CN108572369A - A kind of micro mirror scanning probe device and detection method - Google Patents
A kind of micro mirror scanning probe device and detection method Download PDFInfo
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- CN108572369A CN108572369A CN201710143898.1A CN201710143898A CN108572369A CN 108572369 A CN108572369 A CN 108572369A CN 201710143898 A CN201710143898 A CN 201710143898A CN 108572369 A CN108572369 A CN 108572369A
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- micro mirror
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
This application discloses a kind of scanning detection method with micro mirror, optical transmitter module sends out infrared acquisition light；The micro mirror constantly rotates during the work time, and infrared acquisition light is reflected into external environment at different angles；Data processing module calculates the distance between scanning probe device and barrier by time-of-flight method；Wherein, there is face array photoelectric sensor in the receiving module；The receiving module takes the structure of bistatic with optical transmitter module.Using the micro mirror scanning probe device and method involved by the application：（1）It need not accurately know the rotational angle of micro mirror, it is only necessary to which investigative range covers the range of receiving module field of view of receiver；（2）The orientation angles of barrier are determined by face array photoelectric sensor；（3）It is reflected since light will be detected by micro mirror so that the spy photometric beams that optical transmitter module is directly sent out are concentrated, and the light intensity of detection light are increased, so that detection device can detect the barrier of farther place.
Description
Technical field
This application involves a kind of detection device, more particularly to a kind of scanning probe device with micro mirror.And the detection
The scanning detection method of device.
Background technology
3D sighting devices can detect the depth information of ambient enviroment 3D rendering, flat in robot, intelligent mobile
The fields such as platform have a wide range of applications scene.A kind of current mode of 3D sighting devices is to use all solid state structure, that is, is being filled
There is no any mechanical rotational structure in setting, passes through the field of view of receiver of the detection light angle of divergence, receiving module to device transmitting module
Angle design, in certain distance, a certain range of object carry out distance measurement.A kind of other 3D sighting devices are using rotation
Turn the mode of scanning to be detected, i.e., 360 degree of continuous rotations of detection device are driven by motor, to realize to ambient enviroment
360 degree of scannings.For also a kind of 3D sighting devices using a kind of mode between above two device, device itself is whole
It does not rotate, and portion is provided with micromechanics rotational structure, such as micro-reflector in the device, sends out light source in transmitting module
The detection light gone out changes into line direction, to be emitted in ambient enviroment with different angle, realizes and is visited to the scanning for detecting local
It surveys.
However, in the prior art, using the detection device of micro-mirror structure：（1）It is generally necessary to accurately know turning for micro mirror
Dynamic angle is how many and/or the angle position state of micro mirror；（2）The requirement in detection local of usual probe source can not overlap,
It is inaccurate at scanning imagery information to prevent major structure, it is higher to the shooting angle and beam collimation quality requirement that detect light；（3）
After each angle has needed the reception and data processing of pair signals, the detection of next angle is just carried out.
Invention content
The application provides a kind of micro mirror scanning detection method, and optical transmitter module sends out infrared acquisition light, the infrared acquisition
Illumination is mapped on micro mirror；The micro mirror constantly rotates during the work time, infrared acquisition light is reflected at different angles outer
In portion's environment；After encountering barrier by the infrared acquisition light that micro mirror reflects, reflected by barrier；Receiving module is received by by obstacle
The infrared acquisition light of object reflection, converts optical signals to electric signal；Data processing module connects the telecommunications of conversion according to receiving module
Number, the distance between scanning probe device and barrier are calculated by time-of-flight method；Wherein, there is face in the receiving module
Array photoelectric sensor；The receiving module takes the structure of bistatic with optical transmitter module.
Further, the face array photoelectric sensor is be made of the independent photoelectric transducer element of M rows N row one piece
Face array photoelectric sensor, wherein M is more than or equal to 1, N and is more than or equal to 1, but M and N is non-concurrent is equal to 1.
In any embodiment wherein, the micro mirror is uniaxial rotational micromirror, or the double-axle rotation for two axis of X-Y
Micro mirror, the field range covered by the infrared acquisition light that micro mirror reflects are more than or equal to the field of view of receiver model of receiving module
It encloses.
In any embodiment wherein, during micromirror duty in each two adjacent difference rotational angle state,
There is by the infrared acquisition light of micro mirror reflection in detection viewing field range the part of overlapping, or the part without overlapping.
In any embodiment wherein, by wherein each photoelectric transducer element of face array photoelectric sensor in face battle array
The location of in photoelectric sensor, to determine the orientation angles of obstacle in search coverage.
In any embodiment wherein, optical transmitter module sends out linear light source, the micro mirror single shaft rotation, and the micro mirror exists
The side orthogonal with linear light source is rotated up.
In any embodiment wherein, the infrared acquisition light reflected by barrier is received in receiving module, light is believed
After number being converted to electric signal, during data processing module is calculated based on the electric signal into row distance, while controlling micro-
Mirror turns to next detection angle.
In any embodiment wherein, when being reflected by barrier of receiving of photoelectric sensing unit in the receiving module
Infrared acquisition light light intensity numerical value be less than the value of the confidence when, abandon according to the obtained distance value of the photoelectric transducer element；When
The light intensity numerical value for the infrared acquisition light reflected by barrier that photoelectric sensing unit receives in the receiving module is higher than confidence
When value, retain according to the obtained distance value of the photoelectric transducer element.
Further, same photoelectric transducer element, when micro mirror is in different angle states, guarantor that counterweight regains
The distance value stayed is averaged.
In any embodiment wherein, receiving module also obtains the gradation data for the detection light being reflected back by barrier.
Using the micro mirror scanning probe device and method involved by the application：（1）It need not accurately know the rotation of micro mirror
Angle, it is only necessary to which after the detection light reflection sent out in optical transmitter module, investigative range covers receiving module field of view of receiver
Range；（2）Due to using face array photoelectric sensor, object is determined by face array photoelectric sensor（Barrier）Azimuth
Degree；（3）It being reflected since light will be detected by micro mirror so that the spy photometric beams that optical transmitter module is directly sent out are concentrated,
The light intensity for increasing detection light, so that detection device can detect the object of farther place（Barrier）.
Description of the drawings
Fig. 1 is the scanning probe apparatus structure schematic diagram with micro mirror.
Fig. 2 is the structural schematic diagram of face array photoelectric sensor in receiving module.
Specific implementation mode
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.The application is described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
In order to make those skilled in the art more fully understand application scheme, below in conjunction in the embodiment of the present application
Attached drawing, technical solutions in the embodiments of the present application are clearly and completely described, it is clear that described embodiment is only
The embodiment of the application part, instead of all the embodiments.Based on the embodiment in the application, ordinary skill people
The every other embodiment that member is obtained without making creative work should all belong to the model of the application protection
It encloses.
A wherein embodiment for a kind of micro mirror scanning probe device involved by the application is as shown in Figure 1, a kind of with micro-
The scanning probe device of mirror structure, including optical transmitter module 10, micro mirror 30, receiving module 30, data processing module.The micro mirror is swept
It retouches detection device and is based on time-of-flight method calculating described device and testee in environment（That is barrier）The distance between.
The detection process of the micro mirror scanning probe device is：Optical transmitter module sends out infrared acquisition light, the infrared acquisition
On light directive micro mirror；Micro mirror will be in infrared acquisition light emitting to external environment, wherein it is continuous to control the micro mirror during the work time
Rotation, infrared acquisition light is reflected into external environment at different angles；It is emitted to infrared in detection device external environment
Detection light encounters testee（That is barrier）It is reflected；The infrared acquisition light reflected by testee is incident on receiving module
In, receiving module receives the infrared acquisition light reflected by testee；The receiving module can also be accessed to be reflected by testee
The light intensity and gradation data of the detection light returned；Data processing module is connected with receiving module, time-of-flight method is based on, at data
Reason module calculates the distance between detection device and testee.
Data processing module can also be according to the range information and intensity signal that receiving module obtains.Receiving module includes
There is photoelectric sensor, which receives the infrared acquisition light being reflected back by barrier.The receiving module converts light to electricity
Signal.The electric signal that data processing module is converted light to based on receiving module calculates scanning probe dress by time-of-flight method
Set the distance between barrier.
The micro mirror can be uniaxial rotational micromirror, or the double-axle rotation micro mirror for two axis of X-Y.The micro mirror is in work
Constantly rotation, infrared acquisition light is emitted to different angle in external environment during making.This is reflected infrared by micro mirror
The field range that detection light is covered is more than or equal to the field of view of receiver range of receiving module.The micro mirror is small reflective
Mirror.
In above-mentioned any one embodiment, there is the optical transmitter module light source, the light source to be laser light source or be
LED light source.
