CN106033054A - Laser temperature and humidity measurement apparatus and temperature and humidity measurement method - Google Patents
Laser temperature and humidity measurement apparatus and temperature and humidity measurement method Download PDFInfo
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Abstract
The invention discloses a laser temperature and humidity measurement apparatus and a temperature and humidity measurement method. The laser temperature and humidity measurement apparatus comprises an emission chamber and a reflecting mirror seat, wherein a gas absorbing chamber is communicated between the emission chamber and the reflecting mirror seat, a current board, a tunable diode laser and a photoelectric sensor are arranged inside the emission chamber, the tunable diode laser and the photoelectric sensor are respectively connected to the current board, the tunable diode laser is positioned at the ring surface perpendicular to the main optical axis of a concave reflecting mirror, the circle center of the ring surface is positioned at the main optical axis of the concave reflecting mirror, the distance from the circle center to the center of the concave reflecting mirror surface is adjustable, the gas absorbing chamber is formed by enclosing a plurality of connecting columns, and both ends of the connecting column are respectively and fixedly connected to the emission chamber and the reflecting mirror seat. With the apparatus and the method of the present invention, the problems existing in the traditional chemical temperature and humidity sensor can be avoided, the uses of the emission lens, the receiving lens and the diaphragm are not required, the apparatus has the simple structure and the simple assembly, and the measurement method is convenient and effective.
Description
Technical field
The present invention relates to a kind of humiture measurement mechanism technical field, specifically, relate to a kind of laser humiture measurement mechanism and method.
Background technology
Humidity is exactly the content of steam in air, is the key factor affecting air ambient quality, and in air, the size of relative humidity can produce considerable influence to the personnel in environment and material.Humidity is closely bound up with the life of people, and humidity is too high or too low all can produce impact to human body, simultaneously, humidity also plays vital effect aborning, seem the least humidity change, also industrial materials, technological process can be produced impact, bring many quality problems.
Therefore, Humidity Detection plays the most important effect at human being's production life everyway.At present, moisture measurement and control have been widely used for each relevant industries such as Aero-Space, microelectronics, atomic energy, petrochemical industry, electric power, meteorology, humidity is the most increasingly paid attention to by people, its humidity standard of transformation is all being constantly updated in countries in the world, and moisture measurement has become technical committee relevant with the world of International Organization for Standardization focus of attention the most.
Existing chemical formula humidity measuring instrument exists and moves back the wet problem such as slowly under response time length, high humidity environment, in the environment of being especially chronically exposed to high humility, it is easy to contaminated and affect its certainty of measurement and long-time stability.Utilizing tunable laser spectroscopy absorption techniques to measure humidity is the measuring method that a kind of precision is higher, has the advantages such as highly sensitive, selectivity good, fast response time.
At present, tunable laser spectroscopy absorptiometry device is mainly made up of laser beam emitting device, absorption air chamber, laser receiver and signal processing circuit.Laser beam emitting device generally comprises a laser instrument and a diversing lens, and laser receiver generally comprises reception lens, a diaphragm and a photoelectric sensor.Laser instrument light-emitting zone approximate as point source, be placed in the focal position of lens, by after lens with a branch of parallel light emergence, by another lens focus and received by laser receiver after tested gas is partially absorbed.
In order to make optical signal effectively transmit from transmitting terminal to receiving terminal, the following aspects need to be accomplished: 1, the primary optical axis of diversing lens and reception lens is coaxial or in the range of allowable error；2, in the range of the laser instrument of transmitting terminal is placed on focal position or the allowable error of diversing lens；3, in the range of photoelectric sensor is placed on focal position or the allowable error receiving lens.Due to the reason such as machining tolerances and rigging error, can cause laser instrument and photoelectric sensor not in the focus of diversing lens and reception lens,
Owing to current device needs to use two collecting lenses and a diaphragm so that light channel structure is complicated, and laser beam emitting device and laser receiver are attached separately to the both sides of air chamber, and line is more, whole system assembling complexity.
Summary of the invention
The present invention is to solve existing chemical formula humidity sensor to exist under response time length, high humidity environment to move back the wet problem such as slowly, it is proposed that a kind of tunable laser humiture measurement mechanism, the problems referred to above can be solved.
