CN107782718A - Portable laser induced breakdown spectroscopy analytical equipment - Google Patents
Portable laser induced breakdown spectroscopy analytical equipment Download PDFInfo
- Publication number
- CN107782718A CN107782718A CN201711274257.6A CN201711274257A CN107782718A CN 107782718 A CN107782718 A CN 107782718A CN 201711274257 A CN201711274257 A CN 201711274257A CN 107782718 A CN107782718 A CN 107782718A
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- Prior art keywords
- laser
- beam splitting
- splitting unit
- flashlight
- spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a kind of portable laser induced breakdown spectroscopy analytical equipment, including laser, beam splitting unit, speculum group, off axis paraboloidal mirror and spectrometer;The laser of laser emitting is transmitted to speculum group through the beam splitting unit is parallel, and testing sample surface is focused on after speculum group reflects;The flashlight that testing sample is sent after speculum group reflects exiting parallel to beam splitting unit, the light path coaxial of laser and flashlight between beam splitting unit and testing sample, off axis paraboloidal mirror is reflexed to through beam splitting unit, transmitted after off axis paraboloidal mirror reflects to spectrometer, connection control box and carry out spectrum analysis and display.The device of the present invention overcomes the shortcomings that transmission-type non-coaxial spectral analysis device, the numerical aperture for focusing on laser is increased simultaneously, reduce focal spot, improve the laser energy density for acting on body surface, can requirement of the lowering apparatus to energy of lasers, have quite it is foreseeable industry and business application value.
Description
Technical field
The present invention relates to element spectrum analysis technical field, more particularly to a kind of portable laser induced breakdown spectroscopy to analyze
Device.
Background technology
LIBS is a kind of detection technique based on atomic emission spectrum, i.e. swashing by high-energy
Sample surfaces are heated in light pulse so that sample surfaces particulates, which obtains enough energy and departs from surface and then puncture, obtains plasma
Body, Measurement atom emission spectrum.Because its detection speed is fast, gas, liquid, solid can be analyzed, full element point can be carried out
Analysis, can series of advantages, the LIBS such as remote detection can be widely used in environmental monitoring, biology
Many fields such as medical science, geological research.For sampling inconvenience such as archaeology, building, historical relic detection, art work identifications and industrially
Sampling Detection requirement on the spot, portable laser induced breakdown spectroscopy system have the characteristics that small volume, easy to carry, slim and graceful, into
For the selection to solve the above problems.
The non-coaxial structure of existing LIBS analytical equipment generally use transmission-type, i.e. Laser Focusing or light
Spectrum gathering element is transmissive optical element, and excitation light path and signal light path are non-coaxial, as shown in Figure 1.Laser R1 is sent
High-energy short-pulse, testing sample surface R3 is focused on by lens R2, produces laser plasma, its spectral line of emission is by collimater R4
Collimation, then optical fiber R5 is coupled into, finally it is conveyed into spectrometer R6 and is analyzed.
The existing non-coaxial structure LIBS analytical equipment of transmission-type has the disadvantage that:
(1) atomic emission spectrum scope is difficult as wide spectrum gathering element using transmissive element typically in 200~800nm
With color difference eliminating, make each wave spectrum collection efficiency inconsistent, while wide spectrum apochromatism element is expensive, carries significantly
High cost;
(2) excitation light path and the non-coaxial setting of collection light path limit the receiving area of collection spectrum, reduce laser
The utilization rate of plasma hemisphere emission spectrum, so that needing the laser of higher energy, the cost of instrument is added, reduced
Security;
(3) existing most of LIBS analyzer volume is larger, mostly desk-top, is not suitable for carrying behaviour
Make.
The content of the invention
Goal of the invention:For problem above, the present invention proposes a kind of portable laser induced breakdown spectroscopy analytical equipment.
