CN108864975A - A kind of Degumming method - Google Patents

A kind of Degumming method Download PDF

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Publication number
CN108864975A
CN108864975A CN201810845929.2A CN201810845929A CN108864975A CN 108864975 A CN108864975 A CN 108864975A CN 201810845929 A CN201810845929 A CN 201810845929A CN 108864975 A CN108864975 A CN 108864975A
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China
Prior art keywords
degumming
visbreaking
glue
film
visbreaking film
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CN201810845929.2A
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CN108864975B (en
Inventor
崔庆珑
喻佳敏
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WEISHIDA SEMICONDUCTOR TECHNOLOGY (ZHANGJIAGANG) Co Ltd
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WEISHIDA SEMICONDUCTOR TECHNOLOGY (ZHANGJIAGANG) Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/30Adhesives in the form of films or foils characterised by the adhesive composition
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/06Non-macromolecular additives organic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04Homopolymers or copolymers of esters
    • C09J133/06Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C09J133/10Homopolymers or copolymers of methacrylic acid esters
    • C09J133/12Homopolymers or copolymers of methyl methacrylate
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2433/00Presence of (meth)acrylic polymer

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Abstract

The present invention provides a kind of Degumming methods.Degumming method of the invention includes the following steps:A) UV visbreaking film is fitted in on degumming face;B the UV visbreaking film) is irradiated using UV, then removes the UV visbreaking film;Wherein, before carrying out the UV irradiation, 180 ° of peel strengths of the UV visbreaking film are 7-15N/25mm.Degumming method of the invention can efficiently, conveniently, low-risk remove the residual de- of affixed object surface, and degumming effect is good, and the residual rate of residue glue is low.

