CN108414475B - LIBS analysis method based on optical chromatography simultaneous iterative reconstruction - Google Patents

LIBS analysis method based on optical chromatography simultaneous iterative reconstruction Download PDF

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CN108414475B
CN108414475B CN201810091015.1A CN201810091015A CN108414475B CN 108414475 B CN108414475 B CN 108414475B CN 201810091015 A CN201810091015 A CN 201810091015A CN 108414475 B CN108414475 B CN 108414475B
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万雄
袁汝俊
舒嵘
王泓鹏
何强
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Shanghai Institute of Technical Physics of CAS
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Abstract

The invention discloses an LIBS analysis method based on optical tomography and simultaneous iterative reconstruction, which is characterized in that a multivariate LIBS quantitative solving problem is equivalent to a high-precision optical tomography reconstruction problem, and the solving of a correlation matrix F is equivalent to the reconstruction of three-dimensional physical quantity distribution in the optical tomography. And (3) adopting a high-precision SIRT iterative algorithm in combination with matrix column vector decomposition to iteratively solve each column vector of the incidence matrix F column by column so as to obtain the incidence matrix F. And then realizing high-precision solving analysis of each element in the unknown sample according to the operation of the actually measured normalized spectral intensity vector of the unknown sample and the incidence matrix. The invention has the advantages that the optical chromatography-like model is adopted and solved in multivariate analysis and calibration so as to solve the influence of competitive emission of different elements in the chemical matrix effect; and solving by adopting an SIRT chromatography iterative algorithm, effectively inhibiting noise in the measured data, and obtaining a correlation matrix with the minimum root mean square error, thereby improving the LIBS quantitative analysis precision.

Description

LIBS analysis method based on optical chromatography simultaneous iterative reconstruction
Technical Field
The invention relates to a laser spectrum detection method, in particular to a quantitative laser-induced breakdown spectroscopy analysis method, which is suitable for simultaneous quantitative solution and analysis of multiple elements of a detection target and belongs to the field of photoelectric detection.
Background
Laser-induced breakdown spectroscopy (LIBS) is an atomic analysis spectroscopy technique. The nanosecond short pulse laser is adopted to focus the surface of a target, the target is degraded at an instantaneous high temperature to generate plasma, atoms and ions fall back from a high-energy state to a low-energy state in a cooling process to emit spectral lines containing element information, and the nanosecond short pulse laser can be used for detecting material composition elements. The LIBS technology can well realize qualitative analysis of target elements, but the quantitative analysis is influenced by chemical matrix effect, namely emission lines of certain elements with the same content are different when the certain elements are placed in different matrixes.
In order to solve the influence of the chemical matrix effect on the LIBS quantitative analysis, a multivariate analysis method can be adopted, namely, a related equation is established according to the relation between a plurality of spectral lines of a plurality of elements and the content of the spectral lines, and the content of the plurality of elements of the target to be detected is obtained by solving a multivariate mathematical matrix equation. The method has the advantages that the influence of the chemical matrix effect on the quantitative analysis precision can be eliminated to a certain extent, and the disadvantage that the precision of the solving algorithm depends on the design of the multi-element calibration mathematical model and the solving algorithm in the previous period.
The solving problem of LIBS multivariate quantitative analysis has similarity with the solving problem of optical tomography reconstruction under the condition of few projection directions, and the accuracy of the optical tomography reconstruction is higher compared with the LIBS quantitative analysis. Meanwhile, each pixel reconstructed in the Iterative Reconstruction technology (SIRT) is corrected after all projection values corresponding to each ray are calculated, and noise in the measured data can be effectively suppressed. Therefore, the high-precision optical tomography reconstruction model is used for solving the problem of multivariate LIBS quantification. And (3) combining a high-precision SIRT iterative algorithm in optical chromatography with matrix column vector decomposition, and iteratively solving column by column to obtain a correlation matrix between the normalized spectral intensity matrix of the standard sample and the content of each element. And then realizing high-precision solving analysis of each element in the unknown sample according to the operation of the actually measured normalized spectral intensity vector of the unknown sample and the incidence matrix, and solving the problem of solving precision of LIBS multivariate analysis.
