CN106500591B - A kind of integrated form multiband Michelson's interferometer - Google Patents
A kind of integrated form multiband Michelson's interferometer Download PDFInfo
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- CN106500591B CN106500591B CN201611215147.8A CN201611215147A CN106500591B CN 106500591 B CN106500591 B CN 106500591B CN 201611215147 A CN201611215147 A CN 201611215147A CN 106500591 B CN106500591 B CN 106500591B
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- 230000003287 optical effect Effects 0.000 claims abstract description 30
- 238000001228 spectrum Methods 0.000 claims abstract description 18
- 238000012545 processing Methods 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 10
- 230000010287 polarization Effects 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 16
- 239000006185 dispersion Substances 0.000 abstract description 13
- 239000007788 liquid Substances 0.000 abstract description 6
- 229910052736 halogen Inorganic materials 0.000 description 6
- 150000002367 halogens Chemical class 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 150000001720 carbohydrates Chemical class 0.000 description 2
- 239000008157 edible vegetable oil Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010999 medical injection Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
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- 238000011160 research Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
Abstract
The present invention is to provide a kind of integrated form multiband Michelson's interferometers.Including photodetector, light source, collimator, Amici prism and its adjustment system, stationary mirror, cuvette and its fixed system, mobile mirror system, optical path compensator and signal processing unit, the photodetector is 8 wave band photodetectors, the light source is wide spectrum light source, wide spectrum light source exports the continuous light wave of multiband, the light wave of each wave band is respectively formed one group of white light interference pattern by Michelson's interferometer, 8 wave band white light interference signal detections independent are realized simultaneously by 8 wave band photodetector independent and signal processing unit.The present invention constructs the integrated technical solution of multiband Michelson's interferometer using wide spectrum light source, Amici prism and its adjustment system, Multirange photoelectric detector.The measurement that can be used for the optical characteristics such as refraction, the dispersion of transparent medium, measurement and identification particularly suitable for transparency liquid.
Description
Technical field
The present invention relates to a kind of integrated form multiband Michelson's interferometers.
Background technique
Well known Michelson's interferometer is to be cooperated by U.S.'s experimental physicist Michelson with Mo Lei, for research " with
It too " drifts about and manufactures and designs the precision optical instrument come out.It is to generate dual-beam using divide amplitude to realize interference.Pass through
The interferometer is adjusted, equal thick interference fringe is can produce, also can produce equal inclination fringe.
Using well known Michelson's interferometer principle, researcher develops a variety of dedicated interferometers.Wherein, based on white
The Michelson's interferometer of light, the low-coherence light source that wide spectrum, coherence length can be utilized very short, the interference for utilizing interference to generate
Striped carries out absolute measurement to parameters such as light path, optical dispersions, has strong antijamming capability, structure simple, low in cost etc. excellent
Point.
The light source of well known white light Michelson's interferometer is generally monochromatic light, major technique related to this, such as light path
Matching, signal modulation and demodulation etc., it is mature.Based on various kinds of sensors designed by well known Michelson's interferometer,
When to the measurement of simple target, there is high-precision, high-sensitivity characteristic.
But under integrated, intelligent, networking the technical background of sensor function, traditional, well known Michael
Inferior interferometer, since measurement target is single, application is restricted.Engineering in practice, using a set of sensor-based system to more mesh
Mark measure simultaneously or same measurement target carries out the measurements of multiple wave bands, is the richer information of acquisition and to quilt
The important technical of measurement object progress overall merit.Since well known white light Michelson's interferometer generallys use monochromatic light
Source, when measuring medium refraction, dispersion characteristics, one-shot measurement can only obtain the refractive index of one group of specific wavelength.And it is real in production
In border, needing to obtain richer metrical information to the acquisition of the refractive index, dispersion characteristics of some doping transparent media could be obtained
To accurate measurement result, this is that monochromatic light Michelson's interferometer cannot be completed by one-shot measurement.
Summary of the invention
It can be realized the more of the optical characteristics such as the refraction to detected substance, dispersion the purpose of the present invention is to provide a kind of
Tie up the integrated form multiband Michelson's interferometer of evaluation.
