CN107576690B - Integrated sensor chip for detecting salinity and temperature of seawater and manufacturing method thereof - Google Patents
Integrated sensor chip for detecting salinity and temperature of seawater and manufacturing method thereof Download PDFInfo
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Abstract
The invention belongs to the technical field of sensors, and particularly relates to an integrated sensor chip for detecting seawater salinity and temperature, which comprises a salinity detection electrode, a temperature detection electrode and a basalt glass substrate, wherein six salinity detection electrodes are arranged on the first surface of the basalt glass substrate, a first thick film encapsulating layer is arranged outside the salinity detection electrode, an opening is reserved at the salinity detection electrode of the thick film encapsulating layer, three temperature detection electrodes are arranged on the second surface of the basalt glass substrate, and a second thick film encapsulating layer is arranged outside the temperature detection electrode, so that the problems that the existing sensor substrate is easily corroded by seawater and has errors during detection are solved, the synchronous measurement of seawater salinity and temperature is realized, the real-time temperature compensation is carried out on the seawater salinity detection result, meanwhile, the integrated sensor chip has a plurality of working modes, and can detect damaged or poor-precision electrodes, the precision is improved.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to an integrated sensor chip for detecting salinity and temperature of seawater.
Background
The salinity of seawater is an important parameter of ocean information, and in the aspects of fishery culture and the like, the survival rate and the development condition of aquatic organisms are directly influenced by the salinity and the stability, so that the nutrition condition and the dynamic distribution of a water body are determined; in the aspects of ship industry, ocean engineering and the like, salinity is directly related to water density distribution, and influences water flow conditions and underwater sound propagation parameters.
At present, a plurality of seawater salinity detection methods exist, wherein an electrode detection method plays an important role.
The electrode type salinity detection sensor and the seawater temperature detection sensor used at present have the technical problems of single function, lack of reliability design and the like, the substrate is easily corroded by seawater, the salinity sensor and the temperature sensor are single detection units, detection errors or failure exists during detection, the detection results of the independent salinity sensor are greatly influenced by temperature, errors exist in the detection results, the existing salinity sensor does not have a temperature compensation function, and the errors are large. The salinity detection electrode can generate a polarization phenomenon after working for a period of time, so that measurement errors exist, the sensor is frequently damaged in seawater due to corrosion and the like, and detection results of partially damaged sensors are deviated and are often difficult to find.
Disclosure of Invention
The following presents a simplified summary of the invention in order to provide a basic understanding of some aspects of the invention. It should be understood that this summary is not an exhaustive overview of the invention. It is not intended to determine the key or critical elements of the present invention, nor is it intended to limit the scope of the present invention. Its sole purpose is to present some concepts in a simplified form as a prelude to the more detailed description that is discussed later.
In view of the above, the invention provides the sensor substrate which is simple in structure and reasonable in design, can realize that three salinity detection units are manufactured on one surface and three temperature detection units are manufactured on the other surface by taking the seawater corrosion resistant basalt glass as the substrate of the sensor, so that the problems that the existing sensor substrate is easily corroded by seawater and has errors in detection are at least solved, the seawater salinity and temperature are synchronously measured, and the real-time temperature compensation is carried out on the seawater salinity detection result.
The technical scheme of the invention is as follows:
an integrated sensor chip for detecting seawater salinity and temperature, comprising: the device comprises a salinity detection electrode, a temperature detection electrode and a basalt glass substrate, wherein the basalt glass substrate comprises two surfaces, six salinity detection electrodes are arranged on the first surface of the basalt glass substrate, the six salinity detection electrodes are arranged in parallel and at intervals, the left sides of the first salinity detection electrode and the second salinity detection electrode are respectively connected with a salinity electrode pad, the right sides of the third salinity detection electrode and the fourth salinity detection electrode are respectively connected with a salinity electrode pad, the left sides of the fifth salinity detection electrode and the sixth salinity detection electrode are respectively connected with a salinity electrode pad, a first thick film encapsulating layer is further arranged on the first surface of the basalt glass substrate, the first thick film encapsulating layer covers the first surface of the whole basalt glass substrate, and a salinity electrode opening is reserved at the position of the salinity detection electrode; the second surface of the basalt glass substrate is provided with three temperature detection electrodes which are arranged in a triangular shape in a non-connected mode from head to tail, two ends of each temperature detection electrode are connected with a temperature electrode pad, a second thick film encapsulating layer is further arranged on the second surface of the basalt glass substrate and covers the whole second surface of the basalt glass substrate, and the salinity electrode pads and the temperature electrode pads are led out through wires.
Further, six of the salinity detection electrodes have: 2 salinity detection electrode mode, 3 salinity detection electrode mode, 4 salinity detection electrode mode, 5 salinity detection electrode mode and 6 salinity detection electrode mode, three temperature detection electrode 5 have: 1 temperature detection electrode working mode, 2 temperature detection electrode working mode and 3 temperature detection electrode working mode.
