CN106052939B - Two-dimension flexible shearing stress sensor and its measurement method - Google Patents
Two-dimension flexible shearing stress sensor and its measurement method Download PDFInfo
- Publication number
- CN106052939B CN106052939B CN201610349771.0A CN201610349771A CN106052939B CN 106052939 B CN106052939 B CN 106052939B CN 201610349771 A CN201610349771 A CN 201610349771A CN 106052939 B CN106052939 B CN 106052939B
- Authority
- CN
- China
- Prior art keywords
- hot line
- sub
- shearing force
- hot
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a kind of two-dimension flexible shearing stress sensor and its measurement methods, belong to technical field of electronic devices, including using X made of thermo-sensitive material Ni to hot line and Y-direction hot line, X is formed from the first X to sub- hot line and the 2nd X to sub- hot line to hot line, and Y-direction hot line is made of the sub- hot line of the first Y-direction and the sub- hot line of the second Y-direction；First X is coupled with driving electrodes made of copper to sub- hot line, the 2nd X to the both ends of sub- hot line, the sub- hot line of the first Y-direction, the sub- hot line of the second Y-direction respectively；Underlying substrate is equipped with external electrode made of copper, and each driving electrodes are connected by copper conductor with corresponding external electrode respectively；X is completely covered to hot line, Y-direction hot line and driving electrodes in surface layer substrate, and surface layer substrate does not cover external electrode.Change of fluid resolution ratio in stream field boundary layer of the present invention improves, and can accurately measure the two dimension shearing stress in fluid boundary layer under the conditions of high reynolds number, and be conducive to the array of sensor.
Description
Technical field
The invention belongs to technical field of electronic devices, it is related to a kind of two-dimension flexible shearing stress sensor and its measurement side
Method more particularly to is used to measure the sensor of unmanned plane surface two dimension shearing power.
Background technology
With the hair of the emerging cross discipline and direction such as hydrodynamics, biomedicine, new material technology and sensor technology
Exhibition and fusion, the flexible shear strain gauge that can be accurately measured shear stress in fluid boundary layer has obtained above-mentioned
The attention of area research personnel, and it has been widely applied to the subjects such as vehicle structural mechanics, aerodynamics and machine-building
And industry.
Fluid boundary layer is the flowing thin layer be close to the viscous force of object plane during high reynolds number streams and can not ignore, also referred to as attached face
Layer, since it directly acts on body surface, is found from it, and fluid boundary layer just becomes a weight in hydrodynamics
Want project.Wall surface shear stress be in fluid boundary layer fluid molecule random motion as a result, being fluid molecule microscopic motion
Macro manifestations, while be also reflection boundary layer fluid movement characteristic an important parameter, if standard can be carried out to it
True measurement, then control actively or passively can be imposed to the fluid in boundary layer, so as to improve the power of aircraft
Learn performance.
Fluid movement in boundary layer becomes complicated with the increase of Reynolds number, in low reynolds number boundary layer
Fluid is moved in a manner of laminar flow, and fluid is flowed with small eddy currents in high reynolds number boundary layer, with related field
Fast development, most of boundary layer that we are paid attention to is the boundary layer under high reynolds number, therefore in order to accurately measure height
Fluid distrbution in Reynolds number boundary layer, it is desirable that shearing stress sensor size is small and can measure two dimension shearing power.
China Patent No. is ZL201110374652.8, entitled " two-dimensional vector flexibility temperature-sensitive ultra small scale manufacture strain gauge
And its array and preparation method ", publication date is on June 27th, 2012, discloses and prepares two-dimensional vector flexibility temperature-sensitive ultra small scale manufacture and answer
The method of force snesor and array, and two dimension shearing stress is detected with orthohormbic structure arrangement hot line, simplify heat shear stress biography
The preparation flow of sensor.China Patent No. is ZL201210050586.3, the entitled " three-dimensional based on flexible MEMS technology
Fluid stress sensor and its array " publication date is on July 4th, 2012, discloses and measures positive pressure with capacitance pressure transducer,
Power is detected two dimension shearing stress around the hot line arranged with orthogonal form in its surrounding, to realize the measurement of three-dimensional force, and adopted
Reduce influence of the conducting wire to hot line with the method that the conducting wire back of the body connects.