Description

A kind of Degumming method
Technical field
The present invention relates to a kind of Degumming method more particularly to a kind of methods for carrying out degumming using UV visbreaking film.
Background technique
With the rapid development of adhesive industry, visbreaking film has been widely used for semiconductor, lithium battery and all kinds of mould groups Surface protection.UV visbreaking film is a kind of peel strength with higher when in use, can be lost rapidly after being irradiated by UV light The special adhesive tape of vanishing viscosity plays protection and supporting role by being adhesively fixed usually in wafer material process.
In scientific research and actual production, inevitably surface residue glue and phenomena such as degumming, how efficiently, environmental protection Ground removes it the problem of increasingly paying close attention to as people.Currently, largely removing affixed object surface residue glue and degumming in industry Method be to be wiped the residue glue on affixed object surface using organic solvent, using organic solvent erasing residue glue exist corrode affixed object The risks such as surface be easy to cause affixed object damaged surfaces.
In view of this, the present invention is specifically proposed.
Summary of the invention
The purpose of the present invention is to provide a kind of Degumming methods, and the Degumming method is not only easy to operate, and can efficiently, Conveniently, the residual de- of affixed object surface is removed to low-risk, degumming effect is good, and the residual rate of residue glue is low.
Degumming method provided by the invention, includes the following steps:
A) UV visbreaking film is fitted in on degumming face;
B the UV visbreaking film) is irradiated using UV, then removes the UV visbreaking film;
Wherein, before carrying out the UV irradiation, 180 ° of peel strengths of the UV visbreaking film are 7-15N/25mm.
Degumming method of the invention is mainly used for UV glue (hereinafter referred to as residue glue) remaining to substrate surface and removes; It to degumming face is that there is residue glue or to the surface of degumming on substrate it is understood that described.The present invention is to substrate and remaining The composition of UV glue does not limit strictly, and substrate for example can be quad flat non-pin package (QFN), printed circuit board (PCB), stainless steel (SUS), glass (GLASS) etc..
Degumming method of the invention uses 180 ° of peel strengths to carry out for the UV visbreaking film of 7-15N/25mm.If 180 ° of removings Intensity is excessive (being greater than 15N/25mm), although adhesion strength is strong, residue glue easy to form;If peel strength is too small (to be less than 7N/ 25mm), then it is not easy to remove residue glue.
Degumming method of the invention is carried out using the suitable UV visbreaking film of 180 ° of peel strengths;Before UV irradiation, energy Enough to be fitted in well on degumming face, and after the uv irradiation, the peel strength of the UV visbreaking film can significantly reduce, simultaneously Residue glue is solidified and be attached on the UV visbreaking film by two section, to can remove well to degumming face when removing UV visbreaking film On residue glue.
In the present invention, UV visbreaking film has conventional structure;Specifically, UV visbreaking film for example may include successively being bonded Substrate layer, UV visbreaking glue-line and release film layer.Preferably, the glue-line of UV visbreaking film of the invention can use the lesser glue of TG value Layer.
In concrete scheme of the present invention, the UV visbreaking film includes glue-line (i.e. UV visbreaking glue-line), and the glue-line includes original Glue, photoinitiator and curing agent;Wherein, the dosage of the photoinitiator is the 1-3% of virgin rubber solid content.That is, with solid content 100% meter, the dosage of photoinitiator are the 1-3% of virgin rubber.
Further, the photoinitiator can (i.e. 2,4,6- trimethylbenzoy-diphenies aoxidize selected from TPO Phosphine), MBF (i.e. methyl benzoylformate), photoinitiator 1173 (i.e. 2- hydroxy-2-methyl -1- phenyl -1- acetone, referred to as ) and at least one of photoinitiator 184 (i.e. 1- hydroxycyclohexyl phenyl ketone, referred to as HCPK) HMPP.
Glue-line containing above-mentioned photoinitiator can make UV visbreaking film have 180 ° of suitable peel strengths after UV irradiation, To be easily peeled off operation.
In concrete scheme of the present invention, the dosage of the curing agent is the 0.2-0.8% of virgin rubber solid content;That is, to contain admittedly 100% meter of amount, the dosage of curing agent are the 0.2-0.8% of virgin rubber solid content.Further, the curing agent can be isocyanic acid Ester curing agent.
Glue-line containing above-mentioned curing agent can make UV visbreaking film have 180 ° of suitable peel strengths before UV irradiation, So as to be removed well to the residue glue on degumming face.
In the present invention, virgin rubber can commonly use the conventional constituents of this field, and virgin rubber for example can be using acrylic glue etc..
Further, it is to be appreciated that the UV visbreaking film further includes substrate layer, the material of the substrate layer is selected from polychlorostyrene second Alkene (PVC), polyolefin (PO), ethylene-vinyl acetate copolymer (EVA) etc..
Above-mentioned substrate layer can be sufficiently bonded with being formed to degumming face well, be conducive to the removal efficiency for improving residue glue.
The present invention does not limit the thickness of each layer of UV visbreaking film strictly, wherein:The thickness of substrate layer for example can be 100 μm or so;The thickness of UV visbreaking glue-line for example can be 20 μm or so;The thickness of release film layer for example can be 38 μm or so.
In the present invention, step A) may include:
UV visbreaking film is covered in on degumming face;
To being covered with pressing to degumming face for UV visbreaking film.
Wherein, pressure mode and condition are not limited strictly, as long as UV visbreaking film can be made sufficiently to be fitted in residue glue table Face is to be conducive to degumming, such as can be pressed using modes such as weight pressure, air pressure pressures.
