CN107588874B - Optical pressure measuring device and method - Google Patents

Optical pressure measuring device and method Download PDF

Info

Publication number
CN107588874B
CN107588874B CN201710738600.1A CN201710738600A CN107588874B CN 107588874 B CN107588874 B CN 107588874B CN 201710738600 A CN201710738600 A CN 201710738600A CN 107588874 B CN107588874 B CN 107588874B
Authority
CN
China
Prior art keywords
pressure measuring
film
optical pressure
circular
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201710738600.1A
Other languages
Chinese (zh)
Other versions
CN107588874A (en
Inventor
史爱明
蒋力
王宗阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northwest University of Technology
Original Assignee
Northwest University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northwest University of Technology filed Critical Northwest University of Technology
Priority to CN201710738600.1A priority Critical patent/CN107588874B/en
Publication of CN107588874A publication Critical patent/CN107588874A/en
Application granted granted Critical
Publication of CN107588874B publication Critical patent/CN107588874B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The invention discloses an optical pressure measuring device and method, and belongs to the technical field of optical pressure measurement. The light pressure measuring device comprises a base, a horizontal sliding block, an inclination angle adjusting device, a support, a vertical sliding block, a tensioning device, a clamp and a circular film, wherein the horizontal sliding block is arranged in a horizontal sliding groove on the base, the vertical sliding block is arranged in a vertical sliding groove on the support, a square hole is formed in the center of the vertical sliding block, the tensioning device is connected in the square hole, the tensioning device is used for clamping the circular film through the clamp, and the inclination angle adjusting device is used for adjusting the inclination angle of the circular film in the front-back direction. The light pressure measuring device, the light source, the light splitting plate, the compensation plate, the observation screen and the fixed reflector form a light pressure measuring system together. The light pressure measuring method is realized by a light pressure measuring system. The device and the method for measuring the light pressure have the advantages of simpler structure, more convenient operation and more precise measurement deformation, and are suitable for measuring very small light pressure.

