CN105892451A - Femtosecond laser processing dynamic abnormity diagnosis system and method based on internet remote monitoring - Google Patents
Femtosecond laser processing dynamic abnormity diagnosis system and method based on internet remote monitoring Download PDFInfo
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- CN105892451A CN105892451A CN201610413338.9A CN201610413338A CN105892451A CN 105892451 A CN105892451 A CN 105892451A CN 201610413338 A CN201610413338 A CN 201610413338A CN 105892451 A CN105892451 A CN 105892451A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0208—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
- G05B23/0286—Modifications to the monitored process, e.g. stopping operation or adapting control
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing And Monitoring For Control Systems (AREA)
Abstract
The invention belongs to the technical field of fault diagnosis, and in particular relates to a femtosecond laser processing dynamic abnormity diagnosis system and method based on internet remote monitoring. The femtosecond laser processing dynamic abnormity diagnosis system mainly consists of a laser power meter, a vibration sensor, a displacement sensor, scanning route monitoring software, a camera, a data acquisition system and a cloud server. The invention further discloses a method for processing abnormity diagnosis by using the system. According to monitoring abnormity, an alarm signal can be fed back to a processing system by the cloud server in time, processing data can be compared with a cloud server original formed part mold, if requirements cannot be met, data of the laser power meter, the vibration sensor, the displacement sensor, the scanning route detection software and workpiece three-dimensional morphology images can be analyzed, and thus processing abnormity parts can be positioned. By adopting the system and the method, femtosecond laser processing dynamic abnormity diagnosis and control can be achieved, abnormity positioning and repairing can be achieved, and thus intelligence of the production process can be achieved.
Description
Technical field
The invention belongs to fault diagnosis technology field, particularly relate to a kind of femtosecond laser remotely monitored based on the Internet
Processing dynamic abnormal diagnostic system and method.
Background technology
The proposition of " one with a road " policy and enforcement, equipment to export abroad in a large number, for the stability of system of processing
More and more higher with reliability requirement.The maintenance problem of equipment highlights, equipment vendors and client's hypertelorism, the cost of maintenance of equipment
Can be the highest, therefore be monitored by the big data that the course of processing is produced constantly and analyze, finding that processing is abnormal, carry out diagnosis with
Regulation and control, it is possible to reduce the damage of process equipment, strengthen reliability, reduce cost.Femtosecond laser processing is that one has development very much
May be used for of future obtains the process of three-dimensional nano-micro structure, have high accuracy, not with absorption surface, shadow pollution-free, hot
The advantages such as sound district is little.
Universal with the developing rapidly of Internet technology, intelligence equipment and terminal, research on remote fault diagnosis technology development is gone through
Through a lot of stages, solve fault detect and the reparation problem of association area, but do not combine closely at manufacture field
Various processing methods and feature are effectively studied.Existing research on remote fault diagnosis technology has some limitations, at present
There is not yet for the abnormal open report carrying out diagnosing of femtosecond laser processing.Therefore, the processing dynamic abnormal diagnosis of the present invention
The generation information technology such as system and mobile Internet, cloud computing, big data are combined closely, and use at multiple sensors and data
Reason industrial software, is developed based on the femtosecond laser processing dynamic abnormal diagnostic system remotely monitored, and proposes the specifically side of diagnosis
Method.Real-time, dynamic machining abnormity diagnosis and control can be carried out, the data collected, store are carried out computational analysis, it was predicted that femtosecond
Laser-processing system is abnormal, carries out extremely positioning and repairing, thus it is intelligent to realize production process.
Summary of the invention
It is an object of the invention to study a kind of femtosecond laser processing abnormity diagnostic system remotely monitored based on the Internet
With method, thus realize the abnormal diagnosis of processing and reparation.
The principal character of the present invention is as follows:
(1) femtosecond laser based on the Internet processing dynamic abnormal diagnostic system, mainly by laser power meter, vibrating sensor,
Displacement transducer, scanning pattern monitoring software, video camera, data collecting system and cloud server composition；
(2) femtosecond laser processing dynamic abnormal diagnostic system is used to be processed dynamic abnormal diagnostic method as follows: femtosecond laser
In the course of processing, laser power is a fixed value, and frequency of vibration and amplitude suffered by system of processing are to have a ultimate value
, the displacement of micropositioner is also distinctly claimed according to moulding process, and spacing and the time of scanning pattern arrange interval,
Surface of the work three-dimensional appearance image has processing request.Process these data time, if laser power, frequency of vibration, Oscillation Amplitude,
Scanning pattern, micropositioner actual displacement amount and workpiece three-dimensional appearance image occur abnormal, and cloud server can immediately, promptly give
System of processing returns a caution signals indicating problem；Process data real-time, dynamic will be obtained original with cloud server
Profiled member model contrasts, if not reaching requirement, immediately to laser power meter, vibrating sensor, displacement transducer, scanning road
Footpath inspection software, the data of workpiece three-dimensional appearance image carry out computational analysis, the abnormal position of location processing, feedback signal simultaneously；
(3) power section of femtosecond laser system of processing is laser, the power of laser directly influence add man-hour can molding, one-tenth
The precision of type, the efficiency of molding, use energy meter to monitor laser power in real time；Vibration suffered by system of processing is that impact flies
The key factor of second laser optical path, uses vibrating sensor to monitor the vibration suffered by system；The micropositioner at workpiece place exists
Displacement in forming process is a parameter the most crucial, uses displacement transducer to monitor the displacement data of micropositioner in real time；
Crudy and efficiency are affected very big by femtosecond laser processing scanning pattern, develop scanning pattern monitoring of software, and scanning pattern is soft
Part is monitored the data of femtosecond laser machining path according to Similar Track algorithm by the spacing of scanning pattern and execution time；
(4), at femtosecond laser machine-shaping part, the principle using coded structured light to combine with stereoscopic vision realizes three-dimensional survey
Amount.The contactless method for three-dimensional measurement that this method is built upon in theory on computer vision, he it utilize two positions
Relatively-stationary video camera, obtains two width images of same scenery the most simultaneously, by calculating spatial point at two width figures
Aberration and encoded light projection in Xiang realize corresponding point matching to obtain its D coordinates value；
(5) uploaded to cloud server by the data collection of LabVIEW, memory function, and utilize cloud computing technology and
Real-time process these data of data processing function of LabVIEW, detects processing abnormal data.
The present invention has an advantage will be apparent below:
(1) present invention carries out real-time collecting, storage to femtosecond laser course of processing data, and carries out computational analysis, it is possible to achieve
Femtosecond laser processing dynamic abnormal diagnosis, provides data support for abnormal location with repairing, thus it is intelligent to realize production process；
(2) the femtosecond laser processing dynamic abnormal data of the present invention are sent to cloud server, system meeting in real time by the Internet
After data are carried out computational analysis, the data of storage being carried out network to share, plant maintenance is not by time and region limits；
(3) present invention can further be extended, and collects, stores, processes various function sensor and various intellectual monitoring sets
Standby data, femtosecond laser processing dynamic abnormal diagnostic system function based on remotely monitoring abundant, perfect so that it is can be suitable for
In different monitoring requirements, highly versatile.
Accompanying drawing explanation
Fig. 1 femtosecond laser processing dynamic abnormal monitoring figure.
Fig. 2 femtosecond laser based on the Internet processing abnormity diagnostic system figure.
Detailed description of the invention
In conjunction with accompanying drawing, the present invention is described in further detail.
System sends femto-second laser pulse by femto-second laser, is monitored laser power in real time by laser power meter.
After laser pulse is via attenuator regulation light intensity, enters reflecting mirror 101,102 and 103, be adjusted by beam expanding lens.Pass through
2-D vibration mirror enters lens after adjusting angle of incidence, enters focusing objective len by dielectric mirror after being reflected.By swashing after focusing on
Workpiece on three-dimensional micromotion platform is processed by light, and micropositioner displacement in the femtosecond laser course of processing is a crucial ginseng
Number, uses displacement transducer to monitor the displacement data of micropositioner in real time.
Vibration suffered by femtosecond laser system of processing is the key factor affecting laser optical path, uses vibrating sensor
Vibration suffered by monitoring system.Crudy and efficiency are affected very big by femtosecond laser processing scanning pattern, and scanning pattern is soft
Part is monitored the data of femtosecond laser machining path according to Similar Track algorithm by the spacing of scanning pattern and execution time.
Be placed on the illuminating lamp below workpiece and send illumination light, illumination light through reflecting mirror 104 be focused on CCD105 and
On CCD106, use the principle that coded structured light combines with stereoscopic vision to realize workpiece surface appearance three-dimensional measurement.Pass through
The principle that coded structured light combines with stereoscopic vision is to realize workpiece topography three-dimensional measurement, and this method is built upon computer
Contactless method for three-dimensional measurement in theories of vision, he it utilize two position relatively-stationary video camera CCD105 and
CCD106, obtains two width images of same scenery the most simultaneously, by calculating spatial point aberration in two images
Realize corresponding point matching to obtain its D coordinates value with encoded light projection, thus the course of processing is monitored in real time.
The data collection of data processing industry software LabVIEW, memory function is utilized to be uploaded to cloud server, and
Real-time these data are processed of data processing function according to cloud computing technology and LabVIEW.
