CN108414474A - A kind of SPR fibre optical sensors and preparation method thereof based on temperature self-compensation - Google Patents
A kind of SPR fibre optical sensors and preparation method thereof based on temperature self-compensation Download PDFInfo
- Publication number
- CN108414474A CN108414474A CN201810275088.6A CN201810275088A CN108414474A CN 108414474 A CN108414474 A CN 108414474A CN 201810275088 A CN201810275088 A CN 201810275088A CN 108414474 A CN108414474 A CN 108414474A
- Authority
- CN
- China
- Prior art keywords
- fibre
- optical fiber
- single mode
- mode optical
- spr
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 title claims abstract description 106
- 230000003287 optical effect Effects 0.000 title claims abstract description 29
- 238000002360 preparation method Methods 0.000 title abstract description 4
- 239000013307 optical fiber Substances 0.000 claims abstract description 79
- 229910052751 metal Inorganic materials 0.000 claims abstract description 29
- 239000002184 metal Substances 0.000 claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 239000010408 film Substances 0.000 claims description 44
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 12
- 239000010931 gold Substances 0.000 claims description 12
- 229910052737 gold Inorganic materials 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 9
- 239000004332 silver Substances 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 238000003466 welding Methods 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 8
- 238000001514 detection method Methods 0.000 abstract description 5
- 238000004458 analytical method Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 31
- 230000008859 change Effects 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 8
- 238000013461 design Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical group [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000002146 bilateral effect Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005253 cladding Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 239000000382 optic material Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention discloses a kind of SPR fibre optical sensors and preparation method thereof based on temperature self-compensation, the SPR fibre optical sensors include a single-mode fiber and are connected to the multimode fibre at single mode optical fiber both ends, single mode optical fiber respectively includes single mode optical fiber fibre core, single mode optical fiber covering, first layer metal film and second layer metal film by Inner and outside, multimode fibre by Inner and it is outer respectively include multimode fibre fibre core and multimode fibre covering, the central shaft of single mode optical fiber fibre core and multimode fibre fibre core is point-blank.SPR fibre optical sensors can not only generate SPR effects, but also the structure with FP chambers.Manufacture craft is simple, cheap, realizes high-precision, the detection and analysis of highly sensitive sample refractive index, all has good foreground in all kinds of detection fields.
Description
Technical field
The present invention relates to technical field of optical fiber sensing, specifically a kind of SPR fibre optical sensors based on temperature self-compensation
And preparation method thereof.
Background technology
Surface plasma body resonant vibration (Surface Plasmon Resonance, SPR) is a kind of physical optics phenomenon, when
The optical fiber surface that light beam injection is coated with certain thickness metallic film is totally reflected, and when meeting certain condition, light is coupled
Into metallic film, electronics is caused to resonate, that is, generates SPR effects.Since SPR phenomenons are to the medium refraction index of metal surface
It is very sensitive, related transducer related with refractive index can be carried out.Compared with traditional sensors, optical fiber SPR sensor has miniature
The advantages that change, high sensitivity, electromagnetism interference, fast response time.Since SPR effects have very high sensitivity, to extraneous ring
The variation in border is very sensitive, therefore more demanding to sensed condition, and most optical fiber SPR sensors are applied to scientific research field more.Cause
This needs designs the highly sensitive, optical fiber SPR sensor with self-compensating function.
Germany scientist Otto and Kretschmann propose the design structure of different SPR sensors, the two
All it is to use prism as in the carrier of conduction light wave.In recent years, the SPR of prism-type produced a series of progress.2012
Thomas et al. proposes a kind of sensor for measuring the novel SPR of carbon dioxide.The advantage of the sensor is can
To realize that continuity detects, and solubilised state and gaseous carbon dioxide can be detected.Yanase in 2013 et al. is proposed
It is used to detect its refractive index under the refractive index and stimulation of individual living cells in conjunction with the SPR sensors of CMOS cameras.
Seung-A in 2013 et al. has studied plasticised polyvinyl chloride（PVD）Sense influence of the layer thickness to SPR sensor performances.