Description

Optical pressure measuring device and method
Technical Field
The invention particularly relates to an optical pressure measuring device and method, and belongs to the technical field of optical pressure measurement. In particular to a device and a method for measuring the light pressure by utilizing the deformation theory solution of a circular thin film with fixed periphery and the Michelson interference method.
Background
Light has a wave-particle duality, and mainly exhibits a wave property in its propagation process, and mainly exhibits a particle property when it interacts with an object. When light irradiates on the object, the light particles exchange kinetic energy with the object, and the object can obtain kinetic energy according to the momentum theorem. This phenomenon is macroscopically expressed by that light has pressure intensity, and an object with a certain area is subjected to a certain force due to the action of the light pressure.
Since the magnitude of the light pressure is rather small, it cannot be measured using a common force measuring device.
The invention patent ZL201110233271.8 discloses a high-energy laser energy parameter measuring method and device based on an optical pressure method. The invention patent application CN105527020A discloses an optical pressure demonstration and measurement system based on an optical fiber optical path. The invention patent CN201410023274.2 discloses an optical pressure sensor based on a nano silver film and an optical pressure detection method thereof.
In practical applications, the magnitude of the light pressure applied to the object is affected by factors such as material reflectivity and material surface uniformity, and the magnitude of the light pressure applied to the object is reduced to a certain extent compared with a value obtained by a theoretical calculation formula based on light intensity, so that it is particularly important to measure the magnitude of the light pressure applied to the object.
In order to measure the magnitude of the light pressure actually applied to the object, one of the technical ideas is to calculate the light pressure applied to the object at the moment by measuring the deformation of the object after the light pressure is applied to the object. The key points are two points: 1. the magnitude of the light pressure and the deformation of the illuminated object have to have a one-to-one accurate corresponding relation; 2. since the light pressure is very small, the method of measuring the amount of deformation must be quite elaborate.
Disclosure of Invention
Therefore, in view of the above-mentioned shortcomings of the prior art, the present invention aims to provide an optical pressure measuring device and method. The optical pressure measurement is realized based on the deformation theory solution of the circular film with fixed periphery and concentrated force applied to the center and the Michelson interference method.
The optical pressure measuring device comprises a base, and further comprises a horizontal sliding block, an inclination angle adjusting device, a support, a vertical sliding block, a tensioning device, a clamp and a circular film, wherein the horizontal sliding block is arranged in a horizontal sliding groove in the base, the vertical sliding block is arranged in a vertical sliding groove in the support, a square hole is formed in the center of the vertical sliding block, the tensioning device is connected in the square hole, the tensioning device is used for clamping the circular film through the clamp, and the inclination angle adjusting device is used for adjusting the inclination angle of the circular film in the front-back direction.
Furthermore, a fastening screw is arranged between the horizontal sliding block and the horizontal sliding groove, and a fastening screw is arranged between the vertical sliding block and the vertical sliding groove.
Furthermore, the tensioning device is connected in the square hole in a manner that a square bulge is arranged on each of the inner walls of the four sides of the square hole, 4 square holes corresponding to the 4 square bulges are arranged on the tensioning device, and the tensioning device is nested on the square bulges.
Furthermore, the number of the clamps is 4, the 4 clamps are respectively arranged corresponding to the circumference quartering position of the circular clamping part of the tensioning device, and threaded holes and clamping screws are arranged on the clamps.
The optical pressure measuring device is combined with a Michelson interferometer to be used as an optical pressure measuring system, and specifically, the optical pressure measuring system comprises any one of the optical pressure measuring devices, a light source, a light splitting plate, a compensation plate, an observation screen and a fixed reflector, wherein the optical pressure measuring device, the light source, the light splitting plate, the compensation plate, the observation screen and the fixed reflector form a Michelson interferometer structure together, and the optical pressure measuring device is used as a movable reflector in the Michelson interferometer structure.
The optical pressure measuring method provided by the invention specifically comprises the following steps: by utilizing the optical pressure measuring system, the circular film is arranged between the tensioning device and the clamp and is fixed, and the accurate corresponding relation between the optical pressure load and the film deformation is established based on the film deformation theory solution, so that the optical pressure is measured according to the film deformation.
Further, the specific operation process of the method is as follows: the optical pressure measuring system is utilized to install and fix the circular film between the tensioning device and the clamp, laser is irradiated on the central point of the circular film by adjusting the positions of the horizontal sliding slide block and the vertical sliding slide block, and then the inclination angle of the circular film is finely adjusted by the inclination angle adjusting device until a laser beam emitted by a light source of a Michelson interferometer structure just irradiates on the central point of the front surface of the circular film, and meanwhile, a light beam reflected by the circular film is superposed with a reference light beam in the interferometer, so that interference fringes are generated on an observation screen of the Michelson interferometer structure;
another continuous laser device to be tested for the laser light pressure emitted by the continuous laser device is taken, the continuous laser beam emitted by the continuous laser device is irradiated on the central position of the back surface of the circular film, the power of the continuous laser device is gradually increased, and the interference fringe change on the observation screen of the Michelson interferometer structure is shot and recorded;
and shooting an interference fringe image for analysis, extracting the displacement of the interference fringe, calculating the displacement of the central point of the circular film, and calculating the optical pressure of the circular film on the laser beam to be measured according to a deformation theory formula of the circular film with fixed periphery and concentrated force action on the center.
In the measurement method, the calculation formula is:
Figure BSA0000149685200000031
wherein, w0Displacement of the center point of the film; h is the thickness of the film; upsilon is the poisson ratio of the membrane; r is the radius of the film; e is the elastic modulus of the film; p is the concentration force acting on the center point of the film.
The invention has the beneficial effects that:
in summary, the optical pressure measuring device and method provided by the present invention are technically innovative based on two existing technologies, namely the deformation theory solution of the circular thin film with fixed periphery and concentrated force applied to the center and the michelson interference method. The magnitude of the light pressure and the deformation of the illuminated object have a one-to-one accurate corresponding relation; the measuring device has simpler structure, more convenient operation and more precise measurement deformation, and is suitable for the measurement of very small light pressure.
Drawings
Fig. 1 is a schematic diagram of a michelson interferometer.
