CN108387538A - Spectrometer and the equipment for using spectrometer measurement biotic component - Google Patents

Spectrometer and the equipment for using spectrometer measurement biotic component Download PDF

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Publication number
CN108387538A
CN108387538A CN201810104080.3A CN201810104080A CN108387538A CN 108387538 A CN108387538 A CN 108387538A CN 201810104080 A CN201810104080 A CN 201810104080A CN 108387538 A CN108387538 A CN 108387538A
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China
Prior art keywords
coupler
resonator
input
spectrometer
output
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Granted
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CN201810104080.3A
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Chinese (zh)
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CN108387538B (en
Inventor
汤姆·克莱斯
安城模
李右昶
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Interuniversitair Microelektronica Centrum vzw IMEC
Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0291Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0075Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by spectroscopy, i.e. measuring spectra, e.g. Raman spectroscopy, infrared absorption spectroscopy
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/14532Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue for measuring glucose, e.g. by tissue impedance measurement
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/14546Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue for measuring analytes not otherwise provided for, e.g. ions, cytochromes
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/1455Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using optical sensors, e.g. spectral photometrical oximeters
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/68Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/6802Sensor mounted on worn items
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0256Compact construction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/26Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29332Wavelength selective couplers, i.e. based on evanescent coupling between light guides, e.g. fused fibre couplers with transverse coupling between fibres having different propagation constant wavelength dependency
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Emergency Medicine (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

Provide a kind of spectrometer.The spectrometer may include:Imaging sensor, including pel array;And photon sphere, it is arranged on pel array, and include multiple resonators and be coupled to multiple couplers of multiple resonator with disappearing.

Description

Spectrometer and the equipment for using spectrometer measurement biotic component
Cross reference to related applications
This application claims on 2 2nd, the 2017 South Korea patent application 10-2017- submitted in Korean Intellectual Property Office 0015117 priority, entire disclosure are incorporated herein by reference.
Technical field
Device and method according to example embodiment are related to spectrometer and the ingredient using ingredient in spectrometer measurement object Measuring apparatus.
Background technology
Recently, it has studied noninvasive to such as blood glucose progress of internal ingredient using Raman spectrum or near-infrared (NIR) spectrum The method of measurement.Equipment using spectral technique may include the collimation for collecting the optical signal returned from the skin of object Device, wavelength for analyzing optical signal spectrometer and collimator and spectrometer between interface such as beam shaping.Spectrum Instrument may include the photon sphere of the imaging sensor formed by multiple pixels and setting on the image sensor.
Invention content
Scheme according to example embodiment provides a kind of spectrometer, including:Imaging sensor, including pel array;With And photon sphere, it is arranged on pel array, and include that multiple resonators with disappearing are coupled to the more of the multiple resonator A coupler.
The multiple coupler may include:Input coupler, light can be input to the input coupler;And output Coupler, the output coupler may be coupled to input coupler, and can by the light output transmitted from input coupler to The pixel of pel array.
Input coupler and output coupler can correspond to grating coupler, metallic mirror or grating coupler and Metallic mirror.
At least two couplers in the multiple coupler can be consecutively provided in every a line of pel array, and And the output coupler of at least two coupler in every a line of pel array can be located at same column position.
Each coupler in the multiple coupler can be disposed separately with the multiple resonator, with described The coupling that disappears is generated between multiple couplers and the multiple resonator.
The multiple resonator can be Fabry-Perot resonator.
Photon sphere may include multiple detection zones, the multiple resonance being arranged in one of the multiple detection zone Device includes at least two resonators at least two different wave length characteristics.
At least two resonator can be alternately located in every a line of pel array.
At least two resonator can be serially arranged on the boundary line of every a line of pel array.
The multiple resonator may include at least two resonators at least two wavelength characteristics.
According to the scheme of another example embodiment, a kind of equipment measuring substance in vivo is provided, the equipment includes:Light Source is configured to emit light to object;And spectrometer, it is configured to sense the light returned from object, wherein the spectrometer can be with Including pel array and the photon sphere being arranged on pel array, photon sphere includes multiple resonators and is coupled to disappearing described Multiple couplers of multiple resonators.
The equipment can also include main body, and light source and spectrometer are mounted in the main body.
The equipment can also include belt, and the belt is connected to main body and is formed as flexible to wind object.
The equipment can also include signal processor, and the signal processor is configured so that the signal of spectrometer sensing To analyze the substance of object.
The equipment can also include display, and the display is configured to show the analysis knot obtained by signal processor Fruit.
The equipment can also include communication interface, and the communication interface is configured to pass the analysis result of signal processor It is defeated to arrive external device (ED).
Light source can emit near-infrared laser or visible light lasers.
The multiple coupler may include:Input coupler, light are input to the input coupler;And output coupling Device, the output coupler are connected to input coupler, and by the picture of the light output transmitted from input coupler to pel array Element.
At least two couplers in the multiple coupler can be arranged in every a line of the pel array so as to It is aligned with pel spacing.
The multiple resonator includes at least two resonators at least two wavelength characteristics.
According to the scheme of another example embodiment, it is supplied to a kind of spectrometer, including:Pel array;And photon sphere, The photon sphere is arranged on pel array, and includes:Input coupler, the input coupler receive light;Output coupling Device, the output coupler export the light transmitted from input coupler;Evanescent coupler, the evanescent coupler setting are inputting Between coupler and output coupler, the light received from input coupler is directed to output coupler;And resonator, institute It states resonator along the direction from input coupler to output coupler to extend, and is set as and input coupler and output coupling Device is spaced apart, to generate the coupling that disappears between resonator and evanescent coupler.
Evanescent coupler can extend to output coupler from input coupler and can be bent so that resonator and disappear The distance between the coupler that dies changes.
Photon sphere may include the first coupler group and the second coupler group in the illumination spacing of spectrometer, the first coupling Device group may include corresponding with the input coupler, the output coupler and the evanescent coupler first defeated respectively Enter coupler, the first output coupler and the first evanescent coupler, the second coupler group may include the second input coupler, Two output couplers and the second evanescent coupler and the first coupler group and the second coupler group can be serially arranged.
Resonator can be corresponding with the first resonator.Photon sphere may include:First resonator, with the first coupler group Alignment;And second resonator, it is aligned with the second coupler group, and be serially arranged with the first resonator.Second resonator Wavelength characteristic can be different from the wavelength characteristic of the first resonator.
Description of the drawings
Some example embodiments are described by referring to accompanying drawing, above-mentioned and/or other aspects will be apparent from, in the accompanying drawings:
Figure 1A and Figure 1B is the figure for the structure for showing conventional spectrograph.
Fig. 2 is the figure for the structure for showing spectrometer according to example embodiment.
Fig. 3 A and Fig. 3 B are the figures of the structure for describing spectrometer according to example embodiment.
Fig. 4 A, Fig. 4 B and Fig. 4 C are the curve graphs for describing Spectral Reconstruction performance according to example embodiment.
Fig. 5 is the figure for the schematic construction for showing the spectrometer according to another example embodiment.
Fig. 6 A and Fig. 6 B are the curve graphs for describing Spectral Reconstruction performance according to example embodiment.
Fig. 7 is the block diagram for showing the equipment for measuring biotic component according to example embodiment.
Fig. 8 is the block diagram for showing the equipment for measuring biotic component according to another example embodiment.
Specific implementation mode
Example embodiment is more fully described below with reference to attached drawing.
In the following description, even if in different figures, identical reference numeral is used for identical element.In being described below The content (for example, specific configuration and element) of restriction is used for helping comprehensive understanding example embodiment.Even if it will be apparent, however, that It, also being capable of practical example embodiment in the case where lacking the content that these are specifically limited.Further, since well known function or structure Making can make description become obscure with unnecessary details, therefore it is not described in detail.
Although should be appreciated that term " first ", " second " etc. can be used to describe various elements herein, these Element should not be limited by these terms.These terms are only used for element being distinguished from each other.In addition, unless context is separately bright Really instruction, otherwise singulative is also intended to including plural form.In the present specification, unless expressly stated otherwise, otherwise word " comprising " and its variant such as "comprising" or " having " etc. should be understood to mean that comprising the element illustrated, but be not excluded for any Other elements.Terms such as " ... unit " and " module " indicate to handle the unit of at least one functions or operations, and they It can be realized by using the combination of hardware, software or hardware and software.
Such as at least one of " ... " etc be expressed in element list before when modify entire element list, rather than repair Adorn the separate element in list.
Figure 1A and Figure 1B is the figure for the structure for showing conventional spectrograph.
A and Figure 1B referring to Fig.1, spectrometer 100 include that the imaging sensor 110 being made of pel array 111 and setting exist Photon sphere 120 on imaging sensor 110.Specifically, photon sphere may include multiple sense channels, in each sense channel In, 123 series coupled of input coupler 121, Transmission system 122 and output coupler.
121 coupled external light of input coupler.For example, the light source when the device for being used to measure biotic component emits to object Light time, light is by the skin reflex of object or scattering and returns to the device.Input coupler 121 receives the light returned and passes light It is defeated to arrive output coupler 123.Specifically, the light for being input to input coupler 121 is spectrally detached by Transmission system 122, And the optical transport detached is to output coupler 123.Output coupler 123 is by the light output of transmission to imaging sensor 110 Respective pixel is to be detected.Transmission system 122 can be formed by the Fabry-Perot resonator with various wavelength characteristics. The spectral wavelength characteristic of plain interference instrument spectrometer depends on the length of resonator.
With reference to figure 1B, in the structure of conventional spectrograph 100, two sense channels are arranged on photon sphere 120.First inspection It includes input coupler IC1, Transmission system RE1 and output coupler OC1 to survey channel, and the both ends of Transmission system RE1 connect To input coupler IC1 and output coupler OC1.The pixel of the output coupler OC1 and pel array 111 of first sense channel The position of P1 is correspondingly arranged, and the light LT for being input to input coupler IC1 is detached by Transmission system RE1 so that special The light of standing wave length is output to the pixel P1 of imaging sensor 110 by output coupler OC1.
Second sense channel includes input coupler IC2, Transmission system RE2 and output coupler OC2, and Transmission system The both ends of RE2 are connected to input coupler IC2 and output coupler OC2.The output coupler OC2 and pixel of second sense channel The position of the pixel P2 of array 111 is correspondingly arranged, and is input to input coupler IC2 and by Transmission system RE2 The light spectrally detached is output to pixel P2 by output coupler OC2.In this case, the transmission of the second sense channel System RE2 is formed to have the length different from the Transmission system RE1 of the first sense channel, to have and Transmission system RE1 Different spectral wavelength characteristics.
In the structure of conventional spectrograph 100, directly connect due to spectrally detaching the both ends of Transmission system 122 of light It is coupled to input coupler 121 and output coupler 123, it requires the length for adjusting Transmission system 122 with various waves Long characteristic.Specifically, when adjusting the length of Transmission system 122, it is directly coupled to the output coupler 123 of Transmission system 122 Position may change.However, if the position of output coupler 123 is not precisely aligned the correspondence of imaging sensor 110 Pixel is then likely to occur light loss, and the resolution ratio of spectrometer and optical efficiency may deteriorate.
Fig. 2 is the figure for the structure for showing spectrometer according to example embodiment.The structure of spectrometer 200 can represent inspection It surveys the laser of Single wavelength and analyzes the example embodiment of the Raman spectrometer structure of absorption spectra, but not limited to this.
With reference to figure 2, spectrometer 200 according to example embodiment includes the imaging sensor 10 for detection light and is used for It spectrally detaches exterior light and outputs light into the photon sphere 20 of imaging sensor 10.As shown in Fig. 2, the figure with constant dimensions As sensor 10 is formed by the array of multiple pixels 210, and photon sphere 20 is arranged on the pel array of imaging sensor 10. For example, imaging sensor 10 can be implemented as charge coupling device (CCD) or complementary metal oxide semiconductor (CMOS) image Sensor (CIS), but not limited to this.
Photon sphere 20 may include one or more detection zone DA.For example, Fig. 2 shows 7 row R1 by pel array The region formed to the row of R7 and 19 C1 to C19 is arranged to a DA, but the line number of DA, columns and size are not limited to embodiment Shown in, and can according to the size of the size of various standards such as imaging sensor, spectral resolution and pel spacing into Row is adjusted.
In each DA, it is provided with multiple resonators 241 and 242 and multiple coupler CG1 and CG2.241 He of resonator 242 and coupler CG1 and CG2 independently form and be arranged on pel array so that the position of coupler CG1 and CG2 will not Changed according to the length for the resonator 241 and 242 for determining spectral wavelength characteristic.In addition, resonator 241 and 242 and coupling Device CG1 and CG2 disappear coupling each other, (referring to evanescent coupler EC) as shown in Figure 2.Term " disappear coupling " can refer to a pair Coupling between input coupler and output coupler and resonator, and input coupler/output coupler and resonator it Between be not directly connected to or contact, while input coupler/output coupler is placed on the fixed position relative to pixel.Disappear Coupling of dying can occur due to the curved waveguide between input coupler and output coupler.Disappearing the intensity coupled can be weak Coupling between the conventional transmission systems being connected to each other directly and traditional input coupler/output coupler.According to example reality Example is applied, resonator 241 and 242 can be implemented as Fabry-Perot resonator.
As shown in Fig. 2, the bending of evanescent coupler EC or arc shape can allow coupler 221,222,231 and 232 It is coupled with disappearing with resonator 241 and 242.Evanescent coupler EC can have than input coupler 221 and output coupler 231 The distance between long length, and may include one or more circular bends.