Above-mentioned two patent is all made of orthohormbic structure and arranges hot line to detect two dimension shearing stress, using this structure meeting
Inevitably at double in increasing group hot line spacing reducing the hot crosstalk between hot line.Fluid boundary layer under low reynolds number
Interior, flow field is moved with layer flow mode, and the sensor can accurately measure two dimension shearing stress.But in the fluid of high reynolds number
In boundary layer, fluid is flowed with small eddy currents, and high numerical value shearing force is frequently found in the place that small whirlpool has a common boundary, and such as makes
With the orthohormbic structure sensor measurement of above-mentioned big spacing, can there is a problem of that resolution ratio is low and two dimension shearing power measured value is less than normal.
Invention content
In order to achieve the above object, the present invention provides a kind of two-dimension flexible shearing stress sensor, is based on MEMS technology pair
The shearing stress sensor for claiming structure, solving existing sensor, two dimension shearing stress is surveyed in fluid boundary layer under high reynolds number
Measure inaccurate problem.
It is another object of the invention to provide a kind of methods that two-dimension flexible shearing stress sensor measures shear stress.
The technical solution adopted in the present invention is a kind of two-dimension flexible shearing stress sensor, including uses thermo-sensitive material
X made of Ni to hot line and using Y-direction hot line made of thermo-sensitive material Ni, X to hot line from the first X to sub- hot line and the 2nd X to
Sub- hot line composition, Y-direction hot line are made of the sub- hot line of the first Y-direction and the sub- hot line of the second Y-direction；First X is to sub- hot line, the 2nd X to son
Hot line, the sub- hot line of the first Y-direction, the sub- hot line of the second Y-direction both ends coupled respectively with driving electrodes made of copper；Driving electrodes are arranged
8, underlying substrate is equipped with external electrode made of copper, and external electrode is arranged 8, and each driving electrodes pass through copper conductor respectively
It is connected with corresponding external electrode；X is completely covered to hot line, Y-direction hot line and driving electrodes in surface layer substrate, and surface layer substrate does not cover
External electrode.
The present invention is further characterized in that further, the first X is warm to sub- hot line, the 2nd X to sub- hot line, the first Y-direction
By two, mutually perpendicular hot line forms at endpoint respectively for line, the sub- hot line of the second Y-direction, and the first X is to sub- hot line and the 2nd X to son
Hot line is symmetrical about Y-axis；The sub- hot line of first Y-direction and the sub- hot line of the second Y-direction are symmetrical about X-axis；Adjacent sub- hot line spacing is identical；The
One X is identical to sub- hot line, the 2nd X to sub- hot line, the sub- hot line of the first Y-direction, the structure size of the sub- hot line of the second Y-direction.
Further, the first X is to sub- hot line, the 2nd X to sub- hot line, the ruler of the sub- hot line of the first Y-direction, the sub- hot line of the second Y-direction
It is very little be long 500 μm, it is 30 μm wide, 75 μm thick, the first X to the spacing of sub- hot line and the sub- hot line of the first Y-direction be 30 μm, the first X to
The spacing of sub- hot line and the sub- hot line of the second Y-direction be 30 μm, the 2nd X to the spacing of sub- hot line and the first Y-direction hot line be 30 μm, second
Spacing of the X to sub- hot line and with the sub- hot line of the second Y-direction is 30 μm.
Further, 200 μm of the length of driving electrodes, 100 μm wide.
Further, surface layer substrate and underlying substrate shape are square, and the area of surface layer substrate is less than underlying substrate, table
The thickness of layer substrate is less than underlying substrate.
Further, the size of underlying substrate is long 3cm × wide 3cm, and thickness is 75 μm, and the size of surface layer substrate is length
1cm × wide 1cm, thickness are 50 μm, and underlying substrate is made with surface layer substrate using polyimides.
Further, the size of driving electrodes is that long 200 μ ms are 200 μm wide, and thickness is 100 μm, the size of external electrode
For long 2mm × wide 2mm, thickness is 100 μm；The line width of copper conductor is 100 μm.