Fig. 2 is a schematic structural diagram of the optical pressure measuring apparatus of the present invention.
Fig. 3 is a schematic view of a measuring device stretching a circular membrane.
Fig. 4 is a schematic diagram of the overall structure of the optical pressure measurement system.
Fig. 5 is a schematic view of the light pressure measuring device of fig. 4.
Fig. 6 is a schematic structural view of the reclining device.
The reference numbers are as follows:
1. a base; 2. a horizontal sliding block; 3. a tilt angle adjusting device; 4. a support; 5. a vertically sliding slider; 6. a tensioning device; 7. a clamp; 8. an optical pressure measuring device; 31. a front plate; 32. a back plate; 33. and (4) supporting a screw.
Detailed Description
The following description of the embodiments of the present invention is provided with reference to the accompanying drawings:
the theory of deformation of a circular film with fixed periphery and concentrated force applied to the center is as follows:
Figure BSA0000149685200000041
wherein, w0Displacement of the center point of the film; h is the thickness of the film; upsilon is the poisson ratio of the membrane; r is the radius of the film; e is the elastic modulus of the film; p is the concentration force acting on the center point of the film.
As shown in fig. 1, the principle of michelson interference and the main devices used are as follows:
the light emitted from the light source L is divided into two beams of light after passing through the beam splitter G1, one beam of light irradiates the fixed reflector M1 after passing through the compensation plate G2, and is reflected by the fixed reflector M1, passes through the compensation plate G2 again and is reflected to the observation screen S by the beam splitter G1, and the light path B1 is called as a reference light path; the other beam is reflected by the movable mirror M2, passes through the spectroscope G1 again, and then is irradiated on the observation screen S, and this light path B2 is referred to as a measurement light path. When the two beams of light B1 and B2 finally coincide on the viewing screen S, an interference phenomenon occurs, and interference fringes are generated on the viewing screen S. When the fixed mirror M1 and the movable mirror M2 are perpendicular to each other, the interference fringes are concentric circular, and such interference fringes are called equal tilt interference fringes.
When the movable mirror M2 moves by a distance of half the wavelength of the light emitted from the light source L, the equal-inclination interference fringes are ejected/retracted into one ring (one ring moves to the position of the original adjacent outer/inner ring).
The method provided by the invention has the core idea that a movable reflector in the Michelson interferometer is replaced by a circular thin film with fixed periphery and concentrated light pressure at the center, the displacement of the central point of the thin film under the action of the light pressure is measured by an interference method, and the magnitude of the light pressure actually applied to the circular thin film at the moment is calculated according to a deformation theory formula of the circular thin film with fixed periphery and concentrated light pressure at the center. It is characterized in that 1, the device provided by the invention is used for clamping a circular film; 2. the laser emitted by the laser source of the Michelson interferometer is irradiated on the center point of the front surface of the circular thin film by adjusting the positions of the horizontal sliding block, the vertical sliding block and the tensioning device and adjusting the angle of the inclination angle adjusting device; 3. irradiating the continuous laser beam to be measured in light pressure on the central point of the back of the circular film; 4. shooting the change condition of interference fringes on an observation screen of the Michelson interferometer when continuous laser with the light pressure to be measured is irradiated and the continuous laser is not irradiated, and calculating the displacement of the central point of the circular thin film according to the displacement of the interference fringes; 5. and calculating the light pressure of the continuous laser at the moment according to the deformation theoretical solution of the circular film with fixed periphery and concentrated force applied to the center.
In this embodiment, the diameter of the circular film F to be held is 1.5 × 10-2m, thickness h 15 × 10- 6m, E is 4 × 109Pa, poisson's ratio v 1/3.
As shown in fig. 2 and 3, a base 1 is placed on a slide rail of a michelson interferometer apparatus, a horizontal slider 2 is placed in a slide groove of the base and is pre-tightened by a screw, an angle adjusting apparatus 3 is fastened to the horizontal slider 2 by a screw, a support 4 is fastened to the angle adjusting apparatus 3 by a screw, a vertical slider 5 is placed in a slide groove of the support 4 and is pre-tightened by a screw, a stretching apparatus 6 is nested outside square protrusions on four inner walls of a square hole of the support 4 and is pre-tightened by a screw, and a circular thin film is clamped between the stretching apparatus 6 and a clamp 7 and is fastened by a screw.
As shown in fig. 4 and 5, the movable mirror and the base of the michelson interferometer are replaced with an optical pressure measuring device 8, and then the laser light source of the interferometer is turned on. Loosening the screws on the clamp 7 and simultaneously adjusting the positions of the corresponding tensioning devices 6 on the square bulges on the four inner walls of the square hole of the support 4 until the surface of the circular film F becomes flat due to tensioning, wherein the judgment effect is that the reflection light spot on the observation screen of the interferometer is in a standard circle shape.
The laser is irradiated near the center point of the front surface of the circular film F by adjusting the positions of the horizontal slide block 2 and the vertical slide block 5 in the device provided by the invention. Then, the inclination angle of the circular film F is finely adjusted by the inclination angle adjusting device 3 until a laser beam B2 emitted by a light source of the Michelson interferometer structure just irradiates the central point of the front surface of the circular film F, and simultaneously, a light beam reflected by the circular film F is coincided with a reference light beam B1 in the interferometer, so that interference fringes are generated on an observation screen S of the Michelson interferometer structure;
another continuous laser device to be measured for the laser light pressure is adopted, and the continuous laser beam B3 emitted by the continuous laser device is irradiated on the central position of the back surface of the circular film F. Gradually increasing the power of the continuous laser, and shooting and recording the interference fringe change on the observation screen S of the Michelson interferometer structure;
and analyzing the shot interference fringe image, extracting the displacement of the interference fringe, and calculating the displacement of the central point of the circular film F. Calculating to obtain the displacement w of the central point of the circular film F01.93 μm, the optical pressure P of the circular film F subjected to the continuous laser beam B3 at this time can be calculated to be 2 × 10 by the formula of the theoretical solution of deformation of the circular film with a fixed periphery and a concentrated force applied to the center-9N。
The tilt angle adjusting device 3 can be flexibly designed, in this embodiment, as shown in fig. 6, the tilt angle adjusting device 3 includes a front plate 31 and a rear plate 32, and circular holes for exposing the circular thin film are disposed on both the front plate 31 and the rear plate 32. The rear plate 32 is connected with the horizontal sliding slide block 2, the front plate 31 is installed on the support 4, the front plate 31 and the rear plate 32 of the inclination angle adjusting device 3 are connected through a spherical hinge and a spring, and the rear plate 32 is provided with a threaded hole and a supporting screw 33 which is used for supporting the front plate 31 and further realizing inclination angle adjustment through cooperation with the spherical hinge and the spring.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (8)

