CN106200082B - Laser lift-off apparatus and control method thereof - Google Patents
Laser lift-off apparatus and control method thereof Download PDFInfo
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- CN106200082B CN106200082B CN201610848650.0A CN201610848650A CN106200082B CN 106200082 B CN106200082 B CN 106200082B CN 201610848650 A CN201610848650 A CN 201610848650A CN 106200082 B CN106200082 B CN 106200082B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
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Abstract
the invention discloses laser stripping equipment and a control method thereof, and belongs to the technical field of flexible display. The apparatus comprises: the device comprises a laser generator, a polaroid, a liquid crystal light valve and a vibration detection sheet; a polarizing film is arranged at the laser outlet of the laser generator; the liquid crystal light valve and the vibration detection piece are sequentially arranged between the laser outlet and the bearing table along the direction far away from the laser outlet, and the bearing table bears an object to be stripped. In the process of manufacturing the flexible screens with different shapes, the invention does not need to use mask plates with different patterns, simplifies the manufacturing process of the flexible screen and reduces the manufacturing cost of the flexible screen. The invention is used for manufacturing the flexible screen.
Description
Technical Field
The invention relates to the technical field of flexible display, in particular to laser stripping equipment and a control method thereof.
background
With the rapid development of the flexible display technology, the flexible screen has made great progress from the size of the screen to the display quality, and due to the characteristic of the flexible screen, the flexible screen has many special user experiences. To obtain a flexible screen, laser lift-off techniques are generally used for the acquisition. The laser lift-off technology is that a glass substrate formed with a flexible screen is heated by laser beams, so that the contact position of the flexible screen and the glass substrate is decomposed, and the flexible screen is separated from the glass substrate.
at present, the flexible screen in the specified shape is peeled off by adopting a laser peeling technology, the peeling can be realized through a mask plate, the mask plate comprising a light transmission area in the specified shape is usually adopted to mask a glass substrate bearing the flexible screen, and laser can penetrate through the light transmission area to heat the corresponding flexible screen and the glass substrate, so that the flexible screen in the specified shape is obtained.
In the process of implementing the invention, the inventor finds that the prior art has at least the following problems:
In the prior art, each mask only corresponds to one pattern, and in order to obtain flexible screens with different shapes, masks with different patterns corresponding to the masks are required, so that the manufacturing process of the flexible screen is complex, and the manufacturing cost is high.
Disclosure of Invention
in order to solve the problems that the manufacturing process of a flexible screen is complex and the manufacturing cost is high in the prior art, the embodiment of the invention provides laser stripping equipment and a control method thereof. The technical scheme is as follows:
in one aspect, there is provided a laser lift-off apparatus, including:
a laser generator, a polaroid, a liquid crystal light valve and a vibration detecting sheet,
The polaroid is arranged at the laser outlet of the laser generator;
The liquid crystal light valve and the vibration detection piece are sequentially arranged between the laser outlet and the bearing table along the direction far away from the laser outlet, and the bearing table bears an object to be stripped.
Optionally, the laser lift-off device includes a plurality of liquid crystal light valves arranged in a matrix, and each liquid crystal light valve includes:
the liquid crystal display panel comprises two transparent substrate base plates which are oppositely arranged, wherein a transparent electrode is formed on the inner side of each transparent substrate base plate, and liquid crystal is filled between the two transparent substrate base plates;
each liquid crystal light valve is connected with a voltage control switch.
optionally, the laser lift-off device includes one liquid crystal light valve, and the liquid crystal light valve includes: the liquid crystal display panel comprises two transparent substrate base plates which are oppositely arranged, wherein liquid crystal is filled between the two transparent substrate base plates;
the two transparent substrate base plates comprise a first transparent substrate base plate and a second transparent substrate base plate, a first transparent electrode is formed on the inner side of the first transparent substrate base plate, a plurality of second transparent electrodes which are arranged in a matrix shape are formed on the inner side of the second transparent substrate base plate, and orthographic projections of the plurality of second transparent electrodes on the first transparent substrate base plate are positioned in the first transparent substrate base plate;
And each second transparent electrode is connected with a voltage control switch.
Optionally, the polarization direction of the polarizer is perpendicular to the polarization direction of the polarizer.
optionally, the preset voltage is a voltage less than 15 v.
optionally, the object to be peeled includes a substrate base plate and a flexible screen to be peeled formed on the substrate base plate.
in another aspect, there is provided a method of controlling a laser lift-off apparatus, the method including:
Determining the specified shape of the object to be stripped;
determining a target position of the specified shape on the object to be stripped;
In the laser scanning process, the preset voltage is loaded to the liquid crystal light valve to enable the laser emitted by the laser generator to irradiate the target position, and the object to be stripped in the specified shape is stripped.
Optionally, the object to be peeled comprises a substrate base plate and a flexible screen to be peeled formed on the substrate base plate;
The determination of the specified shape of the object to be peeled comprises the following steps:
Determining the specified shape of the flexible screen to be peeled.
Optionally, the laser lift-off device includes a plurality of the liquid crystal light valves arranged in a matrix;
The step of irradiating the laser emitted by the laser generator on the target position by applying a preset voltage to the liquid crystal light valve comprises:
and loading a preset voltage to the liquid crystal light valve positioned right above the target position to enable the laser generated by the laser generator to irradiate on the target position.
optionally, the laser lift-off device includes one liquid crystal light valve, and the liquid crystal light valve includes: two transparent substrate plates arranged oppositely, liquid crystal is filled between the two transparent substrate plates,
The two transparent substrate base plates comprise a first transparent substrate base plate and a second transparent substrate base plate, a first transparent electrode is formed on the inner side of the first transparent substrate base plate, a plurality of second transparent electrodes which are arranged in a matrix shape are formed on the inner side of the second transparent substrate base plate, and orthographic projections of the plurality of second transparent electrodes on the first transparent substrate base plate are positioned in the first transparent substrate base plate;
the step of irradiating the laser emitted by the laser generator on the target position by applying a preset voltage to the liquid crystal light valve comprises:
applying a first voltage to the first transparent electrode;
And loading a second voltage to a second transparent electrode positioned right above the target position to enable the laser generated by the laser generator to irradiate on the target position, wherein the difference value between the first voltage and the second voltage is the preset voltage.
The technical scheme provided by the embodiment of the invention has the following beneficial effects:
According to the laser stripping equipment and the control method thereof provided by the embodiment of the invention, the laser emitted by the laser generator can be converted into linearly polarized light after passing through the polarizing film, the state of the liquid crystal light valve can be controlled by controlling the voltage, and the conversion of the polarization direction of the linearly polarized light is realized, so that whether the linearly polarized light can be irradiated on the substrate through the vibration detection film or not can be determined, and the stripping of the flexible screen with the specified shape is realized. Therefore, in the process of manufacturing the flexible screens with different shapes, masks with different patterns are not needed, the manufacturing process of the flexible screen is simplified, and the manufacturing cost of the flexible screen is reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a laser lift-off apparatus provided in an embodiment of the present invention;
Fig. 2 is a schematic structural diagram of a liquid crystal light valve arranged in a matrix according to an embodiment of the present invention;
FIG. 3 is an enlarged structural diagram of a liquid crystal light valve according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a flexible screen with a circular designated shape according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of another liquid crystal light valve according to an embodiment of the present invention;
Fig. 6 is a flowchart of a control method of a laser lift-off apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
An embodiment of the present invention provides a laser lift-off apparatus, as shown in fig. 1, the laser lift-off apparatus includes:
The liquid crystal display device comprises a laser generator 01, a polaroid 02, a liquid crystal light valve 03 and a vibration detection sheet 04.
The laser light exit B of the laser generator 01 is provided with a polarizing plate 02.
the liquid crystal light valve 03 and the vibration detection sheet 04 are sequentially arranged between the laser outlet B and the bearing platform 05 along the direction far away from the laser outlet B, and the bearing platform 05 bears the object to be stripped 10.
in the embodiment of the invention, the object to be peeled can comprise a substrate base plate and a flexible screen to be peeled, which is formed on the substrate base plate.
the laser light emitted by the laser generator 01 passes through the polarizer 02 to obtain linearly polarized light, the liquid crystal light valve 03 can optically rotate the linearly polarized light when a preset voltage is applied, so that the optically rotated linearly polarized light passes through the vibration detection sheet 04, and the linearly polarized light is transmitted from the liquid crystal light valve 03 and cannot pass through the vibration detection sheet 04 when the preset voltage is not applied to the liquid crystal light valve 03. In the embodiment of the present invention, the absence of the preset voltage applied to the liquid crystal light valve generally means the absence of the preset voltage applied to the liquid crystal light valve.
