CN106198452A - Gas analyzing apparatus based on spectral technique and method - Google Patents
Gas analyzing apparatus based on spectral technique and method Download PDFInfo
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- CN106198452A CN106198452A CN201610646880.9A CN201610646880A CN106198452A CN 106198452 A CN106198452 A CN 106198452A CN 201610646880 A CN201610646880 A CN 201610646880A CN 106198452 A CN106198452 A CN 106198452A
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- 238000000034 method Methods 0.000 title claims abstract description 49
- 230000003595 spectral effect Effects 0.000 title claims abstract description 27
- 238000005259 measurement Methods 0.000 claims abstract description 23
- 238000004458 analytical method Methods 0.000 claims abstract description 15
- 230000008569 process Effects 0.000 claims abstract description 12
- 239000007789 gas Substances 0.000 claims description 92
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- 238000000862 absorption spectrum Methods 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
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- 208000031481 Pathologic Constriction Diseases 0.000 description 3
- 238000004868 gas analysis Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- 210000001215 vagina Anatomy 0.000 description 3
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- 238000004847 absorption spectroscopy Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
- G01J2003/423—Spectral arrangements using lasers, e.g. tunable
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
- G01N2021/399—Diode laser
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Abstract
The invention provides a kind of gas analyzing apparatus based on spectral technique and method, described gas analyzing apparatus includes: light source, and described light source sends the measurement light mated with gas to be measured；Detector, the measurement light after described detector will interact with gas to be measured is converted to the signal of telecommunication, and is sent to analyze module；Voice coil motor, described detector is fixed on described voice coil motor, moves back and forth in light path；Analyzing module, described analysis module utilizes spectral technique to process the described signal of telecommunication, thus knows the information of gas to be measured.The present invention has the advantages such as precision height, simple in construction, low cost.
Description
Technical field
The present invention relates to photoanalysis, particularly to gas analyzing apparatus based on spectral technique and method.
Background technology
In gas sensor, the output of diode laser just high divergence, it is therefore desirable to use collimating optics
Element, such as collimating lens.And the introducing of collimating lens can make to produce between laser instrument and lens to interfere: laser instrument sends
The laser impinging perpendicularly on lens rear surface has partially reflective time laser instrument, and the front window at laser instrument reflects, again
Impinging perpendicularly on lens rear surface, front and back the emergent light of twice can form an interference.In the process measuring gas absorption signal
In, interfere the striped formed will greatly reduce gas detecting limit, it is therefore desirable to do one's utmost to avoid or eliminate.
Tradition eliminates the method for optical interference noise between collimating lens and laser instrument to be had:
1. lens plating anti-reflection film, plating anti-reflection film can only reduce interference strength to a certain extent, can not suppress light well
Learn noise, and the transmitance of bloomed lens can be polluted with daily wiping and minute surface and reduce；
2. lens and optical axis are angled.When the angle of lens axis and optical axis is less, pressing down of optical interference noise
Ability processed is poor；When lens and optical axis included angle are bigger, the most serious aberration, beam collimation weak effect will be there is.
Summary of the invention
For solving the deficiency in above-mentioned prior art, the invention provides and a kind of suppress the high-precision of interaction noise
Degree, the gas analyzing apparatus based on spectral technique of low cost.
It is an object of the invention to be achieved through the following technical solutions:
A kind of gas analyzing apparatus based on spectral technique, described gas analyzing apparatus includes:
Light source, described light source sends the measurement light mated with gas to be measured；
Detector, the measurement light after described detector will interact with gas to be measured is converted to the signal of telecommunication, and passes
Deliver to analyze module；
Voice coil motor, described detector is fixed on described voice coil motor, moves back and forth in light path；
Analyzing module, described analysis module utilizes spectral technique to process the described signal of telecommunication, thus knows the letter of gas to be measured
Breath.
According to above-mentioned gas analyzing apparatus, it is preferable that described information is concentration, speed or temperature.