Femtosecond laser of the present invention processing exception monitoring system is used to be processed abnormality diagnostic step as follows:
In the femtosecond laser course of processing, laser power is a fixed value, and frequency of vibration and amplitude suffered by system of processing are
Having a ultimate value, the displacement of micropositioner is also distinctly claimed according to moulding process, the spacing of scanning pattern and time
Between interval is set, the feature of workpiece three-dimensional appearance image is compared according to different process requirements.When processing these data,
If laser power, frequency of vibration, Oscillation Amplitude, scanning pattern, micropositioner actual displacement amount and workpiece three-dimensional appearance image occur
It is abnormal,
Cloud server can return an alarm signal immediately, promptly to system of processing；To obtain real-time, add number dynamically
Contrast according to profiled member model original with cloud server, if not reaching requirement, immediately to laser power meter, vibrating sensing
Device, displacement transducer, scanning pattern inspection software, the data of workpiece three-dimensional appearance image carry out computational analysis, and location processing is different
Often position, feedback signal simultaneously.Multiple femtosecond laser systems of processing can be processed abnormity diagnosis, it is achieved exist in real time simultaneously
Line abnormality detection, the data of computational analysis storage, it was predicted that processing is abnormal, reaches Intelligence Feedback control.And storage diagnosis number is provided
According to sharing download and sensor, femtosecond laser process equipment use and keep in repair suggestion.
Claims (5)
1. femtosecond laser based on the Internet processing dynamic abnormal diagnostic system, mainly by laser power meter, vibrating sensor, position
Displacement sensor, scanning pattern monitoring software, video camera, data collecting system and cloud server composition.
2. use femtosecond laser according to claim 1 processing dynamic abnormal diagnostic system to be processed dynamic abnormal diagnosis
Method is as described below, and in the femtosecond laser course of processing, laser power is a fixed value, the frequency of vibration suffered by system of processing
Having a ultimate value with amplitude, the displacement of micropositioner is also distinctly claimed according to moulding process, scanning pattern
Spacing and time arrange interval, and surface of the work three-dimensional appearance image has processing request；When processing these data, if laser merit
Rate, frequency of vibration, Oscillation Amplitude, scanning pattern, micropositioner actual displacement amount and workpiece three-dimensional appearance image occur abnormal, high in the clouds
Server can return an alarm signal immediately, promptly to system of processing；Process data real-time, dynamic and high in the clouds will be obtained
Server original profiled member model contrasts, if not reaching requirement, passes laser power meter, vibrating sensor, displacement immediately
Sensor, scanning pattern inspection software, the data of workpiece three-dimensional appearance image carry out computational analysis, and location processes abnormal position, with
Time feedback signal；Multiple femtosecond laser systems of processing can be processed abnormity diagnosis, it is achieved the abnormal inspection of real-time online simultaneously
Survey, the data of computational analysis storage, be predicted processing abnormal, reach Intelligence Feedback control；And storage diagnosis data are provided
Sharing download and sensor, femtosecond laser process equipment use and keep in repair suggestion.
The most according to claim 1, the present invention uses energy meter to monitor laser power in real time；Vibrating sensor is used to supervise
Vibration suffered by examining system；Displacement transducer is used to monitor the displacement data of micropositioner in real time；Femtosecond laser processing scanning road
Crudy and efficiency are affected very big by footpath, develop scanning pattern monitoring of software, and scanning pattern software is according to Similar Track algorithm
The data of femtosecond laser machining path are monitored by the spacing of scanning pattern and execution time.
The most according to claim 1, at femtosecond laser machine-shaping part of the present invention, use coded structured light and stereoscopic vision phase
In conjunction with principle realize three-dimensional measurement；The contactless three-dimensional measurement that this method is built upon in theory on computer vision
Method, he it utilize two relatively-stationary video cameras in position, obtain two width images of same scenery the most simultaneously, logical
Cross and calculate spatial point aberration in two images and encoded light projection realizes corresponding point matching to obtain its D coordinates value.
The most according to claim 2, the present invention is uploaded to high in the clouds clothes by the data collection of LabVIEW, memory function
Business device, and according to real-time these data are processed of data processing function of cloud computing technology and LabVIEW, detect and add
Work abnormal data.
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Cited By (4)
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|---|---|---|---|---|
| CN106493468A (en) * | 2016-11-03 | 2017-03-15 | 中国工程物理研究院流体物理研究所 | Integrated femtosecond laser micro/nano processing system and processing method based on LabVIEW |
| CN107357257A (en) * | 2017-06-27 | 2017-11-17 | 安徽联亚智能装备制造有限公司 | One kind Laser Processing data collection and fault diagnosis system |
| CN111658309A (en) * | 2020-06-16 | 2020-09-15 | 温州医科大学附属眼视光医院 | Integrated ophthalmic surgery system |
| CN112213073A (en) * | 2020-08-29 | 2021-01-12 | 苏州无用科技有限公司 | Data remote monitoring method and data storage system for lens processing |
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| CN112213073A (en) * | 2020-08-29 | 2021-01-12 | 苏州无用科技有限公司 | Data remote monitoring method and data storage system for lens processing |
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