CN106595728B - Radial integrated measurement method for axial displacement, rotating speed and inclination angle of rotor - Google Patents

Radial integrated measurement method for axial displacement, rotating speed and inclination angle of rotor Download PDF

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Publication number
CN106595728B
CN106595728B CN201611145601.7A CN201611145601A CN106595728B CN 106595728 B CN106595728 B CN 106595728B CN 201611145601 A CN201611145601 A CN 201611145601A CN 106595728 B CN106595728 B CN 106595728B
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rotor
measured
bar code
photoelectric sensors
axial displacement
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CN106595728A (en
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朱永生
闫柯
张进华
曹鹏辉
熊莹
严小云
王方哲
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Xian Jiaotong University
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Xian Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Optical Transform (AREA)

Abstract

A radial integrated measurement method of axial displacement, rotating speed and inclination angle of a rotor is characterized in that a standard measurement bar code is fixed outside a measured rotor, the standard measurement bar code is a bar code with a specific rule formed by two materials with different reflectivity, a photoelectric sensor is arranged in the radial direction of the measured rotor and is aligned to the center of the standard measurement bar code, a plane formed by the centers of the sensors at the moment is used as a reference plane, and the axial displacement, the rotating speed and the inclination angle of the rotor relative to the reference plane are measured and calculated; the invention measures the axial displacement of the rotating shaft through the standard measuring bar code fixed outside the rotor to be measured and the photoelectric sensor arranged in the radial direction, not only can measure the axial displacement, the rotating speed and the deflection state of the rotating shaft under the condition of not increasing the axial length, but also has convenient installation, does not need to process and transform the shaft to be measured, and greatly improves the applicability.

Description

Radial integrated measurement method for axial displacement, rotating speed and inclination angle of rotor
Technical Field
The invention relates to the technical field of sensor technology and gap or displacement measurement, in particular to a radial integrated measurement method for axial displacement, rotating speed and inclination angle of a rotor.
Background
The rotary machine is developed in the direction of high speed and high precision, and the requirement for monitoring the running state of the rotor is continuously increased. The axial displacement of the rotor is one of the key indicators reflecting the running state of the rotor and the whole mechanical system: the axial displacement of the machine tool spindle rotor is related to the machining precision; the electromagnetic bearing rotor needs to be controlled by measuring axial displacement information of the rotor, otherwise the rotor cannot be balanced, and even more serious results are caused.
Non-contact measurement is generally required when measuring axial displacement of a high-speed rotor. Rotor non-contact displacement measurement typically employs an eddy current displacement sensor or a capacitive displacement sensor. The common method for measuring the axial displacement of the rotor by the eddy current displacement sensor is to make the sensor face the end part of the rotor (as shown in fig. 1) or face a thrust disk arranged on the rotor (as shown in fig. 2), when the rotor generates the axial displacement, a sensor probe senses the displacement change due to the eddy current effect, and the displacement measurement is realized. The main problems of this measurement method are: the method of fig. 1 increases the axial length and may also result in measurements that do not truly reflect the axial displacement of the rotor due to changes in the radial position of the rotor; in the measurement method in fig. 2, when the thrust disk is assembled or the surface is deviated, the output of the displacement sensor fluctuates with the rotation of the rotor even if the rotor does not generate axial displacement. When the size of the rotor is large, even if the deflection angle of the thrust disk is small, large fluctuation quantity is caused, and therefore the axial displacement measurement accuracy of the rotor is seriously affected.
At present, in order to reduce the axial size of the rotor, a plurality of methods for measuring the axial displacement of the rotor in the radial direction are developed, and the main idea is to arrange an eddy current sensor in the radial direction of the rotor, and simultaneously arrange a measuring ring composed of different materials on the surface of the rotor, and reflect the axial displacement of the rotor by using the material-sensitive characteristics of the eddy current sensor. The method can reduce the error of the axial measurement method to a certain extent and improve the measurement precision. However, these methods require a large degree of modification of the rotor, are susceptible to electromagnetic interference, and have poor interference resistance in harsh environments. Therefore, a new axial displacement measurement method is urgently needed, and the measurement accuracy and the anti-interference performance are improved on the basis of not changing the original structure of the rotor as much as possible.
