CN106769881A - A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping - Google Patents
A kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping Download PDFInfo
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- CN106769881A CN106769881A CN201611169141.1A CN201611169141A CN106769881A CN 106769881 A CN106769881 A CN 106769881A CN 201611169141 A CN201611169141 A CN 201611169141A CN 106769881 A CN106769881 A CN 106769881A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
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Abstract
The invention provides a kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping：The laser that pulse laser sends by the first polarization splitting prism after the one 1/2 wave plate by being divided into two beams；Laser beam one continues to transmit parallel through the first polarization splitting prism, and cold mirror is reached after sequentially passing through laser freuqency doubling module, short wave pass filter, laser modulator, shortwave speculum, and wherein laser modulator is connected with signal generator；Laser beam two reaches cold mirror after sequentially passing through long wave speculum, corner cube mirror, the 2nd 1/2 wave plate, the second polarization splitting prism, quarter wave plate；Laser beam one reaches sample holder after converging with laser beam two by object lens, and wherein sample holder is fixed in three-D electric mobile station, and three-D electric mobile station is connected with servomotor controller；Laser beam two after sample reflection after passing sequentially through object lens, cold mirror, quarter wave plate, the second polarization splitting prism by convex lens focus to photodetector.
Description
Technical field
The invention belongs to thermal conductivity technical field of measurement and test, ultrashort laser pulse pumping Detection Techniques are related generally to, especially related to
And a kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping.
Background technology
Micro-nano structure material widely applies to the fields such as microelectronics, photoelectron, and these micro elements operationally will
High heat flow density is produced, hot stack will directly influence the operating efficiency and reliability of such devices.Solve above-mentioned micro-
Device heat dissipation problem is extremely urgent, and this needs is carried out accurately to the thermotransport property for constituting the micro-nano structure material of above-mentioned micro element
Characterize, to disclose its thermotransport mechanism.Studying ultrafast thermodynamic process, it is often necessary to visit by super short pulse laser pumping
Survey technology.In traditional ultrashort laser pulse pumping detection system, the thermal conductivity of sample surfaces independent position can only be measured, and
Thermal conductivity distribution can not be obtained in sample surfaces specified range, this causes traditional measuring system cannot to meet microelectronics, photoelectricity
The fields such as son are to a large amount of demands with thermal conductivity distribution in microstructure sample surfaces specified range.
The content of the invention
(1) technical problem to be solved
In view of above-mentioned technical problem, system is scanned the invention provides a kind of thermal conductivity based on pumping detection heat reflection technology
System.
(2) technical scheme
According to an aspect of the invention, there is provided a kind of thermal conductivity based on pumping detection heat reflection technology scans system
System：The laser that pulse laser sends by the first polarization splitting prism after the one 1/2 wave plate by being divided into two beams, respectively laser
Beam one and laser beam two；Laser beam one parallel through the first polarization splitting prism continue transmit, sequentially pass through laser freuqency doubling module,
Cold mirror is reached after short wave pass filter, laser modulator, shortwave speculum, wherein laser modulator connects with signal generator
Connect；Laser beam two sequentially passes through long wave speculum, corner cube mirror, the 2nd 1/2 wave plate, the second polarization splitting prism, quarter wave plate
After reach cold mirror；Laser beam one reaches sample holder after converging with laser beam two by object lens, and wherein sample holder is consolidated
Due in three-D electric mobile station, three-D electric mobile station is connected with servomotor controller, servomotor controller with calculate
Machine is connected；Laser beam two by sample reflection after pass sequentially through object lens, cold mirror, quarter wave plate, the second polarization splitting prism after by
Convex lens focus to photodetector, photodetector is connected with lock-in amplifier, and lock-in amplifier is connected with computer.
Preferably, the stroke range of the three-D electric mobile station more than the scope scanned needed for sample, move by three-D electric
The mobile accuracy of dynamic platform is not more than the resolution ratio of scanning needed for sample.
Preferably, three-D electric mobile station described in computer controls is in two dimensions of laser beam incident direction
It is mobile, often change a position, record current location information and carry out pumping detection measurement, and accordingly generate current location
Pumping detectable signal.
Preferably, the pumping detectable signal of lock-in amplifier Real-time Collection photodetector output, computer is real-time
Obtain the output signal of lock-in amplifier.
