CN107084665B - A kind of Spectral Confocal displacement sensor - Google Patents
A kind of Spectral Confocal displacement sensor Download PDFInfo
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- CN107084665B CN107084665B CN201710300345.2A CN201710300345A CN107084665B CN 107084665 B CN107084665 B CN 107084665B CN 201710300345 A CN201710300345 A CN 201710300345A CN 107084665 B CN107084665 B CN 107084665B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
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Abstract
The invention discloses a kind of Spectral Confocal displacement sensors, the Spectral Confocal displacement sensor is provided with dispersion lens group, including multiple groups dispersion camera lens identical with tested surface quantity, and polarizer group is added before dispersion lens group, analyzer group is added in depolarization spectral detection device, so that if the main line secondary color collimated light beam after beam splitting is provided with polarization state after the polarizer, so that the secondary color collimated light beam closed after beam tells measuring beam corresponding to each measured point after analyzer, to carry out spectral intensity analysis to each point measuring beam, complete wavelength decoding, finally, according to the linear relationship between dispersion lens group axial direction dispersion distance and visible wavelength, and the corresponding monochromatic wavelength of each tested surface, determine the displacement between each tested surface.Finally, multi-point displacement synchro measure is realized in same equipment.
Description
Technical field
The present invention relates to optical precision displacement measurement technology field, in particular to a kind of Spectral Confocal displacement sensor.
Background technique
Spectral Confocal displacement sensor is a kind of high-precision, contactless photoelectric displacement sensor, utilizes wide spectrum
Polychromatic light passes through lens group, generates the dispersion of spectrum axial direction, forms a series of focuses, the monochromatic wavelength of each focus in space
All correspond to an axial position.Incident light is reflected through measured surface, is again passed through lens group and is imaged on pin hole end face.Corresponding quilt
Survey surface location, the monochromatic light for meeting confocal condition will enter pin hole, and other spectral components of defocus reflection then be blocked by pin hole.
Spectrometer receives the optical signal by pin hole and determines its wavelength, to realize that displacement is differentiated.
But existing Spectral Confocal displacement sensor can only at most be equipped with two probes, and this since system structure limits
The information of two probe acquisitions can only carry out time-division processing and can not achieve Synchronization Analysis.Therefore it is surveyed in face of multi-point displacement in practice
Amount requires, and can only be measured by single device timesharing at present or multiple devices parallel connection detects, greatly reduce the speed of multimetering
Rate increases measurement cost, is unfavorable for promoting the use of.
Summary of the invention
In view of this, goal of the invention of the invention is: realizing more sensing point displacement synchronous measurements.
In order to achieve the above objectives, technical solution of the present invention is specifically achieved in that
The present invention provides a kind of Spectral Confocal displacement sensors, comprising:
Beam splitter, including multiple semi-transparent semi-reflecting lens identical with tested surface quantity, by secondary color source of parallel light according to tested surface
If quantity beam splitting be the identical main line secondary color collimated light beam of light intensity；
Polarizer group, including it is identical with tested surface quantity, and respectively make each with multiple polarizers of different polarization states
Road secondary color collimated light beam be polarized after the corresponding polarizer and have different polarization states；
Each road is had different polarization states by dispersion lens group, including multiple groups dispersion camera lens identical with tested surface quantity
Secondary color collimated light beam carries out axial dispersion, makes per the secondary color collimated light beam all the way with different polarization states in respective tested surface
Upper focusing reflection, forms each road parallel beam and reaches beam merging apparatus；Wherein, a branch of monochromatic optical wave is corresponded on each focus point
It is long；
Beam merging apparatus, the position between beam splitter and dispersion lens group, by the reflected each road of each tested surface
Parallel beam closes beam into a branch of secondary color collimated light beam；
Depolarization spectral detection device, according to close beam at secondary color collimated light beam, determine the corresponding polarization of each tested surface
State light beam determines the corresponding monochromatic wavelength of each tested surface by carrying out spectral intensity analysis to each polarizing beam；
Resolver, according to the linear relationship between dispersion lens group axial direction dispersion distance and visible wavelength, and it is every
The corresponding monochromatic wavelength of a tested surface, determines the displacement between each tested surface.
