CN107607072B - A kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity - Google Patents
A kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity Download PDFInfo
- Publication number
- CN107607072B CN107607072B CN201711090980.9A CN201711090980A CN107607072B CN 107607072 B CN107607072 B CN 107607072B CN 201711090980 A CN201711090980 A CN 201711090980A CN 107607072 B CN107607072 B CN 107607072B
- Authority
- CN
- China
- Prior art keywords
- film
- measured
- thickness
- temperature
- moment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Radiation Pyrometers (AREA)
Abstract
The present invention provides a kind of methods of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity.This method provides uniform and stable heat flux using heating device and heats film to be measured, film after heating sends out infra-red radiation, infrared eye receives radiation signal, and radiation signal is transformed into electric signal, after post-treated device processing, the temperature profile of film surface to be measured is shown.In a certain particular moment, the percentage of the temperature change of film surface to be measured and the percentage of thickness change are equal.Film surface temperature indifference to be measured just illustrates that film thickness is uniform.This method can quickly, non-destructive testing film gauge uniformity, whether and whether ignore film to be measured conductive, transparent.It can be used for the sealing detection etc. of lithium battery pole slice, polybag.
Description
Technical field
The present invention relates to a kind of film gauge uniformity lossless detection method, in particular to a kind of quick nothing of infrared thermal imaging
The method of damage detection film gauge uniformity.
Background technique
Film have good toughness, moisture resistance and leakproofness, life and industry in using very extensive.With society
Requirement in the development of meeting, life and industry to film performance is higher and higher, and the performance of film has with its thickness uniformity
Close relationship.Therefore, to film gauge uniformity carry out Fast nondestructive evaluation be very it is necessary to.
The detection of current thin film the thickness uniformity detects film thickness mainly using film thickness as main detection target
Method mainly have vortex, β ray, optical method and infrared method etc..Eddy-current method is suitable for the non-conductive layer thickness on conductive metal
Measurement；β ray rule has radioactivity；Optical method can only measure transparent film, these methods all have some limitations.Phase
Than the above several method, infrared method has apparent advantage, can quick, non-destructive testing film thickness using infrared thermography
Uniformity, since all objects higher than absolute zero can all issue infra-red radiation, whether institute conductive not by film in this way,
Whether transparent influence.
Infrared thermal imaging is finally reflected out object by a series of processing by receiving the infra-red radiation that object emission goes out
The temperature field in body surface face.At a time, the percentage of electrode film temperature change and electrode film thickness percentage change
It is identical, and do not influenced by electrode surface heat transfer coefficient.A kind of infrared thermal imaging quick nondestructive can be designed using this conclusion
The method for detecting film gauge uniformity.
Summary of the invention
In order to reduce because film product is unqualified caused by uneven thickness, the qualification rate of film product, this hair are improved
It is bright to provide a kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity.
The technical scheme is that a kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity, packet
It includes: heating device, film to be measured, infrared eye and after-treatment device.The heating device, which is used to provide, to be stablized, uniformly
Heat flux.The film to be measured is laid on the heating device, and guarantees that there is no bubbles between film and heating device.
The infrared eye includes infrared lens, infrared detector.The infrared lens are described to be measured thin for receiving and converging
The thermal radiation signal received is transformed into electric signal by the infra-red radiation that film is launched after being heated, the infrared detector.Institute
Stating after-treatment device includes signal processor and display screen, and electric signal is amplified and converted to hygrogram by the signal processor
Picture, the display screen show the Temperature Distribution of film surface.
A kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity, includes the following steps:
1, Temperature Distribution of the thin-film material to be measured under constant heat flux conditions is simulated with the method for numerical simulation, simulation
The thickness of film to be measured changes according to linear function, obtains the Temperature Distribution of film surface to be measured of each moment, calculates each
Moment film temperature percentage change is simultaneously made comparisons with the percentage of change in film thickness, obtains two percentage change phases
Same particular momentt；
2, on the heating by film to be measured tiling, film side is close to heating device, and guarantees that film and heating fill
Bubble is not present between setting, the infrared lens arranged orthogonal of infrared eye is shot in the top of the film other side to be measured
The temperature profile of each moment film surface；
3, it observestThe temperature profile for the film surface that moment shoots, if each position temperature indifference of film surface
It is different, then illustrate that film thickness is uniform.If the temperature of some position of film surface is higher than elsewhere, illustrate the position
The thickness of film is less than elsewhere；Conversely, then illustrating that the thickness of the position film is higher than elsewhere.
Beneficial effects of the present invention:
(1) present invention detects film gauge uniformity using the principle of infrared thermal imaging, to be measured in entire detection process
Film only needs and heating means touch, avoids film and is destroyed in the detection process.Infrared eye shooting is to be measured
The Temperature Distribution at film surface each moment carries out on-line real-time measuremen to film to be measured；
(2) in a certain particular momentt, change in film thickness 1 percent to be measured, then corresponding thickness also changes percent
One.The particular moment of different thin-film materialstDifference, but this particular momenttUsually be smaller than 1 second, therefore can be quick
Detect film gauge uniformity；
(3) film gauge uniformity is detected using infrared thermal imaging, since all objects higher than absolute zero can all be sent out
Infra-red radiation out, so whether the present invention is conductive, transparent etc. without the material of consideration film to be measured when detecting the thickness uniformity
Problem, suitable for detecting the film gauge uniformity of any material.
Detailed description of the invention
Fig. 1 is system schematic of the invention.
Fig. 2 is flow chart of the invention.
Fig. 3 is change in film thickness figure in numerical simulation of the present invention.
Specific embodiment
Detailed description of the preferred embodiments with reference to the accompanying drawing:
As shown in Figure 1, the present invention includes heating device 1, film to be measured 2, infrared eye 3, after-treatment device 4, institute
Stating infrared eye 3 includes infrared lens 5 and infrared detector 6, and the after-treatment device 4 includes signal processor 7 and shows
Display screen 8.The film to be measured 2 is tightly attached on the heating device 1, and is guaranteed between the film to be measured 2 and heating device 1 not
There are bubbles.The infrared lens 6 are vertically mounted on the top of 2 other side of film to be measured.The heating device 1 can mention
For stabilization, uniform heat flux, for heating the film to be measured 2, the film 2 to be measured after heating will send out red
These infrared radiation signals are converged and are received by external radiation, the infrared lens 5, and the infrared detector 6 is red by what is received
External radiation signal is amplified and converted to electric signal, and the signal processor 7 receives electric signal and handles it, by electric signal
It is changed into visible Temperature Distribution, the Temperature Distribution on 2 surface of film to be measured is shown finally by the display screen 8
Come.
It is illustrated in figure 2 flow chart of the invention, firstly, simulating the film to be measured 2 using the method for numerical simulation
The Temperature Distribution of each moment film surface when thickness change, 2 thickness change of film to be measured is as shown in figure 3, both sides of the edge
Thickness be respectivelyWith(whereinFor relatively thin side,For the thicker other side), calculate film thickness change
The percentage of change, according to the temperature simulatedWith(WithFor a certain moment
Respectively correspond with a thickness ofWithTemperature), calculate the percentage of each moment temperature change,
By calculated temperature change percentage of each moment be compared, find outWithWhen corresponding specific when equal
It carvest。
Then the film 2 to be measured is laid on the heating device 1, and presses lightly on the film to be measured 2, made thin
Bubble-free between film and the heating device 1 adjusts the infrared lens 5 perpendicular to the film 2 to be measured, shoot it is described to
Survey the Temperature Distribution at 2 surface of film each moment, and by the film to be measured 2 in particular momenttTemperature Distribution be shown in institute
It states on display screen 8.
