CN108734259A - A kind of point-like laser module focusing detection method and detection device - Google Patents
A kind of point-like laser module focusing detection method and detection device Download PDFInfo
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- CN108734259A CN108734259A CN201810461866.0A CN201810461866A CN108734259A CN 108734259 A CN108734259 A CN 108734259A CN 201810461866 A CN201810461866 A CN 201810461866A CN 108734259 A CN108734259 A CN 108734259A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06M—COUNTING MECHANISMS; COUNTING OF OBJECTS NOT OTHERWISE PROVIDED FOR
- G06M1/00—Design features of general application
- G06M1/27—Design features of general application for representing the result of count in the form of electric signals, e.g. by sensing markings on the counter drum
- G06M1/272—Design features of general application for representing the result of count in the form of electric signals, e.g. by sensing markings on the counter drum using photoelectric means
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Abstract
The invention discloses a kind of point-like laser module group focusing detection apparatus and its detection methods, spot size dynamic change parameter is acquired by laser facula imaging system, record beam pattern parameter of the laser in focal position of point-like laser module transmitting, target focal length is set by precision displacement table again, and further obtain quantification comparison and the Fitting Analysis result of the hot spot characteristic real time data in focussing process and focus spot characteristic, point-like laser module can be improved and obtain the accuracy and consistency of target focal length by adjusting lens position, it effectively prevent stray light in environment to change the influence brought to focusing accuracy.
Description
Technical field
The invention belongs to laser particle counter sensor application field, more particularly to a kind of point-like laser module focusing detection
Device and its detection method.
Background technology
In recent years, it is to improve air quality, China continues to increase environmental renovation dynamics, pellet in surrounding air
Monitoring network building-up work carry out national rapid, using light scattering method detect the miniaturized sensors of particulate in air by
It is widely adopted in the advantages such as small, light-weight.
Laser particle counter is the core component in above-mentioned miniaturized sensors, and main operational principle is：It is small-sized to swash
The laser beam that light device is sent out is focused by front lens group；The atmospheric samples of sampling system acquisition are passed through with constant flow
Laser beam focus region；Stronger light scattering occurs in the laser irradiation to particulate matter of focal point；The photoelectricity being placed in outside light path is visited
Number of pulses and intensity that device scatters light by detection are surveyed, passes through laser beam foucing in the unit interval by that can be obtained after calculating
The particulate matter quantity and size at place, to which the particle concentration value in current atmospheric environment be calculated.
In the miniaturized sensors that light scattering method detects particulate in air, the accuracy of laser beam foucing position is to it
It measures consistency and will produce larger impact, therefore, the accurate focusing to point-like laser module is the production of laser particle counter
A crucial step in the process.The common focussing process based on artificial judgment is generally as follows：Point-like laser module is fixed,
A diffusing reflection plate (infrared laser can be blocked using infrared imaging) is fixed on perpendicular to the formulation position of laser beam again, is then adjusted
The lens position of node shape laser module, and the size variation of laser facula on diffusing reflection plate is observed, until adjusting to hot spot most
Until small.
In focussing process, accuracy of focusing and focal length calibration consistency are to ensure laser particle counter outgoing
Essential condition.The optical parameter and mismachining tolerance of the lens of point-like laser module are the key factors for leading to accuracy of focusing problem
One of.In different laser modules, it is therefore possible to use the different designs scheme such as balsaming lens group, single-curved surface lens, bitoric lens,
This several lens-like focal length formula is different, and since point-like laser light source has been embedded in module, image space intercept in production
It can not accurately measure, real focal length can not accurately be calculated by hot spot form other than focus and triangle geometrical principle；In addition by
There is also differences for the focal length of lens in the mismachining tolerance of batch production, each point-like laser module, have been further exacerbated by focusing
Accuracy problem.Naked eyes judge that spot size is easy to be influenced by factors such as ambient lighting, vision differences, lead to the consistent of focusing
Property is unable to get guarantee.
In conclusion the common focussing process based on artificial judgment is primarily present two problems：Accuracy of focusing and coke
Away from calibration consistency problem, the large-scale production and application of laser particle counter sensor are constrained.
