CN107063122A - The detection method and its device of surface shape of optical aspheric surface - Google Patents
The detection method and its device of surface shape of optical aspheric surface Download PDFInfo
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- CN107063122A CN107063122A CN201710293334.6A CN201710293334A CN107063122A CN 107063122 A CN107063122 A CN 107063122A CN 201710293334 A CN201710293334 A CN 201710293334A CN 107063122 A CN107063122 A CN 107063122A
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- aspherical
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2504—Calibration devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of detection method of surface shape of optical aspheric surface, this method includes：Will reverse compensation striped from projecting direction be irradiated to it is tested it is aspherical it is upper after, the modulation stripe of the tested aspheric surface information of carrying is obtained by imaging system through being tested aspherical catoptric imaging, aspherical surface form deviation is obtained according to the modulation stripe, tested aspherical processing situation is determined according to the surface form deviation；Also disclose a kind of detection means of rotationally symmetrical surface shape of optical aspheric surface.
Description
Technical field
The invention belongs to the detection technique field of optical component surface shape, and in particular to a kind of detection of surface shape of optical aspheric surface
Method and its device.
Background technology
Optical aspherical surface has many excellent optical properties, therefore is more and more applied to all kinds of optics and Opto-electrical Section
In system；But, because the radius of curvature of aspherical upper each point is different, it is impossible to complete aspherical survey with traditional spherical surface measurement method
Amount.Moreover, with the continuous lifting of optical/optoelectronic systematic function, requirement to optical aspherical surface also more and more higher；Not only
There is a good surface figure accuracy it is required that aspherical, and the requirement to aspherical degree also gradually increases；Therefore, non-spherical measuring is always
It is the hot research problem of optical technical field, and is never well solved.
At present, the main measurement method of optical aspherical surface has consistency profiles, geometrical ray method and interferometric method.
Consistency profiles is to carry out contact type scanning to whole tested surface using probe, can only measure the two-dimensional surface in diametric(al)
Shape result, and it is very time-consuming, influenceed especially big by probe size, motion, measurement accuracy is not high, easily damages measured piece
Surface.
Geometrical ray detection method mainly has Hartmann method, raster method and knife-edge method, and its equipment is simple, but measurement accuracy is not
Height is unable to quantitative measurment.
The measurement accuracy of interferometric method is high, but optical system and complicated in mechanical structure, and the requirement to environment is strict.Conventional interference
Method measurement is exactly compensating interferometer method (lens compensation calculates holographic compensation, is also zero check method), and aspheric can be achieved
Face quantification detection, accuracy of detection is higher.But, (offset lens calculates holographic compensation to compensating device the need for this method
Element), manufacture extremely complex, and also a compensator is only applicable to the aspherical detection of a certain class, poor universality.
The content of the invention
In view of this, it is a primary object of the present invention to provide the detection method and its dress of a kind of surface shape of optical aspheric surface
Put.
To reach above-mentioned purpose, the technical proposal of the invention is realized in this way：
The embodiment of the present invention provides a kind of detection method of surface shape of optical aspheric surface, it is characterised in that this method includes：Will
Reverse compensation striped from projecting direction be irradiated to it is tested it is aspherical it is upper after, obtained through being tested aspherical catoptric imaging by imaging system
The modulation stripe of tested aspheric surface information is carried, aspherical surface form deviation is obtained according to the modulation stripe, according to institute
State surface form deviation and determine tested aspherical processing situation.
In such scheme, the generating process of the reverse compensation striped is：By the straight fringe projection of one or more phase shifts
It is imaged after to desired aspheric reflection, obtains the deforming stripe modulated by desired aspheric；By the deforming stripe to project
Vertical bar line is the reverse compensation striped of symmetry axis upset generation.
In such scheme, this method also includes：When the tested aspherical position and the position of reverse compensation fringe projection
The modulation stripe is calibrated when putting not to correspondence, is specially：According to the bar of Fourier transformation or phase-shifting technique to acquisition
Line carries out phase extraction processing, obtains phase data；Afterwards, rotate and be tested an aspherical angle, the equally modulation to acquisition
Striped carries out phase extraction processing, obtains phase data；Finally, a series of tested aspherical one week, modulation to acquisition are rotated
Striped carries out phase extraction processing, obtains a series of phase datas；The phase place change minimum in a series of phase datas
The corresponding position of modulation stripe is the best position of tested aspherical calibration.
It is described that aspherical surface form deviation is obtained according to the modulation stripe in such scheme, be specially：To the modulation
Striped carries out the phase value that phase extraction obtains the modulation stripeAccording to phase valueWith wavefront W corresponding relation formula, obtain
Surface form deviation W is obtained, i.e.,
It is described that tested aspherical processing situation is determined according to the surface form deviation in such scheme, be specially：According to quilt
The aspherical surface form deviation relative to desired aspheric is surveyed, by the synthesis of surface form deviation and desired aspheric, quilt is finally obtained
Survey aspherical actual measuring surface shape.
The embodiment of the present invention also provides a kind of detection means of rotationally symmetrical surface shape of optical aspheric surface, and the device includes reverse
Compensate striped generating means, beam splitting arrangement, standard lens, tested aspherical, imaging system, the reverse compensation striped generation dress
Put, beam splitting arrangement, standard lens, it is tested it is aspherical from left to right set on optical axis successively, tested aspherical, the imaging system
System is positioned at the side any up and down of beam splitting arrangement and it is imaged optical axis perpendicular to optical axis.
In such scheme, the imaging system includes imaging len and the CCD camera set gradually along optical axis.
The embodiment of the present invention also provides a kind of detection means of rotation asymmetry surface shape of optical aspheric surface, and the device includes inverse
It is described reverse to compensation striped generating means, beam splitting arrangement, standard lens, tested aspherical, plane mirror, imaging system
The light beam that compensation striped generating means are sent projects to tested aspherical, the reflected light that the tested sphere is sent through standard lens
Beam reflexes to imaging system through standard lens, plane mirror.
In such scheme, the imaging system includes imaging len and the CCD camera set gradually along optical axis.
Compared with prior art, beneficial effects of the present invention：
1. the present invention is different from interferometric method, it is not necessary to standard reference lens, low to environmental requirement；Also different from traditional projection
Method, the optical axis of its imaging system is the reflection direction in incident ray.It is an advantage of the invention that simple in construction, measurement accuracy is high,
Measurement dynamic range is big, highly versatile.
2. the present invention is without expensive interference phase-shifter with regard to that can obtain phase shift striped, it is only necessary to which reflection strip is carried out into
Picture, surveyed aspherical face shape is obtained with by simply calculating.Due to being that reflection strip is imaged, different from passing
The fringe projection measuring method of system, therefore measurement accuracy is high.
3. the illumination striped that the present invention is used is to be generated according to tested aspherical parameter with computer, only it is to be understood that non-
Sphere parameters, it is possible to the arbitrary illumination striped of generation, therefore highly versatile.
4. the illumination striped that the present invention is used is to be generated according to tested aspherical parameter with computer, can be according to non-
The reverse compensation illumination striped of surface of sphere generation, therefore measurement range is big.
Brief description of the drawings
Fig. 1 provides a kind of structure of the detection means of rotation asymmetry surface shape of optical aspheric surface for the embodiment of the present invention 1 and shown
It is intended to；
Fig. 2 is provided for the embodiment of the present invention 1 and inversely mended in a kind of detection means of rotation asymmetry surface shape of optical aspheric surface
Repay the first structural representation of striped generating means；
Fig. 3 is provided for the embodiment of the present invention 1 and inversely mended in a kind of detection means of rotation asymmetry surface shape of optical aspheric surface
Repay second of structural representation of striped generating means；
Fig. 4 is provided for the embodiment of the present invention 1 and inversely mended in a kind of detection means of rotation asymmetry surface shape of optical aspheric surface
Repay the third structural representation of striped generating means
Fig. 5 provides a kind of structure of the detection means of rotation asymmetry surface shape of optical aspheric surface for the embodiment of the present invention 2 and shown
It is intended to.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The embodiment of the present invention provides a kind of detection method of surface shape of optical aspheric surface, and this method includes：Bar will inversely be compensated
Line from projecting direction be irradiated to it is tested it is aspherical it is upper after, obtained by imaging system through being tested aspherical catoptric imaging and carry tested non-
The modulation stripe of spherical surface shape information, aspherical surface form deviation is obtained according to the modulation stripe, according to the surface form deviation
It is determined that tested aspherical processing situation.
It is described it is reverse compensation striped generating process be：The vertical bar line of one or more phase shifts is projected into desired aspheric
It is imaged after reflection, obtains the deforming stripe modulated by desired aspheric；By the deforming stripe using the vertical bar line projected be symmetrical
The reverse compensation striped of axle upset generation.
This method also includes：When the tested aspherical position with inversely compensate the position of fringe projection not to it is corresponding when
The modulation stripe is calibrated, is specially：Line phase is entered to the striped of acquisition according to Fourier transformation or phase-shifting technique
Extraction process, obtains phase data；Afterwards, rotate and be tested an aspherical angle, equally the modulation stripe to acquisition carries out phase
Position extraction process, obtains phase data；Finally, rotate and be tested aspherical one week, a series of modulation stripes to acquisition carry out phase
Position extraction process, obtains a series of phase datas；The minimum modulation stripe pair of phase place change in a series of phase datas
The position answered is the best position of tested aspherical calibration.
It is described that aspherical surface form deviation is obtained according to the modulation stripe, be specially：Phase is carried out to the modulation stripe
Extract the phase value for obtaining the modulation stripe in positionAccording to phase valueWith wavefront W corresponding relation formula, surface form deviation is obtained
W, i.e.,
It is described that tested aspherical processing situation is determined according to the surface form deviation, be specially：According to tested aspherical phase
For the surface form deviation of desired aspheric, by the synthesis of surface form deviation and desired aspheric, finally obtain tested aspherical
Actual measuring surface shape.
If tested aspherical degree is excessive, the backwards projection striped designed will overstocked or striped be bent over one
Fringe spacing, at this moment will with due regard to striped disposal ability problem, such as subtracted on the desired aspheric of design one light
Degree is aspherical；Imaging system obtain modulation stripe be relative to desired aspheric (or standard aspheric plus compensation it is light
Degree is aspherical) modulation deforming stripe, determine tested aspherical face shape finally according to modulation deforming stripe.
The embodiment of the present invention 1 provides a kind of detection means of surface shape of optical aspheric surface, as shown in figure 1, the device is including inverse
To compensation striped generating means, beam splitting arrangement, standard lens, tested aspherical, imaging system, the reverse compensation striped generation
Device, beam splitting arrangement, standard lens, it is tested it is aspherical from left to right set on optical axis successively, the tested aspherical, imaging
System is located at the side any up and down of beam splitting arrangement and it is imaged optical axis perpendicular to optical axis.
The imaging system includes imaging len and the CCD camera set gradually along optical axis.
The reverse compensation striped generating means can be using three kinds of structures：Liquid crystal spatial light modulation method, DMD Reflective spatials
Light modulation method, display bounce technique.
Liquid crystal spatial light modulation method：Laser is irradiated to LCD space light modulator by beam-expanding collimation, and the modulator is by counting
Calculation machine is controlled, and transmission obtains inversely compensating striped, as shown in Figure 2.
DMD reflection type spatial light modulation methods：Laser is radiated in DMD spatial light modulators by beam-expanding collimation, computer
DMD spatial light modulators are controlled, reflection obtains the reverse method for compensating striped, as shown in Figure 3.
Display bounce technique：By the reverse compensation striped of computer generation, show over the display, reflected mirror reflection, warp
Collimating mirror collimation obtains the reverse compensation striped that measurement needs, as shown in Figure 4.
The embodiment of the present invention 2 provides a kind of detection means of surface shape of optical aspheric surface, as shown in figure 5, the device is including inverse
It is described reverse to compensation striped generating means, beam splitting arrangement, standard lens, tested aspherical, plane mirror, imaging system
The light beam that compensation striped generating means are sent projects to tested aspherical, the reflected light that the tested sphere is sent through standard lens
Beam reflexes to imaging system through standard lens, plane mirror.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the scope of the present invention.