Further, the working modes of the 2 salinity detection electrode are as follows: supplying an alternating current to the first salinity detection electrode, detecting the voltage change between the first salinity detection electrode and the second salinity detection electrode to obtain the impedance of the solution, after delaying, supplying an alternating current to the sixth salinity detection electrode, detecting the voltage change between the fifth salinity detection electrode and the sixth salinity detection electrode to obtain the impedance of the solution, after delaying, supplying an alternating current to the first salinity detection electrode, and repeating the steps;
the working modes of the 3 salinity detection electrode are as follows: supplying an alternating current to the second salinity detection electrode to detect the voltage change between the first salinity detection electrode and the third salinity detection electrode so as to obtain the impedance of the solution, after delaying, supplying an alternating current to the third salinity detection electrode to detect the voltage change between the second salinity detection electrode and the fourth salinity detection electrode so as to obtain the impedance of the solution, after delaying, supplying an alternating current to the fourth salinity detection electrode to detect the voltage change between the third salinity detection electrode and the fifth salinity detection electrode so as to obtain the impedance of the solution, after delaying, supplying an alternating current to the fifth salinity detection electrode to detect the voltage change between the fourth salinity detection electrode and the sixth salinity detection electrode so as to obtain the impedance of the solution, after delaying, supplying an alternating current to the second salinity detection electrode, and the steps are repeated;
the working modes of the 4 salinity detection electrode are as follows: supplying alternating current to the first salinity detection electrode and the fourth salinity detection electrode, detecting the voltage change between the second salinity detection electrode and the third salinity detection electrode to obtain the impedance of the solution, converting the salinity of the detected solution, supplying alternating current to the second salinity detection electrode and the fifth salinity detection electrode after delaying, detecting the voltage change between the third salinity detection electrode and the fourth salinity detection electrode, supplying alternating current to the third salinity detection electrode and the sixth salinity detection electrode after delaying, detecting the voltage change between the fourth salinity detection electrode and the fifth salinity detection electrode, supplying alternating current to the first salinity detection electrode and the fourth salinity detection electrode after delaying, and circulating the steps;
the working modes of the 5 salinity detection electrode are as follows: supplying alternating current to the first salinity detection electrode and the fifth salinity detection electrode to detect voltage change between the second salinity detection electrode and the third salinity detection electrode, supplying alternating current to the third salinity detection electrode and the fourth salinity detection electrode to detect voltage change between the third salinity detection electrode and the fourth salinity detection electrode, averaging two voltage change values, converting the detected salinity, delaying, supplying alternating current to the second salinity detection electrode and the sixth salinity detection electrode to detect voltage change between the third salinity detection electrode and the fourth salinity detection electrode, detecting voltage change between the fourth salinity detection electrode and the fifth salinity detection electrode, averaging two voltage change values, converting the detected salinity, delaying, supplying alternating current to the first salinity detection electrode and the fifth salinity detection electrode, and repeating the steps;
the working modes of the 6 salinity detection electrode are as follows: alternating current is conducted to the first salinity detection electrode and the sixth salinity detection electrode, the second salinity detection electrode and the third salinity detection electrode are detected to obtain seawater impedance, the third salinity detection electrode and the fourth salinity detection electrode are detected to obtain seawater impedance, the fourth salinity detection electrode and the fifth salinity detection electrode are detected to obtain seawater impedance, the three seawater impedance values are averaged, and the salinity value is calculated;
the working modes of the temperature detection electrode are as follows: the first temperature detection electrode works, the second temperature detection electrode and the third temperature detection electrode work, after time delay, the second temperature detection electrode works, the first temperature detection electrode and the third temperature detection electrode work, after time delay, the third temperature detection electrode works, the first temperature detection electrode and the second temperature detection electrode work, after time delay, the first temperature detection electrode works, the second temperature detection electrode and the third temperature detection electrode work, and the process is circulated;
the working modes of the 2 temperature detection electrodes are as follows: the first temperature detection electrode and the second temperature detection electrode work, the third temperature detection electrode is in hot reserve, the average value of the work results of the first temperature detection electrode and the second temperature detection electrode is taken, after time delay, the second temperature detection electrode and the third temperature detection electrode work, the first temperature detection electrode is in hot reserve, the average value of the work results of the second temperature detection electrode and the third temperature detection electrode is taken, after time delay, the third temperature detection electrode and the first temperature detection electrode work, the second temperature detection electrode is in hot reserve, the average value of the work results of the third temperature detection electrode and the first temperature detection electrode is taken, after time delay, the first temperature detection electrode and the second temperature detection electrode work, the third temperature detection electrode is in hot reserve, the average value of the work results of the first temperature detection electrode and the second temperature detection electrode is taken, and the;
the working modes of the 3 temperature detection electrodes are as follows: and 3 temperature detection electrodes work simultaneously, 2 adjacent temperature detection electrodes are randomly selected, and an average value is obtained.
