CN105937882A - Method and apparatus for measuring thickness using color camera - Google Patents
Method and apparatus for measuring thickness using color camera Download PDFInfo
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- CN105937882A CN105937882A CN201610122109.1A CN201610122109A CN105937882A CN 105937882 A CN105937882 A CN 105937882A CN 201610122109 A CN201610122109 A CN 201610122109A CN 105937882 A CN105937882 A CN 105937882A
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- wavelength
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- light intensity
- light
- length coverage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a method and device for measuring thickness using color camera. The method includes filtering operation, light strength obtaining operation, scanning operation and curve graph drawing operation. In filtering operation, a sound light adjustable filter is used for filtering a plurality of wavelengths in a plurality of wavelength range of light emitted of a white light source. In light strength obtaining operation, a color camera is used for obtaining light strength signals of a plurality of wavelengths in a plurality of wavelength ranges at the same time. In scanning operation, a plurality of light strength signals in each wavelength range are obtained through repeated filtering operation and light strength acquiring operation in a condition that scanning is performed in each wavelength range at predetermined intervals at the same frequencdy with wavelengths. The curve graph drawing operation integrates a plurality of light strength signals so as to manufacture the curve graph about all the spectrums relative to the reflection rate.
Description
Technical field
The present invention relates to the method and apparatus for using color video camera to measure thickness, and more specifically
Ground, relates to the method and apparatus using color video camera to measure thickness, scans multiple the most simultaneously
Wavelength is quickly to measure the thickness of thin layer.
Background technology
Along with developing rapidly of the technology throughout current all industrial circles, for quasiconductor, microelectronics
Mechanical system (MEMS), flat faced display, optics etc. are required for microfabrication, and existing
At the nano level Ultra-precision Turning of needs.Additionally, required processing graphic pattern becomes complicated, and therefore,
The importance of the thickness measuring fine thin layer becomes prominent.
It is widely used in the thickness to thin layer and device that reflectance measures is based on reflection measurement
Art.The reflexometer being broadly referred to as thin layer measurement system is contactless and lossless measurement dress
Putting, the characteristic of plural layers can be measured and not have special beam worker by this measurement apparatus
Target object is directly measured in the case of making or processing.
Fig. 1 is the diagram for illustrating to use the method for typical reflection measurement amount thickness.
With reference to Fig. 1, typical reflection meter uses the light from white light source to carry out same with wavelength at a predetermined interval
Scanning that sample is many and obtain light intensity signal 11, light intensity at each wavelength by B/W camera
Signal 12 and light intensity signal 13.Then, multiple light intensities letter that synthesis obtains at each wavelength
Numbers 11, light intensity signal 12 and light intensity signal 13 are to draw reflectance about whole spectrum
The curve chart of (whole spectra), and therefore can measure thin film based on reflectance curve figure
The thickness of layer.
But, conventional method for measuring thickness has following problems: owing to launching about from white light source
Whole spectrum of light perform scanning in the case of at multiple wavelength, obtain multiple light intensity signals,
It is delayed by so obtaining the time that multiple light intensity signal spent.Obtain the time of light intensity signal
Postpone to be directly connected to the performance of measurer for thickness, and therefore cause measurer for thickness to have list
Low measurement performance in bit time.
Summary of the invention
Therefore, present invention seek to address that the problems referred to above, and it is an aspect of the present invention to provide for making
The method and apparatus measuring thickness with color video camera, wherein to many in multiple wave-length coverages of white light
Individual wavelength is filtered, and obtains light intensity signal in each wave-length coverage simultaneously, thus significantly changes
Enter the measuring speed of measurer for thickness.
According to the embodiment of the present invention, it is provided that a kind of side using color video camera to measure thickness
Method, the method uses white light source, acousto-optic tunable filter (AOTF) and color video camera, this sound
Optic tunable filter (AOTF) is for the multiple discrete wave progress to the light come since white light source transmitting
Row filtering, this color video camera is for obtaining the light intensity signal from object reflection, and the method bag
Including: filtering operation, this filtering operation is for by the acousto-optic tunable filter light to launching from white light source
Multiple wave-length coverages in multiple wavelength be filtered；Light intensity obtains operation, and this light intensity obtains
Operation for obtaining the light of the multiple wavelength in above-mentioned multiple wave-length coverage simultaneously by color video camera
Strength signal；Scan operation, this scan operation for by each wave-length coverage at a predetermined interval
Repeat filtering operation in the case of the scanning as much of execution and wavelength and light intensity obtains simultaneously
Operation obtains the multiple light intensity signals in each wave-length coverage of wave-length coverage；And curve chart system
Operating, this curve chart makes operation and is used for synthesizing multiple light intensity signal to make reflectance about entirely
The curve chart of portion's spectrum.
Filtering operation can include simultaneously to red wavelength range, green color wavelength range and blue wavelength
In the range of wavelength be filtered.
According to another embodiment of the present invention, it is provided that a kind of for using video camera to measure thickness
Device, this device includes: white light source；Acousto-optic tunable filter (AOTF), filter that this acousto-optic is adjustable
Ripple device (AOTF) is for entering the multiple wavelength in multiple wave-length coverages of the light launched from white light source
Row filtering；Beam splitter, this beam splitter is for making the light being filtered by acousto-optic tunable filter advance to
Object；Color video camera, this color video camera is used for obtaining multiple ripples of the light from object reflection simultaneously
The light intensity signal of the multiple wavelength in the range of length；Acousto-optic tunable filter controller, this acousto-optic is adjustable
Filter controller for acousto-optic tunable filter send in each wave-length coverage with between predetermined
Every performing with wavelength scanning as much to obtain the filter of the multiple light intensity signals in each wave-length coverage
Ripple signal；And image processor, this image processor is used for synthesizing multiple light intensity signal to make
Reflectance is about the curve chart of whole spectrum.
Acousto-optic tunable filter can be simultaneously to red wavelength range, green color wavelength range and blue ripple
Wavelength in the range of length is filtered.
Accompanying drawing explanation
In conjunction with accompanying drawing according to the description of following illustrative embodiments, the present invention above-mentioned and/or other
Aspect will be clear from and it is more readily appreciated that in the accompanying drawings:
Fig. 1 is the diagram for illustrating to use the conventional method of reflectometry thickness；
Fig. 2 be illustrate according to the embodiment of the present invention for use color video camera measure thickness
The diagram of device；
Fig. 3 is to illustrate that the side of thickness measured by the color video camera that uses according to the embodiment of the present invention
The diagram of method；And
Fig. 4 is that the reflection that the method for thickness is drawn measured by the color video camera that uses being shown through Fig. 3
The diagram of rate curve chart.
Detailed description of the invention
Hereinafter, will be described in detail with reference to the accompanying drawings according to the present invention for using color video camera to measure
The embodiment of the method and apparatus of thickness.
Fig. 2 be illustrate according to the embodiment of the present invention for use color video camera measure thickness
The diagram of device, Fig. 3 is to illustrate that use color video camera according to the embodiment of the present invention is measured
The diagram of the method for thickness, and Fig. 4 be shown through Fig. 3 use color video camera measure thickness
The diagram of reflectance curve figure drawn of method.
With reference to Fig. 2 to Fig. 4, according to the device for using color video camera measurement thickness of the present invention
100 include white light source 110, acousto-optic tunable filter 120, acousto-optic tunable filter controller 130,
Beam splitter 140, color video camera 150 and image processor 160.In this illustrative embodiments
In, can describe by way of example by for measuring the object 3 measured by the device 100 of thickness
Including substrate 1 and the thin layer 2 applied to substrate 1.
White light source 110 is the light source for launching white light, and white light source 110 can include Halogen light,
Light emitting diode (LED) etc..Can be disposed with after white light source 110 for from white light source
110 white lights launched carry out the collimating lens etc. collimated.
Acousto-optic tunable filter (AOTF) 120 can multiple to the light launched from white light source 110
Multiple wavelength 21 in wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40, wavelength 31 with
And wavelength 41 is filtered.Usually, acousto-optic tunable filter 120 can to light relative to entirely
The specific wavelength of portion's spectrum is filtered, or can be to many in the multiple wave-length coverages involved by light
Individual discrete wavelength is filtered.
