CN106607775B - Abrasive Disc with Internal Fluid Supply Structure - Google Patents
Abrasive Disc with Internal Fluid Supply Structure Download PDFInfo
- Publication number
- CN106607775B CN106607775B CN201610622789.3A CN201610622789A CN106607775B CN 106607775 B CN106607775 B CN 106607775B CN 201610622789 A CN201610622789 A CN 201610622789A CN 106607775 B CN106607775 B CN 106607775B
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- Prior art keywords
- channel
- mill
- pedestal
- grinding
- dynamic modulus
- Prior art date
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Links
- 239000012530 fluid Substances 0.000 title abstract description 23
- 238000000227 grinding Methods 0.000 claims abstract description 72
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 12
- 239000000919 ceramic Substances 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- 239000001828 Gelatine Substances 0.000 claims description 5
- 229920000159 gelatin Polymers 0.000 claims description 5
- 235000019322 gelatine Nutrition 0.000 claims description 5
- 239000007788 liquid Substances 0.000 abstract description 9
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 238000009966 trimming Methods 0.000 abstract 1
- 239000002173 cutting fluid Substances 0.000 description 17
- 230000000694 effects Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000003082 abrasive agent Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000008400 supply water Substances 0.000 description 2
- 238000005119 centrifugation Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000003340 mental effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/10—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with cooling provisions
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The invention discloses a grinding disc with an internal fluid supply structure, which is used for being arranged on a driving shaft with a plurality of liquid supply pipelines and comprises a porous grinding layer and a base, wherein the porous grinding layer comprises a combining surface and a grinding surface which are opposite; the base is combined on the combining surface, the base comprises a plurality of channels penetrating through the base, the channels are arranged in a concentric circle or radial mode, at least one part of the channels extends to the edge of the combining surface, each channel is used for being provided with the liquid supply pipeline, therefore, the grinding disc of the invention can adjust the fluid outlet quantity of different positions of the grinding surface of the porous grinding layer by controlling the supply or non-supply or flow quantity of fluid in each channel, further the consumption of different positions of the grinding surface is influenced, and the trimming times are reduced by effectively slowing down the deformation of the grinding surface.
Description
Technical field
The present invention is about a kind of mill with internal supply fluidic structures.
Background technology
Attrition process is a kind of utilization mill contact friction workpiece surface, can make workpiece surface flat to remove workpiece material
Whole processing technology, for example, in semiconductor process, semiconductor substrate is ground by after saw blade cutting by mill
Substrate surface, to remove cut mark and establish reference plane.And mill contact friction workpiece surface during, will produce chip and
Therefore high temperature provides cutting fluid to the contact position of mill and workpiece surface during attrition process, takes away and cut to cutting fluid
It considers to be worth doing and achievees the effect that cooling.
Some mill structures are disclosed in the prior art, for example：
Taiwan Patent bulletin M492522 new patent cases disclose a kind of polishing grinding device, including with through-hole
Pedestal and grinding wheel with hole, the grinding wheel are connected to the pedestal, and when executing polishing grinding operation, the through-hole of pedestal carries
For liquid or gas enters, and is circulated to workpiece surface by the hole of grinding wheel.Wherein, the through-hole on the pedestal is evenly distributed
And each through-hole connection provides the pipe fitting of liquid or gas, with the uniformly offer cutting contacted with workpiece for grinding wheel
Liquid, however, since not necessarily surface quality identical as grinding wheel area or workpiece is not necessarily uniform for the size of workpiece, and cause
Wheel face each section because grinding generate consumption differ, wheel face will be deformed and out-of-flatness, thus need through
Often finishing is safeguarded.
It is another to there is Taiwan Patent to announce No. 391208 patent of invention cases of I, grinding for a kind of adjustable in dynamic balance and chip removal is disclosed
Grinding abrasive disk, wherein grinding wheel are sheathed on swivel bearing, and the swivel bearing has cutting fluid water outlet, to supply cutting
Liquid to the grinding wheel, however, due in this case swivel bearing be installed on the axis hole in the grinding wheel center, i.e., it is described to grind
Grinding abrasive disk be around the rotary shaft, and cutting fluid by the swivel bearing bottom cutting fluid water outlet flow out, because
, when the grinding wheel spin finishing workpiece, cutting fluid is easy to be arranged, and cutting fluid is caused to be difficult to be provided to institute appositely for this
There is the surface that grinding wheel is contacted with workpiece, and it is even more impossible to adjust the amount of cutting fluid on wheel face different location, thus causes to radiate
Effect is more bad, and wheel face easily out-of-flatness due to consumption difference.