1. The utility model provides a light pressure measuring device, includes the base, its characterized in that, light pressure measuring device still includes horizontal slip slider, inclination adjusting device, support, vertical slip slider, tensioning equipment, anchor clamps, circular film, in the horizontal spout on the base was arranged in to the horizontal slip slider, in vertical slip slider arranged the vertical spout on the support in, vertical slider central authorities were equipped with the quad slit, and tensioning equipment connects in the quad slit, and tensioning equipment is used for pressing from both sides tight circular film through anchor clamps, inclination adjusting device is used for adjusting the inclination of the fore-and-aft direction of circular film.
2. The optical pressure measuring device according to claim 1, wherein a fastening screw is provided between the horizontal sliding block and the horizontal sliding groove, and a fastening screw is provided between the vertical sliding block and the vertical sliding groove.
3. The optical pressure measuring device according to claim 1, wherein the tension device is connected in the square hole in such a manner that a square protrusion is provided on each of four inner walls of the square hole, 4 square holes corresponding to the 4 square protrusions are provided in the tension device, and the tension device is nested in the square protrusions.
4. The optical pressure measuring device as claimed in claim 1, wherein the number of the clamps is 4, the 4 clamps are respectively arranged corresponding to the circumference quartering position of the circular clamping part of the tensioning device, and threaded holes and clamping screws are arranged on the clamps.
5. An optical pressure measuring system comprising the optical pressure measuring device of any one of claims 1 to 4, wherein the optical pressure measuring system further comprises a light source, a beam splitter, a compensation plate, a viewing screen, and a fixed reflector, the optical pressure measuring device, the light source, the beam splitter, the compensation plate, the viewing screen, and the fixed reflector together form a Michelson interferometer structure, and the optical pressure measuring device is used as a movable reflector in the Michelson interferometer structure.
6. An optical pressure measuring method, characterized in that the method is: the optical pressure measuring system of claim 5, wherein the circular thin film is fixed and installed between the tensioning device and the fixture, and the optical pressure load and the deformation of the thin film are accurately related based on the theoretical solution of the deformation of the thin film, so that the optical pressure is measured according to the deformation of the thin film.
7. The optical pressure measuring method according to claim 6, wherein the method is specifically: the optical pressure measuring system of claim 5, wherein the circular thin film is installed and fixed between the tensioning device and the clamp, the position of the horizontal sliding slide block and the vertical sliding slide block is adjusted to enable laser to irradiate the central point of the circular thin film, and the inclination angle of the circular thin film is finely adjusted by the inclination angle adjusting device until a laser beam emitted by a light source of the Michelson interferometer structure just irradiates the central point of the front surface of the circular thin film, and meanwhile, a light beam reflected by the circular thin film is overlapped with a reference light beam in the interferometer to generate interference fringes on an observation screen of the Michelson interferometer structure;
another continuous laser device to be tested for the laser light pressure emitted by the continuous laser device is taken, the continuous laser beam emitted by the continuous laser device is irradiated on the central position of the back surface of the circular film, the power of the continuous laser device is gradually increased, and the interference fringe change on the observation screen of the Michelson interferometer structure is shot and recorded;
and shooting an interference fringe image for analysis, extracting the displacement of the interference fringe, calculating the displacement of the central point of the circular film, and calculating the optical pressure of the circular film on the laser beam to be measured according to a deformation theory formula of the circular film with fixed periphery and concentrated force action on the center.
8. The method of claim 7, wherein the formula is calculated as:
wherein w0 is the displacement of the center point of the film; h is the thickness of the film; upsilon is the poisson ratio of the membrane; r is the radius of the film; e is the elastic modulus of the film; p is the concentration force acting on the center point of the film.
CN201710738600.1A 2017-08-16 2017-08-16 Optical pressure measuring device and method Expired - Fee Related CN107588874B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710738600.1A CN107588874B (en) 2017-08-16 2017-08-16 Optical pressure measuring device and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710738600.1A CN107588874B (en) 2017-08-16 2017-08-16 Optical pressure measuring device and method

