CN107635914B - Ozone generating device - Google Patents
Ozone generating device Download PDFInfo
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- CN107635914B CN107635914B CN201680033191.9A CN201680033191A CN107635914B CN 107635914 B CN107635914 B CN 107635914B CN 201680033191 A CN201680033191 A CN 201680033191A CN 107635914 B CN107635914 B CN 107635914B
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/32—Constructional details of the dielectrics
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/64—Oxygen
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Abstract
An ozone generation device (10) is provided with: a dielectric part (1) having a discharge surface (11); and a discharge electrode (2) and a counter electrode (3) extending in a line inside the dielectric part (1) and facing the discharge surface (11), respectively, wherein the discharge electrode (2) or the counter electrode (3) includes linear parts (22, 32) extending in the longitudinal direction of the edge of the electrode when viewed from the discharge surface (11), and tip parts (21, 31) extending with the edge of the electrode bent from the linear parts (22, 32), and a component generated inside the dielectric part (1) by the electrostatic capacitance generated between the discharge electrode (2) and the counter electrode (3) is smaller in the vicinity of the tip parts (21, 31) than in the vicinity of the linear parts (22, 32).
Description
Technical Field
The present invention relates to an ozone generator that generates electric discharge using a dielectric surface as a discharge surface and generates ozone from oxygen in a space facing the discharge surface.
Background
An ozone generating device using the surface of a dielectric as a discharge surface includes a dielectric, and a discharge electrode and a counter electrode provided inside the dielectric. This ozone generator generates ozone from oxygen in the air by applying a driving voltage between a discharge electrode and a counter electrode to generate electric discharge in the air at or near the discharge surface. When the ozone generator is in a discharge state, the discharge electrode or the counter electrode is observed to emit light near the edge, but the discharge electrode or the counter electrode is especially bright at the edge of the bent portion. The reason is that: in the vicinity of the position where the edge of the electrode is bent, the electric field intensity is increased as compared with the vicinity of the position where the edge of the electrode extends in a straight line.
When the ozone generator is driven for a long time, the more brightly the discharge surface emits light, the more easily the deposits such as coal are deposited. Further, when the deposition of the deposit on the discharge surface progresses, the discharge of the ozone generator may be stopped. Further, in the vicinity of a position where light is brightly emitted, partial discharge is likely to occur due to a defect existing inside the dielectric, and the defect may spread due to the partial discharge to cause destruction of the dielectric.
Therefore, a technique for equalizing the distribution of the electric field intensity in the discharge surface has been proposed (for example, see patent document 1). For example, patent document 1 discloses an ozone generator in which the tip of a discharge electrode and the tip of a counter electrode are rounded, thereby suppressing the electric field intensity in the vicinity of the electrode tips.
Prior art documents
Patent document
Patent document 1: JP Kokai No. 5-35830
Disclosure of Invention
The technical problem to be solved by the invention
However, even if the electrode tip is rounded as in the ozone generating device disclosed in patent document 1, the electric field intensity at the electrode tip is stronger than that at the side portion of the discharge electrode or the counter electrode, that is, the portion where the edge of the electrode extends in a straight line, and the electrode tip emits light more brightly in the discharge surface than that at the electrode side portion. Therefore, even if the electrode tip portion of the discharge electrode or the counter electrode is rounded, it is difficult to suppress the deterioration caused by bright light emission near the electrode tip portion on the discharge surface.
Accordingly, an object of the present invention is to provide an ozone generator capable of equalizing the distribution of the electric field intensity in the discharge surface regardless of the electrode shape of the discharge electrode or the counter electrode.
Means for solving technical problems
The ozone generating device of the present invention comprises: a dielectric portion having a discharge surface; and a1 st electrode and a 2 nd electrode extending in the dielectric portion in a line with each other and facing the discharge surface, respectively, the 1 st electrode including: and a curved portion in which an edge of the electrode extends in a direction in which the 1 st electrode extends when viewed from the discharge surface, the curved portion extending such that the edge of the electrode is curved from the linear portion, wherein between the 1 st electrode and the discharge surface, a capacitance per unit area of the 1 st electrode in the vicinity of the curved portion is smaller than a capacitance per unit area of the 1 st electrode in the vicinity of the linear portion.
Hereinafter, the capacitance generated per unit area of the 1 st electrode between the 1 st electrode and the discharge surface is referred to as a1 st partial capacitance. In the above configuration, electric field concentration can be suppressed in the vicinity of the curved portion in the discharge surface, as compared with the case where the partial 1 st electrostatic capacitance is equal in the vicinity of the curved portion and the vicinity of the linear portion. In general, since the electric field intensity in the vicinity of the curved portion is stronger in the discharge surface than in the vicinity of the straight portion, the distribution of the electric field intensity in the discharge surface can be equalized regardless of the electrode shape of the discharge electrode or the counter electrode as long as the electric field concentration in the vicinity of the curved portion can be suppressed as described above.
Preferably, the dielectric portion includes a relative permittivity changing portion that covers the curved portion when viewed from the discharge surface, and the relative permittivity changing portion has a relative permittivity lower than that of the dielectric portion.
In this configuration, the electrostatic capacitance of part 1 can be reduced in the vicinity of the curved portion without changing the interval between the curved portion and the discharge surface.
Preferably, the distance between the 1 st electrode near the linear portion and the discharge surface is shorter than the distance between the 1 st electrode near the curved portion and the discharge surface.
In this configuration, the capacitance of part 1 can be reduced in the vicinity of the curved portion without changing the relative permittivity of the dielectric portion in the vicinity of the curved portion.
The dielectric portion may include a protruding portion that covers the curved portion when viewed from the discharge surface, and the protruding portion may protrude from the discharge surface further than the surrounding area. The 1 st electrode may be bent in a direction away from the discharge surface in the vicinity of the bent portion.
In these configurations, the 1 st electrode is spaced further from the discharge surface than the straight portion in the vicinity of the curved portion.
Preferably, the relative permittivity changing portion extends in a direction intersecting the straight portion when viewed from the discharge surface and overlaps the 2 nd electrode. Similarly, it is preferable that the protruding portion extends in a direction intersecting the linear portion when viewed from the discharge surface and overlaps the 2 nd electrode.
Here, the capacitance generated per unit area of the 2 nd electrode between the 2 nd electrode and the discharge surface is referred to as a 2 nd partial capacitance. In the above configuration, since the part 1 electrostatic capacitance and the part 2 electrostatic capacitance are both reduced in the vicinity of the curved portion as compared with the vicinity of the straight portion, the electric field concentration in the discharge surface in the vicinity of the curved portion can be further suppressed.