In addition, a kind of grinding wheel of Japanese patent application 1996-118239 patent disclosures, it includes pedestal and multiple grindings
Segment, the grinding segment is arranged in the base-plates surface, and abrasive sheet section compartment of terrain configures and forms gutter
There is the axis hole being connected to the drainage groove, cutting fluid to circulate in the drainage groove to take away for slot, the base central
The thermal energy generated when grinding and chip, however, do not refer to how cutting fluid is supplied between the drainage groove in the case,
No matter cutting fluid provides disadvantage by the rotary shaft offer in axis hole or the pipeline by being set to grinding wheel and near workpieces, just cuts
For cutting means of the liquid by the rotary shaft offer in axis hole, since axis hole is located at the center of grinding wheel, cutting fluid is difficult to appropriate
Ground is provided to the surface that all grinding wheels are contacted with workpiece, and can not adjust the amount of cutting fluid on wheel face different location, no
It is more bad to only result in heat dissipation effect, and wheel face easily out-of-flatness due to consumption difference；And with regard to cutting fluid by being set to grinding wheel
For the means provided with the pipeline of near workpieces, additional pipeline is too near to grinding wheel and the contact position of workpiece surface will likely
The running of grinding wheel is hindered, also, air-flow is will produce when grinding wheel operating, and cutting fluid is made to be arranged, leads to that grinding wheel and work can be entered
The cutting fluid of the contact position on part surface is extremely limited, thus the thermal energy for causing grinding to generate can not be pulled away in real time；In addition, in
In a manner of forming drainage groove between grinding segment so that need vacating space to form drainage groove, therefore cause to can be used for grinding
The area of mill is reduced.
Accordingly, the cutting fluid supply mode of above-mentioned existing mill structure respectively has the disadvantage, and they shared are lacked
Point is that in process of lapping, each position consumption of abradant surface of mill can not be controlled existing mill structure, thus need through
Abradant surface often is modified to ensure its flatness, good processing quality could be maintained.
Invention content
It is an object of the invention to disclose a kind of mill with internal supply fluidic structures, fluid can be ground by concrete dynamic modulus
It grinds layer and is directly fed between abradant surface and workpiece, and the fluid outlet amount of adjustable abradant surface different location, solve whereby
In the prior art, since each position consumption of the abradant surface of mill can not be controlled, thus need frequently to modify abradant surface with
The problem of ensuring its flatness.
To achieve the above object and other purposes, the present invention disclose a kind of mill with internal supply fluidic structures, use
In in the drive shaft with a plurality of feed flow pipeline, including concrete dynamic modulus grinding layer and pedestal, the concrete dynamic modulus grinding layer packet
Include opposite faying face and abradant surface；The pedestal is incorporated on the faying face, and the pedestal includes perforative plurality of passages,
The channel by concentric circles or it is radial in the form of arrange, and the faying face is extended in the channel at least partially
Edge, each channel is for configuring the feed flow pipeline.
Above-mentioned mill, wherein when the channel is arranged in the form of concentric circles, the pedestal has 28~75%
Hai Lu ratios, the percentage of total volumes of the wherein Hai Lu than accounting for the pedestal for the total volume in channel.
Above-mentioned mill, wherein when the channel is arranged in the form of radial, the pedestal has 4~40% sea
Land ratio, percentages of the wherein Hai Lu than total volume and the total volume of the pedestal for channel.
Above-mentioned mill, wherein each channel is arc-shaped.
Above-mentioned mill is located at the logical of outer ring wherein the channel is arranged in the multiple circles for being surrounded on the base central
Road quantity is more than the number of channels of inner ring.
Above-mentioned mill, wherein the pedestal is binded by impermeable gelatine layer to the faying face.
Above-mentioned mill, wherein each in the channel is of different size.
Above-mentioned mill, wherein the material of the concrete dynamic modulus grinding layer is selected from by resin, metal, ceramics and combinations thereof institute group
At group.
Above-mentioned mill, wherein the material of the concrete dynamic modulus grinding layer is ceramics.
Above-mentioned mill, wherein the porosity of the concrete dynamic modulus grinding layer is 30~60%.
