CN108292621A - Load port - Google Patents
Load port Download PDFInfo
- Publication number
- CN108292621A CN108292621A CN201680069222.6A CN201680069222A CN108292621A CN 108292621 A CN108292621 A CN 108292621A CN 201680069222 A CN201680069222 A CN 201680069222A CN 108292621 A CN108292621 A CN 108292621A
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- Prior art keywords
- cover
- load port
- mounting table
- container
- casket
- Prior art date
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000013507 mapping Methods 0.000 claims description 53
- 230000011218 segmentation Effects 0.000 claims description 21
- 230000009471 action Effects 0.000 claims description 17
- 238000005192 partition Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 14
- 238000012546 transfer Methods 0.000 description 12
- 238000003860 storage Methods 0.000 description 9
- 239000002245 particle Substances 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000003032 molecular docking Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 235000004443 Ricinus communis Nutrition 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 210000000352 storage cell Anatomy 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The mapped sensors (30) that load port (1) has are the sensors mapped for the FFC (example of treated object) to being accommodated in casket (51 (52)).Mapped sensors (30) have sensor portion (31) and the lifting unit (32) for making the sensor portion (31) lift.Mapped sensors (30) are configured in the side opposite with that side of conveying space of the pedestal (10) of load port (1).
Description
Technical field
The present invention relates to one kind in order to be loaded relative to treated objects such as conveying space carrying-in/carrying-out wafers for storing
The load port of the container of the treated object.
Background technology
What above-mentioned container existed referred to as FOUP (Front-Opening Unified Pod) with lid to be opened/closed
The container of hermetic type, the opening container referred to as open casket.It is equipped with the frame plate of multilayer, wafer in the inside of these containers
Etc. multiple treated objects separate in the up-down direction constant compartment of terrain with flat-hand position storage in this embodiment.Here, general
For, load port has the function of as mapping function.Mapping function is multiple quilts such as the wafer that detection is accommodated in container
Function of the processed material in receiving states such as the presence or absence of each layer, inclinations.
As the technology about above-mentioned mapping function, such as there is the technology described in patent document 1.The conventional art is as follows
Ground is constituted.There is the mapping device that the liftable of mapped sensors moves in back side (in conveying chamber) setting of load port,
Make mapping device and is used to separate conveying space and external door (door of load port) lifting moving together.Mapping device has
Swing frame, by making swing frame to container side oscillation as open casket, FOUP, to which mapped sensors are inserted into container
In.
Existing technical literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2015-50410 bulletins
Invention content
Problems to be solved by the invention
Above-mentioned conventional art there is a problem of following.Due to constituting the elevator of the mapping device described in patent document 1
Structure, swing mechanism are located at the back side (in conveying chamber) of load port, therefore it is (small from these mechanism sections to will produce particle
Dust).In addition, causing to be attached to door by the air-flow generated by the lifting of mapping device, swing, the particle of conveying chamber is conveying
It flies upward interior.Due to must maintain clean environment (clean environment) in conveying chamber, convey indoor particle generation,
It flies upward unsatisfactory.In addition, based on mapping as a result, once find mistake, then open door must be closed again.It is accommodated in
Find that the container of treated object of mistake will be replaced in mapping, but with the closing motion of not door the case where compared with, container
Replacement can postpone and open door is closed into the corresponding amount of such action again.
The present invention is to be completed in view of above-mentioned actual conditions, its purpose is to provide a kind of such load port,
The load port, which has to avoid being acted by mapping, to be caused in conveying space to generate particle (in conveying chamber) and not need
The mapping function of the opening and closing of the door of load port caused by being acted by mapping.
The solution to the problem
The present invention load port include：Pedestal, erects configuration, which constitutes the separation for dividing conveying space
A part for wall, and with for the pedestal opening portion relative to the conveying space carrying-in/carrying-out treated object；Mounting table,
Set on the side opposite with that side of the conveying space of the pedestal, the mounting table is for storing multiple treated objects
Container mounting；And door, it is used to carry out the opening and closing in the pedestal opening portion.The load port includes mapped sensors, should
Mapped sensors have sensor portion and the lifting unit for making the sensor portion lift, for the institute to being accommodated in the container
It states treated object to be mapped, which configures one opposite with that side of the conveying space in the pedestal
Side.
Using the structure, due to the mapped sensors of the lifting unit with sensor portion and for making sensor portion lifting
It is not disposed in conveying space, and is disposed on except conveying space, therefore will not be acted and be caused in conveying sky by mapping
Interior generation particle.Further, since the opening and closing of the door of load port is detached with mapping action, therefore can need not be moved by mapping
The opening and closing of this caused by making.
In addition, using the above structure, can also obtain effect below.It will not be defeated using being set to by mapped sensors constriction
The conveyor zones for sending the treated object transfer robot in space to convey treated object.
The present invention is it is also preferred that the container leans on the conveying space in the state of being placed in the mounting table
That side and its that opposite side there is opening portion, the sensor portion to have light-emitting component portion and photo detector portion, should
Light-emitting component portion and photo detector portion are configured at except container in the state of being loaded in the mounting table and are to bow
The position that the treated object for being accommodated in the container is clipped in the middle by apparent time, from the light-emitting component portion to the photo detector
The opening portion irradiation light that portion passes through the container.
Prevent the light unrestrained anti-due to making the light from mapped sensors pass through the opening portion of container using the structure
The situations such as penetrate, mapping accuracy rises.Further, since can be to the light-emitting component portion of the sensor portion of lifting moving and photo detector
Portion keep configuration storage treated object container except state mapped, therefore can be with container type, size
Independently map.In other words, be a variety of containers, various sizes of container, being also changed without mapped sensors can map.