Invention content
During being directed to existing laser particle counter sensor production, using the point based on artificial judgment
Shape laser module focussing process is difficult the problem of ensureing accuracy of focusing and focus adjustment consistency, to provide a kind of point-like laser mould
Group focusing detection device and its detection method.
To achieve the goals above, the present invention uses following technical scheme：A kind of point-like laser module group focusing detection apparatus,
Including：Positioning base, zero precision displacement table of school, focusing precision displacement table, laser module positioning fixture, laser facula imaging sensing
Device fixed platform, laser facula sensor, analysis record system；
Wherein described zero precision displacement table of school and focusing precision displacement table are separately fixed on positioning base；Zero essence of the school
Dense bit moving stage is dotted for fixing for driving the laser module positioning fixture being fixed thereon, the laser module positioning fixture
Laser module；The focusing precision displacement table is for driving the laser facula imaging sensor fixed platform being fixed thereon；
The laser facula sensor linking parsing records system, and collected representation of laser facula data are transferred to point
New record system；The analysis record system is used to carry out data analysis and the record of real-time hot spot characteristic parameter.
Further, zero precision displacement table of school and focusing precision displacement table all respectively include upper and lower sliding block and are arranged in
Between both connections sliding rail, the sliding block fixes displacement platform and positioning base, and top shoe is distinguished fixed laser module and positioned
Fixture or laser facula imaging sensor fixed platform.
Further, sliding rail is two orthogonal X-direction sliding rails and Y direction sliding rail, and in top shoe X-axis side
The microspindle of connecting sliding rail is respectively arranged with to side and Y direction side, to control top shoe in X-direction and Y-axis
The movement in direction.
Further, to laser facula sensor side positioning end outstanding, positioning end in the middle part of laser module positioning fixture
It is provided with laser emitting hole, positioning fixture is provided with the module locating slot communicated with laser emitting hole, axis and school in middle part
Zero precision displacement table plane is parallel, and there are two the modules communicated with locating slot to fix spiral shell for setting at the top of laser module positioning fixture
Hole, to fixed laser module；The bottom of laser module positioning fixture is provided with clamp-securing bore, to zero accurate displacement of school
Platform is fixed.
Further, the photaesthesia face of laser facula sensor is perpendicular to displacement platform.
Further, analysis record system includes storage module, analysis module, logging modle and sound and light signal module；
The wherein described storage module stores the collected light spot image for including all information in real time；The analysis module is used
To analyze the characteristic parameter for acquiring light spot image；The logging modle is used for the analysis result of History Parser Module；Institute
Sound and light signal module is stated to be prompted to send out sound and light signal.
Further, analysis module judges hot spot boundary using edge detection method, calculates shared by hot spot according to light spot image
Sum of all pixels, facula mass center position, each hot spot pixel brightness value；And judge the focus of hot spot, by real-time beam pattern
Parameter is compared and is fitted with focus spot characteristic parameter, and fitting result obtains the accuracy of focusing and mistake of point-like laser module
Difference.
A kind of focusing detecting method of point-like laser module, includes the following steps：
Point-like laser module to be regulated is fixed using positioning fixture, and point-like laser module group focusing detection apparatus is zeroed
It is demarcated with coordinate；Representation of laser facula data are acquired from laser facula imaging sensor, the image collected data are carried out real
When hot spot characteristic parameter analysis and record；
Focusing precision displacement table is adjusted, the multigroup beam pattern parameter of dynamic acquisition determines focus spot characteristic parameter and complete
At record；
Focusing precision displacement table is adjusted, target focal length is set；
The lens position in dotted mode of laser group is adjusted, point-like laser module group focusing detection apparatus detects and judges that focusing is accurate
True property and error amount；
According to the lens position in device feedback result constantly regulate point-like laser module, until error amount complies with standard.
Further, the acquisition representation of laser facula data carry out real-time hot spot characteristic parameter analysis and record, specifically
Include the following steps：
Target search is carried out in the picture, judges hot spot boundary using edge detection method, and required to focusing detection
Key area is marked；
The brightness value of sum of all pixels, facula mass center position, each hot spot pixel shared by hot spot is calculated in key area,
And it completes to record.
Further, it the multigroup beam pattern parameter of the dynamic acquisition and completes to record, specifically includes following steps：
Focusing precision displacement table is adjusted, laser facula imaging sensor lighting surface is moved to non-on light source extreme direction
Focal position；Continue to adjust focusing precision displacement table, laser facula imaging sensor is moved to far from light source extreme direction, it is dotted
Each group beam pattern parameter in laser module group focusing detection apparatus dynamically recording moving process；
Device judges according to the feature of focus spot characteristic parameter and records unique focus hot spot.
The present invention has the beneficial effect that：
1, focusing precision displacement table degree of regulation of the invention is 0.2 μm, and uses standard gauge block and degree of regulation for 0.2
μm zero precision displacement table of adjusting school ensure that target focal length calibration accuracy.
2, by News Search, point-like laser mould is determined and recorded using laser facula imaging sensor and computerized algorithm
The laser of group transmitting avoids the factors focus point such as ambient lighting, vision difference in the focus spot characteristic parameter of focal position
The influence of hot spot ensure that the accuracy of focus spot feature recognition.
3, the method detection for being compared and being fitted with focus spot characteristic parameter using real-time hot spot characteristic parameter is dotted
Laser module error of focusing, employee, can be burnt by real focal length and target by finely tuning the lens position in point-like laser module
Control errors away between ensure that the consistency of focus adjustment in the fixed allowable range of industry standard gauge.
By the use to point-like laser module detection method provided by the invention and detection device, focusing hilllock can be improved
The production efficiency of position module detection, effectively reduces the labor intensity of employee, is lifted at laser particle in large-scale production and application
The measurement accuracy and consistency of sensor for countering.
Description of the drawings
Fig. 1 is the structural schematic diagram of point-like laser module group focusing detection apparatus provided in an embodiment of the present invention.
Fig. 2 is the implementation flow chart of point-like laser module focusing detection method provided in an embodiment of the present invention.
Fig. 3 is image schematic diagram of the non-focus position point-like laser of the embodiment of the present invention on laser facula sensor,
Wherein (1) is proximate on light source extreme direction；(2) it is far from light source extreme direction.
Fig. 4 is that laser facula of the focal position point-like laser provided in an embodiment of the present invention on laser facula sensor is special
Levy image schematic diagram.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
As shown in Figure 1, point-like laser module group focusing detection apparatus includes positioning base 1, and zero precision displacement table 2 of school, laser
Module positioning fixture 3, precision displacement table 4 of focusing, laser facula imaging sensor fixed platform 5, laser facula sensor 6 swash
Light beam pattern analyzes computer 7.
The sliding block of zero precision displacement table 2 of school is screwed with positioning base 1, the upper cunning of zero precision displacement table 2 of school
Block is connected by sliding rail with the sliding block of zero precision displacement table 2 of school, and sliding rail includes X-direction sliding rail and Y direction sliding rail, on
Sliding block X-direction side and Y direction side are respectively arranged with the microspindle of connecting sliding rail, to control top shoe in X-axis
The movement in direction and Y direction.
The top shoe of zero precision displacement table 2 of school is connect by screw with mode of laser positioning group fixture 3, laser module locating clip
To laser facula sensor side positioning end outstanding, positioning end is provided with laser emitting hole at tool middle part, in the middle part of positioning fixture in
It is provided with the module locating slot communicated with laser emitting hole, axis is parallel with zero precision displacement table plane of school, and laser module is fixed
There are two the module fixing threaded holes communicated with locating slot for setting at the top of position fixture, to fixed laser module.Laser module positions
The bottom of fixture is provided with clamp-securing bore, to be fixed with zero precision displacement table of school.The module of laser module positioning fixture is fixed
Position slot is located at the left side of mode of laser positioning group fixture 3, and positioning end is located at the right side of mode of laser positioning group fixture 3, positioning end end face
It is a smooth flat for carrying laser emitting hole.
