CN107230585B - Phase transformation drive-type micro-machinery switch based on vanadium dioxide - Google Patents
Phase transformation drive-type micro-machinery switch based on vanadium dioxide Download PDFInfo
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- CN107230585B CN107230585B CN201710548163.7A CN201710548163A CN107230585B CN 107230585 B CN107230585 B CN 107230585B CN 201710548163 A CN201710548163 A CN 201710548163A CN 107230585 B CN107230585 B CN 107230585B
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- pedestal
- movable beam
- vanadium dioxide
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- fixed electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
Abstract
The invention discloses a kind of phase transformation drive-type micro-machinery switch based on vanadium dioxide, comprising: pedestal and movable beam, the pedestal are equipped with fixed electrode；The movable beam is connected on the pedestal and the movable beam is equipped with float electrode corresponding with the fixed electrode position, wherein, the at least partly described movable beam is made of vanadium dioxide material in the vanadium dioxide material phase transformation, deformation occurs, so that the float electrode is connected to or disconnects with the fixed electrode.Micro-machinery switch according to an embodiment of the present invention, can use the phase transition process of vanadium dioxide material, deformation occurs that float electrode is made to be connected to or disconnect with fixed electrode, to change the on off operating mode of micro-machinery switch, it can not only guarantee longer working life, biggish driving force and preferable mechanical stability, and have many advantages, such as simple and compact for structure, good mechanical property, have a wide range of application.
Description
Technical field
The present invention relates to Mechanical switching devices technical fields, drive more particularly, to a kind of phase transformation based on vanadium dioxide
Dynamic formula micro-machinery switch.
Background technique
In order to which micro-machinery switch to be integrated into low voltage circuit extensively, need to guarantee that the driving voltage of micro-machinery switch is most
It may be low.The micro-machinery switch of low driving voltage in the related technology, the driving force and working life of switch are often unable to satisfy
Practical application.
Summary of the invention
The discovery of following facts and problem and understanding are made the present invention is based on present inventor: in the related technology
Micro-machinery switch, based on traditional driving principle, in order to guarantee the lower driving voltage of micro-machinery switch, some is by subtracting
Gadget volume reduces driving voltage, and some reduces driving voltage by reducing the rigidity of structure, some is then by reducing electricity
Interpolar is away from reducing driving voltage.
But present inventor is had found by largely studying and testing, using the micromechanics of above-mentioned improved method
Switch, is difficult to take into account the working life of driving voltage and micro-machinery switch, is unable to satisfy practical application.
The present invention is directed at least solve one of the technical problems existing in the prior art.For this purpose, the present invention proposes a kind of base
In the phase transformation drive-type micro-machinery switch of vanadium dioxide, which can be occurred using the phase transition process of vanadium dioxide material
Deformation changes the on off operating mode of micro-machinery switch, and can guarantee biggish driving force, preferable mechanical stability and compared with
Long working life also has many advantages, such as simple and compact for structure, good mechanical property, has a wide range of application.
Phase transformation drive-type micro-machinery switch according to an embodiment of the present invention based on vanadium dioxide, comprising: pedestal and movable
Beam, the pedestal are equipped with fixed electrode；The movable beam be connected on the pedestal and the movable beam be equipped with it is described
Fix the corresponding float electrode of electrode position, wherein at least partly described movable beam is made of vanadium dioxide material described
Deformation occurs when vanadium dioxide material phase transformation, so that the float electrode is connected to or disconnects with the fixed electrode.
Phase transformation drive-type micro-machinery switch according to an embodiment of the present invention based on vanadium dioxide, setting is fixed on the base
Electrode, by movable beam connection on the base, float electrode is located in movable beam, by will at least partly movable beam be set as by
Vanadium dioxide material is made, and can use the phase transition process of vanadium dioxide material, deformation occurs connects float electrode and fixed electrode
On-off is opened, to change the on off operating mode of micro-machinery switch, can not only guarantee longer working life, biggish driving force and
Preferable mechanical stability, and have many advantages, such as simple and compact for structure, good mechanical property, have a wide range of application.