According to above-mentioned gas analyzing apparatus, alternatively, described light source includes:
Luminous body, described luminous body is fixed on support；
Support, described support is used for carrying described luminous body, and support is formed and is suitable to what described luminous body emergent light passed through
Optical channel；
Fixture, described fixture arranges on the bracket, is suitable to described emergent light and passes；
Light collimation device, described light collimation device is fixed in the light path of described emergent light, is suitable to collimate described emergent light；
Elastic component, described elastic component is arranged on the sidepiece along its axis direction of described light collimation device；
Piezoelectric device, described piezoelectric device and elastic component be separately positioned on described light collimation device along its axis direction
Both sides, described light collimation device, elastic component and piezoelectric device are constrained between described support and fixture.
According to above-mentioned gas analyzing apparatus, it is preferable that described support is sleeve, described sleeve is that one end has radial part
The sleeve divided.
According to above-mentioned gas analyzing apparatus, it is preferable that described light collimation device, elastic component and piezoelectric device are in described
Support or the inner side of fixture.
According to above-mentioned gas analyzing apparatus, it is preferable that on the optical path direction of described emergent light, described piezoelectricity device
Part, light collimation device and elastic component set gradually forward or backwards.
According to above-mentioned gas analyzing apparatus, alternatively, described light source includes:
Luminous body, described luminous body is fixed on support；
First support, described first support is used for carrying described luminous body；
Light collimation device, in the light path of the emergent light that described light collimation device is fixed on described luminous body, goes out described in collimation
Penetrate light；The axis of described light collimation device is acute angle with the angle of the light between centers of described emergent light；
Tumbler, described light collimation device is fixed on described tumbler；
Second support, described tumbler is rotatably arranged on described second support；
Motor, described motor is used for driving described tumbler and light collimation device to rotate.
According to above-mentioned gas analyzing apparatus, it is preferable that described acute angle is less than 30 degree.
According to above-mentioned gas analyzing apparatus, it is preferable that described light collimation device is plate-convex lens, described emergent light depends on
The secondary plane through described lens and convex surface.
According to above-mentioned gas analyzing apparatus, it is preferable that described luminous body is laser instrument.
According to above-mentioned gas analyzing apparatus, it is preferable that described measurement light is corresponding with the characteristic spectral line of gas to be measured.
The present invention also aims to provide a kind of gas based on spectral technique that can effectively suppress interaction noise divide
Analysis method, this goal of the invention is achieved by the following technical programs:
According to the analysis method for gases of above-mentioned gas analyzing apparatus, described analysis method for gases comprises the following steps:
(A1) light source sends the measurement light mated with gas to be measured；
(A2) measure light to interact with gas to be measured；
(A3) the measurement light after detector will interact with gas to be measured is converted to the signal of telecommunication, and is sent to analyze
Module；The detector being fixed on voice coil motor moves back and forth；
(A4) analyzing module utilizes spectral technique to process the described signal of telecommunication, thus knows the information of gas to be measured.
According to above-mentioned analysis method for gases, alternatively, step (A1) further includes steps of
(B1) emergent light that luminous body sends passes optical channel；
(B2) emergent light is collimated by light collimation device；Piezoelectric device produces displacement, thus promotes described light collimation device
Return is dynamic；
(B3) emergent light after collimation penetrates from fixture.
Compared with prior art, the device have the advantages that into:
1. detector is creatively fixed on voice coil motor by the present invention so that detector is of reciprocating vibration, thus changes
Distance between optical light source and detector；Owing to the spacing of interference fringe is relevant to interference distance, the distance of detector and light source
Change and will upset interference fringe；If the light intensity accumulation superposition received in certain time will make interference fringe mutually support
Disappear, thus suppression optical interference noise effectively；
In luminous body goes out photoreduction process, piezoelectric (periodically micron dimension ground) is utilized to adjust light collimation device and send out
Distance between body of light, thus eliminate and interfere the optical noise brought；
Light collimation device plated surface anti-reflection film, reduce further optical noise；
2. the optical axis of the emergent light of luminous body can be zero with the angle of the axis of light collimation device, improves the standard of emergent light
Straight effect；
3. voice coil motor have high response, at high speed, the advantage such as simple in construction, volume be little, easy to control, pass for gas
Sensor can suppress optical interference noise between light source and detector well, without other optics of system are made
Become interference, it is achieved easily low cost.
Accompanying drawing explanation
Referring to the drawings, the disclosure will be easier to understand.Skilled addressee readily understands that: this
A little accompanying drawings are used only for illustrating technical scheme, and are not intended to be construed as limiting protection scope of the present invention.
