CN107469480A - Fluid treating device - Google Patents
Fluid treating device Download PDFInfo
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- CN107469480A CN107469480A CN201610399546.8A CN201610399546A CN107469480A CN 107469480 A CN107469480 A CN 107469480A CN 201610399546 A CN201610399546 A CN 201610399546A CN 107469480 A CN107469480 A CN 107469480A
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0001—Making filtering elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
- B01D46/0028—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions provided with antibacterial or antifungal means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8678—Removing components of undefined structure
- B01D53/8687—Organic components
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/50—Treatment of water, waste water, or sewage by addition or application of a germicide or by oligodynamic treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/80—Type of catalytic reaction
- B01D2255/802—Photocatalytic
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2303/00—Specific treatment goals
- C02F2303/04—Disinfection
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2305/00—Use of specific compounds during water treatment
- C02F2305/10—Photocatalysts
Abstract
This application discloses a kind of fluid treating device, including：Matrix with first fluid passage, the first fluid passage have fluid intake and fluid issuing, and the fluid intake of the first fluid passage is distributed in the first surface of described matrix；Intersected the loose structure formed by complex root nemutogen, second fluid passage is cooperatively formed to the first surface with described matrix, described complex root nemutogen one end is fixedly connected with described matrix, the diameter of the loose structure Hole is more than 0 but is less than and mixes in the particle diameter of the selected particle in pending fluid, and pending fluid is only capable of entering first fluid passage by the second fluid passage.The fluid treating device of the application has the characteristics that flux is big, flow resistance is small, energy high-efficient cleaning removes micro-/ nano grade particles in fluid, reusable, service life length, and produces in enormous quantities suitable for scale.
Description
Technical field
The application is more particularly to a kind of device that purified treatment is carried out to the fluid containing particulate matter.
Background technology
Daily life, work in, people for remove fluid in particle and make fluid be purified have extensively
Demand.For example, be directed to low-quality air, dust therein, molecule etc. need to be removed, to ensure the health of human body.Again
For example, for water, oil (edible oil, gasoline, diesel oil etc.), particulate matter therein need to be removed, to realize the purifying of water, oil.Example again
Such as, for fields such as biological medicines, it need to remove or screen cell in blood and body fluid, virus, bacterium etc..
Traditional fluid treating device (such as mouth mask, air purifier etc.) has that flux is low, volume is big, using the longevity mostly
Order the defects of short, and it is low for the elimination effect of fine particle in fluid.
In recent years, with the development of micro-nano process technology, researcher has also been proposed some streams based on porous membrane
Body processing equipment, i.e. go out micron or nano level numerous holes by etching (corrosion) on film, make it can apply to clearly
Except the particle in fluid, especially molecule, its size can be precisely controlled.But there is flux and mechanical strength in this device
Between contradiction, flux is big, often mechanical structure is fragile, and mechanical strength is big, flux again very little.This is due to that it processes skill
The limitation of art, if hole is smaller, film thickness just needs thinner, and this also make it that the mechanical support performance of porous membrane is further
Deterioration, can not adapt to adverse circumstances, and service life is also very limited, so so far can't be practical.
Currently there is researcher to utilize sacrificial layer technology, realize the fluid treating device comprising transverse flow channels and (refer to
Shown in Fig. 1), the aperture of these transverse flow channels can be controlled in several nanometers, therefore be beneficial to remove the fine particle in fluid,
But its flux is too small.
The content of the invention
The main purpose of the application is to provide a kind of fluid treating device of improvement, with overcome it is of the prior art not
Foot.
To realize aforementioned invention purpose, the technical scheme that the application uses includes：
The embodiment of the present application provides a kind of fluid treating device, and it includes：
Matrix with first fluid passage, the first fluid passage have a fluid intake and fluid issuing, and described
The fluid intake of one fluid passage is distributed in the first surface of described matrix；
Intersected the loose structure formed by complex root nemutogen, is cooperatively formed to the first surface with described matrix
Second fluid passage, described complex root nemutogen one end are fixedly connected with described matrix, the loose structure Hole it is straight
Footpath is more than 0 but is less than and mixes in the particle diameter of the selected particle in pending fluid, and pending fluid is only capable of by described
Second fluid passage enters first fluid passage.
In one more preferred embodiment, described fluid treating device includes parallel being distributed in the of described matrix
The complex root crossbeam on one surface, the crossbeam transversely continuously extend in the first surface of described matrix, wherein at least two horizontal strokes
Beam respectively with the phase of the fluid intake of the first fluid passage back to both sides be disposed adjacent, an at least crossbeam is directly from institute
State and pass through on the fluid intake of first fluid passage；And complex root nemutogen is distributed with any crossbeam, the complex root line
The beam surface is fixed in one end of at least part nemutogen in body, and other end edge is gradually distance from the side of any crossbeam
To extending obliquely out and/or continuously extend on the face parallel to described matrix first surface, and it is any adjacent to this with being distributed in
Complex root nemutogen on another crossbeam of crossbeam intersects, so as to form the loose structure.
More preferable, the nemutogen uses nano wire and/or micro wire.
Than prior art, the fluid treating device that the application provides is at least with flux is big, flow resistance is small, energy high-efficient cleaning removes
In fluid the features such as micro-/ nano grade particles, thicker matrix can be also used, high mechanical strength can (ultrasound) cleaning and repeatedly
Use, service life length, and preferably there is self-cleaning function, while its preparation technology is simply controllable, suitable for scale high-volume
Prepare.
Brief description of the drawings
, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present application or technical scheme of the prior art
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments described in application, for those of ordinary skill in the art, on the premise of not paying creative work,
Other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is a kind of sectional view of the fluid treating device comprising transverse flow channels in the prior art；
Fig. 2 is a kind of top view of fluid treating device in the embodiment of the application one；
Fig. 3 is a kind of partial sectional view of fluid treating device in the embodiment of the application one；
Fig. 4 is a kind of preparation technology flow chart of fluid treating device in the embodiment of the application one.
Embodiment
In view of deficiency of the prior art, inventor is able to propose the application's through studying for a long period of time and largely putting into practice
Technical scheme.The technical scheme, its implementation process and principle etc. will be further explained as follows.
A kind of fluid treating device that the one side of the embodiment of the present application provides includes：
Matrix with first fluid passage, the first fluid passage have a fluid intake and fluid issuing, and described
The fluid intake of one fluid passage is distributed in the first surface of described matrix；
Intersected the loose structure formed by complex root nemutogen, is cooperatively formed to the first surface with described matrix
Second fluid passage, described complex root nemutogen one end are fixedly connected with described matrix, the loose structure Hole it is straight
Footpath is more than 0 but is less than and mixes in the particle diameter of the selected particle in pending fluid, and pending fluid is only capable of by described
Second fluid passage enters first fluid passage.
Wherein, described matrix can be various forms, such as cuboid shape, sheet, polyhedral, hemispherical, spherical
Or other irregular forms.Therefore, described " first surface " can be any one unspecific conjunction in described matrix
Suitable plane or curved surface.
Wherein, the first fluid passage can be the through hole of any form, and its fluid intake is distributed in described matrix
On first surface, and its fluid issuing can be both distributed on another surfaces different from the first surface of described matrix
(for example, another surface can it is adjacent with the first surface, mutually back to), can also be distributed on described first surface (when
So in this case, described first surface Shang Yingyou fluid barriers mechanism, make pending fluid will not be described first
The fluid outlet is flowed to directly on a surface.In some cases, the fluid issuing of the first fluid passage be also can
To be distributed in inside described matrix, for example, when existing in described matrix to receive the cavity of the fluid after processing.
Wherein, described pending fluid can be gas phase or liquid phase, such as empty gas and water, oils, in some situations
The set of particulate matter lower or in flow-like, or molten state of Cucumber etc..
Wherein, described " particle " is primarily referred to as solid phase particles, but in some cases, can also be and the fluid
(particularly liquid phase fluid) incompatible drop etc..
Wherein, described nemutogen can be linear, curved, preferably linear, it is beneficial to prepare, and can
Make the hole size in the loose structure to be formed etc. more controllable.And described nemutogen can be solid or hollow, example
Such as nanoscale or micron-sized line, pipe, but not limited to this.
Wherein, the diameter of the nemutogen is preferably 1nm~50 μm.
Wherein, the distance between one end of any nemutogen and one end of another nemutogen adjacent with the nemutogen are preferred
For 1nm~50 μm.
Wherein, the length of the nemutogen is preferably 50nm~200 μm.
Preferably, the nemutogen can use nano wire, and its diameter is smaller, can be less to form aperture with dense distribution
Hole, and then be able to can also be realized to comprising compared with small particle (micron or even nanoscale while high fluid flux is kept
The fluid of particle not) is handled.
Preferably, the nemutogen can use nano wire, and the array formed by these nano wires can have super-drainage structure,
And then cause the fluid treating device that there is self-cleaning function.
Foregoing nano wire also can be replaced nanotube etc..
For example, described nemutogen can preferably be selected from carbon nanocoils, CNT, ZnO nano-wire, GaN nano wire, TiO2
Nano wire, Ag nano wires, Au nano wires etc., and not limited to this.
Wherein, described nemutogen can by the external world transfer, growth in situ (such as chemically grown, electrochemical growth) or
The modes such as deposition (such as physics, chemical vapor deposition, electro-deposition) are fixed on described matrix surface or in described matrix surface
Growth is formed.
Wherein, the fluid intake of the first fluid passage have rule or irregular shape, such as polygon (rectangle,
Rhombus is other), circular or ellipse etc., it can simply be adjusted according to the demand of practical application.
In some more preferred embodiment, the first table of one end of the complex root nemutogen with described matrix
Face is fixedly connected, and is surround and be distributed in around the fluid intake of the first fluid passage.Such setting form, can make distribution
Composition portion of the loose structure formed between complex root nemutogen around the fluid intake as second fluid passage
Point, so as to obtain larger fluid flux.
In some more preferred embodiment, described fluid treating device also includes：
The a plurality of lug bosses being intervally installed, the lug boss are fixedly installed on the first surface of described matrix,
And transversely continuously extend on the first surface of described matrix, wherein at least two lug boss leads to the first fluid respectively
The phase of the fluid intake in road back to both sides be disposed adjacent, at least one lug boss is directly from the fluid of the first fluid passage
By being fixedly connected with two above-described nemutogens on the lug boss on entrance.
Wherein, described a plurality of lug bosses refer to two or more lug bosses.Wherein described lug boss be relative to
For the flat or recessed part of the first surface of described matrix, its form can be various, for example, being seen from top view
Examine, it can be strip, sheet or Else Rule or irregular form with straight line or curved profile etc. etc., and be not limited to
This.Preferably, the lug boss can have larger thickness and larger width, can so be provided for the nemutogen compared with
Good support, and the distance of each lug boss can be with larger.
Wherein, described a plurality of lug bosses can be regular or irregular, uniform or heterogeneous be distributed in described matrix
First surface on.
In some more preferred embodiment, the complex root nemutogen that is connected on a lug boss and be connected to should
Complex root nemutogen on the adjacent another lug boss of lug boss intersects.
In some more preferable case study on implementation, parallel the first table for being distributed in described matrix of a plurality of lug bosses
On face.
In some more preferred embodiment, the width of the lug boss is 0.1 μm~100 μm, is highly
0.1 μm~400 μm.
Foregoing " transverse direction " means any direction for the first surface for being parallel or substantially in parallel to described matrix.Accordingly,
Foregoing " longitudinal direction " is meant perpendicular to or substantially perpendicular to the horizontal direction.
In some more preferred embodiment, the distance between adjacent projections are 0.1 μm~100 μm.
Wherein, the material selection range of each several part is various in the fluid treating device, can be inorganic material,
It can be organic material.For example, metal, silicon chip, ceramics, polymer etc. can be selected from, and not limited to this.When these parts are all selected
Select when using inorganic material, the fluid treating device also has the characteristic of resistance to temperature change, can handle high temperature and low temperature stream
Body.
In some more preferred embodiment, the lug boss surface is additionally provided with function material layer, the function
The material of material layer includes catalysis material, anti-biotic material etc., and not limited to this.For example, more typical catalysis material
Can be titanium dioxide etc., when the fluid treating device convection body comprising this kind of function material is handled, if being aided with ultraviolet
Illumination etc., some organic pollutions that can also be in convection body etc. carries out photocatalytic degradation, realizes the multiple purifying of convection body.Example again
Such as, more typical anti-biotic material can be the noble metals such as Au, Ag, can be synchronous in the processing procedure of fluid by it
Kill bacterium in fluid, virus etc..
Further, for the benefit of light penetrates, in described matrix, nemutogen, lug boss partly or entirely can be by saturating
Bright material is made.
In some more preferred embodiment, the fluid treating device includes parallel being distributed in the of described matrix
The complex root crossbeam (i.e. described lug boss) on one surface, the crossbeam transversely continuously extends in the first surface of described matrix,
Wherein at least two crossbeams respectively with the phase of the fluid intake of the first fluid passage back to both sides be disposed adjacent, at least one
Root crossbeam directly passes through from the fluid intake of the first fluid passage；And complex root line is distributed with any crossbeam
The beam surface is fixed in body, one end of at least part nemutogen in the complex root nemutogen, and the other end is along gradually remote
Direction from any crossbeam extends obliquely out and/or continuously extended on the face parallel to described matrix first surface, and with dividing
Complex root nemutogen of the cloth on another crossbeam adjacent to any crossbeam intersects, so as to form the loose structure.
In certain embodiments, at least two crossbeams lead to directly from the fluid intake of the first fluid passage
Cross.
A kind of method for preparing the fluid treating device that the other side of the embodiment of the present application proposes includes：
There is provided with mutually back to first surface and second surface substrate；
The substrate is processed, so as to form first fluid passage, the first fluid passage over the substrate
With fluid intake and fluid issuing, the fluid intake of the first fluid passage is distributed in the first surface of the substrate；
In formation complex root nemutogen on the substrate, and the complex root nemutogen is set to intersect to form loose structure,
The loose structure and the first surface of described matrix cooperatively form second fluid passage, the diameter of the loose structure Hole
More than 0 but less than mixing in the particle diameter of the selected particle in pending fluid, and pending fluid is only capable of by described the
Two fluid passages enter first fluid passage.
In some more specific embodiment, the preparation method includes：
The first surface of the substrate is processed, is intervally installed so as to be formed in the first surface of the substrate
A plurality of lug bosses, or, a plurality of lug bosses to be formed and be intervally installed, institute are grown in the first surface of the substrate
State lug boss transversely on the first surface of described matrix continuously to extend, wherein at least two lug boss is respectively with described first
The phase of the fluid intake of fluid passage back to both sides be disposed adjacent, at least one lug boss is directly from the first fluid passage
Fluid intake on pass through；
Form complex root nemutogen in growth on the lug boss, and make complex root nemutogen on any lug boss and with
Complex root nemutogen on the adjacent another lug boss of any lug boss intersects to form loose structure, the loose structure
Second fluid passage is cooperatively formed with the first surface of described matrix, and pending fluid is only capable of leading to by the second fluid
Road enters first fluid passage.
In some more specifically embodiment, the preparation method includes：
The Seed Layer of nano wire (i.e. described nemutogen) growth is provided in the first surface of the substrate；
Patterned first photoresist mask is set in the Seed Layer, then the first surface of the substrate is carved
Erosion, so as to form a plurality of lug bosses being intervally installed in the first surface of the substrate, first light is removed afterwards
Resist mask；
Patterned second photoresist mask, then the second table to the substrate are set on the second surface of the substrate
Face performs etching, so as to form the slotted eye for the first surface for being through to the substrate in the second surface of the substrate, to make
For first fluid passage, the 4th photoresist mask is removed afterwards；
Growth forms complex root nano wire in the Seed Layer remained at the top of the lug boss, and makes the complex root nanometer
Line intersects to form loose structure.
The technical scheme of the application is further described below with reference to accompanying drawing and some embodiments.
Refer to shown in Fig. 2, in the embodiment of the application, a kind of fluid treating device includes matrix 101, the base
Body 101 have mutually back to first surface 1011 and second surface 1012, and be distributed with described matrix 101 and some be used as fluid
The through hole 104 of passage.More crossbeams 103 of parallel arrangement are provided with the first surface 1011, the crossbeam 103 is described
Transversely continuous extension on first surface, some crossbeams 103 therein are from the through hole 104 continuously across therefore can also
It is considered as great-leap-forward crossbeam 103.More nano wires 102 are distributed with any of which crossbeam 103, the more nano wires 102
One end is both secured to any surface of crossbeam 103, and the other end extends obliquely out (also along the direction for being gradually distance from any crossbeam 103
It is regarded as extending laterally), and the more phases of nano wire 102 with being distributed on another crossbeam adjacent to any crossbeam 103
Mutually intersect, so as to form the loose structure 105.Referring to Fig. 2, the loose structure 105 is with the view of vertical view
To cover the network of the through hole 104.The diameter of the Hole of loose structure 105 is more than 0 but less than mixing in waiting to locate
The particle diameter of selected particle in the fluid of reason.And referring to Fig. 3, it can be seen that the more nano wires 102 intersect to form it is porous
The first surface 1011 of structure 105 and described matrix 101 cooperatively forms another fluid passage so that pending fluid 106 is only
The through hole 104 can be entered by another fluid passage.
Wherein, because foregoing nano wire has larger ratio of height to diameter (or draw ratio) so that these nano wires can intensive row
The first surface of described matrix is distributed in, by adjusting the density of spacing and these nano wires between foregoing crossbeam, length, prolonging
Stretch direction etc., you can the particle of different-grain diameter scope is purged processing in convection body, and particularly, what it is when use is nano wire
When, by the hole pore size control that forms these nanowire crossbars in nanoscale, can not only remove atomic small in fluid
Particle, and because nano wire diameter itself is minimum, it is controlled in very low level, and shape for the resistance of fluid
Into very big fluid flux, far superior to existing perforated membrane, fluid treating device based on transverse flow channels etc..
Wherein, if with reference to known to industry scheme, the arrangement mode of foregoing nano wire is carried out to certain design, may be used also
Be allowed to form super-drainage structure, superoleophobic structure, can not only remove the particle in fluid, and can also by automatic cleaning action,
The particle for making to be blocked can not gather in the functional area (nano-wire array surface) of the fluid treating device, avoid the stream
Body processing unit fails after long-term use.
Wherein, the crossbeam 103 can on the first surface 1011 of described matrix 101 with suitable Density Distribution, with
Make the fluid treating device that there is fluid processing flux as high as possible.And the crossbeam 103 can have suitable width
Degree, so that the crossbeam 103 can also avoid the flux to the fluid treating device while with enough mechanical strengths
Cause excessively to influence.For example, the horizontal depth of beam can be 0.1 μm~100 μm, width can be 0.1 μm~400 μm, horizontal
Spacing between beam can be 0.1 μm~100 μm.
Wherein, described matrix 101 can make with larger thickness and the crossbeam 103 with larger height
It forms preferable support to foregoing nano-wire array, while the machinery that the fluid treating device can be increased further is strong
Degree, make the pressure-resistant fluid treating device, resistant to bending, impact resistant, impact resistance, and then it is applied in a variety of environment and
It will not damage, such as can apply to handle high pressure, high-velocity fluid, this function is that existing perforated membrane etc. can not be looked forward to
And.
Wherein, the material selection range of the fluid treating device each several part (101,102,103) is various, Ke Yishi
Inorganic material or organic material.When these parts all select to use inorganic material, the fluid treating device also has
There is the characteristic of resistance to temperature change, high temperature and cryogen can be handled.
Using previous designs described fluid treating device can (ultrasound) cleaning, be used for multiple times, and remain on good
Good fluid handling abilities.
When being handled using described fluid treating device convection body, the fluid containing impurity particle is stated before entry
During loose structure 105, wherein particle diameter is more than particle (or some drops incompatible with fluid, such as in air of certain numerical value
Water droplet or oil in water droplet) be blocked in outside previous porous structure 105, gap of the fluid between each nano wire afterwards
Through hole 104 is entered back into after reaching the porch of through hole 104, realizes the purification of convection body and/or to required particle (drop)
Enriching and recovering.
Referring to shown in Fig. 3, in some concrete application schemes of the embodiment, the diameter of foregoing nano wire 102
Can be 1nm~50 μm with spacing, length (height) can be 50nm~200 μm.The aperture of the through hole 104 can be 1 μm
~1mm.The thickness of described matrix can be more than 1 μm.
The lateral cross section structure of foregoing nano wire can be rule or irregular shape, such as can be polygon (three
Angular, quadrangle is other), circular, ellipse, star etc..
Foregoing nano wire 102 can regular or irregular, uniform or the first table heterogeneous for being distributed in described matrix 101
On face.
The array formed by these nano wires 102 can have super-drainage structure, and then cause the fluid treating device tool
There is self-cleaning function.
Foregoing nano wire 102 can preferably be selected from carbon nanocoils, CNT, ZnO nano-wire, GaN nano wire, TiO2Receive
Rice noodles, Ag nano wires, Au nano wires etc., and not limited to this.
Foregoing nano wire 102 can pass through external world's transfer, growth in situ (such as chemically grown, electrochemical growth) or deposition
Modes such as (such as physics, chemical vapor depositions, electro-deposition) is fixed on described matrix surface or in described matrix superficial growth
Formed.
The shape shape of lateral cross section (particularly) of aforementioned through-hole 104 can be various, such as can be circular, just
Square, rectangle, rhombus, polygon or Else Rule or irregular shape.
In some concrete application schemes of the embodiment, the nano wire 102 can be by catalysis material or with anti-
Bacterium, the material of sterilizing function are formed, or, the nano wire 102 can also be surface covered with catalysis material or with killing
The coating that bacterium, the material of antibacterial functions are formed.
For example, the nano wire 102 can use ZnO nano-wire, GaN nano wire, TiO2 nano wires etc. with light-catalysed
The nano wire of property, under light auxiliary irradiation, the organic matter in the fluid that can degrade.
For example, the nano wire 102 can use Ag nano wires, Au nano wires etc., with kill the bacterium in fluid, virus,
Microorganism.
In some concrete application schemes of the embodiment, light is additionally provided with the first surface 1011 of described matrix 101
Cati material or anti-biotic material layer etc..
When being handled with the fluid treating device convection body comprising layers of photo-catalytic material, if being aided with ultraviolet lighting etc.,
Some organic pollutions that can also be in convection body etc. carry out photocatalytic degradation, realize the multiple purifying of convection body.
Wherein, for the benefit of light penetrates, in described matrix, lug boss, nano wire partly or entirely can be by transparent material
Material is made.
Wherein, more typical catalysis material can be titanium dioxide etc., but not limited to this.
Wherein, to form the layers of photo-catalytic material, those skilled in the art can use various ways known to industry,
Such as (spin coating, spraying, printing etc.) is coated with, is physically or chemically vapor-deposited (such as MOCVD, PECVD, ald), splashes
Penetrate etc., and not limited to this.
Wherein, the thickness of the layers of photo-catalytic material can be controlled in nanoscale, to reduce it to the fluid as far as possible
The influence of the fluid flux of processing unit.
And when being handled with the fluid treating device convection body comprising anti-biotic material layer, can be in the treated of fluid
Cheng Zhong, bacterium in fluid, virus etc. are synchronously killed, realize the multiple purifying of convection body.
Wherein, more typical anti-biotic material can be noble metals such as Au, Ag etc., but not limited to this.
Wherein, to form the anti-biotic material layer, those skilled in the art can use various ways, example known to industry
Such as it is coated with (spin coating, spraying, printing), is physically or chemically vapor-deposited (such as MOCVD, PECVD, ald), sputtering
Etc., and not limited to this.
Wherein, the thickness of the anti-biotic material layer can be controlled in nanoscale, with as far as possible reduce its to the fluid at
Manage the influence of the fluid flux of device.
The fluid treating device of the application can prepare by physics, chemical method, such as can be chemically grown
Method, Physical Processing method etc., particularly MEMS (MEMS, Microelectromechanical Systems) method etc..
For example, referring to shown in Fig. 4, in this embodiment, a kind of preparation technology of fluid treating device can be included such as
Lower step：
S1：The Seed Layer for nanowire growth is deposited on the first surface of substrate (such as silicon chip).
S2：Patterned photoresist mask is set in the Seed Layer, and it includes the lines for making micro-nano-scale by lithography.
S3：The first surface of the substrate is performed etching using the photoresist mask, so as to the of the substrate
One surface forms the beam structure for more micro-nano-scales being intervally installed, and removes the photoresist mask afterwards.
S4：The patterned etching mask for setting photoresist to be formed on the second surface of the substrate.
S5：The second surface of the substrate is performed etching, and is etched to the crossbeam bottom, so as in the substrate
Second surface forms the slotted eye as fluid passage, and removes photoresist.
S6：Nano wire is grown on the seed layer, controls the growth conditions of nano wire, nano wire is had certain lateral growth
Ratio, and form the intersection grid of micro-nano-scale.
S7：Scribing, encapsulation, fluid treating device is made.
The lithographic method used in These steps can be photoetching, Mechanical lithography, dry etching, wet etching etc..
For example, in abovementioned steps, forming the method for the photoresist mask of graphical (nano graph) includes：Photoetching skill
Art, nanometer bead mask technique, nanometer (metal) particle mask technology etc., and not limited to this.
For example, in abovementioned steps, can be rotten by mode known to industry, such as RIE, ICP, wet etching, electrochemistry
Erosion etc. etches crossbeam 103, through hole 104 etc..
Obviously, the preparation technology of the application fluid treating device is simple controllable, is adapted to mass large-scale production.
It should be appreciated that above-described embodiment is only the technical concepts and features for illustrating the application, its object is to allow be familiar with this
The personage of item technology can understand present context and implement according to this, and the protection domain of the application can not be limited with this.It is all
The equivalent change or modification made according to the application Spirit Essence, it should all cover within the protection domain of the application.
Claims (10)
- A kind of 1. fluid treating device, it is characterised in that including：Matrix with first fluid passage, the first fluid passage has fluid intake and fluid issuing, described first-class The fluid intake of body passage is distributed in the first surface of described matrix；Intersected the loose structure formed by complex root nemutogen, and second is cooperatively formed to the first surface with described matrix Fluid passage, described complex root nemutogen one end are fixedly connected with described matrix, and the diameter of the loose structure Hole is big In 0 but less than mixing in the particle diameter of the selected particle in pending fluid, and pending fluid is only capable of by described second Fluid passage enters first fluid passage.
- 2. fluid treating device according to claim 1, it is characterised in that：One end of the complex root nemutogen is and institute The first surface for stating matrix is fixedly connected, and is surround and be distributed in around the fluid intake of the first fluid passage；And/or institute The fluid treating device stated also includes a plurality of lug bosses being intervally installed, and the lug boss is fixedly installed on described matrix First surface on, and transversely continuously extend on the first surface of described matrix, wherein at least two lug boss respectively with The phase of the fluid intake of the first fluid passage back to both sides be disposed adjacent, at least one lug boss is directly from described first By being fixedly connected with two above-described nemutogens on the lug boss on the fluid intake of fluid passage.
- 3. fluid treating device according to claim 2, it is characterised in that：The complex root being connected on a lug boss is linear Body and the complex root nemutogen being connected on another lug boss adjacent with the lug boss intersect；It is and/or described a plurality of Lug boss is parallel to be distributed on the first surface of described matrix；And/or the shape of the lug boss includes strip or sheet； And/or described a plurality of lug bosses are uniformly distributed or non-uniform Distribution is on the first surface of described matrix；It is and/or described The width of lug boss is 0.1 μm~100 μm, is highly 0.1 μm~400 μm；And/or the distance between adjacent projections are 0.1 μm~100 μm.
- 4. according to the fluid treating device any one of claim 2-3, it is characterised in that：The lug boss surface is also set Function material layer is equipped with, the material of the function material layer includes catalysis material or anti-biotic material；And/or described matrix, institute It is transparent configuration to state at least local of at least one of complex root nemutogen, a plurality of lug bosses.
- 5. according to the fluid treating device any one of claim 1-3, it is characterised in that：The nemutogen it is a diameter of 1nm~50 μm；And/or between one end of any of which nemutogen and one end of another nemutogen adjacent with the nemutogen Distance is 1nm~50 μm；And/or the length of the nemutogen is 50nm~200 μm；And/or extremely it is less than the linear body surface Catalysis material or anti-biotic material is also distributed with face；And/or at least one of described matrix and described complex root nemutogen At least local is transparent configuration.
- 6. according to the fluid treating device any one of claim 1-3, it is characterised in that：The nemutogen is straight line Shape.
- 7. fluid treating device according to claim 6, it is characterised in that be distributed in the first of described matrix including parallel The complex root crossbeam on surface, the crossbeam transversely continuously extend in the first surface of described matrix, wherein at least two crossbeams Respectively with the phase of the fluid intake of the first fluid passage back to both sides be disposed adjacent, at least a crossbeam is directly from described Pass through on the fluid intake of first fluid passage；And complex root nemutogen is distributed with any crossbeam, the complex root is linear The beam surface is fixed in one end of at least part nemutogen in body, and other end edge is gradually distance from the direction of any crossbeam Extend obliquely out and/or continuously extend on the face parallel to described matrix first surface, and with being distributed in adjacent to any horizontal stroke Complex root nemutogen on another crossbeam of beam intersects, so as to form the loose structure.
- 8. fluid treating device according to claim 7, it is characterised in that：At least two crossbeams are directly from described first-class Pass through on the fluid intake of body passage.
- 9. fluid treating device according to claim 6, it is characterised in that：The nemutogen includes carbon nanocoils, carbon is received Mitron, ZnO nano-wire, GaN nano wire, TiO2Any of nano wire, Ag nano wires, Au nano wires or two or more groups Close.
- 10. fluid treating device according to claim 1, it is characterised in that：The fluid intake of the first fluid passage Include polygon, circle or ellipse with rule or irregular shape, the regular shape；And/or the first fluid leads to The aperture in road is 1 μm~1mm；And/or the thickness of described matrix is more than 1 μm.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610399546.8A CN107469480A (en) | 2016-06-07 | 2016-06-07 | Fluid treating device |
| CN202310697962.6A CN116747614A (en) | 2016-06-07 | 2016-06-07 | Fluid treatment device based on porous film |
| PCT/CN2017/086780 WO2017211215A1 (en) | 2016-06-07 | 2017-06-01 | Fluid processing device and preparation method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610399546.8A CN107469480A (en) | 2016-06-07 | 2016-06-07 | Fluid treating device |
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| CN202310697962.6A Division CN116747614A (en) | 2016-06-07 | 2016-06-07 | Fluid treatment device based on porous film |
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| CN202310697962.6A Pending CN116747614A (en) | 2016-06-07 | 2016-06-07 | Fluid treatment device based on porous film |
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