CN106841121A - A kind of SPR biochemical sensors based on ridge optical waveguide - Google Patents
A kind of SPR biochemical sensors based on ridge optical waveguide Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
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Abstract
A kind of SPR biochemical sensors based on ridge optical waveguide,It is included on same soi wafer and processes the SPR detection chips and structure of fiber_optic of formation,It is bonded in multiple polymer cavitys that the polymer of chip surface is formed,The micro sprue system formed by polymer cavity body and the photodetector and detection circuit that are set in polymer cavity,SPR detection chips include ridge optical waveguide,Sample cell and metallic film,Optical fiber is coupled by through structure of fiber_optic with ridge optical waveguide,Ridge optical waveguide is coupled to photodetector and detection circuit,It is coupled to sample cell in the stage casing of ridge optical waveguide,Micro sprue system connects sample cell,Sample directly contact in metallic film and sample cell,By ridge optical waveguide input transmit light by after metal film reflector along ridge optical waveguide outgoing,By photodetector and detection circuit probe light intensity change and be converted into electric signal,Realize to the sample detection in sample cell.The sensor is easy to process, and sensitivity is high, low cost.
Description
Technical field
The present invention relates to optics biochemical sensitive technical field, more particularly to a kind of SPR based on ridge optical waveguide
(Surface Plasmon Resonance, surface plasma body resonant vibration) biochemical sensor.
Background technology
With developing rapidly for science and technology, continuous infiltration of the related discipline advanced technology to biomedical sector is biological
There is more and more obvious polarization phenomenon in the development of medical test technology.On the one hand be all kinds of large automatics, high-performance,
Coming out one after another for high efficiency instrument and equipment, substantially increases the operating efficiency of lab analysis detection；On the other hand it is then experiment
The miniaturization of instrument, portability, easy to operateization, result are promptly and accurately changed, and the new biological doctor for producing on this basis
Learn test mode, i.e. Point of Care Testing (POCT).
SPR is to show plasma resonance, is referred to when light beam is radiated at metal film surfaces, if angle of light, wavelength,
Meeting excitating surface plasma resonance when metallic film effective refractive index meets certain condition, so that reflective light intensity has bright
Aobvious decay, by detecting reflective light intensity, can detect the change of the sample contacted with metallic film.SPR biochemical sensitive utensils
There are high sensitivity, real-time, unmarked, lossless decomposition feature, meet very much biomedical detection technique to live real-time detection
The demand of mode development, thus SPR is applied to biochemistry detection field in large quantities.Common spr sensor configuration structure just like
Under it is several：(a) prism-coupled SPR；B () waveguide evanscent field couples SPR；(c) optical fiber；(d) side optical fiber；(e) grating
Coupling SPR；(f) long-range SPR and short distance SPR.
Most of SPR biochemical sensors are passed using prism-coupled SPR and optical fiber to the relevant parameter of test substance
Sense, with transducer sensitivity and resolution ratio very high, and can realize unmarked real time on-line monitoring.Ordinary circumstance
Under, spr sensor is required for using high-resolution tunable laser light source as input light source, and external high-resolution spectrum
Analyzer or high-precision angel measuring instrument detection sensor output signal, thus spr sensor often size is very big, it is difficult to
Realize micro integrated.In addition, the incompatible MEMS processing technologys of prism structure are also that glass prism SPR sensor is difficult to Miniature collecting
Into the reason for changing.
The content of the invention
It is a primary object of the present invention to overcome the deficiencies in the prior art, there is provided a kind of SPR lifes based on ridge optical waveguide
Change sensor, can be with the direct efficient coupling of optical fiber, it is easy to process, sensitivity is high, anti-electromagnetic-radiation, environment resistance are strong, easily
It is integrated in being miniaturized, it is with low cost.