Using a kind of above-mentioned method that two-dimension flexible shearing stress sensor measures shear stress, specifically according to the following steps
It carries out：
Step 1, it drives X to hot line and Y-direction hot line with 30mA constant-current sources, X is made to be in hot line and Y-direction hot line than environment temperature
Spend high 60 degree of constant temperature mode；
Step 2, when sensor is by shearing force F along X-axis positive direction, the first X can quilt to the partial heat of sub- hot line
Fluid is taken away, and by Y-direction hot line, is eventually transferred to the 2nd X to sub- hot line；Compare the first X to sub- hot line and the 2nd X to sub- hot line
Temperature, if the first X to the temperature of sub- hot line be higher than temperature of the 2nd X to sub- hot line, illustrate shearing force F direction be from
First X is to sub- hot line to the 2nd X to sub- hot line；Otherwise the direction of shearing force F is hot to the first X to son from the 2nd X to sub- hot line
Line；
Step 3, if the direction of the shearing force F surveyed through step 2 is from the first X to sub- hot line to the 2nd X to sub- hot line, then
Provide the first X to sub- hot line be windward openning hot line, if the direction of the shearing force F surveyed through step 2 is from the 2nd X to sub- hot line
To the first X to sub- hot line, then provide the 2nd X to sub- hot line be windward openning hot line；Windward before applying shearing force F is measured respectively
The temperature T of openning hot line1With the windward openning hot line temperature T after application shearing force F2, by temperature T1And T2Substitute into formula I2R=
(T1-T2)[A(ρF)1/3+ B] shearing force F can be found out；Wherein I is constant current source current, and R is the initial resistance value of uptake hot line, and ρ is
Fluid density, constant A and B are the coefficient that calibration experiment determines.
Step 4, when sensor is by shearing force F along Y-axis positive direction, the partial heat of the sub- hot line of the first Y-direction can quilt
Fluid is taken away, and by X to hot line, is eventually transferred to the sub- hot line of the second Y-direction；By comparing the sub- hot line of the first Y-direction and the second Y-direction
The temperature of hot line illustrates the direction of shearing force F if the temperature of the sub- hot line of the first Y-direction is higher than the temperature of the sub- hot line of the second Y-direction
For from the sub- hot line of the first Y-direction to the sub- hot line of the second Y-direction；Otherwise the direction of shearing force F is from the sub- hot line of the second Y-direction to the first Y-direction
Sub- hot line；
Step 5, if the direction of the shearing force F surveyed through step 4 is from the sub- hot line of the first Y-direction to the sub- hot line of the second Y-direction, then
Provide that the sub- hot line of the first Y-direction is windward openning hot line, if the direction of the shearing force F surveyed through step 4 is from the sub- hot line of the second Y-direction
To the sub- hot line of the first Y-direction, then provide that the sub- hot line of the second Y-direction is windward openning hot line；Windward before applying shearing force F is measured respectively
The temperature T of openning hot line1With the windward openning hot line temperature T after application shearing force F2, by temperature T1And T2Substitute into formula I2R=
(T1-T2)[A(ρF)1/3+ B] shearing force F can be found out；Wherein I is constant current source current, and R is the initial resistance value of uptake hot line, and ρ is
Fluid density, constant A and B are the coefficient that calibration experiment determines.
The beneficial effects of the invention are as follows：The present invention transmits effect using symmetrical structure arrangement hot line and using the heat between hot line
It answers, reduces the size of sensor.Change of fluid resolution ratio in stream field boundary layer improves, and can accurately measure high Reynolds
Two dimension shearing stress under said conditions in fluid boundary layer, and be conducive to the array of sensor.
The present invention makes driving electrodes, external electrode and the conducting wire for connecting driving electrodes and external electrode using FPC, simplifies
The production process of sensor.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Obtain other attached drawings according to these attached drawings.
Fig. 1 is the vertical view of schematic structural view of the invention.
Fig. 2 is the longitudinal sectional drawing of schematic structural view of the invention.
Fig. 3 be in Fig. 1 X to hot line, the structural schematic diagram of Y-direction hot line.
Fig. 4 is the driving motor schematic diagram of the present invention.
Fig. 5 is the operation principle schematic diagram of the present invention.
