CN107860334B - high-power laser breakdown metal hole shape and area real-time measurement device and method - Google Patents
high-power laser breakdown metal hole shape and area real-time measurement device and method Download PDFInfo
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- CN107860334B CN107860334B CN201711059812.3A CN201711059812A CN107860334B CN 107860334 B CN107860334 B CN 107860334B CN 201711059812 A CN201711059812 A CN 201711059812A CN 107860334 B CN107860334 B CN 107860334B
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- light
- dielectric film
- total reflection
- reflection mirror
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/28—Measuring arrangements characterised by the use of optical techniques for measuring areas
Abstract
The invention discloses a device and a method for measuring the shape and the area of a high-power laser breakdown metal hole in real time. The method has the advantages that the metal ablated hole is projected by using a uniform low-power visible laser beam, and the projected light spot penetrating through the hole is measured by the integrating sphere and the camera, so that the purpose of measuring the shape and the area of the hole in real time is achieved, and the method has the characteristics of high precision, less time consumption, convenience, rapidness, safety and reliability.
Description
Technical Field
the invention belongs to the field of laser technology and application, relates to a device and a method for measuring the shape and the area of a high-power laser breakdown metal hole in real time, and particularly relates to a laser device for measuring a metal melting hole in real time by using low-power visible light as probe light.
Background
In the investigation of high power lasers to destroy metal targets, ablative perforations are an important mode of destruction. The area of the through-hole directly determines the efficiency of energy deposition on the target by the high power laser after the laser breaks down the metal. If the metal is in a gas flow environment, the shape of the perforations will affect the aerodynamic properties of the metal surface.
The document "preliminary study of response of a thin aluminum plate under laser irradiation in a tangential airflow environment, the university of defense science and technology, the thesis, 2012, page 11, discloses a method and a device for studying laser breakdown of a metal thin plate under the action of tangential airflow. The device utilizes a photoelectric detector to directly detect scattered light of high-power laser after the high-power laser penetrates through metal, so as to judge the time for the laser to break down the metal. And then directly shooting the shape change of the metal hole by using a camera. The method cannot monitor the change of the shape and the area of the metal perforation in real time in the laser irradiation process, and a complex calculation method is also needed for accurately extracting the data of the shape and the area of the perforation from the video image.
Disclosure of Invention
the invention aims to provide a device and a method for measuring and recording the shape and the area of a high-power laser breakdown metal hole on line by using low-power probe laser, which can accurately monitor the shape and the area change of the hole in the laser breakdown metal process in real time and have the characteristics of high precision, simple calculation method, less time consumption, wide application range, safety, reliability and the like.
the technical scheme of the invention is to provide a device for measuring the shape and area of a high-power laser breakdown metal hole in real time, which is characterized in that: the device comprises a probe laser 1, a beam homogenizer 2, a first dielectric film total reflection mirror 51, a second dielectric film total reflection mirror 52 and a beam splitter 9 which are arranged along a light path in sequence, and further comprises an integrating sphere 10 and a camera 13 which are respectively positioned in two light splitting light paths of the beam splitter 9;
The metal sheet 6 is positioned between the first dielectric film fully reflective mirror 51 and the second dielectric film fully reflective mirror 52; the high-power laser beam 4 passes through the metal sheet 6 after being reflected by the first dielectric film total reflection mirror 51, forms an ablation hole 7 on the metal sheet 6, and then is reflected out of a light path by the second dielectric film total reflection mirror 52;
The probe laser 1 emits a probe laser beam 3 to enter the beam homogenizer 2, the homogenized probe laser beam 3 sequentially passes through the first dielectric film holophote 51, the ablation hole 7 on the metal sheet 6 and the second dielectric film holophote 52, then is split by the beam splitter 9 and then respectively enters the integrating sphere 10 and the camera 13, the integrating sphere 10 collects all light beams which are transmitted or reflected out of the beam splitter 9, and the camera 13 shoots the reflected or transmitted light of the beam splitter 9.
Preferably, in order to further avoid the influence of the high-power laser on the camera 13 and the integrating sphere 10, the measuring device of the present invention further comprises a filter 8 located between the second dielectric film total reflection mirror 52 and the beam splitter 9, wherein the cut-off range of the filter 8 includes the high-power laser beam 4 band and does not include the probe laser beam 3 band.
preferably, the probe laser beam 3 is a visible laser, the laser wavelength of the probe laser beam 3 is different from the wavelength of the high power laser beam 4, and the laser power of the probe laser beam 3 is smaller than the laser power of the high power laser beam 4.
preferably, the spot size of the laser beam emitted by the probe laser 1 is larger than the largest dimension of the ablation hole 7.