Technical scheme:To realize the purpose of the present invention, the technical solution adopted in the present invention is:A kind of portable laser lures
Lead breakdown spectral analytical equipment, including laser, beam splitting unit, speculum group, off axis paraboloidal mirror and spectrometer;The laser
The laser of device outgoing is transmitted to the speculum group through the beam splitting unit is parallel, focuses on and treats after speculum group reflection
Survey sample surfaces;The flashlight that the testing sample is sent after the speculum group reflection exiting parallel to the beam splitting list
Member, the light path coaxial of the laser and flashlight between the beam splitting unit and the testing sample, through the beam splitting unit
The off axis paraboloidal mirror is reflexed to, is transmitted after off axis paraboloidal mirror reflection to the spectrometer.
Further, the speculum group includes the first spherical mirror and the second spherical mirror;The laser of laser emitting is through institute
State that beam splitting unit is parallel to be transmitted to first spherical mirror, the second spherical mirror is reflexed to through first spherical mirror, through described
Test sample surface is focused on after the reflection of two spherical mirrors;The signal optical transport that the testing sample is sent passes through to the second spherical mirror
Second spherical mirror reflexes to the first spherical mirror, and exiting parallel is to beam splitting unit after the reflection of the first spherical mirror.
Further, the beam splitting unit is dichroscope, and the dichroscope is by the laser of incidence and by speculum group
The flashlight beam splitting reflected;The dichroscope is high to the laser anti-and high thoroughly to the flashlight, or to the laser
It is high thoroughly and high anti-to the flashlight;The incidence angle of dichroscope described in the laser light incident is 45 degree, laser after beam splitting with
Flashlight is mutually perpendicular to.
Further, described device also includes negative lens, and the negative lens is positioned over the laser and the beam splitting list
Between member;The laser of the laser emitting is transmitted to the speculum by the negative lens through the beam splitting unit is parallel
Group, testing sample surface is focused on after speculum group reflection;The flashlight that the testing sample is sent is through the reflection
Exiting parallel after beam splitting unit reflection, directly focuses on to the beam splitting unit and is coupled into optical fiber, transmit after microscope group reflection
To the spectrometer.
Further, described device also includes control box, the control box connecting laser and spectrometer;The control box
Power supply is provided for laser and controls laser to produce laser;The spectrometer carries out spectrum analysis and display by control box.
Further, described device also includes optical fiber head and optical fiber, and the flashlight reflects through the off axis paraboloidal mirror
After focus on the optical fiber, be coupled into optical fiber, import the spectrometer.
Further, described device also includes leading edge and handle;The laser focuses on after speculum group reflection
Leading edge, during measurement, testing sample abuts with leading edge;Described device also includes laser controlling interface, and power interface and spectrometer connect
Interface;The corresponding interface being all connected in the control box.
Beneficial effect:Technical scheme includes advantages below:
1. apparatus of the present invention are reflective coaxial configuration, when collection has the flashlight spectral information of certain bandwidth, no
Aberration can be produced, and increases the space angle of spectrum acquisition, so as to largely improve spectral collection efficiency;
2. apparatus of the present invention reflection coaxial configuration utilizes two spherical mirrors, the numerical aperture for focusing on sample is increased, from
And focal spot is reduced, the laser energy density for acting on sample surfaces is increased, reduces the energy requirement to laser, is improved
Security simultaneously reduces equipment cost;
3. apparatus of the present invention light channel structure is compact, equipment instrument is small, is convenient for carrying and operates.
Brief description of the drawings
Fig. 1 is the structural representation of the non-coaxial structure LIBS analytical equipment of transmission-type of prior art;
Fig. 2 is the light channel structure schematic diagram of the embodiment of the present invention one;
Fig. 3 is the structural representation of portable laser induced breakdown spectroscopy analytical equipment of the present invention;
Fig. 4 is the light channel structure schematic diagram of the embodiment of the present invention two.
Embodiment
Technical scheme is further described with reference to the accompanying drawings and examples.
Embodiment one:
As shown in Fig. 2 being the light channel structure figure of the present embodiment portable laser induced breakdown spectroscopy analytical equipment, including swash
Light device 1, beam splitting unit, the first spherical mirror 3, the second spherical mirror 4, testing sample 5, off axis paraboloidal mirror 6, optical fiber head 7, optical fiber 8,
Spectrometer 9, control box 10;Beam splitting unit uses dichroscope 2 in the present embodiment, by the collimation laser of incidence and via the second ball
The flashlight beam splitting that the spherical mirror 3 of face mirror 4 and first returns.
The connecting laser 1 of control box 10, provide power supply for laser 1 and produce laser, the laser that laser 1 is emitted is via two
The surface of the first spherical mirror 3 is transmitted through to Look mirror 2 is parallel, reflexes to the second spherical mirror 4 through the first spherical mirror 3, laser beam is via
The surface of test sample 5 can be focused on after the reflection of two spherical mirrors 4, has the signal optical transport that test sample 5 excites to the second spherical mirror 4
Surface, the first spherical mirror 3 is reflexed to via the second spherical mirror 4, exiting parallel is to dichroscope 2 after being reflected by the first spherical mirror 3
Surface, being reflected through dichroscope 2, directional light is incident to off axis paraboloidal mirror 6, and optical fiber head 7 is focused to by off axis paraboloidal mirror 6,
Optical fiber 8 is coupled into, then transfers information to spectrometer 9, spectrometer 9 connects control box 10, carries out spectrum analysis, and have control box
Display in 10 shows analysis process and result.
Laser and flashlight are light path coaxial between dichroscope 2 and test sample 5 and in opposite direction;Dichroscope
2 pairs of laser are high thoroughly, high to flashlight anti-.
Laser 1 uses Nd in the present embodiment:YAG actively Q-switched single pulse lasers, produce the short arteries and veins that wavelength is 1064nm
Rush superlaser.In the present embodiment dichroscope 2 be arranged to can efficiently through 1064nm laser and reflect 200~
800nm spectral signal light, it is contemplated that optically coated feasibility, the dichroscope 2 in the present embodiment can also be designed to phase
Anti- Transflective pattern, i.e., it is high anti-to 1064nm laser, it is high thoroughly to 200~800nm flashlight;In the present embodiment, swash
The incidence angle of light incidence dichroscope 2 is set to 45 degree, and the exciting light and flashlight after beam splitting as shown in Figure 2 are mutually perpendicular to, light beam
Separation degree is maximum.
First spherical mirror 3 and the second spherical mirror 4 form speculum group, and speculum group is reflecting sphere microscope group or reflection aspheric
Face microscope group, by selecting appropriate speculum group, the laser for the collimation for making to be emitted by the beam splitting of dichroscope 2 is via speculum group
The surface of test sample 5 is focused on after reflection, test sample 5 is produced laser plasma, while inspires atom spectrum radiation
Flashlight;Reverse light path of the flashlight along laser does not have aberration by the second spherical mirror 4 and the first spherical mirror 3, and still accurate
Straight outgoing, then reflected by dichroscope 2, and by first it is off-axis throw after face mirror 6 reflects, optical fiber head 7 is imported, coupled to optical fiber 8;
After laser focuses on the surface of test sample 5 by the second spherical mirror 4, caused plasma spectrum radiation collimates through the second spherical mirror 4
And return, focal position will not be caused different because of aberration caused by wavelength is inconsistent.Equally, by appropriate selection set from
Axis paraboloidal mirror 6, the flashlight of the collimation of the outgoing of dichroscope 2 can be made to reflect post-concentration by off axis paraboloidal mirror 6 and be coupled to
In optical fiber, the inconsistent wide spectrum of wavelength can focus on same point.
Off axis paraboloidal mirror 6 is the numerical aperture of off-axis spherical mirror or off-axis aspheric mirror, optical fiber 8 and off axis paraboloidal mirror 6
Footpath should match substantially, most efficiently to collect flashlight, and flashlight be imported into spectrometer 9;Spectrometer 9 receives laser 1
After the synchronous electric signal sent, shutter is opened after being subject to the delay of certain time, the plasma of test sample 5 hair can be obtained
The atom spectrum figure gone out;The atom spectrum figure obtained is handled by control box 10, can obtain elemental composition in test sample 5 and
The information such as content.
Control box 10 in the present embodiment includes the portions such as display, spectrometer processor, laser power supply, connection cables
Part;The connecting laser 1 of control box 10, power supply is provided for laser 1, produces laser;Spectrometer 9 connects control box 10, by signal
Optical transmission of information is analyzed and shown via control box 10 to control box 10.
As shown in figure 3, the portable laser induced breakdown spectroscopy analytical equipment of the present embodiment, including laser 1, dichroic
Mirror 2, the first spherical mirror 3, the second spherical mirror 4, off axis paraboloidal mirror 6, optical fiber head 7, optical fiber 8, leading edge 11, handle 12, exciting light
Control interface 13, power interface 14, spectrometer connector 15.Laser controlling interface 13 and power interface 14 connect control box 10.
Control box 10 is connected with power interface 14, and operating voltage is provided for laser 1;Laser controlling interface 13 is connected with control box 10,
To control and adjust laser caused by laser 1.Laser is transmitted by dichroscope 2, the first spherical mirror 3 is reached, by the first sphere
Mirror 3 reflexes to the second spherical mirror 4, then is reflected by the second spherical mirror 4 and focus on spectrometer leading edge 11, before test sample and spectrometer
Edge 11 abuts, can excitation signal light, flashlight is launched to the second spherical mirror 4, then reflexes to the first sphere by the second spherical mirror 4
It is in parallel light emergence after mirror 3, parallel flashlight incides dichroscope 2, and off axis paraboloidal mirror 6 is reflexed to by dichroscope 2,
Parallel flashlight focuses on the surface of optical fiber head 7 by off axis paraboloidal mirror 6, is coupled into optical fiber 8, last signal optical transport to spectrum
The spectrometer 9 that instrument connector 15 is connected, last information control box 10 carry out analysis and shown.
The Laser Focusing of spectrometer in the present embodiment abuts leading edge 11 with test sample when leading edge 11, use, from
And Laser Focusing is produced into flashlight in test sample surface.Exciting light control interface 13, power interface 14 in the present embodiment,
Spectrometer connector 15 is all connected to the corresponding interface in control box 10.
Embodiment two:
The index path of the portable laser induced breakdown spectroscopy analytical equipment of embodiment two as shown in Figure 4, for reality
The identical part of mode one mark identical mark is applied, and omits detailed description.
In embodiment two, a piece of negative lens 16 is placed between laser 1 and dichroscope 2, dissipates exciting light.Selection
Appropriate negative lens 16, the first spherical mirror 3 and the second spherical mirror 4, makes exciting light still focus on the surface of test sample 5.
Increase negative lens 16, make parallel laser misconvergence of beams, produce virtual focus, and the virtual focus and optical fiber head 7 are image
Conjugate relation.
The flashlight excited is reflected by the second spherical mirror 4 and the first spherical mirror 3 by former road respectively, is transmitted to dichroscope 2,
Reflected, directly focused at optical fiber head 7 by dichroscope 2, until being coupled into optical fiber 8, finally transfer information to spectrometer 9,
Spectrometer 9 connects control box 10, carries out spectrum analysis, and has the display in control box 10 to show analysis process and result.
Claims (9)
- A kind of 1. portable laser induced breakdown spectroscopy analytical equipment, it is characterised in that:Including laser (1), beam splitting unit, instead Penetrate microscope group, off axis paraboloidal mirror (6) and spectrometer (9);The laser of laser (1) outgoing is parallel through the beam splitting unit The speculum group is mapped to, testing sample (5) surface is focused on after speculum group reflection;The flashlight that the testing sample (5) sends after the speculum group reflection exiting parallel to the beam splitting unit, institute The light path coaxial of laser and flashlight between the beam splitting unit and the testing sample (5) is stated, it is anti-through the beam splitting unit The off axis paraboloidal mirror (6) is mapped to, is transmitted after the off axis paraboloidal mirror (6) reflection to the spectrometer (9).
- 2. portable laser induced breakdown spectroscopy analytical equipment according to claim 1, it is characterised in that:The speculum Group includes the first spherical mirror (3) and the second spherical mirror (4);The laser of laser (1) outgoing is through the parallel transmission of the beam splitting unit To first spherical mirror (3), the second spherical mirror (4) is reflexed to through first spherical mirror (3), through second spherical mirror (4) test sample (5) surface is focused on after reflecting;The signal optical transport that the testing sample (5) sends is to the second spherical mirror (4) the first spherical mirror (3), is reflexed to through the second spherical mirror (4), exiting parallel is to beam splitting list after the first spherical mirror (3) reflection Member.
- 3. portable laser induced breakdown spectroscopy analytical equipment according to claim 1, it is characterised in that:The beam splitting list Member is dichroscope (2), and the dichroscope (2) is by the laser of incidence and the flashlight beam splitting reflected by speculum group.
- 4. portable laser induced breakdown spectroscopy analytical equipment according to claim 3, it is characterised in that:The dichroic Mirror (2) is high to the laser anti-and high thoroughly to the flashlight, or high thoroughly and high anti-to the flashlight to the laser.
- 5. portable laser induced breakdown spectroscopy analytical equipment according to claim 3, it is characterised in that:The laser enters The incidence angle for penetrating the dichroscope (2) is 45 degree, and laser and flashlight after beam splitting are mutually perpendicular to.
- 6. portable laser induced breakdown spectroscopy analytical equipment according to claim 1, it is characterised in that:Described device is also Including negative lens (16), the negative lens (16) is positioned between the laser (1) and the beam splitting unit;The laser (1) laser of outgoing is transmitted to the speculum group, through described anti-by the negative lens (16) through the beam splitting unit is parallel Testing sample (5) surface is focused on after penetrating microscope group reflection;The flashlight that the testing sample (5) sends is anti-through the speculum group Rear exiting parallel is penetrated to the beam splitting unit, after beam splitting unit reflection, directly focuses on and is coupled into optical fiber, transmit to described Spectrometer (9).
- 7. portable laser induced breakdown spectroscopy analytical equipment according to claim 1, it is characterised in that:Described device is also Including control box (10), control box (10) connecting laser (1) and spectrometer (9);The control box (10) is laser (1) power supply is provided and controls laser (1) to produce laser;The spectrometer (9) by control box (10) carry out spectrum analysis with Display.
- 8. portable laser induced breakdown spectroscopy analytical equipment according to claim 1, it is characterised in that:Described device is also Including optical fiber head (7) and optical fiber (8), the flashlight focuses on the optical fiber after the off axis paraboloidal mirror (6) reflection (7) optical fiber (8), is coupled into, imports the spectrometer (9).
- 9. portable laser induced breakdown spectroscopy analytical equipment according to claim 7, it is characterised in that:Described device is also Including leading edge (11) and handle (12);The laser focuses on leading edge (11) after speculum group reflection, to be measured during measurement Sample (5) abuts with leading edge (11);Described device also includes laser controlling interface (13), power interface (14) and spectrometer connector (15);It is all connected to institute State the corresponding interface in control box (10).