In order to solve above-mentioned technical problem, the present invention is achieved by the following technical solutions:
A kind of laser humiture measurement mechanism, including launching chamber, mirror unit, connects an absorption air chamber, wherein between described transmitting chamber and mirror unit:
Emission cavity indoor arrange a circuit board, tunable diode laser, photoelectric sensor, and described tunable diode laser and photoelectric sensor are connected with described circuit board respectively；
Described tunable diode laser launch party sets up an angle of wedge diaphragm, described angle of wedge diaphragm is launched light direction relative to tunable diode laser and is obliquely installed, making transmitting light is acute angle with the angle of incidence of described angle of wedge diaphragm, and deviates from described photoelectric sensor through the direction of described angle of wedge diaphragm reflection light；Described transmitting chamber is sealed with angle of wedge diaphragm by its shell.
Arranging spherical concave mirror in mirror unit, the laser-bounce after GAS ABSORPTION in air chamber being used for sending tunable diode laser is to photoelectric sensor；
Described absorption air chamber is surrounded by some connection posts, and described connection post two ends are fixed with transmitting chamber, mirror unit respectively and are connected.
Further, described tunable diode laser is positioned on an anchor ring being perpendicular to concave mirror primary optical axis, and the center of circle of this anchor ring is positioned on the primary optical axis of concave mirror, and the distance in the center of circle to concave mirror minute surface center is adjustable in certain interval.The light that described tunable diode laser sends points to the minute surface center of concave mirror.Described photoelectric sensor is positioned at described tunable diode laser and launches on light reflected light path after described concave mirror reflects, reflection light is assembled at a certain distance from arriving before described angle of wedge diaphragm, back reflection light dissipate through angle of wedge diaphragm and be irradiated on the photosurface of photoelectric sensor.
Further, circuit board includes drive circuit for laser, be electrically connected bandwidth-limited circuit, pre-amplification circuit, phase-locked amplifying circuit and low-pass filter circuit and A/D converting unit and signal processing unit, the signal output part of described low-pass filter circuit is connected with A/D converting unit, and an other input of described lock-in amplifier receives high-frequency modulation signal by phase shift frequency multiplier circuit；Described circuit board connects data handling system.
Preferably, described angle of wedge diaphragm surface is coated with and allows the band that passes through of designated frequency band light to lead to film.
As further preferred scheme, described emission cavity indoor arrange transmitting received block, and tunable diode laser and photoelectric sensor are fixed by described transmitting received block.
As further preferred scheme, launch and on the shell of chamber, temperature sensor is set, carry out the calculating of Temperature Humidity Sensor temperature adjustmemt and relative humidity for measuring ambient temperature.
A kind of temperature and humidity measurement method using laser humiture measurement mechanism, sequentially includes the following steps:
Step one, absorption spectrum according to hydrone, utilize thermal tuning and the current-tuning characteristic of laser driver, drives laser instrument to launch laser signal, makes laser frequency scan near selected hydrone a certain specific absorption peak；
Step 2, incident laser incidence angle of wedge diaphragm, fraction incident illumination is reflected off original incident laser direction, and major part incident laser enters air chamber through angle of wedge diaphragm, obtains transmission laser after the hydrone in air chamber absorbs；
Step 3, transmission laser are irradiated to spherical concave mirror, laser-bounce, reflection light are produced spectral absorption in absorbing air chamber by spherical concave mirror, and laser converges to photoelectric sensor, transmission laser is after photoelectric sensor carries out optical electrical conversion, it is thus achieved that transmission laser voltage signal；
Step 4, extract the first harmonic amplitude signal of transmission laser voltage signal and secondary harmonic amplitude signal by bandpass filtering, preposition amplification, phase-locked amplification, low-pass filter circuit；
Step 5, data handling system is utilized to find crest value and the data storage location thereof of second harmonic, and find first harmonic signal center value at corresponding position of spectral line, export with the system that is used for of second harmonic peak-to-peak value and first harmonic central value, process through data and be finally inversed by gas humidity；
Step 6, temperature sensor measurement ambient temperature, and transmit to data handling system, data handling system carries out temperature adjustmemt according to temperature value to Temperature Humidity Sensor and calculates relative humidity.