The present invention it is also preferred that using the mapped sensors to be accommodated in the treated object of the container into
After row mapping, the door is made to be acted and open the pedestal opening portion.
It can be in morning due to can be mapped before opening pedestal opening portion (open door) using the structure
Phase replaces the container that there is mistake.
The present invention it is also preferred that select mapping parameters corresponding with the container automatically.
Using the structure, even a variety of containers, various sizes of container also can promptly map.
The present invention is it is also preferred that load port has for being covered in the container loaded in the mounting table and institute
The cover to be opened/closed for stating mapped sensors is covering the container loaded in the mounting table and described using the cover
After mapped sensors, the treated object for being accommodated in the container is mapped using the mapped sensors.
Using the structure, it can prevent the hand in mapping action process from touching container, mapped sensors.
It is also preferred that the cover includes multiple segmentation covers of the form of segmentation, the multiple segmentation cover is constituted the present invention
For can keep out of the way the mounting table top and the mounting table underlying space.
Here, the loading described in such as No. 4474922 bulletins of Japanese Patent Publication No., Japanese Unexamined Patent Publication 2003-249535 bulletins
What port had is provide with the structure of the lower section of the mounting table all to keep out of the way load port.Using the cover of the structure, it is difficult to
Ensure the mechanical mechanism of the lower section of mounting table and the storage space of electrical equipment.Even if hypothesis can ensure storage space, the receipts
Receiving space can also complicate.
On the other hand, above-mentioned structure using the present invention, by the way that the to be opened/closed of container and mapped sensors will be covered
Multiple segmentation covers of the form for segmentation are provide with, to which the configuration of cover and the degree of freedom of hood shape increase.Due to making multiple point
Cut cover annealing keep away the top of mounting table, mounting table underlying space, rather than the lower section of mounting table, therefore all keep out of the way with cover is made
To mounting table underlying space the case where compare, be easy to ensure that load port is required below the mounting table of load port
The storage space of mechanical mechanism and electrical equipment.
The present invention is it is also preferred that the multiple segmentation cover has：1st cover, covers the front side of the mounting table, and
And lifting moving can be carried out, to keep out of the way the underlying space of the mounting table when being set as opening state；And the 2nd cover,
It is placed on the 1st cover above and covers the upper side of the mounting table, and rotational action can be carried out, to be beaten described in being set as
Keep out of the way the top of the mounting table when open state.
Using the structure, especially by the knot being provide with the segmentation for keeping out of the way the underlying space of mounting table as lifting moving
Structure, to be easier to ensure the required mechanical mechanism of load port and electrical equipment below the mounting table of load port
Storage space.
The present invention is it is also preferred that being respectively provided in the multiple segmentation cover makes the multiple segmentation cover be acted
Driving device.
Using the structure, segmentation cover automatic shutter can be made.Thereby, it is possible to the types of carrying method, container with container
Required segmentation cover is correspondingly only set to automatically open or so that segmentation cover is beaten automatically in the range of required bottom line
The control opened etc..
The effect of invention
In accordance with the invention it is possible to provide a kind of such load port, having can avoid being caused by mapping action
The opening and closing of the door of load port reflects caused by generating particle in conveying space (in conveying chamber) and need not being acted by mapping
Penetrate function.
Description of the drawings
Fig. 1 is that device used in the load port comprising an embodiment of the invention, semiconductor manufacture is whole
The approximate vertical view of body.
Fig. 2A is the stereogram of load port shown in FIG. 1, and is indicate load port in the state that cover is closed vertical
Body figure.
Fig. 2 B are the stereogram of load port shown in FIG. 1, and are indicate load port in the state that cover is opened vertical
Body figure.
Fig. 3 is the vertical view of load port shown in Fig. 2 B viewed from above.
Fig. 4 is the stereogram for indicating the adapter being positioned in the mounting table of load port and casket.
Fig. 5 is the stereogram for indicating the adapter being positioned in the mounting table of load port and casket.
Fig. 6 be indicate load port shown in Fig. 2A, Fig. 2 B dismantled outer cover, pedestal and the 2nd cover, load port
In-built stereogram (the 1st cover decline state).
Fig. 7 be indicate load port shown in Fig. 2A, Fig. 2 B dismantled outer cover, pedestal and the 2nd cover, load port
In-built stereogram (the 1st cover rise state).
Fig. 8 is the stereogram (state for being equipped with the 2nd cover) on the top for indicating load port shown in Fig. 7.
Fig. 9 is the right view of Fig. 8.
Figure 10 is the left view of Fig. 8.
Figure 11 is the stereogram of mapped sensors.
Figure 12 is the stereogram for the variation for indicating covering container and the cover to be opened/closed of mapped sensors.
Figure 13 is the stereogram for the variation for indicating covering container and the cover to be opened/closed of mapped sensors.
Specific implementation mode
Hereinafter, being described with reference to mode for carrying out the present invention.
(structure of the device entirety comprising load port)
Device shown in FIG. 1 can be used for the manufacture of semiconductor, which includes multiple load ports 1 (in present embodiment
In be 3), conveying chamber 2 and processing unit 3.Load port 1 is in order to relative to the space (conveying space S) in conveying chamber 2
The treated objects such as carrying-in/carrying-out wafer (Wafer) and load container (such as casket 51, the 52 (references for storing the treated object
Fig. 4, Fig. 5)) device.In addition, it is only the case where wafer (wafer is direct) is accommodated in container that wafer is existing, also have to be pasted on
It is received in the state for the adhesive tape that the upper surface (or lower surface) of FFC (Film Flame Carrier), garter spring (Hoop Ring) is pasted
The case where being contained in container.Hereinafter referred to as the case where " FFC " refers in the upper table for being pasted on FFC (Film Flame Carrier)
The tape-stripping in face (or lower surface) has the FFC of the state of wafer.