Zhiyou in 2014 et al. proposes a kind of surface plasma resonance sensor of three-layer metal structure.2015
Nizamov et al. proposes a kind of SPR sensors of the novel self-reference based on micro- printing.Measured zone half region is
Sensing unit the other half be reference area.Graphical modification is done in measurement zone using micro- contact impact system and is used as survey area, unmodified area
Domain, which is used as, refers to area.It is advantageous that not needing individual Measurement channel to make the reference of SPR signals.
From optical fibre Fabry-perot (optical fiber Fabry-P é rot, F-P) sensor in 1988 by Lee
Since C E et al. successfully make, the measurement of the different kinds of parameters such as temperature, strain, pressure, vibration has been widely used in it.This sensor
Have many advantages, such as high sensitivity, small, fast response time, electromagnetism interference.
Patent document CN106442419A discloses a kind of self compensation SPR optical fiber biochemical sensors, by miniature quartz capillary
Pipe is coated with the gold nanoparticle of golden film and fixed single layer respectively as sensing element, in its surface adjacent regions, and inside it
Deionized water is injected, the body compensation of refractive index channels LSPR and FP temperature-compensatings channel are formed, this structure equally also uses certainly
The method of compensation improves the precision of sensor.Patent document CN105738325A discloses a kind of bilateral grinding of multi-clad
Type SPR dual sampling devices, the SPR dual sampling devices based on the bilateral grinding of more coverings are in bilateral grinding multi-clad
First layer metal material and second layer metal material on plated film on X-direction abradant surface, metal material on plated film on Y-direction abradant surface
Material.The difference of the parameters such as two facet coatings materials causes corresponding SPR loss spectras different to external environment parameters sensitivity, therefore when outer
When boundary's environmental change, two loss spectra variations are different, and to reach double-sensing purpose, this structure can accomplish to measure simultaneously double
Parameter.But all there is complicated, complex manufacturing technology in them, the higher problem of cost, and the value of practical application is not high.
Invention content
The purpose of the present invention is the deficiencies in for the above-mentioned prior art, provide a kind of at low cost, highly sensitive, high-precision
The SPR fibre optical sensors based on temperature self-compensation.
The production method of it is a further object of the present invention to provide a kind of SPR fibre optical sensors based on temperature self-compensation.
The purpose of the present invention is what is be achieved through the following technical solutions：
A kind of SPR fibre optical sensors based on temperature self-compensation, including a single-mode fiber and it is connected to the single-mode optics
The multimode fibre at fine both ends, the single mode optical fiber respectively include single mode optical fiber fibre core, single mode optical fiber covering, first layer by Inner and outside
Metal film and second layer metal film, the multimode fibre respectively include multimode fibre fibre core and multimode fibre covering by Inner and outside,
Point-blank, the first layer metal film and the second layer are golden for the central shaft of the single mode optical fiber fibre core and multimode fibre fibre core
Belong to film and gold or silver or copper or aluminium is respectively adopted.
In the further design scheme of the present invention, the material of above-mentioned first layer metal film is silver, the second layer metal film
Material be gold.
In the further design scheme of the present invention, the length of above-mentioned single mode optical fiber is 10mm, the single mode optical fiber and multimode
A diameter of 125 μm of optical fiber, the single mode optical fiber core diameter are 10 μm, and the multimode fibre core diameter is 50 μm.
In the further design scheme of the present invention, first layer metal film thickness is 40nm~50nm, second layer metal film thickness
Degree is 10nm~20nm.
The production method of the above-mentioned SPR fibre optical sensors based on temperature self-compensation, specifically includes following steps：
Step 1, it by the coat of single mode optical fiber and multimode fibre removal outside, and makes marks to single mode optical fiber and multimode fibre.
Step 2, the end face of one root multimode fiber and a single mode optical fiber is cut flat with cutter, it will using optical fiber splicer
Multimode fibre and single mode optical fiber are welded together.
Step 3, the other end of single mode optical fiber is cut flat with cutter, then another root multimode fiber end face is cut flat with, used
The other end of the single mode optical fiber of step 2 welding multimode fibre and multimode fibre are fused to together by optical fiber splicer.
Step 4, it is thick that a layer thickness 40nm~50nm is sputtered on the covering outer surface of single mode optical fiber using magnetron sputtering method
Ag films, then on Ag films layer sputter one layer of 10nm~20nm thickness gold thin film.