In summary, according to the laser lift-off device provided by the embodiment of the invention, since the laser emitted by the laser generator can be converted into linearly polarized light after passing through the polarizer, the state of the liquid crystal light valve can be controlled by controlling the voltage, and the conversion of the polarization direction of the linearly polarized light is realized, so that whether the linearly polarized light can be irradiated on the substrate through the polarizer can be determined, and the flexible screen with a specified shape can be lifted off. Therefore, in the process of manufacturing the flexible screens with different shapes, masks with different patterns are not needed, the manufacturing process of the flexible screen is simplified, and the manufacturing cost of the flexible screen is reduced.
The polarizing plate is an optical element that can polarize natural light, and transmits light oscillating in a certain direction and blocks light oscillating in a direction perpendicular to the certain direction. The laser light generated by the laser generator is natural light, namely circular polarized light, and can be converted into linear polarized light through the polaroid. The polarization direction of the linearly polarized light can be changed by loading a preset voltage on the liquid crystal light valve.
In the embodiment of the present invention, the laser lift-off device may include a plurality of liquid crystal light valves arranged in a matrix, or may include one liquid crystal light valve, and the specific setting condition may be determined according to an actual situation. The present invention will be described with reference to the following two examples.
in a first aspect, the laser lift-off apparatus may include a plurality of liquid crystal light valves arranged in a matrix, specifically, referring to fig. 2, fig. 2 is a schematic structural diagram of a liquid crystal light valve arranged in a matrix according to an embodiment of the present invention, each of the small squares shown in fig. 2 represents a liquid crystal light valve 03, and the plurality of liquid crystal light valves 03 are arranged in a matrix. Fig. 3 is an enlarged schematic structural diagram of a liquid crystal light valve according to an embodiment of the present invention, and as shown in fig. 3, each liquid crystal light valve 03 includes: two transparent substrate 031 are disposed opposite to each other, a transparent electrode 032 is formed inside each transparent substrate 031, and a liquid crystal 033 is filled between the two transparent substrate 031.
each liquid crystal light valve may be connected to a voltage control switch, and the voltage control switch may be a TFT (Thin Film Transistor) switch, and the TFT switch may be used to control a voltage in the liquid crystal light valve, and generally controls the voltage to be loaded or unloaded, and optionally, the TFT switch may be disposed in the liquid crystal light valve. In the embodiment of the invention, when no voltage and a loaded voltage (usually a preset voltage is loaded) are loaded on the liquid crystal light valve, the liquid crystal of the liquid crystal light valve has two states, namely a normal state and a deflection state, when the liquid crystal is in the normal state, the liquid crystal light valve does not influence the emergent direction of light, and when the liquid crystal is in the deflection state, the liquid crystal light valve performs optical rotation on incident linearly polarized light to influence the emergent direction of the light. In the embodiment of the present invention, the angle of optical rotation is related to the included angle between the polarizer and the vibration detecting plate, for example, when the included angle between the polarization direction of the polarizer and the polarization direction of the vibration detecting plate is 0 °, that is, the polarization direction of the polarizer is the same as the polarization direction of the vibration detecting plate, the voltage in the liquid crystal light valve can be controlled through the TFT switch, that is, no voltage is applied to the liquid crystal light valve, so that the angle of optical rotation of linearly polarized light is 0 °; for another example, when the angle between the polarization direction of the polarizer and the polarization direction of the polarizer is 45 °, the voltage in the liquid crystal light valve can be controlled by the TFT switch, so that the optical rotation angle of the linearly polarized light can reach 45 °. The included angle between the polarization direction of the polarizer and the polarization direction of the vibration detecting plate may be determined according to actual situations, which is not limited in the embodiments of the present invention.
In practical application, the included angle between the polarization direction of the polarizer and the polarization direction of the vibration detecting plate can be directly set to 90 °, that is, the polarization directions of the polarizer and the vibration detecting plate are perpendicular to each other, the operation process is relatively simple, correspondingly, the optical rotation angle of the liquid crystal light valve is also 90 °, and the following description of the embodiment of the present invention takes this as an example.
For example, in the embodiment of the present invention, the TFT switch may control the opening and closing of the liquid crystal light valve, when the TFT switch is normally opened, the liquid crystal light valve is opened, a preset voltage is loaded on the liquid crystal light valve, when the TFT switch is closed, the liquid crystal light valve is closed, and no voltage is loaded on the liquid crystal light valve. Specifically, when a voltage with a preset voltage of 0 v is applied to the liquid crystal light valve (i.e., no voltage is applied), the liquid crystal in the liquid crystal light valve does not rotate, and the polarization direction of the linearly polarized light does not rotate, so that the linearly polarized light transmitted through the liquid crystal light valve cannot pass through the vibration detection sheet, i.e., cannot irradiate on the substrate; when preset voltage, for example, less than 15 v and not 0 v, is applied to the liquid crystal light valve, the liquid crystal in the liquid crystal light valve can be controlled to rotate by 90 °, since light can be transmitted along with the arrangement direction of the liquid crystal, the polarization direction of linearly polarized light also rotates by 90 ° along with the rotation of the liquid crystal, and since the polarization directions of the polarizing plate and the vibration detecting plate are perpendicular to each other, the linearly polarized light after rotating by 90 ° can penetrate through the vibration detecting plate and irradiate on the substrate, and the light transmittance can reach 100%.
the preset voltage may be a positive preset voltage or a negative preset voltage, that is, a positive voltage smaller than 15 v may be applied to the liquid crystal light valve, or a negative voltage having an absolute value smaller than 15 v may be applied to the liquid crystal light valve. For example, when the preset voltage is a positive voltage, the liquid crystal in the liquid crystal light valve may rotate 90 ° clockwise, and then the polarization direction of the linearly polarized light also rotates 90 ° clockwise; conversely, when the preset voltage is a negative voltage, the liquid crystal in the liquid crystal light valve can rotate 90 ° in the counterclockwise direction, and then the polarization direction of the linearly polarized light also rotates 90 ° in the counterclockwise direction. In the embodiment of the present invention, the rotation direction of the liquid crystal is only schematically illustrated, and the specific rotation direction can be determined by the applied preset voltage. In addition, in practical applications, the direction of the preset voltage applied to the liquid crystal light valve provided by the embodiment of the present invention may be determined according to practical situations, and the embodiment of the present invention does not limit this.
as shown in fig. 1, the laser lift-off apparatus provided in the embodiment of the present invention may further include a carrying table 05, a supporting frame 06, and a machine frame 07. The bearing platform 05 is used for bearing an object to be stripped 10, the support frame 06 is arranged on the bearing platform 05 and used for supporting the vibration detection sheet 04 and the liquid crystal light valve 03, and the machine frame 07 is used for placing the laser generator 01.
it should be noted that the carrier for carrying the object to be peeled is a movable carrier, and the movable carrier can be moved according to actual needs during the laser scanning process.
In the embodiment of the present invention, the width of the laser light generated by the laser light generator is generally a fixed width, for example, 0.4mm (unit: mm), and the length is an adjustable length, for example, 370mm, and the laser light generator can adjust the length of the laser light generated according to the size of the object to be peeled. In practice, the object to be peeled can be 400mm long and 300mm wide. In the laser scanning process, the carrier carrying the object to be peeled can move slowly along the width direction of the object to be peeled, and the moving distance can be 0.04mm each time until the laser can completely scan the object to be peeled.
in the embodiment of the present invention, the laser lift-off device may be used to lift off the flexible screen having a special shape, which may be a circle, a triangle, or a trapezoid, and the like, and the flexible screen having a specific shape (i.e., a final lift-off shape) is a circle is taken as an example for explanation, as shown in fig. 4, the laser lift-off device may include a plurality of liquid crystal light valves arranged in a matrix, it is assumed that each square in fig. 4 represents one liquid crystal light valve, and the specific shape of the flexible screen to be lifted off is the shape of a circular area represented by M in fig. 4.
For example, a target position of the circular area on the flexible screen may be determined, and for a liquid crystal light valve corresponding to a position right above the target position (that is, a liquid crystal light valve in which orthographic projection of the substrate in the plurality of liquid crystal light valves is overlapped with orthographic projection of the circular area on the substrate), a preset voltage may be applied to the liquid crystal light valve when the liquid crystal light valve is scanned by laser, or a preset voltage may be continuously applied to the liquid crystal light valve during laser scanning, where the preset voltage is a voltage smaller than 15 v and not 0 v, and during voltage application, the liquid crystal light valve may perform optical rotation on linearly polarized light passing through the polarizer, and the rotation angle may be 90 °, the linearly polarized light after optical rotation may pass through the polarization detection sheet, and the light transmittance may reach 100%; for the liquid crystal light valves corresponding to the non-target positions (that is, the liquid crystal light valves whose orthographic projection on the substrate and the orthographic projection of the circular area on the substrate do not overlap in the plurality of liquid crystal light valves), the liquid crystal light valves are not loaded with voltage when the laser scans the liquid crystal light valves or are not loaded with voltage continuously in the laser scanning process under the control of the TFT switches. In this way, the flexible screen on the target position is separated from the substrate base plate after being irradiated with the laser, and then the edge of the flexible screen in the circular area can be cut using a laser cutting technique, so that the flexible screen in a specified shape of a circle can be obtained.
In the embodiment of the present invention, the above laser lift-off method can be adopted to obtain other flexible screens with specified shapes, and the specific implementation process may refer to the above process, which is not described in detail in the embodiment of the present invention.
in a second aspect, the laser lift-off device may include a liquid crystal light valve, and fig. 5 is a schematic structural diagram of another liquid crystal light valve provided in an embodiment of the present invention, as shown in fig. 5, the liquid crystal light valve 03 includes: two transparent substrate 034 arranged oppositely, and liquid crystal 035 is filled between the two transparent substrate.
The two transparent substrate 034 include a first transparent substrate and a second transparent substrate, a first transparent electrode 036 is formed on the inner side of the first transparent substrate, a plurality of second transparent electrodes 037 arranged in a matrix shape are formed on the inner side of the second transparent substrate, and the orthographic projections of the plurality of second transparent electrodes 037 on the first transparent substrate are located in the first transparent substrate.
each second transparent electrode is connected with a voltage control switch, and the voltage control switch may be a TFT switch, and the TFT switch may be used to control a voltage in the liquid crystal light valve, and generally controls the voltage to be loaded or unloaded, and optionally, the TFT switch may be disposed in the liquid crystal light valve.
In the embodiment of the present invention, the laser lift-off device may be used to lift off the flexible screen with a special shape, which may be a circle, a triangle, a trapezoid, or the like, and the flexible screen with a specific shape (i.e., the final lift-off shape) is a circle is taken as an example for explanation, as shown in fig. 4, the laser lift-off device may include a liquid crystal light valve, it is assumed that each square in fig. 4 represents a second transparent electrode, and the specific shape of the flexible screen to be lifted off is a circular area represented by M in fig. 4.
For example, the target position of the circular area on the flexible screen may be determined, during the laser scanning, a voltage of 0 v is continuously applied to the first transparent electrode (the first transparent electrode may also be considered as being grounded, or no voltage is applied thereto), for the second transparent electrode corresponding to the position directly above the target position (i.e. the second transparent electrode overlapping with the orthographic projection of the circular area on the substrate in the orthographic projection of the substrate in the second transparent electrode), a preset voltage may be applied to the second transparent electrode when the laser scans the second transparent electrode through the control of the TFT switch, or a preset voltage may be continuously applied to the second transparent electrode during the laser scanning, the preset voltage is a voltage smaller than 15 v and not 0 v, so as to ensure that the voltage difference between the first transparent electrode and the second transparent electrode is the preset voltage, during the voltage application, the liquid crystal light valve can perform optical rotation on linearly polarized light which penetrates through the polaroid, the rotating angle can be 90 degrees, the linearly polarized light after the optical rotation can penetrate through the vibration detection sheet, and the light transmittance can reach 100 percent; for the second transparent electrode corresponding to the non-target position (i.e. the second transparent electrode whose orthographic projection on the substrate does not overlap with the orthographic projection of the circular area on the substrate in the plurality of second transparent electrodes), the second transparent electrode is not loaded with voltage when the laser scans the second transparent electrode, or the second transparent electrode is not loaded with voltage continuously in the laser scanning process, through the control of the TFT switch. In this way, the flexible screen on the target position is separated from the substrate base plate after being irradiated with the laser, and then the edge of the flexible screen in the circular area can be cut using a laser cutting technique, so that the flexible screen in a specified shape of a circle can be obtained.
