CN108871388B - Optical fiber touch sensor and sensing array - Google Patents
Optical fiber touch sensor and sensing array Download PDFInfo
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- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
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Abstract
A fiber optic tactile sensor comprising a rough-surfaced contact layer comprising a sensing layer laminated to the rough-surfaced contact layer, the sensing layer comprising: the sensor comprises a sensing layer substrate and a plurality of fixing parts, wherein a vacant area is formed between every two adjacent fixing parts and is divided into a first vacant area and a second vacant area; the single-mode fiber section in the first vacant area is in a bent state; the fiber grating is prepared on the first single-mode fiber and is arranged in the second vacant area; and the strain isolation component is coated outside part of the fiber grating so as to prevent the strain of the part of the fiber grating. The problem that the traditional touch sensing device cannot know the property of an object and the sliding sense during contact and has large bending loss is solved.
Description
Technical Field
The invention belongs to the sensor technology, and particularly relates to an optical fiber touch sensor and a sensing array.
Background
In recent years, with the rapid development of artificial intelligence, the development of intelligent robots has been greatly improved, one of the key technologies involved in the development is the tactile sensor technology of robots, and a great deal of research investment has been made by many research institutions at home and abroad. In the intelligent robot technology, a touch perception sensor is a key device for judging attributes, pressure, temperature, roughness and the like of a robot and an unknown object which is contacted or grabbed by the robot. The multifunctional touch sensor applied to the robot hand can imitate the perception capability of human fingers to the maximum extent, and the intelligent robot can operate more human finger behaviors through a machine learning technology. The performance of the touch sensor directly determines the judgment accuracy of the central system of the robot, and particularly, the touch sensor is applied to instruments such as a robot and a medical artificial limb for a medical surgery which is relatively popular, and the requirements on the touch sensor are more severe. The closely distributed precise tactile sensor array can be further developed into a bionic robot Skin (robot Skin), so that other parts of the robot except the hand can sense the outside and interact. Therefore, it is very important to develop a high-performance and multifunctional smart touch sensor. At present, the technical field of touch sensing mainly includes designs and inventions based on capacitance type, piezoelectric type, piezoresistive type and the like. The flexible touch sensor based on the combination of the piezoresistive type and the capacitance type can simultaneously and accurately measure the force in the three-dimensional direction, and can reduce the interference caused by the capacitive coupling caused by the metal surface. However, the combination of piezoresistive and capacitive properties makes the sensor cell itself more complex. In addition, the sensor device is relatively complex due to heat conduction and heat insulation based on thermistor heating and a multilayer structure.
With the development of fiber optics over the years, fiber technology has also been widely used in the development of high-sensitivity sensing devices, in addition to the field of communications. Tactile sensors can also be implemented using a variety of optical sensing methods. The optical fiber sensor has the advantages of small size, light weight, flexibility, low loss and the like, can integrate a plurality of sensors on one optical fiber, and can resist strong electromagnetic interference. Therefore, there is also great flexibility and utility in developing a tactile sensor using an optical fiber sensor. However, the conventional general optical fiber touch sensor can only measure the force information, and the detection based on the light intensity also introduces a large test uncertainty. The information of temperature and stress can be measured simultaneously, but the property of an object and the smoothness in contact cannot be known, and two identical fiber Bragg gratings bring certain difficulty to preparation.
Because the standard optical fibers are used in the conventional touch sensor device, the bending loss is large, and the array arrangement cannot be dense, so that the spatial resolution is improved. At present, no mature special fiber Bragg grating touch sensor is provided in China for simultaneously sensing acting force, temperature, slip sense and object to identify attributes, and no machine skin based on a multifunctional sensor array is provided. With the rapid development of intelligent robot technology in recent years, the touch sensor and the array also have great market and development requirements.
Disclosure of Invention
The invention provides an optical fiber touch sensor and a sensing array, aiming at solving the problems that the traditional touch sensing device can not know the property of an object and the sliding sense when in contact and has large bending loss.
