CN106052607B - The standard and application method of multisensor measuring machine coordinate unification and precision verification - Google Patents
The standard and application method of multisensor measuring machine coordinate unification and precision verification Download PDFInfo
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- CN106052607B CN106052607B CN201610496534.7A CN201610496534A CN106052607B CN 106052607 B CN106052607 B CN 106052607B CN 201610496534 A CN201610496534 A CN 201610496534A CN 106052607 B CN106052607 B CN 106052607B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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Abstract
The standard and application method of multisensor measuring machine coordinate unification and precision verification, standard include the different calibration device of pedestal height identical with 2 or more structures being fixed on pedestal.Method is to carry out coordinate unification calibration using multisensor of any one calibration device in standard to combined type coordinate measuring machine；And be detection to the combined type coordinate measuring machine measurement accuracy based on imaging sensor, touch sensor and non-contact displacement sensor, the coordinate unification two-by-two or three's coordinate unification of touch sensor, imaging sensor, non-contact displacement sensor can be achieved in the present invention.And measurement accuracy is examined and determine in measuring machine global measuring space, and it is simple to operate, it demarcates high-efficient.Imaging sensor is Polaroid to frustum tip circle, and touch sensor two dimension surveys circle, reduces the influence that multi-dimensional movement is brought into.The standard being made of 2 above-described calibration devices, suitable for the global measuring space of high-precision duplex measurement machine or the precision verification in local measurement space.
Description
Technical field
The present invention relates to a kind of coordinate unifications and precision verification standard.More particularly to a kind of collection imaging sensor, connect
The multisensor measuring machine coordinate unifications of the multiple sensors such as touch sensor and non-contact displacement sensor and precision verification
Standard and application method.
Background technique
Coordinate measuring machine is the important means of workpiece size measurement, is widely applied in multiple industries.Currently, due to workpiece
More precise treatment, specialization, structure is also more exquisite complicated, and traditional contact single-sensor is difficult to meet in many cases
The demand of measurement.Multisensor duplex measurement machine can be realized previous single sensor and be difficult to the measurement work completed.By image
Multiple sensors such as sensor, touch sensor and non-contact displacement sensor etc. are integrated on the same measuring machine, can
It realizes different characteristic, the competitive type of size, cooperation type and complementary type measurement, is optimal the purpose of measurement.Such as: utilize image
The diameter for measuring micropore utilizes the free form surface etc. of non-contact displacement sensor measurement camera lens.
The duplex measurement for realizing multisensor needs to carry out multiple sensors the unification of coordinate, i.e., by multiple coordinate systems
It is unified to arrive under the same coordinate system.The usually material standard device conduct with certain geometrical characteristic or certain several geometrical characteristic combination
Multisensor coordinate merges the medium of (registration), such as the standard ball that traditional coordinate machine examination timing institute longest uses.It is being used only
On the measuring machine of single touch sensor, very good effect is shown using standard ball as material standard device, widely industry receives.
Theoretically, touch sensor takes a little in many places in standard ball, can measure the three-dimensional coordinate of the centre of sphere；Imaging sensor measures
The equatorial circle of standard ball can solve centre of sphere two-dimensional coordinate；The zenith pole of non-contact range sensor capture standard ball, can also
Know centre of sphere two-dimensional coordinate.But when required precision is higher, as submicron order high-precision duplex measurement in, how will be multiple
Under the different coordinates unification to the same coordinate system of sensor, above-mentioned conventional method Shortcomings.With non-contact Distance-sensing
For device captures zenith pole, power limit is differentiated by range sensor, sensor obtains pole, when numerical value no longer changes,
X --- a corresponding not unique point, a region on Y plane.For another example, imaging sensor is in standard ball equatorial circle
When upper sampling site, very high request is proposed to light source lighting quality.In addition, the processing of sphere needs special process, when needs and other objects
In conjunction with or reprocessing when all there is technology difficulty.