Above-mentioned mill, wherein the porosity of the concrete dynamic modulus grinding layer is 45~55%.
Therefore, above-mentioned mill, whether can be by controlling the supply of fluid in each channel or uninterrupted, and described in adjusting
The fluid outlet amount of the abradant surface different location of concrete dynamic modulus grinding layer, and then the consumption of abradant surface different location is influenced, to have
Slow down the deformation of abradant surface to reduce finishing number in effect ground.
Description of the drawings
Fig. 1 is the decomposition diagram of the mill with internal supply fluidic structures of the embodiment of the present invention.
Fig. 2 is the combination schematic diagram of the mill with internal supply fluidic structures of the embodiment of the present invention.
Fig. 3 is the diagrammatic cross-section of the end faces A-A in Fig. 2.
Fig. 4 is status diagram when mill uses in the embodiment of the present invention.
Fig. 5 is the first aspect schematic diagram of the pedestal of mill in the embodiment of the present invention.
Fig. 6 is the second aspect schematic diagram of the pedestal of mill in the embodiment of the present invention.
Fig. 7 is the third aspect schematic diagram of the pedestal of mill in the embodiment of the present invention.
Fig. 8 is the 4th aspect schematic diagram of the pedestal of mill in the embodiment of the present invention.
Specific implementation mode
To fully understand the purpose of the present invention, feature and effect, herein by following specific embodiments, and appended by cooperation
Schema, the present invention is described in detail, is described as follows：
Fig. 1 to 3 is please referred to, the mill 1 with internal supply fluidic structures of the embodiment of the present invention is ground comprising concrete dynamic modulus
Layer 10 and pedestal 20, the concrete dynamic modulus grinding layer 10 include opposite faying face 11 and abradant surface 12 (Fig. 3)；20 knot of the pedestal
Together on the faying face 11, the pedestal 20 includes running through its plurality of passages 21, and the channel 21 is with the shape of concentric circles
Formula arranges, and extends to the edge of the faying face 11 in the channel 21 at least partially." fluid " can be cutting
Liquid, cooling liquid are (such as：Cooling water), cooling gas (such as：Inert gas), or combinations thereof；Wherein, the fluid is preferably cut
Liquid.
In the present embodiment, the concrete dynamic modulus grinding layer 10 is multi-pore structure, and material is selected from by resin, metal, ceramics
And combinations thereof the group that is formed, for example, the material of the concrete dynamic modulus grinding layer 10 can be the list of resin, metal or ceramics
One material, alternatively, the material of the concrete dynamic modulus grinding layer 10 can be the compound of the composite material of resin and ceramics, resin and metal
The composite material of material or metal and ceramics, wherein can have abrasive material in the concrete dynamic modulus grinding layer 10.And, it is preferred that
The porosity of the concrete dynamic modulus grinding layer 10 is 30~60%, if porosity is less than 30%, can reduce the rate of discharge of fluid；If
Porosity is higher than 60%, will make 10 strength reduction of concrete dynamic modulus grinding layer and be easily broken, it is preferred that the concrete dynamic modulus is ground
The porosity for grinding layer 10 is 45~55%.
As shown in figure 4, in the present embodiment, the mill 1 is used to be mounted on the drive shaft (figure with a plurality of feed flow pipeline 2
Do not show) on, each channel 21 makes the feed flow pipeline 2 according to the shape in the channel 21 for configuring the feed flow pipeline 2
Arrangement, and the outlet of the feed flow pipeline 2 and the faying face 11 of the concrete dynamic modulus grinding layer 10 be separated by one it is intersegmental away from so that
After fluid is distributed by first flowing to the centrifugation force effect in each channel 21 and when mill 1 rotates, then infiltrate into described more
In hole grinding layer 10.Since the channel 21 is annular and extends to the edge of the faying face 11 in concentric circles,
And the closing of channel 21 of each circle and do not communicate with each other, therefore when the fluid in the channel 21 of each circle is rotated by mill 1 from
Mental power function and be distributed, therefore can equably be provided to the abradant surface 12 of the concrete dynamic modulus grinding layer 10.
The mill 1 is with 12 grinding work-piece 3 of abradant surface of the concrete dynamic modulus grinding layer 10, and fluid is ground by the concrete dynamic modulus
It infiltrates in mill layer 10 and is present in the abradant surface 12 and 3 surface of the workpiece, and then process of lapping generation can be taken away
Thermal energy and scrap fallaway.
