CN106018917A - Passive-type current and voltage integrated sensor - Google Patents
Passive-type current and voltage integrated sensor Download PDFInfo
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- CN106018917A CN106018917A CN201610329901.4A CN201610329901A CN106018917A CN 106018917 A CN106018917 A CN 106018917A CN 201610329901 A CN201610329901 A CN 201610329901A CN 106018917 A CN106018917 A CN 106018917A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0046—Arrangements for measuring currents or voltages or for indicating presence or sign thereof characterised by a specific application or detail not covered by any other subgroup of G01R19/00
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Abstract
The invention proposes a passive-type current and voltage integrated sensor, and the sensor consists of two sensing parts nearby a transmission conductor. Each sensing part consists of a substrate, a magnetic core coil, a metal layer, a connection conductor, a bonding pad, and a fixing device. The magnetic core coils are located on the upper surfaces of the substrates, and form current sensors along with the connection conductors and the bonding pads. The metal layers are located on the lower surfaces of the substrates, and form voltage sensors along with the connection conductors and the bonding pads. The fixing devices are located below the metal layers, and distances between the two sensing parts and the transmission conductor are difference. The two sensing parts are disposed on the surface of the transmission conductor through the fixing devices. The distance between the sensor and the transmission conductor is determined by the heights of the fixing devices, and is convenient to adjust. The sensor is based on the microfabrication technique, and the sensing parts respectively employ passive measurement and can detect the current and voltage signals at the same time. The sensor does not need an external power supply, is low in power consumption, is simple in structure, is miniaturized, is good in linearity, is large in dynamic range, is low in cost, and facilitates the batch production.
Description
Technical field
The present invention relates to electrical network field and MEMS (Micro-Electro-Mechanical System,
It is called for short MEMS) technical field, particularly relate to a kind of passive current/voltage integrated sensor.
Background technology
At present, the current monitoring equipment for transformer station and user terminal is more, and for connecting power transformation
The current monitoring equipment of the overhead transmission line stood with user is less, along with a large amount of distributed power sources and electronic vapour
The access of the fluctuating loads such as car, the method for operation of power distribution network will occur significant change, to state of electric distribution network
Estimation, Optimized Operation and online fault location bring severe challenge.
Current sensor and voltage sensor are the visual plants realizing power system on-line condition monitoring.
Its precision and reliability are closely related with the safe and reliable operation of power system.Power distribution network is most at present
Using large-scale transformer to come detectable voltage signals and current signal, not only volume is big, and structure is complicated, valency
Lattice are expensive, and install inconvenience.Additionally, voltage transformer typically uses planar survey contiguously, with
The earth, as reference potential, is easily caused the generation of creepage phenomenon.Therefore need badly a kind of cheap,
Easy for installation and current sensor that precision is of a relatively high and voltage sensor are to overhead transmission line electric current electricity
Pressure is monitored in real time, in order to operations staff preferably holds the real-time running state of power distribution network.
Summary of the invention
(1) to solve the technical problem that
In order to solve the problems referred to above that prior art exists, the invention provides a kind of passive electric current electricity
Pressure integration sensor.
(2) technical scheme
The invention provides a kind of passive current/voltage integrated sensor, including: the first sensing element
With the second sensing element；Wherein, the first surface tool of described first sensing element and the second sensing element
Having a current sensor, its second surface relative with first surface has a voltage sensor；Described
Voltage sensor is further fixed on a holder, and described holder is fixed on transfer wire surface, and described
One sensing element and the second sensing element location matches, the voltage sensor of the two and transfer wire away from
From difference.
Preferably, described first sensing element and the second sensing element include: substrate 1, magnetic core coil
2, wire 4 and pad 5 are connected；Described magnetic core coil 2 is positioned at the first surface of substrate, and it is by the
The connection wire on one surface is connected with pad, constitutes a current sensor on the first surface, is used for feeling
Survey the current value of transfer wire.
Preferably, described first sensing element and the second sensing element include: substrate 1, metal level 3,
Connecting wire 4 and pad 5, described metal level 3 is positioned at the second surface of substrate, and it passes through the second table
The connection wire in face is connected with pad, constitutes a voltage sensor on a second surface；Described first passes
The metal level of sense parts and the second sensing element is as induction electrode pair, for sensing the electricity of transfer wire
Pressure value, one of them metal level of described induction electrode pair is earth-free as reference potential.