In figure:
Fig. 1 is the structure diagram of the gas analyzing apparatus of according to embodiments of the present invention 1；
Fig. 2 is the structure diagram of the light source of according to embodiments of the present invention 2；
Fig. 3 is the structure diagram of the light source of according to embodiments of the present invention 3；
Fig. 4 is the structure diagram of the light source of according to embodiments of the present invention 4.
Detailed description of the invention
How Fig. 1-4 and the optional embodiment following description describing the present invention are implemented with teaching those skilled in the art
With the reproduction present invention.In order to instruct technical solution of the present invention, simplify or eliminated some conventional aspects.Those skilled in the art
Should be appreciated that be derived from these embodiments modification or replace will within the scope of the invention.Those skilled in the art should understand that
Following characteristics can combine to be formed multiple modification of the present invention in every way.Thus, the invention is not limited in following can
Select embodiment, and only limited by claim and their equivalent.
Embodiment 1:
Fig. 1 schematically illustrates the structure diagram of the gas analyzing apparatus based on spectral technique of the present embodiment, such as Fig. 1
Shown in, described gas analyzing apparatus includes:
Light source, such as semiconductor laser, described light source sends the measurement light mated with gas to be measured, as measured the wavelength of light
Corresponding with the characteristic spectral line of gas；
Detector, the measurement light after described detector will interact with gas to be measured is converted to the signal of telecommunication, and passes
Deliver to analyze module；
Voice coil motor, described detector is fixed on described voice coil motor, moves back and forth in light path, thus adjusts light source
And the distance between detector；
Analyzing module, described analysis module utilizes the spectral techniques such as absorption spectrum to process the described signal of telecommunication, thus knows and treat
Survey the information of gas；Analyzing module is the state of the art, does not repeats them here.
The analysis method for gases of the present embodiment, namely the method for work of above-mentioned gas analyzing apparatus, described gas analysis
Method comprises the following steps:
(A1) light source sends the measurement light mated with gas to be measured, e.g., measures optical wavelength corresponding with the characteristic spectral line of gas；
(A2) measure light to interact with gas to be measured；
(A3) the measurement light after detector will interact with gas to be measured is converted to the signal of telecommunication, and is sent to analyze
Module；The detector being fixed on voice coil motor moves back and forth, as detector vibrates along its axis direction, have adjusted detector with
The spacing of light source；Owing to the spacing of interference fringe is relevant to interference distance, therefore, the change of spacing will upset interference fringe, and one
If the light intensity accumulation superposition received in fixing time will make interference fringe cancel out each other, thus suppression optics is done effectively
Relate to noise；
(A4) analyzing module utilizes the spectral techniques such as absorption spectrum to process the described signal of telecommunication, thus knows the letter of gas to be measured
Breath.
Embodiment 2:
The structure diagram of the gas analyzing apparatus based on spectral technique of the present embodiment, described gas analyzing apparatus includes:
Light source, Fig. 2 schematically illustrates the structure diagram of the light source of the present embodiment, as in figure 2 it is shown, described light source bag
Include:
Luminous body 2, as being used for launching monochromatic laser instrument, described luminous body is fixed on support；
Support 1, such as circular sleeve, described support is used for carrying described luminous body, and support is formed and is suitable to described luminous body
The optical channel that emergent light passes through；
Fixture 6, as one end has the circular sleeve of radial component, described fixture is arranged on the bracket, is suitable to
Described emergent light passes；Threaded engagement is passed through, it is achieved detachable between fixture and support；
Light collimation device 4, such as convex lens, described light collimation device is fixed in the light path of described emergent light, is suitable to collimation
Described emergent light；
Elastic component 5, such as rubber parts, described elastic component is arranged on the side along its axis direction of described light collimation device
Portion；
Piezoelectric device 3, such as piezoelectric ceramics, described piezoelectric device and elastic component are separately positioned on the edge of described light collimation device
The both sides of its axis direction, described light collimation device, elastic component and piezoelectric device be constrained between described support and fixture,
Making when piezoelectric device is subjected to displacement, described light collimation device moves back and forth therewith, thus constantly adjusts luminous body and light
Distance between collimating element, eliminates the optical noise owing to interfering generation between light source and lens；
Detector, the measurement light after described detector will interact with gas to be measured is converted to the signal of telecommunication, and passes
Deliver to analyze module；
Voice coil motor, described detector is fixed on described voice coil motor, moves back and forth along detector axis in light path
(axis of detector and measurement light optical axis coincidence), thus adjust the distance between light source and detector；
Analyzing module, described analysis module utilizes the spectral techniques such as absorption spectrum to process the described signal of telecommunication, thus knows and treat
Survey the information of gas；Analyzing module is the state of the art, does not repeats them here.