Finally compare the Temperature Distribution of each position of film, if the temperature of each position of thin film planar is identical, illustrates institute
The thickness for stating film 2 is uniform；If the temperature of some position of thin film planar has differences with other positions, illustrate described to be measured thin
In the position in uneven thickness of film 2.If the temperature of some position of thin film planar is lower than other positions, illustrate the thin of the position
Film thickness is thicker than other positions；If the temperature of some position of thin film planar is higher than other positions, illustrate that the film of the position is thick
It spends thinner than other positions.And the percentage of thickness change is identical as the percentage of temperature change.
Claims (2)
1. a kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity, which comprises the steps of:
(1) simulate Temperature Distribution of the thin-film material to be measured under constant heat flux conditions with the method for numerical simulation, simulation to
The thickness for surveying film changes according to linear function, obtains the Temperature Distribution of film surface to be measured of each moment；The thickness of two sides point
It Wei not h1And h2(wherein h1For relatively thin side, h2For the thicker other side), calculate the percentage of change in film thicknessAccording to the temperature T of the both sides of the edge simulated1And T2(T1And T2It respectively corresponds for a certain moment with a thickness of h1And h2
Temperature), calculate the percentage of each moment temperature changeCompare P1With the P at each moment2, obtain two
Particular moment t when variation percentage is identical；
(2) film 2 to be measured is laid on heating device 1, heating device is close in 2 side of film to be measured, and guarantees film 2 to be measured
Bubble is not present between heating device 1, the infrared lens arranged orthogonal of infrared eye 3 is in 1 other side of film to be measured
The temperature profile of each moment film surface is shot in top；
(3) temperature profile for the film surface that observation particular moment t is shot, if each position temperature indifference of film surface
It is different, then illustrate that film thickness is uniform；If the temperature of some position of film surface is higher than elsewhere, illustrate the position
The thickness of film is less than elsewhere；Conversely, then illustrating that the thickness of the position film is higher than elsewhere；
2. a kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity according to claim 1, special
Sign is that the film 2 to be measured can be conductive material, non-conductive material, transparent membrane or opaque film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711090980.9A CN107607072B (en) | 2017-11-08 | 2017-11-08 | A kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711090980.9A CN107607072B (en) | 2017-11-08 | 2017-11-08 | A kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107607072A CN107607072A (en) | 2018-01-19 |
| CN107607072B true CN107607072B (en) | 2019-10-11 |
Family
ID=61085602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711090980.9A Active CN107607072B (en) | 2017-11-08 | 2017-11-08 | A kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107607072B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108801194B (en) * | 2018-08-02 | 2020-11-10 | 广州市盛华实业有限公司 | Non-contact powder wet film thickness gauge |
| CN112489066B (en) * | 2020-11-30 | 2023-07-04 | 国网山西省电力公司晋城供电公司 | Extraction method for infrared thermal imaging image edge of power distribution equipment |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2863048A1 (en) * | 2003-11-27 | 2005-06-03 | Contitech Holding Gmbh | Hollow plastic component wall thickness measuring procedure and apparatus uses infrared radiation, mirrors and thermal imaging camera |
| CN101813638A (en) * | 2010-04-30 | 2010-08-25 | 华中科技大学 | Method and device for detecting welding point defect of chip on line |
| US8128278B2 (en) * | 2003-09-26 | 2012-03-06 | Lam Research Corporation | Methods and apparatus for thin metal film thickness measurement |
| CN102954968A (en) * | 2012-11-05 | 2013-03-06 | 西安交通大学 | Thermal barrier coating part electromagnetic eddy current thermal imaging non-destructive detection system and detection method thereof |