Preferably, the beam homogenizer 2 described above is capable of converting the laser light produced by the probe laser 1 into a near-collimated, uniform beam, such as a microlens array, a binary optical diffraction element, or the like.
Preferably, the first dielectric film fully reflective mirror 51 and the second dielectric film fully reflective mirror 52 are both made of quartz or K9 glass, and the surfaces thereof are plated with uniform dielectric films;
the film system design makes the reflectivity of the first dielectric film holophote 51 and the second dielectric film holophote 52 to the wavelength range of the high-power laser beam 4 more than 99.9%, and the transmissivity to the wavelength range of the probe laser beam 3 more than 90%.
preferably, the beam splitter 9 is at an angle of 45 ° to the incident light, and splits the incident light into two perpendicular beams at a fixed intensity ratio.
Preferably, the camera 13 may photograph a spot shape of light reflected or transmitted by the beam splitter 9 projected on the white screen; the integrating sphere 10 is provided with a photodetector 11 and a signal recorder 12.
the invention also provides a method for measuring the shape and the area of the high-power laser breakdown metal hole in real time by using the device for measuring the shape and the area of the high-power laser breakdown metal hole in real time, which comprises the following steps:
1) Starting the probe laser 1, replacing the metal sheet 6 with a diaphragm 14 with an opening area of 1cm2, and recording the reading of the signal recorder 12 as k;
2) adjusting the exposure of the camera 13 to obtain a clear light spot image;
3) setting the power P, the light emitting time T and the light emitting mode of the high-power laser beam 4;
4) Replacing the diaphragm 14 with a metal sheet 6, loading the high-power laser beam 4, simultaneously starting to acquire data V (t) by the signal recorder 12, and starting to shoot by the camera 13;
5) Calculating the area change of the metal sheet 6 under the condition that the laser power is P according to a formula S (t) ═ k × V (t);
6) Changing the power P, the light-emitting time T and the light-emitting mode of the high-power laser beam 4, and repeating the steps 1) -5) to obtain the shape and area change of the ablation hole 7 of the metal sheet 6 under different input conditions.
the invention has the beneficial effects that:
1. The invention can monitor, measure and record the shape and area change of the metal perforation in real time in the process of irradiating the metal sheet by the high-power laser;
2. according to the invention, the low-power visible laser is adopted to project the metal through hole, and then the camera and the integrating sphere are used for measurement and recording, so that the problem of insufficient dynamic range when the camera directly shoots the high-power laser is avoided, and the method has the characteristics of safety and reliability;
3. The invention can directly obtain the absolute value of the metal perforation area without complex data processing process and has the characteristics of convenience and rapidness;
4. The invention can be used for the metal irradiation process of high-power laser with different wavelengths and modes.
drawings
FIG. 1 is a schematic view of a measuring device;
FIG. 2 is a schematic diagram of a laser diaphragm calibration of a probe according to an exemplary measurement method;
The reference numbers in the figures are: 1-probe laser; 2-a beam homogenizer; 3-probe laser beam; 4-high power laser beam; 51-first dielectric film all-reflecting mirror; 52-second dielectric film all-reflecting mirror; 6-metal sheet; 7-ablation of holes; 8-an optical filter; 9-a beam splitter; 10-an integrating sphere; 11-a photodetector; 12-a signal recorder; 13-a camera; 14-diaphragm.
Detailed Description
the invention is further described with reference to the following figures and specific embodiments.
the invention provides a method and a device for measuring and recording the shape and the area of a high-power laser breakdown metal hole on line by using low-power probe laser, which solve the problem that the shape and the area change of the hole in the laser breakdown metal process cannot be accurately monitored in real time in the prior art.