In the second aspect provided in the embodiment of the present invention, the line polarization light may be optically rotated or transmitted through one liquid crystal light valve, and for other structures of the laser lift-off device, reference may be made to the content in the first aspect, which is not described in detail in the embodiment of the present invention.
it should be noted that, in practical applications, the structure of the liquid crystal light valve may also have other various forms, for example, in the second aspect, the inner side of the first transparent substrate may also be formed with a plurality of first transparent electrodes 036, the plurality of first transparent electrodes 036 and the plurality of second transparent electrodes 037 are in one-to-one correspondence, orthographic projections of every two corresponding first transparent electrodes and second transparent electrodes on any one transparent substrate overlap, each two corresponding first transparent electrodes and second transparent electrodes are connected to a voltage control switch, and the voltage control switch may be a TFT switch, and the TFT switch may be used to control a voltage in the liquid crystal light valve, and generally controls loading or unloading of the voltage, and optionally, the TFT switch may be disposed in the liquid crystal light valve. The structure of the liquid crystal light valve according to the embodiments of the present invention is merely illustrated schematically, and any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
In summary, according to the laser lift-off device provided by the embodiment of the invention, since the laser emitted by the laser generator can be converted into linearly polarized light after passing through the polarizer, the state of the liquid crystal light valve can be controlled by controlling the voltage, and the conversion of the polarization direction of the linearly polarized light is realized, so that whether the linearly polarized light can be irradiated on the substrate through the polarizer can be determined, and the flexible screen with a specified shape can be lifted off. Therefore, in the process of manufacturing the flexible screens with different shapes, masks with different patterns are not needed, the manufacturing process of the flexible screen is simplified, and the manufacturing cost of the flexible screen is reduced.
an embodiment of the present invention provides a method for controlling a laser lift-off device, as shown in fig. 6, the method includes:
Step 101, determining the specified shape of the object to be stripped.
and 102, determining a target position of the specified shape on the object to be stripped.
Step 103, in the laser scanning process, a preset voltage is loaded to the liquid crystal light valve to enable the laser emitted by the laser generator to irradiate on the target position, so that the object to be stripped in the specified shape is stripped.
In an embodiment of the present invention, the object to be peeled may include a substrate base plate and a flexible screen to be peeled formed on the substrate base plate, wherein determining the designated shape of the object to be peeled may include determining the designated shape of the flexible screen to be peeled.
In summary, the control method of the laser lift-off device provided in the embodiment of the present invention can determine the target position of the specified shape on the flexible screen, and load the preset voltage to the liquid crystal light valve, so that the laser emitted by the laser generator irradiates on the target position, thereby realizing the lift-off of the flexible screen with the specified shape. Therefore, in the process of manufacturing the flexible screens with different shapes, masks with different patterns are not needed, the manufacturing process of the flexible screen is simplified, and the manufacturing cost of the flexible screen is reduced.
The control method of the laser lift-off equipment provided by the embodiment of the invention can be realized by a plurality of liquid crystal light valves arranged in a matrix shape; or may be implemented by a liquid crystal light valve. The specific implementation manner may be determined according to actual situations, and the following two implementation manners are taken as examples to illustrate the embodiments of the present invention.
In a first implementation manner, referring to fig. 2, the laser lift-off device may include a plurality of liquid crystal light valves arranged in a matrix.
Specifically, in step 103, a preset voltage is applied to the liquid crystal light valve to irradiate the laser light emitted by the laser generator on the target position, and the specific implementation process includes: and loading a preset voltage to the liquid crystal light valve positioned right above the target position to enable the laser generated by the laser generator to irradiate the target position. In this way, the flexible screen on the target position is separated from the substrate base plate after being irradiated with the laser, and then the edge of the flexible screen in the circular area can be cut using a laser cutting technique, so that the flexible screen in a specified shape of a circle can be obtained.