To achieve the above object, the present invention uses following technical scheme：
A kind of SPR biochemical sensors based on ridge optical waveguide, are included on same soi wafer and process the SPR inspections of formation
Survey chip and structure of fiber_optic, be bonded in the SPR detection chips surface polymer formation multiple polymer cavitys, by described
Micro sprue system and set in another part of the multiple polymer cavity that a part for multiple polymer cavitys is formed
Photodetector and detection circuit, the SPR detection chips include ridge optical waveguide, sample cell and metallic film, optical fiber lead to
Cross the end coupling through structure of fiber_optic and the input of the ridge optical waveguide, the output end coupling of the ridge optical waveguide
To the photodetector and detection circuit, the sample cell, the fluid channel system are coupled in the stage casing of the ridge optical waveguide
The system connection sample cell, for changing the sample in the sample cell, the sample in the metallic film and the sample cell
Directly contact, for excitating surface plasma resonance, the light transmitted by the input of the ridge optical waveguide is by the gold
Along the ridge optical waveguide from the output end outgoing of the ridge optical waveguide after category film reflector, by the photodetector and
Detect circuit probe light intensity change simultaneously be converted into electric signal, realize to sample in the sample cell about composition or concentration inspection
Survey.
Further：
The ridge optical waveguide is two light propagation ducts in propagation path top set, described two smooth propagation ducts difference
The sample cell is coupled to, and each corresponding photodetector and detection circuit is coupled in respective output end, it is described
SPR detection chips are included on the soi wafer first medium groove for processing formation, preferably air groove, the first medium
Groove is engaged to form beam splitter with the bifurcation of the ridge optical waveguide, and light beam is divided into two beams, edge with using total internal reflection
Described two smooth propagation ducts are propagated and are respectively completed sample detection respectively.
Described two smooth propagation ducts are symmetricly set on the both sides of the sample cell.
The ridge optical waveguide has many places bending structure, and the SPR detection chips are included on the soi wafer and process
Multiple second medium grooves of formation, preferably air groove, the second medium groove match with the bending place of the ridge optical waveguide
Close and change the direction of propagation of the light in SPR detection chips to press predefined paths using total internal reflection, so that light presses the predetermined road
Propagate and complete sample detection in footpath.
The metallic film is arranged on the side wall of the sample cell, the stage casing bent forming V-shape of the ridge optical waveguide
Structure, the metallic film is oppositely arranged with the bottom of the v-shaped structure.
The polymer is PDMS, it is preferred to use the micro-nano technology technique cavity formed therein that of impressing.
The ridge waveguide is single mode waveguide, the waveguides sections of the ridge optical waveguide protrude from the surface of base material and
In ridged.
The input end of the structure of fiber_optic and the ridge waveguide in same axis, through soi wafer surface deep etching shape
Into size is suitable with single-mode fiber covering；Preferably, the photodetector is in the axis of the output end of the ridge waveguide
On.
The micro sprue system includes inlet, liquid feeding end liquid storage tank, liquid outlet and outlet end liquid storage tank, the inlet
Connect the liquid feeding end liquid storage tank, the liquid feeding end liquid storage tank connects the liquid feeding end of the sample cell, the sample cell goes out liquid
The end connection outlet end liquid storage tank, the outlet end liquid storage tank connects the liquid outlet；Preferably, by the fluid channel
The mode of generation negative pressure realizes the circulation of liquid in system.
The SPR biochemical sensors have multigroup SPR detection chips, the micro sprue system and the photodetection
Device and detection circuit, form array to realize being detected while different samples.