the structure of the preferred embodiment of the measuring device of the invention is shown in fig. 1, and comprises a probe laser 1, a beam homogenizer 2, a first dielectric film total reflection mirror 51, a second dielectric film total reflection mirror 52, a filter 8, a beam splitter 9 which are arranged along a light path in sequence, and further comprises an integrating sphere 10 and a camera 13 which are respectively arranged in two light splitting light paths of the beam splitter 9; the metal sheet 6 is positioned between the first dielectric film fully reflective mirror 51 and the second dielectric film fully reflective mirror 52; the high-power laser beam 4 passes through the metal sheet 6 after being reflected by the first dielectric film total reflection mirror 51, forms an ablation hole 7 on the metal sheet 6, and then is reflected out of a light path by the second dielectric film total reflection mirror 52; the probe laser 1 emits a low-power laser beam, the probe laser beam 3 enters the beam homogenizer 2, the homogenized probe laser beam 3 sequentially passes through the first dielectric film total reflection mirror 51, the ablation hole 7 on the metal sheet 6, the second dielectric film total reflection mirror 52 and the optical filter 8, and respectively enters the integrating sphere 10 and the camera 13 after being split by the beam splitter 9, and the photoelectric detector 11 and the signal recorder 12 are installed on the integrating sphere 10.
the embodiment utilizes a light beam projection method to realize real-time measurement of the shape and the area of the metal hole. Take 1064nm high power laser breakdown metal commonly used in industry as an example, the laser power is 1000W. The probe laser 1 is a green laser having a wavelength of 532nm and a power of 5 mW. After the high-power laser beam 4 breaks through the metal sheet 6, the power of 1064nm laser passing through the ablated hole 7, which passes through the second dielectric film total reflection mirror 52 and the optical filter 8, is less than 0.01mW, which hardly affects the integrating sphere 10 and the camera 13. More than 80% of the energy of the green laser beam with the power of 5mW can reach the detection system through the lens set. Since the probe laser beam 3 is a uniform beam, the light intensity reaching the integrating sphere 10 is proportional to the area of the ablated hole 7, thereby achieving the effect of recording the area value in real time. The camera 13 shoots the projection light spot of low-power green light, so that the problem of insufficient dynamic range of direct shooting of high-power laser is avoided.
In order to realize accurate real-time measurement of the area of an ablation hole, the invention needs to calibrate the response rate parameter of the integrating sphere in probe laser irradiation in advance, as shown in fig. 2, a standard area diaphragm 14 with the opening area of 1cm2 is adopted to obtain the response signal value of the integrating sphere 10 after probe laser passes through the diaphragm 14, the response signal value is sequentially used as a calibration reference, the absolute area value after ablation perforation is directly obtained, and test data is provided for subsequent laser irradiation effect theoretical simulation.
The specific test method of the device for measuring the shape and area of the metal hole in real time based on high-power laser breakdown provided by the embodiment is as follows:
1 ] the probe laser 1 is turned on and the metal sheet 6 is replaced with a standard area diaphragm 14 with an open area of 1cm2 and the signal recorder 12 reads k.
And 2, adjusting the exposure of the camera 13 to obtain a clear light spot image.
And 3, setting the power P, the light emitting time T and the light emitting mode of the high-power laser beam 4.
and 4, replacing the standard area diaphragm 14 of 1cm2 with the metal sheet 6, loading the high-power laser beam 4, simultaneously starting to acquire data V (t) by the signal recorder 12, and starting to shoot by the camera 13.
And 5, calculating the area change of the metal sheet 6 under the condition that the laser power is P according to the formula S (t) ═ k × V (t).
And 6, changing the power P, the light emitting time T and the light emitting mode of the high-power laser beam 4, and repeating 1-5 to obtain the shape and area change of the ablation hole 7 of the metal sheet 6 under different input conditions.
the invention effectively solves the problem of monitoring, measuring and recording the shape and area change of the metal perforation in real time in the process of irradiating the metal sheet 6 by high-power laser, and has the characteristics of high precision, less time consumption, convenience, rapidness, safety, reliability and the like.
Claims (9)
1. the utility model provides a high power laser breakdown metal hole shape and real-time measuring device of area which characterized in that: the device comprises a probe laser (1), a beam homogenizer (2), a first dielectric film total reflection mirror (51), a second dielectric film total reflection mirror (52) and a beam splitter (9) which are sequentially arranged along light paths, and further comprises an integrating sphere (10) and a camera (13) which are respectively positioned in the two light splitting light paths of the beam splitter (9);
the metal thin plate (6) is positioned between the first dielectric film total reflection mirror (51) and the second dielectric film total reflection mirror (52); the high-power laser beam (4) penetrates through the metal sheet (6) after being reflected by the first dielectric film total reflection mirror (51), and is reflected out of a light path through the second dielectric film total reflection mirror (52) after an ablation hole (7) is formed in the metal sheet (6);
The probe laser (1) emits a probe laser beam (3) to enter the beam homogenizer (2), and the homogenized probe laser beam (3) sequentially passes through the first dielectric film total reflection mirror (51), the ablation hole (7) on the metal sheet (6) and the second dielectric film total reflection mirror (52) and then is split by the beam splitter (9) to respectively enter the integrating sphere (10) and the camera (13);
The integrating sphere (10) collects all light beams transmitted through the beam splitter (9), and the camera (13) shoots reflected light of the beam splitter (9);
or the integrating sphere (10) collects all light beams reflected out of the beam splitter (9), and the camera (13) shoots the transmitted light of the beam splitter (9).
