CN105928625B - Metal surface dynamic temperature point measuring method based on reflectivity change - Google Patents
Metal surface dynamic temperature point measuring method based on reflectivity change Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 84
- 239000002184 metal Substances 0.000 title claims abstract description 84
- 230000008859 change Effects 0.000 title claims abstract description 47
- 238000002310 reflectometry Methods 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims abstract description 31
- 239000000463 material Substances 0.000 claims abstract description 60
- 238000010438 heat treatment Methods 0.000 claims abstract description 35
- 238000006243 chemical reaction Methods 0.000 claims abstract description 14
- 239000007769 metal material Substances 0.000 claims abstract description 13
- 230000008569 process Effects 0.000 claims abstract description 11
- 238000012360 testing method Methods 0.000 claims abstract description 11
- 238000001514 detection method Methods 0.000 claims description 19
- 238000005259 measurement Methods 0.000 claims description 14
- 238000013480 data collection Methods 0.000 claims description 2
- 238000002474 experimental method Methods 0.000 claims description 2
- 238000004093 laser heating Methods 0.000 claims description 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 10
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052802 copper Inorganic materials 0.000 abstract description 7
- 239000010949 copper Substances 0.000 abstract description 7
- 238000012545 processing Methods 0.000 abstract description 7
- 230000008901 benefit Effects 0.000 abstract description 6
- 238000011156 evaluation Methods 0.000 abstract description 5
- 238000004140 cleaning Methods 0.000 abstract description 4
- 238000003698 laser cutting Methods 0.000 abstract description 4
- 238000004458 analytical method Methods 0.000 abstract description 3
- 239000000523 sample Substances 0.000 description 28
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 19
- 239000010931 gold Substances 0.000 description 19
- 229910052737 gold Inorganic materials 0.000 description 19
- 238000003466 welding Methods 0.000 description 5
- 238000011088 calibration curve Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a metal surface dynamic temperature point measuring method based on reflectivity change, which comprises a heating light source, wherein the heating light source is connected with a metal sample, a metal film layer material is plated on the metal sample, the metal sample is arranged on the path of a heating laser beam emitted by the heating light source, the metal sample is connected with a reflected light intensity change testing system, and the reflected light intensity change testing system is connected with a photoelectric conversion trigger. The system can acquire dynamic temperature data of the surface of common metal materials such as aluminum alloy, copper and the like which have high thermal conductivity and can not be welded with the thermocouple, realize the analysis and evaluation of the laser irradiation heat effect of the metal materials, provide a basis for optimizing laser parameters in laser processing processes such as laser cutting, laser cleaning and the like, and achieve economic benefits of improving the laser energy utilization efficiency, reducing the processing cost and the like.
Description
Technical Field
The invention belongs to a measuring system in the field of optics, and particularly relates to a metal surface dynamic temperature point measuring method based on reflectivity change.
Background
The laser has wide application and wide expansion prospect in the military and civil fields, such as laser welding, laser cleaning, laser cutting and the like. The heat effect generated by the laser irradiation of the metal material is one of the effects of the interaction between the laser and the material, and the temperature is used as an important characterization parameter in the heat effect and is a parameter which needs to be measured firstly in the research of the laser irradiation effect and the mechanism of the material. Therefore, the establishment and improvement of the dynamic temperature measuring system and method for the surface of the metal material are always considered important both in China and abroad to meet the requirements of related laser technology application.