In addition, the phase transformation drive-type micro-machinery switch according to an embodiment of the present invention based on vanadium dioxide can also have as
Under additional technical characteristic:
According to some embodiments of the present invention, the movable beam includes the film of thin film or multiple superposed, wherein extremely
Few one layer of film is vanadium dioxide material film.
Optionally, the vanadium dioxide material film be vanadium dioxide film or doped with chromium, tungsten, gallium, aluminium, iron, titanium,
The vanadium dioxide material film of at least one of niobium, molybdenum, rhenium, fluorine, hydrogen element.
According to some embodiments of the present invention, the end of the movable beam is connected with the pedestal, the float electrode position
At the displacement maximum point of the movable beam.
Optionally, the end of the movable beam is connected on the pedestal by connector.
Optionally, the movable beam be configured to the cantilever beam structure of single clamped point, how clamped point cantilever beam structure or
The clamped bridge membrane structure of multiterminal.
According to some embodiments of the present invention, the fixed electrode is set to the surface of the neighbouring movable beam of the pedestal
On, the float electrode is set on the surface of the neighbouring pedestal of the movable beam.
Optionally, the fixed electrode is made of the film that thin film or multilayer are stacked up and down, wherein far from the base
The film of seat is conductor material film, and the float electrode is made of the film that thin film or multilayer are stacked up and down, wherein far
Film from the movable beam is conductor material film.
According to some embodiments of the present invention, the fixed electrode is to be set side by side multiple, and the float electrode is located at
To be connected to or disconnect multiple fixed electrodes in the movable beam.
According to some embodiments of the present invention, the pedestal includes spaced first pedestal and the second pedestal, described
The surface of neighbouring second pedestal of first pedestal is equipped with the fixed electrode, and the movable beam is located at first pedestal
It is connected between second pedestal and with second pedestal, is set on the surface of neighbouring first pedestal of the movable beam
There is the float electrode.
According to some embodiments of the present invention, the pedestal includes spaced first pedestal and the second pedestal, described
The surface of neighbouring second pedestal of first pedestal is equipped with the first fixed electrode, and neighbouring described the first of second pedestal
The surface of pedestal is equipped with the second fixed electrode, the movable beam be located between first pedestal and second pedestal and with
First pedestal is connected with one of them in second pedestal, the surface of neighbouring first pedestal of the movable beam
It is equipped with the first float electrode, the surface of neighbouring second pedestal of the movable beam is equipped with the second float electrode, so that
The first fixed electrode and the first float electrode and the second fixation electrode in the second float electrode wherein one group be connected to and
Another group of disconnection.
Additional aspect and advantage of the invention will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the description of the embodiment in conjunction with the following figures
Obviously and it is readily appreciated that, in which:
Fig. 1 is the side view of the phase transformation drive-type micro-machinery switch based on vanadium dioxide according to some embodiments of the invention
Figure；
Fig. 2 is the vertical view of the phase transformation drive-type micro-machinery switch based on vanadium dioxide according to some embodiments of the invention
Figure, wherein the setting position for the Range Representation connector that virtual coil is shown；
Fig. 3 is the vertical view of the phase transformation drive-type micro-machinery switch based on vanadium dioxide of other embodiments according to the present invention
Figure, wherein the setting position for the Range Representation connector that virtual coil is shown；
Fig. 4 is the side view of the phase transformation drive-type micro-machinery switch based on vanadium dioxide of other embodiments according to the present invention
Figure；
Fig. 5 is the side view of the phase transformation drive-type micro-machinery switch based on vanadium dioxide of still other embodiments according to the present invention
Figure；
Fig. 6 is the side view of the phase transformation drive-type micro-machinery switch based on vanadium dioxide of still other embodiments according to the present invention
Figure.