With reference to Fig. 3, the acousto-optic tunable filter 120 according to present embodiment can be simultaneously to red ripple
A wavelength 21 in long scope 20, a wavelength 31 in green color wavelength range 30 and blueness
A wavelength 41 in wave-length coverage 40 is filtered.Therefore, have and pass through acousto-optic tunable filter
120 are carried out from red wavelength range 20, green color wavelength range 30 and blue wavelength region 40 respectively
The light of three discrete wavelengths 21, discrete wavelength 31 and the discrete wavelength 41 of filtering advances to object 3.
Beam splitter 140 makes have three discrete wavelengths being filtered by acousto-optic tunable filter 120
21, the light of discrete wavelength 31 and discrete wavelength 41 advances to object 3.Additionally, it is anti-from object 3
The light penetrated enters color video camera 150 via beam splitter 140, and this will be explained hereinafter.
Color video camera 150 is arranged in the top of object 3 and obtains light intensity signal simultaneously, described
Light intensity signal have reflected from object 3 multiple wave-length coverages 20 of light, wave-length coverage 30 with
And multiple wavelength 21, wavelength 31 and the wavelength 41 in wave-length coverage 40.
When having respectively at red wavelength range 20, green color wavelength range 30 and blue wavelength region
The light of three discrete wavelengths 21, discrete wavelength 31 and the discrete wavelength 41 that are filtered in 40 from
When object 3 reflects and enters color video camera 150, color video camera 150 can be led to by three
Road i.e. red channel, green channel and blue channel obtain simultaneously three wavelength 21, wavelength 31 with
And the light intensity signal of wavelength 41.
Usually, the charge-coupled image sensor (CCD) of the pixel count with applicable region to be measured is taken the photograph
Camera is used as color video camera 150.Optically focused can be disposed with saturating before color video camera 150
Mirror is to gather the incident illumination from beam splitter 140.
Acousto-optic tunable filter controller 130 is used at corresponding ripple to acousto-optic tunable filter 120 transmission
Perform as wavelength at a predetermined interval in long scope 20, wave-length coverage 30 and wave-length coverage 40
The filtering signal of many scanning.
With reference to Fig. 3, acousto-optic tunable filter controller 130 sends to acousto-optic tunable filter 120 and uses
In simultaneously in a wavelength 21 in red wavelength range 20, green color wavelength range 30
The filtering signal that a wavelength 41 in wavelength 31 and blue wavelength region 40 is filtered.So
After, acousto-optic tunable filter controller 130 sends at red ripple to acousto-optic tunable filter 120
In each wave-length coverage in long scope 20, green color wavelength range 30 and blue wavelength region 40
At a predetermined interval wavelength is increased or decreased, so that the wavelength in the range of respective wavelength is scanned
Filtering signal.
For example, it is assumed that 700nm～610nm is red wavelength range 20,570nm～500nm
Be green color wavelength range 30 and 500nm～450nm be blue wavelength region 40.In this feelings
Under condition, acousto-optic tunable filter controller 130 can send for same to acousto-optic tunable filter 120
Time to 500 in the wavelength 21 of the 610nm in red wavelength range 20, green color wavelength range 30
The filter that the wavelength 41 of the 450nm in the wavelength 31 of nm and blue wavelength region 40 is filtered
Ripple signal.Then, acousto-optic tunable filter controller 130 sends to acousto-optic tunable filter 120 and uses
Will in each wave-length coverage in wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40
Wavelength increases 10nm, to wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40
In each wave-length coverage in the filtering signal that is scanned of whole wavelength.
These are used to process, can be in red wavelength range 20, green color wavelength range 30 and blueness
With the interval of 10nm relative to wave-length coverage 20, wave-length coverage 30 and ripple in wave-length coverage 40
Whole wavelength in each wave-length coverage of long scope 40 obtains multiple light intensity signal 22, light simultaneously
Strength signal 32 and light intensity signal 42.
Image processor 160 synthesizes multiple light intensity signal 22, light intensity signal 32 and light intensity
Signal 42 is to make reflectance curve Figure 50 about whole spectrum.
Owing to being obtained by the red channel of color video camera 150, green channel and blue channel simultaneously
Take the light intensity signal 22 of three wave-length coverages 20, wave-length coverage 30 and wave-length coverage 40, light
Strength signal 32 and light intensity signal 42, so compared to conventional equipment, according to the reality of the present invention
That executes mode can obtain light intensity signal more quickly for measuring the device of thickness.
So, if from the acquisition of each wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40
Light intensity signal 22, light intensity signal 32 and light intensity signal 42 are synthesized, then Ke Yihui
Make the light intensity of light from object 3 reflection about the curve chart of whole spectrum.Then, if from thing
Body 3 reflection light about whole spectrum light intensity signal divided by incide object 3 light about
All light intensity signals of spectrum, then the reflectance curve chart about whole spectrum can be drawn out
50。
Aforesaid reflectance curve Figure 50 of corresponding position on thin layer 2 is being made it
After, the thin layer 2 thickness in corresponding position can be measured based on reflectance curve Figure 50.Cause
For measuring the thickness of thin layer 2 to those skilled in the art based on reflectance curve Figure 50
Method is known, so omitting detailed description.
Will be described below and use the device 100 being previously described for using color video camera to measure thickness,
The method using color video camera measurement thickness according to the present invention.
With reference to Fig. 2 to Fig. 4, according to the method using color video camera measurement thickness of present embodiment
Obtain operation, scan operation and curve chart make operation including filtering operation, light intensity.
Filtering operation uses multiple ripples of the acousto-optic tunable filter 120 light to launching from white light source 110
Multiple wavelength 21 in long scope 20, wave-length coverage 30 and wave-length coverage 40, wavelength 31 and
Wavelength 41 is filtered.
With reference to Fig. 3, according to the filtering operation of present embodiment simultaneously in red wavelength range 20
In a wavelength 31 in one wavelength 21, green color wavelength range 30 and blue wavelength region 40
A wavelength 41 be filtered.Therefore, have by acousto-optic tunable filter 120 respectively from red
Be filtered three of color wave-length coverage 20, green color wavelength range 30 and blue wavelength region 40
The light of discrete wavelength 21, discrete wavelength 31 and discrete wavelength 41 advances to object 3.
Light intensity obtains operation and uses color video camera 150 to obtain multiple wave-length coverage 20, ripple simultaneously
Multiple wavelength 21, wavelength 31 and the light of wavelength 41 in long scope 30 and wave-length coverage 40
Strength signal.
If had respectively from red wavelength range 20, green color wavelength range 30 and blue wavelength model
Enclose the light of 40 three discrete wavelengths 21, discrete wavelength 31 and the discrete wavelengths 41 being filtered from
Object 3 reflects and incides color video camera 150, then color video camera 150 is led to by three
Road i.e. red channel, green channel and blue channel obtain simultaneously three wavelength 21, wavelength 31 with
And the light intensity signal of wavelength 41.
Scan operation obtains the every of wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40 simultaneously
Multiple light intensity signals 22, light intensity signal 32 and light intensity signal 42 in individual wave-length coverage.
Acousto-optic tunable filter controller 130 sends at red ripple to acousto-optic tunable filter 120
In each wave-length coverage in long scope 20, green color wavelength range 30 and blue wavelength region 40
At a predetermined interval wavelength is increased or decreased thus the wavelength in the range of respective wavelength is scanned
Filtering signal.
If in scanning three wave-length coverages 20, wave-length coverage 30 and wave-length coverage 40 respectively
Wavelength in the case of repeat filtering operation and light intensity and obtain operation, then from red wavelength model
Enclose all wavelengths in 20, green color wavelength range 30 and blue wavelength region 40 (especially,
Discrete wavelength from selected from whole wavelength) obtain simultaneously multiple light intensity signal 22, light intensity letter
Numbers 32 and light intensity signal 42.
Curve chart makes operation and synthesizes multiple light intensity signals 22, light intensity signal 32 and light intensity
Signal 42 is to make reflectance curve Figure 50 about whole spectrum.
Obtained in each wave-length coverage 20, wave-length coverage 30 and wave-length coverage 40 by synthesis
Light intensity signal 22, light intensity signal 32 and light intensity signal 42, can make from object 3 anti-
The light intensity of the light penetrated is about the curve chart of whole spectrum.Then, if from the light of object 3 reflection
About the light intensity signal of whole spectrum divided by the light about whole spectrum of the light inciding object 3
Strength signal, then reflectance curve Figure 50 about whole spectrum can be produced.
Aforesaid reflectance curve Figure 50 of corresponding position on thin layer 2 is being made it
After, the thin layer 2 thickness in corresponding position can be measured based on reflectance curve Figure 50.Cause
For measuring the thickness of thin layer 2 to those skilled in the art based on reflectance curve Figure 50
Method is known, so omitting detailed description.
Use the method and apparatus being previously described for using color video camera to measure thickness, many at white light
Multiple wavelength are filtered by individual wave-length coverage, and in each wave-length coverage, obtain light intensity simultaneously
Signal, thus significantly improve the speed that the thickness to thin layer measures.
As it has been described above, the method and apparatus for using color video camera to measure thickness can significantly improve
The speed that the thickness of thin layer is measured.
Although illustrate and describe some illustrative embodiments of the present invention, but people in the art
Member is it will be appreciated that can carry out these embodiments on the premise of without departing from the principle of the invention and spirit
Amendment, the scope of the present invention be defined by the appended.
Claims (4)
1. using the method that thickness measured by color video camera, described method uses white light source, sound
Optic tunable filter and described color video camera, described acousto-optic tunable filter is for coming since described
Multiple discrete wavelengths of the light that white light source is launched are filtered, and described color video camera is for obtaining from thing
The light intensity signal of body reflection, and described method includes:
Filtering operation, described filtering operation is used for by described acousto-optic tunable filter from described white light
Multiple wavelength in multiple wave-length coverages of the light that source is launched are filtered；
Light intensity obtains operation, and described light intensity obtains operation for by described color video camera simultaneously
Obtain the light intensity signal of the plurality of wavelength in the plurality of wave-length coverage；
Scan operation, described scan operation is by performing at a predetermined interval and ripple in each wave-length coverage
Repeat described filtering operation in the case of long scanning as much and described light intensity obtains operation
Obtain the multiple light intensity signals in each wave-length coverage of described wave-length coverage；And
Curve chart makes operation, and described curve chart makes operation and is used for synthesizing the plurality of light intensity signal
To make the reflectance curve chart about whole spectrum.
Method the most according to claim 1, wherein, described filtering operation includes simultaneously to red
Wavelength in color wave-length coverage, green color wavelength range and blue wavelength region is filtered.
3., for using video camera to measure a device for thickness, described device includes:
White light source；
Acousto-optic tunable filter, described acousto-optic tunable filter is for the light launched from described white light source
Multiple wave-length coverages in multiple wavelength be filtered；
Beam splitter, described beam splitter is advanced for making the light being filtered by described acousto-optic tunable filter
To object；
Color video camera, it is many that described color video camera is used for obtaining the light reflected from described object simultaneously
The light intensity signal of the multiple wavelength in individual wave-length coverage；
Acousto-optic tunable filter controller, described acousto-optic tunable filter controller is adjustable to described acousto-optic
Wave filter send in each wave-length coverage at a predetermined interval perform with wavelength scanning as much with
Just the filtering signal of multiple light intensity signals in described each wave-length coverage is obtained；And
Image processor, it is anti-to make that described image processor is used for synthesizing the plurality of light intensity signal
Penetrate the rate curve chart about whole spectrum.
Device the most according to claim 3, wherein, described acousto-optic tunable filter is the most right
Wavelength in red wavelength range, green color wavelength range and blue wavelength region is filtered.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2015-0031810 | 2015-03-06 | ||
| KR1020150031810A KR101650319B1 (en) | 2015-03-06 | 2015-03-06 | Method and Apparatus for measuring thickness using color camera |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105937882A true CN105937882A (en) | 2016-09-14 |
| CN105937882B CN105937882B (en) | 2019-11-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610122109.1A Expired - Fee Related CN105937882B (en) | 2015-03-06 | 2016-03-03 | Method and apparatus for using colour TV camera measurement thickness |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101650319B1 (en) |
| CN (1) | CN105937882B (en) |
| TW (1) | TWI580925B (en) |
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- 2016-03-03 CN CN201610122109.1A patent/CN105937882B/en not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101650319B1 (en) | 2016-08-24 |
| TW201632828A (en) | 2016-09-16 |
| CN105937882B (en) | 2019-11-15 |
| TWI580925B (en) | 2017-05-01 |
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