Preferably, computer extracts the amplitude signal component of lock-in amplifier output signal, while controlling three-D electric to move
Dynamic platform is movable in laser beam incident parallel direction, stops when amplitude signal component is maximum, and now sample is located at object lens
Focal plane position, the process is carried out before each pumping detection measurement.
Preferably, only linear mobile station carries corner cube mirror movement, lock-in amplifier reality in pumping detection measurement process
When collection photodetector output pumping detectable signal, it is linear mobile that linear mobile station often changes position computer record
Platform current location information and lock-in amplifier output signal, until linear mobile station is moved to maximum travel position, then again
Change the position of three-D electric mobile station and repeat said process until scanning completes the Sample Scan region of setting.
Preferably, computer controls three-D electric mobile station is moved with S types, is laterally moved after a measurement point is measured
Dynamic three-D electric mobile station to left side or right side measurement point is measured, and three-dimensional is vertically moved after a line measurement point is measured
Electronic mobile station to upside or downside measurement point measures.
Preferably, the corner cube mirror is fixed in linear mobile station, and the linear mobile station is connected with computer.
Preferably, the laser modulator is electrooptic modulator, acousto-optic modulator or chopper intensity modulation equipment.
Preferably, the spatial resolution of the thermal conductivity scanning system is better than 1 micron.
(3) beneficial effect
From above-mentioned technical proposal as can be seen that the present invention at least has the advantages that one of them：
(1) sample is fixed in three-D electric mobile station, by controlling three-D electric mobile station perpendicular to laser beam
Moved up and down in two dimensions of incident direction, realize thermal conductivity measurement in arbitrfary point in sample surfaces specified range；
(2) before each pumping detection measurement, by controlling three-D electric mobile station before laser beam incident parallel direction
After move, realize full-automatic precise control sample be located at object lens focal plane position；
(3) control sample to be located at the focal plane position of object lens by before each pumping detects measurement, realize sample table
The accurate measurement of thermal conductivity distribution in the specified range of face.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
【Main element】
1st, pulse laser；2nd, the one 1/2 wave plate；3rd, the first polarization splitting prism；4th, laser freuqency doubling module；5th, short-pass
Optical filter；6th, laser modulator；7th, signal generator；8th, shortwave speculum；9th, cold mirror；10th, object lens；11st, linear mobile station；
12nd, corner cube mirror；13rd, long wave speculum；14th, the 2nd 1/2 wave plate；15th, the second polarization splitting prism；16th, convex lens；17、
Photodetector；18th, quarter wave plate；19th, lock-in amplifier；20th, computer；21st, servomotor controller；22nd, sample is fixed
Frame；23rd, three-D electric mobile station.
Specific embodiment
The technical thought of thermal conductivity scanning system based on pumping detection heat reflection technology that the present invention is provided is：Computer
Control three-D electric mobile station moves up and down in two dimensions of laser beam incident direction, often changes once position
Put, record current location information and carry out pumping detection measurement, the output of lock-in amplifier Real-time Collection photodetector
Pumping detectable signal, computer obtains lock-in amplifier output signal in real time, and computer extracts lock-in amplifier output signal
Amplitude signal component, while control three-D electric mobile station movable in laser beam incident parallel direction, in amplitude signal point
Stop when amount is maximum, the process is carried out before each pumping detection measurement.
To make the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
In an exemplary embodiment of the present invention, there is provided a kind of thermal conductivity scanning based on pumping detection heat reflection technology
System.Fig. 1 is the structural representation of the embodiment of the present invention.As shown in figure 1, of the invention detect heat reflection technology based on pumping
Thermal conductivity scanning system includes：Pulse laser 1, the one 1/2 wave plate 2, the first polarization splitting prism 3, laser freuqency doubling module 4,
Short wave pass filter 5, laser modulator 6, signal generator 7, shortwave speculum 8, cold mirror 9, object lens 10, linear mobile station
11st, corner cube mirror 12, long wave speculum 13, the 2nd 1/2 wave plate 14, the second polarization splitting prism 15, convex lens 16, light electrical resistivity survey
Survey device 17, quarter wave plate 18, lock-in amplifier 19, computer 20, servomotor controller 21, sample holder 22, three-D electric
Mobile station 23.