The analysis method for gases of the present embodiment, namely the method for work of above-mentioned gas analyzing apparatus, described gas analysis
Method comprises the following steps:
(A1) light source sends the measurement light mated with gas to be measured, e.g., measures optical wavelength corresponding with the characteristic spectral line of gas,
Particularly as follows:
(B1) emergent light that luminous body sends passes optical channel；
(B2) emergent light is collimated by light collimation device；Piezoelectric device produces displacement, thus promotes described light collimation device
Return is dynamic, thus constantly adjusts the distance between luminous body and light collimation device, eliminate between light source and lens due to
Interfere the optical noise produced；
(B3) emergent light after collimation penetrates from fixture, becomes measurement light；
(A2) measure light to interact with gas to be measured；
(A3) the measurement light after detector will interact with gas to be measured is converted to the signal of telecommunication, and is sent to analyze
Module；The detector being fixed on voice coil motor moves back and forth, as detector along its axis direction vibration (axis of detector with
Measure light optical axis coincidence), have adjusted the spacing of detector and light source；Owing to the spacing of interference fringe is relevant to interference distance, because of
This, the change of spacing will upset interference fringe, if the light intensity accumulation superposition received in certain time will make to interfere bar
Stricture of vagina is cancelled out each other, thus suppression optical interference noise effectively；
(A4) analyzing module utilizes the spectral techniques such as absorption spectrum to process the described signal of telecommunication, thus knows the letter of gas to be measured
Breath.
Embodiment 3:
The structure diagram of the gas analyzing apparatus based on spectral technique of the present embodiment, as different from Example 2:
1. as it is shown on figure 3, light source includes:
Luminous body 2, is used for launching monochromatic light；Described luminous body is fixed on the first support；
First support 21, such as circular sleeve, installing plate etc., described support is used for carrying described luminous body, and support is formed
Be suitable to the optical channel that described luminous body emergent light passes through；
Light collimation device 81, such as plate-convex lens, described light collimation device is fixed on the light path of the emergent light of described luminous body
On, collimate described emergent light；The angle of the light between centers of the axis of described light collimation device and described emergent light is acute angle, as 2 degree,
10 degree, 25 degree etc., but less than 30 degree；
Tumbler 31, described light collimation device is fixed on described tumbler；
Second support 71, described tumbler is rotatably arranged on described second support；
Motor 51, described motor is used for driving described tumbler and light collimation device to rotate.
2. analytic unit, described analytic unit includes: averager, computing module, and described averager is used for average detection device
Transmitting the spectroscopic data that the signal of telecommunication come carries, computing module utilizes the spectroscopic data after spectral analysis technique process averagely, from
And know the parameter of gas to be measured, such as gas content, flow velocity etc..
The analysis method for gases of the present embodiment, namely the method for work of above-mentioned gas analyzing apparatus, described gas analysis
Method comprises the following steps:
(A1) what light source sent measures the light collimation device collimation that light is rotated, and measures the characteristic spectral line of optical wavelength and gas
Corresponding；
(A2) measure light to interact with gas to be measured, as absorbed by selectivity；
(A3) the measurement light after detector will interact with gas to be measured is converted to the signal of telecommunication, and is sent to analyze
Module；The detector being fixed on voice coil motor moves back and forth, as detector along its axis direction vibration (axis of detector with
Measure light optical axis coincidence), have adjusted the spacing of detector and light source；Owing to the spacing of interference fringe is relevant to interference distance, because of
This, the change of spacing will upset interference fringe, if the light intensity accumulation superposition received in certain time will make to interfere bar
Stricture of vagina is cancelled out each other, thus suppression optical interference noise effectively；
(A4) spectroscopic data that the average described signal of telecommunication of averager carries, computing module utilizes and pats at absorption spectroscopy techniques
Signal of telecommunication after all, the information such as concentration knowing gas to be measured.