Preferably, the apparatus comprises: and a curved portion in which an edge of the electrode extends in a direction in which the 2 nd electrode extends, and the edge of the electrode extends so as to curve from the linear portion, when viewed from the discharge surface, wherein between the 2 nd electrode and the discharge surface, a capacitance (2 nd part capacitance) per unit area of the 2 nd electrode in the vicinity of the curved portion is smaller than a capacitance (2 nd part capacitance) per unit area of the 2 nd electrode in the vicinity of the linear portion.
In this configuration, electric field concentration can be suppressed even in the vicinity of the curved portion of the 2 nd electrode in the discharge surface, and the distribution of the electric field intensity in the discharge surface can be further equalized.
Preferably, the ozone generating device includes a plurality of pairs of the 1 st electrode and the 2 nd electrode, the plurality of pairs of the 1 st electrode and the 2 nd electrode are arranged in a direction orthogonal to a direction in which the 2 nd electrode extends with respect to the 1 st electrode when viewed from the discharge surface, and further includes a driving voltage source that outputs an N-phase driving voltage having a repeating pattern and a cyclic phase difference, where N is not less than 3, and the plurality of pairs of the 1 st electrode and the 2 nd electrode are inputted with an N-phase driving voltage from the driving voltage source according to an arrangement order of the electrodes, where 1 is not less than N. In this configuration, the distribution of the electric field intensity in the vicinity of the discharge surface is changed so as to circulate along the direction in which the electrode pairs are arranged. Thus, the gas in the space near the discharge surface moves in the direction in which the electrode pairs are arranged under the influence of the distribution of the electric field intensity. Therefore, the supply of oxygen to the discharge surface and the separation of ozone from the discharge surface can be promoted, and the amount of ozone generated can be increased. Furthermore, since the generated gas flows, it becomes difficult for dirt and the like to adhere to the discharge surface, and the reliability of the ozone generator is also improved.
The ozone generating device of the invention comprises: a dielectric portion having a discharge surface; and a1 st electrode and a 2 nd electrode extending in line with each other inside the dielectric portion and facing the discharge surface, respectively, the 1 st electrode including: the dielectric portion includes a linear portion in which an edge of the electrode extends in a direction in which the 1 st electrode extends when viewed from the discharge surface, and a curved portion in which the edge of the electrode extends so as to curve from the linear portion, and the dielectric portion includes a protruding portion which covers the curved portion when viewed from the discharge surface, and the protruding portion protrudes in a thickness direction from the discharge surface.
In this configuration, the protruding portion is provided so as to cover the curved portion, whereby the electrostatic capacitance of the 1 st portion in the vicinity of the curved portion is reduced. Therefore, the electric field intensity generated in the vicinity of the curved portion can be suppressed at the discharge surface. This makes it possible to equalize the distribution of the electric field intensity in the discharge surface.
Preferably, the protruding portion extends in a direction intersecting the linear portion when viewed from the discharge surface.
Effect of invention
According to the ozone generating device of the present invention, since electric field concentration can be suppressed in the vicinity of the curved portion in the discharge surface, the distribution of the electric field intensity in the discharge surface can be equalized. This makes it difficult for deposits and defects to be deposited on the discharge surface in the vicinity of the curved portion, thereby improving the reliability of the ozone generator.
Drawings
Fig. 1 is a plan view of the ozone generator according to embodiment 1 as viewed from a discharge surface.
Fig. 2 is a cross-sectional view of the ozone generator according to embodiment 1, as viewed from the front.
Fig. 3 is a schematic view showing an electric power line generated in the ozone generating apparatus according to embodiment 1.
Fig. 4(a) and (B) are schematic diagrams illustrating electrostatic capacitance generated in the ozone generating apparatus according to embodiment 1.
Fig. 5 is a plan view of the ozone generator according to embodiment 2 as viewed from the discharge surface.
Fig. 6(a) and (B) are sectional views of the ozone generator according to embodiment 3, as viewed from the front.
Fig. 7(a) and (B) are sectional views of the ozone generator according to embodiment 4, as viewed from the front.
Fig. 8 is a plan view of the ozone generator according to embodiment 5 as viewed from the discharge surface.
Fig. 9(a) is an electrical connection diagram of the ozone generating device according to embodiment 6. FIG. 9(B) shows the driving voltage V1～V4Time waveform diagram of (2).
FIG. 10 is a view showing an example of a flowchart of a method for manufacturing an ozone generator.
Detailed Description
EXAMPLE 1 embodiment
Fig. 1 is a plan view of an ozone generator 10 according to embodiment 1 of the present invention, as viewed from a discharge surface. Fig. 2 is a sectional view of ozone generating apparatus 10 as viewed from the front.
The ozone generating device 10 includes a dielectric part 1, a discharge electrode 2, a counter electrode 3, and a driving voltage source 4.
The dielectric portion 1 is composed of a dielectric material. The dielectric portion 1 includes a discharge surface (top surface) 11, a bottom surface 12, a left side surface 13, a right side surface 14, a front surface 15, and a back surface 16. The dielectric portion 1 is a flat plate having a rectangular shape when viewed from the discharge surface 11. The shape of dielectric portion 1 viewed from discharge surface 11 is not limited to a square shape, and may be any shape such as a polygonal shape, a circular shape, or an elliptical shape.
At least one pair of discharge electrode 2 and counter electrode 3 is provided inside dielectric portion 1. At least a partial region of each of the discharge electrode 2 and the counter electrode 3 faces the discharge surface 11 in a direction from the bottom surface 12 toward the discharge surface 11 (hereinafter referred to as a thickness direction). The discharge electrode 2 and the counter electrode 3 extend in a direction from the left side surface 13 to the right side surface 14 (hereinafter referred to as a longitudinal direction).
Here, the discharge electrode 2 and the counter electrode 3 are each composed of a planar conductor extending parallel to the discharge surface 11, and face each other in the thickness direction. The discharge electrode 2 is located closer to the discharge surface 11 than the counter electrode 3. The counter electrode 3 is wider than the discharge electrode 2 in the width direction, and extends from both sides of the discharge electrode 2 in the width direction when viewed from the discharge surface 11.