In submicron order duplex measurement how by the high-precision unification of the different coordinates of multiple sensors to same
In coordinate system, to realize the high-acruracy survey of measuring machine；How conventional contact coordinate measuring machine used in standard ball is solved
Unworthiness in multisensor coordinate unification；How to examine and determine the multiple problems of measurement accuracy of combined type measuring machine, etc. needs
It solves.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of multisensor measuring machine coordinate unification and precision verifications
Standard and application method.
The technical scheme adopted by the invention is that: a kind of standard of multisensor measuring machine coordinate unification and precision verification
Device is the combined type coordinate measuring machine for integrating imaging sensor, touch sensor and non-contact displacement sensor
Calibration, which is characterized in that include the different calibration of pedestal height identical with 2 or more structures being fixed on pedestal
Device.
It is a kind of using the standard of multisensor measuring machine coordinate unification and precision verification to combined type coordinate measuring machine
Scaling method carries out coordinate unification mark using multisensor of any one calibration device in standard to combined type coordinate measuring machine
Fixed, the calibration includes the following steps:
1) imaging sensor, touch sensor and non-contact displacement sensor is respectively adopted to measure calibration device；
Wherein: the measurement of imaging sensor includes:
(1) frustum of a cone upper surface of any one calibration device in imaging sensor V alignment criteria device is focused, is focused
The frustum of a cone upper surface of calibration device is in the visual field of imaging sensor V after clear；
(2) round edge circle of calibration device frustum of a cone upper surface is obtained by imaging sensor；
(3) center of circle of frustum of a cone upper surface is obtained by round edge circle；
(4) center of circle for obtaining step is as position of the imaging sensor on combined type coordinate measuring machine or coordinate points
V0；
The measurement of touch sensor includes:
(1) using multiple points of the touch sensor measurement same cross-sectional periphery of cylindrical body；
(2) center of circle in section, position of the center of circle as touch sensor on combined type coordinate measuring machine are extracted
Or coordinate points P0；
The measurement of non-contact displacement sensor includes:
(1) frustum of a cone is scanned with Y-direction in X direction respectively using non-contact displacement sensor；
(2) center of the symmetrical centre or symmetry axis of the frustum of a cone as frustum of a cone upper surface is found out according to scanning result；
(3) position using the center of frustum of a cone upper surface as non-contact displacement sensor on combined type coordinate measuring machine
Or coordinate points L0。
2) height Zp is obtained using the upper surface of touch sensor measurement cylinder；
3) height Z is obtained using the upper surface of the non-contact displacement sensor measurement frustum of a conel；
4) position of imaging sensor or coordinate points V under the X/Y plane of the same coordinate system are found out0, touch sensor
Position or coordinate points P0Position or coordinate points L with non-contact displacement sensor0Between difference and cylinder upper surface it is high
Spend the upper surface height Z of Zp and the frustum of a conelDifference, to obtain imaging sensor, touch sensor and non-contact displacement pass
The positional relationship of sensor completes imaging sensor, touch sensor and the triangular coordinate unification of non-contact displacement sensor.
It is a kind of using the standard of multisensor measuring machine coordinate unification and precision verification to combined type coordinate measuring machine
Accuracy checking method is surveyed to the combined type coordinate based on imaging sensor, touch sensor and non-contact displacement sensor
The detection of amount machine measurement accuracy, in which:
Measurement accuracy detection based on imaging sensor includes the following steps:
1) frustum of a cone upper surface of any one calibration device in imaging sensor V alignment criteria device is focused, is focused
The frustum of a cone upper surface of calibration device is in the visual field of imaging sensor V after clear；
2) round edge circle of the frustum of a cone upper surface of the calibration device is obtained by imaging sensor V；
3) center of circle of the frustum of a cone upper surface of the calibration device is obtained by round edge circle；
4) center of circle that step 1)~step 3) obtains the upper surface of the frustum of a cone of other calibration devices in standard respectively is repeated；
5) solve every two calibration device frustum of a cone upper surface between center of circle center away from, and in used standard
Given value between the frustum of a cone upper surface of corresponding two calibration devices asks difference to obtain difference, and the difference is to be passed based on image
The measurement error of the combined type coordinate measuring machine of sensor.
Measurement accuracy detection based on touch sensor includes the following steps:
1) cylindrical body of each calibration device in touch sensor difference extraction standard device X, Y-direction in setting regions are used
Central coordinate of circle；
2) according to the central coordinate of circle of obtained each calibration device obtain the center between every two calibration device away from；
3) by the center between every two calibration device described in step 2) away from in used standard corresponding two
Between a calibration device center away from given value ask poor, obtain difference, complete to survey the combined type coordinate based on touch sensor
Amount machine in setting regions X, Y-direction precision verification；
4) top surface of the cylindrical body of each calibration device in setting regions internal standard device is measured respectively using touch sensor
ZX, obtain the height measurements Zp of the cylindrical body of each calibration device；
5) circle of the height measurements Zp of the cylindrical body for each calibration device for obtaining step 4) and each calibration device in standard
The top surface known altitude value of cylinder asks poor, obtains Z-direction measurement error, completes to the combined type coordinate based on touch sensor
Precision verification of the measuring machine in setting regions Z-direction.
Measurement accuracy detection based on non-contact displacement sensor includes the following steps:
1) using the apical side height Z of the cylindrical body of each calibration device in non-contact displacement sensor L difference measurement standard deviceX,
Obtain the height measurements Z of the cylindrical body of each calibration devicel；
2) by height measurements Z obtained by step 1)lAsk poor with the cylindrical body known altitude value of calibration device each in standard, institute
Stating difference is the combined type coordinate measuring machine Z-direction measurement error based on non-contact displacement sensor.
Standard and the application method of multisensor measuring machine coordinate unification and precision verification of the invention are, it can be achieved that contact
Formula sensor, imaging sensor, non-contact displacement sensor coordinate unification two-by-two or three's coordinate unification.And measuring machine is complete
Measurement accuracy calibrating in office's measurement space, it is simple to operate, it demarcates high-efficient.Calibration device in the present invention with cylindrical base material,
Classical turning process is made, technical maturity of microstoning equipment clamped one time；And can get circularity, cylindricity, concentricity,
Product of the verticality equal error less than tens Nano grades.Imaging sensor is Polaroid to frustum tip circle, touch sensor
Two dimension surveys circle, reduces the influence that multi-dimensional movement is brought into.The standard being made of 2 above-described calibration devices is suitable for height
The global measuring space of precision duplex measurement machine or the precision verification in local measurement space.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the standard of multisensor measuring machine coordinate unification and precision verification of the present invention；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is the structural schematic diagram of calibration device in the present invention；
Fig. 4 is the side view of calibration device in the present invention；
Fig. 5 is the top view of Fig. 4；
Fig. 6 is the structural schematic diagram of combined type coordinate measuring machine；
Fig. 7 is schematic diagram when calibration device is demarcated in the present invention；
Fig. 8 is the model schematic in the combined type coordinate measuring machine calibration direction XY；
Fig. 9 is the model schematic of combined type coordinate measuring machine calibration Z-direction.
In figure
1: pedestal 2: calibration device
21: cylindrical body 22: the frustum of a cone
3: combined type coordinate measuring machine rack 4: combined type coordinate measuring machine X-axis
5: combined type coordinate measuring machine Z axis 6: workbench (Y-axis)
7: standard V: imaging sensor
P: touch sensor L: non-contact displacement sensor
Specific embodiment
Below with reference to embodiment and attached drawing to the standard of multisensor measuring machine coordinate unification and precision verification of the invention
Device and application method are described in detail.
As shown in Figure 1, Figure 2, shown in Fig. 6, Fig. 7, the standard of multisensor measuring machine coordinate unification of the invention and precision verification
Device is the combined type coordinate measuring machine for integrating imaging sensor, touch sensor and non-contact displacement sensor
Calibration and precision verification, include the different mark of the height identical with 2 or more structures being fixed on pedestal 1 of pedestal 1
Determine device 2.Distance l is known between the central axis of every two calibration device 2 as shown in Figure 2.Each calibration device 2 can be completed individually
The coordinate unification of multisensor.
As shown in figure 3, figure 4 and figure 5, the calibration device 2 includes cylindrical body 21, and the upper surface of the cylindrical body 21 is fixed
It is provided with the frustum of a cone 22, the frustum of a cone 22 is coaxially disposed with the cylindrical body 22.Wherein:
It is passed as shown in fig. 7, the diameter lv of the 22 upper surface Zs of the frustum of a cone is less than the image on combined type coordinate measuring machine
Sensor measures field range.The size of the angle theta of top surface Zx is multiple on bus (inclined-plane) Zm and cylindrical body 1 of the frustum of a cone 22
In the angular range that non-contact displacement sensor on box-like coordinate measuring machine the is capable of measuring or upper surface of the frustum of a cone 22 with
Lower end surface vertical range hlIn the measurement range in non-contact displacement sensor.
Calibration device 2 of the invention is formed by microstoning, and precision is better than submicron order.It completes to scheme using single calibration device 2
As the coordinate unification of sensor, touch sensor and non-contact displacement sensor.Figure is realized by the XYZ axis of moving coordinate machine
As sensor, touch sensor and non-contact displacement sensor are to the horizontal, vertical of the standard being made of multiple calibration devices 2
Precision verification of the duplex measurement machine in measurement space is completed in the measurement of distance.
Scaling method using multisensor measuring machine coordinate unification and the standard of precision verification of the invention, using mark
Any one calibration device 2 carries out coordinate unification calibration, the calibration to the multisensor of combined type coordinate measuring machine in quasi- device
Include the following steps:
1) imaging sensor V, touch sensor P shown in Fig. 4 and non-contact displacement sensor L is respectively adopted to mark
Determine device to measure, wherein
The measurement of imaging sensor V includes:
(1) focus to imaging sensor V, make after focusing is clear the 22 upper surface Zs of the frustum of a cone of calibration device generally in
In the visual field of imaging sensor V；
(2) round edge circle of 22 upper surface Zs of the calibration device frustum of a cone is obtained by imaging sensor V；
(3) center of circle V of 22 upper surface of the frustum of a cone is obtained by round edge circle0；
(4) center of circle V for obtaining step (3)0As position of the imaging sensor V on combined type coordinate measuring machine or seat
Mark.
Center of circle V at this time0Acquisition be it is Polaroid in imaging sensor, combined type coordinate measuring machine is without complete under mechanical displacement
At, therefore be not in mechanical movement error.
The measurement of touch sensor P includes:
(1) using multiple points of the cross-sectional periphery of touch sensor P measurement 21 same position Ysc of cylindrical body；
(2) center of circle P in section is extracted0, the center of circle P0As touch sensor P on combined type coordinate measuring machine
Position or coordinate.
Combined type coordinate measuring machine Z axis is in the lock state at this time, only realizes that data obtain by 2 maintenance and operations of X-axis and Y-axis are dynamic
It takes, it is dynamic compared to 3 commonly required maintenance and operations of sphere centre coordinate are measured, reduce mechanical movement error.
The calibration of non-contact displacement sensor includes:
(1) frustum of a cone 22 is scanned with Y-direction in X direction respectively using non-contact displacement sensor L；
(2) center of the symmetrical centre or symmetry axis of the frustum of a cone 22 as 22 upper surface of the frustum of a cone is found out according to scanning result
L0；
(3) by the center L of 22 upper surface of the frustum of a cone0As non-contact displacement sensor L on combined type coordinate measuring machine
Position or coordinate.
2) height Zp is obtained using the top surface of touch sensor measurement cylinder；
3) height Z is obtained using the upper surface of the non-contact displacement sensor measurement frustum of a cone 22l；
4) position of imaging sensor or coordinate points V under the X/Y plane of the same coordinate system are found out0, touch sensor
Location point P0With the location point L of non-contact displacement sensor0Between deviation and cylinder 21 upper surface height Zp and circle
The upper surface height Z of frustum 22lDifference, to obtain imaging sensor, touch sensor and non-contact displacement sensor
Positional relationship completes imaging sensor, touch sensor and the triangular coordinate unification of non-contact displacement sensor or calibration.
It should be the same point under the X/Y plane of the same coordinate system (its Z axis is parallel with the symmetry axis of calibration device), still,
Step 1) obtains the location point V of imaging sensor as shown in Figure 8 using calibration device 2 of the invention0, touch sensor position
Set point P0With the location point L of non-contact displacement sensor0Between difference, find out three location point V0、P0And L0Between position
Poor △ YVL, △ YPV, △ YPL, △ XVP, △ XPL, △ XVL obtain imaging sensor V, contact-sensing by the difference
The positional relationship in x/y plane between device P and non-contact displacement sensor L three；Obtain the difference of Z-direction coordinate as shown in Figure 9
△Z。
It is of the invention using the standard of multisensor measuring machine coordinate unification and precision verification to combined type measurement of coordinates
The accuracy checking method of machine is sat to the combined type based on imaging sensor, touch sensor and non-contact displacement sensor
The detection of co-ordinate measuring machine measurement accuracy, in which:
Measurement accuracy detection based on imaging sensor includes the following steps:
1) 22 upper surface of the frustum of a cone of any one calibration device 2 in imaging sensor V alignment criteria device is focused, is adjusted
22 upper surface of the frustum of a cone of burnt clear rear calibration device 2 is in the visual field of imaging sensor V；
2) round edge circle of 22 upper surface of the frustum of a cone of the calibration device 2 is obtained by imaging sensor V；
3) center of circle of 22 upper surface of the frustum of a cone of the calibration device 2 is obtained by round edge circle；
4) repetition step 1)~step 3) obtains the circle of the upper surface of the frustum of a cone 22 of other calibration devices in standard respectively
The heart；
5) solve every two calibration device 2 22 upper surface of the frustum of a cone between center of circle center away from, and with used standard
Given value in device between 22 upper surface of the frustum of a cone of corresponding two calibration devices 2 asks difference to obtain difference, and the difference is base
In the measurement error of the combined type coordinate measuring machine of imaging sensor.
Measurement accuracy detection based on touch sensor includes the following steps:
1) cylindrical body 21 of each calibration device 2 in touch sensor difference extraction standard device X, Y in setting regions are used
The central coordinate of circle in direction；
2) according to the central coordinate of circle of obtained each calibration device 2 obtain the center between every two calibration device 2 away from；
3) by the center between every two calibration device 2 described in step 2) away from in used standard corresponding two
Between a calibration device 2 center away from given value ask poor, obtain difference, complete to survey the combined type coordinate based on touch sensor
Amount machine in setting regions X, Y-direction precision verification；
4) top of the cylindrical body 21 of each calibration device 2 in setting regions internal standard device is measured respectively using touch sensor
Face ZX, obtain the height measurements Zp of the cylindrical body 21 of each calibration device 2；
5) the height measurements Zp of the cylindrical body 21 for each calibration device 2 for obtaining step 4) and each calibration device 2 in standard
The top surface known altitude value of cylindrical body 21 ask poor, obtain Z-direction measurement error, complete to based on the compound of touch sensor
Precision verification of the formula coordinate measuring machine in setting regions Z-direction.
Measurement accuracy detection based on non-contact displacement sensor includes the following steps:
1) using the apical side height of the cylindrical body 21 of each calibration device 2 in non-contact displacement sensor L difference measurement standard device
ZX, obtain the height measurements Z of the cylindrical body 21 of each calibration device 2l；
2) by height measurements Z obtained by step 1)lIt is asked with the 21 known altitude value of cylindrical body of calibration device 2 each in standard
Difference, the difference are the combined type coordinate measuring machine Z-direction measurement error based on non-contact displacement sensor.
Change position of the standard in combined type coordinate measuring machine measurement space, repeats to be based on imaging sensor
Measurement accuracy detection the step of, the measurement accuracy detecting step based on touch sensor and be based on non-contact displacement sensor
Measurement accuracy detecting step, complete to examine and determine the measurement accuracy of combined type coordinate measuring machine difference local space.
It is by the padded mark of the parallel plane met the requirements using precision for standard entirety Z-direction change in location
Quasi- device is realized, is such as realized using gauge block group.
Thus the measurement accuracy inspection in combined type measuring machine multisensor coordinate unification and measuring machine measurement space can be realized
It is fixed.
Claims (7)
1. a kind of standard of multisensor measuring machine coordinate unification and precision verification, is for collecting imaging sensor, contact
The calibration for the combined type coordinate measuring machine that sensor and non-contact displacement sensor are integrated, which is characterized in that include pedestal
(1) the different calibration device (2) of height identical with 2 or more structures being fixed on pedestal (1), the calibration device (2)
Including cylindrical body (21), the upper surface of the cylindrical body (21) is fixedly installed the frustum of a cone (22), the frustum of a cone (22) and institute
Cylindrical body (21) coaxial arrangement is stated, the diameter of the frustum of a cone (22) upper surface is less than the image sensing of combined type coordinate measuring machine
Device measures field range, and the size of top surface angle is surveyed in combined type coordinate on the bus of the frustum of a cone (22) and cylindrical body (21)
On amount machine non-contact displacement sensor measurement angular range in, the upper surface of the frustum of a cone (22) it is vertical with lower end surface away from
From in the measurement range of non-contact displacement sensor.
2. a kind of standard using multisensor measuring machine coordinate unification and precision verification described in claim 1 is to combined type
The scaling method of coordinate measuring machine, which is characterized in that using any one calibration device (2) in standard to combined type measurement of coordinates
The multisensor of machine carries out coordinate unification calibration, and the calibration includes the following steps:
1) imaging sensor, touch sensor and non-contact displacement sensor is respectively adopted to measure calibration device；Wherein:
The measurement of imaging sensor includes:
(1) frustum of a cone (22) upper surface of any one calibration device (2) in imaging sensor V alignment criteria device is focused,
The frustum of a cone (22) upper surface of calibration device (2) is in the visual field of imaging sensor V after focusing is clear；
(2) round edge circle of the calibration device frustum of a cone (22) upper surface is obtained by imaging sensor；
(3) center of circle of the frustum of a cone (22) upper surface is obtained by round edge circle；
(4) center of circle for obtaining step (3) is as position of the imaging sensor on combined type coordinate measuring machine or coordinate points V0；
The measurement of touch sensor includes:
(1) using multiple points of touch sensor measurement cylindrical body (21) same cross-sectional periphery；
(2) center of circle in section is extracted, the center of circle is as position of the touch sensor on combined type coordinate measuring machine or seat
Punctuate P0；
The measurement of non-contact displacement sensor includes:
(1) frustum of a cone (22) are scanned with Y-direction in X direction respectively using non-contact displacement sensor；
(2) symmetrical centre or symmetry axis for finding out the frustum of a cone (22) according to scanning result are as in the frustum of a cone (22) upper surface
The heart；
(3) position using the center of the frustum of a cone (22) upper surface as non-contact displacement sensor on combined type coordinate measuring machine
Or coordinate points L0；
2) height Zp is obtained using the upper surface of touch sensor measurement cylindrical body (21)；
3) height Z is obtained using the upper surface of the non-contact displacement sensor measurement frustum of a cone (22)l；
4) position of imaging sensor or coordinate points V under the X/Y plane of the same coordinate system are found out0, touch sensor position
Or coordinate points P0Position or coordinate points L with non-contact displacement sensor0Between difference and cylindrical body (21) upper surface
The upper surface height Z of height Zp and the frustum of a cone (22)lDifference, to obtain imaging sensor, touch sensor and non-contact
The positional relationship of displacement sensor completes imaging sensor, touch sensor and the triangular seat of non-contact displacement sensor
Mark is unified.
3. it is according to claim 2 using the standard of multisensor measuring machine coordinate unification and precision verification to combined type
The scaling method of coordinate measuring machine, which is characterized in that the touch sensor is the contact for three coordinate measuring machine
Sensor.
4. the standard of multisensor measuring machine coordinate unification according to claim 2 and precision verification is to combined type coordinate
The scaling method of measuring machine, which is characterized in that the non-contact displacement sensor is spectral confocal sensor, laser triangulation survey
Away from one of sensor, laser focus sensor.
5. the standard of multisensor measuring machine coordinate unification according to claim 2 and precision verification is to combined type coordinate
The scaling method of measuring machine, which is characterized in that the imaging sensor is using imaging sensor used in image measurer.
6. a kind of standard using multisensor measuring machine coordinate unification and precision verification described in claim 1 is to combined type
The accuracy checking method of coordinate measuring machine, which is characterized in that be to based on imaging sensor, touch sensor and noncontact digit
The detection of the combined type coordinate measuring machine measurement accuracy of displacement sensor, in which:
Measurement accuracy detection based on imaging sensor includes the following steps:
1) frustum of a cone (22) upper surface of any one calibration device (2) in imaging sensor V alignment criteria device is focused, is adjusted
The frustum of a cone (22) upper surface of burnt clear rear calibration device (2) is in the visual field of imaging sensor V；
2) round edge circle of the frustum of a cone (22) upper surface of the calibration device (2) is obtained by imaging sensor V；
3) center of circle of the frustum of a cone (22) upper surface of the calibration device (2) is obtained by round edge circle；
4) repetition step 1)~step 3) obtains the center of circle of the upper surface of the frustum of a cone (22) of other calibration devices in standard respectively；
5) solve every two calibration device (2) the frustum of a cone (22) upper surface between center of circle center away from, and with used standard
Given value in device between the frustum of a cone (22) upper surface of corresponding two calibration devices (2) asks difference to obtain difference, the difference
For the measurement error of the combined type coordinate measuring machine based on imaging sensor；
Measurement accuracy detection based on touch sensor includes the following steps:
1) using cylindrical body (21) X, Y in setting regions of each calibration device (2) in touch sensor difference extraction standard device
The central coordinate of circle in direction；
2) according to the central coordinate of circle of obtained each calibration device (2) obtain the center between every two calibration device (2) away from；
3) by the center between every two calibration device (2) described in step 2 away from two corresponding with used standard
Between calibration device (2) center away from given value ask poor, obtain difference, complete to survey the combined type coordinate based on touch sensor
Amount machine in setting regions X, Y-direction precision verification；
4) top of the cylindrical body (21) of each calibration device (2) in setting regions internal standard device is measured respectively using touch sensor
Face ZX, obtain the height measurements Zp of the cylindrical body (21) of each calibration device (2)；
5) the height measurements Zp of the cylindrical body (21) for each calibration device (2) for obtaining step 4) and each calibration device in standard
(2) the top surface known altitude value of cylindrical body (21) asks poor, obtains Z-direction measurement error, completes to based on touch sensor
Combined type coordinate measuring machine setting regions Z-direction precision verification；
Measurement accuracy detection based on non-contact displacement sensor includes the following steps:
1) using the apical side height of the cylindrical body (21) of each calibration device (2) in non-contact displacement sensor L difference measurement standard device
ZX, obtain the height measurements Z of the cylindrical body (21) of each calibration device (2)l；
2) by height measurements Z obtained by step 1)lAsk poor with cylindrical body (21) known altitude value of calibration device (2) each in standard,
The difference is the combined type coordinate measuring machine Z-direction measurement error based on non-contact displacement sensor.
7. the standard of multisensor measuring machine coordinate unification according to claim 6 and precision verification is to combined type coordinate
The accuracy checking method of measuring machine, which is characterized in that change the standard in combined type coordinate measuring machine measurement space
Position, repeat based on imaging sensor measurement accuracy detection the step of, based on touch sensor measurement accuracy detection
Step and measurement accuracy detecting step based on non-contact displacement sensor are completed empty to the different parts of combined type coordinate measuring machine
Between measurement accuracy calibrating.
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| US10757394B1 (en) | 2015-11-09 | 2020-08-25 | Cognex Corporation | System and method for calibrating a plurality of 3D sensors with respect to a motion conveyance |
| US10812778B1 (en) | 2015-11-09 | 2020-10-20 | Cognex Corporation | System and method for calibrating one or more 3D sensors mounted on a moving manipulator |
| US11562502B2 (en) | 2015-11-09 | 2023-01-24 | Cognex Corporation | System and method for calibrating a plurality of 3D sensors with respect to a motion conveyance |
| CN107014329B (en) * | 2017-04-11 | 2019-04-05 | 合肥工业大学 | 3D Calibration Field for portable articulated coordinate machine error calibration |
| CN107063330B (en) * | 2017-04-17 | 2019-03-15 | 重庆市计量质量检测研究院 | Porous plate standard and joint error detection method for multi-sensor measurement system |
| CN109672878A (en) * | 2017-10-13 | 2019-04-23 | 康耐视公司 | To the field calibration system and method for the vision system of calibration object two opposite sides imaging |
| CN108562226B (en) * | 2017-12-27 | 2020-05-22 | 歌尔股份有限公司 | Coordinate system establishing device and method |
| CN111043995B (en) * | 2018-10-15 | 2022-05-27 | 北京福田康明斯发动机有限公司 | Method and device for calibrating rotating table of three-coordinate measuring machine |
| CN109556548B (en) * | 2018-11-27 | 2022-09-02 | 重庆市计量质量检测研究院 | Standard device for detecting joint error and joint error detection method |
| CN110793439B (en) * | 2019-10-25 | 2021-04-20 | 天津大学 | Standard device for unifying coordinates of multi-sensor measuring machine and coordinate unifying method |
| CN110966934B (en) * | 2019-12-13 | 2021-05-07 | 西安飞机工业（集团）有限责任公司 | Calibration method for ball socket central point of posture adjusting device |
| CN111238372B (en) * | 2020-02-24 | 2021-05-25 | 重庆市计量质量检测研究院 | Synchronous detection method for joint position error of double-compound coordinate measurement system |
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| JP5153228B2 (en) * | 2007-06-28 | 2013-02-27 | 株式会社小坂研究所 | Parameter calibration method for articulated coordinate measuring device |
| US7869026B2 (en) * | 2007-12-21 | 2011-01-11 | United Technologies Corp. | Targeted artifacts and methods for evaluating 3-D coordinate system measurement accuracy of optical 3-D measuring systems using such targeted artifacts |
| CN101532809A (en) * | 2008-11-19 | 2009-09-16 | 黑龙江科技学院 | Standard model device for checking non-contact curved surface three-dimensional coordinate measuring instrument |
| CN102980542B (en) * | 2012-10-31 | 2015-04-29 | 天津大学 | Multiple-sensor united calibration method |
| CN103954245A (en) * | 2014-03-21 | 2014-07-30 | 北京信息科技大学 | Precision calibration plate for articulated coordinate measuring machine |
| CN105606046B (en) * | 2015-11-04 | 2018-03-16 | 苏州天准科技股份有限公司 | A kind of combined type coordinate measuring machine merges calibration device |
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