At present, the measurement of temperature effect parameters in the research of interaction between laser and materials at home and abroad is mainly based on devices or equipment such as thermocouples, thermal infrared imagers, radiation pyrometers and the like. Aluminum alloy, copper and the like are commonly used metal materials, and due to the thermophysical characteristic of high thermal conductivity, the conventional thermocouple welding mode (discharge welding, laser welding, argon arc welding and the like) cannot stabilize a thermocouple on the surface of the material which is not irradiated by laser to perform measurement. In addition, the thermocouple is used for measuring the temperature of the material, the material needs to be fixed at a measuring position, certain space size requirements are met, meanwhile, the thermocouple is used for measuring the temperature, certain time is needed for the probe and a measuring point to reach temperature balance, and transient temperature change history of the material in a nanosecond time scale range cannot be well acquired. The thermal infrared imager measures the temperature on the premise of accurately knowing the emissivity of a material, and has certain limitation, and meanwhile, the product-grade thermal infrared imager has relatively slow measurement response time which is mostly in millisecond order and cannot meet the transient temperature measurement in the time scale range higher than the millisecond order; meanwhile, the faster the response time of the product-grade thermal infrared imager is, the more expensive the instrument is. Radiation pyrometers are preferably used in the temperature range above 2000K, but do not allow accurate measurements in the temperature range from room temperature to 1000K.
Disclosure of Invention
In order to obtain dynamic temperature data of metal materials which have high thermal conductivity and can not be welded with thermocouples such as aluminum alloy, copper and the like and are not irradiated by laser on a surface focus point in the laser irradiation process, the invention provides a metal surface dynamic temperature point measuring method based on reflectivity change.
The invention is realized by the following technical scheme:
the metal surface dynamic temperature point measuring system based on reflectivity change comprises a heating light source, wherein the heating light source is connected with a metal sample, a light beam is transmitted to act on an experimental target sample to form connection, a metal film layer material is plated on the metal sample, the metal sample is arranged on a path of a heating laser beam emitted by the heating light source, the metal sample is connected with a reflected light intensity change testing system, and the reflected light intensity change testing system is connected with a photoelectric conversion trigger. In order to obtain dynamic temperature data of a focus point on the surface of an unstrained laser irradiation surface of a weldable thermocouple material due to the fact that aluminum alloy, copper and the like have high thermal conductivity in the laser irradiation process, and achieve accurate evaluation of the laser irradiation thermal effect of the material, thereby reducing the laser processing cost and improving the energy utilization efficiency, a measurement system for dynamic temperature change of the surface of a metal material is urgently needed, and the measurement system is used for better revealing the laser irradiation effect mechanism and the evaluation thermal effect of the material. At present, no technology for solving the problems is found in the literature published at home and abroad. The method comprises the steps of polishing one surface of a metal experimental sample to be detected, spraying a metal film layer material in a mirror surface state, providing reflected light intensity change data of the metal film layer material along with temperature change in the laser action process of the metal experimental sample to be detected, synchronously measuring the reflected light intensity of the metal film layer material plated on the non-laser irradiation surface of the irradiated metal sample to obtain reflectivity change data while irradiating the metal sample with laser, obtaining dynamic temperature data of the irradiated metal sample in the laser irradiation process through the unique corresponding relation between the reflectivity of the metal film layer material in the mirror surface state and temperature calibration data, and enabling the obtained data to be high in accuracy.
The reflected light intensity change testing system comprises a detection laser beam, an integrating sphere, a photoelectric detector and a data acquisition and recording memory, wherein a beam splitter is installed on the path of the detection laser beam, the photoelectric detector is installed on the outer wall of the integrating sphere and is connected with the data acquisition and recording memory, and the data acquisition and recording memory is connected with a photoelectric conversion trigger; the size of the light beam of the detection laser beam acting on the surface of the metal film material is hundreds of microns, and the point measurement is taken; the detection laser beam vertically acts on the surface of the metal film layer material after passing through the beam splitter and is led into the integrating sphere, and the light intensity of the reflected light beam is changed into a vertical angle state. The integrating sphere is a collection device for the change of the reflected light intensity, the photoelectric detector is a measuring device for the change of the reflected light intensity and is arranged at a detection port of the integrating sphere, and the data acquisition and recording memory synchronously acquires and records the data of the change signal while the photoelectric detector arranged at the detection port of the integrating sphere starts to measure the change signal of the reflected light intensity of the metal film material. The parts are all the existing mature products and can be directly purchased in the market.