The present invention does not limit the condition that UV irradiates strictly;Wherein, the exposure of the UV irradiation is greater than 200mJ/cm2 , the peel strength of UV visbreaking film can be significantly reduced, to can be removed well when removing UV visbreaking film to de- The removal efficiency of residue glue in glue surface, residue glue is high.
In the present invention, before carrying out the UV irradiation, 180 ° of peel strengths of the UV visbreaking film are less than 1N/25mm, Preferably 0.2N/25mm is hereinafter, further preferably 0.1N/25mm or less.
Degumming method of the invention is carried out using UV visbreaking film, is particularly suitable for the residue glues such as the UV glue of removal substrate surface; The peel strength of the UV visbreaking film is suitable for that can either be fitted in well to the peel strength on degumming face, after furthermore UV irradiates It can significantly reduce, residue glue is solidified and is attached on UV visbreaking film by two sections, thus can be well when removing UV visbreaking film To the residue glue on degumming face, residue glue removal efficiency is high for removing.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with embodiment, it is clear that described reality Applying example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, the common skill in this field Art personnel every other embodiment obtained without making creative work belongs to the model that the present invention protects It encloses.
Embodiment 1
The UV visbreaking film of the present embodiment includes the substrate layer being successively bonded, UV visbreaking glue-line and release film layer, wherein substrate The material of layer is PVC, and the composition of glue-line is as follows:
Acrylic glue (solid content is 40% or so):100 parts;
Photoinitiator TPO:0.8 part (i.e. the 2% of virgin rubber solid content);
Isocyanate curing agent:0.2 part (i.e. the 0.5% of virgin rubber solid content).
In addition, substrate layer with a thickness of 100 μm or so;UV visbreaking glue-line with a thickness of 20 μm or so;The thickness of release film layer Degree is 38 μm or so.
The Degumming method of the present embodiment is carried out using above-mentioned UV visbreaking film UV glue remaining to SUS plate surface, degumming step It is as follows:
By above-mentioned UV visbreaking film be covered in SUS plate with UV residue glue on degumming face, to being covered with UV visbreaking film To degumming face pressure 5min or so, UV visbreaking film is made sufficiently to be fitted in above-mentioned residue glue surface;Then, using 250mJ/cm2Left and right The UV light irradiation of exposure is fitted in the UV visbreaking film on affixed object surface, declines its peeling force;Finally, UV visbreaking film is thrown off, Complete degumming operation.
180 ° of peel strengths that forward and backward UV visbreaking film is irradiated using the detection of GB/T 2792-1998 method, using microscope Residue glue situation after (200/50/10 times of amplification) detection degumming, the results are shown in Table 1.
Embodiment 2
The UV visbreaking film of the present embodiment includes the substrate layer being successively bonded, UV visbreaking glue-line and release film layer, wherein substrate The material of layer is EVA, and the composition of glue-line is as follows:
Acrylic glue (solid content is 40% or so):100 parts;
Photoinitiator 1173:1.2 parts (i.e. the 3% of virgin rubber solid content);
Isocyanate curing agent:0.32 part (i.e. the 0.8% of virgin rubber solid content).
In addition, substrate layer with a thickness of 100 μm or so;UV visbreaking glue-line with a thickness of 25 μm or so;The thickness of release film layer Degree is 50 μm or so.
The Degumming method of the present embodiment is carried out using above-mentioned UV visbreaking film UV glue remaining to glass pane surface, degumming step It is as follows:
By above-mentioned UV visbreaking film be covered in glass plate with UV residue glue on degumming face, to being covered with UV visbreaking film To degumming face pressure 10min or so, UV visbreaking film is made sufficiently to be fitted in above-mentioned residue glue surface;Then, using 220mJ/cm2Left and right The UV light irradiation of exposure is fitted in the UV visbreaking film on affixed object surface, declines its peeling force;Finally, UV visbreaking film is thrown off, Complete degumming operation.
180 ° of peel strengths that forward and backward UV visbreaking film is irradiated using the detection of GB/T 2792-1998 method, using microscope Residue glue situation after (200/50/10 times of amplification) detection degumming, the results are shown in Table 1.
Embodiment 3
The UV visbreaking film of the present embodiment includes the substrate layer being successively bonded, UV visbreaking glue-line and release film layer, wherein substrate The material of layer is PVC, and the composition of glue-line is as follows:
Acrylic glue (solid content is 40% or so):100 parts;
Photoinitiator MBF:0.4 part (i.e. the 1% of virgin rubber solid content);
Isocyanate curing agent:0.24 part (i.e. the 0.6% of virgin rubber solid content).
In addition, substrate layer with a thickness of 100 μm or so;UV visbreaking glue-line with a thickness of 22 μm or so;The thickness of release film layer Degree is 40 μm or so.
The Degumming method of the present embodiment is carried out using above-mentioned UV visbreaking film UV glue remaining to SUS plate surface, degumming step It is as follows:
By above-mentioned UV visbreaking film be covered in SUS plate with UV residue glue on degumming face, to being covered with UV visbreaking film To degumming face pressure 8min or so, UV visbreaking film is made sufficiently to be fitted in above-mentioned residue glue surface;Then, using 300mJ/cm2Left and right The UV light irradiation of exposure is fitted in the UV visbreaking film on affixed object surface, declines its peeling force;Finally, UV visbreaking film is thrown off, Complete degumming operation.
180 ° of peel strengths that forward and backward UV visbreaking film is irradiated using the detection of GB/T 2792-1998 method, using microscope Residue glue situation after (200/50/10 times of amplification) detection degumming, the results are shown in Table 1.
Embodiment 4
The UV visbreaking film of the present embodiment includes the substrate layer being successively bonded, UV visbreaking glue-line and release film layer, wherein substrate The material of layer is PO, and the composition of glue-line is as follows:
Acrylic glue (solid content is 40% or so):100 parts;