Transfer robot 22 is configured in conveying chamber 2, using the transfer robot 22 in load port 1 and processing unit
The handing-over of treated object is carried out between 3.Transfer robot 22 takes out treated object from the container for being placed in load port 1, warp
Treated object is supplied to processing unit 3 by conveying space S.Since (conveying space S) must be tieed up in conveying chamber 2 as described
Hold clean environment (clean environment), thus the generation of the particle in conveying chamber 2, fly upward it is unsatisfactory.In addition, conveying space
S is space made of dividing the side of the conveying chamber 2 by constituting the outer wall of conveying chamber 2 i.e. partition wall 21.
The action of load port 1 is controlled using control device 4.In addition, control device 4, which also has, not only controls load port
1 also controls the case where transfer robot 22 waits the equipment in conveying chambers 2.The diagram of control device 4 in Fig. 1 is intended to indicate that profit
The diagram that the situation of load port 1 is controlled with control device 4, is not offered as the allocation position of control device 4.It is existing in load terminal
In mouth 1 the case where (space of the lower section of mounting table 11 (with reference to Fig. 2 etc.)) assembling control device 4, also has and configured in conveying chamber 2
Also the case where including the control device of control of transfer robot 22 etc..
In addition, the direction for being connected with that side of load port 1 when from being carried out from conveying chamber 2 (conveying space S) is fixed
Justice is front, its opposite direction is defined as rear, and the direction orthogonal with front-rear direction and vertical direction is defined as side
Side, indicates these orientation in Fig. 1.Shown in front shown in figure, rear, side and Fig. 1 after Fig. 2 front, after
Side, side are consistent.
(structure of load port)
Illustrate the structure of load port 1 with reference to Fig. 2A~Figure 11.As shown in Figure 2 A and 2 B, load port 1 has plate shape
The pedestal 10 of shape, the pedestal 10 constitute a part for the partition wall 21 for dividing conveying space S.Pedestal 10 erects configuration, in the base
Seat 10 is equipped with for the pedestal opening portion 10a as opening relative to conveying space S carrying-in/carrying-out treated objects (with reference to figure
2B).In order to which conveying space S is remained clean state, when usual, pedestal opening portion 10a is closed by door 12.
It is equipped with mounting table 11 in the front of the side opposite with that side of conveying space S of pedestal 10, i.e. pedestal 10, it should
Mounting table 11 is loaded for storing the container of multiple treated objects.
Fig. 4, Fig. 5 indicate an example of the container of storage treated object.Casket 51 and casket shown in fig. 5 52 shown in Fig. 4 divide
Be not the container for storing multiple FFC, casket 51 shown in Fig. 4 be store the FFC stored than casket 52 shown in fig. 5 diameter it is small
The container of FFC.Fig. 4, Fig. 5 respectively merely illustrate 1 FFC, but in casket 51,52, separate constant interval in the up-down direction
Ground is accommodated with multiple FFC with flat-hand position.Casket 51 in the state of being placed in mounting table 11 rear (conveying space S that
Side) there is opening portion 51a, there is opening portion 51b in front (its that opposite side), casket 52 is on being placed in mounting table 11
In the state of rear (that side of conveying space S) there is opening portion 52a, there is opening at front (its opposite that side)
Portion 52b.
Here, casket 51,52 is positioned in across the general FFC adapters 20 of casket 51,52 in mounting table 11.FFC uses suitable
Orchestration 20 has the casket size detection sensor 42 (42a, 42b) of optical profile type.It is passed by the casket size detection that two sensors are constituted
Sensor 42 be for detecting casket 51, which of 52 caskets be positioned in sensors of the FFC on adapter 20.Casket ruler in inside
The case where casket size detection sensor 42b in very little detection sensor 42a unlatchings (shading status) but outside is not opened (light projector shape
State) under, it is smaller casket 51 (Fig. 4) to be positioned on FFC adapters 20.In contrast, in casket size detection sensor
In the case that both 42a, 42b are opened, it is larger casket 52 (Fig. 5) to be positioned on FFC adapters 20.In addition, reason institute
Certainly, it in the case where both casket size detection sensor 42a, 42b are not opened, is not loaded on adapter 20 in FFC
Casket.
Since the size of casket and the size of FFC are in one-to-one relationship, the size of detection casket is also detection FFC
Size.That is, detecting the size of FFC using casket size detection sensor 42.
In the connector 20a set on FFC adapters 20, casket size detection sensor 42 is connected with using cable etc.
(42a, 42b), the signal from casket size detection sensor 42 (42a, 42b) are sent to control via the parts connector 20a
Device 4.That is, transmitting the dimension information of FFC into control device 4 with adapter 20 from FFC.
＜ mapped sensors ＞
Load port 1 has mapped sensors 30, which is accommodated in the multiple of casket 51,52 for mapping
FFC.As shown in Fig. 2 B, Fig. 3, mapped sensors 30 are configured in the side opposite with that side of conveying space S of pedestal 10, i.e.
The front of pedestal 10.Mapped sensors 30 are the sensors of optical profile type.In addition, the sensor of optical profile type includes the sensing of laser type
Device.