In figure, 1.X is to hot line, and 11. the oneth X are to sub- hot line, and 12. the 2nd X are to sub- hot line, and 2.Y is to hot line, 21. first Y-directions
Sub- hot line, the 22. second sub- hot lines of Y-direction, 3. driving electrodes, 4. external electrodes, 5. surface layer substrates, 6. underlying substrates, 7. copper conductors.
Specific implementation mode
The following describes the present invention in detail with reference to the accompanying drawings and specific embodiments.
The present invention technical principle be：
Thermo-sensitive material (such as Ni, Pt, polysilicon etc.) has temperature resistance characteristic.When the temperature change of thermo-sensitive material, resistance value
Also can change.
The present invention selects heat-insulated high-temperature flexible material appropriate as underlying substrate 6 using thermo-sensitive material this characteristic,
When sensor loads two dimension shearing stress, the temperature of thermo-sensitive material changes, then change in resistance.It is defeated according to thermo-sensitive material
The variation for going out resistance, to measure two dimension shearing stress.
Two-dimension flexible shearing stress sensor of the present invention, structure is as shown in Figs. 1-3, including X is to hot line 1, Y-direction hot line 2, X
It is formed to sub- hot line 12 to hot line 1 from the first X to sub- hot line 11 and the 2nd X, Y-direction hot line 2 is by the sub- hot line 21 and second of the first Y-direction
The sub- hot line 22 of Y-direction forms, and the first X is to sub- hot line 11, the 2nd X to sub- hot line 12, the sub- hot line 21 of the first Y-direction, the sub- hot line of the second Y-direction
22 respectively by 500 μm two long, 30 μm wide, thick 75 μm and mutually perpendicular hot line forms at endpoint, adjacent sub- hot line spacing
It is identical, and spacing is 30 μm；First X is symmetrical about Y-axis to sub- hot line 11 and the 2nd X to sub- hot line 12, the sub- hot line of the first Y-direction 21
It is symmetrical about X-axis with the sub- hot line 22 of the second Y-direction；First X to sub- hot line 11, the 2nd X to sub- hot line 12, the sub- hot line 21 of the first Y-direction,
The sub- hot line of second Y-direction 22 is all made of thermo-sensitive material Ni.
Driving electrodes 3 and external electrode 4 are made of conductive material Cu, 200 μm of the length of driving electrodes 3,100 μm wide.
It is just that surface layer substrate 5 and underlying substrate 6, which use high temperature resistant heat insulation flexible material polyimides of good performance, shape,
Rectangular, X can be completely covered to hot line 1, Y-direction hot line 2 and driving electrodes 3 in surface layer substrate 5, cannot cover external electrode 4；Surface layer
The area of substrate 5 is less than underlying substrate 6, and the thickness of surface layer substrate 5 is less than underlying substrate 6；The size of underlying substrate 6 is long 3cm
× wide 3cm, thickness are 75 μm, and the size of surface layer substrate 5 is long 1cm × wide 1cm, and thickness is 50 μm.
First X is to sub- hot line 11, the 2nd X to the both ends of the sub- hot line of sub- hot line 12, the sub- hot line 21 of the first Y-direction, the second Y-direction 22
It is coupled respectively with driving electrodes 3, the copper conductor 7 for being 100 μm with line width between driving electrodes 3 and external electrode 4 connects.
As shown in figure 4, the present invention uses FPC techniques in the production process, driving electricity is directly produced in underlying substrate 6
Pole 3 and external electrode 4, simplify the production process of shearing stress sensor.Driving electrodes 3 and external electrode 4 are made by Cu, drive
The size of moving electrode 3 is that long 200 μ ms are 200 μm wide, and thickness is 100 μm, and the size of external electrode 4 is long 2mm × wide 2mm, thick
Degree is 100 μm.
If the known fluid in the fluid boundary layer under high reynolds number is flowed with eddy currents, but it is very small away from
From interior, fluid can still be seen for linear motion.As shown in fig. 5, it is assumed that fluid along X to moving, generate one along X-axis positive direction
Shearing force F.X is in constant temperature mode to hot line 1 and Y-direction hot line 2,60 degree higher than environment temperature.
The sensor of the invention course of work is divided into the measurement of shearing force size and shearing force orientation measurement, has mainly used heat
Heat transfer effect between the thermo-resistive effect and hot line of quick material.