| CN103175478A (en) * | 2013-03-08 | 2013-06-26 | 华中科技大学 | Infrared-imaging-based film thickness gauge |
| CN103471513A (en) * | 2013-09-29 | 2013-12-25 | 黑龙江科技大学 | Method for measuring thickness of coating through optical pulse infrared thermal imaging |
| CN106705911A (en) * | 2015-11-14 | 2017-05-24 | 南京诺威尔光电系统有限公司 | Thermal wave imaging film layer thickness detection system and method |
-
2017
- 2017-11-08 CN CN201711090980.9A patent/CN107607072B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8128278B2 (en) * | 2003-09-26 | 2012-03-06 | Lam Research Corporation | Methods and apparatus for thin metal film thickness measurement |
| FR2863048A1 (en) * | 2003-11-27 | 2005-06-03 | Contitech Holding Gmbh | Hollow plastic component wall thickness measuring procedure and apparatus uses infrared radiation, mirrors and thermal imaging camera |
| CN101813638A (en) * | 2010-04-30 | 2010-08-25 | 华中科技大学 | Method and device for detecting welding point defect of chip on line |
| CN102954968A (en) * | 2012-11-05 | 2013-03-06 | 西安交通大学 | Thermal barrier coating part electromagnetic eddy current thermal imaging non-destructive detection system and detection method thereof |
| CN103175478A (en) * | 2013-03-08 | 2013-06-26 | 华中科技大学 | Infrared-imaging-based film thickness gauge |
| CN103471513A (en) * | 2013-09-29 | 2013-12-25 | 黑龙江科技大学 | Method for measuring thickness of coating through optical pulse infrared thermal imaging |
| CN106705911A (en) * | 2015-11-14 | 2017-05-24 | 南京诺威尔光电系统有限公司 | Thermal wave imaging film layer thickness detection system and method |
Non-Patent Citations (1)
| Title |
|---|
| 液相外延HgCdTe薄膜组分均匀性对红外投射光谱的影响;王庆学;《半导体学报》;20050531;全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107607072A (en) | 2018-01-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Wang et al. | Image processing based quantitative damage evaluation in composites with long pulse thermography | |
| Kim et al. | Detection of liquid–vapor–solid triple contact line in two-phase heat transfer phenomena using high-speed infrared thermometry | |
| CN107607072B (en) | A kind of method of infrared thermal imaging Fast nondestructive evaluation film gauge uniformity | |
| Müller et al. | Assessing overload-induced delaminations in glass fiber reinforced polymers by its geometry and thermal resistance | |
| US11193901B2 (en) | Thermal conductivity measuring device, thermal conductivity measuring method and vacuum evaluation device | |
| JP6545765B2 (en) | Thermal diffusivity measurement device | |
| JP2015108546A (en) | Thermal diffusivity measuring apparatus | |
| Sizov et al. | Thermal conductivity versus depth profiling of inhomogeneous materials using the hot disc technique | |
| CN209247174U (en) | Self calibration thermal image detection instrument | |
| RU2549072C1 (en) | Thermal test-object | |
| CN108955551A (en) | A method of Digital-image correlation method precision is influenced for correcting thermal current | |
| TWI669502B (en) | Apparatus of heat pipe quality detection by using infrared thermal imager and method thereof | |
| CN106679818B (en) | Device and method for measuring temperature distribution of smooth surface | |
| CN108982585A (en) | Direction thermal diffusivity measuring method in a kind of face | |
| RU2753620C1 (en) | Method for determining kinetic thermophysical properties of anisotropic composite materials | |
| CN106706473B (en) | A kind of device of quick obtaining polymer melt surface contact angle | |
| CN109990907A (en) | A kind of the IR parameters measurement device and measuring method of objective body | |
| CN206339310U (en) | The measurement apparatus of smooth surface Temperature Distribution | |
| Koshti | Infrared contrast data analysis method for quantitative measurement and monitoring in flash infrared thermography | |
| Zacharia et al. | In situ thermal diffusivity determination of anisotropic composite structures: Transverse diffusivity measurement | |
| RU2701881C1 (en) | Device for non-contact determination of thermophysical properties of solid bodies | |
| CN209707421U (en) | Using PSD device to the measurement experiment device of solid linear expansion coefficient | |
| TWI639817B (en) | Method for measuring temperature of process area | |
| Dikić et al. | Characterization of periodic cylindrical subsurface defects by pulsed flash thermography | |
| Olmi et al. | Measurement of the external parameters in quantitative active thermography |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |