CN108871199A - A kind of dispersion shift sensor based on light wave Amplitude Ration - Google Patents
A kind of dispersion shift sensor based on light wave Amplitude Ration Download PDFInfo
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- CN108871199A CN108871199A CN201810535229.3A CN201810535229A CN108871199A CN 108871199 A CN108871199 A CN 108871199A CN 201810535229 A CN201810535229 A CN 201810535229A CN 108871199 A CN108871199 A CN 108871199A
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- light
- dispersion
- shift sensor
- wave amplitude
- light source
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The invention discloses a kind of dispersion shift sensors based on light wave Amplitude Ration.The dispersion shift sensor includes light source, the circulator, dispersion object lens being linked in sequence by optical fiber, and probe unit passes through optical fiber again and connect with circulator, and the data that probe unit obtains are input to computing unit and are calculated.The light source of the dispersion shift sensor can emit comprising there are two the light waves of wavelength, the light of different wave length focuses on the position of two different distances after passing through dispersion object lens, when testee position changes, the relative intensity for two wavelength lights that optical detector receives also can accordingly change, and can determine the displacement of testee accordingly.Dispersion shift sensor based on light wave Amplitude Ration of the invention overcomes the confocal displacement sensor of the dispersion deficiency low because of measuring speed caused by applying continuous spectrum light source and linear array detector, has obtained a kind of non-contact displacement sensor of high speed.
Description
Technical field
The invention belongs to geometric measurement fields, and in particular to a kind of dispersion shift sensor based on light wave Amplitude Ration.
Background technique
Displacement measurement is a most elementary item of geometric measurement, is accounted in industrial production, scientific research, daily life
There is very important status.With the development of science and technology, contactless displacement measurement demand is more and more, required precision
It is higher and higher.Current non-contact displacement sensor is broadly divided into inductance type, condenser type, optical profile type etc. according to working principle.Electricity
Sense formula and capacitive displacement transducer have certain requirement to the electric conductivity of measurand, and optical displacement sensor is then right
The basic no requirement (NR) of measurand, therefore optical displacement sensor is applied than wide.The work of optical displacement sensor is former
Reason is largely divided into energy method, trigonometry, the confocal method of dispersion etc..
Energy method displacement sensor is by fiber exit and collects light energy, and principle is：When testee and optical fiber
When distance changes, the light energy that optical fiber is collected into also changes therewith.Energy method displacement sensor device is simple, cost
It is low, but measurement accuracy is relatively low, applies in general to the situation not high to required precision.
Trigonometry displacement sensor determines the movement of testee by the triangle relation between emergent light and reflected light
Situation.Trigonometry displacement sensor precision is relatively high, but due to using triangle relation principle, detector, light source, camera lens
Spatial arrangement needs to meet certain relationship, therefore sensor bulk is bigger, and lateral resolution is also relatively low, measurement essence
Spend the influence vulnerable to reflective light intensity.
The confocal displacement sensor of dispersion is based on confocal microscopy principle, is focused by the light that dispersion object lens obtain different distance
Point, testee at respective distances focusing light and non-focusing parasitic reflection return, small pin hole mistake is set in receiving end
Non-focusing veiling glare is filtered, the intensity of the light of different wave length is then obtained with spectral device, the wavelength of the maximum light of luminous intensity is then right
The displacement of testee at this time is answered, to realize quick, high resolution displacement measurement.The confocal displacement sensor of dispersion
Gauge head volume is smaller, and not by electromagnetic environmental impact, adaptability is stronger.But due to the confocal displacement sensor of dispersion
Need the continuous spectrum light source to provide illumination, therefore the average energy of each wavelength is relatively low, measuring speed than it is very fast when signal
Signal-to-noise ratio is very low.Further, since detector needs to obtain the light energy information of very wide optical band, therefore acquired using line array CCD
When signal, biggish pixel quantity results in data processing speed to reduce, and then affects the acquisition speed of signal.Continuous spectrum
The measuring speed that illumination and broad wavelength band signal acquisition result in the confocal displacement sensor of dispersion can not further increase, and constrain biography
Sensor measures the application of occasion in high speed.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of dispersion shift sensors based on light wave Amplitude Ration.