Appended drawing reference:
100: micro-machinery switch；
1: pedestal；11: fixed electrode；110: the first pedestals；120: the second pedestals；111: the first fixed electrodes；112: the
Two fixed electrodes；
2: movable beam；21: float electrode；211: the first float electrodes；212: the second float electrodes；
3: connector.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " center ", " length ", "upper", "lower", "left", "right" etc.
The orientation or positional relationship of instruction is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of the description present invention and letter
Change description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific orientation construct and
Operation, therefore be not considered as limiting the invention.In the description of the present invention, unless otherwise indicated, the meaning of " multiple "
It is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
The phase transformation drive-type micromechanics according to an embodiment of the present invention based on vanadium dioxide is described below with reference to Fig. 1-Fig. 6 to open
Close 100.Wherein, up and down direction and left and right directions respectively refer to the up and down direction illustrated and are described for left and right directions, are
Convenient for description and understand, phase transformation drive-type micro-machinery switch 100 based on vanadium dioxide is hereinafter referred to as micromechanics and is opened
Close 100.
As shown in figs 1 to 6, the phase transformation drive-type micro-machinery switch 100 according to an embodiment of the present invention based on vanadium dioxide
It include: pedestal 1 and movable beam 2, pedestal 1 can be used as the bearing part bearing movable beam 2 of micro-machinery switch 100, set on pedestal 1
There is fixed electrode 11.
As shown in Figure 1 and Figure 4, movable beam 2 is connected on pedestal 1, and can be equipped in movable beam 2 and fixed electrode 11
The corresponding float electrode 21 in position.In other words, the mechanical movable structure of micro-machinery switch 100 is beam, and movable beam 2 is equipped with activity
Electrode 21, float electrode 21 is corresponding with fixed 11 position of electrode, i.e., float electrode 21 is located in movable beam 2 and fixed 11 phase of electrode
Pair region.For example, in example as shown in Figure 1 and Figure 4, in the lateral direction, float electrode 21 and fixed 11, electrode
Correspondence is set, so that float electrode 21 is connected to fixed electrode 11.
Wherein, at least partly movable beam 2 is made of vanadium dioxide material, shape occurs in vanadium dioxide material phase transformation
Become, so that float electrode 21 is connected to or disconnects with fixed electrode 11.That is, a part of movable beam 2 can be by vanadium dioxide material
Material, which is made, or movable beam 2 is whole to be made of vanadium dioxide material.I.e. movable beam 2 includes vanadium dioxide material, vanadium dioxide
Driving material of the material as movable beam 2.
Vanadium dioxide material can be undergone phase transition, and vanadium dioxide material can be with deformation occurs, by titanium dioxide in phase transition process
Movable beam 2 made of vanadium material, moves when vanadium dioxide material is undergone phase transition, thus float electrode 21 and fixed electrode
Contact relation between 11 can be changed, when float electrode 21 and fixed electrode 11 are separately connected into circuit, 21 He of float electrode
The break-make situation of circuit where fixed electrode 11 is changed.Moreover, the phase transformation of vanadium dioxide material is reversible, so as to logical
The phase transition process of control vanadium dioxide material is crossed to switch to control the on-off of micro-machinery switch 100, it is simple and compact for structure, convenient for control
System.
Also, the phase transformation of vanadium dioxide material has various features: phase transition temperature is low, and what phase transition process generated should become larger,
Good mechanical properties such as Young's modulus, Poisson's ratio, and invertibity phase transformation is often, so as to so that micro-machinery switch 100 compared with
Under low driving voltage, guarantee biggish driving force, guarantee preferable mechanical stability and longer working life, can also mention
The mechanical performance of high micro-machinery switch 100.
Compared in the related technology by reduce device volume, reduce the rigidity of structure and reduce electrode spacing come reduce driving
The switch of voltage, the micro-machinery switch 100 of the embodiment of the present invention can take into account low driving voltage demand and the longer work longevity
Life demand, thus micro-machinery switch 100 can be integrated into low voltage circuit, meet the application demand of low voltage circuit.