The discharge electrode 2 has a tip portion 21 that is closed inside the dielectric portion 1 on the left side surface 13 side, and a straight portion 22 that reaches the right side surface 14 of the dielectric portion 1 on the right side surface 14 side of the tip portion 21. The straight portion 22 extends in the longitudinal direction from the edge of the electrode when viewed from the discharge surface 11. The edge of the electrode when the tip portion 21 is viewed from the discharge surface 11 is bent from the straight portion 32 and extends in the width direction. Therefore, the tip portion 21 corresponds to a "curved portion" in the discharge electrode 2.
The opposite electrode 3 has a tip portion 31 that is cut off inside the dielectric portion 1 on the right side surface 14 side, and a linear portion 32 that reaches the left side surface 13 of the dielectric portion 1 on the left side surface 13 side of the tip portion 31. The straight portion 32 extends along the longitudinal direction of the electrode when viewed from the discharge surface 11. The edge of the electrode is bent from the straight portion 32 and extends in the width direction when the tip portion 31 is viewed from the discharge surface 11. Therefore, the tip portion 31 corresponds to a "curved portion" in the counter electrode 3.
Dielectric portion 1 includes projections 17 and 18 on discharge surface 11. The protruding portions 17 and 18 are portions protruding from the periphery in the thickness direction in the discharge surface 11 of the dielectric portion 1. The discharge surface 11 is flat except for the projections 17, 18. The projection 17 extends in the width direction so as to cover the tip 21 of the discharge electrode 2 when the discharge surface 11 is viewed. The protruding portion 18 extends in the width direction so as to cover the distal end portion 31 of the counter electrode 3 when the discharge surface 11 is viewed.
The driving voltage source 4 is electrically connected between one end of the discharge electrode 2 on the linear portion 22 side and one end of the opposite electrode 3 on the linear portion 32 side. Here, the driving voltage source 4 connects the counter electrode 3 to a reference potential, and applies an alternating voltage corresponding to the reference potential to the discharge electrode 2. By applying such an alternating voltage between the discharge electrode 2 and the counter electrode 3, an alternating electric field is generated around the discharge electrode 2 and the counter electrode 3.
Fig. 3 is a schematic view showing an alternating electric field around the discharge electrode 2 and the counter electrode 3 in the ozone generating apparatus 10. In fig. 3, lines of electric force generated by the alternating electric field are shown by broken lines.
The alternating electric field generates: electric flux lines a directly reaching the counter electrode 3 from the discharge electrode 2 only through the inside of the dielectric portion 1; and electric flux lines B extending from the discharge electrode 2 toward the discharge surface 11, extending to the outside of the dielectric portion 1, returning to the inside of the dielectric portion 1, and reaching the counter electrode 3. If the density of electric flux lines B is higher than a certain level or more outside dielectric portion 1, that is, if the electric field strength outside dielectric portion 1 is increased to a certain level or more, dielectric breakdown occurs in discharge surface 11 or the space near discharge surface 11, and discharge occurs. In the ozone generating device 10, the electric flux lines B are high-density in the region of the discharge surface 11 overlapping the near outer counter electrode 3 from the edge of the discharge electrode 2, and therefore, discharge is likely to occur in this region.
Fig. 4(a) is a schematic diagram of an equivalent circuit in which the capacitance between the discharge electrode 2 and the counter electrode 3, which capacitance occurs per unit area, is expressed as a concentration constant.
The capacitance C generated per unit area in the discharge electrode 2 with respect to the counter electrode 3 can be regarded as a capacitance circuit in which a partial capacitance Ca generating an electric field referred to as an electric flux line a in fig. 3 and a partial capacitance Cb generating an electric field referred to as an electric flux line B are connected in parallel. That is, the capacitance C can be expressed by the following equation.
C＝Ca+Cb
Further, the partial capacitance Cb of the electric flux B can be regarded as a capacitive circuit in which the 1 st partial capacitance C1, in which the electric flux B is generated between the discharge electrode 2 and the discharge surface 11, the 2 nd partial capacitance C2, in which the electric flux B is generated between the counter electrode 3 and the discharge surface 11, and the 3 rd partial capacitance C3, in which the electric flux B is generated in the space near the discharge surface 11 or the discharge surface 11, are connected in series. That is, the partial capacitance Cb based on the electric force line B can be expressed by the following expression.
1/Cb＝1/C1+1/C2+1/C3
In the ozone generating apparatus 10 having such an equivalent circuit, the projections 17 and 18 shown in fig. 1 and 2 are provided, so that the thickness from the discharge electrode 2 or the counter electrode 3 to the discharge surface 11 is increased in the vicinity of the distal ends 21 and 31 in the dielectric portion 1 as compared with the vicinity of the straight portions 22 and 32 in the dielectric portion 1. Thus, in the vicinity of tip portions 21 and 31 in dielectric portion 1, part 1 electrostatic capacitance C1 or part 2 electrostatic capacitance C2 is smaller than in the vicinity of straight portions 22 and 32 in dielectric portion 1.
Here, the influence of the thickness from the discharge electrode 2 or the counter electrode 3 to the discharge surface 11 on the partial electrostatic capacitance will be described in more detail. When the distance from the discharge electrode 2 to the discharge surface 11 is L1, the dielectric constant of the vacuum is ∈ 0, the relative dielectric constant in the dielectric portion 1 is ∈ r, and the area in the discharge electrode 2 is a (here, the capacitance C is a capacitance per unit area, and therefore a is 1), the 1 st partial capacitance C1 can be expressed by the following equation.
C1＝ε0×εr×A/L1＝ε0×εr/L1
Similarly, when the distance from the counter electrode 3 to the discharge surface 11 is L2, the partial capacitance C2 can be expressed by the following equation.
C2＝ε0×εr×A/L2＝ε0×εr/L2
In these equations, when the distances L1 and L2 increase, the partial capacitances C1 and C2 decrease, and when the distances L1 and L2 decrease, the partial capacitances C1 and C2 increase. Therefore, in the vicinity of the tip portions 21 and 31 having a large thickness from the discharge electrode 2 or the counter electrode 3 to the discharge surface 11, the 1 st partial capacitance C1 or the 2 nd partial capacitance C2 is reduced as compared with the vicinity of the straight portions 22 and 32 in the dielectric portion 1.
Fig. 4(B) is a diagram showing the 1 st part electrostatic capacitance generated by the portion provided with the protruding portions 17, 18 as C1 ', the 2 nd part electrostatic capacitance as C2', the 1 st part electrostatic capacitance generated by the portion not provided with the protruding portions 17, 18 as C1 ", and the 2 nd part electrostatic capacitance as C2".