Preferably, described first sensing element and the second sensing element are positioned at transfer wire both sides, position
Just to and be parallel to each other；Or, described first sensing element and the second sensing element are positioned at transfer wire
Same axial location, and there is an angle.
Preferably, described first sensing element and the second sensing element are arranged side by side in transfer wire same
Side and being parallel to each other；Or, described first sensing element and the second sensing element are different along transfer wire
Axial location is arranged, and has an angle.
Preferably, the material of described substrate 1 is selected from silicon, glass, pottery or organic material, and institute
State substrate 1 and described magnetic core coil 2, thin metal layer 3, be connected wire 4 and pad 5 insulate.
Preferably, described magnetic core coil 2 is the array structure magnetic core coil of X row Y row, wherein,
X, Y are natural number.
Preferably, described magnetic core coil 2 includes coil and magnetic core, and coil is to mate with core shapes
Stereochemical structure, it is generated by fine process on substrate, and its material is copper or silver；Magnetic core
Material is silicon sheet core, permalloy or amorphous and nano-crystal soft magnetic alloy.
Preferably, described metal level 3 is generated on substrate by fine process, and its material is silver
Or copper.
Preferably, described holder is fixed on the underface of metal level, and material is pottery, nylon or poly-
Tetrafluoroethene.
(3) beneficial effect
From technique scheme it can be seen that a kind of passive current/voltage integrated sensor of the present invention
Have the advantages that
(1) sensing element simple in construction, with low cost, beneficially mass production；
(2) passive measurement is used, it is not necessary to externally fed, low in energy consumption；
(3) it is provided simultaneously with voltage sensor and current sensor, transfer wire can be detected simultaneously
Current signal and voltage signal, it is not necessary to use two complete equipments to detect voltage and current respectively, easy to detect,
Save testing cost；
(4) voltage sensor without ground connection as reference potential, it is to avoid the generation of creepage phenomenon；
(5) magnetic core coil uses array and laminated construction, substantially increases the sensitivity of sensor；
(6) by U-shaped folder, sensing element is fixed on transfer wire surface, it is easy to install, operation
Convenient and spacing regulates the most simple and convenient；
(7) magnetic core is made up of the ferronickel thin film alloys of 45%, does not haves magnetic during detection power distribution network
Saturated phenomenon, the linearity is good, and dynamic range is big；
(8) using the sensor of fine process, volume is little, it is achieved that the miniaturization of sensor.
Accompanying drawing explanation
Fig. 1 is the structural representation of the passive current/voltage integrated sensor of first embodiment of the invention；
Fig. 2 is the current sensor of the passive current/voltage integrated sensor of first embodiment of the invention
Structural representation；
Fig. 3 is the voltage sensor of the passive current/voltage integrated sensor of first embodiment of the invention
Structural representation；
Fig. 4 is the structural representation of the passive current/voltage integrated sensor of second embodiment of the invention；
Fig. 5 is the current sensor of the passive current/voltage integrated sensor of third embodiment of the invention
Structural representation.
[symbol description]
1-substrate；2-magnetic core coil；3-metal level；4-connects wire；5-pad；6-U type presss from both sides；7-
Transfer wire.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with concrete real
Execute example, and referring to the drawings, the present invention is described in further detail.
A kind of passive current/voltage integrated sensor of the present invention, can detect simultaneously AC distribution net without
The current signal of source type and voltage signal.Wherein, the operation principle of current sensor is faraday's electromagnetism
Induction law, the alternating magnetic field that in transfer wire, AC signal produces is by magnetic core coil, at magnetic core line
Circle two ends produce induction electromotive force, and this electromotive force is directly proportional to tested electric current, just may be used by this electromotive force
Obtain the size of tested electric current.The operation principle of voltage sensor is electrostatic induction principle, two metals
Layer is different from the distance between transfer wire, and the electric charge number of sensing is different, by detecting two metal interlevels
The difference of charge inducing can obtain the alternating electric field that transfer wire produces, and then obtain tested voltage
Size.Additionally, the size of electromotive force of magnetic core coil two ends sensing and magnetic core coil and transfer wire it
Between distance be inversely proportional to, the ratio of the electromotive force produced by upper and lower two magnetic core coils can be asked accurately
Go out the distance between magnetic core coil and transfer wire.
As shown in Figure 1 to Figure 3, first embodiment of the invention provides a kind of passive current/voltage collection
Become sensor, including: the first sensing element that structure is identical and the second sensing element, first, second
Sensing element includes: substrate 1, magnetic core coil 2, metal level 3, connection wire 4, pad 5 and U
Type folder 6；Magnetic core coil 2 is positioned at a surface of substrate, and it is by the connection wire on this surface and pad
Connect, constitute a current sensor on a surface.
Metal level 3 is positioned at another surface of substrate, and it is by the connection wire on this another surface and pad
Connect, this another surface constitutes a voltage sensor.
U-shaped folder 6 is fixed on the underface of metal level, the first sensing element and the second sensing element to be passed through
U-shaped folder 6 is fixed on transfer wire 7 surface, and the two is positioned at transfer wire both sides, position just to and phase
The most parallel, the first sensing element and the second sensing element metal level are different from the distance of transfer wire 7,
Substrate 1 and magnetic core coil 2, metal level 3, it is connected wire 4 and pad 5 insulate.
Wherein, U-shaped folder 6 can be bonded together with metal level 3, by U-shaped folder 6 by binding agent
First, second sensing element is fixed on transfer wire 7 surface, it is easy to install, easy to operate；Logical
Cross and change the height of U-shaped folder and can realize the adjustment of the distance between sensing element and transfer wire 7,
The most simple and convenient away from regulation.
Preferably, described magnetic core coil 2 is the array structure of X row Y row, including X × Y magnetic
Core, the magnetic core coil of array structure substantially increases the sensitivity of sensor, and wherein, X, Y are certainly
So number, in fig. 1 and 2, described X is 1, and Y is 3.
Wherein, the material of substrate 1 such as can be selected from silicon, glass, pottery, organic material, metal,
The material such as metal alloy or metal-oxide；Magnetic core coil 2 includes coil and magnetic core, and coil is and magnetic
The stereochemical structure of core form fit, its material is copper or silver, core material can be silicon sheet core,
Permalloy, amorphous and nano-crystal soft magnetic alloy or other there is higher magnetic permcability, higher saturated magnetic
Changing the magnetic material of intensity, the ferronickel thin film alloys material of preferably 45%, it has in permalloy
High saturation magnetization, does not haves magnetic saturation phenomenon during detection power distribution network, and the linearity is good, dynamically
Scope is big.Between coil and magnetic core not in contact with, insulant separate；Metal level 3 material be copper or
Silver, as the induction electrode pair of voltage sensor, one of them metal level 3 is as reference potential, no
With ground connection, it is to avoid the generation of creepage phenomenon.Connecting wire 4 is copper cash, the most just magnetic core coil
2 and pad 5 and metal level 3 and pad 5 couple together；Pad 5 material is copper, with external electrical
Road connects；Higher exhausted of the resistivity ratio such as U-shaped folder 6 material selected from ceramics, nylon, politef
Edge material.
In order to strengthen sensor sensing effect, can be by increasing the size of magnetic core, increasing the circle of coil
Number and area and the distance etc. reduced between sensing element and transfer wire improve current sensor
Sensitivity；The sensitivity improving voltage sensor by increasing the area of metal level and can reduce biography
Distance between sense parts and transfer wire realizes.
Preferably, the coil of the agent structure of sensor, such as magnetic core coil 2 and metal level 3, adopt
By MEMS structure, it can use fine process to generate on substrate, such as photoetching process,
Sputtering technology, microplating technique, etching technics, glossing etc.；Metal level 3 is by microplating
Method generates on substrate 1.Using the sensor of MEMS structure, volume is little, it is achieved that sensing
The miniaturization of device.
In the present embodiment, the first sensing element and the second sensing element can not also be parallel to each other, and
Being to have an angle, the i.e. first sensing element and the second sensing element are fixed on transmission by U-shaped folder 6
Wire 7 surface, the two is positioned at the same axial location of transfer wire, and has an angle, and first passes
Sense parts and the second sensing element metal level are different from the distance of transfer wire 7.
