CN107092046A - A kind of high reflective mirror of wide spectrum - Google Patents
A kind of high reflective mirror of wide spectrum Download PDFInfo
- Publication number
- CN107092046A CN107092046A CN201710282344.XA CN201710282344A CN107092046A CN 107092046 A CN107092046 A CN 107092046A CN 201710282344 A CN201710282344 A CN 201710282344A CN 107092046 A CN107092046 A CN 107092046A
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- China
- Prior art keywords
- reflective mirror
- wide spectrum
- high reflective
- glass substrate
- reflecting layer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
- G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention discloses a kind of high reflective mirror of wide spectrum, it is characterised in that：The reflective mirror includes the substrate being made up of glass substrate, reflecting layer is provided with the glass substrate, the reflecting layer can improve the reflectivity of wavelength light between 190 1100nm.The present invention is to be combined using metal with deielectric-coating, pass through well-designed and special manufacturing process, its reflectivity of the reflective mirror being coated with is more than 88% from 190nm~1100nm average reflectances, ultraviolet and infrared reflection is improved intentionally, and the reflectance spectrum of reflective mirror is adjusted according to the spectrum photoelectric effect of receiver, so that the whole output integrated energy of spectral instrument reaches balance, the quality of instrument is improved.
Description
Technical field
The present invention relates to optical instrument and spectroanalysis instrument field, specifically a kind of high reflective mirror of wide spectrum is mainly used to
Improve the reflectivity from ultraviolet to the spectrum of infrared light.
Background technology
Scientific research is with being commonly used analytical instrument in real life, in many analytical instrument, such as：Spectrophotometer, be by
The light of complicated component is decomposed into the scientific instrument of spectrum line, it is desirable to which light source has from VUV to infrared spectrum (160nm-
3500nm), due to the light path system that the structural requirement of instrument must be constituted using grating beam splitting with multiple reflective mirrors, such as Fig. 2 institutes
Show.But replicas all at present and all very weak, the as shown in Figure 3 reflection spectrum curve of the ultraviolet of reflective mirror,
200nm reflectivity has 60%.Six reflective mirrors are had in Fig. 2 light path system, target is reached after six secondary reflections
Gross energy is (0.6)6=4.7%, this necessarily affects the quality of instrument.For that purpose it is necessary to the reflectivity of reflective mirror be improved, to improve
The quality of instrument.
The content of the invention
It is an object of the invention to solve the above problems there is provided a kind of high reflective mirror of wide spectrum, reflective mirror can be improved and existed
The reflectivity of 190nm~1100nm wavelength light, makes its output integrated energy loss very little after multiple reflections, and then improve
The quality of instrument.
In order to achieve the above object, the present invention is achieved by the following technical solutions：
The present invention provides a kind of high reflective mirror of wide spectrum, it is characterised in that：The reflective mirror includes being made up of glass substrate
Substrate, on the glass substrate be provided with reflecting layer, the reflecting layer can improve wavelength light between 190-1100nm
Reflectivity.
Further, the reflecting layer is made up of five layer material films.
Further, the second layer material film of five layer material film is identical with the material of the 4th layer material film.
Further, the material membrane is plated on the glass substrate by the method for physical coating.
Further, the thickness in the reflecting layer is less than the thickness of glass substrate.
Further, the material membrane be inorganic material film, by silica, alundum (Al2O3), magnesium fluoride, magnesia,
The mixture of hafnium oxide, metallic aluminium or these two or more materials is constituted.
The beneficial effects of the invention are as follows：The present invention is to be combined using metal with deielectric-coating, by well-designed and special
Manufacturing process, its reflectivity of the reflective mirror being coated with from 190nm~1100nm average reflectances be more than 88%, improve intentionally it is ultraviolet with
Infrared reflection, and the reflectance spectrum of reflective mirror is adjusted according to the spectrum photoelectric effect of receiver so that spectral instrument it is whole
Individual output integrated energy reaches balance, improves the quality of instrument.Fig. 4 is the reflected light for the reflective mirror that design is required according to user
Spectral curve, Fig. 5 is the reflection spectrum curve being actually coated with.The visible reflectivity at 200nm is about 93% from Fig. 4 and Fig. 5.
The gross energy that target is reached after six secondary reflections is (0.93)6=64.7%.From Fig. 3 it can be seen that energy is improved compared with Fig. 5
It is very big, improve the quality of instrument.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, may be used also
To obtain other accompanying drawings according to these accompanying drawings.
Fig. 1 is mirror construction schematic diagram of the present invention；
Fig. 2 is the overall light path system schematic diagram of existing spectrophotometer；
Fig. 3 is spectral reflectance curve figure when existing reflective mirror incidence angle is 45 °；
Fig. 4 is the spectral reflectance curve figure of calculating when reflective mirror incidence angle of the present invention is 45 °；
Fig. 5 is actual spectrum reflectance curves when reflective mirror incidence angle of the present invention is 45 °.
In Fig. 1：1- glass substrates, the material membranes of 2- first, the material membranes of 3- second, the material membranes of 4- the 3rd, the material membranes of 5- the 4th,
The material membranes of 6- the 5th.
Embodiment
With reference to the accompanying drawings and examples, the embodiment to the present invention is further described.Following examples are only
For clearly illustrating technical scheme, and it can not be limited the scope of the invention with this.
As shown in figure 1, the present invention provides a kind of high reflective mirror of wide spectrum, it is characterised in that：The reflective mirror is included by glass
The substrate 1 that glass substrate is constituted, provided with the reflecting layer being made up of five layer material films 2,3,4,5,6 on the glass substrate 1, wherein
Second layer material film 3 is identical with the material of the 4th layer material film 5, and the material membrane is plated in glass base by the method for physical coating
On plate 1, the reflecting layer can improve the reflectivity of wavelength light between 190-1100nm.
Further, the material membrane be inorganic material film, by silica, alundum (Al2O3), magnesium fluoride, magnesia,
The mixture of hafnium oxide, metallic aluminium or these two or more materials is constituted.
The present invention is to be combined using metal with deielectric-coating, and by well-designed and special manufacturing process, what is be coated with is reflective
Its reflectivity of mirror is more than 88% from 190nm~1100nm average reflectances, improves ultraviolet with infrared reflection intentionally, and according to connecing
Receive the spectrum photoelectric effect of device to adjust the reflectance spectrum of reflective mirror so that the whole output integrated energy of spectral instrument reaches
Balance, improves the quality of instrument.Fig. 4 is the reflection spectrum curve for the reflective mirror that design is required according to user, and Fig. 5 is actually to be coated with
Reflection spectrum curve.The visible reflectivity at 200nm is about 93% from Fig. 4 and Fig. 5.Mesh is reached after six secondary reflections
Target gross energy is (0.93)6=64.7%.Energy can be seen compared with Fig. 5 from Fig. 3 and improves very big, the matter of instrument is improved
Amount.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
God is with principle, and any modification, equivalent substitution and improvements made etc. should be included in the scope of the protection.
Claims (6)
1. a kind of high reflective mirror of wide spectrum, it is characterised in that：The reflective mirror includes the substrate being made up of glass substrate, described
Glass substrate is provided with reflecting layer, and the reflecting layer can improve the reflectivity of wavelength light between 190-1100nm.
2. the high reflective mirror of a kind of wide spectrum according to claim 1, it is characterised in that：The reflecting layer is by five layer material films
Composition.
3. the high reflective mirror of a kind of wide spectrum according to claim 2, it is characterised in that：The second layer of five layer material film
Material membrane is identical with the material of the 4th layer material film.
4. the high reflective mirror of a kind of wide spectrum according to Claims 2 or 3, it is characterised in that：The material membrane passes through physics
The method plating of plated film is on the glass substrate.
5. the high reflective mirror of a kind of wide spectrum according to claim 1, it is characterised in that：The thickness in the reflecting layer is less than glass
The thickness of glass substrate.
6. the high reflective mirror of a kind of wide spectrum according to claim any one of 1-5, it is characterised in that：The material membrane is nothing
Machine material membrane, by silica, alundum (Al2O3), magnesium fluoride, magnesia, hafnium oxide, metallic aluminium or these two or more things
The mixture of matter is constituted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710282344.XA CN107092046A (en) | 2017-04-26 | 2017-04-26 | A kind of high reflective mirror of wide spectrum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710282344.XA CN107092046A (en) | 2017-04-26 | 2017-04-26 | A kind of high reflective mirror of wide spectrum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107092046A true CN107092046A (en) | 2017-08-25 |
Family
ID=59638045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710282344.XA Pending CN107092046A (en) | 2017-04-26 | 2017-04-26 | A kind of high reflective mirror of wide spectrum |
Country Status (1)
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| CN204989523U (en) * | 2015-09-02 | 2016-01-20 | 浙江星星瑞金科技股份有限公司 | Window protection screen with infrared ultraviolet is by function |
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| CN106068467A (en) * | 2013-09-18 | 2016-11-02 | 玻璃与陶瓷研究有限公司卢森堡中心 | Dielectric mirror |
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2017
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| US4101707A (en) * | 1977-04-04 | 1978-07-18 | Rockwell International Corporation | Homogeneous multilayer dielectric mirror and method of making same |
| CN1122126A (en) * | 1994-01-10 | 1996-05-08 | 皮尔金顿玻璃有限公司 | Coatings on glass |
| CN1427959A (en) * | 2000-05-09 | 2003-07-02 | 艾尔坎技术及管理有限公司 | Reflector |
| CN1327162A (en) * | 2000-06-05 | 2001-12-19 | 富士写真光机株式会社 | Aluminium reflector and its preparing method |
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| CN101393276A (en) * | 2007-09-21 | 2009-03-25 | 鸿富锦精密工业（深圳）有限公司 | Wide-band antireflective film and optical element with the wide-band antireflective film |
| CN102239433A (en) * | 2008-12-04 | 2011-11-09 | 优泊公司 | Light reflector and planar light source device using same |
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Application publication date: 20170825 |