CN108726473A - A kind of processing method of surface micro-structure array - Google Patents
A kind of processing method of surface micro-structure array Download PDFInfo
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- CN108726473A CN108726473A CN201810508208.2A CN201810508208A CN108726473A CN 108726473 A CN108726473 A CN 108726473A CN 201810508208 A CN201810508208 A CN 201810508208A CN 108726473 A CN108726473 A CN 108726473A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
- B81C1/00492—Processes for surface micromachining not provided for in groups B81C1/0046 - B81C1/00484
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- Milling, Broaching, Filing, Reaming, And Others (AREA)
Abstract
The present invention discloses a kind of processing method of surface micro-structure array, belongs to surface micro-structure Ultra-precision Turning field.The processing method is that one or more special machining tools fine cutter are fixed on base circumferential face, in the speed of mainshaftn, working deptha p Machined parameters under, control workpiece laterally or longitudinally feed speed and the amount of feeding, realize the processing and manufacturing of surface micro-structure array.By controlling the magnitude relationship between the speed of mainshaft, feed-speed and the workpiece amount of feeding, the plano-concave that has that different size can be disposably processed in workpiece surface distributes alternately feature or the surface micro-structure array of pointed category feature.Compared to other surface micro-structure processing methods, the present invention has the advantages that process is few, easy to operate, high in machining efficiency, processing cost is low, free of contamination, it is easily achieved the control of surface micro-structure shape and feature sizes, can be applied to the surface micro-structure processing and manufacturing of the materials such as metal, ceramics, glass.
Description
Technical field
The present invention relates to a kind of processing methods of surface micro-structure array, belong to surface micro-structure Ultra-precision Turning field.
Background technology
Surface micro-structure refers to certain specific shape and reaching micron even the basic structure list of nano-scale magnitude
Member with many new physics and chemical characteristic, such as can reinforce workpiece surface corrosion resistance and wearability, realize super thin
Aqueous or Superhydrophilic plays the effect etc. of reducing noise and drag, has in fields such as optics, mechano-electronic, biomedicine and military projects
Important application value.Currently, there are two types of the manufacturing methods of surface micro-structure：One is material stacking methods, logical in initial surface
Cross own growth, the mode of reacting condition forms new construction, as vapor deposition method be using hot steam obtain deposition materials gas
Body molecule, atom or ion have the advantages that feed stock conversion is high, deposition film purity is high, but this method processing conditions is stringent, makes
It is higher to obtain production cost；Another kind is material removing process, removes some structures of initial surface using certain energy and leaves specific
Object construction, obtain basic microstructure unit, as photoetching technique, focused ion beam technology, laser micro/nano processing, nanometer pressure
Print technology, mechanical micro-nano technology technology etc..That presently, there are equipment is expensive for photoetching, focused ion beam and laser micro/nano processing technology,
The disadvantage of high processing costs, nanometer embossing can only provide the coining of single step, and it is increasingly complex to realize can not to carry out alignment
Structure, and pressuring diaphragm cost of manufacture is very high.Compared to more above-mentioned several surface micro-structure manufacturing methods, mechanical micro-nano technology technology tool
It is high efficiency, at low cost and the advantages of more complicated surface texture can be processed, have in surface micro-structure manufacturing field
Have broad application prospects.
Invention content
The object of the present invention is to provide a kind of processing methods of surface micro-structure array to be passed through using special machining tool
The speed of mainshaft, feed-speed and the workpiece amount of feeding are controlled, well-regulated surface micro-structure array can be processed, realizes table
The manufacture of face micro-structure.
The technical solution adopted in the present invention is as follows：
A kind of processing method of surface micro-structure array, includes the following steps：
（1）The pollutant for removing workpiece to be processed surface obtains clean workpiece surface, and is fixed in work after drying
On platform；
（2）Special machining tool is mounted on machine tool chief axis；
（3）According to the material properties of workpiece, the radius of gyration of special machining toolrAnd fine cutter on special machining tool
QuantityN, set the speed of mainshaftn、Feed-speedv w And working deptha p ；
（4）Work pieces process face is carried out, to knife, starting to process；
（5）The processing method of the surface micro-structure array has the following two kinds processing method：
Processing method one：Workpiece is fed along X-direction, and feed speed isv w , special machining tool processes in workpiece surface
One row's microstructure unit, later workpiece fed along Y direction, the amount of feeding ism, special machining tool processes next row micro-structure
Unit repeats the above action, you can process surface micro-structure array；
Processing method two：Fine cutter on special machining tool often processes a microstructure unit, workpiece in workpiece surface
It is fed along Y direction, the amount of feeding ism, until completing the processing of first row microstructure unit, workpiece is fed along X-direction later,
The amount of feeding is △d, continue to process next row microstructure unit, repeat the above action, you can process surface micro-structure array；
（6）After workpiece surface micro structure array process finishing, the pollutant of workpiece surface is removed, completes processing.