A fiber optic tactile sensor comprising a rough-surfaced contact layer and a sensing layer laminated thereto, wherein:
the sensing layer includes:
a sensing layer substrate having a first surface and a second surface opposite the first surface, the second surface facing the contact layer;
the plurality of fixing parts are arranged on the second surface side by side, wherein an empty area is formed between every two adjacent fixing parts, the empty area is divided into a first empty area and a second empty area, and the two adjacent second empty areas are separated by at least one first empty area;
one end of the first single-mode fiber is used for outputting and inputting laser signals, the other end of the first single-mode fiber is sequentially fixed by the plurality of fixing parts along the extending direction of the first single-mode fiber, and the segment of the single-mode fiber located in the first vacant area is in a bent state;
the fiber grating is prepared on the first single-mode fiber and is arranged in the second vacant area; and
and the strain isolation component is coated outside part of the fiber grating to prevent the strain of the part of the fiber grating.
In addition, a sensing array is further provided, and the sensing array comprises the optical fiber touch sensor, more than two optical fiber touch sensors are arranged in the array and connected by using the same first single-mode optical fiber, and the reflection wavelength of the optical fiber grating on the sensing array is increased or decreased progressively along the extension direction of the first single-mode optical fiber.
The optical fiber touch sensor can simultaneously sense the pressure and the temperature of a contact object by using an optical fiber grating technology and wavelength division multiplexing, can judge the property of the object and the slip sense when contacting the object, and forms a multifunctional touch sensor or a sensor array. By using the small-size special single-mode optical fiber, the optical power loss is reduced, and the optical fiber can be slightly bent, so that the touch sensing unit can be very compact, can be simply integrated into a touch sensor array to form a distributed sensing network, and the skin of a machine is realized. The vibration frequency under different sliding speeds can be measured through the contact surface with the rough surface, so that the sliding feeling is sensed. The touch sensor or the array can be applied to severe environments such as anti-electromagnetic interference and the like, and has high measurement sensitivity and precision and quick response; high spatial resolution is also possible by the close arrangement of the plurality of fiber gratings.
Drawings
FIG. 1 is a schematic structural diagram of a one-dimensional tactile sensor array according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a sensing layer of a minimum unit optical fiber tactile sensor provided by an embodiment of the invention;
FIG. 3 is a schematic structural diagram of a sensing layer of a one-dimensional tactile sensing array according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a two-dimensional tactile sensor array provided by an embodiment of the invention;
fig. 5 is a schematic structural diagram of applying the tactile sensing array provided by the embodiment of the invention to a palm.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 to 4, a fiber optic tactile sensor (sensing unit) 10 according to an embodiment of the present invention includes a contact layer 100 having a rough surface, a support layer 300, and a sensing layer 200 disposed therebetween. The support layer 300 is stacked on the sensing layer 200 and faces the first surface of the sensing layer 200.
The support layer 300 includes a support layer base 310 and at least one support 320; the sensing layer 200 includes a sensing layer substrate 210, a plurality of fixing members 220, a first single mode fiber 230, a fiber grating 240, and a strain isolation member 250.
The outer surface of the contact layer 100 forms a curved channel structure simulating the epidermis of human skin, and the curved channel structure can be micro-machined or 3D printed.
The sensing layer substrate 210 has a first surface facing the support layer substrate 310 and a second surface opposite to the first surface, the second surface facing the contact layer 100. The supporting portion 320 is disposed between the supporting layer substrate 310 and the sensing layer substrate 210 and respectively abuts against the first surface; the plurality of fixing parts 220 are arranged on the second surface side by side, wherein an empty area is formed between every two adjacent fixing parts 220, the empty area is divided into a first empty area 221 and a second empty area 222, and at least one first empty area 221 is arranged between every two adjacent second empty areas 222; one end of the first single-mode fiber 230 is used for outputting and inputting a laser signal, the other end of the first single-mode fiber 230 is sequentially fixed by a plurality of fixing components 220 along the extending direction thereof, and a single-mode fiber segment 231 located in the first vacant region 221 is in a bent state; the fiber grating 240 is prepared on the first single-mode fiber 230 and is disposed in the second vacant region 222; the strain isolation member 250 is wrapped around a portion of the fiber grating 240 to prevent the portion of the fiber grating 240 from straining.