A kind of laser humiture measurement mechanism provided by the present invention and method, have the advantage that
First: use tunable laser spectroscopy absorption techniques to measure ambient humidity, the problem that traditional chemical formula Temperature Humidity Sensor exists can be avoided, and by tunable diode laser and photoelectric sensor being fixedly arranged in a chamber, it is effectively reduced wiring quantity, and be not required to use diversing lens, receive lens and diaphragm, apparatus structure is simple, easy to assembly；
Second: at transmitting terminal, angle of wedge diaphragm is set, the angle of incidence launching light and described angle of wedge diaphragm by arranging tunable diode laser is acute angle or obtuse angle, the reflection light making angle of wedge diaphragm deviates original tunable diode laser and launches the direction of light, the reflection light impact on laser instrument can be eliminated, laser will not produce multiple reflections between light source and angle of wedge diaphragm, can eliminate transmitting terminal etalon effect of noise；At receiving terminal, by arranging described angle of wedge diaphragm with described photoelectric sensor at an angle, make laser after spherical concave mirror reflects, through angle of wedge diaphragm, laser will not produce multiple reflections between described photoelectric sensor and described angle of wedge diaphragm, can eliminate receiving terminal etalon effect of noise；
3rd: described angle of wedge diaphragm surface is coated with the band allowing designated frequency band light to pass through and leads to film, it is possible to reduce the ambient light impact on device；
4th: emission cavity indoor are provided for, by transmitting received block fixing to tunable diode laser and photoelectric sensor, being provided for microscope base fixed for spherical concave mirror in mirror unit, make that whole apparatus structure is compact, be readily transported, and good stability.
Accompanying drawing explanation
Fig. 1 is a kind of example structure schematic diagram of tunable laser humiture measurement mechanism proposed by the invention；
Fig. 2 is the index path of Fig. 1；
Fig. 3 is a kind of embodiment external structure schematic diagram of tunable laser humiture measurement mechanism proposed by the invention；
Fig. 4 is the testing circuit functional-block diagram in embodiment two.
Detailed description of the invention
Below in conjunction with the embodiment of the present invention and accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art are obtained under not making creative work premise, broadly fall into the scope of protection of the invention.
Embodiment one, the present embodiment proposes a kind of tunable laser humiture measurement mechanism, as shown in Figure 1, including tunable diode laser 10, photoelectric sensor 5, spherical concave mirror 7, absorb air chamber 6, described tunable diode laser 10 and photoelectric sensor 5 are fixedly arranged on the same side of described absorption air chamber 6, described spherical concave mirror 7 is fixedly arranged on the other side of described absorption air chamber 6, as shown in Figure 2, described tunable diode laser 10 is positioned on an anchor ring being perpendicular to concave mirror 7 primary optical axis, the center of circle of this anchor ring is positioned on the primary optical axis of concave mirror 7, the center of circle to the distance at concave mirror 7 minute surface center in certain interval adjustable.The light that described tunable diode laser 10 sends points to the minute surface center of concave mirror 7.Described photoelectric sensor 5 is positioned at described tunable diode laser 10 and launches on light reflected light path after described concave mirror 7 reflects, reflection light is assembled at a certain distance from arriving before described angle of wedge diaphragm 9, back reflection light dissipate through angle of wedge diaphragm 9 and be irradiated to photoelectric sensor 5 photosurface on.When beam of laser is by tested gas, if laser emission spectrum overlaps with gas absorption spectrum, output intensity can weaken because being actually taken up by gas, and meets Beer-Lambert law between output intensity and input light intensity.The tunable laser humiture measurement mechanism of the present embodiment is i.e. to use above-mentioned principle, tunable diode laser 10 is launched laser and is irradiated to spherical concave mirror 7 by absorbing air chamber 6, laser-bounce to photoelectric sensor 5, the change being absorbed air chamber reflective light intensity by detection are detected humidity by spherical concave mirror 7.Utilize thermal tuning and the current-tuning characteristic of laser instrument, make laser frequency scan near a certain absworption peak of gas to be measured, laser frequency is carried out high frequency modulated simultaneously, detect according to the relation of warbled harmonic signal amplitude with gas concentration.The tunable laser humiture measurement mechanism of the present embodiment, tunable laser spectroscopy absorption techniques is used to measure ambient humidity, the problem that traditional chemical formula Temperature Humidity Sensor exists can be avoided, and by tunable diode laser 10 and photoelectric sensor 5 being fixedly arranged on the same side of described absorption air chamber, it is effectively reduced wiring quantity, and be not required to use diversing lens, receive lens and diaphragm, apparatus structure assembling is simple.
As shown in Figure 2, preferably photoelectric sensor 5 is placed on the transmitting light reflected light path after described concave mirror 7 reflects of described tunable diode laser 10, reflection light is by, after convergent point, being irradiated on the photosurface of photoelectric sensor 5, and beneficially photoelectric sensor 5 receives reflection light.
For the ease of installing and using, described tunable laser humiture measurement mechanism also includes the transmitting received block 3 for fixing described tunable diode laser 10 and photoelectric sensor 5.
As a preferred embodiment, as shown in Figure 1, the front of described tunable diode laser 10 and photoelectric sensor 5 is provided with angle of wedge diaphragm 9, as shown in Figure 2, it is acute angle that described tunable diode laser 10 launches the angle of incidence of light and described angle of wedge diaphragm 9, and deviates from described photoelectric sensor 5 through the direction that described angle of wedge diaphragm 9 reflects light.At transmitting terminal, the angle of incidence launching light and described angle of wedge diaphragm 9 by arranging tunable diode laser 10 is not equal to 90 °, the reflection light making angle of wedge diaphragm 9 deviates original tunable diode laser 10 and launches the direction of light, the reflection light impact on laser instrument can be eliminated, laser will not produce multiple reflections between light source and angle of wedge diaphragm, can eliminate transmitting terminal etalon effect of noise.At receiving terminal, by arranging described angle of wedge diaphragm 9 with described photoelectric sensor 5 at an angle, make laser after spherical concave mirror 7 reflects, through angle of wedge diaphragm 9, laser will not produce multiple reflections between described photoelectric sensor 5 and described angle of wedge diaphragm 9, can eliminate receiving terminal etalon effect of noise.In addition; the cavity launched between received block 3 and angle of wedge diaphragm 9 is sealed by angle of wedge diaphragm 9, plays the effect of waterproof and dustproof, protection laser instrument 10 and photoelectric sensor 5; launch the cavity between received block 3 and angle of wedge diaphragm 9 and be filled with noble gas, eliminate the interference of background absorption gas.
In the present embodiment, described angle of wedge diaphragm 9 surface is coated with and allows the band that passes through of band segment light to lead to film, it is possible to reduce the ambient light impact on device.
The tunable laser humiture measurement mechanism of the present embodiment also includes shell 2, described transmitting received block 3 is fixed in described shell 2, it is fixedly provided with circuit board 1 in described shell 2, described angle of wedge diaphragm 9 is installed in a side of described shell 2, cavity for launching between received block 3 and angle of wedge diaphragm 9 seals, accordingly, the tunable diode laser 10 being arranged in cavity, photoelectric sensor 5 can be isolated with outside air, prevent from being corroded by high humidity gas.
Also setting up a temperature sensor 4 in this device, temperature probe is arranged on crust of the device, is used for measuring ambient temperature, carries out Temperature Humidity Sensor temperature model correction and the calculating of relative humidity.
Further, the installation of this tunable laser humiture measurement mechanism and debugging for convenience, as shown in Figure 4, described spherical concave mirror 7 is installed on spherical concave surface mirror unit 8, and described spherical concave surface mirror unit 8 is connected post 11 with described shell 2 by several and connects, and surrounds absorption air chamber between several connection posts described, therefore, it is open for absorbing air chamber 6, when measuring, only need to be integrally placed in gas to be measured by tunable laser humiture measurement mechanism.