Further, the method comprises the following steps:
the method comprises the following steps: cleaning a basalt glass substrate, namely chemically cleaning and removing dust by adopting the basalt glass substrate;
step two: laser drilling, namely drilling a micro lead hole in the center of the electrode pad lead-out by adopting a laser drilling technology;
step three: printing a salinity detection electrode, namely printing a platinum film salinity detection electrode on the surface of the basalt glass substrate by adopting a thick film printing process;
step four: performing high-temperature heat treatment, namely performing heat treatment on the basalt glass substrate printed with the platinum film salinity detection electrode by adopting a high-temperature heat treatment process;
step five: printing a temperature detection electrode, namely printing a platinum film temperature detection electrode on the other surface of the basalt glass substrate by adopting a thick film printing process;
step six: performing high-temperature heat treatment, namely performing heat treatment on the basalt substrate sheet printed with the platinum film temperature detection electrode by adopting a high-temperature heat treatment process;
step seven: printing an isolation layer, namely printing basalt glass substrate thick film encapsulating layer slurry on the salinity detection electrode surface by using a thick film process;
step eight: sintering at high temperature, and performing heat treatment on the basalt substrate sheet printed with the basalt glass encapsulation isolation layer slurry by adopting a heat treatment process;
step nine: and (3) welding a lead, namely dipping the inner lead with platinum conductive slurry, putting the inner lead into the micro lead hole, connecting the platinum conductive slurry with the electrode leading-out end, and putting the micro lead hole into a sintering furnace for sintering to form the integrated sensor chip for detecting the seawater salinity and the temperature.
Further, in the first step, the basalt glass substrate is 1-5mm thick, the chemical cleaning is performed by using a sulfuric acid solution and a sodium hydroxide solution, the dust removal is performed by using pure water ultrasonic cleaning, and the vacuum drying is performed.
Furthermore, in the second step, the diameter of the micro lead hole in the leading-out center of the electrode pad is 0.1-0.15 mm.
Further, in the third step, a platinum film salinity detection electrode is printed on the surface of the basalt substrate, and the thickness is 0.3-5 μm.
Further, in the fourth step, the sixth step and the eighth step, the temperature of the heat treatment is 900-.
Further, in the fifth step, a platinum film temperature detection electrode is printed on the other surface of the basalt substrate sheet, and the thickness of the platinum film temperature detection electrode is 0.5-2.5 μm.
Further, in the seventh step, the thickness of the paste for the thick film encapsulating layer of the printed basalt glass substrate is 2-7 μm. In the ninth step, the sintering temperature of the material placed in a sintering furnace is 900-1000 ℃.
The invention has the beneficial effects that:
1) according to the invention, six salinity detection electrodes are arranged on the first surface of the basalt glass substrate, a first thick film encapsulating layer is arranged outside the salinity detection electrodes, three temperature detection electrodes are arranged on the second surface of the basalt glass substrate, a second thick film encapsulating layer is arranged outside the temperature detection electrodes, the basalt glass substrate serving as the sensor has a corrosion-resistant function, the first thick film encapsulating layer and the second thick film encapsulating layer further isolate seawater, the problems that the existing sensor substrate is easily corroded by seawater and errors exist during detection are solved, the synchronous measurement of seawater salinity and temperature is realized, and the real-time temperature compensation is carried out on the seawater salinity detection result.
2) According to the invention, six salinity detection electrodes are arranged in parallel at intervals, the left sides of a first salinity detection electrode and a second salinity detection electrode are respectively connected with a salinity electrode pad, the right sides of a third salinity detection electrode and a fourth salinity detection electrode are respectively connected with a salinity electrode pad, the left sides of a fifth salinity detection electrode and a sixth salinity detection electrode are respectively connected with a salinity electrode pad, and the three temperature detection electrodes are arranged in a triangular shape in a head-to-tail non-connected manner.
3) The six salinity detection electrodes of the invention are provided with: 2 salinity detection electrode mode, 3 salinity detection electrode mode, 4 salinity detection electrode mode, 5 salinity detection electrode mode and 6 salinity detection electrode mode, can realize through switching different modes, six salinity detection electrode cycle work, the polarization phenomenon that has solved because single sensor operating time overlength leads to, the error that arouses, can be through switching mode, the problem of solving the sensor part and damaging, can judge the operating condition of sensor through the comparison to a plurality of sensor numerical values, the problem of unable discovery in time because single sensor damages has been solved.
4) The three temperature detection electrodes of the present invention have: 1 temperature detect electrode mode, 2 temperature detect electrode mode and 3 temperature detect electrode mode, three temperature detect electrode cycle work, can in time discover the great sensor of error through the contrast to the testing result, and then switch mode, choose for use the high sensor of precision to measure, through different modes of operation simultaneously, get the average to the testing result, further reduce measuring error.
Drawings
FIG. 1 is a schematic diagram of an integrated sensor chip for detecting salinity and temperature of seawater;
FIG. 2 is a schematic diagram of the distribution of salinity detecting units of an integrated sensor chip for detecting salinity and temperature of seawater;
FIG. 3 is a schematic diagram of a first thick film encapsulation layer of an integrated sensor chip for detecting seawater salinity and temperature;
FIG. 4 is a schematic diagram of the distribution of temperature detecting units of an integrated sensor chip for detecting salinity and temperature of seawater;
FIG. 5 is a block flow diagram of a process for manufacturing an integrated sensor chip for detecting salinity and temperature of seawater;
in the figure: 1-salinity detection electrode; 2-salinity electrode pads; 3-a first thick film encapsulation layer; 4-basalt glass substrate; 5-temperature detection electrode; 6-temperature electrode pad; 7-second thick film encapsulation layer.