The special machining tool is fixed one on base circumferential or is equidistantly fixed more fine cutter, such as gold
Hard rock cutter, hard alloy cutter, sintex or alloy-steel cutter, every point of a knife fine cutter is at a distance from matrix axle center
It is equal, and the point of a knife of fine cutter is in the same plane perpendicular to matrix axial line.
In the processing method one：
（1）WhenWhen, one section of undressed region, work are had between two neighboring microstructure unit
Part surface forms the surface micro-structure array that plano-concave distributes alternately；
（2）WhenWhen, fine cutter generates staggered form processing, workpiece surface shape in workpiece surface
At the surface micro-structure array of pointed class.
In the processing method two：
（1）WhenWhen, workpiece surface forms the surface micro-structure array that plano-concave distributes alternately；
（2）WhenWhen, workpiece surface forms the surface micro-structure array of pointed class.
The present invention has the advantages that process is few, easy to operate, high in machining efficiency, processing cost is low, is turned by controlling main shaft
Magnitude relationship between speed, feed-speed and the workpiece amount of feeding, can disposably process surface micro-structure of different shapes
Array.
Description of the drawings
Fig. 1 is a kind of machining sketch chart of surface micro-structure array, wherein 1 indicates special machining tool, and 2 indicate workpiece,
3 indicate workbench.
Fig. 2 is special machining tool schematic diagram, wherein 1-1 indicates that fine cutter, 1-2 indicate matrix.
Fig. 3 is the surface micro-structure array schematic diagram that plano-concave distributes alternately.
Fig. 4 is the surface micro-structure array schematic diagram of pointed class.
Specific implementation mode
Specific implementation mode one：A kind of processing method of surface micro-structure array is described in detail combined with Figure 1 and Figure 2, including
Following steps：
（1）The pollutant for removing 2 surface of workpiece to be processed obtains clean 2 surface of workpiece, and is fixed in work after drying
Make on platform 3；
（2）Special machining tool 1 is mounted on machine tool chief axis；
（3）According to the material properties of workpiece 2, the radius of gyration of special machining tool 1rAnd fine knife on special machining tool 1
Has the quantity of 1-1N, set the speed of mainshaftn, feed-speedv w , working deptha p ；
（4）2 machined surface of workpiece is carried out, to knife, starting to process；
（5）The processing method of the surface micro-structure array has the following two kinds processing method：
Processing method one：Workpiece 2 is fed along X-direction, and feed speed isv w , special machining tool 1 processes on 2 surface of workpiece
First row microstructure unit, later workpiece 2 fed along Y direction, the amount of feeding ism, it is micro- that special machining tool 1 processes next row
Structural unit repeats the above action, you can process surface micro-structure array；
Processing method two：Fine cutter 1-1 on special machining tool 1 often processes a microstructure unit on 2 surface of workpiece,
Workpiece 2 is fed along Y direction, and the amount of feeding ism, until completing the processing of first row microstructure unit, workpiece 2 is along X-axis side later
To feeding, amount of feeding △d, continue to process next row microstructure unit, repeat the above action, you can process surface micro-structure
Array；
（6）After 2 surface micro-structure array process finishing of workpiece, the pollutant on 2 surface of removal workpiece completes processing.
Specific implementation mode two：The special machining tool 1 is described in detail combined with Figure 1 and Figure 2, characterized in that matrix
One or equidistantly fixed more fine cutter 1-1 is fixed on 1-2 circumference, such as diamond cutter, hard alloy cutter, Stupalox
Tool or alloy-steel cutter, every point of a knife fine cutter 1-1 is equal at a distance from the axle center matrix 1-2, and the knife of fine cutter 1-1
Point is in the same plane perpendicular to matrix 1-2 axial lines.
Specific implementation mode three：A kind of processing side of surface micro-structure array in conjunction with described in specific implementation mode one
The processing method one is described in detail in method and Fig. 1, Fig. 2, Fig. 3 and Fig. 4：
（1）WhenWhen, one section of undressed region is had between two neighboring microstructure unit,
2 surface of workpiece forms the surface micro-structure array that plano-concave distributes alternately；
（2）WhenWhen, fine cutter 1-1 generates staggered form processing, workpiece 2 in workpiece surface
Surface forms the surface micro-structure array of pointed class.
Specific implementation mode four：A kind of processing side of surface micro-structure array in conjunction with described in specific implementation mode one
The processing method two is described in detail in method and Fig. 1, Fig. 3 and Fig. 4：
（1）WhenWhen, 2 surface of workpiece forms the surface micro-structure array that plano-concave distributes alternately；
（2）WhenWhen, 2 surface of workpiece forms the surface micro-structure array of pointed class.
Claims (4)
1. a kind of processing method of surface micro-structure array, which is characterized in that include the following steps：
（1）Remove workpiece to be processed（2）The pollutant on surface obtains clean workpiece after drying（2）Surface, and be fixed
In workbench（3）On；
（2）By special machining tool（1）On machine tool chief axis；
（3）According to workpiece（2）Material properties, special machining tool（1）The radius of gyrationrAnd special machining tool（1）On
Fine cutter（1-1）QuantityN, set the speed of mainshaftn, feed-speedv w , working deptha p ；
（4）To workpiece（2）Machined surface carries out, to knife, starting to process；
（5）The processing method of the surface micro-structure array has the following two kinds processing method：
Processing method one：Workpiece（2）It is fed along X-direction, feed speed isv w , special machining tool（1）In workpiece（2）Surface
First row microstructure unit is processed, later workpiece（2）It is fed along Y direction, the amount of feeding ism, special machining tool（1）Processing
Go out next row microstructure unit, repeats the above action, you can process surface micro-structure array；
Processing method two：Special machining tool（1）On fine cutter（1-1）In workpiece（2）Surface often processes a micro- knot
Structure unit, workpiece（2）It is fed along Y direction, the amount of feeding ism, until completing the processing of first row microstructure unit, later workpiece
（2）△ is fed along X-directiond, continue to process next row microstructure unit, repeat the above action, you can process the micro- knot in surface
Structure array；
（6）Workpiece（2）After surface micro-structure array process finishing, workpiece is removed（2）The pollutant on surface completes processing.
2. a kind of processing method of surface micro-structure array according to claim 1, which is characterized in that it is described special plus
Work tool（1）, matrix（1-2）One is fixed on circumference or is equidistantly fixed more fine cutter（1-1）, such as diamond tool
Tool, hard alloy cutter, sintex or alloy-steel cutter, it is every fine cutter（1-1）Point of a knife and matrix（1-2）Axle center
Apart from equal, and fine cutter（1-1）Point of a knife perpendicular to matrix（1-2）In the same plane of axial line.
3. a kind of processing method of surface micro-structure array according to claim 1, which is characterized in that the processing side
Formula one：
（1）WhenWhen, one section of undressed region, workpiece are had between two neighboring microstructure unit（2）
Surface forms the surface micro-structure array that plano-concave distributes alternately；
（2）WhenWhen, fine cutter（1-1）Staggered form processing, workpiece are generated in workpiece surface（2）Table
Face forms the surface micro-structure array of pointed class.
4. a kind of processing method of surface micro-structure array according to claim 1, which is characterized in that the processing side
Formula two：
（1）WhenWhen, workpiece（2）Surface forms the surface micro-structure array that plano-concave distributes alternately；
（2）WhenWhen, workpiece（2）Surface forms the surface micro-structure array of pointed class.
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Cited By (3)
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| CN111320132A (en) * | 2020-02-18 | 2020-06-23 | 杭州电子科技大学 | Method and device for preparing multi-scale functional microstructure with high-hardness surface |
| CN111515412A (en) * | 2020-05-12 | 2020-08-11 | 山东理工大学 | Cross-scale hierarchical microstructure creation method |
| CN111889763A (en) * | 2020-03-02 | 2020-11-06 | 广东工业大学 | High-consistency preparation method of micro-nano composite structure |
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| CN111889763A (en) * | 2020-03-02 | 2020-11-06 | 广东工业大学 | High-consistency preparation method of micro-nano composite structure |
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| CN111515412A (en) * | 2020-05-12 | 2020-08-11 | 山东理工大学 | Cross-scale hierarchical microstructure creation method |
| CN111515412B (en) * | 2020-05-12 | 2022-08-09 | 山东理工大学 | Cross-scale hierarchical microstructure creation method |
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