CN105866982B - It is a kind of based on metal receive sharp battle array electrode electricity adjust transmission optical thin film - Google Patents

It is a kind of based on metal receive sharp battle array electrode electricity adjust transmission optical thin film Download PDF

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Publication number
CN105866982B
CN105866982B CN201610353247.0A CN201610353247A CN105866982B CN 105866982 B CN105866982 B CN 105866982B CN 201610353247 A CN201610353247 A CN 201610353247A CN 105866982 B CN105866982 B CN 105866982B
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metal
sharp
battle array
thin film
optical thin
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CN105866982A (en
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张新宇
张波
吴勇
袁莹
彭莎
信钊炜
魏东
王海卫
谢长生
李大鹏
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Huazhong University of Science and Technology
Shanghai Aerospace Control Technology Institute
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Huazhong University of Science and Technology
Shanghai Aerospace Control Technology Institute
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0121Operation of devices; Circuit arrangements, not otherwise provided for in this subclass

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The invention discloses it is a kind of based on metal receive sharp battle array electrode electricity adjust transmission optical thin film comprising:The planar anode of sharp battle array cathode and one layer of nano thickness is received by the metal of one layer of nano thickness that sharp high-density arrangement is constituted received at nanoscale interval, the anode is made of the metal conductive oxide film of the nano thickness of light transmission, is filled between anodic-cathodic and is electrically isolated film made of the transparent optical medium material of nano thickness;In the case where powering up state, metal is received the electric field that the electronics that can move freely on sharp battle array cathode is encouraged between electrode and is controled, to receive pinnacle assemble, the free electron distribution density received on the flat site between sharp bottom and adjacent cusps is reduced or even is drastically reduced due to the even most free electrons in part are pumped, and will be weakened corresponding to the light transmission rate on each pinnacle for having free electron dense distribution.The present invention can execute automatically controlled modulation to light transmission rate, have the characteristics that be suitable for compared with wide range domain and compared with strong beam, polarization insensitive, control flexibly and light modulation respond it is fast.

