stayed, porous C NT-PDMS conductive elastomer 2 is obtained；
Step 6：By way of stickup, adhere to plane electrode 1,3 respectively in the upper and lower surfaces of conductive elastomer 1, it will
Plane electrode 1,3 is used as signal output end, obtains the strain gauge based on porous, electrically conductive elastomer.
Strain gauge provided by the present invention based on porous, electrically conductive elastomer can be applied to following field：
It 1, can be in conjunction with the advantages that the strain gauge performance parameter is controllable, preparation process is versatile, good compatibility
Device designed by the present invention and all kinds of energy storage devices such as battery, supercapacitor etc. are integrated, energy stores are utilized
Device drives strain gauge to carry out electrical response to extraneous ess-strain as power supply, realizes to external signal
Accurate detection and sensing.
2, the device designed by the present invention can directly be attached to human body surface, such as throat, wrist, arm deformation are frequent
Position, human skin, joint, muscle etc. movement during, strain gauge can be wider to what is strained greatly to small stress
The row of range, which becomes, makes corresponding electrical response, and various movements are analyzed and identified, has and realizes real time human-machine interaction
With the possibility of health monitoring.
In conclusion the advantages of strain gauge provided in an embodiment of the present invention based on porous, electrically conductive elastomer, is：
1, the strain gauge proposed by the present invention based on porous, electrically conductive elastomer can pass through extraneous ess-strain
Accurate response is made in the variation of resistance, has the advantages such as the strong reliability height of stability.
2, strain gauge proposed by the present invention is based on porous, electrically conductive elastomer structure compared with other strain gauges,
There is good mechanics and electric property simultaneously, and can by adjust the mass fraction between each composition ratio, pore size with
Porosity is regulated and controled and is optimized to key parameters such as the sensitivity of strain gauge, and it is accurate to extraneous minimal stress to realize
The target of identification.
3, manufacturing method proposed by the present invention is all made of the processing preparation of laboratory basic technology, is not related to high cost processing work
Skill, has the characteristics that at low cost, and preparation for processing is simple, have can large-scale batch production a possibility that.
Those of ordinary skill in the art will appreciate that：Attached drawing is the schematic diagram of one embodiment, module in attached drawing or
Process is not necessarily implemented necessary to the present invention.
All the embodiments in this specification are described in a progressive manner, same and similar portion between each embodiment
Dividing may refer to each other, and each embodiment focuses on the differences from other embodiments.Especially for device or
For system embodiment, since it is substantially similar to the method embodiment, so describing fairly simple, related place is referring to method
The part of embodiment illustrates.Apparatus and system embodiment described above is only schematical, wherein the conduct
The unit of separate part description may or may not be physically separated, component shown as a unit can be or
Person may not be physical unit, it can and it is in one place, or may be distributed over multiple network units.It can root
According to actual need that some or all of the modules therein is selected to achieve the purpose of the solution of this embodiment.Ordinary skill
Personnel can understand and implement without creative efforts.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with scope of protection of the claims
Subject to.
Claims (10)
1. a kind of strain gauge based on porous, electrically conductive elastomer, which is characterized in that including：
Plane electrode (1), conductive elastomer (2) and plane electrode (3) with porous structure, the plane electrode (1) and institute
Paste connection, the plane electrode (3) and the porous, electrically conductive elastomer (2) in the upper surface for stating porous, electrically conductive elastomer (2)
Paste connection, the signal output end of the plane electrode (1) and plane electrode (3) as strain gauge in lower surface.
2. the strain gauge according to claim 1 based on porous, electrically conductive elastomer, which is characterized in that the conduction bullet
Property body (2) includes the mixture of polymer and conductive material, and the polymer includes dimethyl silicone polymer or polyaniline, institute
Stating conductive material includes carbon nanotube or ethene dioxythiophene monomer.
3. the strain gauge according to claim 1 based on porous, electrically conductive elastomer, which is characterized in that the plane electricity
Pole (1), plane electrode (3) are the electrode with flexible speciality.
4. the strain gauge according to claim 1 or 2 or 3 based on porous, electrically conductive elastomer, which is characterized in that described
Porous structure by fill up solidify after mixture mold in add particle induced synthesis soluble easily in water.