As seen from the above technical solutions, the present invention provides a kind of Spectral Confocal displacement sensor, the Spectral Confocal positions
Displacement sensor is provided with dispersion lens group, including multiple groups dispersion camera lens identical with tested surface quantity, and in dispersion lens group
Polarizer group is added before, analyzer group is added in depolarization spectral detection device, if so that the main line secondary color after beam splitting is flat
Row light beam is provided with polarization state after the polarizer, so that the secondary color collimated light beam closed after beam tells each quilt after analyzer
Measuring beam corresponding to measuring point completes wavelength decoding, finally, root to carry out spectral intensity analysis to each point measuring beam
According to the linear relationship and the corresponding monochromatic light of each tested surface between dispersion lens group axial direction dispersion distance and visible wavelength
Wavelength determines the displacement between each tested surface.Finally, multi-point displacement synchro measure is realized in same equipment.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the Spectral Confocal displacement sensor of the embodiment of the present invention one.
Fig. 2 is depolarization spectral detection device structural schematic diagram of the present invention.
Fig. 3 is the structural schematic diagram of beam splitting arrangement of the embodiment of the present invention.
Fig. 4 is the structural schematic diagram of the Spectral Confocal displacement sensor of the embodiment of the present invention three.
Specific embodiment
For the purpose of the present invention, technical solution and advantage is more clearly understood, hereinafter, referring to the drawings and the embodiments,
The present invention is described in more detail.
Embodiment one
A kind of Spectral Confocal displacement sensor provided by the invention, structural schematic diagram are as shown in Figure 1, comprising:
Beam splitter 101, including multiple semi-transparent semi-reflecting lens identical with tested surface quantity, by secondary color source of parallel light according to tested
If the quantity beam splitting in face is the identical main line secondary color collimated light beam of light intensity；
Polarizer group 102, including it is identical with tested surface quantity, and respectively there are multiple polarizers of different polarization states,
The road Shi Ge secondary color collimated light beam be polarized after the corresponding polarizer and have different polarization states；
Wherein, polarization state is different between each polarizer in polarizer group will ensure each road secondary color collimated light beam, thus by each
Road light beam is come by the different instructions of polarization state.
Each road is had different polarization states by dispersion lens group 103, including multiple groups dispersion camera lens identical with tested surface quantity
Secondary color collimated light beam, carry out axial dispersion, make per the secondary color collimated light beam all the way with different polarization states respective tested
Reflection is focused on face, is formed each road parallel beam and is reached beam merging apparatus；Wherein, a corresponding monochromic beam on each focus point
Wavelength；
Specifically one group of dispersion camera lens in dispersion lens group, due to this group of dispersion camera lens to all the way have polarization state answer
The axial effect of dispersion of color collimated light beam, generates spectral dispersion, and the monochromatic optical focus of different wave length is dispersed in the different positions of optical axis
Place is set, the monochromatic light for only focusing on tested surface surface can be returned by original optical path, and reach beam merging apparatus.
Beam merging apparatus 104, the position between beam splitter and dispersion lens group are reflected each by each tested surface
Road parallel beam closes beam into a branch of secondary color collimated light beam；
Wherein, beam merging apparatus is multiple semi-transparent semi-reflecting lens identical with tested surface quantity.Beam merging apparatus can be set in point
Between beam device 101 and polarizer group 102, also it can be set between polarizer group 102 and dispersion lens group 103.Dispersion camera lens
Group makes to focus reflection on respective tested surface per the secondary color collimated light beam all the way with different polarization states, and it is flat to form each road monochrome
Row light beam reaches in beam merging apparatus on corresponding semi-transparent semi-reflecting lens；Beam merging apparatus is monochromatic by the reflected each road of each tested surface
Collimated light beam closes beam into a branch of secondary color collimated light beam by multiple semi-transparent semi-reflecting lens.
Depolarization spectral detection device 105, according to close beam at secondary color collimated light beam, determine each tested surface it is corresponding partially
Polarization state light beam determines the corresponding monochromatic wavelength of each tested surface by carrying out spectral intensity analysis to each polarizing beam；
Resolver 106, according to the linear relationship between dispersion lens group axial direction dispersion distance and visible wavelength, and
The corresponding monochromatic wavelength of each tested surface, determines the displacement between each tested surface.