In addition, every feed flow pipeline 2 can be opened, closes or be adjusted for flow quantity on demand, and the channel 21 can be made to go out
Mouthful fluid flow it is different, and then influence the fluid stream on the abradant surface 12 of the concrete dynamic modulus grinding layer 10 near corresponding position
Amount, and the effect locally to supply water on abradant surface is formed, therefore, the consumption of the concrete dynamic modulus grinding layer 10 can be controlled.It lifts
For example, in process of lapping, if finding, concavity can close so that when influencing the external form of workpiece 3 in being formed among abradant surface 12
2 corresponding switch of feed flow pipeline in outer ring and the channel of inner ring 21 so that portion of the abradant surface 12 near corresponding position
Divide and workpiece penetraction depth is increased, thus the amount of increasing consumption；Alternatively, when finding that abrasion are significantly greater than inside on the outside of mill, it can
It is temporarily increased corresponding fluid flow or reduction on the outside of abradant surface and is even switched off corresponding fluid supply on the inside of abradant surface, thus
Adjust the mill consumption of specific region.
After the consumption in the interior outside of mill abradant surface 12 is consistent or the abradant surface 12 and workpiece external form restore smooth,
The 2 corresponding switch of feed flow pipeline being then turned in outer ring and the channel 21 of inner ring, the flow phase for making all feed flow pipelines 2 export
Together, so that 12 whole surface of the abradant surface can be evenly distributed fluid.
Therefore the mill of the present embodiment is by the configuration in the channel 21 arranged with concentric circles, and feed flow pipeline 2 of arranging in pairs or groups
Fluid supply flow adjustment and switch, and can have the effect of on abradant surface have locally supply water, improved by this approach
On the abradant surface 12 of mill the problems such as specific position such as inner and outer abrasion unevenness.Accordingly, the mill 1 of the present embodiment can be effective
Slow down the deformation of abradant surface 12, and reduces the number that abradant surface must be modified.
In this present embodiment, the pedestal 20 is binded by impermeable gelatine layer 22 to the faying face 11, described impermeable
Gelatine layer 22 is coated on surface of the pedestal 20 towards the faying face 11, and is waterproof material, to avoid fluid
It penetrates and circulates between the channel 21.
In above-described embodiment, using the channel 21 that is arranged with concentric circles as illustrating, pedestal as shown in Figure 5
20 vertical view, the channel 21 is circular ring shape and is arranged with concentric circles, and each in the channel is of same size, i.e.,
The channel it is of same size；Wherein, when use channel 21 with concentric circles arrange and the pedestal 20 Hai Lu ratios be 28~
75% mill 1, and set under the machined parameters of relatively low rotating speed in mill 1 and workpiece 3, the channel 21 arranged with concentric circles
And Gao Hailu than mill 1 can have the effect of that water yield is big, therefore the grinding layer of mill 1 or in which abrasive material cut workpiece 3
Depth it is shallower, and reach the processing purpose of great surface quality (i.e. low surface roughness) and high surface flatness.Above-mentioned sea
Total volume (i.e. the total volume and pedestal in channel on the total volume of non-channel part of the land than accounting for the pedestal for the total volume in channel
Sum total) percentage.
In addition, the shape of the channel arrangement in the present invention is not limited to this aspect, pedestal 20 ' as shown in FIG. 6 is described logical
Road 21 ' is arranged in the of different size of each in concentric circles and the channel 21 ', it is, the width in the channel 21 ' or
Depth is different, then it can correspond to the quantity difference of accommodating feed flow pipeline 2, therefore, corresponding to the width or depth in the channel 21 '
Degree, the water yield of the abradant surface different location is identical, and can influence mill 1 grinding layer or in which abrasive material incision workpiece 3
Depth, and the abradant surface different location is made to have different consumptions.
In addition, be illustrated in figure 7 another state sample implementation of pedestal in this implementation, channel 21 " described in the pedestal 20 " with
Radial form arrangement, and each channel 21 " is arc-shaped, and neighbouring side is continuously extended to by the center of the neighbouring faying face
At edge, and distance is closer between the channel 21 at the center of the faying face, the spacing in the channel 21 at neighboring edge
From farther out.Under this aspect, the Hai Lu ratios of the pedestal 20 are preferably 4~40% mill 1, the abradant surface of the mill 1
Interior outer wear speed can approach unanimously.Above-mentioned Hai Lu is (i.e. more logical than the total volume for accounting for the pedestal for the total volume in channel
The sum total of the total volume of non-channel part on the total volume and pedestal in road) percentage.