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CN201711274257.6A CN107782718A (en) | 2017-12-06 | 2017-12-06 | Portable laser induced breakdown spectroscopy analytical equipment |
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CN201711274257.6A CN107782718A (en) | 2017-12-06 | 2017-12-06 | Portable laser induced breakdown spectroscopy analytical equipment |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109100334A (en) * | 2018-07-06 | 2018-12-28 | 南京理工大学 | The device of contents of heavy metal elements in a kind of detection paddy |
CN109239054A (en) * | 2018-08-17 | 2019-01-18 | 中国科学院合肥物质科学研究院 | A kind of laser induced breakdown spectroscopy electrochemical analysis system |
CN109580556A (en) * | 2019-01-08 | 2019-04-05 | 宁波谱泰克科学仪器有限公司 | The detection ambient pressure control structure of Handheld laser induced breakdown spectrograph |
WO2020081320A1 (en) * | 2018-10-17 | 2020-04-23 | Rigaku Analytical Devices, Inc. | Device for analyzing the material composition of an object via plasma spectrum analysis having a long pass filter |
CN112834466A (en) * | 2020-12-30 | 2021-05-25 | 中国原子能科学研究院 | Portable nuclear material discrimination instrument |
CN116735567A (en) * | 2023-08-15 | 2023-09-12 | 光谱时代(北京)科技有限公司 | Laser-induced breakdown spectroscopy element analysis equipment |
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CN204008464U (en) * | 2014-07-31 | 2014-12-10 | 邹平县好生镇卫生院 | Laser-induced Breakdown Spectroscopy is measured the device of trace selenium content in Chinese crude drug |
CN106596511A (en) * | 2016-12-27 | 2017-04-26 | 南京先进激光技术研究院 | Reflection type coaxial structure laser-induced breakdown spectroscopy analysis device |
CN207662798U (en) * | 2017-12-06 | 2018-07-27 | 南京先进激光技术研究院 | Portable laser induced breakdown spectroscopy analytical equipment |
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CN204008464U (en) * | 2014-07-31 | 2014-12-10 | 邹平县好生镇卫生院 | Laser-induced Breakdown Spectroscopy is measured the device of trace selenium content in Chinese crude drug |
CN106596511A (en) * | 2016-12-27 | 2017-04-26 | 南京先进激光技术研究院 | Reflection type coaxial structure laser-induced breakdown spectroscopy analysis device |
CN207662798U (en) * | 2017-12-06 | 2018-07-27 | 南京先进激光技术研究院 | Portable laser induced breakdown spectroscopy analytical equipment |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109100334A (en) * | 2018-07-06 | 2018-12-28 | 南京理工大学 | The device of contents of heavy metal elements in a kind of detection paddy |
CN109239054A (en) * | 2018-08-17 | 2019-01-18 | 中国科学院合肥物质科学研究院 | A kind of laser induced breakdown spectroscopy electrochemical analysis system |
WO2020081320A1 (en) * | 2018-10-17 | 2020-04-23 | Rigaku Analytical Devices, Inc. | Device for analyzing the material composition of an object via plasma spectrum analysis having a long pass filter |
US10732117B2 (en) | 2018-10-17 | 2020-08-04 | Rigaku Analytical Devices, Inc. | Device for analyzing the material composition of an object via plasma spectrum analysis having a long pass filter |
CN109580556A (en) * | 2019-01-08 | 2019-04-05 | 宁波谱泰克科学仪器有限公司 | The detection ambient pressure control structure of Handheld laser induced breakdown spectrograph |
CN109580556B (en) * | 2019-01-08 | 2023-07-04 | 宁波谱泰克科学仪器有限公司 | Detection environment air pressure control structure of handheld laser-induced breakdown spectrometer |
CN112834466A (en) * | 2020-12-30 | 2021-05-25 | 中国原子能科学研究院 | Portable nuclear material discrimination instrument |
CN116735567A (en) * | 2023-08-15 | 2023-09-12 | 光谱时代(北京)科技有限公司 | Laser-induced breakdown spectroscopy element analysis equipment |
CN116735567B (en) * | 2023-08-15 | 2023-10-20 | 光谱时代(北京)科技有限公司 | Laser-induced breakdown spectroscopy element analysis equipment |
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