5. a kind of production method of the strain gauge based on porous, electrically conductive elastomer, which is characterized in that including：
It is added in toluene by weighing to mix CNT with the base fluid of PDMS, obtains toluene solution；
Magnetic force auxiliary stirring is carried out to the toluene solution and obtains CNT-PDMS so that CNT and PDMS are dissolved completely in toluene
Finely dispersed toluene solution；
The crosslinking agent of PDMS and Icing Sugar particle are added in the finely dispersed toluene solution of CNT-PDMS by weighing, it is right again
Toluene solution carries out magnetic force auxiliary stirring and obtains CNT-PDMS- Icing Sugar mixture so that toluene volatilizees；
The CNT-PDMS- Icing Sugar mixture is filled among mold, by way of heating, drying, make the base fluid of PDMS with
Crosslinking agent reaction solidification；
The mixture being fully cured is removed from the molds, is put into the beaker for filling with hot water, Icing Sugar is dissolved, obtains having more
The CNT-PDMS elastomer of pore structure；
The CNT-PDMS elastomer with porous structure is taken out from beaker by way of constant temperature drying, in CNT-PDMS bullet
Property body upper and lower surface paste respectively connection one layer plane electrode, obtain the strain gauge based on porous, electrically conductive elastomer.
6. according to the method described in claim 5, it is characterized in that, described mixed CNT with the base fluid of PDMS by weighing
It is added in toluene, obtains toluene solution, further include：
The quality of the CNT is 70-350mg, and the quality of PDMS base fluid is 1-5g, and the volume of toluene is 5-25ml.
7. according to the method described in claim 5, it is characterized in that, described by weighing the crosslinking agent of PDMS and Icing Sugar
Grain is added in the finely dispersed toluene solution of CNT-PDMS, further includes：
The quality of the PDMS crosslinking agent is 100-500mg, and the quality of the Icing Sugar is 5-25g, diameter dimension is 10-200 μm.
8. according to the method described in claim 5, it is characterized in that, described fill the CNT-PDMS- Icing Sugar mixture
To among mold, further include：
The size of the mold is 0.25-25cm2, the depth of mold is 0.1-0.5cm.
9. according to the method described in claim 5, it is characterized in that, the mixture that will be fully cured takes from mold
Out, it is put into the beaker for filling with hot water, dissolves Icing Sugar, obtain the CNT-PDMS elastomer with porous structure, further include：
The temperature of hot water is 75 DEG C in the beaker, and the volume of hot water is 50-250ml, and the dissolution time of the Icing Sugar is 4 small
When.
10. according to the method described in claim 9, making the base of PDMS it is characterized in that, described by way of heating, drying
Liquid reacts solidification with crosslinking agent, further includes；
Drying temperature in the step is 70 DEG C, and single drying time is 3 hours.
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| CN110220619A (en) * | 2019-07-15 | 2019-09-10 | 合肥工业大学 | Pliable pressure sensor based on hollow ball structure and preparation method thereof |
| CN110455443A (en) * | 2019-08-23 | 2019-11-15 | 北京航空航天大学 | A kind of flexible capacitive sensor and preparation method thereof using the preparation of silver nanowires flexible electrode |
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| CN110220619A (en) * | 2019-07-15 | 2019-09-10 | 合肥工业大学 | Pliable pressure sensor based on hollow ball structure and preparation method thereof |
| CN110455443A (en) * | 2019-08-23 | 2019-11-15 | 北京航空航天大学 | A kind of flexible capacitive sensor and preparation method thereof using the preparation of silver nanowires flexible electrode |
| CN111256888A (en) * | 2020-03-02 | 2020-06-09 | 吉林大学 | Bionic multilevel structure flexible stress and strain combined sensor and preparation method thereof |
| CN112484887A (en) * | 2020-11-09 | 2021-03-12 | 南京工业大学 | Wide-range flexible capacitive pressure sensor and preparation method thereof |
| CN113959605A (en) * | 2021-10-19 | 2022-01-21 | 广州碳思科技有限公司 | Stress sensor and stress sensing device |
| CN114054109A (en) * | 2021-11-08 | 2022-02-18 | 北京化工大学 | Blood coagulation detection micro-fluidic chip based on conductive elastomer material |
| CN114054109B (en) * | 2021-11-08 | 2022-12-27 | 北京化工大学 | Blood coagulation detection micro-fluidic chip based on conductive elastomer material |
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