In the further design scheme of the present invention, the length of single mode optical fiber described in step 3 is in 8-12mm.
In the further design scheme of the present invention, Ag films thickness described in step 4 are 40nm~50nm, Ag films thickness
For 10nm~20nm.
The present invention has advantageous effect following prominent：
The SPR fibre optical sensors of the present invention can both generate SPR effects, to measure the refractive index of sample.There is FP again simultaneously
The structure of chamber, can be with measuring environment temperature, to compensate the error that ambient temperature generates SPR detection signals.Without attached
The compensation added can be realized high-precision and detect.In addition the production method of the SPR fibre optical sensors adds without polishing grinding, laser
The complexity means such as work, chemical attack, only need multimode fibre and single mode optical fiber being welded together using optical fiber splicer,
Manufacture craft is simple, cheap, realizes high-precision, the detection and analysis of highly sensitive sample refractive index.It is led in all kinds of detections
Domain all has good foreground.
Description of the drawings
Fig. 1 is the SPR optical fibre sensor structure schematic diagrams of non-overlay film in embodiment；
Fig. 2 is the SPR optical fibre sensor structure schematic diagrams of overlay film in embodiment；
In figure, 1- multimode fibre coverings, 2- multimode fibre fibre cores, 3- single mode optical fiber coverings, 4- single mode optical fiber fibre cores, 5- multimode light
Fine covering, 6- multimode fibre fibre cores, 7- second layer metal films, 8- first layer metal films.
Specific implementation mode
The invention will be further described with reference to the accompanying drawings and embodiments.
Embodiment 1
When ambient temperature changes, the spectroscopic data of existing SPR fibre optical sensors can change accordingly, be embodied in formant
Movement.Measurement accuracy is caused to decline to change.Therefore it needs caused by taking certain measure to carry out compensation temperature variation
The variation of spectroscopic data.
Referring to attached drawing 1 and attached drawing 2, a kind of SPR fibre optical sensors based on temperature self-compensation of the invention, including one section of list
Mode fiber and the multimode fibre for being connected to single mode optical fiber both ends, single mode optical fiber is by Inner and outer to respectively include single-mode optics long and slender
Core, single mode optical fiber covering, first layer metal film and second layer metal film, multimode fibre respectively include multimode fibre fibre by Inner and outside
The central shaft of core and multimode fibre covering, single mode optical fiber fibre core and multimode fibre fibre core point-blank, first layer metal film
Material be silver, the material of second layer metal film is gold.The length of single mode optical fiber is 10mm, single mode optical fiber and multimode fibre it is straight
Diameter is 125 μm, and single mode optical fiber core diameter is 10 μm, and multimode fibre core diameter is 50 μm.First layer metal film thickness is
40nm~50nm, second layer metal film thickness are 10nm~20nm.
Referring to Fig. 1, in SPR fibre optical sensors of the invention, the right side of left side multimode fibre and the right multimode fibre
Left side constitutes the structure of FP chambers, and the monitoring of temperature may be implemented using the principle of FP fibre optical sensors.It passes in a fiber
The phase for the light broadcast by fibre-optic waveguide physical length;Optical fibre refractivity radial distribution;The lateral geometric dimension of fibre-optic waveguide
Three factors determine.When sensor is placed in the environment of temperature change, since the thermo-optic effect of optical fiber and the heat of fiber optic materials are swollen
Swollen effect can directly cause the variation of three factors above, to generate phase change.The variation of phase is proportional to the change of temperature
Change, therefore by FP fibre optical sensors, i.e. SPR fibre optical sensors of the invention measure phase change, so that it may to obtain temperature to be measured
Degree variation.Then pass through the movement at the peaks SPR caused by certain algorithm compensation temperature.
