CN106290264B - A kind of system and method based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree - Google Patents
A kind of system and method based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree Download PDFInfo
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- CN106290264B CN106290264B CN201610955767.9A CN201610955767A CN106290264B CN 106290264 B CN106290264 B CN 106290264B CN 201610955767 A CN201610955767 A CN 201610955767A CN 106290264 B CN106290264 B CN 106290264B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/26—Vacuum gauges by making use of radiometer action, i.e. of the pressure caused by the momentum of molecules passing from a hotter to a cooler member; Vacuum gauges of the Knudsen type
Abstract
The invention discloses a kind of system and methods based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree, this method focuses ablation vacuum chamber target material inside using laser and generates plasma, it is focused by optical lens, spectrometer light splitting, image intensifier imaging measures plasma spectrometry.By repeatedly measuring plasma spectrometry under different air pressure environment, the relationship of plasma spectrum and air pressure is found in analysis.Using the relationship, by measurement plasma spectrometry you can learn that vacuum chamber air pressure.
Description
Technical field
Vacuum sensing technology field of the present invention, and in particular to one kind detects vacuum holding based on induced with laser spectrum breakdown technology
Set the system and method for vacuum degree.
Background technique
In production and experiment, certain special event needs are realized in vacuum environment.As generally used in electric system
High-Voltage Electrical Appliances-vacuum circuit breaker.In order to improve the pressure resistance of switch, enhance the connecting-disconnecting function of switch, often select vacuum as
Its arc extinguishing room environmental.For another example in the experiment of Z constriction, in order to realize implosion and the constriction of wire battle array, vacuum degree generally requires low
In 10-5Pa.In order to reach vacuum environment, general be used in combination by mechanical pump and molecular pump extracts extra air out.But it is used for
Judge and evaluate vacuum chamber vacuum degree special vacuum meter is then needed to realize.
Common vacuum meter includes directly 2 kinds of vacuum meter of measurement: 1, measuring the quiet of pressure using U-tube both ends liquid level difference
State liquid level vacuum meter；2, flexible deformation is generated using the effect being under pressure on the vessel surface being connected with vacuum to measure pressure
The elastic element gauge of force value.8 kinds of vacuum meter of measurement indirectly: 1, the compression of volume and pressure dependence measurement of vacuum is utilized
Vacuum meter；2, using gas heat transfer under low pressure and pressure in relation to thermal radiation vacuum gauge made of this principle；3, low pressure is utilized
Thermal radiation vacuum gauge made of the lower pressure-dependent principle of gas radiation；4, using gas molecule under low pressure by lotus energy particle
Ionization by collision, ion gauge made of the pressure-dependent principle of the ion stream of generation；5, it using gas discharge situation and puts
Electric color and pressure are in relation to manufactured discharge tube indicator；6, momentum-exchange, that is, external friction of gas under low pressure and chamber wall is utilized
Viscosity gauge made of principle；7, using between absorption and desorption time and pressure, there are fields made of relationship to cause frequency microscope；
8, the partial pressure vacuum meter of mixed gas partial pressure measurement is carried out using mass-spectrometric technique.The above vacuum meter is required to and tested vacuum
Chamber contact, (such as nuclear radiation) and is not suitable in certain particular surroundings.
Summary of the invention
The purpose of the present invention is to provide a kind of based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree
System and method, to overcome the problems of the above-mentioned prior art, the present invention punctures technology using induced with laser spectrum, by examining
The spectrum for breaking and analyzing the plasma generated in vacuum chamber evaluates the vacuum degree of the vacuum chamber, is swashed using of the invention
The detection of Non-contact vacuum degree may be implemented in photoinduction spectrum breakdown technology.
In order to achieve the above objectives, the present invention adopts the following technical scheme:
It is a kind of based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree system, including nanosecond laser and
Vacuum cavity is provided with metallic target in vacuum cavity, and swashing of can issuing nanosecond laser is provided with immediately ahead of metallic target
Light light beam focuses on the lens on metallic target, and vacuum cavity is equipped with for the first watch window by laser beam and is used for
Self luminous second watch window of plasma generated by laser ablation metallic target, the underface setting of the second watch window
There is the spectral measurement device for measuring plasma self-luminous spectrum, is additionally provided on vacuum cavity for controlling going out for vacuum degree
Port further includes the digital delay generator for Time-delayed trigger nanosecond laser and spectral measurement device.
Further, the spectral measurement device includes the spectrometer that the underface of the second watch window is arranged in, spectrum
The optical lens for plasma self-luminous to be focused on to spectrograph slit, spectrometer are equipped between instrument and the second watch window
On be connected with image intensifier.
Further, the metallic target is brass target or vacuum chamber inner wall.
Further, the laser energy that the nanosecond laser generates is not less than 30mJ.
Further, the focal length of the lens is less than the spacing between the first watch window and metallic target.
Further, the spectrometer slit widths are less than 20 μm.
A method of vacuum plant vacuum degree is detected based on induced with laser spectrum breakdown technology, comprising the following steps:
1) metallic target is installed in vacuum chamber, and is vacuumized by gas outlet；
2) laser beam is generated using digital delay generator control nanosecond laser and focus on metallic target surface；
3) after using digital delay generator triggering nanosecond laser, Time-delayed trigger spectral measurement device measures metallic target
The plasma self-luminous spectrum of generation；
4) the plasma self-luminous spectrum that metallic target under different vacuum degrees generates repeatedly is measured, spectral intensity and true is found
The relationship of reciprocal of duty cycle；
5) according to the relationship of spectral intensity and vacuum degree, vacuum can be judged using the spectral intensity that image intensifier records
The vacuum degree of chamber.
Compared with prior art, the invention has the following beneficial technical effects:
Present system passes through nanosecond laser by setting nanosecond laser, vacuum chamber and spectral measurement device
The laser ablation vacuum chamber target material of sending, by spectral measurement device measurement by laser ablation metallic target generate etc.
Gas ions self-luminous spectrum, vacuum chamber vacuum degree is detected using plasma spectrometry and the relationship of vacuum chamber air pressure, can
Directly to carry out real-time, on-line measurement to vacuum chamber vacuum degree under the structure situation for not changing vacuum chamber.
Further, the laser energy that nanosecond laser generates allows to burn in vacuum environment at least more than 30mJ
It loses metal or chamber walls generates bright plasma self-luminous.
Further, the focal length of lens is not greater than the spacing of the first watch window and metallic target, to guarantee laser beam energy
Focus on metallic target surface.
Further, spectrograph slit should be sufficiently small, at least should be less than 20 μm, to guarantee the resolution capability of spectrum.
The method of the present invention is a kind of induced with laser spectrum breakdown technology, can in real time, on-line checking, utilize the method for the present invention
Vacuum degree can be determined by metallic target constituent content in detection vacuum chamber, the vacuum degree of chamber is carried out contactless
Detection, and since spot is small after over-focusing for laser, the damage to metallic target or vacuum chamber wall is small, close to non-destructive testing.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of present system；
Wherein, 1, nanosecond laser；2, digital delay generator；3, spectrometer；4, vacuum chamber；5, metallic target,；6, thoroughly
Mirror；7, the first watch window；8, the second watch window；9, optical lens；10, image intensifier；11, gas outlet.
Fig. 2 is the linear relationship of vacuum degree Yu spectral line Zn II 492.40nm/Cu I 521.8nm intensity ratio.
Specific embodiment
Present invention is further described in detail with reference to the accompanying drawing:
Referring to Fig. 1, a kind of system based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree, including vacuum
The tested vacuum plant that chamber 4, gas outlet 11, the first watch window 7, the second watch window 8 are constituted；And by nanosecond laser
1, the vacuum that digital delay generator 2, spectrometer 3, image intensifier (ICCD) 10, optical lens 9, lens 6 and metallic target 5 form
Spend detection system.
Vacuum chamber 4 refers to the vacuum chamber of any vacuum plant, and size can at least accommodate the metallic target 5 of diameter 1cm, and
Vacuum chamber 4 is at least gathered around there are two watch window and a gas outlet 11, and the first watch window 7 is mainly used for passing through laser light
Beam, the second watch window 8 are mainly used for collecting the self-luminous that induced with laser metallic target 5 generates plasma, and gas outlet 11 is used for
Pumping and air inlet are to control the vacuum degree of vacuum chamber 4.The laser energy that nanosecond laser 1 generates is not less than 30mJ, passes through
First watch window 7 focuses on metallic target 5 by lens 6 again.6 focal length of lens is not greater than the first watch window 7 and metallic target 5
Spacing, to guarantee that laser beam can focus on 5 surface of metallic target.Metallic target 5 can be brass target material, can be inside device
A certain metal device, be also possible to 4 wall of vacuum chamber.
Spectral measurement system is made of spectrometer 3, optical lens 9 and image intensifier ICCD10 to be mainly used for measuring laser burning
Lose the self-luminous that metallic target 5 generates plasma.Optical lens 9 for focusing plasma self-luminous in the slit of spectrometer 3,
It is imaged on image intensifier ICCD10 after being divided by spectrometer 3.
Digital delay generator 2 is used to trigger and control the actuation time of nanosecond laser 1 and spectrometer 3, adjusts spectrum
The delay of instrument detection plasma self-luminous spectrum.
A method of vacuum plant vacuum degree is detected based on induced with laser spectrum breakdown technology, mainly includes following step
It is rapid:
1) metallic target 5 is installed in vacuum chamber 4, and vacuumized；
2) the generation laser of nanosecond laser 1 is controlled using digital delay generator 2 focus on 5 surface of metallic target；
3) after triggering nanosecond laser 1 using digital delay generator 2, the movement of Time-delayed trigger spectral measurement system, measurement
The plasma spectrometry that metallic target 5 generates；
4) plasma spectrometry that metallic target 5 generates under different air pressures is repeatedly measured, wherein the intensity of spectral line and air pressure are found
Relationship；
5) vacuum degree of vacuum chamber 4 is judged according to the spectral intensity that image intensifier ICCD10 is recorded.
The invention will be described in further detail combined with specific embodiments below:
A method of vacuum plant vacuum degree is detected based on induced with laser spectrum breakdown technology, needs to include one available
In the nanosecond laser 1 for generating short-pulse laser, generates laser and focused in vacuum chamber 4 by lens 6；Including a set of light
Spectrometry device, wherein including mainly optical lens 9, spectrometer 3 and image intensifier 10, for measuring plasma self-luminous light
Spectrum；Including detected vacuum chamber 4, vacuum chamber 4 at least needs two watch windows, and watch window cannot be the same as always
On line；Including one for controlling the digital delay generator 2 of triggering nanosecond laser 1 and the movement of spectrometer 3.
The realization of the technical solution needs to follow following steps:
1) laser is generated using the control triggering nanosecond laser 1 of digital delay generator 2, the laser of generation passes through lens 6
Focus on the brass target (perhaps other metal materials or vacuum chamber wall) of vacuum chamber 4；
2) it is poly- by optical lens 9 to generate plasma for brass target (perhaps other metal materials or vacuum chamber wall)
Coke is in 3 slit of spectrometer；
3) using the control triggering spectrometer 3 of digital delay generator 2, the movement of spectrometer 3 will enter the plasma of slit
Self-luminous imaging after light splitting measures the spectral line of nitrogen and copper (or other metals) in image intensifier 10；
4) repeatedly measure the spectral line of nitrogen and copper (or other metals) under different vacuum environments, find out different vacuum degrees and nitrogen/
The relationship of copper the intensity of spectral line ratio.
In order to guarantee that reliable realization and the measurement accuracy of technical solution are also noted that following item:
1) laser energy that nanosecond laser 1 generates is sufficiently strong, at least more than 30mJ, can in vacuum environment ablation gold
Belong to or chamber walls generate bright plasma self-luminous；
2) in the case where guaranteeing to measure the sufficiently strong situation of the intensity of spectral line, 3 slit of spectrometer should be sufficiently small, at least should be less than 20
μm, to guarantee the resolution capability of spectrum；
3) it should select suitably to measure moment and ICCD time for exposure in spectral line measurement, to guarantee that spectral line signal-to-noise ratio is high, line
Spectrum is obvious；
4) it in the spectral line of nitrogen under repeatedly measuring different vacuum environments and copper (or other metals), should ensure that except Chamber vacuum
Other measuring conditions other than degree remain unchanged.
In the present embodiment, as shown in Figure 1, nanosecond laser 1 generates the 1064nm laser of energy > 30mJ, laser is by the
One watch window 7 enters vacuum chamber 4, focuses on brass target surface by focal length f=30cm lens 6 and generates plasma.Deng from
Daughter self-luminous focuses on 3 slit of spectrometer by optical lens 9, and 20 μm of slit width <.It is divided by spectrometer 3, as increasing
Strong device 10 is imaged, and can measure plasma spectrometry image, and the vacuum degree of vacuum chamber 4 is adjusted by gas outlet 11, can be measured
Plasma spectrum picture under different vacuum degrees.
Fig. 2 is the intensity ratio of spectral line Zn II 492.40nm and Cu I 521.8nm under different air pressure environment.Through over-fitting
It was found that the intensity ratio of spectral line Zn II 492.40nm/Cu I 521.8nm and the linear degree of air pressure are best, it is suitable for vacuum degree
Measurement.It need to can only be calculated very by measuring the intensity ratio of spectral line Zn II 492.40nm/Cu I 521.8nm in this way
The vacuum degree of plenum chamber.
As described above, the present invention is based on induced with laser spectrum to puncture measuring technology, produced by measurement laser ablation target material
Raw plasma self-luminous spectrum, vacuum chamber vacuum is detected using plasma spectrometry and the relationship of vacuum chamber air pressure
Degree.
Claims (5)
1. a kind of system based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree, which is characterized in that including receiving
Second laser (1) and vacuum cavity (4) are provided with metallic target (5) in vacuum cavity (4), and metallic target is provided with immediately ahead of (5)
Lens (6) of the laser beam focusing that nanosecond laser (1) can be issued on metallic target (5), vacuum cavity (4) are equipped with
Certainly for the first watch window (7) by laser beam and the plasma for being generated by laser ablation metallic target (5)
Luminous the second watch window (8) is provided with for measuring plasma self-luminous spectrum immediately below the second watch window (8)
Spectral measurement device, the gas outlet (11) for controlling vacuum degree is additionally provided on vacuum cavity (4), further includes for the touching that is delayed
Send out nanosecond laser (1) and spectral measurement device digital delay generator (2), the metallic target (5) for brass target or other
Metal material, vacuum chamber (4) internal a certain metal device or vacuum chamber (4) inner wall, the focal length of the lens (6) are less than
Spacing between first watch window (7) and metallic target (5).
2. a kind of it is based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree according to claim 1
System, which is characterized in that the spectral measurement device includes spectrometer (3) of the setting in the underface of the second watch window (8), light
The optics for plasma self-luminous to be focused on to spectrometer (3) slit is equipped between spectrometer (3) and the second watch window (8)
Camera lens (9) is connected with image intensifier (10) on spectrometer (3).
3. a kind of it is based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree according to claim 2
System, which is characterized in that spectrometer (3) slit width is less than 20 μm.
4. a kind of it is based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree according to claim 1
System, which is characterized in that the laser energy that the nanosecond laser (1) generates is not less than 30mJ.
5. a kind of using the system described in claim 1 based on induced with laser spectrum breakdown technology detection vacuum plant vacuum degree
Vacuum detecting method, which comprises the following steps:
1) metallic target (5) is installed in vacuum chamber (4), and is vacuumized by gas outlet (11)；
2) laser beam is generated using digital delay generator (2) control nanosecond laser (1) and focus on metallic target (5) table
Face；
3) after using digital delay generator (2) triggering nanosecond laser (1), Time-delayed trigger spectral measurement device measures metal
The plasma self-luminous spectrum that target (5) generates；
4) the plasma self-luminous spectrum that metallic target (5) generates under different vacuum degrees is repeatedly measured, different vacuum environments are found
The intensity of spectral line ratio of lower nitrogen and a kind of material metal target；
5) replacement metallic target (5) is another metal material target, repeats step 1) to step 4), obtains the metallic target of another material
(5) the plasma self-luminous spectrum generated finds the intensity of spectral line of nitrogen and another material metal target under different vacuum environments
Ratio；
6) according to nitrogen under different vacuum environments and nitrogen under a kind of the intensity of spectral line ratio of material metal target and different vacuum environments
With the intensity of spectral line ratio of another material metal target, the spectral line for obtaining a kind of material metal target and another material metal target is strong
Ratio is spent, and establishes calibration curve relationship between vacuum degree；
7) vacuum chamber can be judged by measuring the spectral line strength ratio of a kind of material metal target and another material metal target
(4) vacuum degree.
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| CN107843387A (en) * | 2017-10-30 | 2018-03-27 | 佛山市蓝瑞欧特信息服务有限公司 | The vacuum identifying system of closed container |
| CN112082691B (en) * | 2020-08-24 | 2022-10-28 | 西安交通大学 | Low-pressure measuring method and device based on laser plasma imaging |
| CN114942101A (en) * | 2022-01-28 | 2022-08-26 | 西安交通大学 | Vacuum degree on-line detection system and method of single optical fiber laser induced breakdown spectroscopy |
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| CN102253029A (en) * | 2011-06-24 | 2011-11-23 | 哈尔滨工业大学 | Apparatus and method for measuring electron temperature of plasma in gas based on laser induction |
| CN202854037U (en) * | 2012-09-10 | 2013-04-03 | 北京宝瑞光电科技有限公司 | Integration laser-induced intensified plasma spectrum acquisition system |
| CN105575725A (en) * | 2016-02-22 | 2016-05-11 | 西安交通大学 | Online monitoring device and method of vacuum degree of vacuum arc extinguishing chamber in vacuum switch |
| CN105675587A (en) * | 2016-03-12 | 2016-06-15 | 西安交通大学 | Electric equipment online monitoring method and device based on laser-induced breakdown spectrometry |
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| AT409553B (en) * | 2000-09-28 | 2002-09-25 | Voest Alpine Ind Anlagen | DEVICE FOR CHEMICAL ANALYSIS OF MATERIAL SAMPLES AND METALLURGICAL VESSEL THEREFOR |
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|---|---|---|---|---|
| CN102253029A (en) * | 2011-06-24 | 2011-11-23 | 哈尔滨工业大学 | Apparatus and method for measuring electron temperature of plasma in gas based on laser induction |
| CN202854037U (en) * | 2012-09-10 | 2013-04-03 | 北京宝瑞光电科技有限公司 | Integration laser-induced intensified plasma spectrum acquisition system |
| CN105575725A (en) * | 2016-02-22 | 2016-05-11 | 西安交通大学 | Online monitoring device and method of vacuum degree of vacuum arc extinguishing chamber in vacuum switch |
| CN105675587A (en) * | 2016-03-12 | 2016-06-15 | 西安交通大学 | Electric equipment online monitoring method and device based on laser-induced breakdown spectrometry |
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