Embodiment two
Depolarization spectral detection device structural schematic diagram of the present invention is as shown in Figure 2, comprising:
Light limiting means 201, to it is described conjunction beam at secondary color collimated light beam be filtered, retain be included in secondary color it is parallel
Each road parallel beam in light beam；
Wherein, light limiting means are the structures such as pin hole or slit.Light limiting means play the role of filtering, make corresponding tested table
Face position, the monochromatic light for meeting confocal condition can enter follow up device, and other spectral components of defocus reflection are then restricted
It not can enter.
Dispersion means 202, make to close beam at secondary color collimated light beam generate the parallel dispersed light beam of secondary color；
Wherein, dispersion means include: plane diffraction grating perhaps concave grating or dispersing prism.
Beam splitting arrangement 203, if being the parallel dispersed light beam of main line secondary color according to the quantity beam splitting of tested surface；
Analyzer group 204, including it is identical with tested surface quantity, and multiple analyzings identical with corresponding polarizer polarization state
Device carries out analyzing to the parallel dispersed light beam of each road secondary color, determines the corresponding polarizing beam of each tested surface；
Spectrographic detection analytical equipment 205 determines each tested surface by carrying out spectral intensity analysis to each polarizing beam
Corresponding monochromatic wavelength.Wherein, spectrographic detection analytical equipment 205 may include detector and analyzer, and detector can be adopted
With devices such as EMCCD, SCMOS, photomultiplier tubes.
Wherein, beam splitting arrangement 203 can be multiple semi-transparent semi-reflecting lens identical with tested surface quantity.Preferably, to ensure
Several light beams intensity separated are identical, and the present invention also proposes that a kind of beam splitting arrangement, structural schematic diagram are as shown in Figure 3, comprising:
Tight shot 301, the parallel dispersed light beam of secondary color are imaged on diffusing screen by tight shot；
Diffusing screen 302 is located at polarization-maintaining internal reflection cavity quadrangular front end, and the parallel dispersed light beam of secondary color is become secondary color scattering
Dispersed light beam；
Polarization-maintaining internal reflection cavity quadrangular 303, secondary color scatter dispersed light beam and carry out total reflection mirror in inner surface different location
Reflection, and the no parallax picture of different perspectives is generated in polarization-maintaining internal reflection cavity quadrangular end；
Light microscopic head 304 is picked up, is located at polarization-maintaining internal reflection cavity quadrangular end, the no parallax picture under each visual angle is gathered
Coke is imaged on the different location of spectrographic detection analytical equipment.
Finally, analyzing operation is carried out to the imaging beam at each visual angle respectively using analyzer, determines light beam institute on detector
Corresponding test surface, the spectral intensity of each light beam is distributed on detector by analysis, is decoded to wavelength information, to obtain each point
Displacement information.
Embodiment three
If secondary color light source is secondary color source of parallel light, secondary color source of parallel light can be utilized directly, into the polarizer.
If secondary color light source is secondary color point light source, e.g. optical fiber source, then between beam splitter 101 and polarizer group 102 further include:
Collimator apparatus 400.The Spectral Confocal displacement sensor structure schematic diagram of the embodiment of the present invention three is as shown in Figure 4.
Beam splitter 101, if by secondary color point light source according to the quantity beam splitting of tested surface be the identical main line secondary color point light of light intensity
Source beam；
Collimator apparatus 400, if if main line secondary color point light source light beam is become main line secondary color collimated light beam.Wherein, collimation dress
It sets 400 and is installed on beam splitter end, can be optical fiber collimator or the collimation equipment such as camera lens or telescopic system.
Example IV
Preferably, in order to reduce the loss of light beam, the embodiment of the present invention is in each polarizer and corresponding every group of dispersion mirror
It further include the amasthenic lens set gradually, optical fiber and collimation camera lens between head.Wherein, optical fiber is the optical fiber with polarization property.
Amasthenic lens, will be from the received a branch of secondary color collimated light beam coupled into optical fibres with polarization state of the polarizer；
Camera lens is collimated, the secondary color collimated light beam with polarization state after optical fiber dissipates is restored, is entered back into pair
The one group of dispersion camera lens answered.
Embodiment five
Preferably, in order to reduce the loss of light beam, the embodiment of the present invention can also be in each polarizer and every group corresponding
Amasthenic lens, fiber coupler and the collimation camera lens set gradually between dispersion camera lens；Wherein fiber coupler first via optical fiber
Amasthenic lens, the second tunnel fiber splices bundle device are connect, third road optical fiber connects collimation camera lens.Wherein, fiber coupler and its optical fiber
All there is polarization property.