Beneficial effects of the present invention：
The present invention is proposed with a kind of SPR biochemical sensors based on ridge optical waveguide, and the sensor detection sensitivity is high,
Anti-electromagnetic-radiation, environment resistance are strong, it is easy to process, with low cost, it is easy to be miniaturized integrated.When sample concentration in sample cell
Or composition is when changing, former SPR shooting conditions are changed, output intensity occurs significant change, and light is detected by the sensor
Strong change can learn sample variation, according to tunable laser sources, can retest SPR excitation wavelengths, and quantitative analysis is obtained
Change in sample cell.Present invention employs the transmission that ridge optical waveguide is used for light field, it is preferable that coordinate dividing based on air groove
Beam device and bending structure, the beam splitting of light intensity and the change of the direction of propagation in feasible system, light beam splitting can improve light source profit
With rate, a light source can determine the direction of incident light as the detection light source of multiple passages, bending structure, to excite SPR
There is provided advantage.Above structure design and processing can be micron levels, can be carried out by ripe micro-nano technology technique
Mass production.Cooperation is bonded in fluid channel and structure of fiber_optic, the photodetector on detection chip surface, it is possible to achieve sample
Detection.If additionally, carrying out chip array, optimizing micro-channel structure, can carry out being monitored while different samples simultaneously,
Detecting system after array can also be realized realizing quantitative analysis using monochromatic source.
Brief description of the drawings
Fig. 1 is a kind of structure of embodiment of miniature SPR multi-channel biochemicals sensing and detecting system of ridge optical waveguide of the present invention
Schematic diagram；
Fig. 2 is a kind of vertical view of embodiment of miniature SPR multi-channel biochemicals sensing and detecting system of ridge optical waveguide of the present invention
Figure；
Fig. 3 is the heavy in section ridge optical waveguide schematic cross-section in an embodiment of the present invention；
Fig. 4 is SPR multi-channel biochemicals sensing and detecting system schematic diagram described in example 1.
Fig. 5 is the SPR multi-channel biochemical sensing and detecting system schematic diagrames of array described in example 2.
Specific embodiment
Embodiments of the present invention are elaborated below.It is emphasized that what the description below was merely exemplary,
Rather than in order to limit the scope of the present invention and its application.
Refering to Fig. 1 to Fig. 5, in one embodiment, a kind of SPR biochemical sensors based on ridge optical waveguide are included in
The SPR detection chips of formation and structure of fiber_optic 1 are processed on same soi wafer, being polymerized for the SPR detection chips surface is bonded in
Multiple polymer cavitys that thing 9 is formed, the micro sprue system that is formed of a part by the multiple polymer cavity and described
The photodetector and detection circuit set in another part of multiple polymer cavitys, the SPR detection chips include ridged
Fiber waveguide 2, sample cell and metallic film 7, optical fiber is by described through structure of fiber_optic 1 and the input of the ridge optical waveguide 2
End coupling, the output end of the ridge optical waveguide 2 is coupled to the photodetector and detection circuit, the ridge optical waveguide
The sample cell is coupled in 2 stage casing, and the micro sprue system connects the sample cell, for changing the sample in the sample cell
Sample directly contact in product, the metallic film 7 and the sample cell, for excitating surface plasma resonance, by described
The light of the input transmission of ridge optical waveguide 2 is after the metallic film 7 reflects along the ridge optical waveguide 2 from the ridge
The output end outgoing of shape fiber waveguide 2, is radiated on the photodetector and detection circuit, by the photodetector and inspection
Slowdown monitoring circuit detection light intensity change simultaneously be converted into electric signal, realize to sample in the sample cell about composition or concentration inspection
Survey.
In a preferred embodiment, the ridge optical waveguide 2 is two light propagation ducts in propagation path top set, described
Two light propagation ducts are respectively coupled to the sample cell, and are coupled to each corresponding photodetection in respective output end
Device and detection circuit, the SPR detection chips are included on the soi wafer first medium groove 3 for processing formation, preferably empty
Air drain, the first medium groove 3 is engaged to form beam splitter with the bifurcation of the ridge optical waveguide 2, to utilize total internal reflection
Light beam is divided into two beams, is propagated respectively along described two smooth propagation ducts and is respectively completed sample detection.
In a preferred embodiment, described two smooth propagation ducts are symmetricly set on the both sides of the sample cell.