It can be understood that, the number of the fixing components 220 may be more than three, forming at least two vacant areas, and the first vacant areas 221 of the single-mode fiber line segment 231 in the bent state may be disposed between two adjacent second vacant areas 222, or a plurality of first vacant areas 221 may be disposed at intervals, specifically considering the accuracy requirement of the sensor; further, the vacant areas further include a third vacant area 223 for placing the linear single-mode fiber line segment 232, and the third vacant area 223 may be located between two adjacent second vacant areas 222 or located at two end edges of the fiber optic tactile sensor 10.
In the sensing layer 200, only one fiber grating 240 and one single-mode fiber segment 231 in a bent state, that is, a first vacant region 221 and a second vacant region 222, are distributed to form a minimum sensing unit 10 (as shown in fig. 2), and more than two sensing units 10 form a sensing array 20. The sensing units 10 in the sensing array 20 are arranged in an array and connected by the same first single-mode fiber 230. Preferably, two second vacant regions 222 on the sensing array 20 adjacent to each other in the extending direction of the first single-mode optical fiber 230 are separated by at least one first vacant region 221. The sensor array 20 may be a 1 × N one-dimensional array or may form an M × N two-dimensional array. The reflection wavelength of the fiber grating 240 on the sensing array 20 increases or decreases along the extending direction of the first single-mode fiber 230. The position of the reflection wavelength is positioned in three common optical fiber working waveband windows of 850nm, 1310nm or 1550nm, and can also be selected in a visible light waveband window. As shown in fig. 1 and 3, in the one-dimensional tactile sensor array, three tactile sensing units 10 are linearly distributed, but the number of composite units 10 is not limited to 3. As shown in fig. 4, the two-dimensional 2 × 4 tactile sensor array 22 is provided, but the number of the composite sensing units 10 is not limited to 2 × 4, and may be determined according to different actual requirements.
In one embodiment, the fixing member 220 is a protrusion structure formed on the second surface, and the protrusion structure is provided with a through hole or a slit (not shown) for the first single mode fiber 230 to pass through. The bottom surface of the protruding structure can be rectangular, rhombic, trapezoidal and the like, and the top surface is an arc-shaped curved surface with the middle protruding and two lower sides. In other embodiments, the fixing element 220 may be an adhesive paste, an adhesive tape, or the like, or may be directly replaced by a groove preformed on the second surface of the sensing layer substrate 210.
The sensing layer 200 is an elastic polymer, and can be formed by 573 silica gel and a curing agent according to a mass ratio of 10: 1, mixing and curing; or the liquid polydimethylsiloxane and the corresponding curing agent can be proportioned and cured (namely PDMS); the preparation is to prepare a mold with a reverse structure in advance through micromachining or a 3D printer, pour the elastic polymer into the mold, and obtain the sensing layer substrate 210 after curing and molding. The first single mode fibers 230 having the fiber gratings 240 are distributed in a convex structure of the sensor substrate arranged at intervals in the first direction, and the first single mode fibers 230 at both ends of each fiber grating 240 have a slightly bent single mode fiber segment 231. The microbend section 231 of the single-mode fiber is bent with a semi-circular convex slope or a pre-fabricated groove, and the top of the fiber is then sealed with the same elastic polymer after the fiber distribution is completed. The complete sensing layer 200 is a thin film with a first single mode fiber 230 with a fiber grating 240 embedded in the middle.