Amasthenic lens will be coupled into first via light from the received a branch of secondary color collimated light beam with polarization state of the polarizer
It is fine；
Camera lens is collimated, the secondary color collimated light beam with polarization state after the diverging of third road optical fiber is restored, and
It is sent to corresponding one group of dispersion camera lens, axis is carried out to the secondary color collimated light beam with polarization state for this group of dispersion camera lens
Crossed disperstion makes the secondary color collimated light beam with polarization state focus reflection on corresponding tested surface, forms a monochromatic collimated beam
Beam reaches beam merging apparatus from the second road optical fiber；
Beam merging apparatus, can be diffusing screen etc. has the device for closing Shu Zuoyong, for carrying out each parallel beam
It closes beam and forms a branch of secondary color collimated light beam.
Embodiment six
Spectral Confocal displacement sensor of the invention to clearly illustrate, is set forth below concrete scene and is illustrated.
Scene one
In scene of the present invention, the depth of three apertures on same level metal covering is measured, three aperture bottom surfaces are claimed respectively
For the first tested surface, the second tested surface and third tested surface, horizontal metal face is known as datum level, and each tested surface is apart from datum level
Spacing is exactly the displacement that Spectral Confocal displacement sensor needs to measure.
Beam splitter 101, including 4 semi-transparent semi-reflecting lens, by secondary color source of parallel light according to the quantity beam splitting of tested surface be light intensity
Identical 4 road secondary color collimated light beam；
Polarizer group 102, including respectively with 4 polarizers of different polarization states, passing through 4 road secondary color collimated light beams
It is polarized after the corresponding polarizer and there is different polarization states；
For example, 0 degree of polarization state of first via secondary color collimated light beam, the second road secondary color collimated light beam is inclined after polarizer group
30 degree of polarization state, 60 degree of third road secondary color collimated light beam polarization state, the 4th 80 degree of road secondary color collimated light beam polarization state.
4 tunnels are had the secondary color collimated light beam of different polarization states by dispersion lens group 103, including 4 groups of dispersion camera lenses, are carried out
Axial dispersion makes 4 tunnels have the secondary color collimated light beam of different polarization states respectively in datum level, the first tested surface, the second tested surface
And reflection is focused on third tested surface, it forms 4 road parallel beams and reaches beam merging apparatus；Wherein, right on each focus point
Answer a branch of monochromatic wavelength；
Beam merging apparatus 104, the position between beam splitter and dispersion lens group are reflected each by each tested surface
Road parallel beam closes beam into a branch of secondary color collimated light beam；
Light limiting means 201, to it is described conjunction beam at secondary color collimated light beam be filtered, retain be included in secondary color it is parallel
4 road parallel beams in light beam；
Dispersion means 202, make to close beam at secondary color collimated light beam generate the parallel dispersed light beam of secondary color；
Beam splitting arrangement 203 is the parallel dispersed light beam of 4 road secondary colors according to the quantity beam splitting of tested surface；
Analyzer group 204, including multiple analyzers identical with corresponding polarizer polarization state, dispersion parallel to 4 road secondary colors
Light beam carries out analyzing, determines the corresponding polarizing beam of each tested surface；
For example, can determine 0 degree of the parallel dispersed light beam polarization state of first via secondary color by analyzer, the second road secondary color is parallel
30 degree of dispersed light beam polarization state, 60 degree of the parallel dispersed light beam polarization state of third road secondary color, the parallel dispersed light beam of the 4th road secondary color is inclined
80 degree of polarization state.
Spectrographic detection analytical equipment 204 determines each tested surface by carrying out spectral intensity analysis to each polarizing beam
Corresponding monochromatic wavelength；
For example, a length of 400 nanometers of the corresponding monochromatic optical wave of datum level, the corresponding monochromatic optical wave of the first tested surface a length of 500
Nanometer, a length of 600 nanometers of the corresponding monochromatic optical wave of the second tested surface, a length of 700 nanometers of the corresponding monochromatic optical wave of third tested surface.
Resolver 106, according to the linear relationship between dispersion lens group axial direction dispersion distance and visible wavelength, and
The corresponding monochromatic wavelength of each tested surface, determines the displacement between each tested surface.