The method for measuring shear stress using inventive sensor, specifically follows the steps below：
Step 1, it drives X to hot line 1 and Y-direction hot line 2 with 30mA constant-current sources, X is made to be in hot line 1 and Y-direction hot line 2 than ring
High 60 degree of the constant temperature mode of border temperature；
Step 2, when sensor is by shearing force F along X-axis positive direction, partial heat meetings of the first X to sub- hot line 11
It is carried away by the flow, by Y-direction hot line 2, is eventually transferred to the 2nd X to sub- hot line 12；Compare the first X to sub- hot line 11 and the 2nd X
Illustrate to cut if the first X is higher than temperature of the 2nd X to sub- hot line 12 to the temperature of sub- hot line 11 to the temperature of sub- hot line 12
The direction of shear force F is from the first X to sub- hot line 11 to the 2nd X to sub- hot line 12；Otherwise the direction of shearing force F be from the 2nd X to
Sub- hot line 12 is to the first X to sub- hot line 11；
Step 3, if the direction of the shearing force F surveyed through step 2 is from the first X to sub- hot line 11 to the 2nd X to sub- hot line
12, then provide the first X to sub- hot line 11 be windward openning hot line, if the direction of the shearing force F surveyed through step 2 is from the 2nd X
To sub- hot line 12 to the first X to sub- hot line 11, then provide the 2nd X to sub- hot line 12 be windward openning hot line；It measures and applies respectively
Add the temperature T of windward openning hot line before shearing force F1With the windward openning hot line temperature T after application shearing force F2, by temperature T1With
T2Substitute into formula I2R=(T1-T2)[A(ρF)1/3+ B] shearing force F can be found out；Wherein I is constant current source current, and R is uptake heat
The initial resistance value of line, ρ are fluid density, and constant A and B are the coefficient that calibration experiment determines；
Step 4, when sensor is by shearing force F along Y-axis positive direction, the partial heat meeting of the sub- hot line of the first Y-direction 21
It is carried away by the flow, by X to hot line 1, is eventually transferred to the sub- hot line of the second Y-direction 22；By comparing the sub- hot line 21 of the first Y-direction and the
The temperature of the sub- hot line of two Y-directions 22, if the temperature of the sub- hot line of the first Y-direction 21 illustrates higher than the temperature of the sub- hot line of the second Y-direction 22
The direction of shearing force F is from the sub- hot line of sub- the 21 to the second Y-direction of hot line of the first Y-direction 22；Otherwise the direction of shearing force F is from the 2nd Y
To the sub- hot line of the 22 to the first Y-direction of sub- hot line 21；
Step 5, if the direction of the shearing force F surveyed through step 4 is from the sub- hot line of sub- the 21 to the second Y-direction of hot line of the first Y-direction
22, then provide that the sub- hot line 21 of the first Y-direction is windward openning hot line, if the direction of the shearing force F surveyed through step 4 is from the 2nd Y
To the sub- hot line 21 of the 22 to the first Y-direction of sub- hot line, then provide that the sub- hot line 22 of the second Y-direction is windward openning hot line；It measures and applies respectively
Add the temperature T of windward openning hot line before shearing force F1With the windward openning hot line temperature T after application shearing force F2, by temperature T1With
T2Substitute into formula I2R=(T1-T2)[A(ρF)1/3+ B] shearing force F can be found out；Wherein I is constant current source current, and R is uptake heat
The initial resistance value of line, ρ are fluid density, and constant A and B are the coefficient that calibration experiment determines.
Sensor of the invention has measurement range big, and high sensitivity the advantages of being easily integrated, can measure Gao Lei in real time
Two dimension shearing stress in fluid boundary layer under promise number can be used for measuring unmanned plane surface two dimension shearing stress.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the scope of the present invention.It is all
Any modification, equivalent replacement, improvement and so within the spirit and principles in the present invention, are all contained in protection scope of the present invention
It is interior.