Coupler CG1 and CG2 respectively include input coupler 221 and 222 and output coupler 231 and 232, China and foreign countries Portion's light is input to input coupler 221 and 222, and output coupler 231 and 232 will enter into input coupler 221 and 222 Light output to corresponding pixel.For example, input coupler 221 and 222 and output coupler 231 and 232 can be grating Coupler or metallic mirror.For example, when being input to the optical transport of input coupler 221 to output coupler 231, with disappearance The light that ground is coupled to the corresponding specific wavelength characteristic of mode of resonance of the resonator 241 of input coupler 221 is coupled, and its The light of commplementary wave length characteristic is output to the pixel of imaging sensor by output coupler 231.In other words, when light is from input coupling When device 221 is transferred to output coupler 231, resonator 241 is escaped into according to the required wavelength of the length of resonator 241, and The optical transport of its commplementary wave length is to output coupler 231.Similarly, when light is transferred to output coupler 232 from input coupler 222 When, resonator 242 is escaped into according to the required wavelength of the length of resonator 242, and the optical transport of its commplementary wave length is to output coupling Clutch 232.Required wavelength according to the length of resonator 241 and 242 can refer to the resonance wavelength of resonator 241 and 242.
Meanwhile each in coupler CG1 and CG2 is repeatedly provided in each of the pel array of imaging sensor 10 In row, and at least two coupler CG1 and CG2 can be consecutively provided in every a line of each DA, as shown in Figure 2.Tool Body, the first coupler CG1 and the second coupler CG2 continuously arranged in each row can be of the same size.So And this example embodiment is without being limited thereto, the first coupler CG1 and the second coupler CG2 could be provided as according to the size of DA or The length of resonator 241 and 242 that person according to disappearing couples and be of different sizes.
In addition, in each DA, at least two resonators 241 and 242 with different wave length characteristic can repeatedly go here and there In the every a line for the pel array that row is arranged in imaging sensor 10.In this case, first with different wave length characteristic Resonator 241 and the second resonator 242 can alternately be disposed side by side on every a line of the pel array of imaging sensor 10 On boundary line.It can be by adjusting be connected to the position of resonator 241 and the speculum 251,252 and 253 at 242 respective both ends The first resonator 241 and the second resonator 242 is set to be formed to have different length so that the first resonator 241 and second is humorous The device 242 that shakes has different wavelength characteristics.The position of speculum 251,252 and 253 is according to the first resonator 241 and the second resonance The wavelength characteristic of device 242 determines, and with input coupler 221 and 222 and output coupler 231 and 232 or image sensing The position of the pixel of device 10 is unrelated.In such a case, it is possible to according between the purpose of analysis, the size of imaging sensor, pixel Away from the predetermined resonator such as size wavelength characteristic.
As shown in Fig. 2, the first resonator 241 is along from input coupler 221 to output coupler 231 or from output coupling Device 231 extends to the direction of input coupler 221.Second resonator 242 is along from input coupler 222 to output coupler 232 Or extend from output coupler 232 to the direction of input coupler 222.First resonator 241 be connected to input coupler Evanescent coupler EC between 221 and output coupler 231 is spaced apart.Because evanescent coupler EC is camber line and is bent, disappear Dying the distance between coupler EC and the first resonator 241 can be along from input coupler 221 to the direction of output coupler 231 Change.Second resonator 242 and the intervals evanescent coupler EC being connected between input coupler 222 and output coupler 232 It opens, and the distance between evanescent coupler EC and the second resonator 242 can be along from input couplers 222 to output coupler 232 direction changes.
According to example embodiment, the resonator having there are two types of different wave length characteristic can be repeatedly set in each DA, And the resonator with different wave length characteristic can also be set between different DA so that each DA can be detected with difference The light of wavelength characteristic.
For example, be 5.5 μm in pel spacing, and 19 pixel column C1 to C19 that total length is 104.5 μm are set as figure In the case of a detection zone on sensor 10, two couplers CG1 and CG2 can repeatedly be continuously disposed in each In every a line in the row R1 to R7 of DA.In this case, in every DA, the input coupling of the first coupler CG1 in each row The position of clutch 221 and output coupler 231 can be arranged to and the picture in the same row of the pel array of imaging sensor 10 Element alignment.Similarly, in every DA, the input coupler 222 of the second coupler CG2 and output coupler 232 in each row Position can be arranged to be aligned with the pixel in the same row of the pel array of imaging sensor 10.