For example, the effective wavelength range of visible light is 400-800 nanometers, in this scene the dispersion of dispersion lens group axial direction away from
From, that is, displacement sensor effective range is 2 millimeters, then, and the first tested surface, the second tested surface and third tested surface
Spacing between datum level is respectively 0.5 millimeter, 1 millimeter, 1.5 millimeters.
Scene two
In scene of the present invention, the thickness of a glass is measured, there are two surfaces, referred to as the first tested surface and second for glass tool
Tested surface, the spacing between the first tested surface and the second tested surface are exactly the displacement that Spectral Confocal displacement sensor needs to measure.
Beam splitter 101, including 2 semi-transparent semi-reflecting lens, by secondary color source of parallel light according to the quantity beam splitting of tested surface be light intensity
Identical 2 road secondary color collimated light beam；
Polarizer group 102, including respectively with 2 polarizers of different polarization states, passing through 2 road secondary color collimated light beams
It is polarized after the corresponding polarizer and there is different polarization states；
For example, 0 degree of polarization state of first via secondary color collimated light beam, the second road secondary color collimated light beam is inclined after polarizer group
45 degree of polarization state.
2 tunnels are had the secondary color collimated light beam of different polarization states by dispersion lens group 103, including 2 groups of dispersion camera lenses, are carried out
Axial dispersion, the secondary color collimated light beam for making 2 tunnels have different polarization states focus on the first tested surface and the second tested surface respectively
Reflection forms 2 road parallel beams and reaches beam merging apparatus；Wherein, a branch of monochromatic wavelength is corresponded on each focus point；
Beam merging apparatus 104, the position between beam splitter and dispersion lens group are reflected each by each tested surface
Road parallel beam closes beam into a branch of secondary color collimated light beam；
Light limiting means 201, to it is described conjunction beam at secondary color collimated light beam be filtered, retain be included in secondary color it is parallel
2 road parallel beams in light beam；
Dispersion means 202, make to close beam at secondary color collimated light beam generate the parallel dispersed light beam of secondary color；
Beam splitting arrangement 203 is the parallel dispersed light beam of 2 road secondary colors according to the quantity beam splitting of tested surface；
Analyzer group 204, including multiple analyzers identical with corresponding polarizer polarization state, dispersion parallel to 2 road secondary colors
Light beam carries out analyzing, determines the corresponding polarizing beam of each tested surface；
For example, can determine 0 degree of the parallel dispersed light beam polarization state of first via secondary color by analyzer, the second road secondary color is parallel
45 degree of dispersed light beam polarization state.
Spectrographic detection analytical equipment 204 determines each tested surface by carrying out spectral intensity analysis to each polarizing beam
Corresponding monochromatic wavelength；
For example, a length of 400 nanometers of the corresponding monochromatic optical wave of the first tested surface, the corresponding monochromatic optical wave of the second tested surface is a length of
600 nanometers.
Resolver 106, according to the linear relationship between dispersion lens group axial direction dispersion distance and visible wavelength, and
The corresponding monochromatic wavelength of each tested surface, determines the displacement between each tested surface.
For example, the effective wavelength range of visible light is 400-800 nanometers, in this scene the dispersion of dispersion lens group axial direction away from
From, that is, displacement sensor effective range is 2 millimeters, then, the displacement between the first tested surface and the second tested surface is 1
Millimeter.
The device of the invention has the advantages that,
1) present invention is mainly measured using visible light wave range, and light source is simple and easy to get, and light beam penetration capacity is stronger, to quilt
Object is surveyed not damage.
2) present invention uses multi-polarization state light source as excitation light source, is labeled using polarization information to tested surface, from
And realize the resolution of each point information.
3) present invention is different from the simple synchronous triggering in parallel of multiple devices, simplifies system complexity, reduces costs,
Improve the synchronism of measurement.
4) present invention settles accounts displacement information using spectral intensity information, and measurement result is not by the coarse journey of measured surface
Degree influences, and is suitable for a variety of tested materials.
5) detection process of the present invention avoids the measurement error introduced by human factor without human intervention, it is ensured that surveys
Accuracy of measurement keeps measurement result accurate and reliable.
6) simple in measurement system structure of the present invention, device accessory is common to be easy to get, and can carry out dismantling assembly, easy to carry, fits
For a variety of measurement environment.