Please refer to Fig. 8, the another state sample implementation of open pedestal, channel 21 " described in the pedestal 20 " ' ' with radial
Form arrangement, and each channel 21 " ' is arc-shaped, and the channel 21 " ', which is arranged in, is surrounded on the pedestal 20 " ' if center
Dry circle (with 2 circles as example in Fig. 8), the channel 21 " ' quantity for being located at outer ring are more than the channel 21 " ' quantity of inner ring, preferably
The density of the channel 21 " of outer ring ' distribution is high compared with the density of the channel 21 " of inner ring ' distribution, and the channel 21 " of inner ring and outer ring ' no
Connection.Wherein, the channel 21 is under the configuration of radial arrangement, and the Hai Lu ratios of the pedestal 20 are preferably 4~40%
Mill 1, with applied to the processing under high material removal rate demand, since Hai Lu is than low, the mill can bear higher
Machining load, and certain surface quality is maintained simultaneously.
Therefore, when the mill 1 disclosed in the embodiment of the present invention is applied to attrition process, can according to different process requirements or
The size of different workpieces 3 selects the mill 1 of suitable pedestal 20,20 ', 20 ", 20 " ', with up to best grinding effect.
Accordingly, whether the mill 1 of the embodiment of the present invention can be by controlling the supply of fluid in each channel 21 or uninterrupted,
And the fluid outlet amount of 12 different location of abradant surface of the concrete dynamic modulus grinding layer 10 is adjusted, and then influence the different positions of abradant surface 12
Thus the consumption set effectively slows down the deformation of abradant surface 12 to reduce the finishing number of mill 1.
The present invention is hereinbefore disclosed with preferred embodiment, it will be appreciated that those skilled in the art that the implementation
Example is only used for describing the present invention, and should not be construed as limiting the scope of the invention.It should be noted that every equivalent with the embodiment
Variation and displacement, should be understood as be included in the scope of protection of present invention in.Therefore, protection scope of the present invention should
It is subject to claims limited range.
Symbol description
1 mill
2 feed flow pipelines
3 workpiece
10 concrete dynamic modulus grinding layers
11 faying faces
12 abradant surfaces
20,20 ', 20 ", 20 " ' pedestal
21,21 ', 21 ", 21 " ' channel
22 impermeable gelatine layers.
Claims (11)
1. a kind of mill with internal supply fluidic structures, for being mounted on the drive shaft with a plurality of feed flow pipeline, packet
Contain：
Concrete dynamic modulus grinding layer, including opposite faying face and abradant surface；And
Pedestal is incorporated on the faying face, and the pedestal includes perforative plurality of passages, and the channel is with concentric circles or puts
The form arrangement of shape is penetrated, and extends to the inside at the edge of the faying face in the channel at least partially, each channel is used
In the configuration feed flow pipeline.
2. mill as described in claim 1, wherein when the channel is arranged in the form of concentric circles, the pedestal has
28~75% Hai Lu ratios, the percentage of total volumes of the wherein Hai Lu than accounting for the pedestal for the total volume in channel.
3. mill as described in claim 1, wherein the pedestal is binded by impermeable gelatine layer to the faying face.
4. mill as described in claim 1, wherein in the channel each channel it is of different size.
5. mill as described in claim 1, wherein the material of the concrete dynamic modulus grinding layer be selected from by resin, metal, ceramics and
The group that a combination thereof is formed.
6. mill as claimed in claim 5, wherein the material of the concrete dynamic modulus grinding layer is ceramics.
7. mill as described in claim 1, wherein the porosity of the concrete dynamic modulus grinding layer is 30~60%.
8. mill as described in claim 1, wherein the porosity of the concrete dynamic modulus grinding layer is 45~55%.
9. mill as described in claim 1, wherein when the channel is arranged in the form of radial, the pedestal has 4
~40% Hai Lu ratios, percentages of the wherein Hai Lu than total volume and the total volume of the pedestal for channel.
10. mill as claimed in claim 9, wherein each channel is arc-shaped.
11. mill as claimed in claim 10, wherein the channel is arranged in the multiple circles for being surrounded on the base central, position
Number of channels in outer ring is more than the number of channels of inner ring.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104134636 | 2015-10-22 | ||
| TW104134636A TWI583499B (en) | 2015-10-22 | 2015-10-22 | A disc with internal supply of fluid structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106607775A CN106607775A (en) | 2017-05-03 |
| CN106607775B true CN106607775B (en) | 2018-08-21 |
Family
ID=58614928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610622789.3A Active CN106607775B (en) | 2015-10-22 | 2016-08-02 | Abrasive Disc with Internal Fluid Supply Structure |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106607775B (en) |
| TW (1) | TWI583499B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6949424B2 (en) * | 2017-08-22 | 2021-10-13 | 株式会社ディスコ | Abrasive pad |
| TWI686266B (en) * | 2018-05-29 | 2020-03-01 | 中國砂輪企業股份有限公司 | Dresser with porous structure |
| TWI667102B (en) * | 2018-08-01 | 2019-08-01 | 中國砂輪企業股份有限公司 | Grinding tools |
| CN109465740A (en) * | 2018-12-27 | 2019-03-15 | 西安奕斯伟硅片技术有限公司 | A kind of grinding price fixing, grinding device and grinding method |
| CN109483418B (en) * | 2018-12-28 | 2023-11-17 | 西安增材制造国家研究院有限公司 | Metal-based micro-lubrication grinding wheel and manufacturing method thereof |
| CN109397032A (en) * | 2018-12-30 | 2019-03-01 | 苏州富强科技有限公司 | A kind of 3D bend glass polishing mechanism |
| CN111531441B (en) * | 2020-04-23 | 2021-07-06 | 胡金凤 | Rotary water outlet sander |
| CN111922791B (en) * | 2020-08-19 | 2022-03-18 | 重庆长征重工有限责任公司 | Workpiece polishing operation control method |
| TWI809902B (en) * | 2022-05-30 | 2023-07-21 | 全鑫精密工業股份有限公司 | Grinding disc high-pressure chip removal cleaning and cooling device |
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|---|---|---|---|---|
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| US5243790A (en) * | 1992-06-25 | 1993-09-14 | Abrasifs Vega, Inc. | Abrasive member |
| JPH0839428A (en) * | 1994-07-22 | 1996-02-13 | Yamaguchi Pref Gov | Coolant supplying device for both dry type cutting grinding wheel and wet type cutting grinding wheel |
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| CN201728598U (en) * | 2009-07-28 | 2011-02-02 | 三晃制砥株式会社 | Rotary grinding wheel |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4292179B2 (en) * | 2005-10-27 | 2009-07-08 | 株式会社ナノテム | Whetstone |
| JP5511343B2 (en) * | 2009-12-09 | 2014-06-04 | 株式会社ナノテム | Polishing equipment |
| CN103192325B (en) * | 2013-04-10 | 2015-07-15 | 大连理工大学 | Inner-cooling bonded abrasive grinding disc |
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- 2015-10-22 TW TW104134636A patent/TWI583499B/en active
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- 2016-08-02 CN CN201610622789.3A patent/CN106607775B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB790480A (en) * | 1954-07-18 | 1958-02-12 | British Cast Iron Res Ass | Improvements in dust suppression for grinding wheels |
| GB813910A (en) * | 1955-01-24 | 1959-05-27 | Gear Grinding Mach Co | Improvements in or relating to liquid cooled grinding wheel assemblies |
| JPH0569338A (en) * | 1991-06-24 | 1993-03-23 | Mitsubishi Materials Corp | Water permeable cup type grinding wheel |
| US5243790A (en) * | 1992-06-25 | 1993-09-14 | Abrasifs Vega, Inc. | Abrasive member |
| JPH0839428A (en) * | 1994-07-22 | 1996-02-13 | Yamaguchi Pref Gov | Coolant supplying device for both dry type cutting grinding wheel and wet type cutting grinding wheel |
| CN1970231A (en) * | 2005-11-25 | 2007-05-30 | 贵州新艺机械厂 | Internal cooling method of porous grinding wheel for metal cutting |
| CN201728598U (en) * | 2009-07-28 | 2011-02-02 | 三晃制砥株式会社 | Rotary grinding wheel |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI583499B (en) | 2017-05-21 |
| CN106607775A (en) | 2017-05-03 |
| TW201714709A (en) | 2017-05-01 |
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