The 800nm linearly polarized lasers of the output of pulse laser 1 deflect by the rear polarizer direction of the one 1/2 wave plate 2, so
It is afterwards two beams, respectively laser beam one and laser beam two by 3 points of the first polarization splitting prism, polarization direction is respectively level and perpendicular
Directly, used as pumping light, laser beam two makes laser beam one and laser beam two to laser beam one as detection light, the one 1/2 wave plate 2 of regulation
Power ratio be about 50:1, laser beam one continues to transmit parallel through the first polarization splitting prism 3, by laser freuqency doubling module
Then 4 rear portion shunt excitation optical sccond-harmonic generations filter the 800nm wavelength lasers of non-frequency multiplication by short wave pass filter 5 to 400nm wavelength,
Then by laser modulator 6, its power level is loaded the signal that frequency is MHz ranks, and the signal comes from signal generation
Device 7, reaches cold mirror 9 after then being reflected by shortwave speculum 8, laser beam two is anti-by the first polarization splitting prism 3, long wave successively
Penetrate mirror 13 and corner cube mirror 12 reflects, wherein corner cube mirror 12 is fixed in linear mobile station 11, linear mobile station 11
Controlled by computer 20, then by the 2nd 1/2 wave plate 14, the 2nd 1/2 wave plate 14 of adjustment makes the inclined of laser beam two to laser beam two
Direction shake from being changed into level vertically, then laser beam two reaches cold after sequentially passing through the second polarization splitting prism 15, quarter wave plate 18
Light microscopic 9, cold mirror 9 makes laser beam one mix conllinear propagation with laser beam two, and co-linear beams reach sample and fix by object lens 10
Frame 22, wherein sample holder 22 are fixed in three-D electric mobile station 23, three-D electric mobile station 23 and Serve Motor Control
Device 21 is connected, and it is inclined that laser beam two reaches second after passing sequentially through object lens 10, cold mirror 9 and quarter wave plate 18 after sample reflection
Shake Amici prism 15, and laser beam two passes twice through the rear polarizer direction of quarter wave plate 18 and is changed into vertical from level and divided by the second polarization
Light prism 15 is reflected, and the induction region of photodetector 17 is then focused on by convex lens 16, and its power level is converted into
Output voltage values, lock-in amplifier 19 separates the component of signal in voltage signal with the output signal same frequency of signal generator 7
And gather, lock-in amplifier 19 is connected with computer 20, the pumping of the output of 19 Real-time Collection photodetector of lock-in amplifier 17
Detectable signal, computer 20 obtains the output signal of lock-in amplifier 19 and extracts amplitude signal component, Serve Motor Control in real time
Device 21 is connected with computer 20, and the control three-D electric of computer 20 mobile station 23 is in two dimensions perpendicular to laser beam incident direction
Moved up and down in degree, three-D electric mobile station 23 often changes a position, record current location information and once taken out
Fortune detection measurement, before pumping detection measurement, control three-D electric mobile station 23 is movable in laser beam incident parallel direction,
Stop when amplitude signal component is maximum, now, sample is located at the focal plane position of object lens 10, in pumping detection measurement process only
Linear mobile station 11 carries corner cube mirror 12 and moves, and the pumping of the output of 19 Real-time Collection photodetector of lock-in amplifier 17 is visited
Survey signal, linear mobile station 11 often changes position computer 20 and records the current location information of linear mobile station 11 and lock mutually puts
The big output signal of device 19, until linear mobile station 11 is moved to maximum travel position, then changes three-D electric mobile station again
23 position simultaneously repeats said process until scanning completes the Sample Scan region of setting.
Sample is located at the focal plane position of object lens 10 when the amplitude signal component of the output signal of lock-in amplifier 19 is maximum, because
This can make amplitude signal component maximum by controlling three-D electric mobile station 23 to be moved forward and backward in laser beam incident parallel direction
The mode of change automatically realizes that precise control sample is located at the focal plane position of object lens 10.
The control three-D electric of computer 20 mobile station 23 is moved with the scan mode S types similar to AFM,
Transverse shifting three-D electric mobile station 23 to left side or right side measurement point measures after being measured a measurement point, in measurement
Vertically move three-D electric mobile station 23 to upside or downside measurement point and measure after completing a line measurement point, eventually through sweeping
Retouch measured region whole measurement point and form sample surfaces thermal conductivity distribution map.
Thermal conductivity data is calculated according to the data that lock-in amplifier 19 is gathered.The spacescan of thermal conductivity scanning system
Resolution ratio is identical with the mobile accuracy of three-D electric mobile station 23, for selected three-D electric mobile station, spacescan resolution ratio
1 micron can be better than.
Pulse laser 1 is used for output line polarized pulses laser, using Mai Tai BB titanium sapphire femtosecond oscillating lasers
Device, pulse width is less than 1ps, preferably smaller than the 80fs, -990nm of wave-length coverage 710, and mean power is more than 1.5W.
One 1/2 wave plate 2 is used to adjust the polarization direction of pulse laser output line polarized pulses laser, uses
The wave plate of Thorlabs WPH05M-808 zero levels 1/2.
First polarization splitting prism 3 is used to for pulse laser to be divided into the mutually perpendicular two beams laser in polarization direction, respectively
Laser beam one and laser beam two, laser beam one are horizontal polarization, and laser beam two is vertical polarization, using Thorlabs PBS052
Polarizing beam splitter cube.
Laser freuqency doubling module 4 halves for the laser frequency of laser beam one to be doubled into wavelength, using BIBO frequency-doubling crystals, swashs
Optimal input wavelength should be consistent with the output wavelength of pulse laser in optical sccond-harmonic generation module.
Short wave pass filter 5 is used to filter the laser of non-frequency multiplication in laser beam one, using Thorlabs FESH0500 hard
Coating short wave pass filter.
Laser modulator 6 be used for by the signal loading of CF specific waveforms to laser beam one, can for electrooptic modulator,
Acousto-optic modulator uses chopper intensity modulation equipment, it is preferred to use electrooptic modulator, and specially Conoptics M350-
160 electrooptic modulators.
The signal of the CF specific waveforms that signal generator 7 is used for needed for producing laser modulator, uses
Keysight 33509B waveform generators.
Shortwave speculum 8 is used to change by reflecting the direction of propagation of laser beam one, flat using Thorlabs BB05-E02
Face speculum.
Long wave speculum 13 is used to change by reflecting the direction of propagation of laser beam two, using Thorlabs BB05-E03
Plane mirror.
Corner cube mirror 12 be used to making the direction of propagation of laser beam two parallel with original direction by reflection and conversely, using
Newport UBBR2.5-5S corner cube mirrors, its reflected parallel degree is better than 5 second of arcs.
Linear mobile station 11 is used to carry corner cube mirror motion, the light path of laser beam two is adjusted, using Newport M-
The linear mobile stations of IMS600PP.
2nd 1/2 wave plate 14 is used to adjust the polarization direction of laser beam two, using Thorlabs WPH05M-808 zero levels 1/
2 wave plates.
Cold mirror 9 is used for reflection laser beam one, and transmission laser beam two makes laser beam one mix with laser beam two, realizes altogether
Line pumping is detected, using Thorlabs FM04 Cold Mirrors.
Object lens 10 are used to focus on laser beam one and laser beam two, using Edmund 10X EO M Plan Apo object lens.
Quarter wave plate 18 is used to adjust the polarization direction of laser beam two, using the ripple of Thorlabs WPQ05M-808 zero levels 1/4
Piece.
Second polarization splitting prism 15 is used to change by reflecting the direction of propagation of laser beam two, using Thorlabs
PBS052 polarizing beam splitter cubes.
Convex lens 16 are used to focus on laser beam two, and constitute micro imaging system with object lens, using Thorlabs
LA1461 planoconvex spotlights.
Photodetector 17 is used to for the energy intensity of laser beam two to be converted to output voltage intensity, and the wavelength of its input should
Output wavelength selection according to pulse laser is ensureing spiking output, it is preferred to use Thorlabs PDA36A silicon substrates across
Photodetector is amplified in resistance.
Lock-in amplifier 19 is used to gather in photodetector output voltage signal with signal generator output signal with frequency
The component of signal of rate, its incoming frequency scope covers the range of signal of laser modulator, it is preferred to use Stanford Research
SR844 lock-in amplifiers.
Sample holder 22 is used to fix measured sample；Three-D electric mobile station 23 is used to carry sample holder shifting
It is dynamic, the relative position of adjustment sample and object lens, using the axle electricity driving displacement platforms of Thorlabs PT3/M-Z8 tri-, its stroke range is big
The scope scanned needed for sample, preferably stroke 25mm, and mobile accuracy is not more than the resolution ratio of scanning needed for sample.
Servomotor controller 21 is used to drive three-D electric mobile station to move, vertical using Thorlabs KDC101 K-types
Cube has brush DC servomotor controllers.
Computer 20 is used to control servomotor controller and linear mobile station, the signal of record lock-in amplifier collection and
The position of linear mobile station and three-D electric mobile station.
Be fixed on sample in three-D electric mobile station by the present invention, is connected with computer by servomotor controller, counts
Calculation machine obtains the data that lock-in amplifier is collected simultaneously, by the Treatment Analysis output control three-D electric mobile station to data
Movement, it is possible to achieve following two purposes：Realize that Automatic Control sample surfaces are located at focal plane of lens position, realize sample
Thermal conductivity measurement in arbitrfary point in the specified range of surface, both are implemented in combination with the precision of thermal conductivity distribution in sample surfaces specified range
Measurement.
It should be noted that in accompanying drawing or specification text, the implementation for not illustrating or describing is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.Additionally, the above-mentioned definition to each element and method is simultaneously
Various concrete structures, shape or the mode mentioned in embodiment are not limited only to, those of ordinary skill in the art can carry out letter to it
Singly change or replace, for example：
(1) corner cube mirror can also use the orthogonally located form of normal mirror；
(2) lock-in amplifier can coordinate lock phase software to replace with high-speed data acquisition card；
Also, it should be noted that the demonstration of the parameter comprising particular value can be provided herein, but these parameters are without definite etc.
In corresponding value, but analog value can be similar in acceptable error margin or design constraint.The side mentioned in embodiment
To term, for example " on ", D score, "front", "rear", "left", "right" etc., be only the direction of refer to the attached drawing, not for limiting this
The protection domain of invention.Additionally, unless specifically described or the step of must sequentially occur, the order of above-mentioned steps has no and is limited to
It is listed above, and can change or rearrange according to required design.And above-described embodiment can be based on design and reliability
Consider, be mixed with each other collocation using or used with other embodiment mix and match, i.e., the technical characteristic in different embodiments can be with
Freely form more embodiments.
Although additionally, it will be appreciated by those of skill in the art that some embodiments described herein include other embodiments
In included some features rather than further feature, but the combination of the feature of different embodiments means in of the invention
Within the scope of and form different embodiments.For example, in the following claims, embodiment required for protection is appointed
One of meaning mode can be used in any combination.
It should be noted that above-described embodiment the present invention will be described rather than limiting the invention, and ability
Field technique personnel can design alternative embodiment without departing from the scope of the appended claims.In the claims,
Any reference symbol being located between bracket should not be configured to limitations on claims.Word "comprising" is not excluded the presence of not
Element listed in the claims or step.Word "a" or "an" before element is not excluded the presence of as multiple
Element.The present invention can come real by means of the hardware for including some different elements and by means of properly programmed computer
It is existing.If in the unit claim for listing equipment for drying, several in these devices can be by same hardware branch
To embody.The use of word first, second, and third does not indicate that any order.These words can be explained and run after fame
Claim.
Furthermore, the word of ordinal number such as " first ", " second ", " the 3rd " etc. used in specification and claim,
To modify corresponding element, itself simultaneously unexpectedly contains and represents the element and have any ordinal number, do not represent yet a certain element with it is another
Order in the order or manufacture method of one element, the element that the use of those ordinal numbers is only used for making to have certain name is obtained
Clear differentiation can be made with another element with identical name.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, should be understood that and the foregoing is only specific embodiment of the invention, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., should be included in guarantor of the invention
Within the scope of shield.
Claims (10)
1. it is a kind of based on pumping detect heat reflection technology thermal conductivity scanning system, it is characterised in that：What pulse laser sent
Laser by the first polarization splitting prism after the one 1/2 wave plate by being divided into two beams, respectively laser beam one and laser beam two；Laser
Beam one continues to transmit parallel through the first polarization splitting prism, sequentially passes through laser freuqency doubling module, short wave pass filter, laser and adjusts
Cold mirror is reached after device processed, shortwave speculum, wherein laser modulator is connected with signal generator；Laser beam two sequentially passes through length
Cold mirror is reached after wave reflection mirror, corner cube mirror, the 2nd 1/2 wave plate, the second polarization splitting prism, quarter wave plate；Laser beam one
Sample holder is reached by object lens after converging with laser beam two, wherein sample holder is fixed in three-D electric mobile station,
Three-D electric mobile station is connected with servomotor controller, and servomotor controller is connected with computer；Laser beam two is by sample
Passed sequentially through after object lens, cold mirror, quarter wave plate, the second polarization splitting prism by convex lens focus to photodetection after product reflection
Device, photodetector is connected with lock-in amplifier, and lock-in amplifier is connected with computer.