Disclosure of Invention
The invention aims to provide a multi-element analysis solving method of a multi-element LIBS matrix, which comprises the steps of firstly establishing a matrix mathematical model of LIBS multi-element analysis similar to optical tomography reconstruction, then solving an association vector based on SIRT iterative algorithm in optical tomography in combination with matrix column vector decomposition to obtain an association matrix, and obtaining atomic fractions of a plurality of elements of a target to be detected according to the operation of normalized spectral intensity and the association matrix of the target to be detected so as to realize high-precision quantitative LIBS detection.
The present invention is achieved in such a way that,
1. assume that the number of elements to be quantitatively analyzed (i.e., element dimensions) is M and are well-ordered. N standard samples were prepared for calibration (i.e. sample dimension N). The N samples are solid, have equal size and size, contain the M elements in different proportions, the atomic fraction (atomic number percentage) of each element is known, and the components in each sample are uniformly distributed;
2. constructing a multivariate LIBS quantitative analysis matrix equation, namely a projection matrix, a flow field physical quantity image matrix and a measurement matrix in optical tomography reconstruction
WF=P
In the formula, W is a normalized spectral intensity matrix of a standard sample, which is equivalent to a projection matrix in optical tomography reconstruction; f is a correlation matrix, which is equivalent to a flow field physical quantity image matrix in optical tomography reconstruction, and P is a standard sample atomic fraction matrix, which is equivalent to a measurement matrix;
3. the normalized spectral intensity matrix W of the standard sample is constructed according to the following method:
and performing LIBS detection on the N standard samples under the same test conditions and test parameters to obtain N LIBS spectrograms corresponding to the N standard samples, and performing normalization processing on the N LIBS spectrograms to obtain N normalized LIBS spectrograms. Respectively taking k characteristic spectral lines (requiring the dimension N of the sample to be larger than the spectral dimension kM) for each element, and constructing a standard sample normalized spectral intensity matrix W with N rows by kM columns as follows:
Figure GDA0002462770110000031
the kM values in the first row in the normalized spectral intensity matrix represent the normalized spectral intensity values of the spectral lines represented by the M elements kM of the first standard sample; the kM values in the second row represent the normalized spectral intensity values of the M elements kM of the second standard sample representing the spectral lines; and so on …; kM values in the nth row represent the normalized spectral intensity values of the spectral lines for the nth standard sample M elements kM;
4. constructing a standard sample atomic fraction matrix P with N rows by M columns as follows:
Figure GDA0002462770110000032
the M values in the first row of the atomic fraction matrix represent the atomic fractions of the M elements of the first standard sample; the M values in the second row represent the atomic fractions of the M elements of the second standard sample; and so on …; the M values in the Nth row represent the atomic fractions of the M elements of the Nth standard sample;
5. the correlation matrix F, which reflects the correlation between W and P, can be expressed as:
Figure GDA0002462770110000041
the incidence matrix F is a matrix of kM rows by M columns, and the required solution kM2The F matrix can be obtained by the unit value. Column decomposing the incidence matrix F into M incidence vectors F1、F2、F3、...、FM(ii) a Performing column decomposition on the atomic fraction matrix P of the standard sample into M atomic fraction vectors P1、P2、P3、...、PM
6. Converting the solution of the incidence matrix F into M incidence vectors F1、F2、F3、...、FMThe solution model is as follows:
Pi=WFi+Ei
wherein i is 1,2,3iAs error vector, at N>In the case of kM, for FiThe solution of the correlation vector F is the solution of the over-determined equation, the error is minimum based on a certain optimization criterion, namely the optimal approximate solution under the optimization criterion is obtained, and the SIRT iterative algorithm based on the least square criterion is adopted to carry out the correlation vector FiAnd (3) solving:
