CN106352927A - Graphene-distributed multi-physical-quantity sensor array system - Google Patents
Graphene-distributed multi-physical-quantity sensor array system Download PDFInfo
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- CN106352927A CN106352927A CN201610864228.4A CN201610864228A CN106352927A CN 106352927 A CN106352927 A CN 106352927A CN 201610864228 A CN201610864228 A CN 201610864228A CN 106352927 A CN106352927 A CN 106352927A
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- graphene
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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Abstract
The invention discloses a graphene-distributed multi-physical-quantity sensor array system. The graphene-distributed multi-physical-quantity sensor array system comprises an array circuit board and array circuits, wherein the array circuits are distributed on the array circuit board; a plurality of graphene-distributed multi-physical-quantity sensor sub-modules connected with the array circuits are arranged on the array circuit board; each graphene-distributed multi-physical-quantity sensor sub-module comprises four physical quantity sensors including a graphene strain sensor, a graphene pressure sensor, a graphene temperature sensor and a graphene humidity sensor.
Description
Technical field
The present invention relates to a kind of sensor array system, the distributed many physical quantity transducers array of especially a kind of Graphene
System.
Background technology
Intelligent sensing technology is just energetically changing the mode of people's cognition, thinking and behavior.Wearable device, electronics skin
Skin etc. can perceive the senser element of external pressure, temperature, air-flow and haptic signal as human body skin.Especially, exist
Measuring of human health, the health control of main equipment, man-machine interaction and military field, heavy wearing weaponry and energy supply
System seriously limits the operation motility of soldier, and the integrated technology of soft, many physical quantity sensings becomes urgent needss.
Strain, temperature, humidity and pressure are the important physical amount in various monitoring systems, the generally survey to these physical quantitys
Amount uses separation sensor.The defect of separation sensor is that volume is larger, power consumption is big it is impossible to satisfaction is fast-developing at present
The requirement to aspects such as sensor small size, low-power consumption, high integration, light flexibles for the micro-system, needs for this to meet these
The integrated sensor of demand.Modern micro-electromechanical technology and semiconductor technology can make on a silicon substrate microelectronic integrated circuit and
Multifunction Sensor array, for measuring various chemical quantities and physical index.Many physical quantity transducers are not a set of simple
Simple function sensor, but in order to reduce chip area with to share the structure heights such as digital or quasi- numeral output integrated
Sensor.Many physical quantitys integrated sensor can detect the various parameters such as physical quantity such as temperature, pressure, humidity, strain simultaneously, and right
Many physical quantitys carry out comprehensive analysis, obtain accurately perception information.
Notification number is that the patent of cn1217157c discloses a kind of integrated temperature/humidity, barometric pressure sensor chip, at this
Three resistance and a plate electrode as pressure measurement capacitor lower electrode are produced on the substrate of sensor chip.Notification number is
The patent of cn24420021c also discloses that a kind of single slice integration temperature based on polymeric material, humidity, pressure transducer core
Piece.Notification number is that the patent of cn 104034454b also discloses that a kind of sensor chip for many physical quantities and preparation
Method, this chip is included in substrate and integrated temperature sensor on substrate, humidity sensor and pressure transducer extremely
Few two kinds of sensors.
Although sensor chip disclosed in above three patent enables many physics such as measurement temperature, humidity and pressure simultaneously
Amount, but preparation technology is relatively complicated, employs different thin film to make the element of thermometric humidity and pressure.These sensings
Device is metallic film quasi-resistance sensor, and due to the restriction of the aspects such as thin-film technique, in order to reduce defect, film is typically made ratio
1 μm of thicker (>), lead to resistance change rate δ r/r ratio relatively low, so compared with other class sensors, sensitivity is relatively low.And
And, the sensor based on metallic film has, at flexible, stretchable aspect, the obstacle being difficult to go beyond, thus limiting answering of it
With.Therefore, it is necessary to many physical quantity transducers based on other materials or principle for the development.
Content of the invention
For above-mentioned technical problem, the present invention provides a kind of Graphene distributed many physical quantity transducers array system
System, using grapheme material as sensing material, in conjunction with device structure design, realizes the physical quantitys such as temperature, humidity, pressure and strain
High sensitivity sensing, can achieve distributed many physical sensors system of array further, and can integrated flexible electronic
Technique.
In order to solve above-mentioned technical problem, the technical solution used in the present invention is: a kind of distributed many physical quantitys of Graphene
Sensor array system, including the array circuit of arrangement on array circuit plate and array circuit plate, on described array circuit plate
It is provided with the distributed many physical quantity transducers submodule of some Graphenes being connected with array circuit；Described Graphene is distributed many
Physical quantity transducer submodule includes Graphene strain transducer, Graphene pressure transducer, graphene temperature sensor and stone
Black four kinds of physical quantity transducers of alkene humidity sensor.Graphene, state-of-the-art two-dimension nano materials at present, can give wearable
The brand-new characteristic of equipment, brand-new function, brand-new concept.It is provided simultaneously with excellent optics, electricity, mechanics, thermal property.
Graphene is the thinnest, the hardest nano material in known world, and its fracture strength is 42n/m2, intensity, up to 130 gpa, is
More than 100 times of iron and steel intensity；It has excellent light transmission, is only 2.3% to the optical absorptivity of visible ray and infrared light；?
Under room temperature, electron mobility is more than 15000 cm2/ v s, resistivity is only 10-6 ω/cm, lower than copper and Yin Geng, is the current world
The minimum material of upper resistivity；In addition, the connection between the carbon atom of Graphene is very pliable and tough, so that Graphene has
Suitable pliability and stability, suitable Bending Deformation does not interfere with the performance of Graphene yet.Thin film Graphene chemically stable,
Relatively conventional metal material has more preferable bio-compatibility, and the Wearable device based on Graphene can be more intelligent green
Color, ecological friendly, richer ergonomic designs.Graphene is attracted with its excellent and optics of uniqueness, electricity and mechanical characteristic
The extensive concern of scientific circles and industrial quarters, in the neck such as Wearable device, electronic skin, intelligence sensor, biosensor
Domain is with a wide range of applications.
Improve as a kind of, described Graphene strain transducer include two pieces in length and breadth the strain sensor film of arranged crosswise and
Two end electrodes；Described Graphene pressure transducer includes Graphene power sensitive film and two end electrodes, described Graphene power sensitive film
Arrange fluted on the array circuit plate of lower section, Graphene power sensitive film upper surface is additionally provided with the quick contact of power of cylinder；Institute
State graphene temperature sensor and include the temperature sensitive thin film of Graphene and two end electrodes；Described Graphene humidity sensor includes Graphene
Humidity sensitive thin film and two end electrodes.Setting groove below Graphene pressure transducer, so that the bigger strain space of thin film tool, is carrying
On the premise of the high thin film strain limit, improve the range of sensor.Groove is preferably square, and power is quick to touch that it is a diameter of recessed
0.3 ~ 0.7 times of trough rim length, thickness is 100 μm ~ 1mm.The material of the quick contact of power is the polymeric material such as pdms, pet, tpu.
It is placed in the Graphene power sensitive film above hanging blind hole would generally deform, concave downward, lead to be difficult to effectively
The change of sensed pressure；The quick contact of setting power, with the change of effectively perceive pressure, can improve the sensitivity of array of pressure sensors
And response speed.
Improve as a kind of, described strain sensor film is composited by graphene layer and elastomeric polymer layer；Described should
Change sensor film has graphene layer one side some micro nano structures.Micro nano structure refers to the company being formed in film surface
Continuous depression.This micro nano structure produces certain fold back effect by thin film, increased the pliability of thin film.
Improve as a kind of, described Graphene power sensitive film is the laminated film of Graphene and elastomeric polymer；Graphene
It is placed in polymer surfaces and form graphene layer；Or Graphene is blended with polymer, Graphene is embedded in polymeric inner.
Improve as a kind of, described groove is located at Graphene pressure transducer and hits exactly, its area is Graphene pressure sensing
The 25% ~ 81% of device area.The sensitivity of Graphene pressure transducer can be improved.
Improve as a kind of, the temperature sensitive thin film of described Graphene is composited by graphene layer and elastomeric polymer；Described
Graphene humidity sensitive thin film is composited by graphene layer and elastomeric polymer.
Improve as a kind of, described elastomeric polymer layer is by polydimethylsiloxane or polyurethane rubber or organosilicon
One of rubber manufactures；Its thickness is 10 ~ 1000 μm.
Improve as a kind of, described graphene layer is three-dimensional grapheme nm wall, two-dimensional graphene thin film or Graphene
Powder, its thickness is 10nm ~ 10 μm.
Improve as a kind of, described array circuit be distributed in each Graphene distributed many physical quantity transducers submodule it
Between, it is connected with each Graphene distributed many physical quantity transducers submodule cube electrode；And control Graphene to divide by analog switch
The gating of cloth many physical quantity transducers submodule.It is easy to connect up, reduce the volume of circuit board.
As a kind of preferably, the distributed many physical quantity transducers submodule of described some Graphene can form 1 × 1～100
× 100 array；A length of 1mm～20mm of the distributed many physical quantity transducers submodule of described Graphene, a width of 1mm～
20mm.
Brief description
Fig. 1 is the structural representation of the embodiment of the present invention 1.
Fig. 2 is the structural representation of Graphene distributed many physical quantity transducers submodule.
Fig. 3 is the fpc circuit diagram of Graphene distributed many physical quantity transducers submodule.
Fig. 4 is the structural representation of Graphene strain transducer.
Fig. 5 is graphene temperature sensor.
Fig. 6 is Graphene humidity sensor.
Fig. 7 is Graphene pressure transducer.
In figure labelling: 101 is Graphene strain transducer, 102 is graphene temperature sensor, and 103 is Graphene humidity
Sensor, 104 is Graphene pressure transducer, and 105 is array circuit plate；201-204 is two end electrodes, and 205 is groove；301
Strain sensor film, 302 is strain sensor film；401 is the temperature sensitive thin film of Graphene；501 is Graphene humidity sensitive thin film；601 are
Graphene power sensitive film；602 is the quick contact of power.
Specific embodiment
Below in conjunction with the accompanying drawings, the present invention is described in detail.
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with drawings and Examples, right
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only in order to explain the present invention, and
It is not used in the restriction present invention.
Embodiment 1 is 3 × 3 array systems, as shown in figs. 1-7, including array circuit plate 105 and array circuit plate
On 105, the array circuit of arrangement, described array circuit plate 105 is provided with some Graphenes being connected with array circuit distributed
Many physical quantity transducers submodule；Array circuit is distributed between each Graphene distributed many physical quantity transducers submodule,
It is connected with each Graphene distributed many physical quantity transducers submodule cube electrode；And control Graphene distributed by analog switch
The gating of many physical quantity transducers submodule.The distributed many physical quantity transducers submodule of described Graphene includes Graphene strain
Sensor 101, Graphene pressure transducer 104, graphene temperature sensor 102 and 103 4 kinds of things of Graphene humidity sensor
Reason quantity sensor.Described Graphene strain transducer 101 includes two pieces of the strain sensor film 301 of arranged crosswise and strains in length and breadth
Sensor film 302 and two end electrodes 201；Described Graphene pressure transducer 104 includes Graphene power sensitive film 601 and two ends
Electrode 204；Fluted 205 are arranged, Graphene power is quick thin on the array circuit plate 105 of described Graphene power sensitive film 601 lower section
Film 601 upper surface is additionally provided with the quick contact of power 602 of cylinder；Groove 205 hits exactly positioned at Graphene pressure transducer 104, its
Area is the 25% ~ 81% of Graphene pressure transducer 104 area.It is temperature sensitive that described graphene temperature sensor 102 includes Graphene
Thin film 401 and two end electrodes 202；Described Graphene humidity sensor 103 includes Graphene humidity sensitive thin film 501 and two end electrodes
203.
Strain sensor film 301 and strain sensor film 302 are composited by graphene layer and elastomeric polymer layer；Strain
Sensor film 301 and strain sensor film 302 have graphene layer one side and have some micro nano structures.
Graphene power sensitive film 601 is the laminated film of Graphene and elastomeric polymer；Graphene is placed in polymer surfaces
Form graphene layer；Or Graphene is blended with polymer, Graphene is embedded in polymeric inner.
The temperature sensitive thin film of Graphene 401 is composited by graphene layer and elastomeric polymer.
Graphene humidity sensitive thin film 501 is composited by graphene layer and elastomeric polymer.
Elastomeric polymer layer is manufactured by polydimethylsiloxane or one of polyurethane rubber or organic silicon rubber；
Its thickness is 10 ~ 1000 um.
Graphene layer is three-dimensional grapheme nm wall, two-dimensional graphene thin film or graphene powder, its thickness be 10nm ~
10um.
Except 3 × 3 array systems in embodiment 1, Graphene distributed many physical quantity transducers submodule can form 1 × 1
～100 × 100 array；A length of 1mm～20mm, a width of 1mm of the distributed many physical quantity transducers submodule of described Graphene
～20mm.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all essences in the present invention
Any modification, equivalent and improvement made within god and principle etc., should be included within the scope of the present invention.
Claims (10)
1. the distributed many physical quantity transducers array system of a kind of Graphene, including cloth on array circuit plate and array circuit plate
The array circuit put it is characterised in that: some Graphenes being connected with array circuit distributions are provided with described array circuit plate
Formula many physical quantity transducers submodule；The distributed many physical quantity transducers submodule of described Graphene includes Graphene strain sensing
Device, Graphene pressure transducer, graphene temperature sensor and Graphene humidity sensor.
2. a kind of distributed many physical quantity transducers array system of Graphene according to claim 1 it is characterised in that: institute
State Graphene strain transducer and include two pieces of the strain sensor film of arranged crosswise and two end electrodes in length and breadth；Described Graphene pressure
Sensor includes Graphene power sensitive film and two end electrodes, and the array circuit plate below described Graphene power sensitive film is provided with
Groove, Graphene power sensitive film upper surface is additionally provided with the quick contact of power of cylinder；Described graphene temperature sensor includes stone
The temperature sensitive thin film of black alkene and two end electrodes；Described Graphene humidity sensor includes Graphene humidity sensitive thin film and two end electrodes.
3. a kind of distributed many physical quantity transducers array system of Graphene according to claim 2 it is characterised in that: institute
State strain sensor film to be composited by graphene layer and elastomeric polymer layer；Described strain sensor film has graphene layer one
There are some micro nano structures in face.
4. a kind of distributed many physical quantity transducers array system of Graphene according to claim 2 it is characterised in that: institute
State the laminated film that Graphene power sensitive film is Graphene and elastomeric polymer；Graphene is placed in polymer surfaces and forms Graphene
Layer；Or Graphene is blended with polymer, Graphene is embedded in polymeric inner.
5. a kind of distributed many physical quantity transducers array system of Graphene according to claim 2 it is characterised in that: institute
State groove and be located at Graphene pressure transducer center, its area is the 25% ~ 81% of Graphene pressure transducer area.
6. a kind of distributed many physical quantity transducers array system of Graphene according to claim 2 it is characterised in that: institute
State the temperature sensitive thin film of Graphene being composited by graphene layer and elastomeric polymer；Described Graphene humidity sensitive thin film is by graphene layer
With being composited of elastomeric polymer.
7. the Graphene distributed many physical quantity transducers array system according to claim 3,4,6 it is characterised in that:
Described elastomeric polymer layer is manufactured by polydimethylsiloxane or one of polyurethane rubber or organic silicon rubber；It is thick
Spend for 10 ~ 1000 um.
8. a kind of Graphene distributed many physical quantity transducers array system according to claim 3,4,6, its feature exists
Be three-dimensional grapheme nm wall, two-dimensional graphene thin film or graphene powder in: described graphene layer, its thickness be 10nm ~
10um.
9. a kind of distributed many physical quantity transducers array system of Graphene according to claim 1 it is characterised in that: institute
State array circuit to be distributed between each Graphene distributed many physical quantity transducers submodule, distributed with each Graphene many
Physical quantity transducer submodule cube electrode connects；And Graphene distributed many physical quantity transducers submodule is controlled by analog switch
Gating.
10. a kind of distributed many physical quantity transducers array system of Graphene according to claim 1 it is characterised in that:
The distributed many physical quantity transducers submodule of described some Graphenes can form 1 × 1～100 × 100 array；Described Graphene
A length of 1mm～20mm of distributed many physical quantity transducers submodule, a width of 1mm～20mm.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107219168A (en) * | 2017-08-02 | 2017-09-29 | 贵州工程应用技术学院 | A kind of advance damage intelligent injury detector |
| CN107374598A (en) * | 2017-09-15 | 2017-11-24 | 中国科学院重庆绿色智能技术研究院 | A kind of pulse-taking instrument based on multipoint pressure sensor |
| CN108489377A (en) * | 2018-03-25 | 2018-09-04 | 苏州科技大学 | More physics quantity detection sensors based on graphene and strain transducer |
| CN109425448A (en) * | 2017-09-04 | 2019-03-05 | 北京清正泰科技术有限公司 | A kind of graphene sensor package system |
| CN110793676A (en) * | 2018-08-02 | 2020-02-14 | 北京纳米能源与系统研究所 | Temperature and humidity pressure sensor, preparation method thereof and electronic skin |
| CN111076770A (en) * | 2019-12-09 | 2020-04-28 | 电子科技大学 | Multi-mode intelligent sensor with sensing element and memristor combined |
| CN111898174A (en) * | 2020-07-31 | 2020-11-06 | 北京大学 | Free reconfigurable system based on standardized module and magnetic interconnection |
| CN113155344A (en) * | 2021-01-25 | 2021-07-23 | 电子科技大学 | Flexible electronic skin device with touch information perception function |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107219168A (en) * | 2017-08-02 | 2017-09-29 | 贵州工程应用技术学院 | A kind of advance damage intelligent injury detector |
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| CN109425448A (en) * | 2017-09-04 | 2019-03-05 | 北京清正泰科技术有限公司 | A kind of graphene sensor package system |
| CN107374598A (en) * | 2017-09-15 | 2017-11-24 | 中国科学院重庆绿色智能技术研究院 | A kind of pulse-taking instrument based on multipoint pressure sensor |
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| CN110793676A (en) * | 2018-08-02 | 2020-02-14 | 北京纳米能源与系统研究所 | Temperature and humidity pressure sensor, preparation method thereof and electronic skin |
| CN111076770A (en) * | 2019-12-09 | 2020-04-28 | 电子科技大学 | Multi-mode intelligent sensor with sensing element and memristor combined |
| CN111898174A (en) * | 2020-07-31 | 2020-11-06 | 北京大学 | Free reconfigurable system based on standardized module and magnetic interconnection |
| CN113155344A (en) * | 2021-01-25 | 2021-07-23 | 电子科技大学 | Flexible electronic skin device with touch information perception function |
| CN113155344B (en) * | 2021-01-25 | 2022-10-18 | 电子科技大学 | Flexible electronic skin device with touch information perception function |
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