Referring to Fig. 2, in SPR fibre optical sensors of the invention, by multimode fibre-single mode optical fiber-multimode fibre and single mode
The double layer of metal film of optical fiber surface constitutes spr sensor structure, and the cardinal principle of spr sensor of the invention is to work as incident light
When injecting single mode optical fiber by multimode fibre, due to the light there are many pattern in multimode fibre, and only has a kind of mould in single mode optical fiber
The light of formula, the cladding mode to inspire in single mode optical fiber work as evanescent wave to excite metallic surface plasma wave
When wave vector is identical as the wave vector of metallic surface plasma wave, then SPR effects can be excited.Incident laser energy is by surface at this time
Plasma wave absorbs so that portion of energy drastically declines, so as to observe apparent absorption peak.The choosing of metal membrane material
Select typically gold, silver, copper, aluminium.It is very high with its plated film sensitivity for gold, but signal-to-noise ratio can be relatively low, and silver is then sensitive
Spend relatively low, signal-to-noise ratio can be very high, and unstable chemcial property, is oxidized easily.Copper and aluminium are also used as film, and have class
As property.Metallic combination mode has been selected in the present embodiment to solve the contradiction of sensitivity and signal-to-noise ratio, and spirit is selected in interior layer choosing
The high silver of sensitivity plates one layer of thin layer gold to improve the stability of sensor again outside, and composite metal membrane can increase sensing
The sensitivity of device.
The production method of the SPR fibre optical sensors based on temperature self-compensation of the present invention, specifically includes following steps：
Step 1, optical fiber includes three layers, outmost coat, covering and core layer, and single mode optical fiber and multimode fibre are removed
The coat of outside, and make marks to single mode optical fiber and multimode fibre, it is convenient for following welding.
Step 2, the end face of one root multimode fiber and a single mode optical fiber is cut flat with cutter, it will using optical fiber splicer
Multimode fibre and single mode optical fiber are welded together.
Step 3, the other end of single mode optical fiber is cut flat with cutter, makes the length of single mode optical fiber in 10mm or so, then
Another root multimode fiber end face is cut flat with, with optical fiber splicer by the other end of the single mode optical fiber of step 2 welding multimode fibre
It is fused to together with multimode fibre.
Step 4, in multimode fibre-single mode optical fiber-multimode fibre structure that above-mentioned steps 2, step 3 are formed, using magnetic
Control sputtering method sputters the Ag films of a layer thickness 40nm~50nm thickness on the covering outer surface of single mode optical fiber, then in Ag films layer
The gold thin film of one layer of 10nm~20nm thickness of upper sputtering.
When experiment measures, at 25 DEG C of room temperature, wideband light source is transferred to the spr sensor by optical fiber, is sensing
Region is detected sample modulation, and it is sodium chloride solution that refractive index, which detects sample, and is calibrated using Abbe refractometer instrument, with
The variation of sample refractive index, SPR absorption peaks generate corresponding movement, track peak method measurement refractive index by peak value and resonate with SPR
The relationship at peak.By heating sodium chloride solution, it is used in combination temperature to measure the temperature of solution, while observing what spectrometer demodulated
FP transmission spectrums obtain the variation of the corresponding transmitted spectrum of specific temperature change, are then caused by certain algorithm compensation temperature
The peaks SPR movement.
The above are preferred embodiments of the present invention, all any changes made according to the technical solution of the present invention, and generated function is made
When with range without departing from technical solution of the present invention, all belong to the scope of protection of the present invention.
Claims (7)
1. a kind of SPR fibre optical sensors based on temperature self-compensation, which is characterized in that including a single-mode fiber and be separately connected
Multimode fibre in the single mode optical fiber both ends, the single mode optical fiber respectively include single mode optical fiber fibre core, single-mode optics by Inner and outside
Fine covering, first layer metal film and second layer metal film, the multimode fibre by Inner and it is outer respectively include multimode fibre fibre core and
Point-blank, the first layer is golden for the central shaft of multimode fibre covering, the single mode optical fiber fibre core and multimode fibre fibre core
Belong to film and gold or silver or copper or aluminium is respectively adopted in second layer metal film.
2. the SPR fibre optical sensors according to claim 1 based on temperature self-compensation, which is characterized in that the first layer
The material of metal film is silver, and the material of the second layer metal film is gold.
3. the SPR fibre optical sensors according to claim 1 based on temperature self-compensation, which is characterized in that the single-mode optics
Fine length is 10mm, and a diameter of 125 μm of the single mode optical fiber and multimode fibre, the single mode optical fiber core diameter is 10 μ
M, the multimode fibre core diameter are 50 μm.