As shown in figure 11, mapped sensors 30 have sensor portion 31 and the lifting unit for making sensor portion 31 lift
32。
Sensor portion 31 overlooks the both ends tip portion difference in the sensor supporting member 34 of Japanese katakana U shape
Equipped with light-emitting component portion 33a and photo detector portion 33b.Sensor is constituted by 1 group of light-emitting component portion 33a and photo detector portion 33b
33.It is connected with cable 35 in light-emitting component portion 33a and photo detector portion 33b, the signal from sensor 33 is via 35 quilt of cable
It is transmitted to control device 4.Cable-pulling chain shown in Figure 11 (registered trademark) 39 is the cable-pulling chain of sensor 33.
Lifting unit 32 is fixed on the sensor portion supporting member 36 of the central portion of sensor supporting member 34 with end, uses
In make sensor portion supporting member 36 lift ball-screw 37 and for make ball-screw 37 rotate motor 38.
As shown in figure 3,33a configurations in light-emitting component portion, in the front of mounting table 11, photo detector portion 33b is configured in mounting table
11 rear.That is, in the state that casket 51 or casket 52 are positioned in by FFC adapters 20 in mounting table 11, light-emitting component portion
33a and photo detector portion 33b configurations are except casket 51,52 and are in being when looking down clipped in the multiple FFC for being accommodated in casket 51,52
Between position.
Mapped sensors 30 keep out of the way scheduled retreating position when non-mapping.The retreating position is set in advance in mapping and passes
Position in the moveable range of sensor 30, not interferenceing with casket 5152, FFC adapters 20.In present embodiment
In, since retreating position to be set in the lower section of mounting table 11, casket 5152 or FFC adapters 20 are being installed on load
Mapped sensors 30 and casket 5152 or interference of the FFC between adapter 20 can be prevented when setting platform 11.
Also, the distance between light-emitting component portion 33a and photo detector portion 33b in the present embodiment, are set as nothing
It is in any one position in the docking position (dock) and non-docking location, mounting table 11 and light-emitting component portion by mounting table 11
33a and photo detector portion 33b does not generate the distance of interference.Therefore, it is in retreating position (mounting table 11 in mapped sensors 30
Lower section) when, mounting table 11 does not generate interference with mapped sensors 30, is free to be docked, non-docking action.Separately
Outside, even if retreating position is set in casket 5152 and the high positions of adapter 20 FFC than being placed in mounting table 11, right
Connect, non-docking action when can also prevent interference between mounting table 11 and mapped sensors 30.
The distance between the light-emitting component portion 33a of the sensor portion 31 of mapped sensors 30 and photo detector portion 33b is pre-
First be set as the distance of the maximum casket and casket adapter in the casket that can allow to be placed in mounting table 11 and casket adapter then compared with
It is good.As a result, it is possible to map multiple caskets and casket adapter.
＜ covers ＞
As shown in Fig. 2, the mounting table 11, mapped sensors 30 are accommodated in the outer cover 13 (fixed cover) of load port 1
In.In the present embodiment, the positive side cover in outer cover 13 is made of cover 13a, 13b, 13c, and side side cover is by controlling in pairs
13d, 13e is covered to constitute.For the back side of load port 1, pedestal 10 plays the role of cover.In addition, at the bottom of load port 1
Portion is equipped with castor 14, and load port 1 can be easily moved as a result,.
＜ covers the cover ＞ to be opened/closed of container and mapped sensors
The load port 1 of present embodiment is also equipped with cover 15,16, which can be opened and closed, for covering by FFC
Casket 51, casket 52 and the mapping sensing with the sensor portion 31 moved up and down being positioned in mounting table 11 with adapter 20
Device 30.
1 cover to be opened/closed is constituted by cover 15 and cover 16.That is, cover 15,16 is the one of multiple segmentation covers of the form of segmentation
Example.
It is in Japanese katakana U shape that 1st cover 15, which is by the vertical view that positive side cover 15a and pair of right and left side side cover 15b are constituted,
Cover, according to the instruction for carrying out self-control device 4 move down using Fig. 6, the cylinder 61 shown in Fig. 7 as driving device
Dynamic (lifting moving).
Cylinder 61 is respectively configured with 1 under the side cover 15b of pair of right and left side, and the upper end (cylinder rod 61a) of the cylinder 61 is pacified
Under the side cover 15b of side, lower end (cylinder main body 61b) is installed on the frame of load port 1.
In addition, being equipped with the guide rail linearly extended along the vertical direction in the outer surface of aftermentioned inner cover 19 (19a, 19b)
62, the 1st cover 15 is moved up and down along the guide rail 62.
Cylinder main body 61b has inside it there are two balancing gate pit (not shown).If moreover, supply air to balancing gate pit,
Then cylinder rod 61a extends, and thus the 1st cover 15 rises.If in addition, supplying air to another balancing gate pit, cylinder rod 61b is shunk, the 1st
Cover 15 declines.In this way, by adjusting the pressure in cylinder main body 61b, to make the 1st 15 lifting movings of cover.In the lower section of the 1st cover 15
Configured with damper 63 and elastic bolster guide part 64 (such as rubber slab), the impact of the 1st cover 15 fallen is absorbed.In addition, two pressures
Power room become if a balancing gate pit be supplied to air, if the discharged structure of the indoor air of another pressure.