Claims (9)
1. a kind of detection method of surface shape of optical aspheric surface, it is characterised in that this method includes：Striped will inversely be compensated from projection
Direction be irradiated to it is tested it is aspherical it is upper after, obtained by imaging system through being tested aspherical catoptric imaging and carry tested aspheric surface
The modulation stripe of information, aspherical surface form deviation is obtained according to the modulation stripe, is determined according to the surface form deviation tested
Aspherical processing situation.
2. the detection method of surface shape of optical aspheric surface according to claim 1, it is characterised in that：The reverse compensation striped
Generating process be：It is imaged after the vertical bar line of one or more phase shifts is projected into desired aspheric reflection, obtains non-by ideal
The deforming stripe of sphere modulation；The deforming stripe is generated using the vertical bar line projected as symmetry axis upset and inversely compensates striped.
3. the detection method of surface shape of optical aspheric surface according to claim 1 or 2, it is characterised in that：This method also includes：
When the tested aspherical position and reverse compensation fringe projection position not to it is corresponding when to modulation stripe progress school
Standard, be specially：Phase extraction processing is carried out to the striped of acquisition according to Fourier transformation or phase-shifting technique, number of phases is obtained
According to；Afterwards, rotate and be tested an aspherical angle, equally the modulation stripe to acquisition carries out phase extraction processing, obtains phase
Data；Finally, a series of tested aspherical one week, modulation stripes progress phase extraction processing to acquisition is rotated, obtaining one is
Row phase data；The minimum corresponding position of modulation stripe of phase place change is tested aspherical in a series of phase datas
The best position of calibration.
4. the detection method of surface shape of optical aspheric surface according to claim 3, it is characterised in that：It is described according to the modulation
Striped obtains aspherical surface form deviation, is specially：Phase extraction is carried out to the modulation stripe and obtains the modulation stripe
Phase valueAccording to phase valueWith wavefront W corresponding relation formula, surface form deviation W is obtained, i.e.,
5. the detection method of surface shape of optical aspheric surface according to claim 4, it is characterised in that：It is described according to the face shape
Deviation determines tested aspherical processing situation, is specially：According to the tested aspherical surface form deviation relative to desired aspheric,
By the synthesis of surface form deviation and desired aspheric, tested aspherical actual measuring surface shape is finally obtained.
6. a kind of detection means of rotationally symmetrical surface shape of optical aspheric surface, it is characterised in that the device includes reverse compensation striped
Generating means, beam splitting arrangement, standard lens, tested aspherical, imaging system, the reverse compensation striped generating means, beam splitting
Device, standard lens, it is tested it is aspherical from left to right set on optical axis successively, it is described to be tested aspherical, imaging system and be located at
The side any up and down of beam splitting arrangement and its be imaged optical axis perpendicular to optical axis.
7. the detection means of rotation asymmetry surface shape of optical aspheric surface according to claim 6, it is characterised in that：It is described into
As system includes the imaging len set gradually along optical axis and CCD camera.
8. a kind of detection means of rotation asymmetry surface shape of optical aspheric surface, it is characterised in that the device includes reverse compensation bar
Line generating means, beam splitting arrangement, standard lens, tested aspherical, plane mirror, imaging system, the reverse compensation striped
The light beam that generating means are sent projects to tested aspherical through standard lens, and the reflected beams that the tested sphere is sent are through standard
Camera lens, plane mirror reflex to imaging system.
9. the detection means of rotation asymmetry surface shape of optical aspheric surface according to claim 8, it is characterised in that：It is described into
As system includes the imaging len set gradually along optical axis and CCD camera.
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| CN109708591A (en) * | 2019-03-13 | 2019-05-03 | 茂莱（南京）仪器有限公司 | A kind of detection device of aspherical optical element |
| CN110487205A (en) * | 2019-07-31 | 2019-11-22 | 北京理工大学 | In conjunction with the aspherical parameter error interferometric method of the confocal positioning of dispersion |
| CN111288929A (en) * | 2020-03-16 | 2020-06-16 | 苏州依诺维视智能科技有限公司 | Three-dimensional high-precision vision measurement method for workpiece with large curvature surface |
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| CN111288929A (en) * | 2020-03-16 | 2020-06-16 | 苏州依诺维视智能科技有限公司 | Three-dimensional high-precision vision measurement method for workpiece with large curvature surface |
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