It should be noted that, when the laser lift-off device includes a plurality of liquid crystal light valves, the plurality of liquid crystal light valves may not be arranged in a matrix shape, but may be arranged according to a specified shape, for example, in step 103, the plurality of liquid crystal light valves may be arranged directly above the target position according to a target position on the flexible screen where the specified shape is determined, so that the shape formed by the plurality of liquid crystal light valves is the same as the specified shape, in the laser scanning process, a preset voltage is applied to the plurality of liquid crystal light valves to implement the optical rotation of the linearly polarized light, the linearly polarized light passing through the liquid crystal optical valve passes through the polarization detection sheet and irradiates on the flexible screen, and a corresponding region located not directly above the target position is absorbed by the linearly polarized light detection sheet obtained by passing through the polarization sheet because the liquid crystal light valve is not arranged, and cannot irradiate on the flexible screen. In this way, the flexible screen on the target position is separated from the substrate base plate after being irradiated with the laser, and then the edge of the flexible screen in the circular area can be cut using a laser cutting technique, so that the flexible screen in a specified shape of a circle can be obtained.
in a first implementation manner provided in the embodiment of the present invention, the linearly polarized light transmitted through the polarizer may be optically rotated or transmitted through a plurality of liquid crystal light valves, and the method for controlling the laser lift-off device may refer to the description of the second aspect in the foregoing embodiment of the apparatus, which is not described in detail in the embodiment of the present invention.
In a second implementation manner, the laser lift-off device may further include a liquid crystal light valve, and the liquid crystal light valve includes: two transparent substrate base plates which are arranged oppositely, and liquid crystal is filled between the two transparent substrate base plates.
the two transparent substrate substrates comprise a first transparent substrate and a second transparent substrate, a first transparent electrode is formed on the inner side of the first transparent substrate, a plurality of second transparent electrodes arranged in a matrix shape are formed on the inner side of the second transparent substrate, and orthographic projections of the plurality of second transparent electrodes on the first transparent substrate are located in the first transparent substrate.
Specifically, in step 103, the laser generated by the laser generator may be irradiated on the target position by applying a preset voltage to the liquid crystal light valve. The specific implementation process comprises the following steps: applying a first voltage to the first transparent electrode; and loading a second voltage to a second transparent electrode positioned right above the target position to enable the laser generated by the laser generator to irradiate the target position, wherein the difference value between the first voltage and the second voltage is a preset voltage.
In practical applications, the preset voltage applied to the liquid crystal light valve may be a voltage less than 15 v, that is, a difference between the first voltage and the second voltage of the liquid crystal light valve is a voltage less than 15 v. For example, when the first voltage applied to the first transparent electrode and the second voltage applied to the second transparent electrode have the same value, or the first transparent electrode may be applied with a voltage of 0 v (the first transparent electrode may also be considered as being grounded), and the second transparent electrode is not applied with a voltage, that is, the difference between the first voltage and the second voltage is 0 v, the liquid crystal light valve cannot perform optical rotation on linearly polarized light, or neither transparent electrode is applied with a voltage, and the linearly polarized light cannot be irradiated on the substrate through the polarization detection sheet; when the difference between the first voltage and the second voltage is less than 15 volts and not 0 volts, the liquid crystal light valve can perform optical rotation on linearly polarized light, and the optically rotated linearly polarized light can be irradiated on a target position through the vibration detection sheet. In this way, the flexible screen on the target position is separated from the substrate base plate after being irradiated with the laser, and then the edge of the flexible screen in the circular area can be cut using a laser cutting technique, so that the flexible screen in a specified shape of a circle can be obtained.
in a second implementation manner provided in the embodiment of the present invention, the linearly polarized light transmitted through the polarizer may be optically rotated or transmitted through one liquid crystal light valve, and the method for controlling the laser lift-off device may refer to the description of the second aspect in the foregoing embodiment of the apparatus, which is not repeated herein.
In summary, in the control method of the laser lift-off device provided in the embodiment of the invention, since the laser generated by the laser generator can be converted into linearly polarized light after passing through the polarizer, the state of the liquid crystal light valve can be controlled by controlling the voltage, and the conversion of the polarization direction of the linearly polarized light is realized, so that whether the linearly polarized light can be irradiated on the substrate through the polarizer can be determined, and the lift-off of the flexible screen with a specified shape can be realized. Therefore, in the process of manufacturing the flexible screens with different shapes, masks with different patterns are not needed, the manufacturing process of the flexible screen is simplified, and the manufacturing cost of the flexible screen is reduced.