Illustrate the 2nd cover 16 referring especially to Fig. 8~Figure 10.2nd cover 16 is for covering casket 51 (52) and mapped sensors 30
Top writing board shape cover, be positioned in release to top the 1st cover 15 on.2nd cover 16 is according to from control dress
It is that fulcrum is rotated with hinge 18 that 4 instruction, which is set, using the cylinder 17 as driving device.As shown in Fig. 2 B, Fig. 3, loading
Two sides of platform 11 are equipped with fixed inner cover 19 (19a, 19b), and cylinder 17 configures between inner cover 19b and outer cover 13d.Inner cover
Interval between 19a and inner cover 19b is ensured interference is not generated with containers such as the caskets 51,52 that is positioned in mounting table 11 between
Every.
For the configuration of cylinder 17 under a side end of the 2nd cover 16, the upper end (cylinder rod 17a) of the cylinder 17 is installed on the 2nd
The back side of cover 16, lower end (cylinder main body 17b) is installed on the frame of load port 1.
In addition, being used as safety device configured with damper 65 under another side end of the 2nd cover 16.Damper 65
Upper end is installed on the back side of the 2nd cover 16, and lower end is installed on the frame of load port 1.The damper 65 is using than making the 2nd cover 16
The power that the power (direction of closing) of rotation is weak always exerts a force upward to the 2nd cover 16.Moreover, the force of the damper 65 is set
Obtain dead weight when becoming pre-set rotational angle higher than the 2nd cover 16.The rotational angle is preferably 10 degree~45 degree.At this
In embodiment, angle of rotation is set as 15 degree.
Cylinder main body 17b has the balancing gate pits Liang Ge (not shown) inside it.Also, cylinder main body 17b is with can be with lower end
Centered on the mode that rotates configure.If supplying air to a balancing gate pit of cylinder main body 17b, cylinder rod 17a elongations are simultaneously following
It is rotated centered on end, cylinder main body 17b turns to the inclined state of Fig. 8 from the upright state of Fig. 7.By cylinder main body 17b
It is the power for making the 2nd cover 16 rotate upward to make the force transformation that cylinder rod 17a extends.If another balancing gate pit into cylinder main body 17b
Air is supplied, then cylinder rod 17a is shunk and rotated to negative direction centered on lower end.Cylinder main body 17b is made into cylinder main body as a result,
The force transformation that 17b is shunk is the power for making the 2nd cover 16 rotate downwards.In this way, by adjusting the pressure in cylinder main body 17b, to
Make 16 rotation of the 2nd cover using the power of cylinder rod 17a liftings.In addition, the balancing gate pits Liang Ge become if supplying air to a balancing gate pit
The discharged structure of the indoor air of another pressure.In addition, damper 65 is also configured to rotate centered on its lower end.
Here, causing as the driving portion for making 16 rotation of the 2nd cover by certain reason (gas leakage etc. of cylinder 17)
In the case that cylinder 17 breaks down during the work time, cylinder 17 becomes without effect, when angle of rotation is 15 degree or more,
The force of damper 65 is more than the dead weight of the 2nd cover 16, therefore the 2nd cover 16 returns to retreating position.On the other hand, small in angle of rotation
When 15 degree, the force of damper 65 is less than the dead weight of the 2nd cover 16, therefore the 2nd cover 16 falls down at leisure.
As a result, even if causing cylinder 17 to break down by certain reason, since the 2nd cover 16 is moved to using damper 65
Retreating position falls down at leisure, therefore can also prevent the 2nd cover 16 from forcefully being closed because of dead weight.
Here, B is it is found that the upper end of the cover 13d of the upside of composition side side cover in outer cover 13 is set as making gas according to fig. 2
Cylinder 17 and damper 65 are not exposed to the height dimension of outside.Since cylinder 17, damper 65 are movable parts, movable parts
It is not exposed to outside, therefore safety is excellent.
Further, since the cylinder 17 and damper 65 as movable parts be arranged respectively at outer cover 13d and inner cover 19 (19a,
Between 19b), therefore the particle (small dust) from these movable parts can be prevented to the outside of load port 1, setting
There is the upside space of the mounting table 11 of casket to spread.
(action of load port)
Illustrate the action (control carried out to load port 1 using control device 4) of load port 1.Here, as an example
Son, setting Fig. 4, FFC shown in fig. 5 have been mounted on adapter 20 in the mounting table 11 of load port 1.First, at cover 15,16
In open state, the sensor portion 31 of mapped sensors 30 is in the height level's state below for dropping to mounting table 11
(standby mode, with reference to Fig. 2 B).In addition, mounting table 11 is located at Fig. 2 B, position shown in Fig. 3 (positions=UNDOCK).Though in addition,
It omits the description, but by the way that FFC to be mounted on adapter 20 in the mounting table 11 of load port 1,1 (control device of load port
4) it is FFC to have recognized process object.The movement of each section of recorded load port 1 is based on come self-control device 4 below
Instruction carry out.In addition, the positions UNDOCK refer to the position for loading adapter or container in 11 moveable range of mounting table
It sets.The positions UNDOCK can also be referred to as and load position.
As representative, illustrate supplies of the FFC for being accommodated in smaller casket 51 to conveying space S.When will store multiple FFC's
When casket 51 shown in Fig. 4 is positioned in FFC on adapter 20, the 1st cover 15 is set to increase, and the 2nd cover 16 is made to fall down, to close
Cover 15,16 (with 15,16 covering casket 51 of cover and mapped sensors 30).Utilize the casket size detection biography set on FFC adapters 20
Sensor 42 detects the size of casket 51, thus the size of the FFC of identifying processing object.Control device 4 selectes the ruler with casket 51 automatically
Very little corresponding mapping parameters, mapping parameters i.e. corresponding with the size of FFC.