In one example, the fiber bragg grating 240 is a fiber bragg grating, and the distance between two fixing members 220 forming a second vacant region 222 matches the length of the fiber bragg grating 240 disposed in one of the second vacant regions 222, so that the fiber bragg grating is fixed between the two fixing members 220. And a portion of the first single mode fiber 230 adjacent to the fiber bragg grating is in a microbend state and is fixed between two adjacent fixing members 220. The supporting portion 320 is a wedge-shaped protrusion structure, the supporting portions 320 are arranged side by side at intervals (periodically), the sensing layer 200 and the supporting layer 300 are also made of elastic polymer, but the supporting layer 300 has higher hardness than the sensing layer 200. The number of the fiber Bragg gratings is determined according to the size of the skin of an integrated 'machine', the reflection wavelength of each grating is different, the wavelength is increased or decreased along the trend of the optical fiber, and the wavelength positions of two adjacent gratings are not overlapped in the testing process in principle.
The strain isolation member 250 is coated on one side of the fiber grating 240 in the length direction, and the length of the strain isolation member 250 is half of the length of the fiber grating 240 coated by the strain isolation member. The strain isolation member 250 is a metal sleeve, V-groove or U-groove in which the bragg grating is placed and secured with glue. The strain isolation device is made of a metal material with good heat conductivity, can be a metal sleeve, a metal groove or any other shape, and aims to fix half of the fiber Bragg grating, so that the part of the fiber Bragg grating is not influenced by stress, but the temperature response of the part of the fiber Bragg grating is not influenced.
In one embodiment, the first vacant areas 221 are opposite to the supporting portions 320, and two or more first vacant areas 221 are aligned with two or more supporting portions 320 in a one-to-one correspondence manner. The top of the wedge-shaped protrusion of the support layer 300 supports just the micro-bending portion of the single-mode fiber of the sensing layer 200, and the fiber grating 240 is located between the two wedges. The support layer 300 is prepared by micromachining or 3D printer printing with a resilient polymer material that is harder than the sensing layer 200, but still flexible overall. The supporting layer 300 is a periodic wedge-shaped protrusion structure, and the interval period is consistent with the interval of two micro-bending protrusions of the optical fiber of the sensing layer 200. Each support 320 corresponds to a position of the bent single mode fiber segment 231 in the sensing layer 200, and the fiber bragg grating is located between the two supports 320. The sensing layer 200 and the supporting layer 300 are identical in size and shape, and are fused into a whole through the same polymer material of the sensing layer 200 to form a novel multifunctional touch sensor or array.
In another embodiment, the supporting layer 300 of the tactile sensor or array may be omitted, and only consists of the sensing layer 200 and the contact layer 100, which only reduces the sensitivity of the sensor to pressure, but the tactile sensor or array may be made thinner because the supporting layer 300 is omitted, and thus may be implemented according to actual requirements.
In a further embodiment, the fiber optic tactile sensor 10 further includes a self-heating fiber 260, the self-heating fiber 260 is disposed side by side with the fiber grating 240, the self-heating fiber 260 receives a laser signal through a second single mode fiber 270, and the self-heating fiber 260 can heat the sensing point to a specific temperature by absorbing a certain laser. The flexible self-heating optical fiber 260 is flexibly attached and used for heating the film of the part, the temperature change measured by the Bragg grating can be used for judging the property of the object to be contacted, and the distribution of the heating points can be determined according to the application requirement. In this way, a self-heating optical fiber 260 may be arranged beside the fiber grating 240 of some sensing units 10 of the sensing array 20, the length of the self-heating optical fiber is the same as that of the bragg grating, and one end of the self-heating optical fiber is connected to the second single-mode optical fiber to access the laser signal, so as to selectively heat different "machine" skin positions. Can be used for the simultaneous measurement of temperature and pressure; heating the local part to a constant temperature, and judging the attribute of the local part at the same time through different heat losses when the local part contacts different objects; when the curved channel slides in contact with the object, the slip sensation can be measured by the micro-vibration caused.