Publications (2)

Publication Number Publication Date
CN107588874A CN107588874A (en) 2018-01-16
CN107588874B true CN107588874B (en) 2020-02-07

Family

ID=61042447

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710738600.1A Expired - Fee Related CN107588874B (en) 2017-08-16 2017-08-16 Optical pressure measuring device and method

Country Status (1)

Country Link
CN (1) CN107588874B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107588874B (en) * 2017-08-16 2020-02-07 西北工业大学 Optical pressure measuring device and method
CN112197862B (en) * 2020-09-03 2023-02-28 中国人民解放军国防科技大学 Ground test system and test method for surface sunlight pressure of thin film spacecraft
CN115219023B (en) * 2022-07-18 2023-05-30 济南大学 Pendulum type light pressure measuring device and method based on double-core optical fiber interferometer
CN115219024B (en) * 2022-07-18 2023-06-20 济南大学 Optical pressure measuring device and method based on optical fiber disc type differential measurement principle
CN115235622B (en) * 2022-07-18 2023-06-02 济南大学 Pendulum type light pressure measuring device and method based on double-core optical fiber

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201464041U (en) * 2009-06-04 2010-05-12 浙江大学城市学院 assembled michelson interferometer
CN102322951A (en) * 2011-08-15 2012-01-18 西北核技术研究所 Method for measuring high energy laser energy parameter based on light pressure principle and apparatus thereof
CN203824948U (en) * 2014-05-09 2014-09-10 中国人民解放军空军勤务学院 Michelson linear expansion coefficient tester
CN204178614U (en) * 2014-11-11 2015-02-25 南京信息工程大学 A kind of improved Mechelson interferometer
CN204608990U (en) * 2015-01-16 2015-09-02 北京纽曼帝莱蒙膜建筑技术有限公司 The stretch-draw assembly of membrane structure
CN105571770A (en) * 2016-01-19 2016-05-11 西北工业大学 Light pressure calibration apparatus based on gravity, and calibration method thereof
CN106871797A (en) * 2017-01-07 2017-06-20 四川大学 Contactless thickness of sample measuring method and measurement apparatus based on Michelson Interference Principle
CN107588874A (en) * 2017-08-16 2018-01-16 西北工业大学 A kind of light pressure measurement device and method