Description

It is a kind of based on metal receive sharp battle array electrode electricity adjust transmission optical thin film
Technical field
The invention belongs to optical thin film and optical precision measurement and control technology fields, are based on more particularly, to one kind Metal receive sharp battle array electrode electricity adjust transmission optical thin film.
Background technology
Optical thin film is a kind of important optical element, has that surface is smooth, interface is clear, Refractive Index of Material connects in film Continue in features such as interface transition.The light wave of film surface is incident on by the polarization sexual reflex of film medium and refraction, according to spy Determining optical parameter configuration influences intensity, phase and the polarization state of traveling wave beam, obtains the reflection in specific spectral domain or transmitted light.It is typical Function includes:The reflectivity or transmitance for enhancing wave beam carry out stationary state about to the light vector polarization behavior of reflection or refracted beam Beam executes selective wave spectrum filtering etc. to incident light wave.The miscellaneous optical thin film developed so far is functionally It is broadly divided into following a few classes:Protective film, high-reflecting film, anti-reflection film, polarizing coating, filter coating, color filter, membrane phase, light film and point Light film etc. has been widely used in the fields such as communication, Aeronautics and Astronautics, ship, electronics, machinery, photoelectricity, consumption and scientific research at present. In general, the functional optical film for specific structure or purposes often shows the limited or fixation based on design and craft Index, such as typical high reflectance, high transmittance, high light splitting or optical filtering, high polarizability, constructed transports light wave often quilt It is limited in specific spectral domain.So far, for increasingly complicated demand, optical film technique still in sustained and rapid development, In an important directions be exactly develop optical transmittance can modulation film morphology and framework.Current R&D work mainly collects In in the following areas:(1) the electricity light modulation based on special solution or colloid or electrochomeric films;(2) it is based on special material heat The thermotropic light modulation of physical property or thermochromic thin film;(3) the control optical thin film that photic molecular structure changes;(4) photic special composition The gas chromism film etc. of the physical chemistry effect of gas molecule such as hydrogen etc..To obtain widely applied electricity light modulation glass at present Glass, sunglasses, phase transformation optical window etc. are Typical Representative.Electric dimming film technology, then relatively succinct with its basic micro-nano structure, material The features such as physical property is easy to modulation, and control is flexible, and electro-optic response is quick, and stability is preferable and applied widely, is closed extensively Note.
Although electricity dimming film technology has been obtained in film preparation, optics and electro-optical properties index and application aspect at present Rapid progress for increasingly prominent quick light modulation, stablizes the demands such as modulation, wide range domain, Larger Dynamic range, and still display capabilities are owed It lacks.Summing up mainly has:(1) the electric dimming film based on electroluminescent physicochemical change, state conversion time is long, is changed Learning reaction fluctuation influences, and optical parameter stability is insufficient, and light intensity regulating degree is unable to meet demand, it is difficult to adapt to quickly adjust and want It asks;(2) the electric dimming film based on electrically-controlled liquid crystal, according to electricity of the intrinsic electric moment of liquid crystal material long-chain macromolecule in external electric field Beat attribute is responded, realizes the electric modulation of its transmitance of portions incident light wave, is presented most soon in the slow of sub- Millisecond (commercialization) Electricity adjusts response, and the controlled modulation degree of incident optical energy is low, and spectral range is limited, and liquid crystal film still shows stronger in the case where powering off state Light transmission etc.;(3) it utilizes the hot physical property of material to realize electroluminescent light transmission rate modulation by electric heating, is constrained with thermal inertia Time-consuming for state conversion and stabilisation, and environmental factor dependence is strong, is influenced by the photo-thermal effect of transmission light wave, and control light state will present larger Fluctuation rises and falls, and there are the defects such as the control stability of optical parameter and control accuracy be low;(4) electric light, hot light, magneto-optic are based on Or the dimming film of the phase transformations excitation effect such as acousto-optic, usually only there is more significant automatically controlled optical parameter in phase change zone and change, It is commonly used for the window material of control light intensity or thang-kng spectral domain;(5) other such as based on the spectrum for example typical Fabry- of interference effect Perot effects form the Dimming operation that specific light transports form by building Particular Intervention or diffractive light field, generally there are compared with Strong wave spectrum and polarization selectivity and dependence, electricity adjust operation to be difficult to be unfolded in compared with wide range domain.In short, development is suitable for soon Speed, broadband and stronger luminous power, polarization insensitive control flexible dimming film framework, are still that further development electricity is adjusted at present The hot and difficult issue problem of optical thin film technology, receives significant attention.
Invention content
For the disadvantages described above or Improvement requirement of the prior art, sharp battle array electrode is received based on metal the present invention provides a kind of Electricity adjusts transmission optical thin film, it is intended that realize the automatically controlled modulation of incident light wave its light transmission rate, be suitable for compared with wide range domain and compared with Intense beam power, polarization insensitive, control flexibly, light modulation response is fast, good environmental adaptability.