Claims (6)
1. a kind of two-dimension flexible shearing stress sensor, which is characterized in that including using X made of thermo-sensitive material Ni to hot line
(1) and using Y-direction hot line (2) made of thermo-sensitive material Ni, the X is to hot line (1) from the first X to sub- hot line (11) and the 2nd X
It is formed to sub- hot line (12), the Y-direction hot line (2) is made of the sub- hot line of the first Y-direction (21) and the sub- hot line of the second Y-direction (22)；The
One X divides to sub- hot line (11), the 2nd X to the both ends of sub- hot line (12), the sub- hot line of the first Y-direction (21), the sub- hot line of the second Y-direction (22)
It is not coupled with driving electrodes made of copper (3)；Driving electrodes (3) are arranged 8, and underlying substrate (6) is equipped with external made of copper
Electrode (4), external electrode (4) are arranged 8, and each driving electrodes (3) pass through copper conductor (7) and corresponding external electrode respectively
(4) it connects；X is completely covered to hot line (1), Y-direction hot line (2) and the driving electrodes (3), surface layer substrate (5) in surface layer substrate (5)
The external electrode (4) is not covered；First X is to sub- hot line (11), the 2nd X to sub- hot line (12), the sub- hot line of the first Y-direction
(21), by two, mutually perpendicular hot line forms the sub- hot line of the second Y-direction (22) at endpoint respectively, and the first X is to sub- hot line (11)
It is symmetrical about Y-axis to sub- hot line (12) with the 2nd X；The sub- hot line of first Y-direction (21) and the sub- hot line of the second Y-direction (22) are about X-axis pair
Claim；Adjacent sub- hot line spacing is identical；First X to sub- hot line (11), the 2nd X to sub- hot line (12), the sub- hot line of the first Y-direction (21),
The structure size of the sub- hot line of second Y-direction (22) is identical；First X is to sub- hot line (11), the 2nd X to sub- hot line (12), the first Y
Size to sub- hot line (21), the sub- hot line of the second Y-direction (22) is long 500 μm, 30 μm wide, 75 μm thick, and the first X is to sub- hot line
(11) it is 30 μm with the spacing of the sub- hot line of the first Y-direction (21), the first X is between sub- hot line (11) and the sub- hot line of the second Y-direction (22)
Away from being 30 μm, the 2nd X to the spacing of sub- hot line (12) and the first Y-direction hot line (21) be 30 μm, the 2nd X to sub- hot line (12) and with
The spacing of the sub- hot line of second Y-direction (22) is 30 μm.
2. a kind of two-dimension flexible shearing stress sensor according to claim 1, which is characterized in that the driving electrodes
(3) 200 μm of length, 100 μm wide.
3. a kind of two-dimension flexible shearing stress sensor according to claim 1, which is characterized in that the surface layer substrate
(5) it is square with underlying substrate (6) shape, the area of surface layer substrate (5) is less than underlying substrate (6), the thickness of surface layer substrate (5)
Degree is less than underlying substrate (6).
4. a kind of two-dimension flexible shearing stress sensor according to claim 3, which is characterized in that the underlying substrate
(6) size is long 3cm × wide 3cm, and thickness is 75 μm, and the size of surface layer substrate (5) is long 1cm × wide 1cm, and thickness is 50 μ
M, the underlying substrate (6) are made with surface layer substrate (5) using polyimides.
5. a kind of two-dimension flexible shearing stress sensor according to claim 1, which is characterized in that the driving electrodes
(3) size is that long 200 μ ms are 200 μm wide, and thickness is 100 μm, and the size of the external electrode (4) is long 2mm × wide 2mm,
Thickness is 100 μm；The line width of copper conductor (7) is 100 μm.