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201464041U (en) * 2009-06-04 2010-05-12 浙江大学城市学院 assembled michelson interferometer
CN102322951A (en) * 2011-08-15 2012-01-18 西北核技术研究所 Method for measuring high energy laser energy parameter based on light pressure principle and apparatus thereof
CN102322951B (en) * 2011-08-15 2013-04-17 西北核技术研究所 Method for measuring high energy laser energy parameter based on light pressure principle and apparatus thereof
CN203824948U (en) * 2014-05-09 2014-09-10 中国人民解放军空军勤务学院 Michelson linear expansion coefficient tester
CN204178614U (en) * 2014-11-11 2015-02-25 南京信息工程大学 A kind of improved Mechelson interferometer
CN204608990U (en) * 2015-01-16 2015-09-02 北京纽曼帝莱蒙膜建筑技术有限公司 The stretch-draw assembly of membrane structure
CN105571770A (en) * 2016-01-19 2016-05-11 西北工业大学 Light pressure calibration apparatus based on gravity, and calibration method thereof
CN106871797A (en) * 2017-01-07 2017-06-20 四川大学 Contactless thickness of sample measuring method and measurement apparatus based on Michelson Interference Principle
CN107588874A (en) * 2017-08-16 2018-01-16 西北工业大学 A kind of light pressure measurement device and method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
基于马赫曾德干涉光路的光压测量装置设计;赵静等;《光子学报》;20170630;第45卷(第6期);第1-7页 *

Also Published As

Publication number Publication date
CN107588874A (en) 2018-01-16

Similar Documents

Publication Publication Date Title
CN107588874B (en) Optical pressure measuring device and method
CN108572063B (en) Device for detecting sunlight focusing point of car lamp lens and using method thereof
CN104567719B (en) A kind of high-space resolution long-range profile detection means and detection method
JP2013171042A (en) Non-contact determination device of edge shape of thin disk-like object
WO2005119169A3 (en) Beam profile complex reflectance system and method for thin film and critical dimension measurements
CN105890875B (en) A kind of projection objective performance testing device and method based on mask plate
CN206876295U (en) A kind of Beamforming technology acoustical camera array rack device
CN106918310B (en) Contactless electro-optic crystal light pass surface normal and Z axis deviate angle measuring device and its measurement method
WO2007130158A2 (en) Interferometers for the measurement of large diameter thin wafers
WO2018000943A1 (en) Method and apparatus for detecting concave cylindrical surfaces and cylindrical diverging lenses
CN104374501A (en) Measuring method for measuring stress on glass body based on light interference method
CN111189397A (en) Transparent film thickness measuring device and method
US6968038B2 (en) Apparatus and method for generating high-order harmonic X-ray, and point-diffraction interferometer using high-order harmonic X-ray
CN109798849B (en) Frequency doubling crystal dead axle error measuring device and measuring method
JP2005302825A5 (en)
CN203053853U (en) Auxiliary device for accurately calibrating light beams for spectrum equipment
CN108258572A (en) Active refelction mirror laser gain medium debugging device and face type detection method
CN110702018B (en) Device and method for measuring thickness of sample in diamond anvil cell
CN217277866U (en) Terahertz frequency band optical element transmittance measuring device
CN108760249B (en) The detection method and device of a kind of wave plate face phase-delay quantity
US10824112B2 (en) Projection system for measuring vibrations
CN204535860U (en) Modified expansion light source interferometer system
GB678527A (en) Apparatus for testing the hardness of materials
CN203101025U (en) Thin spherical surface transmissivity detection device
KR200312921Y1 (en) An Interferometer Of Michelson And Fabry-Perot

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20200207

Termination date: 20210816

CF01 Termination of patent right due to non-payment of annual fee