To sum up, Spectral Confocal displacement sensor through the embodiment of the present invention is provided with for Spectral Confocal displacement sensor
Dispersion lens group, depending on the quantity of multiple groups dispersion camera lens is according to the quantity of tested surface in dispersion lens group.Key is in dispersion mirror
Polarizer group is added before head group, analyzer group is added in depolarization spectral detection device, if so that the main line after beam splitting is multiple
Color collimated light beam is provided with polarization state after the polarizer, so that the secondary color collimated light beam closed after beam is told after analyzer
Measuring beam corresponding to each measured point.In this way, can achieve the purpose that while multimetering.Do not need as the prior art that
Sample can only at most be equipped with two groups of dispersion camera lenses, and the information of this group of dispersion camera lens acquisition, due to not polarizing to each beam light
The differentiation of state, so can only time-division processing, that is, one group of acquisition data can only have been handled, reprocessing another set acquires data, from
And it can not achieve Synchronization Analysis.Therefore, Spectral Confocal displacement sensor of the invention effectively increases measurement rate, reduces survey
Measure cost.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, made any modification, equivalent replacement and improvement etc. should be included in guarantor of the invention
Within the scope of shield.
Claims (10)
1. a kind of Spectral Confocal displacement sensor, comprising:
Beam splitter, including multiple semi-transparent semi-reflecting lens identical with tested surface quantity, by secondary color source of parallel light according to the number of tested surface
If amount beam splitting is the identical main line secondary color collimated light beam of light intensity；
Polarizer group, including it is identical with tested surface quantity, and respectively with multiple polarizers of different polarization states, the road Shi Ge is answered
Color collimated light beam be polarized after the corresponding polarizer and have different polarization states；
Each road is had the secondary color of different polarization states by dispersion lens group, including multiple groups dispersion camera lens identical with tested surface quantity
Collimated light beam carries out axial dispersion, makes to gather on respective tested surface per the secondary color collimated light beam all the way with different polarization states
Coke reflection forms each road parallel beam and reaches beam merging apparatus；Wherein, a branch of monochromatic wavelength is corresponded on each focus point；
Beam merging apparatus, the position between beam splitter and dispersion lens group are monochromatic by the reflected each road of each tested surface
Collimated light beam closes beam into a branch of secondary color collimated light beam；
Depolarization spectral detection device, according to close beam at secondary color collimated light beam, determine the corresponding polarization state light of each tested surface
Beam determines the corresponding monochromatic wavelength of each tested surface by carrying out spectral intensity analysis to each polarizing beam；
Resolver, according between dispersion lens group axial direction dispersion distance and visible wavelength linear relationship and each quilt
The corresponding monochromatic wavelength in survey face, determines the displacement between each tested surface.
2. Spectral Confocal displacement sensor as described in claim 1, which is characterized in that the beam merging apparatus be and tested surface number
Measure identical multiple semi-transparent semi-reflecting lens.
3. Spectral Confocal displacement sensor as described in claim 1, which is characterized in that the depolarization spectral detection device into
One step includes:
Light limiting means, to it is described conjunction beam at secondary color collimated light beam be filtered, retain be included in secondary color collimated light beam in
Each road parallel beam；
Dispersion means, make to close beam at secondary color collimated light beam generate the parallel dispersed light beam of secondary color；
Beam splitting arrangement, if being the parallel dispersed light beam of main line secondary color according to the quantity beam splitting of tested surface；
Analyzer group, including it is identical with tested surface quantity, and multiple analyzers identical with corresponding polarizer polarization state, to each
Secondary color parallel dispersed light beam in road carries out analyzing, determines the corresponding polarizing beam of each tested surface；
Spectrographic detection analytical equipment determines that each tested surface is corresponding by carrying out spectral intensity analysis to each polarizing beam
Monochromatic wavelength.
4. Spectral Confocal displacement sensor as claimed in claim 3, which is characterized in that the beam splitting arrangement further comprises:
Tight shot, the parallel dispersed light beam of secondary color are imaged on diffusing screen by tight shot；
Diffusing screen is located at polarization-maintaining internal reflection cavity quadrangular front end, and the parallel dispersed light beam of secondary color is become secondary color scattering dispersed light
Beam；
Polarization-maintaining internal reflection cavity quadrangular, secondary color scatter dispersed light beam and carry out total reflection mirror reflection in inner surface different location, and
The no parallax picture of different perspectives is generated in polarization-maintaining internal reflection cavity quadrangular end；
Light microscopic head is picked up, is located at polarization-maintaining internal reflection cavity quadrangular end, the no parallax picture under each visual angle is focused, is imaged on
The different location of spectrographic detection analytical equipment.
5. Spectral Confocal displacement sensor as claimed in claim 3, which is characterized in that the beam splitting arrangement further comprises:
Multiple semi-transparent semi-reflecting lens identical with tested surface quantity.
6. Spectral Confocal displacement sensor as described in claim 1, which is characterized in that between beam splitter and polarizer group also
It include: collimator apparatus；
Beam splitter, if by secondary color point light source according to the quantity beam splitting of tested surface be the identical main line secondary color point light source light beam of light intensity；
Collimator apparatus, if if main line secondary color point light source light beam is become main line secondary color collimated light beam.
7. Spectral Confocal displacement sensor as described in claim 1, which is characterized in that each polarizer and corresponding every group of color
Dissipate further includes the amasthenic lens set gradually, optical fiber and collimation camera lens between camera lens；
Amasthenic lens, will be from the received a branch of secondary color collimated light beam coupled into optical fibres with polarization state of the polarizer；
Camera lens is collimated, the secondary color collimated light beam with polarization state after optical fiber dissipates is restored.
8. Spectral Confocal displacement sensor as described in claim 1, which is characterized in that each polarizer and corresponding every group of color
Dissipate further includes the amasthenic lens set gradually, fiber coupler and collimation camera lens between camera lens；The wherein fiber coupler first via
Optical fiber connects amasthenic lens, the second tunnel fiber splices bundle device, and third road optical fiber connects collimation camera lens；
Amasthenic lens will be coupled into first via optical fiber from the received a branch of secondary color collimated light beam with polarization state of the polarizer；
Camera lens is collimated, the secondary color collimated light beam with polarization state after the diverging of third road optical fiber is restored, and sends
To corresponding one group of dispersion camera lens, axial color is carried out to the secondary color collimated light beam with polarization state for this group of dispersion camera lens
Dissipate, the secondary color collimated light beam with polarization state made to focus reflection on corresponding tested surface, one parallel beam of formation from
Second road optical fiber reaches beam merging apparatus；
Each parallel beam is carried out conjunction beam and forms a branch of secondary color collimated light beam by beam merging apparatus.
9. Spectral Confocal displacement sensor as claimed in claim 3, which is characterized in that the dispersion means include: that plane is spread out
Penetrate grating perhaps concave grating or dispersing prism.
10. Spectral Confocal displacement sensor as claimed in claim 3, which is characterized in that the light limiting means be pin hole or
Slit.
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| CN110826423B (en) * | 2019-10-18 | 2022-10-04 | 中北大学 | Method, device and system for detecting interested target in group target |
| CN112147622B (en) * | 2020-09-02 | 2024-02-06 | Oppo广东移动通信有限公司 | Distance measuring device, distance measuring method, camera and electronic equipment |
| CN112230236A (en) * | 2020-10-10 | 2021-01-15 | 武汉烽火凯卓科技有限公司 | Spectrum confocal displacement sensor distance measurement calculation method, system, device and storage medium |
| CN113686793B (en) * | 2021-08-25 | 2024-03-19 | 珠海横琴美加澳光电技术有限公司 | Spectrum confocal scanning displacement sensor device and application method thereof |
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| CN101413784A (en) * | 2008-12-02 | 2009-04-22 | 哈尔滨工业大学 | Method for measuring large linear range data fusion by compound color ultra-resolved differential confocal |
| CN103267482A (en) * | 2013-04-08 | 2013-08-28 | 辽宁科旺光电科技有限公司 | High-accuracy displacement detection device and method |
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| JPH11249023A (en) * | 1997-11-17 | 1999-09-17 | Max Planck Ges Foerderung Wissenschaft Ev | Confocal spectral system and spectral method |
| CN101413784A (en) * | 2008-12-02 | 2009-04-22 | 哈尔滨工业大学 | Method for measuring large linear range data fusion by compound color ultra-resolved differential confocal |
| CN103267482A (en) * | 2013-04-08 | 2013-08-28 | 辽宁科旺光电科技有限公司 | High-accuracy displacement detection device and method |
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