In the dielectric portion 1, the thickness from the discharge surface 11 to the discharge electrode 2 or the counter electrode 3 is large at the portions where the projections 17 and 18 are provided, and is small at the portions where the projections 17 and 18 are not provided. For this reason, if the partial capacitances C1 'and C2' at the portions where the protruding portions 17 and 18 are provided are compared with the aforementioned derived expressions of the partial capacitances C1 and C2, the partial capacitances C1 ″ and C2 ″ at the portions where the protruding portions 17 and 18 are not provided are smaller.
Here, in the case where the driving voltage V0 is applied from the driving voltage source 4 to between the discharge electrode 2 and the counter electrode 3 as shown in fig. 4(a) in the case where the influence of the 1 st partial capacitance C1 or the 2 nd partial capacitance C2 on the electric field intensity in the discharge surface 11 is described, the voltage V3 can be expressed by the following equation, assuming that the combined capacitance of the 1 st partial capacitance C1 and the 2 nd partial capacitance C2 is C12 and the voltage applied to the 3 rd partial capacitance C3 through the discharge surface 11 is V3.
V3＝(C12/(C3+C12))×V0
The mathematical formula represents: the smaller the combined capacitance C12 of the 1 st part electrostatic capacitance C1 and the 2 nd part electrostatic capacitance C2, the lower the voltage V3 applied to the 3 rd part electrostatic capacitance C3.
That is, it is shown that when the partial capacitances C1 and C2 are reduced by providing the projections 17 and 18 so as to cover the distal ends 21 and 31 in the discharge surface 11, the voltage V3 generated in the vicinity of the distal ends 21 and 31 of the discharge surface 11 is reduced, and the electric field strength is weakened.
In general, the electric field intensity in the vicinity of the bent edge of the electrode, such as the tip portions 21 and 31 of the discharge electrode 2 or the counter electrode 3, is higher than that in the vicinity of the straight edge portions 22 and 32 where the edge of the electrode is linear. Therefore, if the projections 17 and 18 are not provided, discharge is likely to occur in the discharge surface 11 in the vicinity of the distal ends 21 and 31, and the vicinity of the distal ends 21 and 31 is likely to emit light brightly, and the problem of the growth of deposits and defects may be conspicuous. However, in the ozone generating device 10 of the present embodiment, since the projections 17 and 18 are disposed so as to overlap the distal ends 21 and 31 when the discharge surface 11 is observed, it is possible to make it difficult for discharge to occur in the vicinity of the distal ends 21 and 31 in the discharge surface 11. Therefore, the problem of occurrence of excessive discharge in the vicinity of the distal ends 21, 31 and growth of deposits and defects can be prevented from becoming conspicuous in the discharge surface 11.
In the present embodiment, a configuration example in which only 1 pair of discharge electrodes 2 and counter electrodes 3 are provided is shown, but the present invention is not limited to this configuration example. For example, 2 pairs or more of the discharge electrode 2 and the counter electrode 3 may be provided. When a plurality of pairs of discharge electrodes 2 and counter electrodes 3 are provided, the projections 17 and 18 can be provided so as to extend over the plurality of pairs of discharge electrodes 2 and counter electrodes 3. Alternatively, the projections may be provided for each pair of the discharge electrode 2 and the counter electrode 3 so as to individually overlap the respective distal end portions 21 and 31.
In the present embodiment, the discharge electrode 2 is provided closer to the discharge surface 11 than the counter electrode 3, but the present invention is not limited to this configuration example. For example, instead of the functions of the discharge electrode 2 and the counter electrode 3, an electrode close to the discharge surface 11 may be used as the counter electrode, and an electrode apart from the discharge surface 11 may be used as the discharge electrode.
In the present embodiment, although the configuration example in which the projections 17 and 18 cover the distal end portion 21 of the discharge electrode 2 and the distal end portion 31 of the counter electrode 3 is shown, the present invention is not limited to this configuration example. For example, the protruding portion may be provided so as to cover only one of the distal end portions. In this case, since electric field concentration is most likely to occur in the vicinity of the tip portion located in the vicinity of the discharge surface 11, it is preferable to provide the protrusion portion so as to cover the tip portion located in the vicinity of the discharge surface 11.
In the present embodiment, although the configuration example in which the distal end portions 21 and 31 of the discharge electrode 2 or the counter electrode 3 are covered with the protruding portions 17 and 18 as the "curved portion" in which the edge of the electrode is curved when viewed from the discharge surface 11 is shown, the present invention is not limited to this configuration example. For example, a bent portion in a crank shape may be provided near the center in the longitudinal direction of the discharge electrode 2 or the counter electrode 3, and the bent portion may be covered with a protrusion as a "curved portion".
EXAMPLE 2 EXAMPLE
Fig. 5 is a plan view of ozone generation device 10A according to embodiment 2 of the present invention, as viewed from discharge surface 11.
Further, on the discharge surface 11 of the dielectric portion 1A, similarly to embodiment 1, a projection 17 is provided so as to cover the distal end portion 21 of the discharge electrode 2A and a projection 18 is provided so as to cover the distal end portion 31 of the opposite electrode 3A.
In the ozone generating device 10A having such a configuration, since the projections 17 and 18 cover the vicinity of the distal ends 21 and 31, the distance from the discharge electrode 2A or the counter electrode 3A to the discharge surface 11 can be increased. Therefore, in this embodiment, the 1 st partial capacitance C1 or the 2 nd partial capacitance C2 can be made smaller in the vicinity of the distal ends 21, 31, and the electric field strength in the vicinity of the distal ends 21, 31 can be made weaker in the discharge surface 11. Thus, in the ozone generating device 10A of the present embodiment, excessive discharge can be suppressed from occurring in the vicinity of the distal end portions 21 and 31 in the discharge surface 11, and the problem of the growth of deposits and defects can be prevented from becoming conspicuous.
In the present embodiment, the configuration can be appropriately modified as described at the end of embodiment 1. For example, the number of pairs of the discharge electrode 2A and the counter electrode 3A can be changed. Further, the projections may be provided for each pair of the discharge electrode 2A and the counter electrode 3A so as to be overlapped individually. The projection may be provided so as to cover only one of the distal end portion 21 of the discharge electrode 2A and the distal end portion 31 of the counter electrode 3A. In addition, a bent portion such as a crank shape may be provided near the center in the longitudinal direction of the discharge electrode 2A or the counter electrode 3A, and the bent portion may be covered with a protruding portion as a "bent portion".