Later, so that the sensor portion 31 of mapped sensors 30 is increased, and carry out reflecting for the FFC that point multilayer is accommodated in casket 51
It penetrates (mapped sensors are moved in the space that quilt cover 15,16 covers).In addition, mapping, which refers to detection (inspection), is accommodated in casket
FFC in 51 is in receiving states such as the presence or absence of each layer, inclinations.When in a manner of by the opening portion of casket 51 from light-emitting component portion
When 33a is to photo detector portion 33b irradiation lights, by FFC shadings there are FFC, the presence of FFC is thus detected.Separately
On the one hand, it there is no FFC, irradiates the light come and reaches photo detector portion 33b, thus detect that there is no FFC's
Situation.At the end of mapping, the sensor portion 31 of mapped sensors 30 is reduced to the height level of mounting table 11 or less.
If based on mapping result being judged as that normally, the door 12 separated between the conveying space S of conveying chamber 2 being opened
(door 12 moves downwards) makes mounting table 11 move horizontally scheduled distance (being moved to the positions DOCK) to 12 side of door.Using defeated
Send robot 22 (referring to Fig.1) that the FFC in casket 51 is put into conveying space S from pedestal opening portion 10a.In addition, the positions DOCK
It refer to the position that transfer robot 22 was put into relative to container, took out treated object in the removable range of mounting table 11.
The positions DOCK can also be referred to as transfer position.
If all FFC are completed to being put into of conveying space S (or importing after being put into), close door 12 (door 12 to
Move top), and mounting table 11 is made to be moved to the positions UNDOCK.Later, cover 15,16 is opened.Utilize delivery section (not shown)
Part takes out empty casket 51 from load port 1.
On the other hand, if being judged as mistake based on mapping result, door 12 is not opened, and opens cover 15,16.Using not scheming
The transfer unit shown takes out the casket 51 of storage FFC from load port 1.1st cover 15 keeps out of the way mounting table 11 to decline immediately below it
Underlying space corner, that is, outer cover 13 inside.2nd cover 16 rotates upward, keeps out of the way the top of mounting table 11.
On the other hand, if being judged as mistake based on mapping result, door 12 is not opened, and opens cover 15,16.Using not scheming
The transfer unit shown takes out the casket 51 of storage FFC from load port 1.
Here, the light-emitting component portion 33a and photo detector portion 33b due to the mapped sensors 30 for constituting present embodiment match
It is placed at except the casket 51,52 in the state of being loaded in mounting table 11, therefore either smaller FFC or larger FFC,
It is exactly the FFC that even size is different, and be changed without mapped sensors to map.
In addition, the mapping parameters refer to pre-set mapping starting position, mapping end position, mapping speed
Degree, sensor output discriminating conduct distinguish benchmark (according to FFC, HoopRing, wafer, thickness, slot pitch are different, because
This judges whether treated object has the benchmark of predetermined number to change by sensor) etc., about mapping action information.This
A little mapping parameters can both be pre-stored within control device 4, can also be received in the way of wired or wireless from outside.This
Outside, as mapping parameters, if preparing the mapping of the mapping parameters, HoopRing of FFC respectively according to the difference of wafer size
The mapping parameters of parameter, wafer, the then change that automatically selects of mapping parameters are easy.
Mapping starting position be set in in the FFC for being accommodated in casket in the highest height of FFC of position it is identical or
The person position higher than its.On the other hand, mapping end position be set in in FFC (treated object) in minimum position
Position identical or lower than it FFC.In addition it is also possible to which above-mentioned mapping starting position and mapping end position is made to exchange.In addition,
Sometimes it can also make the number for being accommodated in the FFC of casket different, therefore mapping starting position can also be changed for each casket or reflected
Penetrate the height of end position.
Here, in the present embodiment, as the 15, the 2nd cover 16 of the 1st cover is in this way, by the multiple segmentation cover structures for the form divided
At the cover of covering container.The degree of freedom of the configuration and hood shape covered as a result, increases, and as a result can increase the volume of cover.Therefore, as
The load port 1 of present embodiment can totally cover container and mapped sensors in this way.
Further, since the 1st cover 15 is to move up and down the structure of (lifting moving), and the 2nd cover 16 does not protrude past outer cover
13 front is rotated, therefore in the action process of the 15 and the 2nd cover 16 of the 1st cover, and the 15 and the 2nd cover 16 of the 1st cover will not be stretched
Go out the front to outer cover 13.Thus, the cover of these opening and closings will not be made to carrying out mobile operating personnel in the front of load port 1
At obstruction.
Also, due to being mapped in the state that cover 15,16 is closed, the light outside device is not easily accessible
The sensor portion 31 of mapped sensors 30, thus sensor accuracy (mapping accuracy) rising.
(variation)
In the embodiment shown, it as an example of container, exemplifies in the state of being placed in mounting table 11
That side side opposite with its of conveying space S there is the casket 51 for amounting to two opening portion 51a, 51b (52a, 52b)
(52), but the opening portion of container can both only have 1, can also be the container of not opening portion.The reason is that using light
In the case of the sensor of formula, as long as the part of the exposure pathways (optical axis) positioned at light in container is set as transparent, energy
Enough play sensor function.
If in addition, using following recorded reflective sensor, the opening portion (or transparent part) of container also may be used
To only have 1.
Treated object is other than semiconductor substrate as wafer, additionally it is possible to which enumerating glass substrate, (liquid crystal display panel has
The base plate for displaying such as machine/inorganic EL), can be in the plate, culture dish etc. of internal storage cell etc..As container, in addition in institute
Except the such opening container referred to as open casket of casket 51,52 indicated in the embodiment stated, additionally it is possible to enumerate
Go out the container etc. of the hermetic type with the lid that can be opened and closed referred to as FOUP.