In addition, the phase transformation of vanadium dioxide material can be driven by environmental stimulis such as Joule heat, temperature, laser, i.e. vanadium dioxide
The phase transformation of material can be occurred by reasons such as current switching, temperature change, laser switches, and therefore, micro-machinery switch 100 not only can be with
It suitable for electric-controlled switch, can be applicable to the other applications such as temperature detect switch (TDS), remote laser control switch, have and have a wide range of application
The advantages of.
Therefore, the phase transformation drive-type micro-machinery switch 100 according to an embodiment of the present invention based on vanadium dioxide, in pedestal 1
The fixed electrode 11 of upper setting, movable beam 2 is connected on pedestal 1, float electrode 21 is located in movable beam 2, by will at least
Some movable beam 2 is set as being made of vanadium dioxide material, and can use the phase transition process of vanadium dioxide material, deformation occurs makes
Float electrode 21 is connected to or disconnects with fixed electrode 11, to change the on off operating mode of micro-machinery switch 100, can not only guarantee compared with
Long working life, biggish driving force and preferable mechanical stability, and have simple and compact for structure, good mechanical property,
The advantages that having a wide range of application.
According to some embodiments of the present invention, movable beam 2 may include one or more layers stacked film, wherein at least
Thin film is vanadium dioxide material film.That is, movable beam 2 includes at least one layer of vanadium dioxide material film.As a result,
Convenient for manufacturing or assembling, manufacturing cost can be saved, or improve assembly efficiency, while vanadium dioxide material can also be conducive to and occurred
Phase transformation acts convenient for micro-machinery switch 100, other performances such as switch sensitivity can be improved.
Optionally, vanadium dioxide material film can be for vanadium dioxide film or doped with chromium (Cr), tungsten (W), gallium (Ga), aluminium
(Al), the vanadium dioxide of at least one of iron (Fe), titanium (Ti), niobium (Nb), molybdenum (Mo), rhenium (Re), fluorine (F), hydrogen (H) element
Material film.That is, vanadium dioxide material film can be only made of vanadium dioxide, alternatively, vanadium dioxide material film
It can be made of the vanadium dioxide added with one of chromium, tungsten, gallium, aluminium, iron, titanium, niobium, molybdenum, rhenium, fluorine, hydrogen or multiple element.
It is moved in this way, can use deformation driving movable beam 2 of the vanadium dioxide material in phase transition process, and then changes micro-machinery switch
100 on off operating mode.
According to some embodiments of the present invention, as shown in Figure 1 and Figure 4, the end of movable beam 2 can be connected with pedestal 1, and
Float electrode 21 can be located at the maximum displacement point of movable beam 2.In other words, it can be set near the displacement maximum point of movable beam 2
Set float electrode 21.For example, the left end of movable beam 2 is connected with pedestal 1 in example as shown in Figure 1, vanadium dioxide material phase
When change, movable beam 2 generates displacement relative to left end, and the right end of movable beam 2 is displacement maximum point, and float electrode 21 is located at movable beam
2 right end；And in the example depicted in fig. 4, the left end of movable beam 2 and right end are connected with pedestal 1 respectively, vanadium dioxide material phase
When change, the left end of movable beam 2 and right end are not subjected to displacement, and the middle section of movable beam 2 generates displacement, and the middle part of movable beam 2 is
It is displaced maximum point, float electrode 21 is located at the middle part of movable beam 2.It is easy to connect to simple and compact for structure, and by flexible lamp
Pole 21 is located at the displacement maximum point of movable beam 2, can be improved the stability and reliability of micro-machinery switch 100, while can be with
Promote the sensitivity of micro-machinery switch 100 further.
Optionally, as shown in Figure 1 and Figure 4, the end of movable beam 2 can be connected on pedestal 1 by connector 3, can be with
Understand, connector 3 can be the anchoring area of movable beam 2, that is, movable beam 2 is connected by anchoring area with pedestal 1.Pedestal 1 as a result,
It can process with movable beam 2, and be connected by connector 3 respectively, easy to process, integrated level is high.