Fi 0=WTPi
Figure GDA0002462770110000042
in the above formula, the superscript 0 represents the initial value; superscript T represents transposition; the superscript q represents the q-th iteration value; superscript q +1 represents the q +1 th iteration value; λ is a relaxation factor, and the magnitude of the value of λ represents the degree of tightness of the iterative constraint;
the termination conditions for the iteration are:
|Fi q+1-Fi q|2<ε
ε is a very small number, which in this example is 0.001; after the iteration has terminated, FiThe last iteration value is FiThe solution result of (2);
7. all M relevance vectors FiAfter solving is completed, obtaining a correlation matrix F; and (3) carrying out LIBS detection on the target to be detected under the same test conditions as the N standard samples to obtain an LIBS spectrogram, and carrying out normalization processing on the LIBS spectrogram to obtain a normalized LIBS spectrogram of the sample to be detected. Obtaining a normalized spectral intensity vector of M element kM representative spectral lines of the target to be detected:
D=[d1,d2,d3,...,dkM]
calculating the atomic fractions of M elements of the target to be detected according to the following formula:
Figure GDA0002462770110000051
the invention has the advantages that the optical chromatography-like model is adopted and solved in multivariate analysis and calibration so as to solve the influence of competitive emission of different elements in the chemical matrix effect; and solving by adopting an SIRT chromatography iterative algorithm, effectively inhibiting noise in the measured data, and obtaining a correlation matrix with the minimum root mean square error, thereby improving the LIBS quantitative analysis precision.
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FIG. 1 is a schematic diagram of the method of the present invention.
Detailed Description
The invention aims to provide a multivariate LIBS quantitative analysis solving method, which is characterized in that a high-precision optical chromatography reconstruction model is used for modeling a multivariate LIBS quantitative solving problem, and a relation among a normalized spectral intensity matrix W of a standard sample, an incidence matrix F and an atomic fraction matrix P of the standard sample is established; and (3) adopting a high-precision SIRT iterative algorithm in optical chromatography in combination with matrix column vector decomposition to iteratively solve each column vector of the correlation matrix F column by column so as to obtain the correlation matrix F reflecting the mutual relation between W and P. And then realizing high-precision solving analysis of each element in the unknown sample according to the operation of the actually measured normalized spectral intensity vector of the unknown sample and the incidence matrix, and solving the problem of solving precision of LIBS multivariate analysis.
The following specific examples illustrate the present LIBS quantitative analysis method:
1. assuming that the number of elements to be quantitatively analyzed is 12 (i.e. taking the element dimension M ═ 12), including sodium, magnesium, calcium, iron, manganese, copper, silicon, carbon, oxygen, sulfur, nitrogen and hydrogen, in the order from 1 to 12. 100 standard samples were prepared for calibration (i.e., sample dimension N is taken as 100). The 100 samples are solid, have equal size and size, contain the twelve elements in different proportions, the atomic fraction (atomic number percentage) of each element is known, and the components in each sample are uniformly distributed;
2. constructing a multivariate LIBS quantitative analysis matrix equation shown in figure 1 by referring to the relationship among a projection matrix, a flow field physical quantity image matrix and a measurement matrix in optical tomography reconstruction, namely
WF=P
In the formula, W is a normalized spectral intensity matrix of a standard sample, which is equivalent to a projection matrix in optical tomography reconstruction; f is a correlation matrix, which is equivalent to a flow field physical quantity image matrix in optical tomography reconstruction, and P is a standard sample atomic fraction matrix, which is equivalent to a measurement matrix;