4. the SPR fibre optical sensors according to claim 1 based on temperature self-compensation, which is characterized in that the first layer
Thickness of metal film is 40nm~50nm, and second layer metal film thickness is 10nm~20nm.
5. the production method of the SPR fibre optical sensors based on temperature self-compensation, specifically includes following steps described in claim 1：
Step 1, it by the coat of single mode optical fiber and multimode fibre removal outside, and makes marks to single mode optical fiber and multimode fibre；
Step 2, the end face of one root multimode fiber and a single mode optical fiber is cut flat with cutter, using optical fiber splicer by multimode
Optical fiber and single mode optical fiber are welded together；
Step 3, the other end of single mode optical fiber is cut flat with cutter, then another root multimode fiber end face is cut flat with, use optical fiber
The other end of the single mode optical fiber of step 2 welding multimode fibre and multimode fibre are fused to together by heat sealing machine；
Step 4, the silver of a layer thickness 40nm~50nm thickness is sputtered on the covering outer surface of single mode optical fiber using magnetron sputtering method
Film, then on Ag films layer sputter one layer of 10nm~20nm thickness gold thin film.
6. the SPR fibre optical sensors according to claim 5 based on temperature self-compensation, which is characterized in that described in step 3
The length of single mode optical fiber is in 8-12mm.
7. the SPR fibre optical sensors according to claim 5 based on temperature self-compensation, which is characterized in that described in step 4
Ag films thickness is 40nm~50nm, and Ag films thickness is 10nm~20nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810275088.6A CN108414474A (en) | 2018-03-30 | 2018-03-30 | A kind of SPR fibre optical sensors and preparation method thereof based on temperature self-compensation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810275088.6A CN108414474A (en) | 2018-03-30 | 2018-03-30 | A kind of SPR fibre optical sensors and preparation method thereof based on temperature self-compensation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108414474A true CN108414474A (en) | 2018-08-17 |
Family
ID=63132792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810275088.6A Pending CN108414474A (en) | 2018-03-30 | 2018-03-30 | A kind of SPR fibre optical sensors and preparation method thereof based on temperature self-compensation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108414474A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109142781A (en) * | 2018-10-15 | 2019-01-04 | 辽宁省计量科学研究院 | A kind of wind speed measuring device and method based on surface plasma body resonant vibration |
| CN109211797A (en) * | 2018-11-01 | 2019-01-15 | 北京航空航天大学 | A kind of fiber bragg grating temperature sensor with the anti-axial strain interference of temperature-compensating |
| CN110597321A (en) * | 2019-09-19 | 2019-12-20 | 东北大学 | Temperature control device for leather grade liquid |
| CN111289480A (en) * | 2020-03-11 | 2020-06-16 | 大连理工大学 | Optical fiber corrosion sensor based on surface plasma resonance technology |
| CN114705229A (en) * | 2022-03-29 | 2022-07-05 | 深圳市联创杰科技有限公司 | Substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive material |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106525776A (en) * | 2016-12-14 | 2017-03-22 | 中国计量大学 | Surface plasma resonance hydrogen sensor on basis of optical fibers with mismatched fiber cores |
| CN107703106A (en) * | 2017-11-17 | 2018-02-16 | 广东海洋大学 | A kind of fibre optical sensor of while detection temperature and heavy metal ion and preparation method thereof |
| CN208043656U (en) * | 2018-03-30 | 2018-11-02 | 南京信息工程大学 | A kind of SPR fibre optical sensors based on temperature self-compensation |
-
2018
- 2018-03-30 CN CN201810275088.6A patent/CN108414474A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106525776A (en) * | 2016-12-14 | 2017-03-22 | 中国计量大学 | Surface plasma resonance hydrogen sensor on basis of optical fibers with mismatched fiber cores |
| CN107703106A (en) * | 2017-11-17 | 2018-02-16 | 广东海洋大学 | A kind of fibre optical sensor of while detection temperature and heavy metal ion and preparation method thereof |
| CN208043656U (en) * | 2018-03-30 | 2018-11-02 | 南京信息工程大学 | A kind of SPR fibre optical sensors based on temperature self-compensation |
Non-Patent Citations (3)
| Title |
|---|
| HAMED MOAYYCD ETC.: ""Analysis of Phase Interrogated SPR Fiber optic Sensors with Bimetallic Layers"", 《IEEE SENSORS JOURNAL》 * |
| 时菲菲;赵春柳;徐贲;王东宁;: "基于光纤微腔的温度及折射率同时测量型传感器", 光子学报 * |
| 郭志勇;葛益娴;沈令闻;张鹏;顾钦顺;: "基于MSM结构的表面等离子体共振光纤折射率传感器", 半导体光电 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109142781A (en) * | 2018-10-15 | 2019-01-04 | 辽宁省计量科学研究院 | A kind of wind speed measuring device and method based on surface plasma body resonant vibration |
| CN109211797A (en) * | 2018-11-01 | 2019-01-15 | 北京航空航天大学 | A kind of fiber bragg grating temperature sensor with the anti-axial strain interference of temperature-compensating |
| CN110597321A (en) * | 2019-09-19 | 2019-12-20 | 东北大学 | Temperature control device for leather grade liquid |
| CN110597321B (en) * | 2019-09-19 | 2020-10-16 | 东北大学 | Temperature control device for leather grade liquid |
| CN111289480A (en) * | 2020-03-11 | 2020-06-16 | 大连理工大学 | Optical fiber corrosion sensor based on surface plasma resonance technology |
| CN114705229A (en) * | 2022-03-29 | 2022-07-05 | 深圳市联创杰科技有限公司 | Substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive material |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108414474A (en) | A kind of SPR fibre optical sensors and preparation method thereof based on temperature self-compensation | |
| Zhou et al. | High-sensitivity SPR temperature sensor based on hollow-core fiber | |
| Hu et al. | Fiber optic SPR sensor for refractive index and temperature measurement based on MMF-FBG-MMF structure | |
| CN109358038B (en) | Microstructure optical fiber surface plasma resonance multifunctional sensor and preparation method thereof | |
| US20130120752A1 (en) | Fiber-optic surface plasmon resonance sensor and sensing method using the same | |
| Tong et al. | Relative humidity sensor based on small up-tapered photonic crystal fiber Mach–Zehnder interferometer | |
| Liu et al. | Dual-channel surface plasmon resonance refractive index sensor based on modified hetero-core structure fiber | |
| CN113008406B (en) | High-precision temperature sensor based on enhanced vernier effect | |
| CN109655434B (en) | Optical fiber LMR sensor for multi-parameter measurement | |
| CN111077112A (en) | Echo wall mode spherical optical microcavity refractive index sensor based on surface plasma and measuring device | |
| CN110208220A (en) | A kind of multicore less fundamental mode optical fibre local surface plasma resonance sensor | |
| CN102095719A (en) | Optical fiber type sensor system based on surface plasma resonance and stimulated Raman scattering | |
| CN208043656U (en) | A kind of SPR fibre optical sensors based on temperature self-compensation | |
| Wang et al. | Simulation of a microstructure fiber pressure sensor based on lossy mode resonance | |
| Kong et al. | Micro-lab on tip: High-performance dual-channel surface plasmon resonance sensor integrated on fiber-optic end facet | |
| Tong et al. | Surface plasmon resonance optical fiber sensor for refractive index detection without temperature crosstalk | |
| Hernández et al. | Prism-based surface plasmon resonance for dual-parameter sensing | |
| Wang et al. | Research and application of multi-channel SPR sensor cascaded with fiber U-shaped structure | |
| Wang et al. | Dual-channel SPR sensor based on MSM fiber for detection of glucose concentration and Temperature | |
| CN109655176A (en) | A kind of high-precision temperature probe based on cavity filled-type microstructured optical fibers interferometer | |
| CN114235754A (en) | Optical fiber SPR sensor with temperature compensation based on capillary tube | |
| Kong et al. | Lab-in-fibers: Single optical fiber with three channels for simultaneous detection of pH value, refractive index and temperature | |
| Wang et al. | SPR Sensor Based on Cascaded NCF and U-Shaped Multimode Fibers for Simultaneous Detection of Refractive Index and Temperature | |
| CN111928880B (en) | Mach-Zehnder interference optical fiber based on surface plasma effect and sensor thereof | |
| CN206594060U (en) | A kind of index sensor for the Michelson structure that CNT is modified based on thin-core fibers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180817 |