According to some embodiments of the present invention, movable beam 2 may be structured to the cantilever beam knot of single clamped point or how clamped point
Structure.In the example shown in fig. 2, movable beam 2 is the cantilever beam structure of single clamped point, wherein the left end of movable beam 2 and pedestal
1 is connected, and right end is hanging, then movable beam 2 is configured to the clamped cantilever beam in left end；And in example as shown in Figure 3, movable beam 2
It is configured to the cantilever beam structure of two clamped points, wherein the U-shaped for being formed as being open to the left of movable beam 2, movable beam 2 are opened
Mouth end is connected with pedestal 1 respectively, and right end is hanging, then movable beam 2 is configured to the cantilever beam structure of the clamped how clamped point in left end.By
This, micro-machinery switch 100 it is rationally distributed, it is simple and compact for structure conducive to making, the mechanical performance of movable beam 2 can also be improved.
Other embodiments according to the present invention, as shown in figure 4, movable beam 2 can be configured to the clamped bridge film knot of multiterminal
Structure.That is, movable beam 2 can be configured to the bridge shape structure that both ends are fixedly supported.Specifically, as shown in Figure 4
In example, the left and right ends of movable beam 2 are connected with pedestal 1, and the both ends of movable beam 2 are clamped in pedestal 1, and movable beam 2
Middle part is hanging, forms bridge shape structure, and float electrode 21 is located at the middle part of movable beam 2, fixes electrode 11 at this time and is located on pedestal 1 simultaneously
Corresponding in position with float electrode 21, deformation occurs when vanadium dioxide material phase transformation in movable beam 2, can drive movable beam 2
Movement changes the on off operating mode of fixed electrode 11 and float electrode 21, realizes switch.So as to effectively improve movable beam 2
Stability, so that the stability of micro-machinery switch 100 and reliability are promoted.
According to some embodiments of the present invention, living on the surface for the neighbouring movable beam 2 that fixed electrode 11 can be set to pedestal 1
On the surface for the neighbouring pedestal 1 that moving electrode 21 can be set to movable beam 2.In other words, fixed electrode 11 and float electrode 21 distinguish position
On the neighbouring mutual surface of pedestal 1 and movable beam 2.For example, movable beam 2 connects in example as shown in Figure 1 and Figure 4
In the top of pedestal 1, fixed electrode 11 is set to the upper surface of pedestal 1, and float electrode 21 is set to the lower surface of movable beam 2, fixed
Electrode 11 and float electrode 21 are neighbouring each other and to be oppositely arranged.Both it had been conducive to micro-machinery switch 100 as a result, to act, and had realized on-off control
System, is also convenient for fixed electrode 11 and float electrode 21 is separately connected into circuit.
Optionally, fixed electrode 11 can be made of the film that thin film or multilayer are stacked up and down, wherein far from pedestal 1
Film be conductor material film.Optionally, float electrode 21 is made of the film that thin film or multilayer are stacked up and down, wherein
Film far from movable beam 2 is conductor material film.That is, fixed electrode 11 and float electrode 21 are respectively by one layer or more
The neighbouring mutual thin film of layer film composition, fixed electrode 11 and float electrode 21 is conductor material film, such as metal
Material film.Thus, it is possible to improve the structural stability of fixed electrode 11 and float electrode 21, and vanadium dioxide can be reduced
To the influence of fixed electrode 11 and float electrode 21 during material phase transformation, when reducing fixed electrode 11 and the conducting of float electrode 21
Contact resistance, guarantee micro-machinery switch 100 Reliability of Microprocessor, prolong the service life.
According to some embodiments of the present invention, fixed electrode 11 can be to be set side by side multiple, and float electrode 21 may be provided in
In movable beam 2, to be connected to or disconnect multiple fixed electrodes 11.So as to which the structure of micro-machinery switch 100 is more diversified,
To be applicable in different connection demands.For example, two fixed electrodes 11 side by side and are spaced apart, and float electrode 21 can be with
It is one, when the vanadium dioxide material of movable beam 2 is undergone phase transition, float electrode 21 is contacted with two fixed electrodes 11 simultaneously, is made
Two fixed electrodes 11 are connected to, so that controlled circuit be connected.At this point it is possible to understand, two fixed electrodes 11 are respectively connected to
Circuit, and float electrode 21 does not access circuit, float electrode 21 is only used as bridgeware, for connecting two fixed electrodes 11 each other
On-off is opened.
Certainly, structure of the invention is without being limited thereto, and the quantity of fixed electrode 11 and float electrode 21 is not limited to above description,
It can also be other quantity, for example, fixed electrode 11 can be three, float electrode 21 can be two.The technology of this field
Personnel can carry out adaptability setting in conjunction with description above on the catenation principle of available circuit, this technology for this field
It will be understood by for people, details are not described herein.
In further embodiments, as shown in figure 5, pedestal 1 may include spaced first pedestal 110 and the second base
Seat 120, wherein can be equipped on the surface (such as upper surface shown in fig. 5) of neighbouring second pedestal 120 of the first pedestal 110
Fixed electrode 11, movable beam 2 can be located between the first pedestal 110 and the second pedestal 120, and movable beam 2 can be with the second base
Seat 120 is connected, and can be equipped with float electrode on the surface (lower surface i.e. shown in fig. 5) of neighbouring first pedestal 110 of movable beam 2
21.Micro-machinery switch 100 may be structured to tool there are two pedestal 1 and have the structure of one group of electrode pair as a result, so as to improve
The structure diversity of micro-machinery switch 100, to adapt to different topology layout demands.
Still other embodiments according to the present invention, as shown in fig. 6, pedestal 1 may include spaced first pedestal 110
With the second pedestal 120, the first pedestal 110 can fix electrode 111 equipped with first on the surface of the second pedestal 120, the
The second fixed electrode 112 can be equipped on the surface of neighbouring first pedestal 110 of two pedestals 120, movable beam 2 is located at the first pedestal
110 and second between pedestal 120, and movable beam 2 can be connected with one of them in the first pedestal 110 and the second pedestal 120,
The first float electrode 211, neighbouring second pedestal of movable beam 2 can be equipped on the surface of neighbouring first pedestal 110 of movable beam 2
The second float electrode 212 can be equipped on 120 surface, so that the first fixed electrode 111 and the first float electrode 211 and second
Fixed electrode 112 in the second float electrode 212 wherein one group be connected to and another group of disconnection.In this way, micro-machinery switch 100 can
It is configured to single-pole double-throw switch (SPDT), the first fixed electrode 111 and the second fixed electrode 112 constitute non-moving end, and movable beam 2 constitutes dynamic
End, thus, it is possible to control two different circuit directions by a micro-machinery switch 100, that is to say, that one can be passed through
Micro-machinery switch 100 plays double-direction control, simple and compact for structure, and integrated level is high, can be with further expansion micro-machinery switch 100
The scope of application.
For example, in the example shown in fig. 6, the second pedestal 120 is located at 110 top of the first pedestal, movable beam 2 is connected to
Between first pedestal 110 and the second pedestal 120, the upper surface of the first pedestal 110 is equipped with the first fixed electrode 111, the second pedestal
120 lower surface is equipped with the second fixed electrode 112, and the lower surface of movable beam 2 is equipped with the first float electrode 211, movable beam 2 it is upper
Surface is equipped with the second float electrode 212, and movable beam 2 is connected with the second pedestal 120.When the vanadium dioxide material phase transformation of movable beam 2
When, deformation occurs for movable beam 2, and the first fixed electrode 111 and the first float electrode 211 and the second fixed electrode 112 and second are lived
In moving electrode 212 wherein one group can be connected to, another group of end is opened；And when the reverse phase transformation of the vanadium dioxide material of movable beam 2,
Reverse deformation occurs for movable beam 2, at this point, the first fixed electrode 111 and the first float electrode 211 and the second fixed electrode 112 with
Wherein one group of disconnection in second float electrode 212, another group of connection.