It, can also alternative configuration shining in the position that treated object is clipped in the middle when looking down about mapped sensors
Components Department 33a and photo detector portion 33b, and it is set as making that light-emitting component portion 33a and photo detector portion 33b is close, utilizes light member
It is (reflective that part portion 33b detects the sensor structure for the presence or absence of encountering the next light of treated object reflection and detecting treated object and wait
Sensor).In the case of reflective sensor, it is not necessary to by light-emitting component portion 33a and light as the above embodiment
It is oppositely disposed to components Department 33b holding vessels, therefore the design freedom of the construction installation space of sensor increases.
In addition, the direction of the optical axis of connection light-emitting component portion 33a and photo detector portion 33b is not necessarily required to be load terminal
The front-rear direction of mouth 1, the side (left and right directions) that can also be load port 1, the front-rear direction inclination relative to load port 1
Direction.In addition, the sensor function due to must assure that mapped sensors, it is therefore desirable to determine the position of the opening portion of container
It sets, the position of transparent part, so that the light from sensor passes through.
In addition, as the driving part for making sensor portion 31 lift, show by ball-screw 37 and for making rolling
The driving part that the motor 38 that ballscrew 37 rotates is constituted, but replace, linear motor, cylinder etc. can also be used to be used as
Driving part for making sensor portion 31 lift.
In addition, mapped sensors 30 are the sensor of optical profile type, but replace, can also use using electromagnetic wave, surpass
The sensor of the such detection wave of sound wave.
In the embodiment shown, the container being positioned in using 15 covering of the 1st cover moved up and down in mounting table 11
The front and side of (casket) and mapped sensors 30 are positioned in the container in mounting table 11 using 16 covering of the 2nd cover of rotation
The top of (casket) and mapped sensors 30, but the 2nd cover 16 can also be omitted.
Both also, the 15 and the 2nd cover 16 of the 1st cover can also be omitted.
In the embodiment shown, it is placed with container (casket) by adapter in the mounting table of load port, but
It can be the load port that container is directly loaded in mounting table.
In the case where the load port loads FOUP, door 12 carries out lid relative to the fixation of container and fixed
It releases and is configured to then preferable relative to the container disassembly and installation lid.In particular, with regard to lid relative to
For the fixation of container and fixed releasing, key is set in door 12, by making after the keyhole that key is inserted into lid
Key rotates, so as to assemble and disassemble lid relative to container.For the disassembly and installation of lid, adsorption section is set in door 12,
By making one of mounting table 11 or door 12 move in the horizontal direction in the state of adsorbing holding lid using door 12, from
And lid can be disassembled and installed relative to container.
Figure 12, Figure 13 are indicated for being covered in being opened and closed for the container loaded in mounting table 11 (container and mapped sensors)
Cover variation.To be opened/closed cover shown in Figure 12 is made of 1 group of cover 67 of the cover 66 of carry out rotational action and lifting moving.
Cover 66 is that side view is in the L-shaped cover of letter, and the rotation axis around the top of mounting table 11 is rotated.66 covering mounting table 11 of cover
Front side and upper side.Cover 67 is the cover of writing board shape, covers the side side of mounting table 11.
To be opened/closed cover shown in Figure 13 is made of the cover 69 of 1 group of cover 68 of carry out rotational action and lifting moving.Cover 68
It is the cover of writing board shape, the rotation axis around the top of mounting table 11 is rotated.The upper side of 68 covering mounting table 11 of cover.Cover
69 be the cover of writing board shape, covers the front side of mounting table 11.In addition, being the fixation for erectting configuration shown in reference numeral 70
Cover.
In the above-described embodiment, make the 15 and the 2nd cover 16 of the 1st cover while keeping out of the way, but not limited to this.Such as it is utilizing
Container transport is arrived load port by the unmanned waggon of ceiling walking as OHT (Overhead Hoist Transfer)
In the case of mounting table, the 2nd cover 16 can also only be made to be moved to retreating position.
In addition, will using the unmanned waggon of ground running formula as AGV (Automated Guided Vehicle)
In the case that container is placed in load port, the 1st cover 15 can also only be made to be moved to retreating position.
In addition, for the control of the driving portion of the 1st cover 15 and the driving portion of the 2nd cover 16, control device 4 receives upper meter
The instruction of calculation machine is acted.Such as in the case where the container conveyed by OHT is close to load port, only make the 2nd cover 16 in advance
It is moved to retreating position, load port 1 can be kept standby i.e. in such a way that container is placed in mounting table 11 by OHT from top
It can.
Can also substitute cylinder 17, and the 2nd cover 16 is linked to rotary shaft, by using motor make the rotary shaft rotate and
The 2nd cover 16 is set to keep out of the way retreating position.
Cylinder 61 can also be substituted, and is used with ball-screw and for making the driving of the motor of ball-screw rotation fill
It sets.Also, cylinder 61 can also be substituted and use hydraulic cylinder (cylinder 17 is also same).
Damper 65 can also be substituted and use gas spring.In the embodiment shown, make using 1 cylinder 17
2 cover, 16 rotation, but cylinder 17 can also be configured in the both side ends of the 2nd cover 16, make 16 rotation of the 2nd cover using two cylinders 17.
For example positive side cover 15a in the 1st cover 15 can also be made of transparent component.It is arranged in this way, even if closing
Closing in the state of the 1st cover 15 also can be inside visual observation cover, therefore can be pried through from transparent positive side cover 15a internal and true
Recognize the situation of the action and the taking-up wafer of transfer robot 22 of mapped sensors 30.