Detailed Description
The invention will be described in detail below with reference to the following drawings:
the first embodiment is as follows:
referring to fig. 1 to 4, an integrated sensor chip for detecting salinity and temperature of seawater comprises: the device comprises a salinity detection electrode 1, a temperature detection electrode 5 and a basalt glass substrate 4, wherein the basalt glass substrate 4 comprises two surfaces, six salinity detection electrodes 1 are arranged on the first surface of the basalt glass substrate, the six salinity detection electrodes 1 are arranged in parallel at intervals, the left sides of the first salinity detection electrode 1 and the second salinity detection electrode 1 are respectively connected with a salinity electrode pad 2, the right sides of the third salinity detection electrode 1 and the fourth salinity detection electrode 1 are respectively connected with a salinity electrode pad 2, the left sides of the fifth salinity detection electrode 1 and the sixth salinity detection electrode 1 are respectively connected with a salinity electrode pad 2, a first thick film encapsulating layer 3 is further arranged on the first surface of the basalt glass substrate 4, the first thick film encapsulating layer 3 covers the first surface of the whole basalt glass substrate 4, and a salinity electrode opening is reserved at the position of the salinity detection electrode 1; three temperature detection electrodes 5 are arranged on the second surface of the basalt glass substrate 4, the three temperature detection electrodes 5 are arranged in a triangular shape in a non-connected mode from end to end, two ends of each temperature detection electrode 5 are connected with a temperature electrode pad 6, a second thick film encapsulating layer 7 is further arranged on the second surface of the basalt glass substrate 4 and covers the second surface of the whole basalt glass substrate 4, and the salinity electrode pad 2 and the temperature electrode pad 6 are led out through wires.
The salinity detection principle is based on an electrode type conductivity detection principle, when salinity parameters of seawater to be detected are measured, a pair of salinity detection electrodes are selected, alternating current voltage is applied to the salinity detection electrodes, current passes through the salinity detection electrodes, the equivalent resistance of the seawater between the salinity detection electrodes can be measured through the voltage and the current, so that the conductivity of the seawater to be detected is calculated, and further the salinity of the seawater is converted. The temperature detection principle is based on the thermal resistance temperature effect of metal, when the temperature of a detection object changes, the resistance value of the temperature detection electrode changes along with the temperature change, the temperature detection electrode is calibrated through a standard temperature source, certain resistance value changes corresponding to certain temperature changes, and the temperature value at the moment can be accurately converted through measuring the resistance value of the temperature sensor. The salinity value measured at the same moment is revised in real time through the temperature value, so that the salinity detection and the temperature detection are synchronously performed, the temperature compensation is provided for the salinity sensor, and the detection precision and the response time are improved.
The seawater salinity detection electrodes and the temperature detection electrodes are dispersedly arranged on the basalt glass substrate, so that the undamaged electrodes can be ensured to exist at a high probability under the condition that parts of the electrodes are damaged, and further, the seawater salinity and the temperature of the sensor chip can be still detected under the damaged condition and the sensor chip waits for repair.
The second embodiment is as follows:
based on the integrated sensor chip for detecting seawater salinity and temperature described in the first embodiment, further, an operating mode of the integrated sensor chip for detecting seawater salinity and temperature, the six salinity detecting electrodes 1 have: 2 salinity detection electrode mode, 3 salinity detection electrode mode, 4 salinity detection electrode mode, 5 salinity detection electrode mode and 6 salinity detection electrode mode, three temperature detection electrode 5 have: 1 temperature detection electrode working mode, 2 temperature detection electrode working mode and 3 temperature detection electrode working mode.
And switching the working mode of the sensor chip according to different conditions.
The working modes of the salinity detection electrode are as follows: supplying an alternating current to the first salinity detection electrode, detecting the voltage change between the first salinity detection electrode and the second salinity detection electrode to obtain the impedance of the solution, after delaying, supplying an alternating current to the sixth salinity detection electrode, detecting the voltage change between the fifth salinity detection electrode and the sixth salinity detection electrode to obtain the impedance of the solution, after delaying, supplying an alternating current to the first salinity detection electrode, and repeating the steps;
the working mode occupies the least salinity detection electrodes, ensures that the detection is still ensured when only two salinity detection electrodes are left seriously damaged, and simultaneously, the salinity detection electrodes adopt a circulating working mode to avoid inaccurate detection results caused by long-time working.
The working modes of the salinity detection electrode are as follows: supplying an alternating current to the second salinity detection electrode to detect the voltage change between the first salinity detection electrode and the third salinity detection electrode so as to obtain the impedance of the solution, after delaying, supplying an alternating current to the third salinity detection electrode to detect the voltage change between the second salinity detection electrode and the fourth salinity detection electrode so as to obtain the impedance of the solution, after delaying, supplying an alternating current to the fourth salinity detection electrode to detect the voltage change between the third salinity detection electrode and the fifth salinity detection electrode so as to obtain the impedance of the solution, after delaying, supplying an alternating current to the fifth salinity detection electrode to detect the voltage change between the fourth salinity detection electrode and the sixth salinity detection electrode so as to obtain the impedance of the solution, after delaying, supplying an alternating current to the second salinity detection electrode, and the steps are repeated;
this mode occupies three salinity detection electrode, measures two sets of data at every turn, can take the average and then improve the detection precision to two sets of data, can judge sensor operating condition according to two sets of data difference values simultaneously, and salinity detection electrode adopts the mode of cycle work to avoid the testing result inaccurate that long-time work leads to simultaneously.