At this point, the first fixed electrode 111 can be manufactured on the first pedestal 110, and manufacture second is solid on the second pedestal 120
Fixed electrode 112, movable beam 2, the first float electrode 211 and the second float electrode 212, then by the first pedestal 110 and the second pedestal
120 are linked together by technique, such as bonding technology, form a complete micro-machinery switch 100.In order to guarantee micromechanics
Switch 100 can work normally, and improve reliability, the first pedestal 110 and the second pedestal 120 are relatively fixed, can be formed as one
A entirety can not relatively move.
It will be appreciated by those skilled in the art that the first pedestal 110 and the second pedestal 120 can also be in left and right directions
On be spaced apart.
Herein, it should be noted that the above phase transformation of the on off operating mode of two arrays of electrodes and vanadium dioxide material and inversely
The deformation directional correlation of movable beam 2 when phase transformation, those skilled in the art is in the base for understanding structure and working principle above
The factors such as working method, setting demand, space layout and the cost of controlled circuit can be comprehensively considered on plinth to movable beam 2
Deformation direction carries out adaptability setting, and the example of description above is not considered as limiting the invention.
Phase transformation drive-type micro-machinery switch 100 according to an embodiment of the present invention based on vanadium dioxide can be used for low-voltage electricity
Lu Zhong, but not limited to this.Other structures, connection relationship and the operation of micro-machinery switch 100 are for those of ordinary skill in the art
For be all it is known, be not detailed herein.
In processing, micro-machinery switch 100 can process different structure members respectively, then use (micro-) mounting technology,
Different structure members is combined into an entirety；Alternatively, micro-machinery switch 100 can also be designed according to resulting devices, first will
Different material layer stacked groups are combined, then by the unwanted material of the methods of etching, corrosion removal, are finally obtained required
Structure.Thus, it is possible to micro-machinery switch 100 is processed using a variety of methods, it is easily manufactured, cost can be reduced.
Certainly, the processing method of micro-machinery switch 100 is not limited to description above, and those skilled in the art is based on microcomputer
The structure of tool switch 100 can comprehensively consider the factors such as the accuracy of manufacture, cost in existing processing method, with choosing
Comparatively ideal method is taken to be processed.In view of micro Process and micro assemby technology for known to those skilled in the art, therefore, this
Invention repeats no more.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " illustrative examples ",
The description of " example ", " specific example " or " some examples " etc. means specific features described in conjunction with this embodiment or example, knot
Structure, material or feature are included at least one embodiment or example of the invention.In the present specification, to above-mentioned term
Schematic representation may not refer to the same embodiment or example.Moreover, specific features, structure, material or the spy of description
Point can be combined in any suitable manner in any one or more of the embodiments or examples.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that: not
A variety of change, modification, replacement and modification can be carried out to these embodiments in the case where being detached from the principle of the present invention and objective, this
The range of invention is defined by the claims and their equivalents.
Claims (8)
1. a kind of phase transformation drive-type micro-machinery switch based on vanadium dioxide characterized by comprising
Pedestal, the pedestal are equipped with fixed electrode；
Movable beam, the movable beam is connected on the pedestal and the movable beam is equipped with corresponding with the fixed electrode position
Float electrode, wherein at least partly described movable beam is made of vanadium dioxide material in the vanadium dioxide material phase transformation
When deformation occurs so that the float electrode is connected to or disconnects with the fixed electrode,
The fixed electrode is set on the surface of the neighbouring movable beam of the pedestal and protrudes from the surface of the pedestal, institute
Float electrode is stated on the surface of the neighbouring pedestal of the movable beam and protrudes from the surface of the movable beam,
The fixed electrode is made of the film that thin film or multilayer are stacked up and down, wherein the film far from the pedestal is to lead
Body material film, the float electrode is made of the film that thin film or multilayer are stacked up and down, wherein far from the movable beam
Film be conductor material film,
The movable beam includes the film of multiple superposed, wherein at least one layer of film is vanadium dioxide material film.