Embodiment two, this laser humiture measurement mechanism is used to carry out the step of temperature and humidity measurement:
Step one, absorption spectrum according to hydrone, utilize thermal tuning and the current-tuning characteristic of laser driver, drives laser instrument to launch laser signal, makes laser frequency scan near selected hydrone absworption peak；Step 2, incident laser incidence angle of wedge diaphragm, fraction incident illumination is reflected off original incident laser direction, and major part incident laser enters air chamber through angle of wedge diaphragm, obtains transmission laser after the hydrone in air chamber absorbs；Step 3, transmission laser are irradiated to spherical concave mirror, and laser-bounce is converged to photoelectric sensor by spherical concave mirror, and transmission laser is after photoelectric sensor carries out optical electrical conversion, it is thus achieved that transmission laser voltage signal；Step 4, extract the first harmonic of transmission laser and the amplitude signal of second harmonic by bandpass filtering, preposition amplification, phase-locked amplification, low-pass filter circuit；Wherein, first harmonic signal is the reference signal utilizing high-frequency modulation signal to carry out after phase shift as lock-in amplifier, obtains first harmonic signal through phase-locked amplification, low-pass filtering；Second harmonic signal is the reference signal utilizing two frequency-doubled signals of high-frequency modulation signal to carry out after phase shift as lock-in amplifier, obtains second harmonic signal through phase-locked amplification, low-pass filtering；Concrete flow chart is shown in Fig. 4.Step 5, data handling system is utilized to find crest value and the data storage location thereof of second harmonic, and find first harmonic signal center value at corresponding position of spectral line, export with the system that is used for of second harmonic peak-to-peak value and first harmonic central value, process through data and be finally inversed by ambient humidity；Second harmonic peak-to-peak value is directly proportional to gas concentration, first harmonic central value is unrelated with gas concentration, but it is relevant with laser optical power etc., measuring gas concentration with the two ratio, vapour concentration is measured the impact produced by the light transmittance change that the factors such as laser optical power change, dust, form pollution that can eliminate cause；Step 6, temperature sensor measurement ambient temperature, and transmit to data handling system, humidity is modified according to temperature value and calculates relative humidity by data handling system.
Certainly; described above is not limitation of the present invention; the present invention is also not limited to the example above, change that those skilled in the art are made in the essential scope of the present invention, retrofits, adds or replaces, and also should belong to protection scope of the present invention.
Claims (8)
1. a laser humiture measurement mechanism, it is characterised in that: include launching chamber, mirror unit, connect an absorption air chamber between described transmitting chamber and mirror unit, wherein:
Emission cavity indoor arrange a circuit board, tunable diode laser, photoelectric sensor, and described tunable diode laser and photoelectric sensor are connected with described circuit board respectively；
Described tunable diode laser launch party sets up an angle of wedge diaphragm, described angle of wedge diaphragm is launched light direction relative to tunable diode laser and is obliquely installed, making transmitting light is acute angle with the angle of incidence of described angle of wedge diaphragm, and deviates from described photoelectric sensor through the direction of described angle of wedge diaphragm reflection light；Described transmitting chamber is sealed with angle of wedge diaphragm by its shell；
Arranging spherical concave mirror in mirror unit, the laser-bounce after GAS ABSORPTION in air chamber being used for sending tunable diode laser is to photoelectric sensor；
Described absorption air chamber is surrounded by some connection posts, and described connection post two ends are fixed with transmitting chamber, mirror unit respectively and are connected.
A kind of laser humiture measurement mechanism the most according to claim 1, it is characterized in that: described tunable diode laser is positioned on an anchor ring being perpendicular to concave mirror primary optical axis, the center of circle of this anchor ring is positioned on the primary optical axis of concave mirror, and the distance in the center of circle to concave mirror minute surface center is adjustable in certain interval；The light that described tunable diode laser sends points to the minute surface center of concave mirror；Described photoelectric sensor is positioned at described tunable diode laser and launches on light reflected light path after described concave mirror reflects, reflection light is assembled at a certain distance from arriving before described angle of wedge diaphragm, back reflection light dissipate through angle of wedge diaphragm and be irradiated on the photosurface of photoelectric sensor.