Photoinitiator 184:0.6 part (i.e. the 1.5% of virgin rubber solid content);
Isocyanate curing agent:0.08 part (i.e. the 0.2% of virgin rubber solid content).
In addition, substrate layer with a thickness of 100 μm or so;UV visbreaking glue-line with a thickness of 20 μm or so;The thickness of release film layer Degree is 40 μm or so.
The Degumming method of the present embodiment is carried out using above-mentioned UV visbreaking film UV glue remaining to SUS plate surface, degumming step It is as follows:
By above-mentioned UV visbreaking film be covered in SUS plate with UV residue glue on degumming face, to being covered with UV visbreaking film To degumming face pressure 5min or so, UV visbreaking film is made sufficiently to be fitted in above-mentioned residue glue surface;Then, using 280mJ/cm2Left and right The UV light irradiation of exposure is fitted in the UV visbreaking film on affixed object surface, declines its peeling force;Finally, UV visbreaking film is thrown off, Complete degumming operation.
180 ° of peel strengths that forward and backward UV visbreaking film is irradiated using the detection of GB/T 2792-1998 method, using microscope Residue glue situation after (200/50/10 times of amplification) detection degumming, the results are shown in Table 1.
Embodiment 5
The UV visbreaking film of the present embodiment includes the substrate layer being successively bonded, UV visbreaking glue-line and release film layer, wherein substrate The material of layer is PVC, and the composition of glue-line is as follows:
Acrylic glue (solid content is 40% or so):100 parts;
Photoinitiator TPO:1.0 parts (i.e. the 2.5% of virgin rubber solid content);
Isocyanate curing agent:0.16 part (i.e. the 0.4% of virgin rubber solid content).
In addition, substrate layer with a thickness of 100 μm or so;UV visbreaking glue-line with a thickness of 20 μm or so;The thickness of release film layer Degree is 38 μm or so.
The Degumming method of the present embodiment is carried out using above-mentioned UV visbreaking film UV glue remained on surface to pcb board, degumming step It is as follows:
By above-mentioned UV visbreaking film be covered in pcb board with UV residue glue on degumming face, to being covered with UV visbreaking film To degumming face pressure 5min or so, UV visbreaking film is made sufficiently to be fitted in above-mentioned residue glue surface;Then, using 250mJ/cm2Left and right The UV light irradiation of exposure is fitted in the UV visbreaking film on affixed object surface, declines its peeling force;Finally, UV visbreaking film is thrown off, Complete degumming operation.
180 ° of peel strengths that forward and backward UV visbreaking film is irradiated using the detection of GB/T 2792-1998 method, using microscope Residue glue situation after (200/50/10 times of amplification) detection degumming, the results are shown in Table 1.
Embodiment 6
The UV visbreaking film of the present embodiment includes the substrate layer being successively bonded, UV visbreaking glue-line and release film layer, wherein substrate The material of layer is PVC, and the composition of glue-line is as follows:
Acrylic glue (solid content is 40% or so):100 parts;
Photoinitiator TPO:0.8 part (i.e. the 2% of virgin rubber solid content);
Isocyanate curing agent:0.12 part (i.e. the 0.3% of virgin rubber solid content).
In addition, substrate layer with a thickness of 100 μm or so;UV visbreaking glue-line with a thickness of 20 μm or so;The thickness of release film layer Degree is 38 μm or so.
The Degumming method of the present embodiment is carried out using above-mentioned UV visbreaking film UV glue remaining to QFN plate surface, degumming step It is as follows:
By above-mentioned UV visbreaking film be covered in QFN plate with UV residue glue on degumming face, to being covered with UV visbreaking film To degumming face pressure 5min or so, UV visbreaking film is made sufficiently to be fitted in above-mentioned residue glue surface;Then, using 250mJ/cm2Left and right The UV light irradiation of exposure is fitted in the UV visbreaking film on affixed object surface, declines its peeling force;Finally, UV visbreaking film is thrown off, Complete degumming operation.
180 ° of peel strengths that forward and backward UV visbreaking film is irradiated using the detection of GB/T 2792-1998 method, using microscope Residue glue situation after (200/50/10 times of amplification) detection degumming, the results are shown in Table 1.
Reference examples 1
In this reference examples, in addition to the composition of UV visbreaking film mesoglea and 1 difference of embodiment, remaining with 1 phase of embodiment Together.
Wherein, the composition of this reference examples UV visbreaking film mesoglea is as follows:
Acrylic glue (solid content is 40% or so):100 parts;
Photoinitiator TPO:0.8 part (i.e. the 2% of virgin rubber solid content);
Isocyanate curing agent:0.06 part (i.e. the 0.15% of virgin rubber solid content).
180 ° of peel strengths that forward and backward UV visbreaking film is irradiated using the detection of GB/T 2792-1998 method, using microscope Residue glue situation after (200/50/10 times of amplification) detection degumming, the results are shown in Table 1.
Reference examples 2
In this reference examples, in addition to the composition of UV visbreaking film mesoglea and 5 difference of embodiment, remaining with 5 phase of embodiment Together.
Wherein, the composition of this reference examples UV visbreaking film mesoglea is as follows:
Acrylic glue (solid content is 40% or so):100 parts;
Photoinitiator TPO:1.0 parts (i.e. the 2.5% of virgin rubber solid content);
Isocyanate curing agent:0.8 part (i.e. the 2% of virgin rubber solid content).
180 ° of peel strengths that forward and backward UV visbreaking film is irradiated using the detection of GB/T 2792-1998 method, using microscope Residue glue situation after (200/50/10 times of amplification) detection degumming, the results are shown in Table 1.
The peel strength and residual gum content testing result of table 1UV visbreaking film
Finally it should be noted that:The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations;To the greatest extent Present invention has been described in detail with reference to the aforementioned embodiments for pipe, those skilled in the art should understand that:Its according to So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into Row equivalent replacement;And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution The range of scheme.