The single mode fiber in the sensing layer 200 is oriented and shaped as a "machine" skin, and can be bent at a slight radius, with the optical power loss introduced by the bend still being below 1dB at a bend radius of 3 mm. The single-mode fiber can be a common single-mode fiber insensitive to bending, and the diameter of a fiber cladding is 125 micrometers; and may be small size single mode optical fiber with cladding diameters less than 125 microns, and even up to 50 microns. In addition, the single-mode optical fiber can be a special optical fiber, and a special air hole microstructure is arranged in a cladding, so that the bending loss of the optical fiber is relatively low; the fiber Bragg grating of the type also has high sensitivity to mechanical parameters such as stress and the like, and is insensitive to temperature; polarization maintaining can be achieved, and the fiber Bragg grating can achieve simultaneous measurement of stress and temperature.
The tactile sensor and sensing array 20 can be designed as a "machine" skin, depending on various needs. An example is shown in fig. 5, where an application scheme such as a smart robot palm 1, a sensing array 20 is distributed on the tip of a finger or in the palm, and the shape and size of the sensing array are customized according to requirements. The application case column can also be other parts or artificial limbs of human body to realize the capability of sensing external contact objects
The working principle is as follows: when the sensor or sensing array 20 contacts an object, the pressure applied by the object causes the fiber bragg grating to stretch or compress, causing a red-shift or blue-shift in the reflected wavelength of the grating. Due to the design of the strain isolation device, half of the fiber Bragg gratings are not influenced by pressure, the pressure applied by an object divides the grating reflection peak into two parts, one part corresponds to the grating without the strain isolation device, and the other part corresponds to the grating with the strain isolation device. The temperature information of the object is reflected on the position change of the reflection wavelength of the whole grating, the pressure information is only reflected on the grating without the strain isolation device, and the temperature and pressure information is obtained by utilizing the drift of the two reflection peaks. When the contact object slides, the top surface of the sensing layer 200 is a contact surface, and densely distributed curved grooves can cause different vibration frequencies at different sliding rates and reflect the vibration frequencies to the reflection wavelength of the fiber bragg grating. And obtaining the slippery sensation information by analyzing the Bragg wavelength signal in a frequency domain and utilizing a machine learning technology. The self-heating optical fiber 260 introduced according to the requirement can controllably heat the temperature of the corresponding sensing point by inputting a certain laser power. When the touch sensor or the array is heated to a specific temperature and maintained, and contacts different objects, the loss of heat is measured by the corresponding fiber Bragg grating, so that the attributes of the objects are judged.
The present invention is not limited to the above-described preferred embodiments, but rather, the present invention is to be construed broadly and cover all modifications, equivalents, and improvements that fall within the spirit and scope of the present invention.
Claims (7)
1. A fiber optic tactile sensor comprising a contact layer having a rough surface and a sensing layer laminated to the contact layer, wherein:
the sensing layer includes:
a sensing layer substrate having a first surface and a second surface opposite the first surface, the second surface facing the contact layer;
the plurality of fixing parts are arranged on the second surface side by side, wherein an empty area is formed between every two adjacent fixing parts, the empty area is divided into a first empty area and a second empty area, and the two adjacent second empty areas are separated by at least one first empty area;
one end of the first single-mode fiber is used for outputting and inputting laser signals, the other end of the first single-mode fiber is sequentially fixed by the plurality of fixing parts along the extending direction of the first single-mode fiber, and the segment of the single-mode fiber located in the first vacant area is in a bent state;
the fiber grating is prepared on the first single-mode fiber and is arranged in the second vacant area; and
the strain isolation component is coated outside part of the fiber bragg grating to prevent the part of the fiber bragg grating from being strained;
the distance between the two fixing parts forming the second vacant area is matched with the length of the fiber grating arranged in the second vacant area;
the sensor comprises a sensing layer, a supporting layer and a sensing layer, wherein the sensing layer is arranged on the sensing layer and comprises a sensing layer base and at least one supporting part; the supporting parts are arranged between the supporting layer substrate and the sensing layer substrate and respectively abut against the first surface;
the first vacant areas are opposite to the supporting parts, more than two first vacant areas and more than two supporting parts are respectively aligned in a one-to-one correspondence mode, and the supporting parts are of wedge-shaped protruding structures.