In addition, can in those skilled in the art it is contemplated that in the range of to make various changes be self-evident.
Reference sign
1, load port；2, conveying chamber；3, processing unit；4, control device；10, pedestal；10a, pedestal opening portion；11、
Mounting table；12, door；15, the 1st cover (cover)；16, the 2nd cover (cover)；17, cylinder (driving device)；21, partition wall；30, mapping passes
Sensor；31, sensor portion；32, lifting unit；33a, light-emitting component portion；33b, photo detector portion；51,52, casket (container)；51a、
51b, 52a, 52b, opening portion；61, cylinder (driving device)；S, conveying space.
Claims (8)
1. a kind of load port comprising：
Pedestal erects configuration, which constitutes a part for the partition wall for dividing conveying space, and with for opposite
In the pedestal opening portion of the conveying space carrying-in/carrying-out treated object；
Mounting table, is set to the side opposite with that side of the conveying space of the pedestal, and the mounting table is more for storing
The container of a treated object loads；And
Door, is used to carry out the opening and closing in the pedestal opening portion,
The load port is characterized in that,
The load port includes mapped sensors, which has sensor portion and for making the sensor portion lift
Lifting unit, for mapping the treated object for being accommodated in the container,
The mapped sensors configuration is in the side opposite with that side of the conveying space of the pedestal.
2. load port according to claim 1, which is characterized in that
The container in the state of being placed in the mounting table by that side of the conveying space and its opposite that
Side has opening portion,
The sensor portion has light-emitting component portion and photo detector portion, and the light-emitting component portion and photo detector portion are configured in institute
It states except the container in the state of being loaded in mounting table and is the treated object that will be accommodated in the container when looking down
The position being clipped in the middle,
The opening portion irradiation light for passing through the container to the photo detector portion from the light-emitting component portion.
3. load port according to claim 1 or 2, which is characterized in that
After being mapped the treated object for being accommodated in the container using the mapped sensors, make the door into
Action is made and opens the pedestal opening portion.
4. load port described in any one of claim 1 to 3, which is characterized in that
The load port selectes mapping parameters corresponding with the container automatically.
5. load port according to any one of claims 1 to 4, which is characterized in that
The load port has for being covered in opening for the container and the mapped sensors that are loaded in the mounting table
The cover closed,
After covering the container loaded in the mounting table and the mapped sensors using the cover, institute is utilized
Mapped sensors are stated to map the treated object for being accommodated in the container.
6. load port according to claim 5, which is characterized in that
The cover includes multiple segmentation covers of the form of segmentation,
The multiple segmentation cover is configured to keep out of the way the underlying space of the top and the mounting table of the mounting table.
7. load port according to claim 6, which is characterized in that
The multiple segmentation cover has：
1st cover, covers the front side of the mounting table, and can carry out lifting moving, to be moved back when being set as opening state
Keep away the underlying space of the mounting table；And
2nd cover is placed on the 1st cover above and covers the upper side of the mounting table, and can carry out rotational action, to
Keep out of the way the top of the mounting table when being set as the opening state.
8. the load port described according to claim 6 or 7, which is characterized in that
The driving device for making the multiple segmentation cover be acted is respectively provided in the multiple segmentation cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310985441.0A CN117038541A (en) | 2015-11-30 | 2016-11-29 | Load port |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-233480 | 2015-11-30 | ||
| JP2015-233485 | 2015-11-30 | ||
| JP2015233480A JP2017103284A (en) | 2015-11-30 | 2015-11-30 | Load port |
| JP2015233485A JP6551197B2 (en) | 2015-11-30 | 2015-11-30 | Load port |
| PCT/JP2016/085276 WO2017094694A1 (en) | 2015-11-30 | 2016-11-29 | Load port |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310985441.0A Division CN117038541A (en) | 2015-11-30 | 2016-11-29 | Load port |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108292621A true CN108292621A (en) | 2018-07-17 |
| CN108292621B CN108292621B (en) | 2023-08-18 |
Family
ID=58796835
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310985441.0A Pending CN117038541A (en) | 2015-11-30 | 2016-11-29 | Load port |
| CN201680069222.6A Active CN108292621B (en) | 2015-11-30 | 2016-11-29 | Load port |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310985441.0A Pending CN117038541A (en) | 2015-11-30 | 2016-11-29 | Load port |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR20180087260A (en) |
| CN (2) | CN117038541A (en) |
| TW (1) | TW201740495A (en) |
| WO (1) | WO2017094694A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110957240A (en) * | 2018-09-27 | 2020-04-03 | 台湾积体电路制造股份有限公司 | Inductor, loading end and leveling method |
| CN111029285A (en) * | 2018-10-09 | 2020-04-17 | 昕芙旎雅有限公司 | Load port and method for detecting abnormality of FOUP cover of load port |
| CN114121745A (en) * | 2021-11-26 | 2022-03-01 | 上海果纳半导体技术有限公司 | A put system for wafer loading box door body |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7330606B2 (en) * | 2018-11-07 | 2023-08-22 | 株式会社ディスコ | Processing device and cassette mounting mechanism |
| KR102528602B1 (en) * | 2021-11-26 | 2023-05-04 | 상하이 구어나 세미컨덕터 테크놀로지 컴퍼니 리미티드 | Placement system for wafer pod doors |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2017094694A1 (en) | 2017-06-08 |
| CN108292621B (en) | 2023-08-18 |
| CN117038541A (en) | 2023-11-10 |
| KR20180087260A (en) | 2018-08-01 |
| TW201740495A (en) | 2017-11-16 |
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