In a preferred embodiment, the ridge optical waveguide 2 has many places bending structure, and the SPR detection chips include
Multiple second medium grooves 4 of formation, preferably air groove, the second medium groove 4 and the ridge are processed on the soi wafer
The bending place of shape fiber waveguide 2 is engaged and changes propagation side of the light in SPR detection chips by predefined paths with using total internal reflection
To so that light is propagated by the predefined paths and completes sample detection.
In a preferred embodiment, the metallic film 7 is arranged on the side wall of the sample cell, the ridge optical waveguide
2 stage casing is bent to form v-shaped structure, and the metallic film 7 is oppositely arranged with the bottom of the v-shaped structure.
In a preferred embodiment, the polymer is PDMS, can be formed therein that using the micro-nano technology technique of impressing
Cavity.
In a preferred embodiment, the ridge waveguide is single mode waveguide.The waveguides sections of the ridge optical waveguide 2 are protruded
In the surface of base material be in ridged, as shown in Figure 3.
In a preferred embodiment, the structure of fiber_optic 1 is passed through with the input end of the ridge waveguide in same axis
Soi wafer surface deep etching is formed, and size is suitable with single-mode fiber covering；
In a preferred embodiment, the photodetector is on the axis of the output end of the ridge waveguide.
In a preferred embodiment, the micro sprue system includes inlet, liquid feeding end liquid storage tank 5, liquid outlet and goes out liquid
End liquid storage tank 6, the inlet connects the liquid feeding end liquid storage tank 5, and the liquid feeding end liquid storage tank 5 connects entering for the sample cell
Liquid end, the outlet end of the sample cell connects the outlet end liquid storage tank 6, and the outlet end liquid storage tank 6 connects the liquid outlet.
In a preferred embodiment, the stream of fluid sample is realized by way of producing negative pressure in the micro sprue system
It is logical.
In a preferred embodiment, the SPR biochemical sensors have multigroup SPR detection chips, the fluid channel
System and the photodetector and detection circuit, form array to realize being detected while different samples.
Specific embodiment of the invention is further described below in conjunction with accompanying drawing.
Refering to Fig. 1 to Fig. 5, the SPR biochemical sensors based on ridge optical waveguide are included by ridge optical waveguide 2, air groove, gold
SPR detection chips, micro sprue system, structure of fiber_optic 1, photodetector and detection circuit 8 that category film 7, sample cell is constituted.Institute
It is the microstructure processed on silicon (SOI) silicon chip in same dielectric substrate to state SPR detection chips, structure of fiber_optic 1；SPR is examined
Survey metallic film 7 in chip and be plated in sample cell side wall, for excitating surface plasma resonance；Micro sprue system is being bonded in core
In the polymer cavity body on piece surface, photodetector array and detection circuit are same in the cavity of above-mentioned polymer.The biochemistry
The change of sample concentration in sample cell or composition can be converted into detecting system the change of output intensity, by photodetector
The change of light intensity can be detected, and then obtains the change of sample in sample cell.The detecting system can directly with single-mode fiber
LASER Light Source is used cooperatively, and by array, it is possible to achieve detected while different samples, and with monochromatic source, photoelectricity
Detector replaces tunable optical source, spectrometer.Ridge waveguide is single mode waveguide in the SPR detection chips.The SPR detections
The hollow tank structure of chip realizes beam splitter and bending waveguiding structure using total internal reflection, and light beam can be divided into two by beam splitter
Beam, the light intensity after beam splitting changes with beam splitter and the relative position of ridge optical waveguide 2, and bending waveguiding structure is used to change light in chip
Interior transmission direction, the change in direction is determined by waveguide and air groove axis relative angle.Ridged ripple in the SPR detection chips
The light for leading interior transmission incides the surface of metallic film 7 through certain angle.The structure of fiber_optic 1 and ridge waveguide input end in
Same axis, is easy to alignment, is formed through SOI pieces surface deep etching, and size is suitable with single-mode fiber covering, can use the set of bonding
Thing is packaged.
The polymer on SPR detection chips surface is bonded in for PDMS (dimethyl silicone polymer), can be using the micro-nano of impressing
Processing technology cavity formed therein that, the PDMS after processing is bonded in detection chip surface.The fluid channel is in polymer cavity
In vivo, the circulation that fluid channel has inlet and liquid outlet, and liquid storage tank, liquid can be carried out by producing negative pressure in runner,
Micro sprue system is used to change the sample in sample cell.Photodetector is on the axis of ridge waveguide output end, can be passed through
Polymer is packaged.
The SPR biochemical sensors can be used cooperatively directly with the LASER Light Source with single-mode fiber, and by array, can be with
Realize being detected while different samples, and replace tunable optical source, spectrometer with monochromatic source, photodetector.
As depicted in figs. 1 and 2, the light that light source sends is through optical fiber at structure of fiber_optic 1 and the input end face coupling of ridge optical waveguide 2
After conjunction, light field is transmitted into detection chip.The beam splitting at air groove 3, through bending after waveguide 4 changes transmission direction at a certain angle
Incide the surface of metallic film 7, the sample directly contact in metallic film and sample cell 10, light is after reflection along ridged light wave
Derivation is penetrated, and is radiated at photodetector and detection circuit 8, completes optical signal to the transformation of electric signal.
Further illustrated below in conjunction with example：
Example 1
It it is 10 μm from top layer silicon thickness, insulating barrier silicon oxide thickness is 2 μm, and substrate silicon thickness is 475 μm of insulator
Upper silicon (SOI) is used as manufacture material.By deep UV lithography and inductively coupled plasma dry etching obtain ridge waveguide with
And air groove, sample pool structure.As shown in figure 4, it is molten to coordinate input tunable laser, single-mode fiber to constitute real-time protein
Liquid concentration detection system, by measuring sample resonance curve, test sample protein concentration.
Example 2
As shown in figure 5, carrying out array to said detecting system, with multiple spr sensors, (spr sensor 1, SPR is passed
Sensor 2, spr sensor 3 ... spr sensor n)；Tunable laser can be replaced using mono-colour laser, and various ripples are provided
Light λ long1、λ2、λ3……λn.Meanwhile, with the use of multiple photoelectric detector PDs 1, PD2, PD3 ... PDn.It is by detecting
The array of system, realizes the measurement of determinand resonance curve, and quantitative analysis is carried out to solution change.
Above content is to combine specific/preferred embodiment further description made for the present invention, it is impossible to recognized
Fixed specific implementation of the invention is confined to these explanations.For general technical staff of the technical field of the invention,
Without departing from the inventive concept of the premise, its implementation method that can also have been described to these makes some replacements or modification,
And these are substituted or variant should all be considered as belonging to protection scope of the present invention.
Claims (10)
1. a kind of SPR biochemical sensors based on ridge optical waveguide, it is characterised in that be included on same soi wafer and process shape
Into SPR detection chips and structure of fiber_optic, be bonded in multiple polymer cavities that the polymer on the SPR detection chips surface is formed
Body, the micro sprue system formed by a part for the multiple polymer cavity and another portion in the multiple polymer cavity
The photodetector and detection circuit set in point, the SPR detection chips include ridge optical waveguide, sample cell and metal foil
Film, optical fiber by the end coupling through structure of fiber_optic and the input of the ridge optical waveguide, the ridge optical waveguide
Output end is coupled to the photodetector and detection circuit, and the sample cell, institute are coupled in the stage casing of the ridge optical waveguide
State micro sprue system and connect the sample cell, for changing the sample in the sample cell, the metallic film and the sample
Sample directly contact in pond, for excitating surface plasma resonance, the light transmitted by the input of the ridge optical waveguide
By after the metal film reflector along the ridge optical waveguide from the output end outgoing of the ridge optical waveguide, by the light
The change of electric explorer and detection circuit probe light intensity is simultaneously converted into electric signal, realizes to the relevant composition of sample in the sample cell
Or the detection of concentration.