6. special using a kind of method that two-dimension flexible shearing stress sensor measures shear stress as described in claim 1
Sign is, specifically follows the steps below：
Step 1, it drives X to hot line (1) and Y-direction hot line (2) with 30mA constant-current sources, X is made to be in hot line (1) and Y-direction hot line (2)
60 degree of constant temperature mode higher than environment temperature；
Step 2, when sensor is by shearing force F along X-axis positive direction, the first X can quilt to the partial heat of sub- hot line (11)
Fluid is taken away, and by Y-direction hot line (2), is eventually transferred to the 2nd X to sub- hot line (12)；Compare the first X to sub- hot line (11) and
Temperature from two X to sub- hot line (12), if the first X to the temperature of sub- hot line (11) be higher than temperature of the 2nd X to sub- hot line (12),
Then illustrate that the direction of shearing force F is from the first X to sub- hot line (11) to the 2nd X to sub- hot line (12)；Otherwise the direction of shearing force F
For from the 2nd X to sub- hot line (12) to the first X to sub- hot line (11)；
Step 3, if the direction of the shearing force F surveyed through step 2 is from the first X to sub- hot line (11) to the 2nd X to sub- hot line
(12), then the first X of regulation to sub- hot line (11) be windward openning hot line, if the direction of the shearing force F surveyed through step 2 is from the
Two X to sub- hot line (12) to the first X to sub- hot line (11), then provide the 2nd X to sub- hot line (12) be windward openning hot line；Respectively
Measure the temperature T of windward openning hot line before applying shearing force F1With the windward openning hot line temperature T after application shearing force F2, will
Temperature T1And T2Substitute into formula I2R=(T1-T2)[A(ρF)1/3+ B] shearing force F can be found out；Wherein I is constant current source current, and R is
The initial resistance value of uptake hot line, ρ are fluid density, and constant A and B are the coefficient that calibration experiment determines；
Step 4, when sensor is by shearing force F along Y-axis positive direction, the partial heat of the sub- hot line of the first Y-direction (21) can quilt
Fluid is taken away, and by X to hot line (1), is eventually transferred to the sub- hot line of the second Y-direction (22)；By comparing the sub- hot line of the first Y-direction (21)
With the temperature of the sub- hot line of the second Y-direction (22), if the temperature of the sub- hot line of the first Y-direction (21) is higher than the sub- hot line of the second Y-direction (22)
Temperature then illustrates that the direction of shearing force F is from the sub- hot line of the first Y-direction (21) to the sub- hot line of the second Y-direction (22)；Otherwise shearing force F
Direction be from the sub- hot line of the second Y-direction (22) to the sub- hot line of the first Y-direction (21)；
Step 5, if the direction of the shearing force F surveyed through step 4 is from the sub- hot line of the first Y-direction (21) to the sub- hot line of the second Y-direction
(22), then provide that the sub- hot line of the first Y-direction (21) is windward openning hot line, if the direction of the shearing force F surveyed through step 4 is from the
The sub- hot line of two Y-directions (22) then provides that the sub- hot line of the second Y-direction (22) is windward openning hot line to the sub- hot line of the first Y-direction (21)；Respectively
Measure the temperature T of windward openning hot line before applying shearing force F1With the windward openning hot line temperature T after application shearing force F2, will
Temperature T1And T2Substitute into formula I2R=(T1-T2)[A(ρF)1/3+ B] shearing force F can be found out；Wherein I is constant current source current, and R is
The initial resistance value of uptake hot line, ρ are fluid density, and constant A and B are the coefficient that calibration experiment determines.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610349771.0A CN106052939B (en) | 2016-05-24 | 2016-05-24 | Two-dimension flexible shearing stress sensor and its measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610349771.0A CN106052939B (en) | 2016-05-24 | 2016-05-24 | Two-dimension flexible shearing stress sensor and its measurement method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106052939A CN106052939A (en) | 2016-10-26 |
| CN106052939B true CN106052939B (en) | 2018-09-07 |
Family
ID=57174357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610349771.0A Active CN106052939B (en) | 2016-05-24 | 2016-05-24 | Two-dimension flexible shearing stress sensor and its measurement method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106052939B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111351609A (en) * | 2020-03-16 | 2020-06-30 | 大连理工大学 | Method for measuring wall shear stress vector |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101059528A (en) * | 2007-05-11 | 2007-10-24 | 东南大学 | Cross structure two-D wind speed wind direction sensor and its preparation method |