Dispersion shift sensor based on light wave Amplitude Ration of the invention, its main feature is that：The dispersion shift sensor
Including the light source, circulator, dispersion object lens being linked in sequence by optical fiber, probe unit passes through optical fiber again and connect with circulator, visits
The data for surveying unit acquisition are input to computing unit and are calculated；
The probe unit is spectral detector.
The light source is the LED light source or semiconductor laser light source of multi-wavelength.
The optical fiber is single mode optical fiber or multimode fibre.
The probe unit may be replaced by spectrum element and m spectral detector, m >=2, and m spectrum is visited
Survey the emergent light that device separately detects spectrum element according to the wavelength of emergent light.
The circulator can also be replaced using coupler.
Light source in dispersion shift sensor based on light wave Amplitude Ration of the invention can emit at least comprising two waves
Long light wave, because the light energy in two Wavelength distributions is stronger, obtained Signal-to-Noise is also relatively high, and right
Two detectors, signal transmission and the available very big promotion of processing speed should be used.Due in light source and detector
The unique design of aspect, the dispersion shift sensor of the invention based on light wave Amplitude Ration can be realized very high measuring speed simultaneously
High signal-to-noise ratio is kept simultaneously, can meet the needs of scientific research, industrial production are to displacement high speed measurement.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the dispersion shift sensor of the invention based on light wave Amplitude Ration；
Fig. 2 is the structural schematic diagram of the probe unit in the dispersion shift sensor of the invention based on light wave Amplitude Ration；
In figure, 1. light source, 3. circulator, 5. dispersion object lens, 6. testee, 8. probe unit, 9. spectrum element
10. I 11. detector of detector, II 12. computing unit.
Specific embodiment
The present invention will be described in detail with reference to the accompanying drawings and examples.
Embodiment 1
As shown in Figure 1, the dispersion shift sensor based on light wave Amplitude Ration of the present embodiment includes being linked in sequence by optical fiber
Light source 1, circulator 3, dispersion object lens 5, probe unit 8 are connect by optical fiber with circulator 3 again, the data that probe unit 8 obtains
It is input to computing unit 12 to be calculated, testee 6 is placed on emergent light one end of dispersion object lens 5；
As shown in Fig. 2, the probe unit 8 is spectral detector, including spectrum element 9 and 2 detector, detector
I 10 and detector II 11 emergent light of spectrum element 9 is separately detected according to the wavelength of emergent light.The optical fiber is single mode
Optical fiber or multimode fibre.
The light source 1 of the present embodiment is made of semiconductor laser light source, and can emit includes wavelength X1=635nm and wavelength X2=
The light of 670nm, spectrum element 9 are reflection-type grating, and detector I 10 and detector II 11 are individually positioned in grating level-one and spread out
Penetrate the position that light corresponds to 635nm and 670nm wavelength；What light source 1 issued include wavelength 635nm and wavelength 670nm light it is logical
Cross optical fiber through circulator 3 be transmitted to dispersion object lens 5 close to testee 6 one end be emitted, after outgoing, wavelength 635nm and
The light of wavelength 670nm is focused on the axis of dispersion object lens 5, about 100 microns of axial spacing, is returned to after the reflection of testee 6
Dispersion object lens 5 enter circulator 3, probe unit 8 by optical fiber, and the light containing wavelength 635nm and wavelength 670nm is by spectrum point
Optical element 9 separates, and the light of wavelength 635nm enters detector I 10, and the light of wavelength 670nm enters detector II 11, detector I 10
With detector II 11 respectively simultaneously recording wavelength 635nm and wavelength 670nm light intensity I1、I2。
When in the axial direction of dispersion object lens 5 distance change occurs for testee 6, the light for two wavelength being reflected back toward
Intensity rate also changes.When testee 6 is near the focus point of wavelength 635nm light, the 635nm wavelength light of return
Intensity I1Greater than the intensity I of 670nm wavelength light2；Conversely, being returned when testee 6 is near the focus point of wavelength 670nm light
670nm wavelength light intensity I2Greater than the intensity I of 635nm wavelength light1.In this way, passing through I in conjunction with the data demarcated in advance1、I2
The displacement that testee can be calculated, specifically includes following steps：
（1）Intensity rate R=I of the light of wavelength 635nm and wavelength 670nm that calculating detector I 10 and detector II 11 record1/
I2；
（2）According to the parameter demarcated in advancea 0、a 1、a 2、…、a N, calculate the displacement of measurand。
Due to the energy centrality of laser, it is very big that the present embodiment in dispersion object lens close to the side of object obtains brightness
Focused spot, used detector sample frequency can reach 150kHz, far more than using the sensor of continuous spectrum.