2. The optical fiber tactile sensor according to claim 1, wherein the fixing member is a protrusion structure formed on the second surface, and the protrusion structure is provided with a through hole or a slit for passing the first single mode optical fiber therethrough.
3. The fiber optic tactile sensor according to claim 1, wherein the strain isolation member is coated on one side of the fiber grating in a length direction thereof, and the length of the strain isolation member is half of the length of the fiber grating coated therewith.
4. The fiber optic tactile sensor according to claim 1, wherein the fiber grating is a fiber bragg grating and the first single mode fiber is a specialty single mode fiber.
5. The fiber optic tactile sensor of any one of claims 1 to 4, wherein the strain isolation member is a metallic sleeve, a V-groove, or a U-groove.
6. The fiber optic tactile sensor according to claim 1, further comprising a self-heating fiber, the self-heating fiber being disposed side by side with the fiber grating, the self-heating fiber accessing a laser signal through a second single mode fiber.
7. A sensing array comprising two or more optical fiber tactile sensors according to any one of claims 1 to 6, wherein the two or more optical fiber tactile sensors are arranged in an array and connected by using the same first single-mode optical fiber, and the reflection wavelength of the optical fiber grating on the sensing array increases or decreases along the extending direction of the first single-mode optical fiber.
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| CN112014022B (en) * | 2020-08-21 | 2022-07-29 | 之江实验室 | Photoelectric fusion touch sensor based on micro-nano optical fiber |
| CN112212898B (en) * | 2020-09-09 | 2022-05-27 | 山东科技大学 | Intelligent skin based on small-size distributed optical fiber sensing array |
| CN112179552B (en) * | 2020-10-09 | 2021-11-05 | 南京工程学院 | Optical fiber touch sensing array and method, signal demodulation optical path and method |
| CN114608630B (en) * | 2020-12-09 | 2023-03-31 | 腾讯科技（深圳）有限公司 | Touch sensor, parameter testing method and device thereof and storage medium |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001116914A (en) * | 1999-10-14 | 2001-04-27 | Mitsubishi Electric Corp | Optical filter |
| CN2718522Y (en) * | 2004-03-12 | 2005-08-17 | 吉林大学 | Stress-strain transducer based on temperature unsensitivity of optical fiber grating |
| US7077015B2 (en) * | 2003-05-29 | 2006-07-18 | Vincent Hayward | Apparatus to reproduce tactile sensations |
| CN200952964Y (en) * | 2006-06-23 | 2007-09-26 | 周智 | Non-external influence optical fiber grating temperature sensor |
| CN101581612A (en) * | 2008-05-13 | 2009-11-18 | 本田技研工业株式会社 | Optical fibre sensor |
| CN101982744A (en) * | 2010-09-21 | 2011-03-02 | 东南大学 | Composite tactile sensor and sensor array |
| CN102661718A (en) * | 2012-05-09 | 2012-09-12 | 中国电子科技集团公司第八研究所 | Optical fiber strain sensor |
| JP2013083598A (en) * | 2011-10-12 | 2013-05-09 | Toyota Industries Corp | Physical quantity measuring system |
| CN103495981A (en) * | 2013-09-29 | 2014-01-08 | 中山大学 | Manipulator based on touch sensor |
| CN103968980A (en) * | 2014-05-20 | 2014-08-06 | 山东大学 | Novel optical fiber touch sensor array and manufacturing method thereof |
| CN205163048U (en) * | 2015-11-30 | 2016-04-20 | 湖北中医药大学 | Diagnosis by feeling pulse gloves |