EXAMPLE 3
Fig. 6(a) is a cross-sectional view of ozone generation device 10B according to embodiment 3 of the present invention, as viewed from the front. Ozone generating device 10B includes dielectric portion 1B, discharge electrode 2B, counter electrode 3B, and drive voltage source 4 (not shown). Unlike embodiment 1, dielectric portion 1B is not provided with a projection, and the entire surface of discharge surface 11 is substantially flat. In place of the protruding portions, bent portions 17B and 18B are provided in the discharge electrode 2B and the counter electrode 3B.
The discharge electrode 2B and the counter electrode 3B are formed of a planar conductor as in embodiment 1, but are bent from a direction parallel to the discharge surface 11 at positions where the bent portions 17B and 18B are provided in a front view such that regions closer to the distal end portions 21 and 31 than the bent portions 17B and 18B are farther from the discharge surface 11 than regions closer to the linear portions 22 and 32 than the bent portions 17B and 18B are. Thus, in the ozone generating device 10B, even if the projection is not provided, the distance from the discharge electrode 2B or the counter electrode 3B to the discharge surface 11 can be increased in the vicinity of the distal ends 21 and 31. Therefore, in this embodiment, it is also possible to further reduce the 1 st partial capacitance C1 or the 2 nd partial capacitance C2 in the vicinity of the distal end portions 21, 31, and to reduce the electric field intensity in the vicinity of the distal end portions 21, 31 in the discharge surface 11. Thus, in the ozone generating device 10B of the present embodiment, excessive discharge can be suppressed from occurring in the vicinity of the distal ends 21 and 31 in the discharge surface 11, and the problem of the growth of deposits and defects can be prevented from becoming conspicuous.
In addition, the configuration of the present embodiment can be appropriately modified as described at the end of embodiment 1. For example, the number of pairs of the discharge electrode 2B and the counter electrode 3B can be changed. Further, a bent portion such as a crank shape may be provided near the center in the longitudinal direction of the discharge electrode 2B or the counter electrode 3B, and the bent portion may be covered with a protrusion as a "bent portion".
Fig. 6(B) is a cross-sectional view of an ozone generation device 10C according to a modification of embodiment 3, as viewed from the front. Ozone generating device 10C includes dielectric portion 1C, discharge electrode 2C, counter electrode 3C, and drive voltage source 4 (not shown). In the ozone generating device 10C, similarly to embodiment 2, the discharge electrode 2C and the counter electrode 3C are provided at the same height position in the thickness direction and are arranged in line with each other in the width direction. In this configuration, the bent portions 17C and 18C are provided in the discharge electrode 2C and the counter electrode 3C, whereby the vicinity of the distal ends 21 and 31 is separated from the discharge surface 11. As described above, even in the configuration in which the discharge electrode and the counter electrode are arranged at the same height position, embodiment 3 in which the bent portions are provided in the discharge electrode and the counter electrode can be realized.
EXAMPLE 4 embodiment
Fig. 7(a) is a cross-sectional view of ozone generation device 10D according to embodiment 4 of the present invention, as viewed from the front. Ozone generating device 10D includes dielectric portion 1D, discharge electrode 2D, counter electrode 3D, and drive voltage source 4 (not shown). Unlike embodiment 1 or embodiment 2, dielectric portion 1D is not provided with a protrusion or a bent portion, but is provided with relative permittivity changing portions 17D and 18D instead of these. The relative permittivity changing portions 17D and 18D are portions made of a dielectric material having a relative permittivity lower than that of the periphery of the dielectric portion 1D. The relative permittivity changing portions 17D and 18D are provided so as to cover the distal end portions 21 and 31 of the discharge electrode 2D or the counter electrode 3D.
Here, when the formula of the part 1 capacitance and the formula of the part 2 capacitance shown in embodiment 1 are shown again, C1 ═ epsilon 0 × epsilon r/L1 and C2 ═ epsilon 0 × epsilon r/L2 are shown.
In these equations, ∈ r is a relative permittivity, and when the relative permittivity ∈ r decreases, the partial capacitance C1 or the partial capacitance C2 decreases. Therefore, as shown in the present embodiment, by providing the relative permittivity changing portions 17D and 18D having a lower relative permittivity than the surroundings in the vicinity of the distal end portions 21 and 31 without providing the projecting portions or the bent portions, the 1 st partial capacitance C1 or the 2 nd partial capacitance C2 can be further reduced, and the electric field strength in the vicinity of the distal end portions 21 and 31 can be further reduced in the discharge surface 11. Thus, even in the ozone generating device 10D of the present embodiment, excessive discharge can be suppressed from occurring in the vicinity of the distal end portions 21 and 31 in the discharge surface 11, and the problem of the growth of deposits and defects can be significantly prevented.
In addition, in the present embodiment, the configuration can be appropriately modified as described at the end of embodiment 1. For example, the number of pairs of the discharge electrode 2D and the counter electrode 3D can be changed. Further, the relative permittivity changing portion may be provided so as to cover only one of the distal end portion 21 of the discharge electrode 2D and the distal end portion 31 of the counter electrode 3D. Further, a bent portion such as a crank shape may be provided near the center in the longitudinal direction of the discharge electrode 2D or the counter electrode 3D, and the bent portion may be covered with a relative permittivity changing portion as a "bent portion".
Fig. 7(B) is a cross-sectional view of ozone generating apparatus 10E according to the modification of embodiment 4, as viewed from the front. Ozone generating device 10E includes dielectric portion 1E, discharge electrode 2E, counter electrode 3E, and drive voltage source 4 (not shown). In the ozone generating device 10E, the discharge electrode 2E and the counter electrode 3E are arranged at the same height position as in embodiment 2. In this configuration, the relative permittivity changing portions 17E and 18E are provided so as to overlap the discharge electrode 2E and the counter electrode 3E, thereby reducing the partial capacitances C1 and C2 in the vicinity of the distal end portions 21 and 31. As described above, even in the configuration in which the discharge electrode and the counter electrode are arranged at the same height position, embodiment 4 in which the relative permittivity changing portion is provided can be realized.
EXAMPLE 5 EXAMPLE
Fig. 8 is a plan view of ozone generating apparatus 10F according to embodiment 5 of the present invention, as viewed from discharge surface 11. Ozone generating device 10F includes dielectric portion 1F, discharge electrode 2F, counter electrode 3F, and drive voltage source 4 (not shown). In this embodiment, the shape of the protruding portions 17F and 18F of the dielectric portion 1F is different from that of embodiment 2. The protruding portions 17F are provided individually for the discharge electrodes 2F, and are provided so as to overlap only the respective tip portions 21. The protruding portions 18F are provided individually for the respective counter electrodes 3F, and are provided so as to overlap only the respective distal end portions 31. In this way, the projection can also be provided.
EXAMPLE 6 EXAMPLE
Fig. 9(a) is an electrical connection diagram of an ozone generating device 10G according to embodiment 6 of the present invention. The ozone generating device 10G has the same general configuration as that of embodiment 1, and includes a dielectric portion 1G, a discharge electrode 2G, a counter electrode 3G (not shown), and a driving voltage source 4G. Here, 4 pairs or more of the discharge electrode 2G and the counter electrode 3G are provided. Each pair of the discharge electrode 2G and the counter electrode 3G is grouped into 4 groups in the order of arrangement in the width direction. The driving voltage source 4G is configured to output 4-phase driving voltages V having the same number of groups as that of each pair of the discharge electrode 2G and the counter electrode 3G1～V4. The driving voltage V of the phase number corresponding to the group number is inputted to the discharge electrode 2G of each group1～V4。
FIG. 9(B) shows the driving voltage V1～V4Time waveform diagram of (2). Drive voltage V1～V4Each having the same repeating pattern and having a phase difference of 90 ° in the order of phase numbering. Thus, the driving voltage V1～V4The phase difference is cyclically generated in the order of the phase numbers.
In the ozone generating device 10G configured as described above, the distribution of the electric field intensity in the vicinity of the discharge surface 11 changes so as to circulate in the width direction. Thereby, the gas in the space moves in the vicinity of the discharge surface 11 in the width direction under the influence of the electric field intensity. Therefore, the supply of oxygen to the discharge surface and the separation of ozone from the discharge surface can be promoted, and the amount of ozone generated can be increased. Further, the flow of the generated gas makes it difficult for dirt and the like to adhere to the discharge surface, and the reliability of the ozone generator 10G is also improved.
In addition, although the present embodiment is illustrated as the driving voltage V1～V4In the case of using a pulse wave signal, the driving voltage V is1～V4Alternatively, a sine wave signal or a rectangular wave signal can be used. It is more preferable to use a pulse wave signal or a rectangular wave signal because the voltage at which discharge can be started is lower than that in the case of using a sine wave signal. Although the present embodiment shows an example in which the number of drive voltage phases is 4, any integer can be used as long as the number of drive voltage phases is 3 or more. In the present embodiment, an example is shown in which the pattern waveforms are the same for each driving voltage, but the pattern waveforms may be different for each driving voltage. For example, drive voltages having different amplitudes or different repetition periods can be used.
Demonstration of production method and reliability test
Reliability tests were performed using actual ozone generators according to the respective embodiments.
First, a method for manufacturing an ozone generator will be described, as typified by an actual machine provided with a protrusion.
Fig. 10 is a diagram showing a flowchart of a manufacturing method in an actual machine of the ozone generating device.
In the manufacture of the actual machine provided with the protruding portion, first, a dielectric green sheet is formed (S1). Concretely, CaO-B is added2O3-Al2O3-SiO2Gas and Al2O3After dispersion treatment with a toluene/ethanol mixed solvent, a dispersant, and a binder for 8hr by a ball mill, a dielectric green sheet was formed by a doctor blade coating method. The various materials and specific processing methods used for manufacturing the dielectric green sheet are not limited to those described above, and may be set according to the type of dielectric material constituting the dielectric portion. For example, the dielectric material may be A12O3、SiO2、ZrO2Various glasses, BaTiO3Etc. oxidation ofSuitable materials can be used for the dielectric portion, such as a mixture of glass and an oxide filler constituting LTCC, and a resin such as epoxy or polyimide, which can realize high insulation in the dielectric portion.
Next, in the actual manufacturing, the conductor paste patterns to be the discharge electrode and the counter electrode were formed (S2). Specifically, a conductor paste pattern to be a discharge electrode and a counter electrode is formed by printing Ag paste on the dielectric green sheet by screen printing.
The material of the conductor paste is not particularly limited as long as it can be formed on the dielectric green sheet, but when the conductor paste is simultaneously fired with a dielectric green sheet composed of an oxide material or the like, it is desirable to select Cu, Ag, Pd, Pt, W, RuO, or the like as the conductor paste2The resistance paste of (1), and the like.
Next, in the actual manufacturing, a plurality of dielectric green sheets are stacked and laminated, integrated by applying pressure, and then fired (S3). In this case, the dielectric thickness on the discharge electrode was set to 40 μm, the dielectric thickness on the opposite electrode was set to 120 μm, and the total thickness was set to 500 μm.
Then, in the actual machine manufacturing, the protrusion portion is formed (S4). Specifically, the glass paste or the dielectric paste is applied with a print pattern capable of covering the tip end portion of each electrode so that the glass paste is fired so as to cover the curved portion of the electrode print pattern of the dielectric green sheet after electrode printing, thereby forming the protruding portion with a dielectric thickness of 10 μm.
Thus, the actual machine of the ozone generating device with the protruding part is manufactured.
In the above-described method of manufacturing an actual machine, the protrusion is formed by applying and firing a glass paste, but for example, a sheet-like dielectric material may be punched into a desired pattern, laminated with a fired or unfired laminate, and fired to form the protrusion. As the material of the protruding portion, any insulating material other than glass paste can be used. Among them, from the viewpoint of reliability and the like, since characteristics such as thermal expansion coefficient are desired to be close to each other in the main portion of the dielectric portion and the protruding portion, it is desired to select a material capable of obtaining such characteristics as a material of the protruding portion. The dielectric thickness of the protrusion is preferably 5 μm or more. When the thickness of the projection is smaller than this, the discharge near the tip of the discharge electrode or the counter electrode may not be reduced due to variations in the production of the projection. The distance between the discharge electrode and the discharge surface is preferably in the range of 10 μm to 100 μm. If the interval is 10 μm or less, the dielectric portion has poor insulation properties, and a destructive discharge may occur during discharge. On the other hand, if the interval is 100 μm or more, the voltage required for discharge increases, which increases the power supply cost due to an increase in size of the transformer used in the booster circuit. Therefore, the above-mentioned interval is particularly preferably 50 μm or less. The width of each electrode or the adjacent interval in the width direction may be 10 to 200 μm, and particularly preferably 30 to 100 μm. If these thicknesses are less than 30 μm, the ease of forming the wiring in the printing method is improved, and the yield is deteriorated. Further, if it is 100 μm or less, a lower-cost transformer can be used, and driving at a low voltage becomes possible.
When the bent portion is provided without the protruding portion, the step of forming the protruding portion (S4) is not performed, and in the step of stacking and firing the dielectric green sheets (S3), the dielectric green sheets of a pattern (for example, a frame shape) overlapping only the tip end portion with respect to the discharge electrode or the counter electrode are stacked on the discharge surface. Then, the entire laminate is fired while applying pressure to the laminate. At this time, each main material, pressure, heating time, and the like are set so that the discharge surface is flattened by the flow of the adhesive. Thus, the conductor paste pattern in the laminated body is deformed in the thickness direction along the shape of the frame-shaped dielectric green sheet, and therefore the discharge electrode or the counter electrode can be bent.
In the case where the protrusion or the bent portion is not provided and the relative permittivity changing portion is provided, the step of forming the protrusion (S4) is not performed, and in the step of stacking and firing the dielectric green sheets (S3), the dielectric green sheets having openings so as to overlap only the tip end portion with respect to the discharge electrode or the counter electrode are stacked on the discharge surface and fired. After firing, the opening of the discharge portion is filled with a paste of a dielectric material having a different relative permittivity or the like, and the paste is solidified, whereby the relative permittivity changing portion can be provided.
The actual machines according to the respective embodiments and the actual machines according to the comparative examples manufactured by the above-described manufacturing methods were subjected to reliability tests. In the reliability test, each real machine was continuously discharged for a given time (500hr) in a constant temperature bath in which the inside of the bath was maintained at 40 to 90% atmosphere. Further, in the continuous discharge, the gas inside the housing is sucked at a constant speed by an ozone concentration meter, and the ozone concentration is measured. The ozone concentration at the initial stage of the start of the continuous discharge and the ozone concentration immediately after the end of the continuous discharge are as follows.
In an actual machine in which the discharge electrode and the counter electrode were opposed to each other in the thickness direction, the following reliability test results were obtained.
Embodiment 1 (fig. 1: projecting, electrode-opposed type) initial stage: 22.1ppm → post test: 20.5ppm | ozone concentration decrease rate: 7.2 percent
In embodiment 3 (fig. 6 a), in the initial stage: 22.8ppm → post test: 21.5ppm | ozone concentration decrease rate: 5.7 percent
Initial stage of comparative example (no projection, bent portion, electrode facing type): 24.5ppm → post test: 17.65ppm | ozone concentration decreasing rate: 28 percent of
From these results, the actual machine according to the embodiment of the present invention can significantly suppress the decrease in the ozone concentration as compared with the comparative example. This is considered to be because: in the actual machine according to the embodiment of the present invention, the thickness from the tip portions of the discharge electrode and the counter electrode to the discharge surface is increased, and as a result, the discharge can be suppressed in the vicinity of the electrode tip portion, and the deposition of the deposit such as coal can be suppressed.
Further, when the actual machines according to the embodiment of the present invention are compared with each other, it can be confirmed that: compared with the configuration in which the protrusion is provided, the configuration in which the bent portion is provided tends to have a favorable ozone concentration and a favorable reduction rate.
This is considered to be because: in the configuration in which the bent portion is provided, since the discharge surface becomes flat, supply of outside air to the discharge surface and separation of ozone are easily generated.
In addition, when the discharge electrode and the counter electrode are arranged at the same height position in the width direction, the following reliability test results can be obtained.
In embodiment 2 (FIG. 5: continuous projection and comb-shaped electrode): 27.6ppm → post test: 23.8ppm | ozone concentration decreasing rate: 13.8 percent
In the initial stage of embodiment 5 (FIG. 8: projection separation, comb type electrode): 27.3ppm → post test: 24.1ppm | ozone concentration decrease rate: 11.7 percent
In embodiment 3 (FIG. 6B: bend section, electrode comb type): 28.6ppm → post test: 25.8ppm | ozone concentration decreasing rate: 9.7 percent
Comparative example (no protrusion, curved portion: comb-shaped electrode): 30.8ppm → post test: 16.3ppm | ozone concentration decrease rate: 47.1 percent
From these results, it is also clear that the actual machine according to the embodiment of the present invention can suppress the decrease in the ozone concentration more significantly than the comparative example. Even if the actual machines according to the embodiments of the present invention are compared with each other, the ozone concentration and the reduction rate in the structure provided with the bent portion are further improved as compared with the structure provided with the protruding portion. Further, even in the case where the protruding portion is provided, it is possible to confirm that: compared with the configuration in which the protruding portion is provided separately, the configuration in which the protruding portion is provided to extend continuously tends to improve the ozone concentration and the reduction rate. These are also believed to be due to: the discharge surface is continuous, so that the supply of the external air to the discharge surface and the separation of ozone are easy to generate.
Further, by providing a phase difference in the drive voltage, the following reliability test results can be obtained when the air flow is generated at the discharge surface.
Embodiment 6 (with projection: air flow type) initial stage: 35.7ppm → post test: 31.2ppm | ozone concentration decrease rate: 12.6 percent
Comparative example 3 (no projection: air flow type) initial stage: 37.0ppm → post test: 19.8ppm | ozone concentration decrease rate: 46.5 percent
From these results, in the actual machine according to the embodiment of the present invention, the decrease in the ozone concentration can be suppressed more greatly than in the comparative example. Further, in the above-described actual machine, since supply of outside air to the discharge surface and desorption of ozone can be promoted by generating an air flow in the discharge surface, an ozone concentration extremely higher than that in other structures can be obtained.
The configurations of the embodiments and the actual machines described above are merely exemplary and the effects of the present invention can be obtained in any configurations as long as the configurations are the configurations of the claims. In addition, the configurations disclosed in the embodiments may be combined.
-description of symbols-
Dielectric part
Discharge electrode
A counter electrode
A drive voltage source
Ozone generating device
Discharge surface
Bottom surface of a ceramic tile
Left side surface
Right flank
Front side of
Back side of the plate
17. 18, 17F, 18F
17B, 18B, 17C, 18C
Relative dielectric constant changing part 17D, 18D, 17E, 18E
21. Front end portion
22. A straight line portion
Claims (11)
1. An ozone generating device is provided with:
a dielectric portion having a discharge surface; and
a1 st electrode and a 2 nd electrode extending in the dielectric portion in a line with each other and facing the discharge surface,
the 1 st electrode includes: a straight portion where the edge of the electrode extends in the direction in which the 1 st electrode extends when viewed from the discharge surface, and a curved portion where the edge of the electrode extends while curving from the straight portion,
between the 1 st electrode and the discharge surface, capacitance per unit area of the 1 st electrode in the vicinity of the curved portion is smaller than capacitance per unit area of the 1 st electrode in the vicinity of the linear portion.