It can be clearly understood by those skilled in the art that, for convenience and brevity of description, the specific working process of the control method of the laser lift-off device described above may refer to the corresponding process in the foregoing device embodiment, and is not described herein again.
the above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (7)
1. A laser lift-off apparatus, comprising:
The device comprises a laser generator, a polaroid, a liquid crystal light valve and a vibration detection sheet;
the polaroid is arranged at the laser outlet of the laser generator;
The liquid crystal light valve and the vibration detection piece are sequentially arranged between the laser outlet and the bearing table along the direction far away from the laser outlet, and the bearing table bears an object to be stripped; the liquid crystal light valve is used for controlling laser emitted by the laser generator to irradiate a target position on the object to be stripped under the action of preset voltage so as to strip the object to be stripped in a specified shape;
The laser lift-off device comprises a plurality of liquid crystal light valves arranged in a matrix shape, and each liquid crystal light valve comprises: the liquid crystal display panel comprises two transparent substrate base plates which are oppositely arranged, wherein a transparent electrode is formed on the inner side of each transparent substrate base plate, and liquid crystal is filled between the two transparent substrate base plates; each liquid crystal light valve is connected with a voltage control switch; alternatively, the first and second electrodes may be,
The laser lift-off device comprises one liquid crystal light valve, and the liquid crystal light valve comprises: the liquid crystal display panel comprises two transparent substrate base plates which are oppositely arranged, wherein liquid crystal is filled between the two transparent substrate base plates; the two transparent substrate substrates comprise a first transparent substrate and a second transparent substrate, and a plurality of second transparent electrodes arranged in a matrix shape are formed on the inner side of the second transparent substrate;
A first transparent electrode is formed on the inner side of the first transparent substrate, and orthographic projections of the plurality of second transparent electrodes on the first transparent substrate are positioned in the first transparent substrate; each second transparent electrode is connected with a voltage control switch; or a plurality of first transparent electrodes are formed on the inner side of the first transparent substrate, the first transparent electrodes correspond to the second transparent electrodes one to one, orthographic projections of every two corresponding first transparent electrodes and every two corresponding second transparent electrodes on any transparent substrate are overlapped, each two corresponding first transparent electrodes and every two corresponding second transparent electrodes are connected with a voltage control switch, and the voltage control switch is a Thin Film Transistor (TFT) switch.
2. the apparatus of claim 1,
The vibration detection sheet is perpendicular to the polarization direction of the polarizing sheet.
3. the apparatus of claim 1, wherein the preset voltage is a voltage less than 15 volts.
4. The apparatus of claim 1, wherein the object to be peeled comprises a substrate base plate and a flexible screen to be peeled formed on the substrate base plate.
5. The apparatus of claim 1, wherein the laser lift off apparatus further comprises: a support frame and a frame;
The support frame is arranged on the bearing table and used for supporting the vibration detection sheet and the liquid crystal light valve;
The frame is used for placing the laser generator.
6. A method for controlling a laser lift-off apparatus, wherein the laser lift-off apparatus is the laser lift-off apparatus according to any one of claims 1 to 5, the method comprising:
determining the specified shape of the object to be stripped;
Determining a target position of the specified shape on the object to be stripped;
In the laser scanning process, a preset voltage is loaded to the liquid crystal light valve to enable the laser emitted by the laser generator to irradiate the target position, so that the object to be stripped in the specified shape is stripped;
the step of irradiating the laser emitted by the laser generator on the target position by applying a preset voltage to the liquid crystal light valve comprises:
loading a preset voltage to the liquid crystal light valve positioned right above the target position to enable laser emitted by the laser generator to irradiate the target position; alternatively, the first and second electrodes may be,
Applying a first voltage to the first transparent electrode;
loading a second voltage to a second transparent electrode positioned right above the target position to enable the laser generated by the laser generator to irradiate the target position, wherein the difference value between the first voltage and the second voltage is a preset voltage; alternatively, the first and second electrodes may be,
and respectively loading voltages to the first transparent electrode positioned right above the target position and the second transparent electrode positioned right above the target position, so that the laser generated by the laser generator is irradiated on the target position, wherein the difference value between the voltage loaded to the first transparent electrode positioned right above the target position and the voltage loaded to the second transparent electrode positioned right above the target position is a preset voltage.
7. The method according to claim 6, wherein the object to be peeled comprises a substrate base plate and a flexible screen to be peeled formed on the substrate base plate;
The determination of the specified shape of the object to be peeled comprises the following steps:
determining the specified shape of the flexible screen to be peeled.
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