Light source sends out detection light in optical transmitter module, in a preferred embodiment, sends out infrared acquisition light.According to light source
Type, in the light path of light source, also according to needs, selection is provided with the lens that shaping is carried out to the infrared acquisition light that light source is sent out
Device.Such as when using LED as light source, since LED light source has the larger angle of divergence, sent out in LED light source infrared
It detects in light light path, is additionally provided with convergent lens.The infrared acquisition light sent out by LED light source is converged to micro mirror by the convergent lens
On.In a preferred embodiment, the infrared acquisition light that the convergent lens sends out LED light source collimates, and is emitted on micro mirror.Example
When as used laser light source at that time, lens devices can be not provided with according to the shape of laser beam.It is sent out alternatively, laser light source can be worked as
The infrared acquisition light light beam gone out is excessively concentrated, and extender lens is provided in the light path that laser light source sends out infrared acquisition light；Into
One step, in order to which the collimated expanded will be passed through, it is also an option that being provided with collimation lens.
In above-mentioned any one embodiment, the receiving module takes the structure of bistatic with optical transmitter module.It is described
The structure of bistatic, i.e. receiving module receive the reflection that micro mirror is needed not move through by the infrared acquisition light that barrier reflects.
Include photoelectric sensor in above-mentioned any one embodiment, in the receiving module.The photoelectric sensor is by M
One piece of face array photoelectric sensor that the independent photoelectric transducer element of row N row is formed.Share M*N distance measuring unit.Such as attached drawing 2
Shown, micro mirror scanning probe device uses the one piece of face battle array being made of a photoelectric transducer element that can work independently of M rows N row
Photoelectric sensor, each photoelectric transducer element therein can work independently, the infrared acquisition that will reflect off of the obstruction back
Light is converted to electric signal, and distance letter can be calculated according to time-of-flight method according to each electric signal in data processing module
Breath.
As a result of face array photoelectric sensor, each photoelectric transducer element therein can individually work independently.Number
It can independently be calculated into row distance according to the data of photoelectric transducer element according to processing module.The number of M and N can basis
Concrete application is arranged.Wherein, M is more than or equal to 1, N and is more than or equal to 1, but non-concurrent is equal to 1.
Micro mirror scanning probe device involved by the application, can obtain testee in the horizontal direction N number of position, with
And obtain the range information in the M position in horizontal direction.
In order to which the detection light that will reflect off of the obstruction back images on the photoelectric sensor in receiving module, in photoelectric transfer
Sensor receives in the light path of infrared acquisition light, is additionally provided with imaging lens.Receiving module has big field of view of receiver angle, with external
Sufficiently large region is detected in portion's environment.The field angle of imaging lens can be selected according to the needs of search coverage.
In a preferred embodiment, the infrared bandpass filters that peak value is located at 850nm are coated on the imaging lens.850nm
The luminescence peak of infrared acquisition light that sends out of basis for selecting optical transmitter module depending on, only need to meet the infrared bandpass filters
Match through the infrared acquisition light spectral peak position of peak position and optical transmitter module.The infrared bandpass filters will
Ambient light rejection improves the signal-to-noise ratio of solid-state face battle array range unit.The bandpass filters can be substituted by optical filter, be directly arranged at
On the infrared acquisition light receiving surface of photoelectric sensor.In an alternate embodiment of the invention, above-mentioned filter coating can be replaced with optical filter, should
Optical filter is set in receiving light path, is not limited on the infrared acquisition light receiving surface for being set to imaging lens or sensor.
In all solid state detection device without micro-mirror structure, it is so-called it is all solid state be in detection device completely without machinery
Rotational structure needs the detection light that light source is sent out that the field of view of receiver angle of receiving module is completely covered, to complete larger investigative range
Detection.But since the light source in optical transmitter module is fixed, to the field range of receiving module is completely covered, need to be arranged
Multiple light sources light source is completed, however the light source in optical transmitter module sacrifices the light of detection light to meet big field angle
By force, such as larger field range can only be effectively detected within 10 meters, farther distance is since the light intensity of detection light is weak, no
Effective accurate range data can effectively be obtained.
And this application involves a kind of micro mirror scanning probe device, as a result of micro mirror by light source in optical transmitter module
The detection light reflection sent out, by the angular transformation of micro mirror, to realize to the object within the scope of larger field（Barrier）It carries out
On the one hand detection focuses on the light beam of light source on micro mirror, increase light intensity of the detection light in single angle, can detect
To relative to the farther detection range of all solid state detection device, on the other hand by the variation of micro mirror angle, big field angle is realized
Detection light coverage area.Such as 160 degree of level of covering, vertical 90 degree of field range.