2. The ozone generating device according to claim 1,
the dielectric portion has a relative permittivity changing portion covering the curved portion when viewed from the discharge surface,
the relative permittivity changing portion has a relative permittivity lower than that of the dielectric portion.
3. The ozone generating device according to claim 2,
the relative permittivity changing portion extends in a direction intersecting the straight portion when viewed from the discharge surface and overlaps the 2 nd electrode.
4. The ozone generating device according to claim 1,
the distance between the 1 st electrode near the linear portion and the discharge surface is shorter than the distance between the 1 st electrode near the curved portion and the discharge surface.
5. The ozone generating device according to claim 4,
the dielectric portion has a protruding portion covering the curved portion when viewed from the discharge surface,
the protruding portion protrudes from the discharge surface more than the surrounding.
6. The ozone generating device according to claim 5,
the protruding portion extends in a direction intersecting the linear portion when viewed from the discharge surface and overlaps the 2 nd electrode.
7. The ozone generating device according to any one of claims 4 to 6,
the 1 st electrode is bent in a direction away from the discharge surface in the vicinity of the bent portion.
8. The ozone generating device according to any one of claims 1 to 6,
the 2 nd electrode includes: a straight portion where the edge of the electrode extends in the direction in which the 2 nd electrode extends when viewed from the discharge surface, and a curved portion where the edge of the electrode extends while curving from the straight portion,
between the 2 nd electrode and the discharge surface, capacitance per unit area of the 2 nd electrode in the vicinity of the curved portion is smaller than capacitance per unit area of the 2 nd electrode in the vicinity of the linear portion.
9. The ozone generating device according to any one of claims 1 to 6,
the ozone generating device comprises a plurality of pairs of the 1 st electrode and the 2 nd electrode, wherein the plurality of pairs of the 1 st electrode and the 2 nd electrode are arranged in a direction orthogonal to a direction in which the 2 nd electrode extends with respect to the 1 st electrode when viewed from the discharge surface,
also comprises a driving voltage source for outputting N-phase driving voltage with repeated pattern and cyclic phase difference, wherein N is not less than 3,
the 1 st and 2 nd electrodes are inputted with a driving voltage of an nth phase from the driving voltage source according to the arrangement sequence of the electrodes, wherein N is more than or equal to 1 and less than or equal to N.
10. An ozone generating device is provided with:
a dielectric portion having a discharge surface; and
a1 st electrode and a 2 nd electrode extending in a line with each other inside the dielectric portion and facing the discharge surface,
the 1 st electrode includes: a straight portion where the edge of the electrode extends in the direction in which the 1 st electrode extends when viewed from the discharge surface, and a curved portion where the edge of the electrode extends while curving from the straight portion,
the dielectric portion has a protruding portion covering the curved portion when viewed from the discharge surface,
the protruding portion protrudes in a thickness direction from the discharge surface.
11. The ozone generating device according to claim 10,
the protruding portion extends in a direction intersecting the linear portion when viewed from the discharge surface.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-115911 | 2015-06-08 | ||
| JP2015115911 | 2015-06-08 | ||
| PCT/JP2016/066107 WO2016199625A1 (en) | 2015-06-08 | 2016-06-01 | Ozone generation device |
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| Publication Number | Publication Date |
|---|---|
| CN107635914A CN107635914A (en) | 2018-01-26 |
| CN107635914B true CN107635914B (en) | 2020-03-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201680033191.9A Active CN107635914B (en) | 2015-06-08 | 2016-06-01 | Ozone generating device |
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| Country | Link |
|---|---|
| JP (1) | JP6547826B2 (en) |
| CN (1) | CN107635914B (en) |
| DE (1) | DE112016002204T5 (en) |
| WO (1) | WO2016199625A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5407639A (en) * | 1991-10-14 | 1995-04-18 | Toto, Ltd. | Method of manufacturing a corona discharge device |
| JP2001019409A (en) * | 1999-07-02 | 2001-01-23 | Toshiaki Akimoto | High voltage ozone generator |
| CN1774394A (en) * | 2004-02-25 | 2006-05-17 | 东芝三菱电机产业系统株式会社 | Ozone generator and ozone generating method |
| CN103476706A (en) * | 2011-04-08 | 2013-12-25 | 松下电器产业株式会社 | Ozone generating device |
| CN105409331A (en) * | 2013-07-19 | 2016-03-16 | 株式会社村田制作所 | Airflow generator |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0741116Y2 (en) * | 1988-04-14 | 1995-09-20 | 閃一 増田 | Electric field device |
| JP2526706Y2 (en) * | 1991-10-14 | 1997-02-19 | 東陶機器株式会社 | Ozonizer |
-
2016
- 2016-06-01 DE DE112016002204.2T patent/DE112016002204T5/en active Pending
- 2016-06-01 JP JP2017523593A patent/JP6547826B2/en active Active
- 2016-06-01 CN CN201680033191.9A patent/CN107635914B/en active Active
- 2016-06-01 WO PCT/JP2016/066107 patent/WO2016199625A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5407639A (en) * | 1991-10-14 | 1995-04-18 | Toto, Ltd. | Method of manufacturing a corona discharge device |
| JP2001019409A (en) * | 1999-07-02 | 2001-01-23 | Toshiaki Akimoto | High voltage ozone generator |
| CN1774394A (en) * | 2004-02-25 | 2006-05-17 | 东芝三菱电机产业系统株式会社 | Ozone generator and ozone generating method |
| CN103476706A (en) * | 2011-04-08 | 2013-12-25 | 松下电器产业株式会社 | Ozone generating device |
| CN105409331A (en) * | 2013-07-19 | 2016-03-16 | 株式会社村田制作所 | Airflow generator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6547826B2 (en) | 2019-07-24 |
| DE112016002204T5 (en) | 2018-02-22 |
| CN107635914A (en) | 2018-01-26 |
| JPWO2016199625A1 (en) | 2018-01-18 |
| WO2016199625A1 (en) | 2016-12-15 |
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