CN106225730B - The big working distance autocollimation of portable combined zeroing high-precision laser and method - Google Patents
The big working distance autocollimation of portable combined zeroing high-precision laser and method Download PDFInfo
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- CN106225730B CN106225730B CN201610638880.4A CN201610638880A CN106225730B CN 106225730 B CN106225730 B CN 106225730B CN 201610638880 A CN201610638880 A CN 201610638880A CN 106225730 B CN106225730 B CN 106225730B
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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Abstract
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to the big working distance autocollimation of portable combined zeroing high-precision laser and method；The device is made of light source, collimating mirror, reflecting mirror and feedback imaging system；This method makes the reflected beams return to feedback imaging system image plane center, the angular deflection measuring device on reflecting mirror is recycled to obtain the angle change on measured object surface by adjusting reflecting mirror；Since the present invention increases reflecting mirror on traditional auto-collimation angle measurement system, therefore it can be avoided the problem of measured object reflected light deviates measuring system and leads to not measurement, and then has and increase auto-collimation working range under identical operating distance, or increase the advantage of operating distance under identical working range；In addition, the specific design of collimating mirror, feedback imaging system, reflecting mirror etc., making the present invention also has miniature portable, measurement accuracy high；Measurement environmental stability can also be monitored simultaneously；And the technical advantage of rapid survey.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to portable combined zeroing high-precision
The big working distance autocollimation of laser and method.
Background technique
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, urgent need carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
The development of technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out any line angle degree
Measurement；Laser auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measurement；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional
Grid combination, can carry out the measurement of space angle；Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out
The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator
The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark, the space line of measurement linear motion benchmark
Precision and the depth of parallelism and verticality for moving benchmark two-by-two.
Laser auto-collimation technology has many advantages, such as that non-contact, measurement accuracy is high, easy to use, has in above-mentioned field wide
General application.
Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam that light source 1 is emitted is incident on the reflecting surface of measured object 5 after transmission-type collimating mirror 21 is collimated into collimated light beam；From
The light beam of 5 reflective surface of measured object is acquired by feedback imaging system 6 and is imaged.Under this structure, only from 5 surface of measured object
The nearly backtracking of the light beam of reflection could be acquired by feedback imaging system 6 and is imaged, and then realize effectively measurement.This road Jin Yuan
The condition of return limits, so that there are following two aspects disadvantages for the system:
The first, the range of 5 mirror surface normal of measurand and Laser Autocollimator optical axis included angle cannot be too big, otherwise can
It causes the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then leads to not realize that auto-collimation and micro- angle are surveyed
Amount；
The second, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light
Axis and autocollimator optical axis deviation minute angle will result in the entrance pupil that the reflected beams deviate Laser Autocollimator optical system, into
And lead to not realize auto-collimation and micro angle measurement.
Two above problem be limited to traditional auto-collimation instrument can only under low-angle, small operating distance and use.
Summary of the invention
For two problems present in traditional autocollimator, the invention discloses a kind of portable combined zeroing high-precisions
The big working distance autocollimation of laser and method have and dramatically increase under identical operating distance compared with traditional autocollimator
Auto-collimation working range, or dramatically increase under identical auto-collimation working range the technical advantage of operating distance.
The object of the present invention is achieved like this:
The portable combined zeroing big working distance autocollimation of high-precision laser, including light source, reflective collimating mirror, reflection
Mirror and feedback imaging system, are arranged angled adjustment measuring device on the reflecting mirror；The light beam of light source outgoing, by anti-
It after the formula collimating mirror of penetrating is collimated into collimated light beam, then is reflected by reflecting mirror, is incident on the surface of measured object；From measured object surface reflection
Light beam, after being reflected using reflecting mirror, by feedback imaging system acquire be imaged；
The feedback imaging system is one of following two form:
The first, feedback imaging system includes imaging sensor imaging system and 4 quadrant detector imaging system；
Described image sensor imaging system includes the first feedback spectroscope and reflective collimating mirror focal point is arranged in
Imaging sensor；From the light beam of measured object surface reflection, after being reflected using reflecting mirror, successively thrown by reflective collimating mirror
It penetrates, the first feedback spectroscope reflects, acquires imaging by imaging sensor；Under conditions of measured object surface is vertical with optical axis, figure
Picture sensor institute is at picture in image plane center position；
Or
Described image sensor imaging system includes the first feedback spectroscope, the first feedback object lens and setting in the first feedback
Imaging sensor at object focal point；From the light beam of measured object surface reflection, after reflecting using reflecting mirror, successively pass through first
It feeds back spectroscope reflection, the first feedback object lens transmission, be imaged by imaging sensor acquisition；It is vertical with optical axis on measured object surface
Under the conditions of, imaging sensor institute is at picture in image plane center position；
The 4 quadrant detector imaging system includes the second feedback spectroscope and is arranged in reflective collimating mirror focal point
4 quadrant detector；From the light beam of measured object surface reflection, after reflecting using reflecting mirror, successively pass through reflective collimating mirror
Projection, the second feedback spectroscope reflection acquire imaging by 4 quadrant detector；In the measured object surface condition vertical with optical axis
Under, 4 quadrant detector institute is at picture in image plane center position；
Or
The 4 quadrant detector imaging system includes that the second feedback spectroscope, the second feedback object lens and setting are anti-second
Present the 4 quadrant detector at object focal point；From the light beam of measured object surface reflection, after being reflected using reflecting mirror, successively pass through
Second feedback spectroscope reflection, the second feedback object lens transmission are imaged by 4 quadrant detector acquisition；In measured object surface and optical axis
Under conditions of vertical, 4 quadrant detector institute is at picture in image plane center position；
The second, feedback imaging system includes the first feedback spectroscope and imaging sensor and four-quadrant by guide rail carrying
Detector is limited, there are two stall positions altogether for the guide rail, and it is reflective that a stall position corresponds to imaging sensor image plane center
The focal position of collimating mirror, another stall position make 4 quadrant detector image plane center correspond to the focus position of reflective collimating mirror
It sets；
Or
Feedback imaging system includes the first feedback spectroscope, the first feedback object lens and the image sensing carried by guide rail
Device and 4 quadrant detector, for the guide rail altogether there are two stall position, a stall position makes imaging sensor image plane center position
In the focal position of the first feedback object lens, another stall position makes 4 quadrant detector image plane center be located at the first feedback object lens
Focal position；
The angle adjustment measuring device includes angular adjustment apparatus, the angular deflection measurement dress of setting on the mirror
It sets and universal shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measuring device includes first
Sheet metal, the second sheet metal, the first capacitor sensor of corresponding first sheet metal position and corresponding second sheet metal position
Second capacitance sensor；First driver, the first sheet metal and universal shaft point-blank, the second driver, the second gold medal
Belong to piece and universal shaft point-blank, and the first driver the second driver vertical with the line of universal shaft with it is universal
The line of axis；Angular deflection measuring device further includes total optical path autocollimator.
The portable combined tune realized on the above-mentioned portable combined zeroing big working distance autocollimation of high-precision laser
The big working distance auto-collimation method of zero high-precision laser, comprising the following steps:
Step a, bright light source is put, imaging sensor imaging deviates image plane center direction according to a picture, utilizes the first driver
Mirror angle is adjusted with the second driver, a picture is made to return to imaging sensor image plane center region；
Step b, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step c, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorBecome simultaneously by the angle that total optical path autocollimator obtains reflecting mirror
Change 2 He of Δ θAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
The above-mentioned portable combined zeroing big working distance autocollimation of high-precision laser, further includes Wavefront detecting system and wave
Precompensation system；
The Wavefront detecting system is one of following three kinds of situations: situation one including Wavefront detecting spectroscope and sky
Gas disturbance wave front detector, the Wavefront detecting spectroscope are arranged between reflecting mirror and measured object, air agitation Wavefront detecting
Device is arranged on the spectroscopical reflected light path of Wavefront detecting；Before situation two including Wavefront detecting spectroscope and reflecting mirror deformation waves
Detector, the Wavefront detecting spectroscope are arranged between reflecting mirror and measured object, and the setting of reflecting mirror deformation wave front detector exists
In the secondary reflection optical path of reflecting mirror；Situation three including Wavefront detecting spectroscope, air agitation wave front detector and reflecting mirror shape
Become wave front detector, the Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, and air agitation wave front detector is set
It sets on the spectroscopical reflected light path of Wavefront detecting, the secondary reflection optical path of reflecting mirror is arranged in reflecting mirror deformation wave front detector
On；
The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator；It mends
The light beam for repaying light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune
System, is incident on Wavefront detecting spectroscope.
The portable combined zeroing realized on the above-mentioned portable combined zeroing big work autocollimation of high-precision laser
The big working distance auto-collimation method of high-precision laser, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave
Preceding detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air
Disturbance, f5 indicate a function；
Step e, imaging sensor is imaged, and deviates image plane center direction according to a picture, the first driver and second is utilized to drive
Dynamic device adjusts mirror angle, and a picture is made to return to imaging sensor image plane center region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe angle of reflecting mirror is obtained by total optical path autocollimator simultaneously
2 He of changes delta θAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
The portable combined tune realized on the above-mentioned portable combined zeroing big working distance autocollimation of high-precision laser
The big working distance auto-collimation method of zero high-precision laser, it is desirable that Wavefront detecting system only includes Wavefront detecting spectroscope and reflecting mirror shape
Become wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air
Disturbance and reflecting mirror deformation, f5 indicate a function；
Step e, imaging sensor is imaged, and deviates image plane center direction according to a picture, the first driver and second is utilized to drive
Dynamic device adjusts mirror angle, and a picture is made to return to imaging sensor image plane center region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe angle of reflecting mirror is obtained by total optical path autocollimator simultaneously
2 He of changes delta θAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
The portable combined tune realized on the above-mentioned portable combined zeroing big working distance autocollimation of high-precision laser
The big working distance auto-collimation method of zero high-precision laser, it is desirable that Wavefront detecting system includes that Wavefront detecting spectroscope, air are disturbed simultaneously
Dynamic wave front detector and reflecting mirror deformation wave front detector；
The following steps are included:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance, f5
Indicate a function；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Reflecting mirror deformation, f5 indicate a function；
Or
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation,
F5 indicates a function；
Step e, imaging sensor is imaged, and deviates image plane center direction according to a picture, the first driver and second is utilized to drive
Dynamic device adjusts mirror angle, and a picture is made to return to imaging sensor image plane center region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step e
Δ x and Δ y are set, mirror angle is adjusted using the first driver and the second driver, a picture is made to return to 4 quadrant detector picture
Face center；
Step g, the capacitance change, Δ C1 of first capacitor sensor and the capacitance change, Δ of the second capacitance sensor are read
C2 is reconverted into 1 He of angle change Δ θ of reflecting mirrorThe angle of reflecting mirror is obtained by total optical path autocollimator simultaneously
2 He of changes delta θAnd then obtain the angle change Δ α and Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 table
Show 4 functions.
The utility model has the advantages that
Compared with traditional autocollimator, invention increases the angle of reflecting mirror and setting on the mirror to adjust measurement
Device, this structure setting can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse positions
In the case where shifting, measuring device is adjusted by angle and adjusts reflecting mirror posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback
System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement, so that this
Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition to this, the present invention also has following a few technical advantages:
The first, reflective collimating mirror, although increasing manufacture difficulty, improving cost of manufacture, this structure are selected
With the irreplaceable technical advantage of following three aspect: collimating mirror reflective first is conducive to instrument miniaturization, makes portable
Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is wider, and the advantage of measurement accuracy is more obvious；Third is to pass through plating
Membrane technology, the heat absorption that can be realized reflective collimating mirror are far smaller than transmission-type, effectively avoid the hair of collimating mirror thermal deformation problem
Raw, this not only enables whole system match high power light source, but also is also beneficial to guarantee the measuring precision；
The second, select imaging sensor and 4 quadrant detector collectively as the image device in feedback imaging system, knot
The advantage that image area sensor is big and 4 quadrant detector position resolution is high is closed；Wherein, imaging sensor can be true
It protects under measured object reflected light and the biggish situation in incident light drift angle, reflected light still is able to the entrance pupil into optical system, will not
Beyond range of receiving；On this basis, it recycles reflecting mirror to realize reflected light quickly real-time return compensation, reflected light is adjusted to
4 quadrant detector position, and higher angle can be obtained according to the high position resolution advantage of 4 quadrant detector and surveyed
Accuracy of measurement；Therefore, imaging sensor and 4 quadrant detector are combined, not only makes auto-collimation working range or work of the present invention
Greatly extended as distance, and is conducive to improve angle-measurement accuracy；
Third, selection capacitance sensor and total optical path autocollimator are collectively as angular deflection measuring device, so that this hair
The bright superelevation that can not only utilize capacitance sensor is displaced sensory characteristic and displacement of the lines is easy to convert within the scope of minute angle
For the good characteristic of angular displacement, allow the invention to that there is very high survey under the conditions of low sample frequency (20Hz and following)
Accuracy of measurement, angle highest measurement resolving power can be increased to 0.0005 rad from 0.005 rad of traditional autocollimator, improve one
The order of magnitude；And small good characteristic can be influenced by air environment variation using optical path autocollimator measurement accuracy altogether, so that
The present invention can be under the unstable measurement environment of air environment, it is ensured that measurement effectively carries out；The two combines, moreover it is possible to play prison
The effect of measurement environmental stability；
4th, the present invention additionally uses following technology: the first driver, the first sheet metal and universal shaft are straight at one article
On line, the second driver, the second sheet metal and universal shaft point-blank, and the company of the first driver and universal shaft
The line of line vertical second driver and universal shaft；The orthogonal two dimension setting of this two lines, so that different line sides
To data it is non-interference, without decoupling operation, calibration can be facilitated in this way, simplify calculating process, improve measuring speed.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement system.
Fig. 2 is the knot of the portable combined zeroing big working distance autocollimation specific embodiment one of high-precision laser of the present invention
Structure schematic diagram.
Fig. 3 is the structural schematic diagram of angular adjustment apparatus in angle adjustment measuring device.
Fig. 4 is the first structural schematic diagram of angular deflection measuring device in angle adjustment measuring device.
Fig. 5 is second of structural schematic diagram of angular deflection measuring device in angle adjustment measuring device.
Fig. 6 is second of structural schematic diagram of imaging sensor imaging system.
Fig. 7 is second of structural schematic diagram of 4 quadrant detector imaging system.
Fig. 8 is the of the portable combined of the present invention zeroing big working distance autocollimation specific embodiment two of high-precision laser
A kind of structural schematic diagram.
Fig. 9 is the of the portable combined of the present invention zeroing big working distance autocollimation specific embodiment two of high-precision laser
Two kinds of structural schematic diagrams.
Figure 10 is the portable combined zeroing big working distance autocollimation specific embodiment three of high-precision laser of the present invention
Structural schematic diagram.
Figure 11 is the portable combined zeroing big working distance autocollimation specific embodiment four of high-precision laser of the present invention
Structural schematic diagram.
Figure 12 is the portable combined zeroing big working distance autocollimation specific embodiment five of high-precision laser of the present invention
Structural schematic diagram.
In figure: 1 light source, 22 reflective collimating mirrors, 3 reflecting mirrors, 4 angles adjust measuring device, 411 first drivers, 412
Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitor sensors, 424 second capacitance sensors,
429 traditional auto-collimation systems, 43 universal shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 62 second feedbacks
Spectroscope, 63 first feedback object lens, 64 second feedback object lens, 65 imaging sensors, 66 4 quadrant detectors, 68 guide rails, 7 wavefront
Detection system, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 reflecting mirror deformation wave front detectors, 8 wavefront are mended
Repay system, 81 compensatory lights, 82 compensation collimating mirrors, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high-precision laser.
The portable combined zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram such as Fig. 2
It is shown.The autocollimation includes light source 1, reflective collimating mirror 22, reflecting mirror 3 and feedback imaging system 6, the reflection
Angled adjustment measuring device 4 is set on mirror 3；The light beam that light source 1 is emitted, is collimated into collimated light beam by reflective collimating mirror 22
Afterwards, then by reflecting mirror 3 it reflects, is incident on the surface of measured object 5；From the light beam of 5 surface reflection of measured object, using reflecting mirror 3
After reflection, is acquired and be imaged by feedback imaging system 6；
The feedback imaging system 6 includes imaging sensor imaging system and 4 quadrant detector imaging system；
Described image sensor imaging system includes the first feedback spectroscope 61 and is arranged in 21 focus of transmission-type collimating mirror
The imaging sensor 65 at place；From the light beam of 5 surface reflection of measured object, after reflecting using reflecting mirror 3, successively pass through transmission-type quasi
The straight projection of mirror 21, the first feedback spectroscope 61 reflection are imaged by the acquisition of imaging sensor 65；It hangs down on 5 surface of measured object and optical axis
Under conditions of straight, 65 institute of imaging sensor is at picture in image plane center position；
The 4 quadrant detector imaging system includes that the second feedback spectroscope 62, second feeds back object lens 64 and setting the
The 4 quadrant detector 66 of two feedback 64 focal points of object lens；From the light beam of 5 surface reflection of measured object, reflected using reflecting mirror 3
Afterwards, the reflection of spectroscope 62, the second feedback object lens 64 transmission successively are fed back by second, imaging is acquired by 4 quadrant detector 66；
Under conditions of 5 surface of measured object is vertical with optical axis, 66 institute of 4 quadrant detector is at picture in image plane center position；
The angle adjustment measuring device 4 includes the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection measurement dress
It sets and universal shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measuring device
Including the first sheet metal 421, the second sheet metal 422, corresponding first sheet metal, 421 position first capacitor sensor 423 and
Second capacitance sensor 424 of corresponding second sheet metal, 422 position；First driver 411, the first sheet metal 421 and universal
Axis 43 point-blank, the second driver 412, the second sheet metal 422 and universal shaft 43 point-blank, and
The line of one driver 411 vertical with the line of universal shaft 43 second driver 412 and universal shaft 43, as shown in Figure 3；Angle is inclined
Turning measuring device further includes total optical path autocollimator 429, and the optical path autocollimator 429 altogether may be mounted at appointing for reflecting mirror 3
Meaning one side, as shown in Figure 4 and Figure 5.
It should be understood that
The first, in the present embodiment, imaging sensor imaging system is also an option that such as flowering structure: including the first feedback point
Light microscopic 61, first feeds back object lens 63 and the imaging sensor 65 of the first feedback 63 focal point of object lens is arranged in；From 5 surface of measured object
The light beam of reflection, it is successively saturating by the first feedback spectroscope 61 reflection, the first feedback object lens 63 after being reflected using reflecting mirror 3
It penetrates, imaging is acquired by imaging sensor 65；Under conditions of 5 surface of measured object is vertical with optical axis, 65 institute of imaging sensor is at point
As in image plane center position；As shown in fig. 6, in the figure, 4 quadrant detector imaging system is omitted.
The second, in the present embodiment, 4 quadrant detector imaging system is also an option that such as flowering structure: including the second feedback
Spectroscope 62 and the 4 quadrant detector 66 that 21 focal point of transmission-type collimating mirror is set；From the light beam of 5 surface reflection of measured object,
After being reflected using reflecting mirror 3, successively by the projection of transmission-type collimating mirror 21, the second feedback spectroscope 62 reflection, by four-quadrant
The acquisition imaging of detector 66；Under conditions of 5 surface of measured object is vertical with optical axis, 66 institute of 4 quadrant detector is at picture in image planes
Center；As shown in fig. 7, in the figure, imaging sensor imaging system is omitted.
Specific embodiment two
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high-precision laser.
The portable combined zeroing big working distance autocollimation of high-precision laser of the present embodiment, with specific embodiment one
Difference is to feed back the structure of imaging system 6；The present embodiment feeds back the structure of imaging system 6 for one in following two form
Kind:
The first, feedback imaging system 6 includes the first imaging sensor 65 for feeding back spectroscope 61 and being carried by guide rail 68
With 4 quadrant detector 66, as shown in Figure 8；For the guide rail 68 altogether there are two stall position, a stall position makes image sensing
65 image plane center of device corresponds to the focal position of reflective collimating mirror 22, another stall position makes in 66 image planes of 4 quadrant detector
The heart corresponds to the focal position of reflective collimating mirror 22；
The second, feedback imaging system 6 includes that the first feedback spectroscope 61, first feeds back object lens 63 and held by guide rail 68
The imaging sensor 65 and 4 quadrant detector 66 of load, as shown in Figure 9；There are two stall positions altogether for the guide rail 68, and one is stopped
Position makes 65 image plane center of imaging sensor be located at the focal positions of the first feedback object lens 63, another stall position makes four-quadrant
Limit the focal position that 66 image plane center of detector is located at the first feedback object lens 63.
Specific embodiment three
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high-precision laser.
The portable combined zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram such as Figure 10
It is shown.On the basis of specific embodiment one, the portable combined zeroing big working distance auto-collimation of high-precision laser of the present embodiment
Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；The wavefront
It detects spectroscope 71 to be arranged between reflecting mirror 3 and measured object 5, the setting of air agitation wave front detector 72 is divided in Wavefront detecting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high-precision laser.
The portable combined zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram such as Figure 11
It is shown.On the basis of specific embodiment one, the portable combined zeroing big working distance auto-collimation of high-precision laser of the present embodiment
Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；The wave
Preceding detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and the setting of air agitation wave front detector 72 is in Wavefront detecting point
On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection optical path of reflecting mirror 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
Specific embodiment five
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high-precision laser.
The portable combined zeroing big working distance autocollimation of high-precision laser of the present embodiment, structural schematic diagram such as Figure 12
It is shown.On the basis of specific embodiment one, the portable combined zeroing big working distance auto-collimation of high-precision laser of the present embodiment
Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape
Become wave front detector 73；The Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited
It surveys device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged in reflecting mirror 3
Secondary reflection optical path on；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incident on Wavefront detecting spectroscope 71.
For the above autocollimation embodiment, need to illustrate there are also following three points:
The first, the first driver 411 and the second driver 412 in the described angular adjustment apparatus, both can choose driving
The stepper motor or motor servo driver of fast speed, and can choose the driving higher piezoelectric ceramic actuator of precision, also
Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
Actual needs is reasonably selected.
Although second, specific embodiment three, specific embodiment four and specific embodiment five are all in specific embodiment
Wavefront detecting system 7 and wavefront compensation system 8 are set on the basis of one, but wavefront is set on the basis of specific embodiment two
Detection system 7 and wavefront compensation system 8, also set up.Those skilled in the art can in conjunction with specific embodiments a system with
Easily wavefront is arranged on the basis of specific embodiment two in these three by the difference between system described in specific embodiment two
The system building of detection system 7 and wavefront compensation system 8 comes out, therefore is no longer described in detail here.
Third, in all of above autocollimation embodiment, angular deflection measuring device all only includes two pairs of sheet metals
With the combination of capacitance sensor, this design default reflecting mirror 3 does not generate translation during the work time and makes；If examined
Consider reflecting mirror 3 to generate translation at work and influence measurement accuracy, third can be placed at 43 position of universal shaft to metal
The combination of piece and capacitance sensor, to offset the identical translation that three capacitance sensors generate, it is ensured that measurement accuracy.
Specific embodiment six
The present embodiment is the big working distance auto-collimation dress of the zeroing high-precision laser of the portable combined described in specific embodiment one
Set the portable combined zeroing big working distance auto-collimation embodiment of the method for high-precision laser of realization.
The portable combined zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, bright light source 1 is put, imaging sensor 65 is imaged, and deviates image plane center direction according to a picture, utilizes first to drive
Dynamic device 411 and the second driver 412 adjust 3 angle of reflecting mirror, and a picture is made to return to 65 image plane center region of imaging sensor；
Step b, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step c, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously
Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1
(Δ C1, Δ C2),With
F1, f2, f3, f4 indicate 4 functions.
It should be noted that if the present embodiment is the method realized in two described device of specific embodiment,
After point picture returns to 65 image plane center region of imaging sensor, guide rail 68 is adjusted to another stall position from a stall position,
So that 66 image plane center of 4 quadrant detector is corresponded to the focal position of transmission-type collimating mirror 21, then make 4 quadrant detector 66 carry out at
Picture.
Main innovative point of the invention is the angle adjustment measurement dress for increasing reflecting mirror 3 and being arranged on reflecting mirror 3
4 are set, this structure there can be larger drift angle between 5 incident light of measured object and reflected light or there are the feelings of relatively larger transverse displacement
Under condition, measuring device 4 is adjusted by angle and adjusts reflecting mirror posture, makes reflected light backtracking and is connect by feedback imaging system 6
It receives, effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement.
However, the introducing of reflecting mirror 3, face type error can be transmitted in final result, reduce the measurement accuracy of system；Together
When, the increase of operating distance can not ignore the air agitation between reflecting mirror 3 and measured object 5 again, can also reduce system
Measurement accuracy.As it can be seen that just must take into account 3 face type error of reflecting mirror and reflecting mirror 3 to realize high-acruracy survey and be tested
Influence of the air agitation to measurement result between object 5, for this purpose, devising specific embodiment seven, specific embodiment eight and specific
Embodiment nine.
Specific embodiment seven
The present embodiment is the big working distance auto-collimation dress of the zeroing high-precision laser of the portable combined described in specific embodiment three
Set the portable combined zeroing big working distance auto-collimation embodiment of the method for high-precision laser of realization.
The portable combined zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, compensated
Air agitation, f5 indicate a function；
Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the
Two drivers 412 adjust 3 angle of reflecting mirror, and a picture is made to return to 65 image plane center region of imaging sensor；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously
Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1
(Δ C1, Δ C2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment three, can utilize air agitation wave front detector 72
Air agitation is separated, and then air agitation is compensated using wavefront compensation system 8, it is final to realize without air agitation
The high-acruracy survey of influence.
Specific embodiment eight
The present embodiment is the big working distance auto-collimation dress of the zeroing high-precision laser of the portable combined described in specific embodiment four
Set the portable combined zeroing big working distance auto-collimation embodiment of the method for high-precision laser of realization.
The portable combined zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, reflecting mirror deformation wave front detector 73 respectively obtain two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；
Step d, 83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, compensated
Air agitation and reflecting mirror deformation, f5 indicate a function；
Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the
Two drivers 412 adjust 3 angle of reflecting mirror, and a picture is made to return to 65 image plane center region of imaging sensor；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is reflected simultaneously by total optical path autocollimator 429
2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1 (Δ
C1, Δ C2),Withf1、
F2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment four, can utilize reflecting mirror deformation wave front detector
Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and reflecting mirror
Deformation carries out entire compensation, final to realize the high-acruracy survey without air agitation and reflecting mirror influence of crust deformation.
Specific embodiment nine
The present embodiment is the big working distance auto-collimation dress of the zeroing high-precision laser of the portable combined described in specific embodiment five
Set the portable combined zeroing big working distance auto-collimation embodiment of the method for high-precision laser of realization.
The portable combined zeroing big working distance auto-collimation method of high-precision laser of the present embodiment, comprising the following steps:
Step a, surface is chosen perpendicular to the reference substance of optical axis direction；
Step b, bright light source 1 is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；
Step d,
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G1), lights compensatory light 81, make-up air is disturbed
Dynamic, f5 indicates a function；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G2), lights compensatory light 81, make-up air is disturbed
Dynamic and reflecting mirror deformation, f5 indicate a function；
Or
83 parameter of transmission liquid crystal spatial light modulator is adjusted according to f5 (G), lights compensatory light 81, compensatory reflex mirror shape
Become, f5 indicates a function；
Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the
Two drivers 412 adjust 3 angle of reflecting mirror, and a picture is made to return to 65 image plane center region of imaging sensor；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step e
The heart position Δ x and Δ y adjust 3 angle of reflecting mirror using the first driver 411 and the second driver 412, a picture are made to return to four-quadrant
Limit 66 image plane center position of detector；
Step g, the capacitance change, Δ C1 of first capacitor sensor 423 and the capacitor of the second capacitance sensor 424 are read
Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror 3It is obtained instead by total optical path autocollimator 429 simultaneously
Penetrate 2 He of angle change Δ θ of mirror 3And then obtain the angle change Δ α and Δ β on 5 surface of measured object；Wherein, Δ θ 1=f1
(Δ C1, Δ C2),With
F1, f2, f3, f4 indicate 4 functions.
The method for implementing the present embodiment on the device of specific embodiment five, can utilize air agitation wave front detector 72
Air agitation and reflecting mirror deformation are separately separated with reflecting mirror deformation wave front detector 73, and then selectively to air
Disturbance carries out separate compensation, separate compensation is carried out to reflecting mirror deformation or carries out whole benefit to air agitation and reflecting mirror deformation
It repays, it is final to realize without air agitation or no-mirror deformation or surveyed without the high-precision of air agitation and reflecting mirror influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and reflecting mirror deformation
Influence size of the part to result is individually assessed, and can not only be found out in air agitation and reflecting mirror deformation, who is to influence
The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while reflecting mirror processing quality is carried out
Effective evaluation.
If should be noted specific embodiment three, specific embodiment four and specific embodiment fifth is that based on tool
Body embodiment two and the device built, then in specific embodiment seven, specific embodiment eight and specific embodiment nine,
After point picture returns to 65 image plane center region of imaging sensor, guide rail 68 is adjusted to another stall position from a stall position,
So that 66 image plane center of 4 quadrant detector is corresponded to the focal position of transmission-type collimating mirror 21, then make 4 quadrant detector 66 carry out at
Picture.
Claims (6)
- The big working distance autocollimation of high-precision laser 1. portable combined returns to zero, which is characterized in that including light source (1), reflection Angled adjustment is arranged on the reflecting mirror (3) and measures for formula collimating mirror (22), reflecting mirror (3) and feedback imaging system (6) Device (4)；The light beam of light source (1) outgoing, after reflective collimating mirror (22) is collimated into collimated light beam, then by reflecting mirror (3) Reflection, is incident on the surface of measured object (5)；From the light beam of measured object (5) surface reflection, after reflecting mirror (3) reflection, by Feed back imaging system (6) acquisition imaging；The feedback imaging system (6) is one of following two form:The first, feedback imaging system (6) includes imaging sensor imaging system and 4 quadrant detector imaging system；Described image sensor imaging system includes the first feedback spectroscope (61) and is arranged in reflective collimating mirror (22) focus The imaging sensor (65) at place；From the light beam of measured object (5) surface reflection, after reflecting mirror (3) reflection, successively by anti- It penetrates formula collimating mirror (22) projection, the first feedback spectroscope (61) reflection, acquire imaging by imaging sensor (65)；In measured object (5) under conditions of surface is vertical with optical axis, imaging sensor (65) institute is at picture in image plane center position；OrDescribed image sensor imaging system includes the first feedback spectroscope (61), the first feedback object lens (63) and is arranged first Feed back the imaging sensor (65) of object lens (63) focal point；From the light beam of measured object (5) surface reflection, using reflecting mirror (3) After reflection, successively adopted by the first feedback spectroscope (61) reflection, the first feedback object lens (63) transmission, by imaging sensor (65) Collection imaging；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor (65) institute is at picture in image plane center position It sets；The 4 quadrant detector imaging system includes the second feedback spectroscope (62) and setting in reflective collimating mirror (22) coke 4 quadrant detector (66) at point；It is successively passed through after reflecting mirror (3) reflection from the light beam of measured object (5) surface reflection It crosses reflective collimating mirror (22) projection, the second feedback spectroscope (62) reflection, acquire imaging by 4 quadrant detector (66)；In quilt Under conditions of survey object (5) surface is vertical with optical axis, 4 quadrant detector (66) institute is at picture in image plane center position；OrThe 4 quadrant detector imaging system includes the second feedback spectroscope (62), the second feedback object lens (64) and is arranged the The 4 quadrant detector (66) of two feedback object lens (64) focal points；From the light beam of measured object (5) surface reflection, using reflecting mirror (3) after reflecting, successively by the second feedback spectroscope (62) reflection, the second feedback object lens (64) transmission, by 4 quadrant detector (66) acquisition imaging；Under conditions of measured object (5) surface is vertical with optical axis, 4 quadrant detector (66) institute is at picture in image planes Center；The second, feedback imaging system (6) includes the first feedback spectroscope (61) and the imaging sensor by guide rail (68) carrying (65) it is total to 4 quadrant detector (66), the guide rail (68) there are two stall position, a stall position makes imaging sensor (65) image plane center corresponds to the focal position of reflective collimating mirror (22), another stall position make 4 quadrant detector (66) as Face center corresponds to the focal position of reflective collimating mirror (22)；OrImaging system (6) are fed back to include the first feedback spectroscope (61), the first feedback object lens (63) and carried by guide rail (68) Imaging sensor (65) and 4 quadrant detector (66), the guide rail (68) is altogether there are two stall position, a stall position Imaging sensor (65) image plane center is set to be located at the focal position of the first feedback object lens (63), another stall position makes four-quadrant Detector (66) image plane center is located at the focal position of the first feedback object lens (63)；Angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection measurement dress It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed Measure the first capacitor biography that device includes the first sheet metal (421), the second sheet metal (422), corresponding first sheet metal (421) position Sensor (423) and second capacitance sensor (424) of corresponding second sheet metal (422) position；First driver (411), One sheet metal (421) and universal shaft (43) point-blank, the second driver (412), the second sheet metal (422) and Universal shaft (43) point-blank, and the first driver (411) the second driver vertical with the line of universal shaft (43) (412) with the line of universal shaft (43)；Angular deflection measuring device further includes total optical path autocollimator (429).
- The big working distance autocollimation of high-precision laser 2. portable combined according to claim 1 returns to zero, feature exist In further including Wavefront detecting system (7) and wavefront compensation system (8)；The Wavefront detecting system (7) is one of following three kinds of situations: situation one including Wavefront detecting spectroscope (71) and Air agitation wave front detector (72), the Wavefront detecting spectroscope (71) are arranged between reflecting mirror (3) and measured object (5), Air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71)；Situation two including wavefront are visited Spectroscope (71) and reflecting mirror deformation wave front detector (73) are surveyed, the Wavefront detecting spectroscope (71) is arranged in reflecting mirror (3) Between measured object (5), reflecting mirror deformation wave front detector (73) is arranged in the secondary reflection optical path of reflecting mirror (3)；Situation Three, including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and reflecting mirror deformation wave front detector (73), institute It states Wavefront detecting spectroscope (71) to be arranged between reflecting mirror (3) and measured object (5), air agitation wave front detector (72) setting On the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror deformation wave front detector (73) is arranged the two of reflecting mirror (3) In secondary reflection optical path；The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) modulation, is incident on Wavefront detecting spectroscope (71).
- 3. being realized on the zeroing big working distance autocollimation of high-precision laser of the portable combined described in claim 1 portable The combination zeroing big working distance auto-collimation method of high-precision laser, which comprises the following steps:Step a, bright light source (1) is put, imaging sensor (65) imaging deviates image plane center direction according to a picture, utilizes first to drive Dynamic device (411) and the second driver (412) adjust reflecting mirror (3) angle, and a picture is made to return to imaging sensor (65) image plane center Region；Step b, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step a The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step c, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 indicate 4 functions.
- 4. being realized on the zeroing big working distance autocollimation of high-precision laser of the portable combined described in claim 2 portable The combination zeroing big working distance auto-collimation method of high-precision laser, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72)；Characterized by comprising the following steps:Step a, surface is chosen perpendicular to the reference substance of optical axis direction；Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；Step c, G1=GA-GB obtains wavefront variation caused by air agitation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lighted compensatory light (81), compensated Air agitation, f5 (G1) expression one is using G1 obtained in step c as the function of parameter；Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust reflecting mirror (3) angle, and a picture is made to return to imaging sensor (65) image plane center region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 indicate 4 functions.
- 5. being realized on the zeroing big working distance autocollimation of high-precision laser of the portable combined described in claim 2 portable The combination zeroing big working distance auto-collimation method of high-precision laser, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror deformation wave front detector (73)；Characterized by comprising the following steps:Step a, surface is chosen perpendicular to the reference substance of optical axis direction；Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；Step c, G2=GC-GD, obtain air agitation and reflecting mirror deformation it is common caused by wavefront variation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lighted compensatory light (81), compensated Air agitation and reflecting mirror deformation, f5 (G2) expression one is using G2 obtained in step c as the function of parameter；Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust reflecting mirror (3) angle, and a picture is made to return to imaging sensor (65) image plane center region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 indicate 4 functions.
- 6. being realized on the zeroing big working distance autocollimation of high-precision laser of the portable combined described in claim 2 portable The combination zeroing big working distance auto-collimation method of high-precision laser, it is desirable that Wavefront detecting system (7) includes that Wavefront detecting is divided simultaneously Mirror (71), air agitation wave front detector (72) and reflecting mirror deformation wave front detector (73)；Characterized by comprising the following steps:Step a, surface is chosen perpendicular to the reference substance of optical axis direction；Step b, bright light source (1) is put, the selected reference substance of step a is individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and reflecting mirror Wavefront variation caused by deformation is common；G=G2-G1 obtains wavefront variation caused by reflecting mirror deformation；Step d,Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed Dynamic, f5 (G1) expression one is using G1 obtained in step c as the function of parameter；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed Dynamic and reflecting mirror deformation, f5 (G2) expression one is using G2 obtained in step c as the function of parameter；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), is lighted compensatory light (81), compensatory reflex mirror shape Become, f5 (G) expression one is using G obtained in step c as the function of parameter；Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust reflecting mirror (3) angle, and a picture is made to return to imaging sensor (65) image plane center region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step e The heart position Δ x and Δ y adjust reflecting mirror (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step g, the capacitance change, Δ C1 of first capacitor sensor (423) and the capacitor of the second capacitance sensor (424) are read Changes delta C2 is reconverted into 1 He of angle change Δ θ of reflecting mirror (3)It is obtained simultaneously by total optical path autocollimator (429) 2 He of angle change Δ θ of reflecting mirror (3)And then obtain the angle change Δ α and Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 indicate 4 functions.
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