Embodiment 4:
The structure diagram of the gas analyzing apparatus based on spectral technique of the present embodiment, as different from Example 3:
The most as shown in Figure 4, light source includes:
Luminous body 2 selects semiconductor laser with tunable；
First support 21 uses the circular sleeve with radial component, axial component, and described luminous body is fixed on described footpath
Center to part；The part 22 of axial component is as the second support；
Tumbler 31 uses bearing, bearing outer ring to be fixed on described second support, namely the inner side of described axial component；
Fixture 41, fixture uses sleeve, is fixed on tumbler, i.e. on the inner ring of bearing；
Light collimation device 81 uses plate-convex lens, lens to be fixed in described fixture, and the axis of lens is sent out with laser instrument
The angle of optical axis measuring light gone out is acute angle, and such as 5 degree, lens plating has is easy to the anti-reflection film that described measurement light passes, convex surface
Back to described laser instrument；
Motor 51, such as the motor driven by modes such as electricity, gas, magnetic, hydraulic pressure, is used for driving described fixture to rotate, makes
Obtain light collimation device to rotate, but do not occur along the displacement measured along light optical path direction.
Embodiment 5:
The structure diagram of the gas analyzing apparatus based on spectral technique of the present embodiment, as different from Example 4:
1. not in use by fixture, light collimation device is directly anchored on the inner ring of bearing, and motor directly drives inner ring to turn
Dynamic, rely on the drivewheel of motor to utilize frictional force drives inner ring；
2. the second support is separately provided, and the outer ring of described bearing is fixed on described second support；The survey that laser instrument sends
Amount light is acute angle through angle between light collimation device, and the axis of optical axis and light collimation device, as 10 degree, 15 degree, 20 degree, 30
Degree etc..
Embodiment 6:
According to embodiments of the present invention 2 analytical equipment and method application examples in laser gas analyzer.
As in figure 2 it is shown, in this application examples, luminous body 2 selects semiconductor laser with tunable；Described support 1 uses circle
Shape sleeve, the external diameter of the one end 12 facing fixture is less (compared with the external diameter of one end facing luminous body of support), but interior
Footpath is relatively big (compared with the internal diameter of one end facing luminous body of support), thus is being internally formed ring-shaped step, and has outer spiral shell
Stricture of vagina, the external diameter of the one end 11 facing luminous body is relatively big, but internal diameter is less；The external diameter bigger one that described luminous body 1 is fixed on support
The end of end；Fixture 6 uses one end to have the circular sleeve of radial component 62, has female thread, in this sleeve outside described
Screw thread mates；Piezoelectric device 3 uses piezoelectric ceramics, is symmetrically dispersed on described ring-shaped step, and the cable of piezoelectric device passes
Support, the amplitude micron dimension of piezoelectric ceramics, resonant frequency is up to hundreds of KHz；Pressure on laser emitting light direction
The side back to step of electrical part is provided with light collimation device 4, uses plate-convex lens, the axis of lens and the optical axis of emergent light
Between angle be zero, lens are coated with is easy to the anti-reflection film that described laser emitting light passes, and convex surface is back to described laser instrument；Elastic component
5 use quality of rubber materials, and such as O, described piezoelectric device, light collimation device and elastic component are in described support with being arranged in order
The inner side of internal diameter smaller portions, is in the light path of laser emitting light；The axial component 61 of fixture is enclosed within described support
The outside of external diameter smaller portions, radial component 62 stops elastic component so that on the direction along laser emitting light, piezoelectricity device
Part, light collimation device and elastic component are compressed between support and fixture.
The light mode that goes out of above-mentioned light source is:
(A1) laser that laser instrument sends is through the optical channel in support；
(A2) emergent light is collimated by plate-convex lens；Piezoelectric ceramics produces displacement so that plate-convex lens translates back and forth, constantly
Ground adjusts the distance (but the angle of the optical axis of laser and lens axis remains as zero) between laser instrument and lens, eliminates laser
The optical noise owing to interfering generation between device and lens
(A3) emergent light after collimation penetrates from fixture.