| CN106289599A (en) * | 2016-07-19 | 2017-01-04 | 昆山雅宝信息科技有限公司 | Multi parameter intallingent comprehensive monitor system for hazardous gas |
| US9557862B2 (en) * | 2013-12-17 | 2017-01-31 | Industrial Technology Research Institute | Bend sensor, bend sensing method and bend sensing system for flexible display panel |
| CN107015653A (en) * | 2017-04-10 | 2017-08-04 | 南京鼓楼医院 | Data glove and interactive system based on fiber grating |
| CN107006924A (en) * | 2017-06-06 | 2017-08-04 | 中国计量大学 | It is a kind of to weave the Intelligent glove that digital flexion detects function with FBG |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7840102B2 (en) * | 2007-01-16 | 2010-11-23 | Baker Hughes Incorporated | Distributed optical pressure and temperature sensors |
| JP5312346B2 (en) * | 2007-01-24 | 2013-10-09 | ジーケイエヌ エアロスペース サービシイズ リミテッド | Temperature detection |
| WO2009146142A2 (en) * | 2008-04-03 | 2009-12-03 | University Of Washington | Clinical force sensing glove |
-
2018
- 2018-05-10 CN CN201810441777.XA patent/CN108871388B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001116914A (en) * | 1999-10-14 | 2001-04-27 | Mitsubishi Electric Corp | Optical filter |
| US7077015B2 (en) * | 2003-05-29 | 2006-07-18 | Vincent Hayward | Apparatus to reproduce tactile sensations |
| CN2718522Y (en) * | 2004-03-12 | 2005-08-17 | 吉林大学 | Stress-strain transducer based on temperature unsensitivity of optical fiber grating |
| CN200952964Y (en) * | 2006-06-23 | 2007-09-26 | 周智 | Non-external influence optical fiber grating temperature sensor |
| JP5430877B2 (en) * | 2008-05-13 | 2014-03-05 | 本田技研工業株式会社 | Tactile sensor |
| CN101581612A (en) * | 2008-05-13 | 2009-11-18 | 本田技研工业株式会社 | Optical fibre sensor |
| CN101982744A (en) * | 2010-09-21 | 2011-03-02 | 东南大学 | Composite tactile sensor and sensor array |
| JP2013083598A (en) * | 2011-10-12 | 2013-05-09 | Toyota Industries Corp | Physical quantity measuring system |
| CN102661718A (en) * | 2012-05-09 | 2012-09-12 | 中国电子科技集团公司第八研究所 | Optical fiber strain sensor |
| CN103495981A (en) * | 2013-09-29 | 2014-01-08 | 中山大学 | Manipulator based on touch sensor |
| US9557862B2 (en) * | 2013-12-17 | 2017-01-31 | Industrial Technology Research Institute | Bend sensor, bend sensing method and bend sensing system for flexible display panel |
| CN103968980A (en) * | 2014-05-20 | 2014-08-06 | 山东大学 | Novel optical fiber touch sensor array and manufacturing method thereof |
| CN205163048U (en) * | 2015-11-30 | 2016-04-20 | 湖北中医药大学 | Diagnosis by feeling pulse gloves |
| CN106289599A (en) * | 2016-07-19 | 2017-01-04 | 昆山雅宝信息科技有限公司 | Multi parameter intallingent comprehensive monitor system for hazardous gas |
| CN107015653A (en) * | 2017-04-10 | 2017-08-04 | 南京鼓楼医院 | Data glove and interactive system based on fiber grating |
| CN107006924A (en) * | 2017-06-06 | 2017-08-04 | 中国计量大学 | It is a kind of to weave the Intelligent glove that digital flexion detects function with FBG |
Non-Patent Citations (3)
| Title |
|---|
| Tactile sensors using the distributed optical fiber sensors;Jin-seok Heo et;《3rd International Conference on Sensing Technology》;20081203;第486-490页 * |
| 光纤式机器人触觉传感器滑觉特性的研究;张今瑜等;《仪器仪表学报》;19970630;第18卷(第3期);第241-244页 * |
| 基于光纤光栅的机械手指触滑觉传感研究;钱牧云等;《仪器仪表学报》;20160430;第37卷(第4期);第730-736页 * |
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