The working modes of the 4 salinity detection electrode are as follows: supplying alternating current to the first salinity detection electrode and the fourth salinity detection electrode, detecting the voltage change between the second salinity detection electrode and the third salinity detection electrode to obtain the impedance of the solution, converting the salinity of the detected solution, supplying alternating current to the second salinity detection electrode and the fifth salinity detection electrode after delaying, detecting the voltage change between the third salinity detection electrode and the fourth salinity detection electrode, supplying alternating current to the third salinity detection electrode and the sixth salinity detection electrode after delaying, detecting the voltage change between the fourth salinity detection electrode and the fifth salinity detection electrode, supplying alternating current to the first salinity detection electrode and the fourth salinity detection electrode after delaying, and circulating the steps;
this mode of operation occupies four salinity detection electrodes, measures two sets of data at every turn, and two sets of data are independent not influenced, can take the average and then improve the detection precision to two sets of data, can judge sensor operating condition according to two sets of data difference values simultaneously, and salinity detection electrode adopts the mode of cycle work to avoid the testing result that long-time work leads to inaccurate simultaneously.
The working modes of the salinity detection electrode are as follows: supplying alternating current to the first salinity detection electrode and the fifth salinity detection electrode to detect voltage change between the second salinity detection electrode and the third salinity detection electrode, supplying alternating current to the third salinity detection electrode and the fourth salinity detection electrode to detect voltage change between the third salinity detection electrode and the fourth salinity detection electrode, averaging two voltage change values, converting the detected salinity, delaying, supplying alternating current to the second salinity detection electrode and the sixth salinity detection electrode to detect voltage change between the third salinity detection electrode and the fourth salinity detection electrode, detecting voltage change between the fourth salinity detection electrode and the fifth salinity detection electrode, averaging two voltage change values, converting the detected salinity, delaying, supplying alternating current to the first salinity detection electrode and the fifth salinity detection electrode, and repeating the steps;
this mode occupies five salinity detection electrodes, measures two sets of data at every turn, can take the average and then improve the detection precision to two sets of data, can judge sensor operating condition according to two sets of data difference values simultaneously, and salinity detection electrode adopts the mode of cycle work to avoid the testing result inaccurate that long-time work leads to simultaneously.
The working modes of the 6 salinity detection electrode are as follows: alternating current is conducted to the first salinity detection electrode and the sixth salinity detection electrode, the second salinity detection electrode and the third salinity detection electrode are detected to obtain seawater impedance, the third salinity detection electrode and the fourth salinity detection electrode are detected to obtain seawater impedance, the fourth salinity detection electrode and the fifth salinity detection electrode are detected to obtain seawater impedance, the three seawater impedance values are averaged, and the salinity value is calculated;
six salinity detection electrodes are occupied in the working mode, three groups of data are measured at each time, the detection precision is improved by averaging the three groups of data, the working state of the sensor can be judged according to the difference value of the three groups of data, and meanwhile, the salinity detection electrodes are prevented from being inaccurate in detection result caused by long-time work in a circulating working mode.
1 the working mode of the temperature detection electrode is as follows: the first temperature detection electrode works, the second temperature detection electrode and the third temperature detection electrode work, after time delay, the second temperature detection electrode works, the first temperature detection electrode and the third temperature detection electrode work, after time delay, the third temperature detection electrode works, the first temperature detection electrode and the second temperature detection electrode work, after time delay, the first temperature detection electrode works, the second temperature detection electrode and the third temperature detection electrode work, and the process is circulated;
the working mode occupies one temperature detection electrode to work circularly, the working state of the sensor can be judged by comparing the detection results of the three temperature detection electrodes, and meanwhile, a single temperature detection electrode can be corrected according to the results of other two temperature detection electrodes.
2 the working modes of the temperature detection electrode are as follows: the first temperature detection electrode and the second temperature detection electrode work, the third temperature detection electrode is in hot reserve, the average value of the work results of the first temperature detection electrode and the second temperature detection electrode is taken, after time delay, the second temperature detection electrode and the third temperature detection electrode work, the first temperature detection electrode is in hot reserve, the average value of the work results of the second temperature detection electrode and the third temperature detection electrode is taken, after time delay, the third temperature detection electrode and the first temperature detection electrode work, the second temperature detection electrode is in hot reserve, the average value of the work results of the third temperature detection electrode and the first temperature detection electrode is taken, after time delay, the first temperature detection electrode and the second temperature detection electrode work, the third temperature detection electrode is in hot reserve, the average value of the work results of the first temperature detection electrode and the second temperature detection electrode is taken, and the;
the working mode occupies two temperature detection electrodes to work circularly, the detection results of the two temperature detection electrodes are averaged to improve the precision, and meanwhile, the remaining temperature detection electrodes can be corrected.
3 the working modes of the temperature detection electrode are as follows: and 3 temperature detection electrodes work simultaneously, 2 adjacent temperature detection electrodes are randomly selected, and an average value is obtained.
The working mode occupies three temperature detection electrodes, three groups of data are measured each time, and the detection precision is improved by randomly selecting two data to be averaged or averaging three groups of data.
The third concrete implementation mode:
based on the integrated sensor chip for detecting seawater salinity and temperature described in the first embodiment, further, a manufacturing method of the integrated sensor chip for detecting seawater salinity and temperature is shown in fig. 5, and includes the following steps:
the method comprises the following steps: cleaning a basalt glass substrate, namely chemically cleaning and removing dust by adopting the basalt glass substrate;
step two: laser drilling, namely drilling a micro lead hole in the center of the electrode pad lead-out by adopting a laser drilling technology;
step three: printing a salinity detection electrode, namely printing a platinum film salinity detection electrode on the surface of the basalt glass substrate by adopting a thick film printing process;
step four: performing high-temperature heat treatment, namely performing heat treatment on the basalt glass substrate printed with the platinum film salinity detection electrode by adopting a high-temperature heat treatment process;
step five: printing a temperature detection electrode, namely printing a platinum film temperature detection electrode on the other surface of the basalt glass substrate by adopting a thick film printing process;
step six: performing high-temperature heat treatment, namely performing heat treatment on the basalt substrate sheet printed with the platinum film temperature detection electrode by adopting a high-temperature heat treatment process;
step seven: printing an isolation layer, namely printing basalt glass substrate thick film encapsulating layer slurry on the salinity detection electrode surface by using a thick film process;
step eight: sintering at high temperature, and performing heat treatment on the basalt substrate sheet printed with the basalt glass encapsulation isolation layer slurry by adopting a heat treatment process;
step nine: and (3) welding a lead, namely dipping the inner lead with platinum conductive slurry, putting the inner lead into the micro lead hole, connecting the platinum conductive slurry with the electrode leading-out end, and putting the micro lead hole into a sintering furnace for sintering to form the integrated sensor chip for detecting the seawater salinity and the temperature.
Specifically, in the first step, the basalt glass substrate is 1-5mm thick, the chemical cleaning is performed by using a sulfuric acid solution and a sodium hydroxide solution, the dust removal is performed by using pure water ultrasonic cleaning, and the vacuum drying is performed.
Specifically, in the second step, the diameter of the micro lead hole in the leading-out center of the electrode pad is 0.1-0.15 mm.
Specifically, in the third step, a platinum film salinity detection electrode is printed on the surface of the basalt substrate, and the thickness is 0.3-5 μm.
Specifically, in the fourth step, the sixth step and the eighth step, the temperature of the heat treatment is 900-1200 ℃.
In the fifth step, a platinum film temperature detection electrode is printed on the other surface of the basalt substrate sheet, and the thickness is 0.5-2.5 μm.
Specifically, in the seventh step, the thickness of the paste for the thick film encapsulating layer of the printed basalt glass substrate is 2-7 μm.
In the ninth step, the sintering temperature of the material placed in a sintering furnace is 900-1000 ℃.
The above embodiments are merely illustrative of the present patent and do not limit the scope of the patent, and those skilled in the art can make modifications to the parts thereof without departing from the spirit and scope of the patent.
Claims (9)
1. An integrated sensor chip for detecting seawater salinity and temperature, comprising: the salinity detection electrode comprises a salinity detection electrode (1) and a temperature detection electrode (5), and is characterized by further comprising a basalt glass substrate (4), wherein the basalt glass substrate (4) comprises two surfaces, six salinity detection electrodes (1) are arranged on the first surface of the basalt glass substrate, the six salinity detection electrodes (1) are arranged in parallel at intervals, the left sides of the first salinity detection electrode (1) and the second salinity detection electrode (1) are respectively connected with a salinity electrode pad (2), the right sides of the third salinity detection electrode (1) and the fourth salinity detection electrode (1) are respectively connected with a salinity electrode pad (2), the left sides of the fifth salinity detection electrode (1) and the sixth salinity detection electrode (1) are respectively connected with a salinity electrode pad (2), a first thick film encapsulating layer (3) is further arranged on the first surface of the basalt glass substrate (4), and the first thick film encapsulating layer (3) covers the first surface of the whole basalt glass substrate (4), a salinity electrode opening is reserved at the position of the salinity detection electrode (1); the second surface of the basalt glass substrate (4) is provided with three temperature detection electrodes (5), the three temperature detection electrodes (5) are arranged in a triangular shape in a head-to-tail non-connected mode, two ends of each temperature detection electrode (5) are respectively connected with one temperature electrode pad (6), a second thick film encapsulating layer (7) is further arranged on the second surface of the basalt glass substrate (4) and covers the second surface of the whole basalt glass substrate (4), the salinity electrode pads (2) and the temperature electrode pads (6) are led out through wires, and the basalt glass substrate is a 1-5mm thick seawater corrosion resistant basalt glass substrate.
2. An operating method of an integrated sensor chip for detecting seawater salinity and temperature according to claim 1, wherein six salinity detecting electrodes (1) comprise: 2 salinity detection electrode working mode, 3 salinity detection electrode working mode, 4 salinity detection electrode working mode, 5 salinity detection electrode working mode and 6 salinity detection electrode working mode, three temperature detection electrodes (5) have: 1, 2, and 3, respectively operating a temperature detection electrode in a working mode;
the working modes of the 2 salinity detection electrode are as follows: supplying an alternating current to the first salinity detection electrode, detecting the voltage change between the first salinity detection electrode and the second salinity detection electrode to obtain the impedance of the solution, after delaying, supplying an alternating current to the sixth salinity detection electrode, detecting the voltage change between the fifth salinity detection electrode and the sixth salinity detection electrode to obtain the impedance of the solution, after delaying, supplying an alternating current to the first salinity detection electrode, and repeating the steps;
the working modes of the 3 salinity detection electrode are as follows: supplying an alternating current to the second salinity detection electrode, detecting the voltage change between the first salinity detection electrode and the third salinity detection electrode to obtain the impedance of the solution, delaying, supplying an alternating current to the third salinity detection electrode, detecting the voltage change between the second salinity detection electrode and the fourth salinity detection electrode to obtain the impedance of the solution, delaying, supplying an alternating current to the fourth salinity detection electrode, detecting the voltage change between the third salinity detection electrode and the fifth salinity detection electrode to obtain the impedance of the solution, delaying, supplying an alternating current to the fifth salinity detection electrode, detecting the voltage change between the fourth salinity detection electrode and the sixth salinity detection electrode to obtain the impedance of the solution, delaying, supplying an alternating current to the second salinity detection electrode, and repeating the steps;
the working modes of the 4 salinity detection electrode are as follows: supplying alternating current to the first salinity detection electrode and the fourth salinity detection electrode, detecting the voltage change between the second salinity detection electrode and the third salinity detection electrode to obtain the impedance of the solution, converting the salinity of the detected solution, supplying alternating current to the second salinity detection electrode and the fifth salinity detection electrode after delaying, detecting the voltage change between the third salinity detection electrode and the fourth salinity detection electrode, supplying alternating current to the third salinity detection electrode and the sixth salinity detection electrode after delaying, detecting the voltage change between the fourth salinity detection electrode and the fifth salinity detection electrode, supplying alternating current to the first salinity detection electrode and the fourth salinity detection electrode after delaying, and circulating the steps;
the working modes of the 5 salinity detection electrode are as follows: supplying alternating current to the first salinity detection electrode and the fifth salinity detection electrode to detect voltage change between the second salinity detection electrode and the third salinity detection electrode, supplying alternating current to the third salinity detection electrode and the fourth salinity detection electrode to detect voltage change between the third salinity detection electrode and the fourth salinity detection electrode, averaging two voltage change values, converting the detected salinity, delaying, supplying alternating current to the second salinity detection electrode and the sixth salinity detection electrode to detect voltage change between the third salinity detection electrode and the fourth salinity detection electrode, detecting voltage change between the fourth salinity detection electrode and the fifth salinity detection electrode, averaging two voltage change values, converting the detected salinity, delaying, supplying alternating current to the first salinity detection electrode and the fifth salinity detection electrode, and repeating the steps;
the working modes of the 6 salinity detection electrode are as follows: alternating current is conducted to the first salinity detection electrode and the sixth salinity detection electrode, the second salinity detection electrode and the third salinity detection electrode are detected to obtain seawater impedance, the third salinity detection electrode and the fourth salinity detection electrode are detected to obtain seawater impedance, the fourth salinity detection electrode and the fifth salinity detection electrode are detected to obtain seawater impedance, the three seawater impedance values are averaged, and the salinity value is calculated;
the working modes of the temperature detection electrode are as follows: the first temperature detection electrode works, the second temperature detection electrode and the third temperature detection electrode work, after time delay, the second temperature detection electrode works, the first temperature detection electrode and the third temperature detection electrode work, after time delay, the third temperature detection electrode works, the first temperature detection electrode and the second temperature detection electrode work, after time delay, the first temperature detection electrode works, the second temperature detection electrode and the third temperature detection electrode work, and the process is circulated;
the working modes of the 2 temperature detection electrodes are as follows: the first temperature detection electrode and the second temperature detection electrode work, the third temperature detection electrode is in hot reserve, the average value of the work results of the first temperature detection electrode and the second temperature detection electrode is taken, after time delay, the second temperature detection electrode and the third temperature detection electrode work, the first temperature detection electrode is in hot reserve, the average value of the work results of the second temperature detection electrode and the third temperature detection electrode is taken, after time delay, the third temperature detection electrode and the first temperature detection electrode work, the second temperature detection electrode is in hot reserve, the average value of the work results of the third temperature detection electrode and the first temperature detection electrode is taken, after time delay, the first temperature detection electrode and the second temperature detection electrode work, the third temperature detection electrode is in hot reserve, the average value of the work results of the first temperature detection electrode and the second temperature detection electrode is taken, and the;
the working modes of the 3 temperature detection electrodes are as follows: and 3 temperature detection electrodes work simultaneously, 2 adjacent temperature detection electrodes are randomly selected, and an average value is obtained.
3. The manufacturing method of the integrated sensor chip for detecting seawater salinity and temperature according to claim 1, comprising the following steps:
the method comprises the following steps: cleaning a basalt glass substrate, namely chemically cleaning and removing dust by adopting the basalt glass substrate;
step two: laser drilling, namely drilling a micro lead hole in the center of the electrode pad lead-out by adopting a laser drilling technology;
step three: printing a salinity detection electrode, namely printing a platinum film salinity detection electrode on the surface of the basalt glass substrate by adopting a thick film printing process;
step four: performing high-temperature heat treatment, namely performing heat treatment on the basalt glass substrate printed with the platinum film salinity detection electrode by adopting a high-temperature heat treatment process;
step five: printing a temperature detection electrode, namely printing a platinum film temperature detection electrode on the other surface of the basalt glass substrate by adopting a thick film printing process;
step six: performing high-temperature heat treatment, namely performing heat treatment on the basalt substrate sheet printed with the platinum film temperature detection electrode by adopting a high-temperature heat treatment process;
step seven: printing an isolation layer, namely printing basalt glass substrate thick film encapsulating layer slurry on the salinity detection electrode surface by using a thick film process;
step eight: sintering at high temperature, and performing heat treatment on the basalt substrate sheet printed with the basalt glass encapsulation isolation layer slurry by adopting a heat treatment process;
step nine: and (3) welding a lead, namely dipping the inner lead with platinum conductive slurry, putting the inner lead into the micro lead hole, connecting the platinum conductive slurry with the electrode leading-out end, and putting the micro lead hole into a sintering furnace for sintering to form the integrated sensor chip for detecting the seawater salinity and the temperature.
4. The method for manufacturing an integrated sensor chip for detecting seawater salinity and temperature according to claim 3, wherein in the first step, the chemical cleaning is performed by using a sulfuric acid solution and a sodium hydroxide solution, the dust removal is performed by using pure water and ultrasonic cleaning, and the vacuum drying is performed.
5. The manufacturing method of the integrated sensor chip for detecting seawater salinity and temperature according to claim 3, wherein in the second step, the diameter of the micro-wiring hole formed in the leading center of the electrode pad is 0.1-0.15 mm.
6. The method for manufacturing the integrated sensor chip for detecting seawater salinity and temperature according to claim 3, wherein in the third step, a platinum film salinity detecting electrode is printed on the surface of the basalt substrate and has a thickness of 0.3-5 μm.
7. The method as claimed in claim 3, wherein the temperature of the heat treatment in the fourth, sixth and eighth steps is 900-1200 ℃.
8. The method for manufacturing the integrated sensor chip for detecting seawater salinity and temperature according to claim 3, wherein in the fifth step, a platinum film temperature detection electrode is printed on the other surface of the basalt substrate, and the thickness is 0.5-2.5 μm.
9. The manufacturing method of an integrated sensor chip for detecting seawater salinity and temperature according to claim 3, wherein in the seventh step, the thickness of the paste of the thick film encapsulation layer of the printed basalt glass substrate is 2-7 μm.
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| CN111384461A (en) * | 2018-12-29 | 2020-07-07 | 中信国安盟固利动力科技有限公司 | Multi-parameter integrated device of ion battery and preparation method thereof |
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| CN2596356Y (en) * | 2003-02-17 | 2003-12-31 | 国家海洋技术中心 | Laboratory salinometer |
| CN2715151Y (en) * | 2004-08-06 | 2005-08-03 | 中国科学院南京土壤研究所 | Soil salinity sensor |
| CN100520384C (en) * | 2007-02-14 | 2009-07-29 | 中国科学院南京土壤研究所 | Four-electrode original position soil salt content measuring method |
| CN203275340U (en) * | 2013-05-22 | 2013-11-06 | 北京中农宸熙科技有限公司 | Intelligent water quality salinity sensor |
| CN103601147A (en) * | 2013-11-12 | 2014-02-26 | 广州中国科学院先进技术研究所 | Preparation method of contact type four-electrode salinity sensor based on micro electro mechanical systems (MEMS) technology |
| CN103592341A (en) * | 2013-11-12 | 2014-02-19 | 广州中国科学院先进技术研究所 | Contact type four-electrode salinity sensor based on MEMS (micro electro mechanical systems) technology and detection method of salinity sensor |
| KR20160039853A (en) * | 2014-10-02 | 2016-04-12 | 주식회사 템퍼스 | External salinity measuring apparatus and mobile salinity sensor system |
| CN104374807A (en) * | 2014-11-04 | 2015-02-25 | 宁波市亿侨电子科技有限公司 | Salinity detection method and salinity meter thereof |
| CN105004764B (en) * | 2015-07-15 | 2018-01-02 | 哈尔滨工程大学 | A kind of salinity measurement method for detecting seawater salinity sensor |
| CN105021663B (en) * | 2015-07-30 | 2017-07-28 | 东南大学 | A kind of salimity measurement method |
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