3. the normalized spectral intensity matrix W of the standard sample is constructed according to the following method:
LIBS detection is carried out on the 100 standard samples under the same test conditions and test parameters to obtain 100 LIBS spectrograms corresponding to the 100 standard samples, and normalization processing is carried out on the 100 LIBS spectrograms to obtain 100 normalized LIBS spectrograms. Taking 3 characteristic spectral lines for each element (i.e. k is 3, which requires that the sample dimension N > the spectral dimension kM, in this example, the sample dimension N is 100, which is greater than the spectral dimension kM is 36), a normalized spectral intensity matrix W of the standard sample is constructed, which has N rows by kM columns (in this example, 100 rows by 36 columns) as follows:
Figure GDA0002462770110000071
the kM values in the first row in the normalized spectral intensity matrix represent the normalized spectral intensity values of the spectral lines represented by the M elements kM of the first standard sample; the kM values in the second row represent the normalized spectral intensity values of the M elements kM of the second standard sample representing the spectral lines; and so on …; kM values in the nth row represent the normalized spectral intensity values of the spectral lines for the nth standard sample M elements kM;
4. constructing a standard sample atomic fraction matrix P with N rows by M columns as follows:
Figure GDA0002462770110000072
in practice, M is 12 and N is 100. The M values in the first row of the atomic fraction matrix represent the atomic fractions of the M elements of the first standard sample; the M values in the second row represent the atomic fractions of the M elements of the second standard sample; and so on …; the M values in the Nth row represent the atomic fractions of the M elements of the Nth standard sample;
5. the correlation matrix F, which reflects the correlation between W and P, can be expressed as:
Figure GDA0002462770110000081
the correlation matrix F is a matrix of kM rows by M columns, in the specific embodiment a 36 row by 12 matrix. Need to solve for kM2432 cell values, the F matrix can be obtained.As shown in fig. 1, the correlation matrix F is column-decomposed into M correlation vectors F1、F2、F3、...、FM(ii) a Performing column decomposition on the atomic fraction matrix P of the standard sample into M atomic fraction vectors P1、P2、P3、...、PM
6. Converting the solution of the incidence matrix F into M incidence vectors F1、F2、F3、...、FMThe solution model is as follows:
Pi=WFi+Ei
wherein i is 1,2,3iAs error vector, at N>In the case of kM, for FiThe solution of the correlation vector F is the solution of the over-determined equation, the error is minimum based on a certain optimization criterion, namely the optimal approximate solution under the optimization criterion is obtained, and the SIRT iterative algorithm based on the least square criterion is adopted to carry out the correlation vector FiAnd (3) solving:
Fi 0=WTPi
Fi q+1=Fi q+λ·WT(Pi-WFi q)
in the above formula, the superscript 0 represents the initial value; superscript T represents transposition; the superscript q represents the q-th iteration value; superscript q +1 represents the q +1 th iteration value; λ is a relaxation factor, the value of λ is between 0 and 2, the magnitude of the value represents the degree of tightness of the iterative constraint, and the value is 0.5 in the embodiment;
the termination conditions for the iteration are:
|Fi q+1-Fi q|2<ε
ε is a very small number, which in this example is 0.001; after the iteration has terminated, FiThe last iteration value is FiThe solution result of (2);
7. all M relevance vectors FiAfter solving is completed, obtaining a correlation matrix F; LIBS detection is carried out on the target to be detected under the same test conditions as the N standard samples to obtain a LIBS spectrogram, and normalization processing is carried out on the LIBS spectrogramAnd obtaining a normalized LIBS spectrogram of the sample to be detected. Obtaining a normalized spectral intensity vector of M element kM representative spectral lines of the target to be detected:
D=[d1,d2,d3,...,dkM]
calculating the atomic fractions of M elements of the target to be detected according to the following formula:
Figure GDA0002462770110000091
wherein M is 12.