Embodiment 7:
According to embodiments of the present invention 2 analytical equipment and method application examples in laser gas analyzer, with embodiment 6
Except for the difference that:
1. the internal diameter major part that support has the internal diameter smaller portions facing laser instrument, faces fixture, internal diameter is bigger
The inner side of part has female thread；
Matching with described support, fixture has external screw thread；
2., along on the emergent light direction of laser instrument, elastic component, light collimation device and piezoelectric device are sequentially arranged in fixing
Inside part, and extruded by step and fixture, thus when piezoelectric device has displacement, light collimation device moves back and forth.
Above-described embodiment is only exemplarily to give the situation that luminous body is laser instrument, certainly can also is that other are luminous
Body, such as LED etc..
Claims (10)
1. a gas analyzing apparatus based on spectral technique, it is characterised in that: described gas analyzing apparatus includes:
Light source, described light source sends the measurement light mated with gas to be measured；
Detector, the measurement light after described detector will interact with gas to be measured is converted to the signal of telecommunication, and is sent to
Analyze module；
Voice coil motor, described detector is fixed on described voice coil motor, moves back and forth in light path；
Analyzing module, described analysis module utilizes spectral technique to process the described signal of telecommunication, thus knows the information of gas to be measured.
Gas analyzing apparatus the most according to claim 1, it is characterised in that: described information is concentration, speed or temperature.
Gas analyzing apparatus the most according to claim 1, it is characterised in that: described light source includes:
Luminous body, described luminous body is fixed on support；
Support, described support is used for carrying described luminous body, and support is formed and is suitable to the optics that described luminous body emergent light passes through
Passage；
Fixture, described fixture arranges on the bracket, is suitable to described emergent light and passes；
Light collimation device, described light collimation device is fixed in the light path of described emergent light, is suitable to collimate described emergent light；
Elastic component, described elastic component is arranged on the sidepiece along its axis direction of described light collimation device；
Piezoelectric device, described piezoelectric device and elastic component be separately positioned on described light collimation device along the two of its axis direction
Side, described light collimation device, elastic component and piezoelectric device are constrained between described support and fixture.
Gas analyzing apparatus the most according to claim 1, it is characterised in that: described light source includes:
Luminous body, described luminous body is fixed on support；
First support, described first support is used for carrying described luminous body；
Light collimation device, in the light path of the emergent light that described light collimation device is fixed on described luminous body, collimates described emergent light；
The axis of described light collimation device is acute angle with the angle of the light between centers of described emergent light；
Tumbler, described light collimation device is fixed on described tumbler；
Second support, described tumbler is rotatably arranged on described second support；
Motor, described motor is used for driving described tumbler and light collimation device to rotate.
Gas analyzing apparatus the most according to claim 4, it is characterised in that: described acute angle is less than 30 degree.
Gas analyzing apparatus the most according to claim 4, it is characterised in that: described light collimation device is plate-convex lens, institute
State emergent light and sequentially pass through plane and the convex surface of described lens.
7. according to the gas analyzing apparatus described in claim 3 or 4, it is characterised in that: described luminous body is laser instrument.
Gas analyzing apparatus the most according to claim 1, it is characterised in that: described measurement light and the characteristic spectrum of gas to be measured
Line is corresponding.
9. according to the analysis method for gases of the arbitrary described gas analyzing apparatus of claim 1-8, described analysis method for gases bag
Include following steps:
(A1) light source sends the measurement light mated with gas to be measured；
(A2) measure light to interact with gas to be measured；
(A3) the measurement light after detector will interact with gas to be measured is converted to the signal of telecommunication, and is sent to analyze mould
Block；The detector being fixed on voice coil motor moves back and forth；
(A4) analyzing module utilizes spectral technique to process the described signal of telecommunication, thus knows the information of gas to be measured.
Analysis method for gases the most according to claim 9, it is characterised in that: step (A1) further includes steps of
(B1) emergent light that luminous body sends passes optical channel；
(B2) emergent light is collimated by light collimation device；Piezoelectric device produces displacement, thus promotes described light collimation device to move back
Dynamic；
(B3) emergent light after collimation penetrates from fixture.
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