Claims (10)

1. a kind of Degumming method, which is characterized in that include the following steps:
A) UV visbreaking film is fitted in on degumming face;
B the UV visbreaking film) is irradiated using UV, then removes the UV visbreaking film;
Wherein, before carrying out the UV irradiation, 180 ° of peel strengths of the UV visbreaking film are 7-15N/25mm.
2. Degumming method according to claim 1, which is characterized in that the UV visbreaking film includes glue-line, the glue-line packet Include virgin rubber, photoinitiator and curing agent;Wherein, the dosage of the photoinitiator is the 1-3% of virgin rubber solid content.
3. Degumming method according to claim 2, which is characterized in that the photoinitiator is selected from TPO, MBF, photoinitiator At least one of 1173 and photoinitiator 184.
4. Degumming method according to claim 2, which is characterized in that the dosage of the curing agent is virgin rubber solid content 0.2-0.8%.
5. Degumming method according to claim 4, which is characterized in that the curing agent is isocyanate curing agent.
6. Degumming method according to claim 2, which is characterized in that the virgin rubber is acrylic glue.
7. Degumming method according to claim 1, which is characterized in that the UV visbreaking film further includes substrate layer, the base The material of material layer is selected from PVC, PO or EVA.
8. Degumming method according to any one of claims 1 to 7, which is characterized in that step A) include:
UV visbreaking film is covered in on degumming face;
To being covered with pressing to degumming face for UV visbreaking film.
9. Degumming method according to any one of claims 1 to 7, which is characterized in that the irradiation of the UV irradiation is greater than 200mJ/cm2
10. Degumming method according to any one of claims 1 to 7, which is characterized in that before carrying out the UV irradiation, institute 180 ° of peel strengths for stating UV visbreaking film are less than 1N/25mm.
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CN111234744A (en) * 2020-03-16 2020-06-05 佛山市佳世达薄膜科技有限公司 Efficient UV (ultraviolet) detackifying protective film and preparation method thereof
CN111693368A (en) * 2020-06-15 2020-09-22 苏州高泰电子技术股份有限公司 Test method for microscopic characterization performance of wafer cutting adhesive tape

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