Claims (1)

1. A LIBS analysis method based on optical tomography simultaneous iterative reconstruction is characterized by comprising the following steps:
1) assuming that the number of elements needing quantitative analysis, namely the element dimension is M, sequencing side by side, preparing N standard samples for calibration, namely the sample dimension is N, wherein the N samples are solid and have equal size and size, the N standard samples contain the M elements in different proportions, the atomic fraction, namely the atomic number percentage, of each element is known, and the components in each sample are uniformly distributed;
2) constructing a multivariate LIBS quantitative analysis matrix equation, namely a projection matrix, a flow field physical quantity image matrix and a measurement matrix in optical tomography reconstruction
WF=P
In the formula, W is a normalized spectral intensity matrix of a standard sample, which is equivalent to a projection matrix in optical tomography reconstruction; f is a correlation matrix, which is equivalent to a flow field physical quantity image matrix in optical tomography reconstruction, and P is a standard sample atomic fraction matrix, which is equivalent to a measurement matrix;
3) the normalized spectral intensity matrix W of the standard sample is constructed according to the following method:
LIBS detection is carried out on the N standard samples under the same test conditions and test parameters to obtain N LIBS spectrograms corresponding to the N standard samples, and normalization processing is carried out on the N LIBS spectrograms to obtain N normalized LIBS spectrograms; respectively taking k characteristic spectral lines for each element, and constructing a standard sample normalized spectral intensity matrix W with N rows by kM columns if the sample dimension N is greater than the spectral dimension kM:
Figure FDA0002462770100000021
the kM values in the first row in the normalized spectral intensity matrix represent the normalized spectral intensity values of the spectral lines represented by the M elements kM of the first standard sample; the kM values in the second row represent the normalized spectral intensity values of the M elements kM of the second standard sample representing the spectral lines; and so on …; kM values in the nth row represent the normalized spectral intensity values of the spectral lines for the nth standard sample M elements kM;
4) constructing a standard sample atomic fraction matrix P with N rows by M columns as follows:
Figure FDA0002462770100000022
the M values in the first row of the atomic fraction matrix represent the atomic fractions of the M elements of the first standard sample; the M values in the second row represent the atomic fractions of the M elements of the second standard sample; and so on …; the M values in the Nth row represent the atomic fractions of the M elements of the Nth standard sample;
5) the correlation matrix F, which reflects the correlation between W and P, can be expressed as:
Figure FDA0002462770100000031
the incidence matrix F is a matrix of kM rows by M columns, and the required solution kM2The F matrix can be obtained only by the unit value; column decomposing the incidence matrix F into M incidence vectors F1、F2、F3、...、FM(ii) a Performing column decomposition on the atomic fraction matrix P of the standard sample into M atomic fraction vectors P1、P2、P3、...、PM
6) Converting the solution of the incidence matrix F into M incidence vectors F1、F2、F3、...、FMThe solution model is as follows:
Pi=WFi+Ei
wherein i is 1,2,3iAs error vector, at N>In the case of kM, for FiThe solution of the correlation vector F is the solution of the over-determined equation, the error is minimum based on a certain optimization criterion, namely the optimal approximate solution under the optimization criterion is obtained, and the SIRT iterative algorithm based on the least square criterion is adopted to carry out the correlation vector FiAnd (3) solving:
Fi 0=WTPi
Fi q+1=Fi q+λ·WT(Pi-WFi q)
in the above formula, the superscript 0 represents the initial value; superscript T represents transposition; the superscript q represents the q-th iteration value; superscript q +1 represents the q +1 th iteration value; λ is a relaxation factor, and the magnitude of the value of λ represents the degree of tightness of the iterative constraint;
the termination conditions for the iteration are:
|Fi q+1-Fi q|2<ε
epsilon is a very small number, and the value of epsilon is 0.001; after the iteration has terminated, FiThe last iteration value is FiThe solution result of (2);
7) all M relevance vectors FiAfter solving is completed, obtaining a correlation matrix F; LIBS detection is carried out on a target to be detected under the same test conditions as the N standard samples to obtain an LIBS spectrogram, and normalization processing is carried out on the LIBS spectrogram to obtain a normalized LIBS spectrogram of the sample to be detected; obtaining a normalized spectral intensity vector of M element kM representative spectral lines of the target to be detected:
D=[d1,d2,d3,...,dkM]
calculating the atomic fractions of M elements of the target to be detected according to the following formula:
Figure FDA0002462770100000041
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