M=2 of the present embodiment can improve the numerical value of m, make m >=3, m >=3 by the quantity of increase semiconductor laser light source
Data processing method it is as follows：
Assuming that there is the light of m >=3 kind wavelength, the intensity that probe unit records each wavelength light is, knot
The data demarcated in advance are closed, are passed throughThe displacement that testee can be calculated specifically includes following step
Suddenly：
（1）Calculate luminous intensity ratio be；
（2）According to the parameter demarcated in advance, calculate the displacement of measurand。
Embodiment 2
The present embodiment and the embodiment of embodiment 1 are essentially identical, and the main distinction is, the light source 1 is the LED of multi-wavelength
Light source, the circulator 3 replace with coupler, and the probe unit 8 is multi-wavelength spectrum detector.
Claims (5)
1. a kind of dispersion shift sensor based on light wave Amplitude Ration, it is characterised in that：The dispersion shift sensor includes
The light source being linked in sequence by optical fiber（1）, circulator（3）, dispersion object lens（5）, probe unit（8）Pass through optical fiber and circulator again
（3）Connection, probe unit（8）The data of acquisition are input to computing unit（12）It is calculated.
2. the dispersion shift sensor according to claim 1 based on light wave Amplitude Ration, it is characterised in that：The light source
（1）For the LED light source or semiconductor laser light source of multi-wavelength.
3. the dispersion shift sensor according to claim 1 based on light wave Amplitude Ration, which is characterized in that the optical fiber
For single mode optical fiber or multimode fibre.
4. the dispersion shift sensor according to claim 1 based on light wave Amplitude Ration, it is characterised in that：The detection
Unit（8）Including spectrum element（9）With m spectral detector, m >=2, m spectral detector according to emergent light wavelength
Separately detect spectrum element（9）Emergent light.
5. the dispersion shift sensor according to claim 1 based on light wave Amplitude Ration, it is characterised in that：Described goes in ring
Device（3）It is replaced using coupler.
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| CN201810535229.3A CN108871199A (en) | 2018-05-30 | 2018-05-30 | A kind of dispersion shift sensor based on light wave Amplitude Ration |
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| CN201810535229.3A CN108871199A (en) | 2018-05-30 | 2018-05-30 | A kind of dispersion shift sensor based on light wave Amplitude Ration |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113847956A (en) * | 2021-09-23 | 2021-12-28 | 华北水利水电大学 | Landslide sliding displacement and sliding speed monitoring method based on optical dispersion |
| CN114001645A (en) * | 2021-10-28 | 2022-02-01 | 山西大学 | Three-wavelength optical fiber point differential confocal microscopic detection method and device |
| CN115077391A (en) * | 2022-03-25 | 2022-09-20 | 上海洛丁森工业自动化设备有限公司 | Micro-displacement sensor and displacement measuring method |
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| EP0615138A2 (en) * | 1993-03-09 | 1994-09-14 | Lucas Industries Public Limited Company | Optical displacement sensor |
| CN1093163A (en) * | 1993-04-01 | 1994-10-05 | 浙江大学 | Optical fibre displacement sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113847956A (en) * | 2021-09-23 | 2021-12-28 | 华北水利水电大学 | Landslide sliding displacement and sliding speed monitoring method based on optical dispersion |
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| CN114001645A (en) * | 2021-10-28 | 2022-02-01 | 山西大学 | Three-wavelength optical fiber point differential confocal microscopic detection method and device |
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| CN115077391A (en) * | 2022-03-25 | 2022-09-20 | 上海洛丁森工业自动化设备有限公司 | Micro-displacement sensor and displacement measuring method |
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Application publication date: 20181123 |