| CN101520351A (en) * | 2009-03-27 | 2009-09-02 | 南京理工大学 | Heat-variable surface shearing stress sensor |
| CN102519657A (en) * | 2011-11-22 | 2012-06-27 | 上海交通大学 | Two-dimensional vector flexible thermo-sensitive micro-shearing stress sensor, and array and preparation method thereof |
| CN102539029A (en) * | 2012-02-29 | 2012-07-04 | 上海交通大学 | Three-dimensional fluid stress sensor based on flexible MEMS (microelectromechanical system) technology and array thereof |
| CN103308223A (en) * | 2013-05-20 | 2013-09-18 | 西北工业大学 | Device and method for testing wall shear stress based on flexible heat-sensitive sensors |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1634052A4 (en) * | 2003-06-06 | 2008-04-30 | Univ Illinois | Sensor chip and apparatus for tactile and/or flow |
| US7367237B2 (en) * | 2004-08-12 | 2008-05-06 | University Of Southern California | MEMS vascular sensor |
-
2016
- 2016-05-24 CN CN201610349771.0A patent/CN106052939B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101059528A (en) * | 2007-05-11 | 2007-10-24 | 东南大学 | Cross structure two-D wind speed wind direction sensor and its preparation method |
| CN101520351A (en) * | 2009-03-27 | 2009-09-02 | 南京理工大学 | Heat-variable surface shearing stress sensor |
| CN102519657A (en) * | 2011-11-22 | 2012-06-27 | 上海交通大学 | Two-dimensional vector flexible thermo-sensitive micro-shearing stress sensor, and array and preparation method thereof |
| CN102539029A (en) * | 2012-02-29 | 2012-07-04 | 上海交通大学 | Three-dimensional fluid stress sensor based on flexible MEMS (microelectromechanical system) technology and array thereof |
| CN103308223A (en) * | 2013-05-20 | 2013-09-18 | 西北工业大学 | Device and method for testing wall shear stress based on flexible heat-sensitive sensors |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106052939A (en) | 2016-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Jing et al. | Self-powered triboelectric velocity sensor for dual-mode sensing of rectified linear and rotary motions | |
| CN102980910B (en) | Heat conduction material property testing equipment | |
| CN102539029B (en) | Three-dimensional fluid stress sensor based on flexible MEMS (microelectromechanical system) technology and array thereof | |
| Zhang et al. | Additive adsorption and interfacial characteristics of nucleate pool boiling in aqueous surfactant solutions | |
| Chen et al. | Flexible piezoresistive three-dimensional force sensor based on interlocked structures | |
| CN103424214B (en) | Flexible capacitive touch sensor and manufacturing method of flexible capacitive unit of flexible capacitive touch sensor | |
| Agarwala et al. | Aerosol jet printed strain sensor: Simulation studies analyzing the effect of dimension and design on performance (September 2018) | |
| CN105606291A (en) | Thermal type pressure sensor and flexible electronic skin | |
| CN108332794A (en) | Biomimetic tactile system and multi-function robot | |
| Choi et al. | Fabrication of microchannel with 60 electrodes and resistance measurement | |
| CN106052939B (en) | Two-dimension flexible shearing stress sensor and its measurement method | |
| CN111721802B (en) | Comprehensive measuring device and method for thermal and electrical physical properties of two-dimensional material | |
| CN106841328B (en) | A kind of coplanar capacitance formula polymer molecule orientation measurement means and method | |
| Bonnier et al. | On the density structure of far-wake vortices in a stratified fluid | |
| Gao et al. | Inkjet‐printed iontronics for transparent, elastic, and strain‐insensitive touch sensing matrix | |
| JP2010217134A (en) | Method and device for measuring main axis electric resistivity of two-dimensional and three-dimensional anisotropic substances by multipoint voltage-current probe method | |
| Liu et al. | Touch position identification based on a flexible array-less supercapacitive tactile sensor | |
| Borghetti et al. | Temperature influence on Ti3C2Tx lines printed by aerosol jet printing | |
| CN103063331A (en) | Simple-structure two-dimensional matrix sensor using soft induction materials | |
| Hor et al. | Electrode configuration study for three-dimensional imaging of on-chip ECT | |
| Todoroki et al. | Simple electric-voltage-change-analysis method for delamination of thin CFRP laminates using anisotropic electric potential function | |
| Dong et al. | Development of single drive electrode electrical resistance tomography system | |
| Leoni et al. | Analysis and Development Technique of a Fully 3-D-Printed Differential Capacitive Anemometric Sensor | |
| Diatezo et al. | Development and Optimization of 3D-Printed Flexible Electronic Coatings: A New Generation of Smart Heating Fabrics for Automobile Applications | |
| Beutel et al. | Manufacturing of flexible micro hot-film probes for aeronautical purposes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |