CN106707213B - A kind of digital integrated electronic circuit standard sample of photo - Google Patents

A kind of digital integrated electronic circuit standard sample of photo Download PDF

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Publication number
CN106707213B
CN106707213B CN201611241276.4A CN201611241276A CN106707213B CN 106707213 B CN106707213 B CN 106707213B CN 201611241276 A CN201611241276 A CN 201611241276A CN 106707213 B CN106707213 B CN 106707213B
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voltage
mcu
electric current
standard sample
output terminal
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CN106707213A (en
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胡勇
孙海
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Wuhan Institute Of Digital Engineering (china Shipbuilding Industry Corp Seventh 0 Nine Institute)
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Wuhan Institute Of Digital Engineering (china Shipbuilding Industry Corp Seventh 0 Nine Institute)
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
    • G01R35/007Standards or reference devices, e.g. voltage or resistance standards, "golden references"

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

The present invention discloses a kind of digital integrated electronic circuit standard sample of photo, including sequentially connected signaling conversion circuit, analog to digital conversion circuit, MCU, the input terminal of signal conversion circuit and the voltage of integrated circuit test system or the connection of current signal end, output terminal of the input terminal of MCU also with integrated circuit test system, module of tracing to the source is connected, and the output terminal of MCU and the control signal of signaling conversion circuit connect;The input terminal for module of tracing to the source is connected with the voltage or current signal end;The mode control signal that wherein MCU is inputted according to integrated circuit test system controls the operational mode and measurement pattern type of the standard sample of photo, is additionally operable to that voltage or electric current are measured and calibrated.It can be directly used in the on-line measurement and calibration that the making alive of integrated circuit test system surveys voltage, making alive surveys electric current, adds electric current survey electric current, electric current is added to survey voltage, and real-time display measurement result.Have the function of to trace to the source simultaneously, can guarantee the accuracy of calibration result.

Description

A kind of digital integrated electronic circuit standard sample of photo
Technical field
The present invention relates to microelectronics field of measuring techniques, and in particular to one kind is used for integrated circuit test system on-line calibration Digital integrated electronic circuit standard sample of photo.
Background technology
Microelectronics magnitude tracing, the method transferred and approach are always to hinder microelectronics measurement verification, calibration and comparison work Make the key point carried out.And standard sample of photo is the good approach realized magnitude tracing and transferred, and has and is convenient for carrying, calibrated Journey is simple, can be with field calibration many advantages, such as.There are mainly two types of the standard sample of photo that microelectronics metering field uses at present.It is a kind of It is to investigate the repeatability of standard sample of photo and stability by a series of screenings and its periodic survey, and from existing integrated circuit In select magnitude and meet the integrated circuit of certain uncertainty requirement definite value is carried out to it.Another kind is by using accurate electricity The magnitude of Analogous Integrated Electronic Circuits parameter is hindered, in a manner that integrated circuit test system and high accuracy self contained instrument are combined pair It carries out definite value.Both standard sample of photo are both needed to first carry out definite value to it before use, and definite value will spend the longer cycle, and There is no the parameter area of definite value to cannot be used for calibrating, lack flexibility, therefore in the gamut calibration for the system of testing With certain limitation.Simultaneously as the circuit when standard sample of photo carries out definite value and returning during for testing system calibration Road is not fully consistent, can cause to generate certain error when calibration.In addition also lack at present and surveyed for digital integrated electronic circuit The standard sample of photo of test system on-line calibration, thus the such standard sample of photo of development is very important.
The content of the invention
In view of this, it is necessary to provide one kind for integrated circuit test system on-line calibration and can guarantee calibration result standard The digital integrated electronic circuit standard sample of photo of true property.
A kind of digital integrated electronic circuit standard sample of photo, including signaling conversion circuit, analog to digital conversion circuit, MCU, power module; The input terminal of signal conversion circuit is connected with the voltage of external integrated circuit test system or current signal end, signal conversion electricity The output terminal on road and the input terminal of analog to digital conversion circuit connect, the output terminal of analog to digital conversion circuit and the input terminal of MCU, MCU's Output terminal of the input terminal also with the output terminal of integrated circuit test system, external module of tracing to the source is connected, the output terminal and letter of MCU The control signal connection of number conversion circuit;The input terminal for module of tracing to the source is connected with the voltage or current signal end;Power supply mould Block is connected respectively with signaling conversion circuit, analog to digital conversion circuit, MCU;
Wherein, the mode control signal that MCU is inputted according to integrated circuit test system controls the operation of the standard sample of photo Pattern and measurement pattern type;Operational mode includes measurement pattern and calibration mode;Measurement pattern type includes making alive and surveys electricity Die pressing type, making alive survey current-mode plus electric current surveys current-mode plus electric current surveys voltage mode;
MCU is additionally operable to the voltage of the standard sample of photo detection or electric current in calibration mode and is detected with module of tracing to the source Voltage or electric current, and by the error of voltage or electric current store;Simultaneously in measurement pattern according to the error to the standard The voltage or electric current of print detection are modified.
The digital integrated electronic circuit standard sample of photo of the present invention, the making alive that can be directly used in integrated circuit test system survey electricity Pressure, making alive survey electric current plus electric current surveys electric current plus electric current surveys the on-line measurement and calibration of voltage, and real-time display measurement result. Have the function of to trace to the source simultaneously, can guarantee the accuracy of calibration result.In addition, the standard sample of photo integrated level is high, has excellent performance, volume It is small, easy to carry, it can trace to the source, be well positioned to meet the demand of Contemporary Digital integrated circuit parameter field calibration.
Description of the drawings
Fig. 1 is the structure diagram of digital integrated electronic circuit standard sample of photo of the present invention;
Fig. 2 is the concrete structure block diagram of digital integrated electronic circuit standard sample of photo of the present invention;
Fig. 3 is the physical circuit schematic diagram of signaling conversion circuit.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, it is right The present invention is further elaborated, it should be understood that and the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.
A kind of digital integrated electronic circuit standard sample of photo provided by the invention, structure diagram including signal as shown in Figure 1, convert Circuit, analog to digital conversion circuit, MCU, power module.The input terminal of signal conversion circuit and external integrated circuit test system Voltage or the connection of current signal end, the output terminal of signaling conversion circuit and the input terminal of analog to digital conversion circuit connect.Analog-to-digital conversion The output terminal of circuit and the input terminal of MCU.The input terminal of MCU also with the output terminal of integrated circuit test system, external trace to the source The output terminal connection of module, the output terminal of MCU and the control signal of signaling conversion circuit connect.The input terminal for module of tracing to the source with The voltage or the connection of current signal end.Power module is connected respectively with signaling conversion circuit, analog to digital conversion circuit, MCU.
Wherein, the mode control signal that MCU is inputted according to integrated circuit test system controls the operation of the standard sample of photo Pattern and measurement pattern type.Operational mode includes measurement pattern and calibration mode.Measurement pattern type includes making alive and surveys electricity Die pressing type, making alive survey current-mode plus electric current surveys current-mode plus electric current surveys voltage mode.
MCU is additionally operable to the voltage of the standard sample of photo detection or electric current in calibration mode and is detected with module of tracing to the source Voltage or electric current, and by the error of voltage or electric current store.Simultaneously MCU in measurement pattern according to the error to the mark The voltage or electric current of quasi- print detection are modified.
Specifically, the circuit diagram of digital integrated electronic circuit standard sample of photo is as shown in Fig. 2, signaling conversion circuit includes first Build-out resistor network module, operational amplifier, the second build-out resistor network module.The input terminal of first build-out resistor network and institute Voltage or the connection of current signal end are stated, the output terminal of the first build-out resistor network and the in-phase input end of operational amplifier connect. The output terminal of operational amplifier is connected with the input terminal of the second build-out resistor network, the input terminal of analog to digital conversion circuit.Second The inverting input connection of output terminal and operational amplifier with resistor network.The output terminal of MCU and the first build-out resistor network The control signal of module, the connection of the control signal of the second build-out resistor network module.Wherein, MCU is additionally operable to control first Build-out resistor network module surveys the amount of the survey voltage of the second build-out resistor network module of range switching and control of voltage or electric current Journey switches.
Wherein, the first build-out resistor network module by resistance and switchs branch in series including resistance Rx, several. It preferably but is not limited to, as shown in figure 3, the number of resistance and switch is 4, is denoted as resistance R1-R4, switch S1-S4 respectively. Resistance R1 and the switch S1 first branchs in series.Resistance R2 and switch S2 the second branches in series.Resistance R3 and switch S3 3rd branch in series.Resistance R4 and switch S4 the 4th branches in series.The first branch, the second branch, the 3rd branch, Four branch circuit parallel connections.Circuit on one side ground connection after parallel connection, the circuit other end after parallel connection pass through resistance Rx and the voltage or electric current Signal end connects, and the circuit other end after the parallel connection is also connected with the in-phase input end of operational amplifier.Switch the control of S1-S4 End processed is connected with the output terminal of MCU.
Second build-out resistor network module includes resistance R0, multiplexer, several resistance Rn.Wherein, resistance Rn Number is not more than multiplexer output number.Illustratively, as shown in figure 3, several resistance Rn is respectively resistance R5- The output terminal connection of R8, the input terminal of multiplexer and operational amplifier, the control terminal of multiplexer and the output terminal of MCU Connection, resistance R5-R8 connect respectively with four output terminals of multiplexer, the reverse phase of circuit and operational amplifier after series connection Input terminal connects, while the circuit after series connection is grounded through resistance R0.
Further, digital integrated electronic circuit standard sample of photo further includes the display module being connected with the output terminal of MCU.Show mould Block is used to show revised voltage or electric current.Optionally, switch S1-S4 replaces with multiplexer, and the four of multiplexer A output terminal is connected respectively with resistance R1-R4, and the control terminal of multiplexer is connected with MCU output terminals.
When in use, integrated circuit test system exports calibration mode control signal to MCU, and MCU control standard sample of photo is adopted Collect the voltage or electric current of integrated circuit test system, and be transmitted to MCU.External module of tracing to the source simultaneously, module of tracing to the source are high for precision Instrument of tracing to the source.The voltage or electric current of module of tracing to the source acquisition integrated circuit test system input, and it is transmitted to MCU.MCU marks this The voltage or electric current that quasi- print collects obtain voltage or electric current miss compared with voltage or electric current that module of tracing to the source collects Difference simultaneously stores, and the voltage or electric current for being detected during measurement pattern to standard sample of photo are modified.Work as integrated circuit testing When system exports measurement mode control signal, the voltage or electricity of MCU control standard sample of photo acquisition integrated circuit test system inputs Stream, MCU carry out voltage or electric current according to the measurement pattern type control signals conversion circuit that integrated circuit test system exports Conversion, transformed voltage or electric current are converted into digital signal through analog to digital conversion circuit, are transmitted to MCU.MCU is according to the electricity of storage Pressure or the electric current voltage actually detected to standard sample of photo or electric current are modified, and by revised voltage or electric current in display mould It is shown on block.
When measurement pattern type surveys voltage mode for making alive, MCU control switches S1-S4 is disconnected, and is not connected into resistance R1- R4.Voltage measurement is divided into 4 gears, and voltage range is respectively:0~10mV, 10mV~100mV, 100mV~1V, 1V~10V. The resistance that circuit is connected into the switching that voltage range is corresponding in turn to is respectively R5, R6, R7, R8;It is corresponding in turn to simultaneously, computing is put The amplification factor of big device is respectively 1000,100,10,1.Current-mode is surveyed in making alive plus electric current surveys current-mode plus electric current When surveying voltage mode, standard sample of photo is connected into different resistance R1, R2, R3, R4 by switching, calculates the resistance for flowing through and being connected into circuit Voltage or electric current.Wherein, current measurement is divided into 4 gears, and current range is respectively:0~0.2mA, 0.2mA~2mA, 2A~ 20mA, 20mA~200mA.The resistance value that circuit is connected into the switching that current range is corresponding in turn to is respectively R1=25k Ω, R2= 2500 Ω, R3=250 Ω, R4=25 Ω, the amplification factor of operational amplifier is 1.
When the digital integrated electronic circuit standard sample of photo of the present invention is encapsulated using corresponding electronic element and chip according to foregoing circuit Afterwards, the pin explanation being connected with outer member is shown in Table 1 in detail.For example, the model C8051F340 of MCU, pin P3.0- Four pins in P3.7 can as the controlling switch C1 of standard sample of photo, controlling switch C2, mode pins, BUSY pins, with Integrated circuit test system connects;Two pins in four additional pin can draw as RXD pins, the TXD of standard sample of photo Foot, module is connected with tracing to the source.
Pin after the encapsulation of 1 digital integrated electronic circuit standard sample of photo of table
When carrying out integrated circuit test system calibration using the digital integrated electronic circuit standard sample of photo of the present invention, by standard sample of photo It is placed on integrated circuit test system test fixture.Integrated circuit test system power pins connect with standard sample of photo power pins It connects, integrated circuit test system digital channel is connected with each controlling switch of standard sample of photo, the digital channel and standard sample being calibrated Piece measuring signal input pin connects.It powers on to standard sample of photo, according to selected calibration object, is surveyed by integrated circuit first Test system application control signal causes standard sample of photo to work in, and making alive surveys voltage, making alive surveys electric current plus electric current is surveyed electric current, added One kind in these four measurement pattern types of electric current survey voltage.Then integrated circuit test system starts to measure, and provides electricity Pressure or current measurement value, while standard sample of photo performs corresponding voltage or current measurement and real-time display measured value.By standard sample Piece measured value is compared with integrated circuit test system measured value, so as to obtain the measurement error of integrated circuit test system.
The digital integrated electronic circuit standard sample of photo of the present invention, the making alive that can be directly used in integrated circuit test system survey electricity Pressure, making alive survey electric current plus electric current surveys electric current plus electric current surveys the on-line measurement and calibration of voltage, and real-time display measurement result. Have the function of to trace to the source simultaneously, can guarantee the accuracy of calibration result.In addition, the standard sample of photo integrated level is high, has excellent performance, volume It is small, easy to carry, it can trace to the source, be well positioned to meet the demand of Contemporary Digital integrated circuit parameter field calibration.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all the present invention spirit and Within principle, any modifications, equivalent replacements and improvements are made should all be included in the protection scope of the present invention.