A kind of laser humiture measurement mechanism the most according to claim 1, it is characterized in that: circuit board includes drive circuit for laser, the bandwidth-limited circuit, pre-amplification circuit, phase-locked amplifying circuit and the low-pass filter circuit that are electrically connected and A/D converting unit and signal processing unit, the signal output part of described low-pass filter circuit is connected with A/D converting unit, and an other input of described lock-in amplifier receives high-frequency modulation signal by phase shift frequency multiplier circuit；Described circuit board connects data handling system.
Tunable laser humiture measurement mechanism the most according to claim 1, it is characterised in that: described angle of wedge diaphragm surface is coated with the band allowing designated frequency band light to pass through and leads to film.
Tunable laser humiture measurement mechanism the most according to claim 1, it is characterised in that: described emission cavity indoor arrange transmitting received block, and tunable diode laser and photoelectric sensor are fixed by described transmitting received block.
Tunable laser humiture measurement mechanism the most according to claim 1, it is characterised in that: launch and on the shell of chamber, temperature sensor is set, for measuring ambient temperature, Temperature Humidity Sensor is carried out the calculating of temperature adjustmemt and relative humidity.
7. the temperature and humidity measurement method of the laser humiture measurement mechanism using claim 1, it is characterised in that: sequentially include the following steps:
Step one, absorption spectrum according to hydrone, utilize thermal tuning and the current-tuning characteristic of laser driver, drives laser instrument to launch laser signal, makes laser frequency scan near selected hydrone absworption peak；
Step 2, incident laser incidence angle of wedge diaphragm, fraction incident illumination is reflected off original incident laser direction, and major part incident laser enters air chamber through angle of wedge diaphragm, obtains transmission laser after the hydrone spectral absorption in air chamber；
Step 3, transmission laser are irradiated to spherical concave mirror, laser-bounce, reflection light are produced spectral absorption in absorbing air chamber by spherical concave mirror, and laser converges to photoelectric sensor, transmission laser is after photoelectric sensor carries out optical electrical conversion, it is thus achieved that transmission laser voltage signal；
Step 4, extract the first harmonic amplitude signal of transmission laser voltage signal and secondary harmonic amplitude signal by bandpass filtering, preposition amplification, phase-locked amplification, low-pass filter circuit；
Step 5, data handling system is utilized to find crest value and the data storage location thereof of second harmonic, and find first harmonic signal center value at corresponding position of spectral line, export with the system that is used for of second harmonic peak-to-peak value and first harmonic central value, process through data and be finally inversed by environment absolute humidity；
Step 6, temperature sensor measurement ambient temperature, and transmit to data handling system, data handling system carries out temperature adjustmemt according to temperature value to Temperature Humidity Sensor and calculates relative humidity.
The temperature and humidity measurement method of laser humiture measurement mechanism the most according to claim 7, it is characterized in that: in step 4, utilize high-frequency modulation signal to carry out after phase shift the reference signal as lock-in amplifier, obtain first harmonic amplitude signal through phase-locked amplification, low-pass filtering；Two frequency-doubled signals utilizing high-frequency modulation signal carry out the reference signal after phase shift as lock-in amplifier, obtain secondary harmonic amplitude signal through phase-locked amplification, low-pass filtering.
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| CN113031679A (en) * | 2021-03-01 | 2021-06-25 | 刘滨 | System and method for controlling constant temperature and humidity environment in laboratory |
| CN113176621A (en) * | 2021-04-14 | 2021-07-27 | 山东省科学院海洋仪器仪表研究所 | Ocean upper water vapor concentration detection device |
| CN113176621B (en) * | 2021-04-14 | 2022-10-18 | 山东省科学院海洋仪器仪表研究所 | Ocean upper water vapor concentration detection device |
| CN115046962A (en) * | 2022-06-30 | 2022-09-13 | 北京光感慧智科技有限公司 | Laser gas sensor design method and system for inhibiting water vapor condensation influence |
| CN115356290A (en) * | 2022-09-07 | 2022-11-18 | 北京众驰自动化设备有限公司 | Humidity detection method and device |
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