In minimum interval Lmin be 10 μm to largest interval Lmax be 91.48 μm in the range of have interval variation Δ L be The resonator of 0.97 μm of 85 different lengths can be consistently arranged in all DA so that each DA has different wavelength Characteristic.Minimum interval Lmin can refer to the predetermined minimum length for the resonator that be arranged in DA.Largest interval Lmax can To refer to the predetermined maximum for the resonator that be arranged in DA.Interval variation Δ L can refer to the pre- of resonator length Fixed variation.Accoding to exemplary embodiment, while the length of the resonator in DA changes, the size of DA can be fixed. The illumination spacing of photon sphere 20 can be equal to the length of DA.It, can be in the picture of imaging sensor for each length of resonator It repeats that 8200 identical structures are arranged in pixel array.However, these examples are not limited to above description, and can be according to image The size of sensor, the size of pel spacing, the size of DA, the range of the length of resonator, resonance length interval etc. and change Become.
Fig. 3 A and Fig. 3 B are the figures of the structure for describing spectrometer according to example embodiment.
No matter Fig. 3 A show the length of resonator 340, it is set as output coupler 330 to be aligned in pel array Specific pixel 310 position at design.As shown in Figure 3A, input coupler 320 and output coupler 330 couple with disappearing To resonator 340 to be arranged in specific pixel 310, and in this case, the output coupling that can according to disappearing couple The output wavelength of clutch 330 adjusts the length of resonator 340.In this way, regardless of the length of resonator 340, output coupling Device 330 is set as at the position for being aligned in the pixel 310 of pel array so that various spectroscopy components (for example, metal barrier) It is desirably integrated into photon sphere.
Fig. 3 B schematically show the structure of spectrometer, the pairs of input coupling being provided at specific pixel location Clutch 321 and 322 and output coupler 331 and 332 disappear ground be coupled to the resonator 341 and 342 with different length.For Convenient for description, two resonators 341 and 342, input coupler 321 and 322 and output coupler 331 and 332 are shown, But the quantity of these elements is not particularly limited.As shown in Figure 3B, resonator 341 and 342 can be according to spectral wavelength characteristic It is set as the length for having different.In addition, the ground that disappears is coupled to the input coupler 321 and 322 of corresponding resonator 341 and 342 And output coupler 331 and 332, especially output coupler 331 and 332 are coupled to 341 He of corresponding resonator with disappearing 342 so that output coupler 331 and 332 can be arranged at respective pixel P1 and P2 in same row.
In this way, according to this example embodiment, input coupler and output coupler be arranged at specific position with image The pixel of sensor is aligned, and input coupler and output coupler are coupled to resonator with disappearing, therefore has various length The resonator of degree it is integrated be it is possible, resonance length be influence spectral resolution and Spectral Reconstruction performance factor.
Fig. 4 A to Fig. 4 C are the curve graphs for describing Spectral Reconstruction performance according to example embodiment.
Fig. 4 A, which are shown, is integrated into length in photon sphere in 10 μm of minimum value to the resonator in 90 μ m of maximum value In the case of Spectral Reconstruction performance, wherein the cosine similarity rebuild between spectrum and reference spectra is 0.915.Fig. 4 B are shown By Spectral Reconstruction of the length in the case where 30 μm of minimum value is integrated into the resonator in 70 μ m of maximum value in photon sphere Performance, wherein the cosine similarity rebuild between spectrum and reference spectra is 0.833.Fig. 4 C are shown length in 40 μm of minimum value Resonator in 60 μ m of maximum value be integrated into photon sphere in the case of Spectral Reconstruction performance, wherein rebuild spectrum and Cosine similarity between reference spectra is 0.807.
Due to wider range length various resonators be arranged on photon sphere, so increase spectral resolution and Spectral Reconstruction performance increases.In this exemplary embodiment, as described above, input coupler and output coupler are spaced in pixel On remain constant so that the resonator of the various length with wider range can be integrated, therefore spectrum can be improved Energy.
Fig. 5 is the figure for the schematic construction for showing the spectrometer according to another example embodiment.
With reference to figure 5, in the structure according to the spectrometer 500 of this example embodiment, the structure such as in above-mentioned spectrometer 200 In like that, by above be provided with various spectroscopy components photon sphere 20 be arranged on the imaging sensor 10 of detection light.Photon sphere 20 may include one or more detection zone DA, and each DA includes multiple coupler CG1 and CG2 and multiple resonators 540, resonator 540 is coupled to corresponding coupler CG1 and CG2 with disappearing, and coupler CG1 and CG2 are arranged in imaging sensor On the array of 10 pixel 510.