In addition, a kind of micro mirror scanning probe device involved by the application, as a result of face array photoelectric sensor, because
And do not need to accurately know the rotational angle of micro mirror, as long as search coverage can be covered i.e. in the rotation process of micro mirror
It can.Even if in each two adjacent different rotational angle states, allow the infrared acquisition optical detection field range of two angles
Part with overlapping.
The detection device is to the determination method of angle, according to the field of view of receiver of face array photoelectric sensor and face battle array photoelectric transfer
The number of M and N determines in sensor, such as in the face array photoelectric sensor structure of 320*240, if the reception of receiving module
Field angle is 160 degree of level, vertical 90 degree, then field angle corresponding to each pixel is 0.5 degree of level, vertical 0.375 degree,
Each pixel corresponds to an orientation angles, that is, passes through wherein each pixel unit of face array photoelectric sensor（Photoelectric sensor list
Member）The location of in face array photoelectric sensor, to determine object in search coverage（Barrier）Distance and azimuth
Degree.
In micro mirror scanning probe device involved by the application, micro mirror can be uniaxial rotation or X-Y double-axle rotations.
In single shaft rotates, in order to reach larger detection coverage area, the preferably light source in optical transmitter module is linear light source, and uniaxial
The micro mirror of rotation is rotated up in the side orthogonal with linear light source, to realize can both horizontally and vertically having larger spy
Coverage area is surveyed, and the detection coverage area is not less than the field of view of receiver range of receiving module.And in the micro mirror knot in X-Y bis- weeks
In structure, suitable corresponding light source preferably sends out the light beam with certain cross-sectional area.In a preferred embodiment, the light beam
Cross-sectional area be not more than the area of micro mirror, with prevent it is additional be not irradiated on micro mirror, and be irradiated to inside device,
Form interference light.Wherein, either in uniaxial or X-Y cross-compound arrangements micro mirror, in the course of work of detection device not
It needs accurately to know the angle that it is rotated, allow in adjacent rotational angle, the detection light being reflected into environment has the portion of overlapping
Point.
Therefore, using the micro mirror scanning probe device involved by the application, relative to all solid state detection device：（1）No
Need accurately to know the rotational angle of micro mirror, it is only necessary to after the detection light reflection sent out in optical transmitter module, investigative range
Cover the range of receiving module field of view of receiver；（2）Due to using face array photoelectric sensor, determined by face array photoelectric sensor
Object（Barrier）Orientation angles；（3）It is reflected since light will be detected by micro mirror so that optical transmitter module is directly sent out
The spy photometric beams gone out are concentrated, and the light intensity of detection light are increased, so that detection device can detect the object of farther place
（Barrier）.
Since detection device involved in the application has micro-mirror structure and face array photoelectric sensor, detection dress
It sets with more flexible and effective detection mode method.
（One）Time-sharing work.Since face array photoelectric sensor is first carried out to being reflected back by barrier during the work time
The sensing for detecting light, i.e., be converted to electric signal, after this, data processing module by the detection optical signal being reflected back by barrier
It is calculated into row distance based on above electrical signal, and in general, the calculating process of the data processing module is needed to spend and be sensed
The journey comparable time.
Thus, this application involves a kind of time-saving detection methods, i.e., complete sensing process in face array photoelectric sensor
Afterwards, micro mirror is turned into row distance calculating process, being carried out at the same time based on the electric signal obtained by sensing process in data processing module
Dynamic control turns to next detection angle.Data processing time i.e. during a upper distance value obtains, at the same it is complete
At the rotation process of the next angle of micro mirror, after data processing during completing a upper distance value and obtaining, at once into
Sensing process of the new sensor of row to the detection light being reflected back by barrier.Between having saved detection in this way, increase detection dress
The scan frequency set.
（Two）The value of the confidence is set.As previously mentioned, the detection device involved by the application need not accurately be known worked
Each angle-data that micro mirror rotates in journey allows the infrared acquisition light that micro mirror is reflected in two neighboring rotational angle to have overlapping
Part, therefore relate to how to handle the distance value that lap detects.One such method is setting
The value of the confidence.The value of the confidence is related to the detection light intensity of light being reflected back by barrier received by receiving module.