Claims (5)

1. a kind of digital integrated electronic circuit standard sample of photo, which is characterized in that including signaling conversion circuit, analog to digital conversion circuit, MCU, Power module;The input terminal of signal conversion circuit is connected with the voltage of external integrated circuit test system or current signal end, The input terminal of the output terminal of signaling conversion circuit and analog to digital conversion circuit connects, and the output terminal of analog to digital conversion circuit and MCU's is defeated Enter end, the output terminal of the input terminal of MCU also with the output terminal of integrated circuit test system, external module of tracing to the source is connected, MCU's The control signal of output terminal and signaling conversion circuit connects;The input terminal for module of tracing to the source connects with the voltage or current signal end It connects;Power module is connected respectively with signaling conversion circuit, analog to digital conversion circuit, MCU;
Wherein, the mode control signal that MCU is inputted according to integrated circuit test system controls the operational mode of the standard sample of photo With measurement pattern type;Operational mode includes measurement pattern and calibration mode;Measurement pattern type includes making alive and surveys voltage-mode Formula, making alive survey current-mode plus electric current surveys current-mode plus electric current surveys voltage mode;
MCU is additionally operable to the voltage of the standard sample of photo detection or electric current and the electricity that module detects of tracing to the source in calibration mode Pressure or electric current, and the error of voltage or electric current is stored;Simultaneously in measurement pattern according to the error to the standard sample of photo The voltage or electric current of detection are modified.
2. a kind of digital integrated electronic circuit standard sample of photo according to claim 1, which is characterized in that signaling conversion circuit includes First build-out resistor network module, operational amplifier, the second build-out resistor network module, the input terminal of the first build-out resistor network It is connected with the voltage or current signal end, the output terminal of the first build-out resistor network and the in-phase input end of operational amplifier connect It connecing, the output terminal of operational amplifier is connected with the input terminal of the second build-out resistor network, the input terminal of analog to digital conversion circuit, and second The output terminal of build-out resistor network and the inverting input of operational amplifier connect, the output terminal of MCU and the first build-out resistor net The control signal of network module, the connection of the control signal of the second build-out resistor network module;Wherein, MCU is additionally operable to control One build-out resistor network module surveys the survey voltage of the second build-out resistor network module of range switching and control of voltage or electric current Range switches.
A kind of 3. digital integrated electronic circuit standard sample of photo according to claim 2, which is characterized in that first build-out resistor Network module is including resistance Rx, several by resistance and switch branch in series, several branch circuit parallel connections, after in parallel Circuit on one side ground connection, it is in parallel after the circuit other end be connected by resistance Rx with the voltage or current signal end, it is described simultaneously The circuit other end after connection is also connected with the in-phase input end of operational amplifier;Output of the control terminal of the switch with MCU End connection.
A kind of 4. digital integrated electronic circuit standard sample of photo according to claim 2, which is characterized in that second build-out resistor Network module includes resistance R0, multiplexer, several resistance Rn, wherein, the number of resistance Rn is not more than multiplexer Output terminal number, the input terminal of multiplexer and the output terminal of operational amplifier connect, the control terminal and MCU of multiplexer Output terminal connection, each resistance Rn connects respectively with the output terminal of multiplexer, circuit and operational amplifier after series connection Inverting input connection, while connect after circuit through resistance R0 be grounded.
5. a kind of digital integrated electronic circuit standard sample of photo according to any one of claim 1 to 4, which is characterized in that described Standard sample of photo further includes the display module being connected with the output terminal of MCU, and display module is used to show revised voltage or electric current.
CN201611241276.4A 2016-12-29 2016-12-29 A kind of digital integrated electronic circuit standard sample of photo Active CN106707213B (en)

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CN109375126A (en) * 2018-09-30 2019-02-22 中国船舶重工集团公司第七0九研究所 Integrated circuit test system self-checking device and method based on digital analog converter
CN110554232A (en) * 2019-09-12 2019-12-10 上海剑桥科技股份有限公司 RSSI current detection device for output pin of ROSA
CN114236446B (en) * 2021-10-25 2024-01-16 中国船舶重工集团公司第七0九研究所 Integrated circuit voltage parameter standard reproduction device and method based on analog voltage source

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JP4291494B2 (en) * 2000-04-04 2009-07-08 株式会社アドバンテスト IC test equipment timing calibration equipment
US7340366B2 (en) * 2004-03-04 2008-03-04 Atmel Corporation Method and apparatus of temperature compensation for integrated circuit chip using on-chip sensor and computation means
CN103176161B (en) * 2013-03-11 2015-05-20 中国人民解放军63908部队 Automatic electric quantity calibrating system and automatic electric quantity calibrating method
CN103675647B (en) * 2013-12-10 2016-06-29 中国船舶重工集团公司第七0九研究所 A kind of calibrating installation based on integrated circuit standard print and method
CN103901382B (en) * 2014-03-26 2016-07-06 孙家林 A kind of calibration detection apparatus of time current table
CN104991214B (en) * 2015-07-30 2017-12-29 中国船舶重工集团公司第七0九研究所 Digital integrated electronic circuit DC parameter standard reproducing method and standard set-up

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