CN107422473A - MEMS micromirror two-dimensional scan for laser radar collimates optical transmitting system - Google Patents
MEMS micromirror two-dimensional scan for laser radar collimates optical transmitting system Download PDFInfo
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- CN107422473A CN107422473A CN201710774431.7A CN201710774431A CN107422473A CN 107422473 A CN107422473 A CN 107422473A CN 201710774431 A CN201710774431 A CN 201710774431A CN 107422473 A CN107422473 A CN 107422473A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses a kind of MEMS micromirror two-dimensional scan for laser radar to collimate optical transmitting system, including pulsed laser diode, disappear astigmatism microscope group, optical beam transformation microscope group, MEMS micromirror, image point position compensates microscope group, collimation object microscope group and MEMS micromirror drive circuit, the laser of pulsed laser diode transmitting is successively by astigmatism microscope group and the optical beam transformation microscope group arrival MEMS micromirror reflecting surface of disappearing, MEMS micromirror carries out angle swinging under the control of MEMS micromirror drive circuit and forms laser scanning face, the light beam in laser scanning face realizes collimation outgoing by image point position compensation microscope group and collimation object microscope group again.Optical transmitting system of the present invention improves the collimation of transmitting light beam.
Description
Technical field
The present invention relates to a kind of laser radar optical transmitting system, particularly a kind of MEMS micromirror two for laser radar
Dimension scanning collimation optical transmitting system.
Background technology
Laser radar uses laser as detection light beam, so as to make it have spatial resolution height, strong antijamming capability, body
The outstanding advantage such as small and in light weight is accumulated, has in the field such as unmanned, digitalized city and topography and geomorphology measurement and widely should
Use prospect.
Laser radar obtains the cloud data of imaging by light beam scanning and synchronic distance measurement, therefore laser beam flying is
One of core link of laser radar system design.The limitations such as volume is big, power consumption is high, speed is slow be present in traditional vibration mirror scanning
Property, the appearance of MEMS micromirror technology provides newly for the solution miniaturization of laser beam two-dimensional high speed scanning system, low power dissipation design
Thinking, but the reflecting surface size of MEMS micromirror is smaller, and this brings to design of laser alignment scanning optical transmitting system
Very big technical difficulty.Number of patent application 2016103089919 (application publication number CN 105807421A) reports a kind of flat
The angle magnified sweep optical system of row light outgoing, it is by positive lens, MEMS micromirror and negative lens group into solving micro- based on MEMS
The problem of Laser Radar Scanning angle of mirror is small, it passes through negative behind the positive lens and MEMS micromirror that are arranged on before MEMS micromirror
Lens form a Galilean telescope, and negative lens focal length is much smaller than positive lens, and this light channel structure may be only available for being emitted
The preferable gas of beam collimation or Solid State Laser source, it is difficult to it is larger and the semiconductor laser light source of astigmatism be present to be applied to the angle of divergence
Collimated scanning transmitting, although the above-mentioned light path of what is more important realizes putting for scanning angle by Galilean telescope structure
Greatly, solve the problems, such as that MEMS micromirror scan angle is small, but it greatly sacrifices the collimation performance of laser transmitting light beam, by
The dispersion angle of the laser beam of above-mentioned light path transmitting by much larger than from laser emitting when the angle of divergence, this does not meet laser radar
Application conditions.In addition, MEMS micromirror scan when relaying picture point composition be a curved surface, this will cause MEMS micromirror to deviate
During sweep balance position there is certain parallax (picture point of positive lens and the focus of negative lens are misaligned) in Galilean telescope, from
And extreme influence finally launches the collimation performance of light beam.In fact, with the development of MEMS micromirror technology, light beam scanning angle model
Can be reached by enclosing scope by ± 15 °, and therefore, the covering of scanning angle has not been problem, and designs one kind and can be suitably used for passing
The hair of the laser with high collimating effect based on MEMS micromirror two-dimensional scan of system solid, gas laser and semiconductor laser
Penetrate the problem of optical system is in the urgent need to address.
The content of the invention
It is an object of the invention to provide a kind of MEMS micromirror two-dimensional scan collimation transmitting optical system for laser radar
System.
The technical solution for realizing the object of the invention is：A kind of MEMS micromirror two-dimensional scan for laser radar collimates
Optical transmitting system, including the compensation of pulsed laser diode, the astigmatism microscope group that disappears, optical beam transformation microscope group, MEMS micromirror, image point position
Microscope group, collimation object microscope group and MEMS micromirror drive circuit, the laser of pulsed laser diode transmitting is successively by the astigmatism microscope group that disappears
MEMS micromirror reflecting surface is reached with optical beam transformation microscope group, MEMS micromirror carries out angle pendulum under the control of MEMS micromirror drive circuit
Dynamic to form laser scanning face, the light beam in laser scanning face is realized by image point position compensation microscope group and collimation object microscope group again to be collimated out
Penetrate.
Compared with prior art, its remarkable advantage is the present invention：1) invention introduces the astigmatism microscope group supplement semiconductor that disappears
Laser launches the astigmatism problem of light beam, on the one hand improves the beam quality of transmitting laser beam, on the other hand improves transmitting
The coupling efficiency of optical system；2) semiconductor laser beam of the big angle of divergence is transformed to weak meeting by the present invention by optical beam transformation microscope group
The light beam of poly- (small convergent angle) is matched with the reflecting surface of MEMS micromirror, considerably reduces light beam scanning to MEMS micromirror mirror
The requirement of face size；3) invention introduces image point position to compensate microscope group, and MEMS micro mirrors are scanned to the curved surface picture point to be formed
Plane picture point is transformed into, the mismatch problems of light path, ensure that MEMS micromirror when effectively deviateing equilbrium position supplemented with MEMS micromirror
Launch the collimation of light beam in scanning process；4) emergent light is being ensured as collimation object microscope group invention introduces positive lens groups
While beam collimation, it can flexibly change the scanning field of view angle of system by changing positive lens groups focal length.
Brief description of the drawings
Fig. 1 is the structural representation of optical system of the present invention.
Fig. 2 is optical beam transformation microscope group principle schematic.
Fig. 3 is the angle amplification principle schematic diagram of system.
Fig. 4 be embodiment 1 non-sequence pattern under laser disappear astigmatism light path ZEMAX analogous diagrams, wherein (a) is fast axle side
To (i.e. perpendicular to the in-plane of laser diode light-emitting junction), (b) is slow-axis direction (i.e. parallel to laser diode light-emitting junction
In-plane).
Fig. 5 be embodiment 1 non-sequence pattern under laser emitting light beam ray tracing figure (a) without anastigmat
Group, (b) pass through anastigmat group.
Fig. 6 is the sequence pattern part light path ZEMAX analogous diagrams of embodiment 1.
Embodiment
The present invention will be further described with implementation steps below in conjunction with the accompanying drawings.
The present invention is that a kind of MEMS micromirror two-dimensional scan for imaging laser radar collimates optical transmitting system.With reference to figure
1, a kind of MEMS micromirror two-dimensional scan for imaging laser radar of the present invention collimates optical transmitting system, including high power pulse
Laser diode 1, the astigmatism microscope group 2 that disappears, optical beam transformation microscope group 3, MEMS micromirror 4, image point position compensation microscope group 5, collimation object microscope group 6
With MEMS micromirror drive circuit 7, pulsed laser diode 1 sets the astigmatism for the elimination semiconductor laser beam of astigmatism microscope group 2 that disappears afterwards,
Optical beam transformation microscope group 3 is set by the light beam that transforming laser is weak convergence, after optical beam transformation microscope group 3 after the astigmatism microscope group 2 that disappears
MEMS micromirror 4 is set, sets image point position to compensate microscope group 5 after MEMS micromirror 4, is set after image point position compensation microscope group 5 accurate
Straight objective lens 6 are launched laser beam datum, and MEMS micro mirrors drive circuit 7 is connected with MEMS micromirror 4, and control MEMS micromirror is carried out
High-precision angle swinging, realize laser radar light beam scan function.The laser that pulsed laser diode 1 is launched is by the astigmatism that disappears
Microscope group 2, optical beam transformation microscope group 3 reach the reflecting surface of MEMS micromirror 4, and MEMS micromirror 4 enters under the control of MEMS micromirror drive circuit 7
Row angle swinging forms laser scanning face, and the light beam in laser scanning face is by image point position compensation microscope group 5 and collimation object microscope group 6
Realize collimation outgoing.
The present invention is using high power pulsed laser diode as light source, and by disappearing, astigmatism microscope group 2 compensates semiconductor laser
The astigmatism of beam, the light beam that the transforming laser of a branch of big angle of divergence is weak convergence is then made by optical beam transformation microscope group 3, then existed
MEMS micromirror 4 is scanned under the control of MEMS micromirror drive circuit 7, is formed a picture point curved surface, is passed through image point position afterwards
Picture point curved surface is modified to picture point plane by compensation microscope group 5, finally makes picture point plane and the focal plane of collimation object microscope group 6 overlap, and is swashed
Light beam realizes parallel light emergence by collimation object microscope group 6.
In order to solve the eigen astigmatism of semiconductor laser, post lens are introduced as the astigmatism microscope group 2 that disappears, to the picture of laser
Dissipate and be modified.It is (i.e. flat parallel to laser beam slow-axis direction that the quick shaft direction light that semiconductor laser is sent first passes through bus
Row in the in-plane of laser diode light-emitting junction) post lens after become new convergent beam, the angle of divergence diminishes；Slow-axis direction
When light passes through post lens, light beam can shift, and eliminate astigmatism, but not influence the angle of divergence of light beam.Pass through the astigmatoscope that disappears
Group as, semiconductor laser emergent light approximation can be regarded to the certain laser beam of the angle of divergence that spot light is sent.
Optical beam transformation microscope group 3 makes the laser beam of the big angle of divergence be changed into the light beam of weak convergence, is illustrated in figure 2 optical beam transformation mirror
The principle schematic of group 3, the aplanasia cemented doublet of short focus can realize the function of the optical beam transformation microscope group.Light beam source point
Between one times focal length and two focus length, i.e. 0 ＜ x ＜ f, according to Newton's formula, there is xx '=ff ', and because this is
System is located in same medium (such as air), f=f ', and derivation can obtain x ' ＞ f, and the angle of divergence of outgoing reduces, and realizes optical beam transformation
Purpose.
For the center of MEMS scanning micro-mirrors 4, (i.e. image point position compensates microscope group 5 and arrives MEMS the focus of image point position compensation microscope group 5
The distance of scanning micro-mirror 4 is the focal length that image point position compensates microscope group 5), it is ensured that chief ray parallel optical axis is emitted, and is passed through simultaneously
The scanning light beam that MEMS micromirror 4 reflects compensates microscope group 5 by image point position, to rotating the picture point curved surface formed by MEMS micromirror 4
It is modified.Overlapped through the image point position compensation revised picture point plane of microscope group 5 with the focal plane of collimation object microscope group 6, laser beam
Collimated objective lens 6, realize parallel light emergence.The angle amplification principle of system using central ray as shown in figure 3, represent laser
Beam, the focal length of image point position compensation microscope group 5 is f2, the focal length of collimation object microscope group 6 is f3.MEMS scanning angles θi, collimation object microscope group
The output angle θ of the light of 6 outgoingoutMeet h=tan θ with picture point height h of the light on lensi·f2=tan θ out·f3, because
The angular magnification of this system
Embodiment 1：
The specific design of each several part is as follows in the present embodiment：
Laser for OSARM companies model SPLLL90/3 semiconductor laser, operation wavelength 905nm, in slow axis
Angle of divergence θ on (parallel to junction plane) direction∥=15 °, the angle of divergence θ on fast axle (perpendicular to junction plane) direction⊥=
30°。
The astigmatism microscope group 2 that disappears is post lens, its bus lights parallel to laser beam slow-axis direction parallel to laser diode
The in-plane of knot, post lens detail parameters are：Lens material BK7, width 4mm, high 6mm, thickness 4mm, curvature of curved surface 12mm,
It is 8mm with laser light source distance, according to above-mentioned parameter by ZEMAX non-sequence mode simulation light paths as shown in figure 4, semiconductor
The quick shaft direction light that laser is sent angle of divergence after post lens diminishes (such as Fig. 4 a)；The angle of divergence of slow-axis direction light does not have
Change (such as Fig. 4 b).The ray tracing figure of laser emitting light beam is as shown in figure 5, to compare Fig. 5 (a) (b) visible by the picture that disappears
Lens group is dissipated, the angle of divergence on laser emitting beam fast axis direction has obtained effective limitation, can go out semiconductor laser
The emergent light that light approximation regards spot light as is penetrated, the angle of divergence is 2 α=15 °, by sequence pattern come design subsequent light path.
The lens of optical beam transformation microscope group 3 are aplanatic short focus cemented doublet, relative aperture D/f=1/2, focal length f
=6mm, then as shown in ZEMAX analogous diagrams, three curvature of curved surface of cemented doublet be followed successively by 3.55mm, 2.63mm,
7.84mm, lens thickness are followed successively by 1.19mm, 0.3mm lens material and are followed successively by BK7, SF5.Optical beam transformation microscope group 3 swashs with equivalent
Distance is 6.1mm between light source.
The parameter of MEMS micromirror 4 is：Effective minute surface size 2mm, mechanical scanning angle ± 5 °, i.e., the scanning range not expanded before angle
It it is ± 10 °, normal during 4 equilbrium position of MEMS micromirror and the angle in incident light axis direction are 45 °.MEMS micromirror 4 becomes with light beam
Distance is 15mm between changing microscope group 3.MEMS micromirror drive circuit 7 is kernel control chip around fpga chip, as Altera is public
The Cyclone Series FPGA development board DE2-115 of department, carry out design driven circuit.
Image point position compensation microscope group 5 is a biconvex lens, focal length f=13mm, aperture of lens 3.6mm, the two of lens
Individual curvature of curved surface is followed successively by 45.77mm, 3.75mm, lens thickness 3.6mm, lens material BK7.The lens and optical beam transformation mirror
Group the distance between 3 is 10mm.
Collimation object microscope group 6 is a planoconvex spotlight, focal length f=8mm, aperture of lens 6mm, two curvature of curved surface of lens
It is followed successively by 5.07mm, Infinity, lens thickness 3.6mm, lens material BK7.The lens and image point position compensation microscope group 5 it
Between distance be 18.8mm.
The design parameter design of embodiment Sequence light path is as shown in table 1, and light path simulated effect is as shown in fig. 6, a branch of
The laser beam of the big angle of divergence is transformed to the light beam of weak convergence by optical beam transformation microscope group 3, then is reflected by MEMS micromirror 4, afterwards
Image point position compensation microscope group 5 and collimation object microscope group 6 are passed sequentially through, realizes parallel light emergence.Wherein, because MEMS micromirror is in work
Need to be swung during work, so being designed using multiplet (Multi-Configuration) MEMS micromirror, choose
0 ° and ± 2 ° of the equilbrium position of MEMS micromirror, ± 5 ° of this 5 positions.
The design parameter of table 1MEMS micro mirror scanning systems
| Surf | Type | Radius | Thickness | Glass | Diameter |
| 1 | STANDARD | Infinity | 6.1 | 0 | |
| 2 | STANDARD | 3.55 | 1.19 | BK7 | 3 |
| 3 | STANDARD | -2.63 | 0.3 | SF5 | 3 |
| 4 | STANDARD | -7.84 | 15 | 3 | |
| 5 | STANDARD | Infinity | -10 | MIRROR | 2 |
| 6 | STANDARD | -45.77 | -3.75 | BK7 | 3.6 |
| 7 | STANDARD | 7.58 | -18.8 | 4 | |
| 8 | STANDARD | -5.07 | -2 | BK7 | 6 |
Scan angle enlargement ratio is simulated after system emulation and theoretical scan angle enlargement ratio is as shown in table 2, according to above point
Analysis understands theoretical scan angle enlargement ratioIn the present embodiment, the theoretical value K=1.625 of scan angle enlargement ratio,
θ is measured to obtain according to the calculating (as shown in Figure 6) of the simulated effect figure of light pathout=± 14.4 °, scan angle enlargement ratio after emulation
Analogue value K=1.44, the results showed that：The theoretical value of scan angle enlargement ratio meets well with the analogue value.
The scan angle enlargement ratio of table 2
Claims (6)
1. a kind of MEMS micromirror two-dimensional scan for laser radar collimates optical transmitting system, it is characterised in that including pulse
Laser diode (1), the astigmatism microscope group that disappears (2), optical beam transformation microscope group (3), MEMS micromirror (4), image point position compensation microscope group (5),
Collimation object microscope group (6) and MEMS micromirror drive circuit (7), the laser of pulsed laser diode (1) transmitting is successively by the astigmatism that disappears
Microscope group (2) and optical beam transformation microscope group (3) reach MEMS micromirror (4) reflecting surface, and MEMS micromirror (4) is in MEMS micromirror drive circuit
(7) angle swinging is carried out under control and forms laser scanning face, the light beam in laser scanning face is again by image point position compensation microscope group
(5) and collimation object microscope group (6) realizes collimation outgoing.
2. the MEMS micromirror two-dimensional scan collimation optical transmitting system for imaging laser radar as claimed in claim 1, its
It is characterised by, the astigmatism microscope group that disappears (2) is cylindrical mirror, and its bus is parallel to laser beam slow-axis direction.
A kind of 3. MEMS micromirror two-dimensional scan collimation transmitting optical system for imaging laser radar as claimed in claim 1
System, it is characterised in that optical beam transformation microscope group (3) is aplanatic lens group, and the light beam source point by the astigmatism microscope group (2) that disappears is located at light
One times of Shu Bianhuan microscope groups (3) is between focal length and two focus length.
4. the MEMS micromirror two-dimensional scan collimation optical transmitting system for imaging laser radar as claimed in claim 1, its
It is characterised by, normal of the MEMS micromirror (4) at equilbrium position is 45 ° with incident light axis angular separation.
5. the MEMS micromirror two-dimensional scan collimation optical transmitting system for imaging laser radar as claimed in claim 1, its
It is characterised by, the distance of image point position compensation microscope group (5) to MEMS scanning micro-mirrors (4) compensates Jiao of microscope group (5) for image point position
Away from.
6. the MEMS micromirror two-dimensional scan collimation optical transmitting system for imaging laser radar as claimed in claim 1, its
It is characterised by, is overlapped through image point position compensation microscope group (5) revised picture point plane with the focal plane of collimation object microscope group (6).
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Cited By (15)
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| CN108226901A (en) * | 2018-02-06 | 2018-06-29 | 北京万集科技股份有限公司 | Laser radar optical system |
| CN108710136A (en) * | 2018-06-19 | 2018-10-26 | 南京华讯方舟通信设备有限公司 | A kind of three-dimensional imaging laser radar launcher |
| CN109085600A (en) * | 2018-08-21 | 2018-12-25 | 南京华讯方舟通信设备有限公司 | A kind of MEMS scanning laser radar and scan method |
| CN109444848A (en) * | 2018-10-25 | 2019-03-08 | 上海禾赛光电科技有限公司 | Scanning means and its scan method, laser radar |
| CN110275177A (en) * | 2019-06-10 | 2019-09-24 | 深圳市速腾聚创科技有限公司 | Solid-state laser radar, structure and its control method |
| CN110736974A (en) * | 2019-12-03 | 2020-01-31 | 中国科学院长春光学精密机械与物理研究所 | all-solid-state laser radar scanning light source and all-solid-state laser radar |
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| CN111819462A (en) * | 2018-03-08 | 2020-10-23 | 松下知识产权经营株式会社 | Laser radar |
| CN111819462B (en) * | 2018-03-08 | 2024-04-16 | 松下知识产权经营株式会社 | Laser radar |
| CN108710136A (en) * | 2018-06-19 | 2018-10-26 | 南京华讯方舟通信设备有限公司 | A kind of three-dimensional imaging laser radar launcher |
| CN108710136B (en) * | 2018-06-19 | 2024-01-05 | 国蓉科技有限公司 | Three-dimensional imaging laser radar transmitting device |
| CN109085600A (en) * | 2018-08-21 | 2018-12-25 | 南京华讯方舟通信设备有限公司 | A kind of MEMS scanning laser radar and scan method |
| CN111263898A (en) * | 2018-09-30 | 2020-06-09 | 深圳市大疆创新科技有限公司 | Light beam scanning system, distance detection device and electronic equipment |
| CN109444848A (en) * | 2018-10-25 | 2019-03-08 | 上海禾赛光电科技有限公司 | Scanning means and its scan method, laser radar |
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