The infrared acquisition light reflected by micro mirror, there are the non-uniform situations of hot spot, thus it is for example possible to the light of spot center
Qiang Qiang, and the light intensity at hot spot edge is weak.Therefore, the light intensity for the detection light that receiving module received be reflected back toward is also different, because
And data can be handled for the difference of light intensity.Such as in an embodiment wherein, setting the value of the confidence is 200, this 200 is
The light intensity numerical value that receiving module receives.When the partial pixel of face array photoelectric sensor in receiving module receives the spy being reflected back
The light intensity numerical value for surveying light is less than 200, then abandon carrying out the pixel apart from calculated value.When face array photoelectric sensor in receiving module
Partial pixel receive be reflected back detection light light intensity value be higher than number 200, then retain the pixel distance calculate, if
At two different micro mirror rotational angles, partial pixel repeats to have received believable distance value, then after carrying out averagely, output is true
Real detection range value.
The foregoing is merely the preferred embodiments of the application, are not intended to limit this application, for the skill of this field
For art personnel, the application can have various modifications and variations.Within the spirit and principles of this application, any made by repair
Change, equivalent replacement, improvement etc., should be included within the protection domain of the application.
Claims (10)
1. a kind of scanning detection method, which is characterized in that
Optical transmitter module sends out infrared acquisition light, and the infrared acquisition illumination is mapped on micro mirror；
The micro mirror constantly rotates during the work time, and infrared acquisition light is reflected into external environment at different angles；
After encountering barrier by the infrared acquisition light that micro mirror reflects, reflected by barrier；
Receiving module receives the infrared acquisition light by being reflected by barrier, converts optical signals to electric signal；
Data processing module connects the electric signal of conversion according to receiving module, and scanning probe device and barrier are calculated by time-of-flight method
Hinder the distance between object；
Wherein, there is face array photoelectric sensor in the receiving module；The receiving module takes transmitting-receiving point with optical transmitter module
The structure set.
2. scanning detection method according to claim 1, which is characterized in that the face array photoelectric sensor is to be arranged by M rows N
One piece of face array photoelectric sensor that a independent photoelectric transducer element is formed, wherein M is more than or equal to 1, N and is more than or equal to 1, but M
With N is non-concurrent is equal to 1.
3. scanning detection method according to claim 1, which is characterized in that the micro mirror is uniaxial rotational micromirror, or
For the double-axle rotation micro mirror of two axis of X-Y, it is more than or equal to by the field range that the infrared acquisition light that micro mirror reflects is covered
The field of view of receiver range of receiving module.
4. scanning detection method according to claim 1, which is characterized in that each two adjacent during micromirror duty
In different rotational angle states, there is the part of overlapping by the infrared acquisition light of micro mirror reflection in detection viewing field range, or not
Part with overlapping.
5. scanning detection method according to claim 1, which is characterized in that pass through the wherein each of face array photoelectric sensor
Photoelectric transducer element is the location of in face array photoelectric sensor, to determine the orientation angles of obstacle in search coverage.
6. according to the scanning detection method described in one of claim 1-5, which is characterized in that optical transmitter module sends out linear light source,
The micro mirror single shaft rotation, the micro mirror are rotated up in the side orthogonal with linear light source.
7. according to the scanning detection method described in one of claim 1-5, which is characterized in that received by obstacle in receiving module
After converting optical signals to electric signal, the electric signal is based on into line-spacing in data processing module for the infrared acquisition light of object reflection
During from calculating, while controlling micro mirror and turning to next detection angle.
8. according to the scanning detection method described in one of claim 1-5, which is characterized in that when photoelectric transfer in the receiving module
When the light intensity numerical value for the infrared acquisition light reflected by barrier that sense unit receives is less than the value of the confidence, abandon according to the photoelectric transfer
The obtained distance value of sensor cell；When being reflected by barrier of receiving of photoelectric sensing unit is infrared in the receiving module
When detecting the light intensity numerical value of light higher than the value of the confidence, retain according to the obtained distance value of the photoelectric transducer element.
9. scanning detection method according to claim 8, which is characterized in that same photoelectric transducer element, at micro mirror
When different angle states, the distance value for the reservation that counterweight regains is averaged.
10. according to the scanning detection method described in one of claim 1-5, which is characterized in that receiving module is also obtained by obstacle
The gradation data for the detection light that object is reflected back.
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| CN201710143898.1A CN108572369A (en) | 2017-03-13 | 2017-03-13 | A kind of micro mirror scanning probe device and detection method |
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