The patent US20090052825a1 uses a coding disc made of metal or magnetic material and fixed on the rotor, the bar codes are uniformly distributed on the surface of the disc, and the bar codes are in a V shape and rotate with the rotor, but the rotor needs to be structurally modified, and the structural complexity is increased. The sensor can only adopt a Hall sensor or an eddy current sensor, the radial distance must be within a certain range, and the range is very small for a high-precision sensor.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a radial integrated measurement method for the axial displacement, the rotating speed and the inclination angle of a rotor, which can solve the problem of measuring the axial displacement under the condition that the axial space of the rotor is limited, and can solve the problems of poor anti-interference capability, material sensitivity, complex installation structure and inconvenient use of an eddy current sensor in the conventional radial measurement method for the axial displacement.
In order to achieve the purpose, the invention adopts the technical scheme that:
a radial integrated measurement method for axial displacement, rotating speed and inclination angle of a rotor comprises the following steps:
(1) the method comprises the following steps of sticking a standard measurement bar code 8 on a rotor 7 to be measured, moving along with the rotor 7 to be measured, wherein the surface development of the standard measurement bar code 8 is that two materials (8a and 8b) with different reflectivity form an isosceles triangle which alternately appears, and the interface of the standard measurement bar code is a rectangular bar code;
(2) a plurality of photoelectric sensors 9 are uniformly arranged in a plane vertical to the axis of the rotor 7 to be measured, and the photoelectric sensors 9 output high and low levels when testing bar codes with different reflectivities on the standard measurement bar code 8;
(3) and taking the initial plane where the photoelectric sensor 9 is located as a reference plane, performing signal differentiation, edge detection and result calculation display module according to the signal output by the photoelectric sensor 9, and obtaining the axial displacement, the rotating speed and the inclination angle of the rotor 7 to be measured.
The step (3) is specifically as follows:
when the centers of the 4 photoelectric sensors 9a, 9b, 9c and 9d coincide with the axis of the rotor 7 to be measured, and the axis of the rotor 7 to be measured is perpendicular to the plane where the 4 photoelectric sensors 9 are located, the rotor 7 to be measured and the photoelectric sensors 9 are located at the initial plane position, and at this time, when the rotor 7 to be measured rotates around the axis, the 4 photoelectric sensors 9a, 9b, 9c and 9d output corresponding high and low levels which change along with time, namely, when the photoelectric sensor 9 is aligned with the strong-reflectivity barcode 8b, the high level is output, and when the photoelectric sensor 9 is aligned with the weak-reflectivity barcode 8a, the low level is output;
defining the pulse width ratio:
wherein, t1Is the duration of a high level, t, within one signal period2Is the corresponding square wave signal period; when the axial position of the rotor 7 to be measured does not change, RdAt a constant value, R when the rotor 7 to be measured generates an axial displacement zdIs converted into R'dAnd satisfies the following formula:
when the arc length of any two photoelectric sensors 9 corresponding to the standard measurement bar code 8 is l, the phase difference of the output signals between the two sensors is as follows:
wherein,% is remainder operation, and n is the total number of triangular barcodes of the weak reflectivity barcode 8a and the strong reflectivity barcode 8 b.
According to the variation of the phase difference between two adjacent photoelectric sensors 9The eccentricity can be obtained:
wherein, R is the radius of the standard measuring bar code 8;
if the normal of the plane where the photoelectric sensor 9 is located and the axis of the rotor 7 to be measured have a certain included angle α, the tangent value of the declination angle of the rotating shaft, namely the inclination angle, can be calculated by the pulse width ratio of two relative photoelectric sensors 9:
wherein R isdaPulse width ratio, R, of the output signal for one of the photosensors 9adcA pulse width ratio of an output signal for the photosensor 9c disposed opposite to the photosensor 9 a;
according to the pulse width ratio of the output signal of the photoelectric sensor 9, calculating the axial displacement of the rotor 7 to be measured:
wherein R isda,Rdb,Rdc,RddPulse width ratios of output signals of the first four photoelectric sensors (9a, 9b, 9c, 9d) for rotor displacement respectively; r'da,R'db,R'dc,R'ddPulse width ratios of output signals of the four photoelectric sensors (9a, 9b, 9c and 9d) after the rotor displacement are respectively set;
the rotating speed n of the rotor 7 to be measured is calculated through the period of the pulse signal, or the calculation results of the four photoelectric sensors 9 are used for averaging, and the calculation formula is as follows:
wherein, t2a、t2b、t2c、t2dThe periods of the output signals of the four photosensors 9a, 9b, 9c, 9d, respectively.