The path of the heating laser beam emitted by the heating light source is provided with a spectroscope, and the beam is guided to the surface of the metal sample which is not plated with the metal film layer material and the photoelectric conversion trigger by the spectroscope. When the output of the heating laser beam acts on the surface of the metal sample material, the heating laser beam triggers the photoelectric conversion trigger, so that the photoelectric detector arranged at the detection port of the integrating sphere starts to synchronously measure the change signal of the reflected light intensity of the metal film material. The photoelectric conversion trigger can realize synchronous measurement of the reflected light change signals of the metal film layer materials, and the spectroscope is an existing mature product and can be directly purchased in the market.
The technical scheme is that the reflectivity is measured by combining an integrating sphere, a metal film layer material in a mirror surface state is sprayed after one surface of a metal experimental sample to be measured is polished, reflection light intensity change data of the metal film layer material along with temperature change is provided in the laser action process of the metal experimental sample to be measured, the reflectivity change data is obtained by synchronously measuring the reflection light intensity of the metal film layer material plated on the non-laser irradiation surface of the irradiated metal sample while the metal sample is irradiated by laser, and the dynamic temperature data of the irradiated metal sample in the laser irradiation process is obtained through the unique corresponding relation between the reflectivity of the metal film layer material in the mirror surface state and temperature calibration data, so that the obtained data is high in accuracy.
Compared with the prior art, the invention has the following advantages and beneficial effects: the system can acquire dynamic temperature data of the surface of common metal materials such as aluminum alloy, copper and the like which have high thermal conductivity and can not be welded with the thermocouple, realize the analysis and evaluation of the laser irradiation heat effect of the metal materials, provide a basis for optimizing laser parameters in laser processing processes such as laser cutting, laser cleaning and the like, and achieve economic benefits of improving the laser energy utilization efficiency, reducing the processing cost and the like.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a calibration chart of the reflectivity of the gold film material and the temperature at the detection wavelength of 488 nm.
Reference numbers and corresponding part names in the drawings:
1-heating laser beam, 2-spectroscope, 3-metal sample, 4-metal film layer material, 5-beam splitter, 6-detecting laser beam, 7-integrating sphere, 8-photoelectric detector, 9-data acquisition and record memory, 10-photoelectric conversion trigger and 11-guiding light.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and the accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not used as limiting the present invention.
Example (b):
as shown in fig. 1, one surface of a metal sample 3 irradiated by a heating laser beam is optically polished, and a metal film layer material 4 with a thickness of micrometer scale is sprayed on the surface by using a vapor deposition or magnetron sputtering method to form a metal experimental sample to be measured, in this embodiment, gold is used as the metal film layer material 4. Before the metal experimental sample to be detected is acted by the heating laser beam 1, the detection laser beam 6 is vertically acted to a focus point of the surface of the metal experimental sample to be detected plated with the gold film layer material through the beam splitter 5, the diameter of the beam is hundreds of microns, and the reflected light is led into the integrating sphere 7 through the beam splitter 5 again; the photoelectric detector 8 is connected with a data acquisition and recording memory 9 to enable the photoelectric detector to be in a state to be tested.
The method comprises the following steps of splitting a heating laser beam 1 by using guiding light 11 through a spectroscope 2 to realize that one beam is guided to the surface of a metal experimental sample to be detected, which is not plated with a gold film layer material; the other beam is led to a photoelectric conversion trigger 10, so that when the heating laser beam 1 irradiates a metal experimental sample to be detected, the change signal of the reflected light of the gold film layer material can be simultaneously measured by a photoelectric detector 8 arranged at a detection port of the integrating sphere, and is synchronously collected and recorded by a data collection and recording memory 9.
During experimental measurement, a heating light source is turned on to output a heating laser beam 1, the heating laser beam 1 heats a test gold, and simultaneously, a photoelectric conversion trigger 10 is acted by the heating laser beam 1 to quickly form an electric trigger signal, so that a photoelectric detector 8 arranged at an integrating sphere detection port synchronously measures a gold film layer material reflected light intensity change signal, a data acquisition and recording memory 9 synchronously acquires and records the change data of the gold film layer material reflected light intensity, and the reflectivity change data of a gold film layer material plated in a metal sample laser heating process can be calculated through a contrast coefficient formed by the known initial reflectivity of the gold film layer material and corresponding reflected light intensity voltage data. Based on the one-to-one calibration correspondence relationship between the reflectivity and the temperature of the gold film material, as shown in fig. 2, the calibration curve of the reflectivity of the gold film material along with the temperature change can be obtained, and the wavelength of the probe beam is 488nm, so that the temperature change data of the gold film material can be obtained. Other wavelengths can be used as detection beams, different metals have corresponding reflectivity when being irradiated, corresponding reflectivity values are obtained by using the scheme, and the temperature change data of the gold film layer material can be obtained by searching corresponding calibration curves.
The method for measuring the reflectivity by using the integrating sphere and the calculating method thereof are common means, and the report for obtaining the reflectivity by using the method is disclosed in the published literature, so the method is not described in detail in the scheme, but the prior measuring technology cannot obtain dynamic temperature data of a focus point on a non-laser irradiation surface of a metal material which has high thermal conductivity and cannot be welded with a thermocouple, such as aluminum alloy, copper and the like. The temperature is obtained by utilizing the unique corresponding relation of the gold film material reflectivity and the temperature calibration which is mastered through one-to-one corresponding relation. Or the unique corresponding relation between the reflectivity of the gold film material and the temperature calibration can be fitted into an expression of the temperature and the reflectivity, as shown in fig. 2, a calibration curve of the reflectivity of the gold film material along with the temperature change can be obtained, the wavelength of a probe beam is 488nm, the temperature change data of the gold film material can be obtained, and the temperature measurement range is related to the range of the corresponding relation between the reflectivity of the gold film material and the temperature change range of the reflectivity change of the material in a test experiment, so that the limited value of the temperature range is avoided.
The method can accurately acquire the dynamic temperature data of the surface of the common metal material such as aluminum alloy, copper and the like which has high thermal conductivity and can not be welded with the thermocouple, realize the analysis and evaluation of the laser irradiation heat effect of the metal material, provide a basis for optimizing laser parameters in the laser processing processes such as laser cutting, laser cleaning and the like, and achieve the economic benefits of improving the laser energy utilization efficiency, reducing the processing cost and the like.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. The method for measuring the metal surface dynamic temperature point based on the reflectivity change is characterized by comprising the following steps of:
(1) One surface of a metal sample (3) irradiated by a heating laser beam is optically polished, and a metal film layer material (4) with the thickness of micron order is sprayed on the surface in an evaporation or magnetron sputtering mode to form a metal experimental sample to be measured;
(2) Before the metal experimental sample to be detected is acted by the heating laser beam (1), the detection laser beam (6) is vertically acted to a focus point of the surface of the metal film layer plated material of the metal experimental sample to be detected through the beam splitter (5), the diameter of the beam is hundreds of microns, and the reflected light is led into the integrating sphere (7) through the beam splitter (5) again; the photoelectric detector (8) is connected with the data acquisition and recording memory (9) to ensure that the photoelectric detector is in a state to be detected;
(3) The method comprises the following steps of splitting a heating laser beam (1) by utilizing a guiding light (11) through a beam splitter (2), and guiding one laser beam to the surface of a metal experiment sample to be detected, which is not plated with a metal film layer material; the other beam is led to a photoelectric conversion trigger (10), so that when the heating laser beam (1) irradiates a metal experimental sample to be detected, a metal film layer material reflected light change signal can be measured by a photoelectric detector (8) arranged at an integrating sphere detection port at the same time and is synchronously collected and recorded by a data collection and recording memory;
(4) During experimental measurement, a heating light source is turned on to output a heating laser beam (1), the heating laser beam (1) heats a test metal material, a photoelectric conversion trigger (10) is acted by the heating laser beam (1) to quickly form an electric trigger signal, so that a photoelectric detector (8) arranged at an integrating sphere detection port synchronously measures a metal film material reflected light intensity change signal, a data acquisition and recording memory (9) synchronously acquires and records change data of the reflected light intensity of the metal film material (4), and the metal sample coated with the metal film material in the laser heating process is calculated through a contrast coefficient formed by the known initial reflectivity of the metal film material (4) and corresponding reflected light intensity voltage data;
still include the metal surface dynamic temperature point measurement system based on reflectivity changes, measurement system includes the heating light source, the heating light source is connected with metal sample (3), and metal film layer material (4) have been plated on metal sample (3), and metal sample (3) set up on the route of the heating laser beam (1) that the heating light source jetted out, and metal sample (3) are connected with reflection light intensity change test system, and reflection light intensity change test system is connected with photoelectric conversion trigger (10).
2. The dynamic metal surface temperature point measuring method based on reflectivity change of claim 1, wherein the reflected light intensity change testing system comprises a detection laser beam (6), an integrating sphere (7), a photoelectric detector (8) and a data acquisition and recording memory (9), a beam splitter (5) is installed on the path of the detection laser beam (6), the photoelectric detector (8) is installed on the outer wall of the integrating sphere (7), the photoelectric detector (8) is connected with the data acquisition and recording memory (9), and the data acquisition and recording memory (9) is connected with a photoelectric conversion trigger (10).
3. The method for measuring the dynamic temperature point on the metal surface based on the reflectivity change of the claim 1, characterized in that a spectroscope (2) is arranged on the path of the heating laser beam (1) emitted by the heating light source, and the light beam is guided to the surface of the metal sample (3) which is not coated with the metal film layer material (4) and the photoelectric conversion trigger (10) through the spectroscope (2).
4. The method for measuring the dynamic temperature point of the metal surface based on the reflectivity change of the claim 2, wherein the size of the light beam of the detection laser beam (6) acting on the surface of the metal film layer material (4) is in the order of hundreds of microns, and the measurement is regarded as point measurement.
5. The method for measuring the dynamic temperature point of the metal surface based on the reflectivity change of the claim 2, characterized in that the detection laser beam (6) vertically acts on the surface of the metal film layer material (4) after passing through the beam splitter (5) and is guided into the integrating sphere (7), and the light intensity of the reflected light beam is changed into a vertical angle state.
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| CN110686810A (en) * | 2018-07-05 | 2020-01-14 | 南开大学 | Online monitoring method for laser cleaning |
| CN113640340B (en) * | 2021-07-21 | 2022-12-02 | 中国科学院上海光学精密机械研究所 | Method for measuring thermal diffusivity and specific heat of solid and verifying result |
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| CN103063616A (en) * | 2012-12-28 | 2013-04-24 | 西北核技术研究所 | Material reflectivity test system under surface airflow effect |
| CN203148845U (en) * | 2013-04-18 | 2013-08-21 | 中国工程物理研究院流体物理研究所 | Device for dynamically measuring laser reflectivity of material under tangential airflow |
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| US5474381A (en) * | 1993-11-30 | 1995-12-12 | Texas Instruments Incorporated | Method for real-time semiconductor wafer temperature measurement based on a surface roughness characteristic of the wafer |
| JP2007271399A (en) * | 2006-03-31 | 2007-10-18 | National Institute Of Advanced Industrial & Technology | Method and device for measuring temperature of substrate |
| CN101726506B (en) * | 2009-12-08 | 2016-03-02 | 武汉嘉仪通科技有限公司 | A kind of phase-change temperature testing system |
| CN105441909B (en) * | 2014-07-08 | 2018-06-26 | 中微半导体设备(上海)有限公司 | A kind of system and method for detecting temperature and the MOCVD device equipped with the system |
| CN205679319U (en) * | 2016-06-20 | 2016-11-09 | 中国工程物理研究院流体物理研究所 | Metal material surface dynamic temperature point based on reflectance change measures system |
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| CN103063616A (en) * | 2012-12-28 | 2013-04-24 | 西北核技术研究所 | Material reflectivity test system under surface airflow effect |
| CN203148845U (en) * | 2013-04-18 | 2013-08-21 | 中国工程物理研究院流体物理研究所 | Device for dynamically measuring laser reflectivity of material under tangential airflow |
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