2. the phase transformation drive-type micro-machinery switch according to claim 1 based on vanadium dioxide, which is characterized in that described two
Vanadium oxide material film be vanadium dioxide film or doped in chromium, tungsten, gallium, aluminium, iron, titanium, niobium, molybdenum, rhenium, fluorine, hydrogen at least
A kind of vanadium dioxide material film of element.
3. the phase transformation drive-type micro-machinery switch according to claim 1 based on vanadium dioxide, which is characterized in that it is described can
The end of dynamic beam is connected with the pedestal, and the float electrode is located at the displacement maximum point of the movable beam.
4. the phase transformation drive-type micro-machinery switch according to claim 3 based on vanadium dioxide, which is characterized in that it is described can
The end of dynamic beam is connected on the pedestal by connector.
5. the phase transformation drive-type micro-machinery switch according to claim 3 based on vanadium dioxide, which is characterized in that it is described can
Dynamic beam is configured to the cantilever beam structure of single clamped point, the cantilever beam structure of how clamped point or the clamped bridge membrane structure of multiterminal.
6. the phase transformation drive-type micro-machinery switch according to claim 1 based on vanadium dioxide, which is characterized in that described solid
Fixed electrode is to be set side by side multiple, and the float electrode is located in the movable beam to be connected to or disconnect multiple fixed electricity
Pole.
7. the phase transformation drive-type micro-machinery switch according to claim 1 based on vanadium dioxide, which is characterized in that the base
Seat includes spaced first pedestal and the second pedestal, and the surface of neighbouring second pedestal of first pedestal is equipped with
The fixed electrode, the movable beam be located between first pedestal and second pedestal and with the second pedestal phase
Even, the surface of neighbouring first pedestal of the movable beam is equipped with the float electrode.
8. the phase transformation drive-type micro-machinery switch according to claim 1 based on vanadium dioxide, which is characterized in that the base
Seat includes spaced first pedestal and the second pedestal, and the surface of neighbouring second pedestal of first pedestal is equipped with
First fixed electrode, the surface of neighbouring first pedestal of second pedestal is equipped with the second fixed electrode, described movable
Beam be located between first pedestal and second pedestal and with wherein one in first pedestal and second pedestal
A to be connected, the surface of neighbouring first pedestal of the movable beam is equipped with the first float electrode, the movable beam it is neighbouring
The surface of second pedestal is equipped with the second float electrode, so that the described first fixed electrode and the first float electrode and second
Fixed electrode in the second float electrode wherein one group be connected to and another group of disconnection.
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| CN201710548163.7A CN107230585B (en) | 2017-07-06 | 2017-07-06 | Phase transformation drive-type micro-machinery switch based on vanadium dioxide |
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| CN107230585B true CN107230585B (en) | 2019-07-26 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1716492A (en) * | 2005-06-07 | 2006-01-04 | 北京邮电大学 | Integrated RF MEMS switch |
| CN102001616A (en) * | 2009-08-31 | 2011-04-06 | 上海丽恒光微电子科技有限公司 | Method of fabricating and encapsulating mems devices |
| CN102007559A (en) * | 2008-04-18 | 2011-04-06 | Nxp股份有限公司 | Tunable capacitor and switch using mems with phase change material |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6551071B2 (en) * | 2015-09-02 | 2019-07-31 | Tdk株式会社 | MEMS switch |
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2017
- 2017-07-06 CN CN201710548163.7A patent/CN107230585B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1716492A (en) * | 2005-06-07 | 2006-01-04 | 北京邮电大学 | Integrated RF MEMS switch |
| CN102007559A (en) * | 2008-04-18 | 2011-04-06 | Nxp股份有限公司 | Tunable capacitor and switch using mems with phase change material |
| CN102001616A (en) * | 2009-08-31 | 2011-04-06 | 上海丽恒光微电子科技有限公司 | Method of fabricating and encapsulating mems devices |
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| CN107230585A (en) | 2017-10-03 |
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