2. SPR biochemical sensors as claimed in claim 1, it is characterised in that the ridge optical waveguide is on propagation path point
Branch is two light propagation ducts, and described two smooth propagation ducts are respectively coupled to the sample cell, and in respective output end coupling
Each corresponding photodetector and detection circuit is closed, the SPR detection chips are included on the soi wafer and process shape
Into first medium groove, preferably air groove, the first medium groove is engaged to be formed with the bifurcation of the ridge optical waveguide
Beam splitter, two beams are divided into using total internal reflection by light beam, are propagated respectively and are respectively completed along described two smooth propagation ducts
Sample detection.
3. SPR biochemical sensors as claimed in claim 2, it is characterised in that described two smooth propagation ducts are symmetricly set on
The both sides of the sample cell.
4. SPR biochemical sensors as described in any one of claims 1 to 3, it is characterised in that the ridge optical waveguide has many
Place's bending structure, the SPR detection chips are included on the soi wafer the multiple second medium grooves for processing formation, preferably
Air groove, the second medium groove is engaged with the bending place of the ridge optical waveguide and is changed by predefined paths with using total internal reflection
The direction of propagation of the darkening in SPR detection chips, so that light is propagated by the predefined paths and completes sample detection.
5. SPR biochemical sensors as described in any one of Claims 1-4, it is characterised in that the metallic film is arranged on institute
State on the side wall of sample cell, the stage casing of the ridge optical waveguide is bent to form v-shaped structure, the metallic film and the V-arrangement knot
The bottom of structure is oppositely arranged.
6. SPR biochemical sensors as described in any one of claim 1 to 5, it is characterised in that the polymer is PDMS, excellent
Choosing is using the micro-nano technology technique cavity formed therein that for imprinting.
7. SPR biochemical sensors as described in any one of claim 1 to 6, it is characterised in that the ridge waveguide is single mode ripple
Lead, the waveguides sections of the ridge optical waveguide protrude from the surface of base material and are in ridged.
8. SPR biochemical sensors as described in any one of claim 1 to 7, it is characterised in that the structure of fiber_optic and the ridge
The input end of shape waveguide is formed in same axis through soi wafer surface deep etching, and size is suitable with single-mode fiber covering；It is excellent
Selection of land, the photodetector is on the axis of the output end of the ridge waveguide.
9. SPR biochemical sensors as described in any one of claim 1 to 8, it is characterised in that the micro sprue system include into
Liquid mouth, liquid feeding end liquid storage tank, liquid outlet and outlet end liquid storage tank, the inlet connect the liquid feeding end liquid storage tank, it is described enter
Liquid end liquid storage tank connects the liquid feeding end of the sample cell, and the outlet end of the sample cell connects the outlet end liquid storage tank, described
Outlet end liquid storage tank connects the liquid outlet；Preferably, liquid is realized by way of producing negative pressure in the micro sprue system
The circulation of body.
10. SPR biochemical sensors as described in any one of claim 1 to 9, it is characterised in that detected with multigroup SPR
Chip, the micro sprue system and the photodetector and detection circuit, form array to realize while different samples
Detection.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710237635.7A CN106841121A (en) | 2017-04-12 | 2017-04-12 | A kind of SPR biochemical sensors based on ridge optical waveguide |
| PCT/CN2017/083293 WO2018188137A1 (en) | 2017-04-12 | 2017-05-05 | Ridge waveguide-based spr biochemical sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710237635.7A CN106841121A (en) | 2017-04-12 | 2017-04-12 | A kind of SPR biochemical sensors based on ridge optical waveguide |
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| WO (1) | WO2018188137A1 (en) |
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| CN107478607A (en) * | 2017-07-27 | 2017-12-15 | 清华大学深圳研究生院 | A kind of integrated biochemical sensor based on ridge optical waveguide |
| CN115015182A (en) * | 2022-07-07 | 2022-09-06 | 合肥工业大学 | Integrated SPR sensor based on planar optical waveguide |
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| Publication number | Publication date |
|---|---|
| WO2018188137A1 (en) | 2018-10-18 |
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