The passive current/voltage integrated sensor of first embodiment of the invention, exchange letter in transfer wire
Number alternating magnetic field magnetic core coil by current sensor produced, magnetic core coil two ends produce faradism
Kinetic potential, this electromotive force is directly proportional to the electric current of transfer wire, by arbitrary one of two sensing elements
The electromotive force of current sensor sensing all can calculate the current value of transfer wire.Two sensing elements
Voltage sensor, the metal level of these two voltage sensors is different from the distance between transfer wire, sensing
Electric charge number different, transmission can be obtained by the difference of the charge inducing of two metal interlevels of detection and lead
The alternating electric field that line produces, and then obtain the magnitude of voltage of transfer wire.Additionally, the sense of magnetic core coil two ends
Distance between electromotive force size and magnetic core coil and the transfer wire answered is inversely proportional to, and utilizes two sensings
The ratio of the electromotive force that the magnetic core coil of parts produces, can obtain magnetic core coil and transfer wire accurately
Between distance, and the thickness that this distance deducts substrate just can obtain sensing element metal level and biography
The distance of transporting line, calculates the magnitude of voltage of transfer wire.
The passive current/voltage integrated sensor of first embodiment of the invention, sensing element simple in construction,
With low cost, beneficially mass production, it uses passive measurement, it is not necessary to externally fed, power consumption
Low；Current signal and the voltage signal of transfer wire can be detected, it is not necessary to use two sheathed back-ups simultaneously
Do not detect voltage and current, easy to detect, save testing cost；Voltage sensor is made without ground connection
For reference potential, it is to avoid the generation of creepage phenomenon.
The passive current/voltage integrated sensor of second embodiment of the invention, in order to reach brief description
Purpose, in above-mentioned first embodiment, any technical characteristic narration making same application is all and in this,
Without repeating identical narration.
See Fig. 4, this passive current/voltage integrated sensor, the first sensing element and the second sensing
Parts are fixed on transfer wire 7 surface, the first sensing element and the second sensing element by U-shaped folder 6
It is arranged side by side in transfer wire the same side and be parallel to each other, the metal level of the two and transfer wire 7
Distance is different.
In the present embodiment, the first sensing element and the second sensing element can not also be parallel to each other, and
Being to have an angle, the i.e. first sensing element and the second sensing element are fixed on transmission by U-shaped folder 6
Wire 7 surface, the two is along the setting of transfer wire axially different position, and has an angle, and first passes
Sense parts and the second sensing element metal level are different from the distance of transfer wire 7.
Similar with first embodiment, the passive current/voltage integrated sensor of second embodiment of the invention,
The alternating magnetic field that in transfer wire, AC signal the produces magnetic core coil by current sensor, magnetic core line
Circle two ends produce induction electromotive force, and this electromotive force is directly proportional to the electric current of transfer wire, by two biographies
The electromotive force of arbitrary current sensor sensing of sense parts all can calculate the electric current of transfer wire
Value.The voltage sensor of two sensing elements, the metal level of these two voltage sensors and transfer wire
Between distance different, the electric charge number of sensing is different, by detecting the charge inducing of two metal interlevels
Difference can obtain the alternating electric field that transfer wire produces, and then obtain the magnitude of voltage of transfer wire.This
Outward, the distance between electromotive force size and magnetic core coil with the transfer wire of magnetic core coil two ends sensing becomes
Inverse ratio, utilizes the ratio of the electromotive force that the magnetic core coil of two sensing elements produces, can obtain accurately
Distance between magnetic core coil and transfer wire, and the thickness that this distance deducts substrate just can obtain
Sensing element metal level and the distance of transfer wire, calculate the magnitude of voltage of transfer wire.
The passive current/voltage integrated sensor of second embodiment of the invention, sensing element simple in construction,
With low cost, beneficially mass production, it uses passive measurement, it is not necessary to externally fed, power consumption
Low；Current signal and the voltage signal of transfer wire can be detected, it is not necessary to use two sheathed back-ups simultaneously
Do not detect voltage and current, easy to detect, save testing cost；Voltage sensor is made without ground connection
For reference potential, it is to avoid the generation of creepage phenomenon.
The passive current/voltage integrated sensor of third embodiment of the invention, in order to reach brief description
Purpose, in any of the above-described embodiment, any technical characteristic narration making same application is all and in this,
Without repeating identical narration.
The passive current/voltage integrated sensor of third embodiment of the invention, N shell the first sensing element
Stacking forms first sensor group, and N shell the second sensing element stacking forms the second sensor group,
Described N is natural number, and the pad of N shell the first sensing element current sensor passes through wired in series, structure
Becoming a current sensor group, the pad of N shell the second sensing element current sensor passes through wired in series,
Constitute a current sensor group.
The surface with voltage sensor of upper strata sensing element is stacked on having of lower floor's sensing element
On the surface of current sensor, U-shaped folder 6 is fixed on first, second sensing near transfer wire
The underface of parts metals layer.First sensor group and the second sensor group are fixed on by U-shaped folder 6
Transfer wire 7 surface.
The passive current/voltage integrated sensor of third embodiment of the invention, exchange letter in transfer wire
Number alternating magnetic field magnetic core coil by current sensor produced, magnetic core coil two ends produce faradism
Kinetic potential, this electromotive force is directly proportional to the electric current of transfer wire, by the electric current of an arbitrary sensor group
The electromotive force of sensor group sensing all can calculate the current value of transfer wire.First sensor group and
Two sensor groups near the voltage sensor of the sensing element of transfer wire, these two voltage sensors
Metal level different from the distance between transfer wire, the electric charge number of sensing is different, by detection two
The difference of the charge inducing of metal interlevel can obtain the alternating electric field that transfer wire produces, and then is passed
The magnitude of voltage of transporting line.Additionally, the electromotive force size of magnetic core coil two ends sensing and magnetic core coil and biography
Distance between transporting line is inversely proportional to, and utilizes first sensor group and the second sensor group near transmission
The ratio of the electromotive force that the magnetic core coil of the sensing element of wire produces, can obtain near biography accurately
Distance between magnetic core coil and the transfer wire of transporting line, and this distance is deducted the thickness of substrate just
The distance of sensing element metal level and transfer wire can be obtained, calculate the magnitude of voltage of transfer wire.
The passive current/voltage integrated sensor of third embodiment of the invention, uses the N shell of stacking to pass
Sense parts, in the case of sensor overall structure volume increase is the least, substantially increase sensor
Sensitivity.As it is shown in figure 5, described N takes 2, i.e. first sensor group and the second sensor group are by two
Layer sensing element stacking forms, and its situation being fixed on transducer wire surface is similar with Fig. 1, at this not
Repeat again.
Adjacent two layers sensing element is bonded in one piece by seccotine, increases at sensor overall structure volume
Add the least in the case of, substantially increase the sensitivity of sensor.
So far, already in connection with accompanying drawing, the present embodiment has been described in detail.According to above description, this
A kind of passive current/voltage integrated sensor of the present invention should have been had clear by skilled person
Understanding.
It should be noted that in accompanying drawing or description text, the implementation not illustrating or describing,
It is form known to a person of ordinary skill in the art in art, is not described in detail.Additionally,
The above-mentioned definition to each assembly is not limited in various concrete structures, shape or the side mentioned in embodiment
Formula, it can be changed or replace, such as by those of ordinary skill in the art simply:
(1) voltage sensor and current sensor can also select other structures；
(2) the direction term mentioned in embodiment, such as " on ", D score, "front", "rear", " left ",
" right " etc., are only the directions with reference to accompanying drawing, are not used for limiting the scope of the invention；
(3) above-described embodiment can based on design and the consideration of reliability, being mixed with each other collocation use or
Using with other embodiment mix and match, the technical characteristic in i.e. different embodiments can be with independent assortment shape
Become more embodiment.
In sum, a kind of passive current/voltage integrated sensor of the present invention, simple in construction, micro-
Type, low in energy consumption, the linearity is good, and dynamic range is big, accuracy of measurement little, cost affected by environment
Cheap, beneficially mass production, power distribution network current/voltage detection field can be widely applied to.
Particular embodiments described above, is carried out the purpose of the present invention, technical scheme and beneficial effect
Further describe, be it should be understood that the foregoing is only the present invention specific embodiment and
, be not limited to the present invention, all within the spirit and principles in the present invention, that is done any repaiies
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (10)
1. a passive current/voltage integrated sensor, it is characterised in that including: the first sensing
Parts and the second sensing element；Wherein,
The first surface of described first sensing element and the second sensing element has a current sensor, its
The second surface relative with first surface has a voltage sensor；
Described voltage sensor is further fixed on a holder, and described holder is fixed on transfer wire surface,
Described first sensing element and the second sensing element location matches, the voltage sensor of the two is led with transmission
The distance of line is different.
2. passive current/voltage integrated sensor as claimed in claim 1, it is characterised in that
Described first sensing element and the second sensing element include: substrate (1), magnetic core coil (2), connection
Wire (4) and pad (5)；Described magnetic core coil (2) is positioned at the first surface of substrate, and it passes through
The connection wire of first surface is connected with pad, constitutes a current sensor on the first surface, is used for
The current value of sensing transfer wire.
3. passive current/voltage integrated sensor as claimed in claim 1, it is characterised in that
Described first sensing element and the second sensing element include: substrate (1), metal level (3), connection are led
Line (4) and pad (5), described metal level (3) is positioned at the second surface of substrate, and it passes through second
The connection wire on surface is connected with pad, constitutes a voltage sensor on a second surface；
The metal level of described first sensing element and the second sensing element, as induction electrode pair, is used for feeling
Surveying the magnitude of voltage of transfer wire, one of them metal level of described induction electrode pair is as reference potential not
Ground connection.
4. passive current/voltage integrated sensor as claimed in claim 1, it is characterised in that
Described first sensing element and the second sensing element are positioned at transfer wire both sides, position just to and the most flat
OK；Or, described first sensing element and the second sensing element are positioned at the same axial position of transfer wire
Put, and there is an angle.
5. passive current/voltage integrated sensor as claimed in claim 1, it is characterised in that
Described first sensing element and the second sensing element are arranged side by side in transfer wire the same side and the most flat
OK；Or, described first sensing element and the second sensing element set along the axially different position of transfer wire
Put, and there is an angle.
6. passive current/voltage integrated sensor as claimed in claim 1, it is characterised in that
The material of described substrate (1) is selected from silicon, glass, pottery or organic material, and described substrate (1)
With described magnetic core coil (2), thin metal layer (3), be connected wire (4) and pad (5) insulation.
7. passive current/voltage integrated sensor as claimed in claim 2, it is characterised in that
Described magnetic core coil (2) is the array structure magnetic core coil of X row Y row, and wherein, X, Y are certainly
So number.
8. passive current/voltage integrated sensor as claimed in claim 2, it is characterised in that
Described magnetic core coil (2) includes coil and magnetic core, and coil is the stereochemical structure mated with core shapes,
It is generated on substrate by fine process, and its material is copper or silver；Core material is silicon steel
Sheet iron core, permalloy or amorphous and nano-crystal soft magnetic alloy.
9. passive current/voltage integrated sensor as claimed in claim 3, it is characterised in that
Described metal level (3) is generated on substrate by fine process, and its material is silver or copper.
10. passive current/voltage integrated sensor as claimed in claim 3, it is characterised in that
Described holder is fixed on the underface of metal level, and material is pottery, nylon or politef.
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| CN201610329901.4A CN106018917B (en) | 2016-05-18 | 2016-05-18 | A kind of passive Current Voltage integrated sensor |
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| CN201610329901.4A CN106018917B (en) | 2016-05-18 | 2016-05-18 | A kind of passive Current Voltage integrated sensor |
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| CN108761266A (en) * | 2018-06-06 | 2018-11-06 | 浙江巨磁智能技术有限公司 | Microminiature patch type leakage current sensor and its assemble method |
| CN108918950A (en) * | 2018-07-07 | 2018-11-30 | 浙江巨磁智能技术有限公司 | Leakage current sensing chip based on MEMS technology |
| CN110226094A (en) * | 2017-02-17 | 2019-09-10 | 阿尔卑斯阿尔派株式会社 | Current sensor |
| CN111950682A (en) * | 2020-07-29 | 2020-11-17 | 上海优比科电子科技有限公司 | Coil type die-cut label and preparation method thereof |
| CN114814305A (en) * | 2022-04-29 | 2022-07-29 | 启东双赢电子科技有限公司 | Current and voltage integrated sensor |
| CN115524639A (en) * | 2022-10-31 | 2022-12-27 | 硕能(上海)自动化科技有限公司 | Hollow coil cable fault detection system based on MEMS sensor |
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