In the structure according to the spectrometer 500 of this example embodiment, the spectroscopy components of photon sphere 20 could be provided as making All DA wavelength characteristics having the same are obtained, it is different from the structure of spectrometer 200 of embodiment described with reference to figure 2.For example, more A coupler CG1 and CG2 can be repeatedly provided in every a line of each DA, and be coupled to disappearing coupler CG1 and The resonator of CG2 can be formed to have various length, and be arranged so that the DA has complete spectral wavelength characteristic. In this case, can by differently adjust the position of speculum 551,552 and 553 by the resonator of multiple and different types with The mode of upsetting is arranged in each DA.
For example, when pel spacing is 5.5 μm, and 19 pixel columns that total length is 104.5 μm are set as image sensing When a detection zone on device 10, two couplers CG1 and CG2 are repeatedly continuously disposed in row R1 extremely in each DA In R7, as shown in Figure 5.In this case, in every DA, the output coupler of each coupler CG1 and CG2 in often going 531 and 532 position could be provided as consistently being placed in same row.In addition, being 10 μm in minimum interval Lmin arrives maximum The multiple resonators being spaced with interval variation Δ L 85 different lengths for being 0.97 μm in the range of Lmax is 91.48 μm can It is arranged in each DA by according in a manner of upsetting so that each DA wavelength characteristics having the same.In this case, one The size of DA can be 0.049mm2(104.5 5.5 μm of μ m x85), and the quantity of DA can depend on whole image and sense The size of device 10.
As described above, the resonator of multiple and different types is arranged according to form is upset on photon sphere 20, so as to incite somebody to action The influence for the optical heterogeneity that may occur in whole image sensor 10 minimizes, to reduce thus caused frequency spectrum Performance deteriorates.
Fig. 6 A and Fig. 6 B are the curve graphs for describing Spectral Reconstruction performance according to example embodiment.
Fig. 6 A show L=0.97 μm of the interval delta between the length for the resonator that be arranged on photon sphere and have Spectral Reconstruction performance in the case of thering is the resonator of corresponding length to be integrated into photon sphere.In this case, spectrum is reconstructed Cosine similarity between reference spectra is 0.994.Fig. 6 B show that the interval between length is 0.1 μm (than in Fig. 6 A Interval it is relatively much shorter) and Spectral Reconstruction performance by the resonator with the length being so spaced in the case of integrated. In this case, it is 1 to reconstruct the cosine similarity between spectrum and reference spectra.
As shown in Figure 6 A and 6 B, it according to this example embodiment, is kept in the position of input coupler and output coupler Resonator is formed separately in the state of fixed position, then resonator is coupled to input coupler and output coupling with disappearing Device so that resonator can differently be integrated by shorter interval, therefore can increase signal-to-noise ratio and spectral resolution.
Fig. 7 is the block diagram for showing the equipment for measuring biotic component according to one embodiment.
With reference to figure 7, the equipment 700 for measuring biotic component may include light source 710, spectrometer 720 and signal processing Device 730.
Light source 710 can emit light in response to the control signal of signal processor 730 to object OBJ.Light source 710 can match It is set to transmitting visible light lasers or near-infrared laser so that absorption spectra can be analyzed by Raman spectrum or near infrared spectrum. Light source 710 can be formed by halogen lamp or light emitting diode (LED), but not limited to this.
Spectrometer 720 can detect the light for reflecting or scattering from the living tissue of the object OBJ irradiated by light source 710. In this case, object OBJ can be the skin of people or the live body of animal.
Spectrometer 720 can be corresponding with the spectrometer 200 or 500 described with reference to figure 2 or Fig. 5.Spectrometer 720 can wrap It includes the imaging sensor of detection light and stacks on the image sensor and collect and emit the photon sphere of light.
Photon sphere includes receiving from the input coupler of the object OBJ light returned and being coupled to input coupler and to figure As the pixel of sensor exports the output coupler of received light.In this case, output coupler is set as and image The pixel of sensor is aligned, so that light loss minimization.
In addition, photon sphere includes multiple resonators, and when the optical transport received by input coupler is to output coupler, institute State resonator and spectrally separate light into various wavelength characteristics, and each resonator with input coupler and output coupling Clutch is formed separately, and is coupled to input coupler and output coupler with disappearing.In this case, resonator can be with It is Fabry-Perot resonator, and input coupler and output coupler can be grating couplers.
Photon sphere may include multiple detection zones.The input coupler that is arranged in each detection zone, output coupling Device resonator can be repeatedly provided in every a line of the pel array of imaging sensor.
Furthermore it is possible to evenly or uniformly be distributed different types of resonator so that each detection zone has difference Wavelength characteristic.It is alternatively possible to resonator of the setting with required whole wavelength characteristics in a detection zone, and The resonator of same type is repeatedly provided in each detection zone so that each detection zone wavelength having the same is special Property.
Signal processor 730 can receive pixel detection by imaging sensor to optical signal, and use and received Optical signal measures biotic component.For example, signal processor 730 can use the Raman optical signal received from imaging sensor Raman spectrum is reconstructed, distinguishes biotic component by analyzing the Raman spectrum of reconstruct, and acquisition and the concentration of each ingredient have The information of pass.Here, biotic component may include blood glucose, triglycerides, cholesterol, calorie, protein and uric acid, but unlimited In this.
In addition, signal processor 730 can will be notified to generate to use according to preset standard based on the biotic component of measurement The alarm at family or warning message.
According to the present embodiment for measure biotic component equipment can according to including main body and belt, can be worn on Wearable form manufacture on object OBJ.In this case, wearable form may include Wristwatch-type, bracelet type, wrist strap Type, ring-shaped, glasses type, hair band type etc., and its shape or size is not particularly limited.
Light source 710, spectrometer 720 and signal processor 730 may be mounted in main body.For example, the Wristwatch-type the case where Under, light source 710 and spectrometer 720 may be mounted at the lower part of the main body contacted with the wrist of user, and signal processor 730 It may be mounted in the internal base plate of main body and be electrically connected to light source 710 and spectrometer 720.
Belt can be formed as flexible to wind object, and if necessary, the battery for powering to main body It can be embedded into belt.
In addition, may include individual operating unit for measuring the equipment 700 of biotic component.Operating unit can receive The order received is simultaneously transferred to signal processor 730 by the order of user.
Fig. 8 is the block diagram for showing the equipment for measuring biotic component according to another example embodiment.
With reference to figure 8, the equipment 800 for measuring biotic component may include light source 710, spectrometer 720, signal processor 730, display 810 and communication unit (for example, communication interface) 820.Light source 710, spectrometer 720 and letter are described with reference to Fig. 7 The structure of number processor 730, and therefore emphasis is hereinafter described to the configuration of display 810 and communication unit 820.
Display 810 is mounted in main body, and various information are exported under the control of signal processor 730.Specifically, it shows Show device 810 can show information related with the biotic component measured by signal processor 730 or with the biotic component of measurement Relevant health status information, warning or warning information etc., and using various visual display methods these are shown to user Information.
Display 810 may include touch modules, and user is allowed to execute touch input.Display 810 can be exported and is used for The interface interacted with user receives the order received from user by the interface, and the order received is transferred to letter Number processor 730.
Communication unit 820 may be mounted in main body, and in response to the control signal of signal processor, using various logical Letter technology is to external equipment transmission data and from outer equipment receiving data.In this case, the communication technology may include indigo plant It is tooth communication, bluetooth low energy consumption (BLE) communication, near-field communication (NFC), WLAN (WLAN) communication, ZigBee communication, infrared Data association (IrDA) communication, Wi-Fi direct (WFD) communication, ultra wide band (UWB) communication, Ant+ communications, Wi-Fi communications and the Three generations (3G), forth generation (4G) and the 5th generation (5G) communication technology, but not limited to this.
For example, communication unit 820 may be coupled to external equipment to be communicated, and transmit measured sensor letter Number, biotic component information etc..In this case, external equipment may include smart phone, Intelligent flat, desktop computer, Notebook computer and relative to for measure biotic component equipment 800 have excellent calculated performance other information handle Equipment.However, the type of external equipment is not limited to above-mentioned example.In this manner it is achieved that the equipment 800 for measuring biotic component It can be manufactured with small size and measure biotic component information, while allowed external equipment and managing various letters using biotic component information Breath, such as the biotic component of user measure such as health status analysis of history, the statistical information measured according to biotic component and become Change historical information, and in various ways as chart provides described information.
In addition, communication unit 820 can from external equipment receive for calibrator (-ter) unit 800 reference information, such as with reference to Blood glucose value, and described information is transferred to signal processor 730.
While not limited to this, example embodiment may be implemented as the computer-readable generation on computer readable recording medium storing program for performing Code.Computer readable recording medium storing program for performing is can to store data and data can then be stored by any data that computer system is read Equipment.The example of computer readable recording medium storing program for performing include read-only memory (ROM), random access memory (RAM), CD-ROM, Tape, floppy disk and optical data storage.Computer readable recording medium storing program for performing can also be distributed in the computer system of networking, So that storing and executing computer-readable code according to distribution mode.In addition, example embodiment can be written as computer program, institute Computer program is stated to be transmitted by computer-readable transmission medium (for example, carrier wave), and execute described program general or It is received and realizes in special digital computer.Furthermore, it is to be understood that in the exemplary embodiment, the one of above-mentioned apparatus and equipment A or multiple units may include circuit, processor, microprocessor etc., and can execute storage in computer-readable medium Computer program.
The above example embodiment is merely exemplary and is not necessarily to be construed as limiting.The teachings of the present invention is readily able to apply In other kinds of device.In addition, the description to example embodiment is merely exemplary, rather than in order to limit claim Range, and those skilled in the art will be clear that a variety of alternative, modifications and variations.

Claims (20)

1. a kind of spectrometer, including:
Imaging sensor, including pel array;And
Photon sphere is arranged on the pel array, and includes that multiple resonators with disappearing are coupled to the multiple resonance Multiple couplers of device.
2. spectrometer according to claim 1, wherein the multiple coupler includes:
Input coupler, light are input to the input coupler;And
Output coupler, the output coupler be connected to the input coupler, and will be transmitted from the input coupler Pixel of the light output to the pel array.
3. spectrometer according to claim 2, wherein the input coupler and the output coupler correspond to grating Coupler, metallic mirror or grating coupler and metallic mirror.
4. spectrometer according to claim 1, wherein at least two couplers in the multiple coupler are continuously set It sets in every a line of the pel array, and at least two coupler in every a line of the pel array is defeated Go out coupler and is located at same column position.
5. spectrometer according to claim 4, wherein each coupler in the multiple coupler with it is the multiple Resonator is disposed separately, to generate the coupling that disappears between the multiple coupler and the multiple resonator.
6. spectrometer according to claim 1, wherein the multiple resonator is Fabry-Perot resonator.
7. spectrometer according to claim 1 is arranged wherein the photon sphere includes multiple detection zones the multiple The multiple resonator in one of detection zone includes at least two resonators at least two different wave length characteristics.
8. spectrometer according to claim 7, wherein at least two resonator is alternately located at the pixel battle array In every a line of row.
9. spectrometer according to claim 8, wherein at least two resonator is serially arranged in the pixel battle array On the boundary line of every a line of row.
10. spectrometer according to claim 1, wherein the multiple resonator includes having at least two wavelength characteristics At least two resonators.
11. a kind of equipment for measuring substance in vivo, the equipment include:
Light source is configured to emit light to object;And
Spectrometer is configured to sense the light returned from the object,
The wherein described spectrometer includes:
Pel array;And
Photon sphere is arranged on the pel array, and includes that multiple resonators with disappearing are coupled to the multiple resonance Multiple couplers of device.
12. equipment according to claim 11 further includes signal processor, the signal processor is configured so that described The signal of spectrometer sensing analyzes the substance of the object.
13. equipment according to claim 11, wherein light source transmitting near-infrared laser or visible light lasers.
14. equipment according to claim 11, wherein the multiple coupler includes:
Input coupler, light are input to the input coupler;And
Output coupler, the output coupler be connected to the input coupler, and will be transmitted from the input coupler Pixel of the light output to the pel array.
15. equipment according to claim 11, wherein at least two couplers in the multiple coupler are arranged in institute It states in every a line of pel array to be aligned with pel spacing.
16. equipment according to claim 11, wherein the multiple resonator includes having at least two wavelength characteristics At least two resonators.
17. a kind of spectrometer, including:
Pel array;And
Photon sphere, the photon sphere is arranged on the pel array, and includes:
Input coupler, the input coupler receive light;
Output coupler, the output coupler export the light transmitted from the input coupler;
Evanescent coupler, the evanescent coupler are arranged between the input coupler and the output coupler, will be from The light that the input coupler receives is directed to the output coupler;And
Resonator, the resonator extends along from the input coupler to the direction of the output coupler, and is set as It is spaced apart with the input coupler and the output coupler, to be generated between the resonator and the evanescent coupler Disappear coupling.
18. spectrometer according to claim 17, wherein the evanescent coupler extends to institute from the input coupler It states output coupler and is bent so that the distance between the resonator and the evanescent coupler change.
19. spectrometer according to claim 17, wherein the photon sphere includes in the illumination spacing of the spectrometer First coupler group and the second coupler group,
The first coupler group include respectively with the input coupler, the output coupler and the evanescent coupler phase Corresponding first input coupler, the first output coupler and the first evanescent coupler,
The second coupler group includes the second input coupler, the second output coupler and the second evanescent coupler, and
The first coupler group and the second coupler group are serially arranged.
20. spectrometer according to claim 17, wherein the resonator is corresponding with the first resonator, and
The photon sphere includes:
First resonator, first resonator are aligned with the first coupler group;And
Second resonator, second resonator are aligned with the second coupler group, and serial with first resonator Ground is arranged, and
The wavelength characteristic of second resonator is different from the wavelength characteristic of the first resonator.
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