2. it is according to claim 1 based on pumping detect heat reflection technology thermal conductivity scanning system, it is characterised in that：Institute
The scope of the stroke range more than scanning needed for sample of three-D electric mobile station is stated, the mobile accuracy of three-D electric mobile station is little
The resolution ratio scanned needed for sample.
3. it is according to claim 1 based on pumping detect heat reflection technology thermal conductivity scanning system, it is characterised in that：Meter
Calculation machine controls the three-D electric mobile station to be moved in two dimensions of laser beam incident direction, often changes once position
Put, record current location information and carry out pumping detection measurement, and accordingly generate the pumping detectable signal of current location.
4. it is according to claim 3 based on pumping detect heat reflection technology thermal conductivity scanning system, it is characterised in that：Lock
The pumping detectable signal of phase amplifier Real-time Collection photodetector output, computer obtains the defeated of lock-in amplifier in real time
Go out signal.
5. it is according to claim 4 based on pumping detect heat reflection technology thermal conductivity scanning system, it is characterised in that：Meter
Calculation machine extracts the amplitude signal component of lock-in amplifier output signal, while controlling three-D electric mobile station incident flat in laser beam
Line direction is moved forward and backward, and is stopped when amplitude signal component is maximum, and now sample is located at the focal plane position of object lens, and the process exists
Carried out before each pumping detection measurement.
6. it is according to claim 5 based on pumping detect heat reflection technology thermal conductivity scanning system, it is characterised in that：Take out
Only linear mobile station carries corner cube mirror movement in fortune detection measurement process, and lock-in amplifier Real-time Collection photodetector is defeated
The pumping detectable signal for going out, linear mobile station often changes a position computer and records linear mobile station current location information and lock
Phase amplifier output signal, until linear mobile station is moved to maximum travel position, then changes three-D electric mobile station again
Position and repeat said process until scanning complete setting Sample Scan region.
7. it is according to claim 1 based on pumping detect heat reflection technology thermal conductivity scanning system, it is characterised in that：Meter
Calculation machine controls three-D electric mobile station to be moved with S types, the transverse shifting three-D electric mobile station after a measurement point is measured
Measured to left side or right side measurement point, three-D electric mobile station to upside is vertically moved after a line measurement point is measured
Or downside measurement point is measured.
8. a kind of thermal conductivity scanning system that heat reflection technology is detected based on pumping according to claim 1, its feature exists
In：The corner cube mirror is fixed in linear mobile station, and the linear mobile station is connected with computer.
9. it is according to claim 1 based on pumping detect heat reflection technology thermal conductivity scanning system, it is characterised in that：Institute
Laser modulator is stated for electrooptic modulator, acousto-optic modulator or chopper intensity modulation equipment.
10. it is according to claim 1 based on pumping detect heat reflection technology thermal conductivity scanning system, it is characterised in that：
The spatial resolution of the thermal conductivity scanning system is better than 1 micron.
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| CN109085197A (en) * | 2018-06-29 | 2018-12-25 | 中国科学院电工研究所 | Heat reflection measuring system |
| CN109387718A (en) * | 2018-12-07 | 2019-02-26 | 成都精位科技有限公司 | UWB amplifier performance detection method and system |
| CN109444212A (en) * | 2018-11-12 | 2019-03-08 | 中国科学院电工研究所 | A kind of near field heat reflection measuring device |
| CN110275154A (en) * | 2019-07-05 | 2019-09-24 | 哈尔滨工业大学 | A kind of laser radar Polarization Detection optics regulating mechanism |
| CN112268861A (en) * | 2020-10-24 | 2021-01-26 | 江苏明盈科技有限公司 | Dual-wavelength femtosecond pumping detection heat reflection system |
| CN112268860A (en) * | 2020-10-24 | 2021-01-26 | 江苏明盈科技有限公司 | Dual-wavelength femtosecond pumping detection heat reflection system |
| WO2021227134A1 (en) * | 2020-05-11 | 2021-11-18 | 中国科学院上海光学精密机械研究所 | Absorptive defect single-beam photothermal measurement device and measurement method |
| CN114252476A (en) * | 2021-12-14 | 2022-03-29 | 华中科技大学 | Optical device and method for measuring in-plane thermal conductivity of submillimeter-level sample |
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