The invention has the beneficial effects that:
(1) the standard measuring bar code can be conveniently adhered and fixed on the shaft to be measured, the rotor to be measured does not need to be re-processed and specially designed, and the application range of the method is greatly expanded.
(2) The invention is different from the prior art that the displacement sensor is arranged in the axial direction, but the photoelectric sensor is arranged in the radial direction of the rotor for measurement, so that the measurement precision is improved, and meanwhile, the accurate measurement of the axial displacement of the rotor can be realized under the condition of smaller axial space.
(3) The invention uses a plurality of photoelectric sensors to collect signals, has good electromagnetic interference resistance and good linearity, and overcomes the difficulties that the traditional eddy current method is sensitive to materials and needs to be calibrated again when a test object is replaced.
(4) The axial displacement measuring method can obtain the rotating speed and the inclination angle of the rotor at the same time, can obtain the running state information of the rotor while monitoring the axial displacement of the rotor, provides necessary state data for the axial displacement measuring result of a user, and has an integrated testing function.
Drawings
FIG. 1 is a schematic diagram of a prior art configuration for detecting axial displacement;
FIG. 2 is a schematic diagram of another embodiment of a prior art axial displacement sensor;
FIG. 3 is a schematic structural diagram of an embodiment of the axial displacement detecting device of the present invention;
FIG. 4 is a schematic diagram of a standard measurement barcode according to the present invention;
FIG. 5 is an expanded view of the surface of a standard measurement barcode of the present invention;
fig. 6 is a schematic diagram illustrating the measurement principle when the rotor and the sensor are at the initial position according to an embodiment of the present invention, in which fig. 6a is a left side view, fig. 6b is a front view, fig. 6c is a pulse signal output by the photoelectric sensor 9 before and after the generation of the axial displacement, and fig. 6d is a phase difference ratio and a phase difference variation curve calculated before and after the generation of the axial displacement;
fig. 7 is a schematic diagram illustrating the measurement principle when the axis of the rotor moves according to an embodiment of the present invention, in which fig. 7a is a left side view, fig. 7b is a front view, fig. 7c is a pulse signal output by the photoelectric sensor 9 before and after the axial displacement is generated, and fig. 7d is a phase difference ratio and a phase difference variation curve calculated before and after the axial displacement is generated;
fig. 8 is a schematic diagram illustrating the measurement principle when the rotor is deflected according to an embodiment of the present invention, in which fig. 8a is a left side view, fig. 8b is an expanded view of a bar code, fig. 8c is a pulse signal output by the photoelectric sensor 9 before and after the generation of the axial displacement, and fig. 8d is a phase difference ratio and a phase difference change curve calculated before and after the generation of the axial displacement;
the parts in the drawings are numbered as follows: 1. a rotor 1 to be tested; 2. a thrust plate; 3. an eddy current sensor 1; 4. a rotor 2 to be tested; 5. a sensor holder; 6. an eddy current sensor 2; 7. a rotor to be tested; 8. standard measuring bar codes; 9. a photosensor; 10. a signal processing unit.
Detailed Description
The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the invention easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the invention.
A radial integrated measurement method for axial displacement, rotating speed and inclination angle of a rotor comprises the following steps:
(1) referring to fig. 3, a standard measurement bar code 8 is adhered to a rotor 7 to be measured and moves along with the rotor 7 to be measured, the surface development diagram of the standard measurement bar code 8 is that two materials (8a, 8b) with different reflectivity form an isosceles triangle which alternately appears, and the interface of the standard measurement bar code is a rectangular bar code;
specifically referring to fig. 4 and 5, the surface of the standard measurement barcode 8 is composed of a weak reflectivity barcode 8a with a lower reflectivity and a strong reflectivity barcode 8b with a higher reflectivity, and on a surface development diagram of the standard measurement barcode 8, the shapes of the weak reflectivity barcode 8a and the strong reflectivity barcode 8b are isosceles triangles, and the rectangular barcode at the interface is used as a pasting interface and plays a role in distinguishing signals of each circle in displacement calculation, so that the signals at the rectangular barcode are not considered in detail in the displacement calculation result.
(2) A plurality of photoelectric sensors 9 are uniformly arranged in a plane vertical to the axis of the rotor 7 to be measured, and the output voltage levels of the photoelectric sensors 9 have obvious difference when testing the bar codes with different reflectivity on the standard measurement bar code 8.
Referring to fig. 3 in particular, the photoelectric sensor 9 includes four photoelectric sensors 9a, 9b, 9c, and 9d uniformly distributed on the same radial plane, and the four photoelectric sensors 9a, 9b, 9c, and 9d all point to the axis of the rotor 7 to be measured. When the photoelectric sensor 9 is aligned with the weak reflectivity barcode 8a, the intensity of the received reflected light is weak, and the output signal is low level; on the contrary, when the photo sensor 9 is aligned with the bar code 8b with strong reflectivity, the intensity of the received reflected light is strong, and the output signal is high level.
(3) And taking the initial plane where the photoelectric sensor 9 is located as a reference plane, performing signal differentiation, edge detection and result calculation display module according to the signal output by the photoelectric sensor, and obtaining the axial displacement, the rotating speed and the inclination angle of the rotor to be measured.
Referring to fig. 3, the four sensor output signals of the photoelectric sensor 9 are all input into the signal processing unit 10, and further processed to obtain the axial displacement, the rotation speed, and the inclination angle of the rotor, and the processing method specifically includes:
referring to fig. 6, when the centers of the four photosensors 9a, 9b, 9c, and 9d coincide with the axis of the rotor 7 to be measured, and the axis of the rotor 7 to be measured is perpendicular to the plane where the four photosensors 9 are located, the rotor 7 to be measured and the photosensors 9 are located at the initial plane position. At this time, when the rotor 7 to be measured rotates around the axis thereof, the four photoelectric sensors 9 output corresponding high and low levels which change along with time, that is, the photoelectric sensors 9 output high levels when aligning with the strong reflectivity bar code 8b, and output low levels when aligning with the weak reflectivity bar code 8 a.
Referring to fig. 6, a pulse width ratio is defined:
wherein, t1Is the duration of a high level, t, within one signal period2Is the corresponding square wave signal period; when the axial position of the rotor 7 to be measured does not change, RdIs a constant value. When the rotor 7 to be measured generates axial displacement z, RdIs converted into R'dAnd satisfies the following formula:
the change in axial displacement can thus be based on the pulse width ratio R of the sensor output signaldIs calculated.
Referring to fig. 6, since the four photosensors 9a, 9b, 9c, and 9d are installed at different positions and the signal processing unit 10 collects signals thereof at the same time, outputs of the four photosensors 9a, 9b, 9c, and 9d have a certain phase difference. The phase difference is related to the positions of the four photoelectric sensors 9 and the corresponding standard measurement bar codes 8 in the initial state, and when the arc length of the two sensors corresponding to the standard measurement bar codes 8 is l, the phase difference of output signals between the two sensors is as follows:
wherein,% is remainder operation, and n is the total number of triangular barcodes of the weak reflectivity barcode 8a and the strong reflectivity barcode 8 b.
Referring to fig. 6, when the rotor 7 to be measured is at the initial position, the four photosensors 9 are equally spaced, and if the number of the weak-reflectance barcodes 8a and the strong-reflectance barcodes 8b is defined as n, it is assumed that the phase of the photosensor 9a is 0 °, the phase difference between the photosensor 9b and the photosensor 9a is n% 4 × 180 ° (where% is a remainder operation), the phase difference between the photosensor 9c and the photosensor 9a is n% 2 × 180 °, and the phase difference between the photosensor 9d and the photosensor 9a is (3 · n)% 4 × 180 °. Specifically, when the number n of the standard measurement barcodes 8 satisfies n 2(2 · k-1), (k 1,2,3,4 …), the output of the photosensor 9a is 0 ° out of phase with the output signal of the photosensor 9c, the output of the photosensor 9b and the photosensor 9d is 0 ° out of phase with the output signal of the photosensor 9a and the photosensor 9b is 180 ° out of phase with each other. Even if the rotor 7 to be measured is displaced in a certain axial direction, the phase difference of the output signals of the respective photoelectric sensors 9 is not changed.
Referring to fig. 7, the photoelectric sensor 9 corresponds to a case where the center has a certain eccentricity e from the axis of the rotor 7 to be measured. At this time, 4 photoelectric transducersThe plane of the sensor 9 is still vertical to the rotor 7 to be measured, so that the waveforms of the output signals of the sensors are the same, but a certain phase difference exists, and the variation of the phase difference between the sensor 9a and the sensor 9b caused by eccentricityThe relationship to the eccentricity e is:
wherein, R is the radius of the standard measuring bar code 8;
the eccentricity of the rotor 7 to be measured can be obtained by using the change in the phase difference.
Referring to fig. 8, a normal line of a plane where the photoelectric sensor 9 is located and an axial lead of the rotor 7 to be measured have a certain included angle α, that is, the rotor 7 to be measured generates a deviation of an angle α. After the deflection, the rotor 7 to be measured still rotates around the axis at a constant speed, so that the scanning track of each photoelectric sensor 9 on the standard measuring bar code 8 is a straight line parallel to the standard measuring bar code 8, and only the axial position of the photoelectric sensor is different due to the deflection of the rotor 7 to be measured. The tan value of the rotor 7 to be measured can be calculated by the pulse width ratio of the photoelectric sensor 9a and the photoelectric sensor 9 c:
referring to fig. 8, when the rotor 7 to be measured is deviated to a certain degree and generates an axial displacement z in a direction parallel to the axial direction thereof, the pulse width of the output signal of each photoelectric sensor changes correspondingly, and the axial displacement z can be calculated according to the pulse width ratio thereof:
wherein R isda,Rdb,Rdc,RddFour photoelectric sensors (9a, 9b, 9c, 9d) before rotor displacement) Pulse width ratio of the output signal; r'da,R'db,R'dc,R'ddPulse width ratios of output signals of the four photoelectric sensors (9a, 9b, 9c and 9d) after the rotor displacement are respectively set;
in addition, if the axial displacement generated by the rotor 7 to be measured is parallel to the normal direction of the plane where the photoelectric sensor 9 is located, the axial displacement can be converted into a direction parallel to the axis of the rotor 7 to be measured and a direction perpendicular to the axis. The movement perpendicular to the axial direction of the rotor 7 to be measured is similar to the generation of the eccentricity of the rotor 7 to be measured, and can be calculated with reference to fig. 7.
With reference to fig. 6, 7 and 8, in combination with the above discussion and analysis, the signal processing unit 10 can calculate the axial displacement, the rotation speed and the inclination angle of the rotor 7 to be measured according to the output signal of the photoelectric sensor 9. The axial displacement of the rotor 7 to be measured can be calculated according to the pulse width ratio of the output signals of the photoelectric sensors 9, and the calculation accuracy of the axial displacement can be improved by averaging the output signals of the four photoelectric sensors 9, wherein the calculation formula is as follows:
the rotating speed of the rotor 7 to be measured can be calculated through the period of the pulse signal, and meanwhile, a method for averaging the calculation results of the four photoelectric sensors 9 can also be used, wherein the calculation formula is as follows:
wherein, t2a、t2b、t2c、t2dThe periods of the output signals of the four photosensors 9a, 9b, 9c, 9d, respectively.
The deflection of the rotor 7 to be measured is divided into two directions, namely a vertical plane and a horizontal plane:
the vertical direction is as follows:
horizontal direction:
the total deflection angle of the arm 7 is:
the above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent structures or equivalent flow transformations that are made by using the contents of the specification and the drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (1)

1. A radial integrated measurement method for axial displacement, rotating speed and inclination angle of a rotor is characterized by comprising the following steps:
(1) fixing a standard measurement bar code (8) on a rotor (7) to be measured and moving along with the rotor (7) to be measured, wherein the surface development of the standard measurement bar code (8) is that two materials (8a, 8b) with different reflectivities form an isosceles triangle which alternately appears, and the interface of the standard measurement bar code is a rectangular bar code;
(2) a plurality of photoelectric sensors (9) are uniformly arranged in a plane vertical to the axis of the rotor (7) to be measured, and the photoelectric sensors (9) output high and low levels when testing bar codes with different reflectivities on a standard measurement bar code (8);
(3) taking an initial plane where the photoelectric sensor (9) is located as a reference plane, carrying out signal differentiation, edge detection and result calculation display module according to signals output by the photoelectric sensor (9), and simultaneously obtaining the axial displacement, the rotating speed and the inclination angle of the rotor to be measured;
the step (3) is specifically as follows:
when the centers of the 4 photoelectric sensors (9a, 9b, 9c and 9d) coincide with the axis of the rotor (7) to be measured, and the axis of the rotor (7) to be measured is perpendicular to the plane where the four photoelectric sensors (9) are located, the rotor (7) to be measured and the photoelectric sensors (9) are located at an initial plane position, and at the moment, when the rotor (7) to be measured rotates around the axis of the rotor, the four photoelectric sensors (9a, 9b, 9c and 9d) output corresponding high and low levels which change along with time, namely, when the photoelectric sensors (9) are aligned with the strong-reflectivity bar codes (8b), the high levels are output, and when the photoelectric sensors are aligned with the weak-reflectivity bar codes (8a), the low levels are output;
defining the pulse width ratio:
wherein, t1Is the duration of a high level, t, within one signal period2Is the corresponding square wave signal period; when the axial position of the rotor (7) to be measured does not change, RdAt a constant value, R when the rotor (7) to be measured generates an axial displacement zdIs converted into R'dAnd satisfies the following formula:
theta in the formula is the size of the base angle of the isosceles triangle; w is the length of the bottom side of the isosceles triangle;
when the arc length of any two photoelectric sensors (9) on the corresponding standard measuring bar code (8) is l, the phase difference of output signals between the two sensors is as follows:
wherein,% is remainder operation, n is the total number of triangular bar codes of the weak reflectivity bar code (8a) and the strong reflectivity bar code (8 b);
according to the variation of the phase difference between two adjacent photoelectric sensors (9)The eccentricity can be obtained:
wherein R is the radius of the standard measuring bar code (8);
if the normal of the plane where the photoelectric sensor (9) is located and the axis of the rotor (7) to be measured have a certain included angle alpha, the tangent value of the declination angle of the rotating shaft, namely the declination angle, can be calculated through the pulse width ratio of two opposite photoelectric sensors (9):
wherein R isdaPulse width ratio, R, of the output signal of one of the photosensors (9a)dcA pulse width ratio of an output signal for the other photosensor (9 c);
according to the pulse width ratio of the output signal of the photoelectric sensor (9), calculating the axial displacement of the rotor (7) to be measured:
wherein R isda,Rdb,Rdc,RddPulse width ratios of output signals of the first four photoelectric sensors (9a, 9b, 9c, 9d) for rotor displacement respectively; r'da,R'db,R'dc,R'ddPulse width ratios of output signals of the four photoelectric sensors (9a, 9b, 9c and 9d) after the rotor displacement are respectively set;
the rotating speed n of the rotor (7) to be measured is calculated through the period of the pulse signal, or the calculation results of the four photoelectric sensors (9) are used for averaging, and the calculation formula is as follows:
wherein, t2a、t2b、t2c、t2dThe output signal periods of the four photoelectric sensors (9a, 9b, 9c, 9d) are respectively.
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