CN106323199A - Combination zeroing laser large working distance auto-collimation device and method - Google Patents
Combination zeroing laser large working distance auto-collimation device and method Download PDFInfo
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- CN106323199A CN106323199A CN201610639006.2A CN201610639006A CN106323199A CN 106323199 A CN106323199 A CN 106323199A CN 201610639006 A CN201610639006 A CN 201610639006A CN 106323199 A CN106323199 A CN 106323199A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C1/00—Measuring angles
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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Abstract
The invention belongs to the technical field of precision measurement and the field of optical engineering and specifically relates to a combination zeroing laser large working distance auto-collimation device and method. The device consists of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system; according to the method, via adjustment of the reflecting mirror, a reflected light beam is enabled to return to a center of an image plane of the feedback imaging system; an angular deflection measurement device on the reflecting mirror is used for obtaining angular variation of a surface of an object being tested. Because the reflecting mirror is added in a traditional auto-collimation angle measurement system, a problem that measurement cannot be realized when light reflected by the object being tested is deviated from a measurement system can be prevented; an auto-collimation working scope can be expanded while working distance remains the same or working distance is increased while the auto-collimation working scope remains the same; via specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the combination zeroing laser large working distance auto-collimation device is enabled to be simple in structure and low in manufacture cost; measurement operation can be conducted even in unstable measurement environments, and a technical advantage of rapid measurement can be gained.
Description
Technical field
The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to a kind of combination zeroing big work of laser
Make away from autocollimation and method.
Background technology
In Technology of Precision Measurement field, optical engineering field, the most advanced branches of science experiment field and high-end precision assembly manufacture neck
In territory, urgent needs carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
Technology and the development of instrument and equipment.
At Technology of Precision Measurement and instrument field, Laser Autocollimator combines with Circular gratings, can carry out any line angle degree
Measure；Laser auto-collimation technology combines with polygon, can carry out face angular surveying and circular division is measured；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
Field, two round light that Laser Autocollimator is the most vertical with bidimensional are tested in optical engineering field and the most advanced branches of science
Grid combine, and can carry out the measurement of space angle；Formed position reference by two-way Laser Autocollimator, optical axis two-by-two can be carried out
Angle or the measurement of collimation.Angle working range tens rads to tens jiaos points.
Manufacture field at most advanced branches of science experimental provision and high-end precision assembly, use Laser Autocollimator can measure tip
Scientific experiments device and the angle rotating accuracy of high-end precision assembly gyration benchmark, measure the space line of linear motion benchmark
The depth of parallelism of precision and two-by-two motion benchmark and perpendicularity.
Laser auto-collimation technology has the advantages such as noncontact, certainty of measurement are high, easy to use, has wide in above-mentioned field
General application.
Tradition autocollimator is as it is shown in figure 1, this system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5；From
The light beam of measured object 5 reflective surface, is gathered imaging by feedback imaging system 6.Under this structure, only from measured object 5 surface
The nearly backtracking of light beam of reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measuring.This Jin Yuan road
The condition returned limits so that the following two aspect shortcomings of this system existence:
The first, measurand 5 mirror surface normal can not be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can
Cause the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then cause realizing auto-collimation and the survey of micro-angle
Amount；
The second, measurand 5 mirror surface range measurement Laser Autocollimator entrance pupil must not be too far away, if otherwise reflection light
Axle and autocollimator optical axis deviation minute angle will result in the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, enter
And cause realizing auto-collimation and micro-angular surveying.
Two above problem, makes tradition auto-collimation instrument can only be limited under low-angle, little operating distance use.
Summary of the invention
For two problems existing for tradition autocollimator, the invention discloses a kind of combination zeroing big working distance of laser
Autocollimation and method, compared with tradition autocollimator, have and dramatically increase auto-collimation work model under identical operating distance
Enclose, or under identical auto-collimation working range, dramatically increase the technical advantage of operating distance.
The object of the present invention is achieved like this:
Combination zeroing laser big working distance autocollimation, including light source, transmission-type collimating mirror, reflecting mirror and feedback
Imaging system, described reflecting mirror is provided with angle adjustment measurement apparatus；The light beam of light source outgoing, accurate through transmission-type collimating mirror
After straight one-tenth collimated light beam, then reflected by reflecting mirror, incide the surface of measured object；From the light beam of measured object surface reflection, then warp
After crossing reflecting mirror reflection, feedback imaging system gather imaging；
Described feedback imaging system is in following two form:
The first, feedback imaging system includes imageing sensor imaging system and 4 quadrant detector imaging system；
Described imageing sensor imaging system includes the first feedback spectroscope and is arranged at transmission-type collimation mirror foci
Imageing sensor；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively throw through transmission-type collimating mirror
Penetrate, first feedback dichroic mirror, gathered imaging by imageing sensor；Under conditions of measured object surface is vertical with optical axis, figure
As sensor is become a picture in image plane center position；
Or
Described imageing sensor imaging system includes the first feedback spectroscope, the first feedback object lens and is arranged on the first feedback
Imageing sensor at object focal point；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively through first
Feed back dichroic mirror, the first feedback object lens transmission, gathered imaging by imageing sensor；Vertical with optical axis on measured object surface
Under the conditions of, imageing sensor is become a picture in image plane center position；
Described 4 quadrant detector imaging system includes the second feedback spectroscope and is arranged at transmission-type collimation mirror foci
4 quadrant detector；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively through transmission-type collimating mirror
Projection, first feedback dichroic mirror, gathered imaging by 4 quadrant detector；In the condition that measured object surface is vertical with optical axis
Under, 4 quadrant detector is become a picture in image plane center position；
Or
Described 4 quadrant detector imaging system includes the second feedback spectroscope, the second feedback object lens and to be arranged on second anti-
4 quadrant detector at feedback object focal point；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively pass through
Second feedback dichroic mirror, second feedback object lens transmission, gathered imaging by 4 quadrant detector；At measured object surface and optical axis
Under conditions of Chui Zhi, 4 quadrant detector is become a picture in image plane center position；
The second, feedback imaging system includes the first feedback spectroscope and the imageing sensor carried by guide rail and four-quadrant
Limit detector, described guide rail has two stall position, and a stall position makes imageing sensor image plane center correspondence transmission-type
The focal position of collimating mirror, another stall position makes the focus position of 4 quadrant detector image plane center correspondence transmission-type collimating mirror
Put；
Or
Feedback imaging system includes the first feedback spectroscope, the first feedback object lens and the image sensing carried by guide rail
Device and 4 quadrant detector, described guide rail has two stall position, and a stall position makes imageing sensor image plane center position
In the focal position of the first feedback object lens, another stall position makes 4 quadrant detector image plane center be positioned at the first feedback object lens
Focal position；
Described angle adjustment measurement apparatus includes arranging angular adjustment apparatus on the mirror, dress is measured in angular deflection
Putting and universal drive shaft, angular adjustment apparatus includes the first driver and the second driver；First driver and the line of universal drive shaft
Vertical second driver and the line of universal drive shaft；Angular deflection measurement apparatus is light path autocollimator altogether.
The portable combined zeroing laser realized on above-mentioned portable combined zeroing laser big working distance autocollimation
Big working distance auto-collimation method, comprises the following steps:
Step a, some bright light source, imageing sensor imaging, according to a picture deviation image plane center direction, utilize the first driver
Adjust mirror angle with the second driver, make a picture return to imageing sensor image plane center region；
Step b, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step c, obtained by common light path autocollimator reflecting mirror angle changes delta θ andAnd then obtain measured object table
Angle changes delta α in face and Δ β；Wherein,WithF3, f4 represent 2 functions.
Combinations thereof zeroing laser big working distance autocollimation, also includes Wavefront detecting system and wavefront compensation system；
Described Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation
At least one in wave front detector；Described Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation ripple
Front detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and reflecting mirror deformation wave front detector is arranged on the two of reflecting mirror
In secondary reflection light path；
Described wavefront compensation system includes compensatory light, compensates collimating mirror and transmission liquid crystal spatial light modulator；Mend
Repay the light beam of light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then adjusted by transmission liquid crystal spatial light modulator
System, incides on Wavefront detecting spectroscope.
The portable combined zeroing laser realized on above-mentioned portable combined zeroing laser big working distance autocollimation
Big working distance auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air
Disturbance；
Step e, imageing sensor imaging, according to a picture deviation image plane center direction, utilize the first driver and second to drive
Dynamic device adjusts mirror angle, makes a picture return to imageing sensor image plane center region；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step g, obtained by common light path autocollimator reflecting mirror angle changes delta θ andAnd then obtain measured object table
Angle changes delta α in face and Δ β；Wherein,WithF3, f4 represent 2 functions.
The portable combined zeroing laser realized on above-mentioned portable combined zeroing laser big working distance autocollimation
Big working distance auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and reflecting mirror deformation Wavefront detecting
Device；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air
Disturbance and reflecting mirror deformation；
Step e, imageing sensor imaging, according to a picture deviation image plane center direction, utilize the first driver and second to drive
Dynamic device adjusts mirror angle, makes a picture return to imageing sensor image plane center region；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step g, obtained by common light path autocollimator reflecting mirror angle changes delta θ andAnd then obtain measured object table
Angle changes delta α in face and Δ β；Wherein,WithF3, f4 represent 2 functions.
The portable combined zeroing laser realized on above-mentioned portable combined zeroing laser big working distance autocollimation
Big working distance auto-collimation method, it is desirable to Wavefront detecting system includes Wavefront detecting spectroscope, air agitation wave front detector simultaneously
With reflecting mirror deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti-
Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G1), light compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G), light compensatory light, compensatory reflex mirror deformation；
Step e, imageing sensor imaging, according to a picture deviation image plane center direction, utilize the first driver and second to drive
Dynamic device adjusts mirror angle, makes a picture return to imageing sensor image plane center region；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step g, obtained by common light path autocollimator reflecting mirror angle changes delta θ andAnd then obtain measured object table
Angle changes delta α in face and Δ β；Wherein,WithF3, f4 represent 2 functions.
Beneficial effect:
Compared with tradition autocollimator, invention increases reflecting mirror and angle adjustment measurement on the mirror is set
Device, this structure is arranged, it is possible to has bigger drift angle or there is relatively larger transverse position between measured object incident illumination and reflection light
In the case of shifting, adjust reflecting mirror attitude by angle adjustment measurement apparatus, it is ensured that reflection light backtracking is also fed back imaging
System receives, and then is prevented effectively from measured object reflection light deviation measurement system and causes the problem that cannot measure, and then makes this
Invent to have under identical operating distance, dramatically increase auto-collimation working range, or significantly increase under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition, the present invention also has following a few technical advantage:
The first, selective transmission formula collimating mirror, makes apparatus of the present invention simple in construction, and cost of manufacture is low, easy to use；
The second, select imageing sensor and 4 quadrant detector collectively as the image device in feedback imaging system, knot
Close the advantage that image area sensor is big and 4 quadrant detector position resolution is high；Wherein, imageing sensor can be true
Protecting in the case of measured object reflection light and incident illumination drift angle are relatively big, reflection light still is able to enter the entrance pupil of optical system, will not
Beyond range of receiving；On this basis, recycling reflecting mirror realizes the quickly return compensation in real time of reflection light, is adjusted to by reflection light
4 quadrant detector position, can obtain higher angle according to the high position resolution advantage of 4 quadrant detector again and survey
Accuracy of measurement；Therefore, imageing sensor and 4 quadrant detector are combined, not only make auto-collimation working range of the present invention or work
Greatly extended as distance, and be conducive to improving angle-measurement accuracy；
3rd, light path autocollimator altogether is selected as angular deflection measurement apparatus, to utilize light path autocollimator altogether to measure essence
Degree affected little good characteristic by air ambient change so that the present invention can air ambient instability measurement environment under,
Guarantee to measure and effectively carry out；
4th, the present invention additionally uses techniques below: the first driver second driver vertical with the line of universal drive shaft with
The line of universal drive shaft；The orthogonal two dimension of this two lines is arranged so that the data in different line directions are non-interference, nothing
Computing need to be decoupled, so can conveniently demarcate, simplify calculating process, improve measuring speed.
Accompanying drawing explanation
Fig. 1 is the structural representation of tradition auto-collimation angle measurement system.
Fig. 2 is the structural representation that the present invention combines zeroing laser big working distance autocollimation specific embodiment one.
Fig. 3 is the structural representation of angular adjustment apparatus in angle adjustment measurement apparatus.
Fig. 4 is the first structural representation of angular deflection measurement apparatus in angle adjustment measurement apparatus.
Fig. 5 is the second structural representation of angular deflection measurement apparatus in angle adjustment measurement apparatus.
Fig. 6 is the second structural representation of imageing sensor imaging system.
Fig. 7 is the second structural representation of 4 quadrant detector imaging system.
Fig. 8 is the first structural representation that the present invention combines zeroing laser big working distance autocollimation specific embodiment two
Figure.
Fig. 9 is the second structural representation that the present invention combines zeroing laser big working distance autocollimation specific embodiment two
Figure.
Figure 10 is the structural representation that the present invention combines zeroing laser big working distance autocollimation specific embodiment three.
Figure 11 is the structural representation that the present invention combines zeroing laser big working distance autocollimation specific embodiment four.
Figure 12 is the structural representation that the present invention combines zeroing laser big working distance autocollimation specific embodiment five.
In figure: 1 light source, 21 transmission-type collimating mirrors, 3 reflecting mirrors, 4 angle adjustment measurement apparatus, 411 first drivers, 412
Second driver, 429 tradition auto-collimation systems, 43 universal drive shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes,
62 second feedback spectroscopes, 63 first feedback object lens, 64 second feedback object lens, 65 imageing sensors, 66 4 quadrant detectors, 68
Guide rail, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 reflecting mirror deformation Wavefront detectings
Device, 8 wavefront compensation system, 81 compensatory lights, 82 compensation collimating mirror, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.
Specific embodiment one
The combination zeroing laser big working distance autocollimation embodiment of the present embodiment.
The combination zeroing laser big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 2.This auto-collimation
Device includes light source 1, transmission-type collimating mirror 21, reflecting mirror 3 and feedback imaging system 6, and described reflecting mirror 3 is provided with angle
Degree adjusts measurement apparatus 4；The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, then by reflecting mirror
3 reflections, incide the surface of measured object 5；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, by feeding back
Imaging system 6 gathers imaging；
Described feedback imaging system 6 includes imageing sensor imaging system and 4 quadrant detector imaging system；
Described imageing sensor imaging system includes the first feedback spectroscope 61 and is arranged on transmission-type collimating mirror 21 focus
The imageing sensor 65 at place；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, successively through transmission-type quasi
Straight mirror 21 projects, the first feedback spectroscope 61 reflects, gathered imaging by imageing sensor 65；Hang down with optical axis on measured object 5 surface
Under conditions of Zhi, imageing sensor 65 is become a little as in image plane center position；
Described 4 quadrant detector imaging system includes that the second feedback spectroscope 62, second feeds back object lens 64 and is arranged on the
The 4 quadrant detector 66 of two feedback object lens 64 focal point；From the light beam of measured object 5 surface reflection, then reflect through reflecting mirror 3
After, successively through second feedback spectroscope 62 reflect, second feedback object lens 64 transmission, gathered imaging by 4 quadrant detector 66；
Under conditions of measured object 5 surface is vertical with optical axis, 4 quadrant detector 66 is become a little as in image plane center position；
Described angle adjustment measurement apparatus 4 includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection
Putting and universal drive shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；First driver 411 with
Vertical second driver 412 of line of universal drive shaft 43 and the line of universal drive shaft 43, as shown in Figure 3；Angular deflection measurement apparatus is
Light path autocollimator 429 altogether, described light path autocollimator 429 altogether may be mounted at any one side of reflecting mirror 3, such as Fig. 4 and Fig. 5
Shown in.
It should be understood that
The first, in the present embodiment, imageing sensor imaging system can also select following structure: includes that the first feedback is divided
Light microscopic 61, first feeds back object lens 63 and is arranged on the imageing sensor 65 of the first feedback object lens 63 focal point；From measured object 5 surface
Reflection light beam, then through reflecting mirror 3 reflect after, successively through first feedback spectroscope 61 reflect, first feedback object lens 63 saturating
Penetrate, gathered imaging by imageing sensor 65；Under conditions of measured object 5 surface is vertical with optical axis, the become point of imageing sensor 65
As in image plane center position；As shown in Figure 6, in the figure, 4 quadrant detector imaging system is eliminated.
The second, in the present embodiment, 4 quadrant detector imaging system can also select following structure: includes the second feedback
Spectroscope 62 and the 4 quadrant detector 66 being arranged on transmission-type collimating mirror 21 focal point；From the light beam of measured object 5 surface reflection,
Again through reflecting mirror 3 reflect after, successively project through transmission-type collimating mirror 21, first feedback spectroscope 61 reflect, by four-quadrant
Detector 66 gathers imaging；Under conditions of measured object 5 surface is vertical with optical axis, 4 quadrant detector 66 is become a little as in image planes
Center；As it is shown in fig. 7, in the figure, imageing sensor imaging system is eliminated.
Specific embodiment two
The combination zeroing laser big working distance autocollimation embodiment of the present embodiment.
The combination zeroing laser big working distance autocollimation of the present embodiment, be different from specific embodiment one feeds back
The structure of imaging system 6；The structure of the present embodiment feedback imaging system 6 is the one in following two form:
The first, feedback imaging system 6 includes the first feedback spectroscope 61 and the imageing sensor 65 carried by guide rail 68
With 4 quadrant detector 66, as shown in Figure 8；Described guide rail 68 has two stall position, and a stall position makes image sensing
The focal position of device 65 image plane center correspondence transmission-type collimating mirror 21, another stall position makes in 4 quadrant detector 66 image planes
The focal position of heart correspondence transmission-type collimating mirror 21；
The second, feedback imaging system 6 includes that the first feedback spectroscope 61, first feeds back object lens 63 and held by guide rail 68
The imageing sensor 65 carried and 4 quadrant detector 66, as shown in Figure 9；Described guide rail 68 has two stall position, and one is stopped
Position makes imageing sensor 65 image plane center be positioned at the focal position of the first feedback object lens 63, and another stall position makes four-quadrant
Limit detector 66 image plane center is positioned at the focal position of the first feedback object lens 63.
Specific embodiment three
The combination zeroing laser big working distance autocollimation embodiment of the present embodiment.
The combination zeroing laser big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 10.Specifically
On the basis of embodiment one, the combination zeroing laser big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system
7 and wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；Described wavefront
Detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting light splitting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment four
The combination zeroing laser big working distance autocollimation embodiment of the present embodiment.
The combination zeroing laser big working distance autocollimation of the present embodiment, structural representation is as shown in figure 11.Specifically
On the basis of embodiment one, the combination zeroing laser big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system
7 and wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；Described ripple
Front detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting and divides
On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment five
The combination zeroing laser big working distance autocollimation embodiment of the present embodiment.
The combination zeroing laser big working distance autocollimation of the present embodiment, structural representation is as shown in figure 12.Specifically
On the basis of embodiment one, the combination zeroing laser big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system
7 and wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape
Become wave front detector 73；Described Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited
Surveying device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged on reflecting mirror 3
Secondary reflection light path on；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
For above autocollimation embodiment, also following three points needs to illustrate:
The first, the first driver 411 and the second driver 412 in described angular adjustment apparatus, both can select to drive
The motor of speed or motor servo driver, can select again the piezoelectric ceramic actuator driving precision higher, also
Motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
It is actually needed and rationally selects.
Although the second specific embodiment three, specific embodiment four and specific embodiment five, it is all at specific embodiment
Wavefront detecting system 7 and wavefront compensation system 8 are set on the basis of one, but wavefront is set on the basis of specific embodiment two
Detection system 7 and wavefront compensation system 8, also set up.Those skilled in the art can in conjunction with specific embodiments device described in
Difference between system described in specific embodiment two, arranges wavefront by these three easily on the basis of specific embodiment two
The system building of detection system 7 and wavefront compensation system 8 out, therefore no longer describes in detail herein.
3rd, described transmission-type collimating mirror 21 can select binary optical lenses, and logical ordinary optical lens are compared, binary optical
Learning lens thinner, beneficially system compact, binary optical lenses collimation is more preferable simultaneously, is conducive to improving systematic survey essence
Degree.
Specific embodiment six
The present embodiment is the group realized on combination zeroing laser big working distance autocollimation described in specific embodiment one
Close zeroing laser big working distance auto-collimation embodiment of the method.
The combination zeroing laser big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, some bright light source 1, imageing sensor 65 imaging, according to a picture deviation image plane center direction, utilize first to drive
Dynamic device 411 and the second driver 412 adjust reflecting mirror 3 angle, make a picture return to imageing sensor 65 image plane center region；
Step b, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step c, obtained by common light path autocollimator 429 reflecting mirror 3 angle changes delta θ andAnd then obtain tested
Angle changes delta α on thing 5 surface and Δ β；Wherein,WithF3, f4 represent 2 functions.
If it should be noted that the present embodiment is the method realized on device described in specific embodiment two, then
After point is as returning to imageing sensor 65 image plane center region, guide rail 68 is adjusted to another stall position from a stall position,
Make the focal position of 4 quadrant detector 66 image plane center correspondence transmission-type collimating mirror 21, then make 4 quadrant detector 66 become
Picture.
The main innovative point of the present invention is the angle adjustment measurement dress adding reflecting mirror 3 and being arranged on reflecting mirror 3
Putting 4, this structure can have bigger drift angle or there are the feelings of relatively larger transverse displacement between measured object 5 incident illumination and reflection light
Under condition, adjust 4 whole reflecting mirror attitudes by angle adjustment measurement apparatus, make reflection light backtracking and connect by feedback imaging system 6
Receive, be prevented effectively from measured object reflection light deviation measurement system and the problem that causes measuring.
But, the introducing of reflecting mirror 3, its face type error can be delivered in final result, reduces the certainty of measurement of system；With
Time, the increase of operating distance makes again the air agitation between reflecting mirror 3 and measured object 5 can not ignore, and also can reduce system
Certainty of measurement.Visible, want to realize high-acruracy survey, be necessary in view of 3 type errors of reflecting mirror and reflecting mirror 3 with tested
The air agitation impact on measurement result between thing 5, to this end, devise specific embodiment seven, specific embodiment eight and concrete
Embodiment nine.
Specific embodiment seven
The present embodiment is the group realized on combination zeroing laser big working distance autocollimation described in specific embodiment three
Close zeroing laser big working distance auto-collimation embodiment of the method.
The combination zeroing laser big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate
Air agitation；
Step e, imageing sensor 65 imaging, according to as a deviation image plane center direction, utilize the first driver 411 and the
Two drivers 412 adjust reflecting mirror 3 angle, make a picture return to imageing sensor 65 image plane center region；
Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step g, obtained by common light path autocollimator 429 reflecting mirror 3 angle changes delta θ andAnd then obtain tested
Angle changes delta α on thing 5 surface and Δ β；Wherein,WithF3, f4 represent 2 functions.
The method implementing the present embodiment on the device of specific embodiment three, it is possible to utilize air agitation wave front detector 72
Air agitation is separated, and then utilizes wavefront compensation system 8 that air agitation is compensated, finally realize without air agitation
The high-acruracy survey of impact.
Specific embodiment eight
The present embodiment is the group realized on combination zeroing laser big working distance autocollimation described in specific embodiment four
Close zeroing laser big working distance auto-collimation embodiment of the method.
The combination zeroing laser big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, reflecting mirror deformation wave front detector 73 respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate
Air agitation and reflecting mirror deformation；
Step e, imageing sensor 65 imaging, according to as a deviation image plane center direction, utilize the first driver 411 and the
Two drivers 412 adjust reflecting mirror 3 angle, make a picture return to imageing sensor 65 image plane center region；
Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step g, obtained by common light path autocollimator 429 reflecting mirror 3 angle changes delta θ andAnd then obtain tested
Angle changes delta α on thing 5 surface and Δ β；Wherein,WithF3, f4 represent 2 functions.
The method implementing the present embodiment on the device of specific embodiment four, it is possible to utilize reflecting mirror deformation wave front detector
Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then utilize wavefront compensation system 8 to air agitation and reflecting mirror
Deformation carries out entire compensation, finally realizes without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.
Specific embodiment nine
The present embodiment is the group realized on combination zeroing laser big working distance autocollimation described in specific embodiment five
Close zeroing laser big working distance auto-collimation embodiment of the method.
The combination zeroing laser big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti-
Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G1), light compensatory light 81, make-up air is disturbed
Dynamic；
Or
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G2), light compensatory light 81, make-up air is disturbed
Move and reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G), light compensatory light 81, compensatory reflex mirror shape
Become；
Step e, imageing sensor 65 imaging, according to as a deviation image plane center direction, utilize the first driver 411 and the
Two drivers 412 adjust reflecting mirror 3 angle, make a picture return to imageing sensor 65 image plane center region；
Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step g, obtained by common light path autocollimator 429 reflecting mirror 3 angle changes delta θ andAnd then obtain tested
Angle changes delta α on thing 5 surface and Δ β；Wherein,WithF3, f4 represent 2 functions.
The method implementing the present embodiment on the device of specific embodiment five, it is possible to utilize air agitation wave front detector 72
With reflecting mirror deformation wave front detector 73, air agitation and reflecting mirror deformation are separately separated, and then optionally to air
Disturbance carries out separate compensation, reflecting mirror deformation carries out separate compensation or air agitation and reflecting mirror deformation carry out overall benefit
Repay, final realize without air agitation or no-mirror deformation or the high accuracy survey without air agitation and reflecting mirror influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, after air agitation and reflecting mirror deformation being separately separated, can be to each
The size that affects of result is individually assessed by part, can not only find out in air agitation and reflecting mirror deformation, and who is impact
The principal contradiction of certainty of measurement, and mirror deformation individually can be assessed, reflecting mirror crudy is carried out simultaneously
Effective evaluation.
If also, it should be noted specific embodiment three, specific embodiment four and specific embodiment five are based on tool
Body embodiment two and the device built, then in specific embodiment seven, specific embodiment eight and specific embodiment nine,
After point is as returning to imageing sensor 65 image plane center region, guide rail 68 is adjusted to another stall position from a stall position,
Make the focal position of 4 quadrant detector 66 image plane center correspondence transmission-type collimating mirror 21, then make 4 quadrant detector 66 become
Picture.
Claims (6)
1. combination zeroing laser big working distance autocollimation, it is characterised in that include light source (1), transmission-type collimating mirror (21),
Reflecting mirror (3) and feedback imaging system (6), described reflecting mirror (3) is provided with angle adjustment measurement apparatus (4)；Light source
(1) light beam of outgoing, after transmission-type collimating mirror (21) is collimated into collimated light beam, then by reflecting mirror (3) reflect, incide by
Survey the surface of thing (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by feedback imaging system
(6) imaging is gathered；
Described feedback imaging system (6) is in following two form:
The first, feedback imaging system (6) includes imageing sensor imaging system and 4 quadrant detector imaging system；
Described imageing sensor imaging system includes the first feedback spectroscope (61) and is arranged on transmission-type collimating mirror (21) focus
The imageing sensor (65) at place；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively through thoroughly
Penetrate formula collimating mirror (21) projection, the first feedback spectroscope (61) reflection, gathered imaging by imageing sensor (65)；At measured object
(5), under conditions of surface is vertical with optical axis, imageing sensor (65) is become a little as in image plane center position；
Or
Described imageing sensor imaging system includes the first feedback spectroscope (61), the first feedback object lens (63) and is arranged on first
The imageing sensor (65) of feedback object lens (63) focal point；From the light beam of measured object (5) surface reflection, then through reflecting mirror (3)
After reflection, successively through first feedback spectroscope (61) reflection, first feedback object lens (63) transmission, adopted by imageing sensor (65)
Collection imaging；Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor (65) is become a little as in image plane center position
Put；
Described 4 quadrant detector imaging system includes the second feedback spectroscope (62) and is arranged on transmission-type collimating mirror (21) Jiao
4 quadrant detector (66) at Dian；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, warp after elder generation
Cross transmission-type collimating mirror (21) projection, the first feedback spectroscope (61) reflection, gathered imaging by 4 quadrant detector (66)；At quilt
Under conditions of survey thing (5) surface is vertical with optical axis, 4 quadrant detector (66) is become a little as in image plane center position；
Or
Described 4 quadrant detector imaging system includes the second feedback spectroscope (62), the second feedback object lens (64) and is arranged on the
The 4 quadrant detector (66) of two feedback object lens (64) focal point；From the light beam of measured object (5) surface reflection, then through reflecting mirror
(3) reflection after, successively through second feedback spectroscope (62) reflection, second feedback object lens (64) transmission, by 4 quadrant detector
(66) imaging is gathered；Under conditions of measured object (5) surface is vertical with optical axis, 4 quadrant detector (66) is become a little as in image planes
Center；
The second, feedback imaging system (6) includes the first feedback spectroscope (61) and the imageing sensor carried by guide rail (68)
(65) and 4 quadrant detector (66), described guide rail (68) has two stall position, and a stall position makes imageing sensor
(65) focal position of image plane center correspondence transmission-type collimating mirror (21), another stall position make 4 quadrant detector (66) as
The focal position at center, face correspondence transmission-type collimating mirror (21)；
Or
Feedback imaging system (6) includes the first feedback spectroscope (61), the first feedback object lens (63) and is carried by guide rail (68)
Imageing sensor (65) and 4 quadrant detector (66), described guide rail (68) has two stall position, a stall position
Making imageing sensor (65) image plane center be positioned at the focal position of the first feedback object lens (63), another stall position makes four-quadrant
Detector (66) image plane center is positioned at the focal position of the first feedback object lens (63)；
Described angle adjustment measurement apparatus (4) includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection
Putting and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；First driver
(411) second driver (412) vertical with the line of universal drive shaft (43) and the line of universal drive shaft (43)；Angular deflection measurement apparatus
For common light path autocollimator (429).
Combination zeroing laser big working distance autocollimation the most according to claim 1, it is characterised in that also include wavefront
Detection system (7) and wavefront compensation system (8)；
Described Wavefront detecting system (7) includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and anti-
Penetrate at least one in mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3) and quilt
Surveying between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror
Deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；
Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light tune
Device processed (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type
LCD space light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).
3. the portable combined realized on portable combined zeroing laser big working distance autocollimation described in claim 1 is adjusted
Zero laser big working distance auto-collimation method, it is characterised in that comprise the following steps:
Step a, some bright light source (1), imageing sensor (65) imaging, according to a picture deviation image plane center direction, utilize first to drive
Dynamic device (411) and the second driver (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center
Region；
Step b, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes
Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return
To 4 quadrant detector (66) image plane center position；
Step c, obtained by common light path autocollimator (429) reflecting mirror (3) angle changes delta θ andAnd then obtain tested
Angle changes delta α on thing (5) surface and Δ β；Wherein,WithF3, f4 represent 2 functions.
4. the portable combined realized on portable combined zeroing laser big working distance autocollimation described in claim 2 is adjusted
Zero laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes that Wavefront detecting spectroscope (71) and air are disturbed
Dynamic wave front detector (72)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate
Air agitation；
Step e, imageing sensor (65) imaging, according to as a deviation image plane center direction, utilize the first driver (411) and the
Two drivers (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center region；
Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes
Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return
To 4 quadrant detector (66) image plane center position；
Step g, obtained by common light path autocollimator (429) reflecting mirror (3) angle changes delta θ andAnd then obtain tested
Angle changes delta α on thing (5) surface and Δ β；Wherein,WithF3, f4 represent 2 functions.
5. the portable combined realized on portable combined zeroing laser big working distance autocollimation described in claim 2 is adjusted
Zero laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror
Deformation wave front detector (73)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate
Air agitation and reflecting mirror deformation；
Step e, imageing sensor (65) imaging, according to as a deviation image plane center direction, utilize the first driver (411) and the
Two drivers (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center region；
Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes
Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return
To 4 quadrant detector (66) image plane center position；
Step g, obtained by common light path autocollimator (429) reflecting mirror (3) angle changes delta θ andAnd then obtain tested
Angle changes delta α on thing (5) surface and Δ β；Wherein,WithF3, f4 represent 2 functions.
6. the portable combined realized on portable combined zeroing laser big working distance autocollimation described in claim 2 is adjusted
Zero laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) includes that Wavefront detecting spectroscope (71), air are disturbed simultaneously
Dynamic wave front detector (72) and reflecting mirror deformation wave front detector (73)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains
Two groups of data of GC and GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflecting mirror
The wavefront variation that deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed
Dynamic；
Or
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed
Move and reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror shape
Become；
Step e, imageing sensor (65) imaging, according to as a deviation image plane center direction, utilize the first driver (411) and the
Two drivers (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center region；
Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes
Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return
To 4 quadrant detector (66) image plane center position；
Step g, obtained by common light path autocollimator (429) reflecting mirror (3) angle changes delta θ andAnd then obtain tested
Angle changes delta α on thing (5) surface and Δ β；Wherein,WithF3, f4 represent 2 functions.
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