Focusing precision displacement table 4 is screwed with positioning base 1, and the top shoe of focusing precision displacement table 4 passes through cunning
Rail is connected with the sliding block of focusing precision displacement table 4, and upper slider completes displacement by microspindle level pressure, and sliding rail includes X
Axis direction sliding rail and Y direction sliding rail, top shoe X-direction side and Y direction side are respectively arranged with the thousand of connecting sliding rail
Divide screw rod, precision is 0.2 μm, to control movement of the top shoe in X-direction and Y direction.
The top shoe of focusing precision displacement table 4 is connect by screw with laser facula imaging sensor fixed platform 5, laser
Hot spot imaging sensor fixed platform 5 is connect by screw with laser facula sensor 6, the photaesthesia of laser facula sensor 6
Perpendicular to laser beam, laser facula sensor 6 converts optical signals to after electric signal through signal transmssion line and laser light in face
Spot signature analysis computer 7 connects, and laser facula signature analysis computer 7 is for analyzing and recording laser hot spot morphological feature.
Analysis record system is provided in analysis computer, analysis record system includes storage module, analysis module, record
Module and sound and light signal module.Wherein storage module stores the collected light spot image for including all information in real time.Analyze mould
Block is analyzed to the characteristic parameter to acquisition light spot image.Logging modle is used for the analysis result of History Parser Module.Sound
Optical signal module is prompted success of having focused to send out sound and light signal.
Analysis module judges hot spot boundary according to light spot image, using edge detection method, calculate sum of all pixels shared by hot spot,
Facula mass center position, each hot spot pixel brightness value；And judge the focus of hot spot, by real-time hot spot characteristic parameter and focus
Beam pattern parameter is compared and is fitted, and fitting result obtains the accuracy of focusing and error amount of point-like laser module.
Fig. 2 shows the implementation process of point-like laser module focusing detection method provided in an embodiment of the present invention, uses school
After zero precision displacement table completes school zero, point-like laser device position is moved repeatedly, beam pattern is acquired by laser facula sensor
Image data, then to the bright of sum of all pixels, facula mass center position, each hot spot pixel shared by the hot spot in beam pattern image
Angle value is analyzed, and is determined focus spot characteristic image according to multigroup dynamic hot spot characteristic image, is then passed through precision displacement table
Target focal length is set, and adjusts the lens in dotted mode of laser group, makes beam pattern image to be detected and focus spot characteristic pattern
The comparison of picture in prescribed limit, realizes a kind of point-like laser module focusing detection method with error of fitting.Details are as follows：
In step s 201, point-like laser module group focusing detection apparatus zero is demarcated with coordinate；
In step S202, representation of laser facula data are acquired from laser facula imaging sensor, to the image collected
Data carry out real-time hot spot characteristic parameter analysis and record；
In step S203, focusing precision displacement table is adjusted, the multigroup beam pattern parameter of dynamic acquisition determines focus spot
Characteristic parameter simultaneously is completed to record；
In step S204, focusing precision displacement table is adjusted, target focal length is set；
In step S205, the lens position in dotted mode of laser group is adjusted, point-like laser module group focusing detection apparatus is certainly
It is dynamic to detect and judge accuracy of focusing and error amount；
In step S206, according to the lens position in device feedback result constantly regulate point-like laser module, until accidentally
Difference complies with standard.
In embodiments of the present invention, image can be acquired by laser facula imaging sensor, it is collected to be
The one secondary complete image as shown in Fig. 3 (1), Fig. 3 (2), Fig. 4 for including all due all information of hot spot.
Then, the image collected data are carried out implementing beam pattern Parameter analysis and record, step S202 is specially：
Step 1. carries out target search in the picture, judges hot spot boundary using edge detection method, and detect institute to focusing
The key area needed is marked；
Step 2. calculates sum of all pixels (i.e. facula area), facula mass center position shared by hot spot, each in key area
The brightness value of hot spot pixel, and complete to record.
From the foregoing, it will be observed that the laser that can be directed to different-waveband selects corresponding bandpass filter to be passed with laser facula imaging
Sensor can effectively avoid influence of the factors such as ambient lighting, vision difference in beam pattern parameter analysis process.In addition,
The pixel cell size of currently used laser facula imaging sensor can accomplish 4 μm of 4 μ m hereinafter, higher resolution ratio phase
The accuracy of hot spot morphological analysis is greatly improved to visually observing.
Then, focus spot characteristic parameter is determined by dynamic collecting method and completes to record, above-mentioned steps S203 is specific
For：
Step 1. adjusts focusing precision displacement table, and laser facula imaging sensor lighting surface is moved to close to source ends side
Upward non-focus position, as shown in Fig. 3 (1), the spot energy distribution in figure relatively dissipates, and has multiple centroid positions, and facula area
Larger, laser facula signature analysis computer real-time analysis simultaneously records this beam pattern parameter；
Step 2. continues to adjust focusing precision displacement table, and laser facula imaging sensor is moved to far from light source extreme direction
Dynamic, laser facula signature analysis computer dynamic records each group beam pattern parameter in moving process, and Fig. 3 (3) is focusing essence
Hot spot form of the dense bit moving stage in the spacing place far from source ends；
The judgement of beam pattern parameter is at step 3. beam pattern analysis computer focus point：Hot spot has unique barycenter
Position, the hot spot gross energy that facula area is minimum, light spot energy is concentrated, focusing detects in required key area do not reduce,
As shown in Fig. 4, hot spot in figure is that beam pattern analyzes computer and passes through the focus spot characteristic pattern that confirms after calculating and record
Picture.
At this point, according to step S204, focusing precision displacement table is adjusted, target focal length, laser facula feature at this time are set
There are deviations for parameter and focal point laser facula；
Next, executing the focussing process that step S205 starts dotted mode of laser group, specific method is：Adjust point-like laser
Lens position in module, beam pattern analyzes computer, and analysis calculates present laser beam pattern parameter and focus in real time automatically
The deviation and correlation for locating laser facula characteristic parameter, so that the personnel of focusing understand current accuracy of focusing and error in real time
Value；
In step S206, focusing personnel need to adjust the lens in dotted mode of laser group repeatedly according to device feedback result
Position, when error amount complies with standard, beam pattern analysis computer sends out sound and light signal automatically, prompts success of having focused, at this time
The accurate focusing of this point-like laser module can be completed.
If desired the point-like laser module focusing work of mass is carried out, it is only necessary to repeat step S201 to S206, you can
Ensure the consistency of mass point-like laser module focal position.
The foregoing is merely illustrative of the preferred embodiments of the present invention, all the present invention's not to this limitation present invention
All any modification, equivalent and improvement etc., should all be included in the protection scope of the present invention made by within spirit and principle.
Claims (10)
1. a kind of point-like laser module group focusing detection apparatus, it is characterised in that including：Positioning base, is adjusted zero precision displacement table of school
Burnt precision displacement table, laser module positioning fixture, laser facula imaging sensor fixed platform, laser facula sensor, analysis
Record system；
Wherein described zero precision displacement table of school and focusing precision displacement table are separately fixed on positioning base；The accurate position in the school zero
Moving stage is for driving the laser module positioning fixture being fixed thereon, and the laser module positioning fixture is for fixing point-like laser
Module；The focusing precision displacement table is for driving the laser facula imaging sensor fixed platform being fixed thereon, laser light
Spot sensor is fixed on the stationary platform；
The laser facula sensor linking parsing records system, and collected representation of laser facula data are transferred to analysis note
Recording system；
The analysis record system is used to carry out data analysis and the record of real-time hot spot characteristic parameter.
2. point-like laser module group focusing detection apparatus according to claim 1, it is characterised in that：Zero accurate displacement of the school
Platform and focusing precision displacement table all respectively include upper and lower sliding block and the sliding rail in both intermediate connections are arranged, and the sliding block will
Displacement platform is fixed with positioning base, and top shoe distinguishes fixed laser module positioning fixture or laser facula imaging sensor is fixed and put down
Platform.
3. point-like laser module group focusing detection apparatus according to claim 2, it is characterised in that：The sliding rail is two phases
Mutually vertical X-direction sliding rail and Y direction sliding rail, and be respectively arranged in top shoe X-direction side and Y direction side
The microspindle of connecting sliding rail, to control movement of the top shoe in X-direction and Y direction.
4. point-like laser module group focusing detection apparatus according to claim 1, it is characterised in that：The laser module positioning
To laser facula sensor side positioning end outstanding in the middle part of fixture, positioning end is provided with laser emitting hole, positioning fixture middle part
It is inside provided with the module locating slot communicated with laser emitting hole, axis is parallel with zero precision displacement table plane of school, laser module
There are two the module fixing threaded holes communicated with locating slot for setting at the top of positioning fixture, to fixed laser module；Laser module is fixed
The bottom of position fixture is provided with clamp-securing bore, to be fixed with zero precision displacement table of school.
5. with according to point-like laser module group focusing detection apparatus described in claim 1, it is characterised in that：The laser facula sensing
The photaesthesia face of device is perpendicular to displacement platform.
6. point-like laser module group focusing detection apparatus according to claim 1, it is characterised in that：The analysis record system
Including storage module, analysis module, logging modle and sound and light signal module；
The wherein described storage module stores the collected light spot image for including all information in real time；The analysis module is to right
The characteristic parameter of acquisition light spot image is analyzed in real time in real time, and by real-time hot spot characteristic parameter and focus spot characteristic parameter
It is compared and is fitted, the accuracy of focusing and error amount of point-like laser module are obtained according to fitting result；The logging modle
Analysis result for History Parser Module；The sound and light signal module carries out prompting to focus successfully to send out sound and light signal.
7. point-like laser module group focusing detection apparatus according to claim 6, it is characterised in that：The analysis module according to
Light spot image judges hot spot boundary using edge detection method, calculates sum of all pixels, facula mass center position, Mei Geguang shared by hot spot
The brightness value of spot pixel；And judge the focus of hot spot, real-time hot spot characteristic parameter and focus spot characteristic parameter are carried out pair
Than with fitting, fitting result obtains the accuracy of focusing and error amount of point-like laser module.
8. a kind of detection method being carried out point-like laser module focusing using any described device of claim 1 to 7, feature are existed
In including the following steps：
Point-like laser module to be regulated is fixed using positioning fixture, and point-like laser module group focusing detection apparatus is zeroed and is sat
Mark calibration；Representation of laser facula data are acquired from laser facula imaging sensor, Real-Time Optical is carried out to the image collected data
Spot characteristic parameter is analyzed and record；
Focusing precision displacement table is adjusted, the multigroup beam pattern parameter of dynamic acquisition determines focus spot characteristic parameter and completes to remember
Record；
Focusing precision displacement table is adjusted, target focal length is set；
The lens position in dotted mode of laser group is adjusted, point-like laser module group focusing detection apparatus detects and judges accuracy of focusing
With error amount；
According to the lens position in device feedback result constantly regulate point-like laser module, until error amount complies with standard.
9. focusing detecting method according to claim 8, it is characterised in that：The acquisition representation of laser facula data carry out
Real-time hot spot characteristic parameter analysis and record, specifically include following steps：
Target search is carried out in the picture, judges hot spot boundary using edge detection method, and required key is detected to focusing
Region is marked；
The brightness value of sum of all pixels, facula mass center position, each hot spot pixel shared by hot spot is calculated in key area, and complete
At record.
10. focusing detecting method according to claim 8, it is characterised in that：The multigroup beam pattern ginseng of dynamic acquisition
It counts and completes to record, specifically include following steps：
Focusing precision displacement table is adjusted, laser facula imaging sensor lighting surface is moved to the non-focus on light source extreme direction
Position；Continue to adjust focusing precision displacement table, by laser facula imaging sensor to far from light source extreme direction movement, point-like laser
Each group beam pattern parameter in module group focusing detection apparatus dynamically recording moving process；
Device judges according to the feature of focus spot characteristic parameter and records unique focus hot spot.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112532863A (en) * | 2019-09-19 | 2021-03-19 | 福州润森电气自动化有限公司 | Automatic ultraviolet image focusing method of solar blind ultraviolet camera |
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| US20080135724A1 (en) * | 2006-12-12 | 2008-06-12 | Technology Research Center National Applied Research Laboratories | Automatic focus device and method thereof |
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Application publication date: 20181102 |