CN108704897A - The cleaning device and clean method of coating machine nozzle - Google Patents
The cleaning device and clean method of coating machine nozzle Download PDFInfo
- Publication number
- CN108704897A CN108704897A CN201810488441.9A CN201810488441A CN108704897A CN 108704897 A CN108704897 A CN 108704897A CN 201810488441 A CN201810488441 A CN 201810488441A CN 108704897 A CN108704897 A CN 108704897A
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- coating machine
- cleaning device
- machine nozzle
- puff prot
- plane
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Coating Apparatus (AREA)
Abstract
Disclose a kind of cleaning device and clean method of coating machine nozzle, wherein cleaning device includes and matched first slot of the coating machine nozzle shape, first slot includes the joint face on the first inclined-plane, the second inclined-plane and connection first inclined-plane and second inclined-plane, it is characterized in that, including puff prot and the bleeding point positioned at the puff prot periphery on first inclined-plane and second inclined-plane.The coating machine nozzle is moved in first slot of cleaning device, the puff prot and the bleeding point start simultaneously at work, cleaning solution is pushed to the bleeding point of both sides by the air-flow that puff prot sprays, the cleaning solution of air-flow and nozzle slot periphery that puff prot sprays is pumped by bleeding point, air motion exists only in the periphery of coating machine nozzle slit without passing through slit, to only carry out cleaning drying to the slit periphery of coating machine nozzle, without the coating fluid drying in accelerating slits, avoid nozzle that choking phenomenon occurs.
Description
Technical field
The present invention relates to liquid crystal coating technology field, relate more specifically to a kind of cleaning device of coating machine nozzle with
And clean method.
Background technology
Currently, the light blockage coating of large scale flat-panel monitor production line produces and uses slit Photoresisting coating machines.For low viscous
High volatile coating fluid material is spent, it is improper using nozzle cleaning can be encountered in the slit Photoresisting coating machines of traditional flat-panel monitor
Caused by spray nozzle clogging, strip without coating pollute the problems such as.Therefore, in the production of extensive light blockage coating, slit photoresist applies
Cloth machine nozzle need to keep cleaning, to ensure coating quality and yield.Usual slit light blockage coating board is clear equipped with special nozzle
Clean device carries out automated cleaning to nozzle.
The nozzle cleaning method of the prior art is in direct contact the method for whisking off, cleaning solution hydro-peening method, liquid gas cleaning method.But
It is in direct contact method of whisking off and there is for a long time the problems such as using abrasion nozzle, cleaning solution hydro-peening method exists can not for different photoresists
The problems such as fully cleaning.
A kind of method of cleaning nozzle in order to solve the above problem is liquid gas cleaning method, first uses cleaning solution washer jet, then
Pass through N2Purging cleaning.This method is store in cleaning process, in cleaning device has cleaning solution, nozzle not to be contacted with cleaning solution,
The wetting of nozzle is kept by the natural volatilization steam of cleaning solution, it is possible to reduce the choking phenomenon of nozzle.But for low viscosity
High volatile coating fluid material, due to N2Purge accelerates drying process of the material in nozzle slot so that Shao Liangji
After plate coating, it may appear that material is killed and blockage phenomenon in nozzle slot outlet, to influence next coating.
In conclusion not only to avoid nozzle that choking phenomenon occurs during cleaning nozzle, but also to ensure to be coated with
The not cleaned liquid pollution of liquid.
Invention content
Problem solved by the invention is to provide a kind of cleaning device and clean method of coating machine nozzle, to nozzle
The outer wall on periphery can be to avoid the obstruction of nozzle itself while carrying out cleaning dry.
According to an aspect of the present invention, a kind of cleaning device of coating machine nozzle is provided, including with the coating machine nozzle
Matched first slot of shape, first slot include the first inclined-plane, the second inclined-plane and connection first inclined-plane and described the
The joint face on two inclined-planes, first slot run through two opposite faces of the cleaning device, first inclined-plane and described
Include puff prot and the bleeding point positioned at the puff prot periphery on second inclined-plane.
Preferably, the puff prot and the bleeding point are in horizontally extending slit-shaped.Preferably, it is in slit
The puff prot and the bleeding point of shape are arranged in parallel, and the puff prot is consistent with the depth of the bleeding point.
Preferably, each puff prot corresponds to a pair of bleeding point, and a pair of bleeding point is with the puff prot
Symmetry axis is arranged symmetrically.Preferably, the joint face is equipped at least one second slot, the second slot all round closure.
Preferably, the cleaning device is made of resistant material.
According to another aspect of the present invention, a kind of clean method of coating machine nozzle is provided comprising：By the coating machine
Nozzle moves in first slot of the cleaning device of any of the above-described；The puff prot and the bleeding point start simultaneously at work
Make, the coating machine nozzle cleaning is dried.
Preferably, total jet amount of the puff prot is less than or equal to total rate of air sucked in required of the bleeding point on its periphery.
Preferably, the appearance on first inclined-plane of the cleaning device, second inclined-plane and the coating machine nozzle
The vertical range in face is 300 microns to 50 microns.
Preferably, the coating machine nozzle lateral extension starts simultaneously at work in the puff prot and the bleeding point
Afterwards, the clean method further includes：The cleaning device does uniform speed scanning along the extension direction of the coating machine nozzle and moves.
The cleaning device and clean method of coating machine nozzle according to the present invention, cleaning device include and the coating machine
Matched first slot of nozzle form, wherein on first inclined-plane and second inclined-plane of the first slot include puff prot and
Bleeding point positioned at the puff prot periphery.The coating machine nozzle is moved in first slot of cleaning device, the spray
Gas port and the bleeding point start simultaneously at work, and the air-flow that puff prot sprays pushes the cleaning solution that nozzle slot periphery is adhered to
The bleeding point of both sides, the N that puff prot sprays2It is pumped by bleeding point with the cleaning solution of nozzle slot periphery attachment, air motion is only
It is present in the periphery of coating machine nozzle slit without passing through slit, to only be cleaned to the slit periphery of coating machine nozzle
It is dry, without taking away the coating fluid in slit, avoid nozzle that choking phenomenon occurs.
In a preferred embodiment, the puff prot and the bleeding point are in slit-shaped, are in the jet of slit-shaped
Mouth and the bleeding point are arranged in parallel, wherein each puff prot corresponds to a pair of bleeding point, a pair of pumping
Gas port is arranged symmetrically using the puff prot as symmetry axis, and during cleaning, preferably total jet amount of puff prot is less than or equal to it
Total rate of air sucked in required of the bleeding point on periphery so that cleaning gas tream is controlled in the presumptive area on each puff prot periphery, real
Now to the accurate cleaning on coating machine nozzle periphery.
First inclined-plane, second inclined-plane of the cleaning device are vertical with the outer surface of the coating machine nozzle
Distance can be 1000 microns to 10 microns, in a preferred embodiment, first inclined-plane of the cleaning device, described the
The vertical range of the outer surface of two inclined-planes and the coating machine nozzle is 300 microns to 50 microns so that puff prot, bleeding point with
The outer surface of coating machine nozzle forms significant local draught head, and the gas that each puff prot sprays is limited in periphery by draught head
Between bleeding point, accurate gas area of isolation is formed, the gas of ejection will not be mixed with surrounding air, avoid cleaning device
Puff prot is in the blocking that jet expansion formation air blast causes low viscosity high volatile coating fluid to be killed in jet expansion and generates
Problem, to ensure that coating quality and product yield.In addition, during cleaning, nozzle one end is moved to close to cleaning
The position of the two side walls of device does not need nozzle and is in direct contact with cleaning device, so as to avoid cleaning device to nozzle
The abrasion and pollution of side can extend the service life of coating machine nozzle, cost-effective.
The coating machine nozzle can be lateral extension, in a preferred embodiment, in the puff prot and the pumping
After gas port starts simultaneously at work, the clean method further includes：The cleaning device is along the extension direction of the coating machine nozzle
Uniform speed scanning movement is done, to be cleaned to entire coating machine nozzle.
Description of the drawings
By referring to the drawings to the description of the embodiment of the present invention, above-mentioned and other purposes of the invention, feature and
Advantage will be apparent from.
Fig. 1 shows the structural schematic diagram of the preprocessing module of coating machine；
Fig. 2 shows the stereograms of the cleaning device of the coating machine nozzle of the embodiment of the present invention；
Fig. 3 shows the vertical view of the cleaning device of the coating machine nozzle of the embodiment of the present invention；
Fig. 4 shows stereoscopic schematic diagram of the cleaning device of embodiment of the present invention when to coating machine nozzle cleaning；
Fig. 5 shows schematic cross-section of the cleaning device of embodiment of the present invention when to coating machine nozzle cleaning；
Fig. 6 shows the flow chart of the clean method of the embodiment of the present invention；
Fig. 7 to Figure 10 shows the structural schematic diagram of each step in coating machine preprocessing process.
Specific implementation mode
Hereinafter reference will be made to the drawings is more fully described the present invention.In various figures, identical element is using similar attached
Icon is remembered to indicate.For the sake of clarity, the various pieces in attached drawing are not necessarily to scale.In addition, may not show in figure
Go out certain well known parts.
Many specific details of the present invention, such as the structure of component, material, size, processing work is described hereinafter
Skill and technology, to be more clearly understood that the present invention.But it just as the skilled person will understand, can not press
The present invention is realized according to these specific details.
It should be appreciated that when describing the structure of component, it is known as positioned at another floor, another area when by a floor, a region
When domain " above " or " top ", can refer to above another layer, another region, or its with another layer, it is another
Also include other layers or region between a region.Also, if by part turnover, this layer, a region will be located at it is another
Layer, another region " following " or " lower section ".
The cleaning device of the coating machine nozzle of the embodiment of the present invention is used for pretreated before coating process in coating machine
Cheng Zhong.
Fig. 1 shows that the structural schematic diagram of the preprocessing module of coating machine, preprocessing module can be provided in operational module
Side, preprocessing module substantially may include standby container 200, cleaning device 100 and roller component 300.Coating machine nozzle
400 initial positions are located on standby container 200, and in preprocessing process, coating machine nozzle 400 moves up arrival cleaning device
At 100, cleaning device 100 clears up coating machine nozzle 400, later coating machine nozzle 400 move at roller component 300 into
Row further shoots out processing in advance, and the coating machine nozzle 400 for completing above-mentioned pre-treatment step can move to the operational module of coating machine
It starts to work at place.
The stereogram and vertical view of the cleaning device of the coating machine nozzle of the embodiment of the present invention is shown respectively in Fig. 2 and Fig. 3, figure
Stereoscopic schematic diagram and schematic cross-section of the cleaning device when to coating machine nozzle cleaning is shown respectively in 4 and Fig. 5.Coating machine sprays
Mouth 400 can be slot coated nozzle, and lower end cross sectional shape is substantially v-shaped, and is laterally extended, and have slit at symmetry axis
410.The cleaning device 100 of the present embodiment be one can be placed in entity on horizontal plane, including with 400 shape of coating machine nozzle
The first slot 110 matched, the first slot 110 run through two opposite faces of cleaning device 100, and the first slot 110 includes the first inclined-plane
111, the joint face 113 on the second inclined-plane 112 and connection the first inclined-plane 111 and the second inclined-plane 112, for example, in cleaning device 100
Surface dig up a part formed the first slot.Include puff prot 120 and being located on first inclined-plane 111 and the second inclined-plane 112
The bleeding point 130 on 120 periphery of puff prot.During cleaning, puff prot 120 and bleeding point 130 start simultaneously at work, puff prot
120 blow N to the periphery of nozzle slot 4102, what cleaning solution liquid film that the outside of nozzle slot 410 is adhered to was blown out by puff prot 120
N2Push the bleeding point 130 of both sides to, then the air-flow and cleaning solution that puff prot 120 sprays is taken away by bleeding point 130, air motion
The periphery of coating machine nozzle slit 410 is existed only in without passing through slit 410, to only to the slit 410 of coating machine nozzle
Periphery carries out cleaning drying, without because air-flow is by the coating fluid drying in slit 410, avoiding nozzle that choking phenomenon occurs.
In the present embodiment, puff prot 120 and bleeding point 130 are in slit-shaped, further, puff prot 120 and pumping
Gas port 130 is the slit that horizontal direction extends, arranged in parallel in the puff prot 120 and bleeding point 130 of slit-shaped, is being hung down
Histogram is mutually aligned upwards.On first inclined-plane 111, a puff prot 120, each puff prot are respectively equipped on the second inclined-plane 112
120 can correspond to a pair of of bleeding point 130, and a pair of of bleeding point 130 is arranged symmetrically with respectively corresponding to puff prot 120 for symmetry axis.It is excellent
The depth of selection of land, puff prot 120 and bleeding point 130 is consistent, and length is also roughly the same, during cleaning, preferred puff prot
120 total jet amount is less than or equal to total rate of air sucked in required of the bleeding point 130 on its periphery so that cleaning gas tream is controlled in each jet
In the presumptive area on 120 peripheries of mouth, the accurate cleaning to 410 periphery of slit of coating machine nozzle is realized.
At least one second slot 140 is also provided on joint face 113, the waste liquid for collecting discharge.For example, the second slot
140 all round closure, can accommodate waste liquid, and joint face and the second slot 140 are arranged in parallel with horizontal plane.The cleaning device
100 can be made of resistant material, to improve its service life.
The present invention also provides a kind of clean method of coating machine nozzle, Fig. 6 shows the flow of the clean method of the present embodiment
Figure, carrying out clean process using this method can be with reference to Fig. 6 and Fig. 4 and Fig. 5.The clean method includes step S101
To step S103.
In step S101, coating machine nozzle 400 is moved in the first slot 110 of the cleaning device 100 of previous embodiment.
In the present embodiment, coating machine nozzle 400 can be lateral extension, and cleaning device 100 is in substantially bulk, after step S101,
Cleaning device 100 can be located at the at one end of 400 lateral extension of coating machine nozzle.First inclined-plane 111 of cleaning device 100,
The vertical range L of two inclined-planes 112 and the outer surface of coating machine nozzle 400 can be 1000 microns to 10 microns, it is preferable that cleaning
First inclined-plane 111 of device 100, the second inclined-plane 112 and the vertical range L of the outer surface of coating machine nozzle 400 be 300 microns extremely
50 microns.
In step s 102, puff prot 120 and bleeding point 130 start simultaneously at work, coating machine nozzle 400 are cleaned dry
It is dry.Specifically, the shape of coating machine nozzle 400 matches with the first slot 110, and puff prot 120 and bleeding point 130 start simultaneously at
Work, puff prot 120 spray N to 400 periphery of coating machine nozzle2, the air-flow that puff prot 120 sprays is by 400 slit periphery of nozzle
The cleaning solution of attachment pushes the bleeding point 130 of both sides, the N that bleeding point 130 sprays puff prot 120 to2With 400 slit periphery of nozzle
The cleaning solution of attachment pumps, and completes cleaning drying.In the present embodiment, total jet amount of puff prot 120 is less than or equal to its periphery
Total rate of air sucked in required of bleeding point 130.
Such as Fig. 4, coating machine nozzle 400 can be lateral extension, therefore be opened simultaneously in puff prot 120 and bleeding point 130
After beginning work, the clean method further includes step S103：Cleaning device 100 does even along the extension direction of coating machine nozzle 400
Fast scanning motion, to be cleaned to entire coating machine nozzle 400.
The cleaning device 100 and clean method of coating machine nozzle according to the present invention move to coating machine nozzle 400 clearly
In first slot 110 of clean device, puff prot 120 and bleeding point 130 start simultaneously at work, and the air-flow that puff prot 120 sprays will
Cleaning solution pushes the bleeding point 130 of both sides to, and the cleaning solution on 410 periphery of air-flow and slit that puff prot 120 sprays is by bleeding point
130 pump, therefore air motion exists only in the periphery of coating machine nozzle slit 410 without passing through slit 410, to only right
410 periphery of slit of coating machine nozzle carries out cleaning drying, without drying the coating fluid in slit 410, avoids nozzle
Choking phenomenon.
Puff prot 120 and bleeding point 130 are in slit-shaped, mutually flat in the puff prot 120 and bleeding point 130 of slit-shaped
Row setting, wherein each puff prot 120 corresponds to a pair of of bleeding point 130, a pair of of bleeding point 130 is with puff prot 120 for symmetry axis pair
Claiming arrangement, during cleaning, preferably total jet amount of puff prot is less than or equal to total rate of air sucked in required of the bleeding point 130 on its periphery,
So that cleaning gas tream is controlled in the presumptive area on 120 periphery of each puff prot, the slit 410 weeks to coating machine nozzle is realized
The accurate cleaning on side.
The vertical range on the first inclined-plane 111 of cleaning device 100, the second inclined-plane 112 and the outer surface of coating machine nozzle 400
L can be 1000 microns to 10 microns, preferably the first inclined-plane 111 of cleaning device 100, the second inclined-plane 112 and coating machine nozzle
The vertical range L of 400 outer surface is 300 microns to 50 microns so that puff prot 120, bleeding point 130 and coating machine nozzle
400 outer surface forms significant local draught head, and the gas that each puff prot 120 sprays is limited in periphery and is evacuated by draught head
Between mouth 130, accurate gas area of isolation is formed, the gas of ejection will not be mixed with surrounding air, avoid cleaning device 100
Puff prot 120 form air blast in jet expansion (slit 410) and cause low viscosity high volatile coating fluid dry in jet expansion
The blockage problem fallen and generated, to ensure that coating quality and product yield.In addition, during cleaning, coating machine is sprayed
400 one end of mouth is moved to the position of the two side walls close to cleaning device 100, does not need coating machine nozzle 400 and cleaning device
100 are in direct contact, so as to avoid cleaning device 100 that from can extending painting to the abrasion and pollution of 400 side of coating machine nozzle
The service life of cloth machine nozzle 400, it is cost-effective.
The cleaning device 100 and clean method of the coating machine nozzle of the present invention are used applied to coating machine nozzle 400
Anti-blocking effect is particularly effective when the coating fluid of low viscosity high volatile.Below in conjunction with attached drawing 7- Figure 10 to application present invention cleaning
The entire preprocessing process of device 100 and clean method is described in detail.
Such as Fig. 7, first, coating machine nozzle 400 is located on standby container 200, and cleaning solution or dilute is accommodated in standby container 200
Liquid is released, it, can be to avoid the molten of coating fluid for keeping the slit 410 (outlet of coating machine nozzle) of coating machine nozzle 400 to moisten
Matter remains in slit 410 and leads to coating defects.
Such as Fig. 8 a, for common FPD (flat-panel monitor, the Flat Panel Display) photoresists of viscosity about 4Cp
Coating fluid, mobility is weaker, volatility is not also high.410 lower end of slit of coating machine nozzle 400 can be hovered in cleaning solution
Top so that coating machine nozzle 400 is not contacted with cleaning solution, and coating machine nozzle is kept by the natural volatilization steam of cleaning solution
400 wetting.
Such as Fig. 8 b, for the coating fluid of the low viscosity high volatile of viscosity about 1Cp, mobility is very strong, volatility is higher.
410 lower end of slit of coating machine nozzle 400 is immersed in cleaning solution, can make the residual of 400 side of coating machine nozzle in this way
Coating fluid is adequately dissolve in cleaning solution, from without spraying cleaning solution to coating machine nozzle 400 to dissolve residual coating fluid again.
Experiments have shown that the coating fluid of viscosity about 1Cp, due to its high volatile, cleaning solution steam cannot keep coating machine to spray
The wetting of mouth 400 causes the coating fluid of viscosity about 1Cp to be remained in 410 lower end of slit of coating machine nozzle 400, causes to block.Cause
410 lower end of slit of coating machine nozzle 400 is immersed for the coating fluid of viscosity about 1Cp and keeps coating machine in cleaning solution by this
The moistening of the slit 410 of nozzle 400, can not only make coating machine nozzle 400 keep moistening, but also can it is significantly more efficient will be residual
The coating fluid stayed is dissolved in cleaning solution.
Such as Fig. 9, then, coating machine nozzle 400 can move up, and coating machine nozzle 400 is moved to previous embodiment
In first slot 110 of cleaning device 100, starts the clean method of above-described embodiment description, coating machine nozzle 400 is carried out clearly
It is clean.After completing cleaning, cleaning device 100 returns its position of readiness and is resetted.
Specifically, coating machine nozzle 400 is moved to first in the first slot 110 of cleaning device 100 of previous embodiment.Clearly
Clean device 100 can be located at the at one end of 400 lateral extension of coating machine nozzle.First inclined-plane 111, second of cleaning device 100
Inclined-plane 112 and the outer surface of coating machine nozzle 400 match.
Then, puff prot 120 and bleeding point 130 start simultaneously at work, and puff prot 120 is peripheral to coating machine nozzle 400
N2 is sprayed, the cleaning solution that 400 slit periphery of nozzle is adhered to is pushed to the bleeding point 130 of both sides by the air-flow that puff prot 120 sprays, and is taken out
Gas port 130 pumps the N2 that puff prot 120 sprays and the cleaning solution that 400 slit periphery of nozzle is adhered to, and coating machine nozzle 400 is clear
Clean drying.Wherein, total jet amount of puff prot 120 is less than or equal to total rate of air sucked in required of the bleeding point 130 on its periphery.
Finally, after puff prot 120 and bleeding point 130 start simultaneously at work, cleaning device 100 is from coating machine nozzle
400 at one end is done uniform speed scanning along its extension direction and is moved, to be cleaned to entire coating machine nozzle 400.
It is preferred that the first inclined-plane 111 of cleaning device 100, the second inclined-plane 112 are vertical with the outer surface of coating machine nozzle 400
Distance L is 300 microns to 50 microns so that puff prot 120, bleeding point 130 and the outer surface of coating machine nozzle 400 are formed significantly
Local draught head, between the gas that each puff prot 120 sprays is limited in periphery bleeding point 130 by draught head, formed accurate
Gas area of isolation, the gas of ejection will not mix with surrounding air, avoid the puff prot 120 of cleaning device 100 in nozzle
Outlet (slit 410) forms the blocking that air blast causes low viscosity high volatile coating fluid to kill and generate in jet expansion and asks
Topic, to ensure that coating quality and product yield.Such as Figure 10, after device 100 to be cleaned resets, coating machine nozzle 400 moves to
Processing is further shootd out at roller component 300 in advance.Roller component 300 includes reservoir 310, is contained in reservoir 310 clear
Washing lotion, roller component 300 further include part immerse 310 cleaning liquid inside of reservoir in roller 320 and be located at 320 side of roller
And the scraper 330 contacted with 320 periphery of roller.
Coating machine nozzle 400 can move on the upper end face of roller 320, and roller 320 does not stop to rotate.Coating machine nozzle
400 spue a certain amount of coating fluid on 320 surface of roller, to by the exit of coating machine nozzle 400 be updated to it is fresh not
Contaminated coating fluid.
The coating machine nozzle 400 for completing above-mentioned pre-treatment step can move at the operational module of coating machine i.e. coating machine
The top of microscope carrier starts the coating work of substrate.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
As described above according to the embodiment of the present invention, there is no all details of detailed descriptionthe for these embodiments, also not
Limit the specific embodiment that the invention is only described.Obviously, as described above, can make many modifications and variations.This explanation
These embodiments are chosen and specifically described to book, is in order to preferably explain the principle of the present invention and practical application, belonging to making
Technical field technical staff can utilize modification of the invention and on the basis of the present invention to use well.The present invention is only by right
The limitation of claim and its full scope and equivalent.
Claims (10)
1. a kind of cleaning device of coating machine nozzle, including with matched first slot of the coating machine nozzle shape, described first
Slot includes the joint face on the first inclined-plane, the second inclined-plane and connection first inclined-plane and second inclined-plane, which is characterized in that
First slot runs through two opposite faces of the cleaning device, includes spray on first inclined-plane and second inclined-plane
Gas port and bleeding point positioned at the puff prot periphery.
2. cleaning device according to claim 1, which is characterized in that the puff prot and the bleeding point are in along level
The slit-shaped that direction extends.
3. cleaning device according to claim 2, which is characterized in that the puff prot in slit-shaped and the pumping
Mouth is arranged in parallel, and the puff prot is consistent with the depth of the bleeding point.
4. cleaning device according to claim 1, which is characterized in that each puff prot corresponds to a pair of pumping
Mouthful, a pair of bleeding point is arranged symmetrically using the puff prot as symmetry axis.
5. cleaning device according to claim 4, which is characterized in that the joint face is equipped at least one second slot,
The second slot all round closure.
6. cleaning device according to claim 1, which is characterized in that the cleaning device is made of resistant material.
7. a kind of clean method of coating machine nozzle, which is characterized in that including：
The coating machine nozzle is moved in first slot of cleaning device according to any one of claims 1 to 6；
The puff prot and the bleeding point start simultaneously at work, and the coating machine nozzle cleaning is dried.
8. clean method according to claim 7, which is characterized in that total jet amount of the puff prot is less than or equal to its week
Total rate of air sucked in required of the bleeding point on side.
9. clean method according to claim 7, which is characterized in that first inclined-plane of the cleaning device, described
The vertical range of second inclined-plane and the outer surface of the coating machine nozzle is 300 microns to 50 microns.
10. clean method according to claim 7, which is characterized in that the coating machine nozzle lateral extension, in the spray
After gas port and the bleeding point start simultaneously at work, the clean method further includes：
The cleaning device does uniform speed scanning along the extension direction of the coating machine nozzle and moves.
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| CN201810488441.9A CN108704897B (en) | 2018-05-21 | 2018-05-21 | Cleaning device and cleaning method for nozzle of coating machine |
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| CN201810488441.9A CN108704897B (en) | 2018-05-21 | 2018-05-21 | Cleaning device and cleaning method for nozzle of coating machine |
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| CN108704897B CN108704897B (en) | 2021-04-23 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110193481A (en) * | 2019-05-29 | 2019-09-03 | 深圳市华星光电技术有限公司 | PM wipes jig |
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| CN1672806A (en) * | 2004-03-25 | 2005-09-28 | 东京応化工业株式会社 | Regulating apparatus and regulating method for slit spray nozzle front end |
| CN101716582A (en) * | 2008-12-30 | 2010-06-02 | 四川虹欧显示器件有限公司 | Method and device for washing industrial dust |
| CN103817109A (en) * | 2012-11-16 | 2014-05-28 | 株式会社日藤工业 | Dust collector |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110193481A (en) * | 2019-05-29 | 2019-09-03 | 深圳市华星光电技术有限公司 | PM wipes jig |
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