2. The high-power laser breakdown metal hole shape and area real-time measurement device of claim 1, wherein: the high-power laser detector further comprises an optical filter (8) positioned between the second dielectric film total reflection mirror (52) and the beam splitter (9), wherein the cut-off range of the optical filter (8) contains a high-power laser beam (4) wave band and does not contain a probe laser beam (3) wave band.
3. the high-power laser breakdown metal hole shape and area real-time measurement device of claim 2, wherein: the probe laser beam (3) is visible laser, the laser wavelength of the probe laser beam (3) is different from that of the high-power laser beam (4), and the laser power of the probe laser beam (3) is smaller than that of the high-power laser beam (4).
4. The device of claim 3, wherein the device is characterized in that: the spot size of the laser beam emitted by the probe laser (1) is larger than the maximum size of the ablation hole (7).
5. The device of claim 4, wherein the device is characterized in that: the light beam homogenizer (2) can convert laser generated by the probe laser (1) into a nearly collimated uniform light beam, and the light beam homogenizer (2) is a micro-lens array and a binary optical diffraction element.
6. The device for real-time measurement of shape and area of a high-power laser breakdown metal hole according to any one of claims 1 to 5, wherein: the first dielectric film total reflection mirror (51) and the second dielectric film total reflection mirror (52) are both made of quartz or K9 glass materials, and uniform dielectric films are plated on the surfaces of the first dielectric film total reflection mirror and the second dielectric film total reflection mirror;
The reflectivity of the first dielectric film total reflection mirror (51) and the second dielectric film total reflection mirror (52) to the wavelength range of the high-power laser beam (4) is larger than 99.9%, and the transmissivity to the wavelength range of the probe laser beam (3) is larger than 90%.
7. The device of claim 6, wherein the device is characterized in that: the beam splitter (9) forms an angle of 45 degrees with the incident light, and divides the incident light into two vertical beams of light according to a fixed intensity ratio.
8. The device of claim 7, wherein the device is characterized in that: the camera (13) shoots the shape of a light spot projected on the white screen by the reflected or transmitted light of the beam splitter (9); and the integrating sphere (10) is provided with a photoelectric detector (11) and a signal recorder (12).
9. a method for measuring the shape and area of a high power laser breakdown metal hole in real time by using the high power laser breakdown metal hole shape and area real-time measuring device of any one of claims 1 to 8, which comprises the following steps:
1) Starting a probe laser (1), replacing the metal sheet (6) with a diaphragm (14) with an opening area of 1cm2, and recording the reading of a signal recorder (12) as k;
2) Adjusting the exposure of the camera (13) to obtain a clear light spot image;
3) Setting the power P, the light emitting time T and the light emitting mode of the high-power laser beam (4);
4) Replacing the diaphragm (14) with a metal sheet (6), loading a high-power laser beam (4), simultaneously starting to acquire data V (t) by a signal recorder (12), and starting to shoot by a camera (13);
5) Calculating the area change of the metal sheet (6) under the condition that the laser power is P according to a formula S (t) ═ k × V (t);
6) Changing the power P, the light-emitting time T and the light-emitting mode of the high-power laser beam (4), and repeating the steps 1) -5) to obtain the shape and area change of the ablation hole (7) of the metal sheet (6) under different input conditions.
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| CN108955582A (en) * | 2018-06-21 | 2018-12-07 | 中国人民解放军战略支援部队航天工程大学 | Laser focal beam spot area measuring device |
| CN111024224B (en) * | 2019-12-02 | 2022-04-01 | 西北核技术研究院 | Method for measuring laser far-field beam quality PIB factor |
| CN117697166B (en) * | 2024-02-06 | 2024-04-19 | 中国工程物理研究院激光聚变研究中心 | Method for etching organic film on surface of metal film by utilizing laser |
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