The object of the present invention is achieved like this: including photodetector, light source, collimator, Amici prism and its adjustment
System, stationary mirror, cuvette and its fixed system, mobile mirror system, optical path compensator and signal processing unit, institute
State photodetector be 8 wave band photodetectors, the light source be wide spectrum light source, 8 wave band photodetectors, wide spectrum light source,
Collimator, Amici prism and its adjustment system, stationary mirror, cuvette and its fixed system, mobile mirror system, light path
Compensator and signal processing unit, which are integrated on same optical path substrate, constitutes 8 Michelson interferences for working in different-waveband
Instrument, wide spectrum light source export the continuous light wave of multiband, and the light wave of each wave band is respectively formed one group by Michelson's interferometer
White light interference pattern realizes that 8 wave band white lights are dry by 8 wave band photodetector independent and signal processing unit simultaneously
Relate to signal detection independent.
The present invention may also include:
1, the Amici prism and its adjustment system are by Amici prism, Amici prism firm banking, firm banking angle
Adjustment frame composition, the inside and outside contour line of the firm banking angular adjustment frame is square, in firm banking angle
The vertical view face of adjustment frame is provided with 4 perforative apertures, and the center of each aperture is located at the symmetrical centre in each side face of adjustment frame,
2 perforative wire holes are had on the front and back facade of firm banking angular adjustment frame, two wire holes on same facade are symmetrical
The two sides of opened aperture on side face corresponding to the facade are distributed in, the wire hole on former and later two facades is conllinear.
2, the Amici prism firm banking is overlooked face and is square, and the center for overlooking face is provided with a countersunk head through small
Hole；Amici prism is installed together with Amici prism firm banking, and the downward projection face center of prism is fixed positioned at Amici prism
Pedestal overlooks the center in face, and the square four in the downward projection face of prism is when overlooking face square four with firm banking
It is parallel.
It 3, further include the polarizer for controlling the polarization state for each wave band light wave for entering Amici prism and its adjustment system, also
Including making the multiband light wave into 8 wave band photodetectors be in the analyzer of identical polarization state.
Wide spectrum light source, Amici prism and its adjustment system, Multirange photoelectric detector structure are utilized the present invention provides a kind of
The integrated technical solution for the multiband Michelson's interferometer made, its purpose is to overcome single wave band mikey in prior art
Your inferior interferometer bring measurement target is single and the problems such as be unable to overall merit detected target property.
Main feature of the invention is embodied in:
1, the Michelson's interferometer that 8 work in different-waveband is integrated on same optical path substrate, it is by 8 wave bands
Photodetector, optical path substrate, wide spectrum light source, collimator, Amici prism and its adjustment system, stationary mirror, the polarizer, inspection
Inclined device, cuvette and its fixed system, mobile mirror system, optical path compensator, signal processing unit composition.
This way is had an advantage that: the light source of each specific band in wide spectrum light source, all by on optical path substrate
Collimator, Amici prism and its adjustment system, stationary mirror, the polarizer, analyzer, cuvette and its fixed system, movement
For detecting the aforementioned light emitted wave of specific band light source in mirror system, optical path compensator and 8 wave band photodetectors
Probe unit, constitute a Michelson's interferometer.
This way is also beneficial in that: by 8 wave band photodetectors, collimator, Amici prism and its adjustment system, admittedly
Determine reflecting mirror, the polarizer, analyzer, cuvette and its fixed system, optical path compensator and is all mounted on same optical path substrate
On, the integrated of 8 different-waveband Michelson's interferometers is not only technically realized, the monolithic stability of system is also added
Property.
2, wide spectrum light source exports the continuous light wave of multiband, and the light wave of each wave band passes through Michelson's interferometer,
One group of white light interference pattern is formed, by 8 wave band photodetector independent and signal processing unit, while realizing 8
The detection independent of wave band white light interference signal.
This way is had an advantage that: since the independent detection that 8 wave band photodetectors can be realized each wave band is opened
It opens or the detection of several wave bands while opening, can be measured and be needed and the attribute of measurement target according to technology, pass through signal processing
Unit optimizes the operating mode of 8 wave band photodetectors.
Since the white light of 8 wave bands is respectively positioned on visible light wave range, this is easily obtained wide spectrum light source, common halogen
Lamp, natural light may serve to as work light.
3, Amici prism and its adjustment system are by Amici prism, Amici prism firm banking, the adjustment of firm banking angle
3 part of frame composition.
The inside and outside contour line of firm banking angular adjustment frame is square；It is adjusted in this firm banking angle
The vertical view face of frame is provided with 4 perforative apertures, and the center of each aperture is located at the symmetrical centre in each side face of adjustment frame；At this
The head-on view of firm banking angular adjustment frame and backsight face have two perforative wire holes, two silks on same view face
Hole is symmetrically distributed in the two sides depending on opened aperture on side face corresponding to face, and the wire hole on former and later two view faces is conllinear.
In the vertical view face of firm banking angular adjustment frame above-mentioned, 4 perforative apertures are provided with, its role is to adjust this
Whole frame is fixed on optical path substrate.4 opened on firm banking angular adjustment frame are in wire hole, difference precession jackscrew
Afterwards, each jackscrew branch withstands on Amici prism and its adjusts the corresponding side elevation of system firm banking.In this way, when precession or screwing out top
Silk can control and finally fix the entirety that Amici prism and Amici prism firm banking are constituted, to realize Amici prism
Angle adjustment.
In Amici prism and its adjustment system, Amici prism firm banking is overlooked face and is square, and overlooks the center in face
A countersunk head is provided with through aperture；Amici prism is installed together with Amici prism firm banking, in the downward projection face of prism
The heart is located at the center that Amici prism firm banking overlooks face, and four side of square in the downward projection face of prism and fixed bottom
It is parallel that seat overlooks square four sides in face.
A countersunk head is provided with through aperture at the center of Amici prism firm banking, is had an advantage that: due to white light mikey
Your inferior interferometer, which matches light path, requires harshness, and angle, which has light path matching, to be directly affected, and Amici prism is mounted on light splitting
On prism firm banking, then the entirety that Amici prism and Amici prism firm banking are constituted can be mounted on by countersunk head aperture
On optical path substrate, this entirety can planar be rotated centered on countersunk head aperture in this way, it can be the angle of Amici prism
It is convenient that degree adjustment provides.
Integrated form multiband Michelson's interferometer of the invention, the optics that can be used for various transparent mediums and material are special
The measurement of property, dispersion characteristics.Particularly suitable for transparency liquid, such as: drinks, carbohydrate drink；Various edible vegetable oils；It is various transparent
The measurement and identification of medical injection medical fluid etc..
Compared with first technology, the present invention is by using the technological means of wide spectrum light source, Multirange photoelectric detector, in fact
Now at least the white light Michelson's interferometer of 8 wave bands is integrated on same optical path substrate, a kind of integrated form produced
Multiband Michelson interference system.This interferometer can be used for observing the refractive index of substance, dispersion characteristics.Since this interferometer can
8 wave bands in natural light are worked in, so 8 kinds of characteristic spectrums can be obtained simultaneously to the observation of same substance.Comprehensive analysis
These maps, can refraction to detected substance, dispersion characteristics carry out multidimensional evaluation, to improve the optical characteristics to substance
The accuracy of detection and characteristic differentiation.
Detailed description of the invention
Fig. 1 is multiband integrated form Michelson's interferometer system schematic perspective view.
Fig. 2 is multiband integrated form Michelson's interferometer structural plan of the present invention expanded schematic diagram.
Fig. 3 is Amici prism and its schematic top plan view for adjusting system.
Fig. 4 is Amici prism and its adjustment system forward sight (or backsight) schematic diagram.
Fig. 5 is the front-view schematic diagram of Amici prism firm banking.
Fig. 6 is the structural schematic diagram of mobile mirror system.
Fig. 7 is the embodiment schematic diagram using halogen lamp as alternative light source.
Specific embodiment
It illustrates below and the present invention is described in more detail.
In conjunction with Fig. 1 and 2, multiband integrated form Michelson's interferometer system of the invention by 8 wave band photodetectors 1,
Wide spectrum light source 3, collimator 4, Amici prism and its adjustment system 5, stationary mirror 6, the polarizer 7, analyzer 8, cuvette and
Its fixed system 9, mobile mirror system 10, optical path compensator 11, signal processing unit 12 form.It is mounted on same optical path base
On plate 2.
In conjunction with Fig. 3, Amici prism and its adjustment system 5 are by Amici prism 13, Amici prism firm banking 14, firm banking
Angular adjustment frame 15, jackscrew 16, jackscrew 17, jackscrew 18, jackscrew 19 form；It is provided with and runs through on firm banking angular adjustment frame 15
Aperture, respectively through aperture 20, through aperture 21, through aperture 22, through aperture 23.
In conjunction with Fig. 4, Amici prism and its adjustment system 5 are by Amici prism 13, Amici prism firm banking 14, firm banking
Angular adjustment frame 15 forms.It is provided in the head-on view of firm banking angular adjustment frame 15 through wire hole 24,25；It is provided in backsight face
Through wire hole 26,27.Forward sight (or backsight) perspective plane through wire hole 24,26 is to be overlapped；Through the forward sight of wire hole 25,27
(or backsight) perspective plane is to be overlapped.
In conjunction with Fig. 5, countersunk head is provided with through aperture 28 in the center of Amici prism firm banking 14.
In conjunction with Fig. 6, mobile mirror system 10 is single by micron order displacement scan table 29, micron order displacement scan table control
Member 30, reflecting mirror 31 form.
It include whole using halogen lamp as in the embodiment of alternative light source, having selected halogen lamp to be used as in conjunction with Fig. 7
The wide spectrum light source of 8 detecting bands.The composition of this embodiment includes: the photodetector 1 of 8 wave bands, optical path substrate 2, halogen
Plain lamp 3, colimated light system 4, Amici prism and its adjustment system 5, stationary mirror system 6, the polarizer 7, analyzer 8, cuvette
And its fixed system 9, mobile mirror system 10, optical path compensator 11, signal processing unit 12.
It is the technical solution that the present invention is used to obtain the refraction of certain transparency liquid, dispersion characteristics.It is according to figure 7
Embodiment, space optical path are such that
The multiband light wave that halogen lamp 3 issues, after colimated light system 4, after entering Amici prism and its adjustment system 5
It is divided into two beams.The reflected beams therein impinge perpendicularly on stationary mirror system 6 and after reflecting mirror reflections, are re-introduced into
Amici prism and its adjustment system 5, and after through Amici prism and its adjustment system 5 transmit after, arrive at 8 wave band photodetectors 1；
Transmitted light beam therein then impinges perpendicularly on mobile mirror system 10, and after reflecting mirror reflects, and is re-introduced into light splitting
Prism and its adjustment system 5 arrive at 8 wave band photodetectors 1 after Amici prism and its adjustment system 5 reflect.
8 selected characteristic wave bands are respectively positioned on visible light wave range, respective central wavelength be respectively as follows: 428nm, 460nm,
490nm、515nm、557nm、615nm、660nm、695nm。
As needed, the polarizer 7 that can be placed in the optical path, it is therefore an objective to which control enters Amici prism and its adjustment system 5
Each wave band light wave polarization state；Analyzer 8 is placed in the optical path, it is therefore an objective to make more waves into 8 wave band photodetectors
The light wave of Duan Guangbo, especially the same band is in identical polarization state, to improve the coherent contrast degree of optical signal.
Embodiment according to figure 7, light path matching are achieved in that
In mobile mirror system 10, the installation of reflecting mirror 31 is displaced on scan table 29 in the micron-scale.When institute in the present invention
When the signal arm light path in integrated form multiband Michelson's interferometer stated changes, scan table control is displaced by micron order
Unit 30 processed controls the back-and-forth motion of reflecting mirror, to realize that light path matches.
Embodiment according to figure 7 is realized in the refraction of certain transparency liquid, the detection of dispersion characteristics
:
In adjustment colimated light system 4, mobile mirror system 10, Amici prism and its system 5, optical path compensator 11 are adjusted,
It realizes in multiband integrated form multiband Michelson's interferometer of the present invention, the light path of signal arm and reference arm is close to absolutely
After equal, testing liquid is put into cuvette and its fixed system 9.After stablizing, by driving mobile mirror system
System 10 realizes light path scanning.After single pass, the white light interference map of 8 wave bands can be obtained in signal processing unit 12.
Due to the light wave of different-waveband, the refractive index in same medium is different, then in the embodiment shown in fig. 7, often
The matching of geometry distance corresponding to peak value is different in one wave band white light interference map.In this way, embodiment illustrated in fig. 7 obtained 8
The displaced from one another of peak value will occur in a wave band white light interference map.Pass through analysis displacement and the association of refractive index and dispersion
Property, multiband refraction, the dispersion characteristics of fluid to be measured can be obtained, to realize to light such as refraction, the dispersions of detected substance
Learn the multidimensional evaluation of characteristic.The embodiment is suitable for transparency liquid, such as: drinks, carbohydrate drink, and various edible vegetable oils are various
The measurement and identification of transparent medical injection medical fluid etc..
Claims (3)
1. a kind of integrated form multiband Michelson's interferometer, including photodetector, light source, collimator, Amici prism and its
Adjustment system, stationary mirror, cuvette and its fixed system, mobile mirror system, optical path compensator and signal processing list
Member, the photodetector are 8 wave band photodetectors, and the light source is wide spectrum light source, 8 wave band photodetectors, wide range
Light source, collimator, Amici prism and its adjustment system, stationary mirror, cuvette and its fixed system, mobile mirror system
System, optical path compensator and signal processing unit, which are integrated on same optical path substrate, constitutes 8 mikeys for working in different-waveband
The inferior interferometer of that, wide spectrum light source export the continuous light wave of multiband, and the light wave of each wave band is equal by Michelson's interferometer
One group of white light interference pattern is formed, 8 waves are realized by 8 wave band photodetector independent and signal processing unit simultaneously
Section white light interference signal detection independent, it is characterized in that:
The Amici prism and its adjustment system are by Amici prism, Amici prism firm banking, firm banking angular adjustment frame
Composition, the inside and outside contour line of the firm banking angular adjustment frame is square, in firm banking angular adjustment frame
Vertical view face be provided with 4 perforative apertures, the center of each aperture is located at the symmetrical centre in each side face of adjustment frame, at fixed bottom
2 perforative wire holes are had on the front and back facade of seat angular adjustment frame, two wire holes on same facade are symmetrically distributed in
The two sides of opened aperture on side face corresponding to the facade, the wire hole on former and later two facades are conllinear.
2. integrated form multiband Michelson's interferometer according to claim 1, it is characterized in that: the Amici prism is fixed
Pedestal is overlooked face and is square, and the center for overlooking face is provided with a countersunk head through aperture；Amici prism is fixed with Amici prism
Pedestal is installed together, and the downward projection face center of prism is located at the center that Amici prism firm banking overlooks face, and rib
The square four in the downward projection face of mirror is parallel when overlooking face square four with firm banking.
3. integrated form multiband Michelson's interferometer according to claim 1 or 2, it is characterized in that: further include control into
Enter Amici prism and its adjust the polarizer of the polarization state of each wave band light wave of system, further includes making to enter 8 band of light electrical resistivity surveys
The multiband light wave for surveying device is in the analyzer of identical polarization state.
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| JP6480091B1 (en) * | 2017-07-06 | 2019-03-06 | 浜松ホトニクス株式会社 | Mirror unit and optical module |
| CN107798976A (en) * | 2017-11-23 | 2018-03-13 | 沈阳师范大学 | A kind of portable modular Michelson interference experimental provision |
| CN111780664B (en) * | 2020-06-29 | 2021-11-09 | 四川大学 | Output method for simultaneously outputting dual-frequency stripes with orthogonal polarization directions |
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| CN1542414A (en) * | 2003-11-03 | 2004-11-03 | 中国科学院长春光学精密机械与物理研 | Grating diffraction efficiency testing instrument for optical path symmetrical distribution |
| CN1811365A (en) * | 2006-02-21 | 2006-08-02 | 北京航空航天大学 | System for detecting polarization maintaining optical fiber beat length |
| CN103822718A (en) * | 2014-03-10 | 2014-05-28 | 李剑平 | Scanning interferometer device for measuring imaging Fourier transform spectrum |
| CN105444882A (en) * | 2015-12-14 | 2016-03-30 | 中国科学院合肥物质科学研究院 | Eight-channel radiometer capable of realizing self-calibrating function |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2000234914A (en) * | 1999-02-15 | 2000-08-29 | Tokimec Inc | Strain detector |
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| CN1542414A (en) * | 2003-11-03 | 2004-11-03 | 中国科学院长春光学精密机械与物理研 | Grating diffraction efficiency testing instrument for optical path symmetrical distribution |
| CN1811365A (en) * | 2006-02-21 | 2006-08-02 | 北京航空航天大学 | System for detecting polarization maintaining optical fiber beat length |
| CN103822718A (en) * | 2014-03-10 | 2014-05-28 | 李剑平 | Scanning interferometer device for measuring imaging Fourier transform spectrum |
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Effective date of registration: 20201028 Address after: 541004 the Guangxi Zhuang Autonomous Region golden Guilin Qixing District Road No. 1 Patentee after: GUILIN University OF ELECTRONIC TECHNOLOGY Address before: 150001 Heilongjiang, Nangang District, Nantong street,, Harbin Engineering University, Department of Intellectual Property Office Patentee before: HARBIN ENGINEERING University |
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Application publication date: 20170315 Assignee: Aifeibo (Ningbo) Optoelectronic Technology Co.,Ltd. Assignor: GUILIN University OF ELECTRONIC TECHNOLOGY Contract record no.: X2023980046363 Denomination of invention: An integrated multi band Michelson interferometer Granted publication date: 20181211 License type: Common License Record date: 20231108 |