To achieve the above object, according to one aspect of the present invention, a kind of electricity for receiving sharp battle array electrode based on metal is provided Adjust transmission optical thin film, including a pair of of protective film, planar anode, metal are received and sharp battle array cathode, a pair of of basement membrane and be electrically isolated film, top Protective film and bottom protective film are separately positioned on the top and bottom that electricity adjusts transmission optical thin film, top basement membrane and lower part basement membrane difference It is arranged on the light incident surface and light-emitting face that planar anode and metal receive sharp battle array cathode, planar anode is arranged in top basement membrane Surface, metal are received sharp battle array cathode and are arranged on the surface of lower part basement membrane, and receive point by the high-density arrangement based on nanoscale interval It constitutes, is electrically isolated that film is filled in planar anode and metal is received between sharp battle array cathode.
Preferably, planar anode is made of the nano thickness material of light transmission.
Preferably, the edge of the light incident surface of planar anode is provided with the first electrical lead microbonding area, for accessing gold Belong to electrical lead.
Preferably, there are one anode indicators for setting on planar anode, for pointing out anode end position.
Preferably, metal receive sharp battle array cathode light-emitting face on edge corresponding with the first electrical lead microbonding area, if It is equipped with the second electrical lead microbonding area, for accessing another metal electronic lead.
Preferably, the first electrical lead microbonding area is electrically connected with planar anode, and the second electrical lead microbonding area and metal receive sharp battle array Cathode is electrically connected.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show Beneficial effect:
1, it constitutes the metal of one layer of nano thickness by receiving point in nanoscale interval high-density arrangement metal to receive sharp battle array cloudy It is further coupled with the planar anode of one layer of nano thickness and is filled therebetween the optical media player of nano thickness, structure by pole At can automatically controlled transmitance control optical thin film framework;
2, pass through the electricity in thin application of loads on sealing membrane amplitude, frequency and the different time-sequential voltage signal realization light transmission rate of duty ratio Modulation is controlled, has the advantages that control flexibly and environmental suitability is strong;
3, controling free electron in functionalized electrode by building electric field in the film forms particular spatial distribution form To which specific light transmission behavior be presented, has and control stabilization, veiling glare and thermal environment factor influence low feature;
4, the characteristics of membrane structure presentation is easy to couple with other optics, photoelectricity or electronics structure;
5, with suitable for compared with wide range domain and compared with intense beam power, polarization insensitive, control flexibly and light modulation response is fast Feature.
Description of the drawings
Fig. 1 be the embodiment of the present invention it is a kind of based on metal receive sharp battle array electrode electricity adjust transmission optical thin film anode is mainly presented The structural schematic diagram of end face;
Fig. 2 be the embodiment of the present invention it is a kind of based on metal receive sharp battle array electrode electricity adjust transmission optical thin film cathode is mainly presented The structural schematic diagram of end face;
Fig. 3 be the embodiment of the present invention it is a kind of based on metal receive sharp battle array electrode electricity adjust transmission optical thin film cross-section structure show It is intended to;
Fig. 4 be the embodiment of the present invention it is a kind of based on metal receive sharp battle array electrode electricity adjust transmission optical thin film electrode configuration show It is intended to.
In all the appended drawings, identical reference numeral is used for indicating identical element or structure, wherein:The first electrical leads of 1- Microbonding area, 2- planar anodes, 3- anode indicators, 4- electricity tune transmit optical thin film;5- the second electrical lead microbondings area, 6- metals receive point Battle array cathode, the tops 7- protective film, the tops 8- basement membrane, 9- are electrically isolated film, the bottoms 10- protective film, the lower parts 11- basement membrane
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below It does not constitute a conflict with each other and can be combined with each other.
Fig. 3, which is the embodiment of the present invention, to be received the electricity of sharp battle array electrode based on metal and adjusts the cross-sectional view of transmission optical thin film. As shown, it includes that a pair of of protective film 7 and 10, planar anode 2, metal receive sharp battle array cathode 6, a pair of of basement membrane that electricity, which adjusts transmission optical thin film, 8 and 11 and be electrically isolated film 9.
Top protective film 7 and bottom protective film 10 are separately positioned on the top and bottom that electricity adjusts transmission optical thin film 4.
Top basement membrane 8 and lower part basement membrane 11 are separately positioned on the top of the lower section and bottom protective film 10 of top protective film 7, And be separately positioned on planar anode 2 and metal receive sharp battle array cathode 6 light incident surface and light-emitting face on.
Planar anode 2 is arranged on the surface of top basement membrane 8, and by the nano thickness material of light transmission (such as typical ITO materials Material) it is made.
Metal is received sharp battle array cathode 6 and is arranged on the surface of lower part basement membrane 11, and is arranged by the high density based on nanoscale interval Buna point is constituted.
It is electrically isolated that film 9 is filled in planar anode 2 and metal is received between sharp battle array cathode 6, and there is nano thickness, the electric isolution film 9 had not only played and make planar anode 2 and metal receive between sharp battle array cathode 6 to keep appropriate intervals, but also played and be electrically isolated 2 He of planar anode Metal receives the effect of sharp battle array cathode 6.
As depicted in figs. 1 and 2, the edge of the light incident surface of the planar anode 2 of transmission optical thin film 4 is adjusted to be provided with the in electricity One electrical lead microbonding area 1, for accessing a metal electronic lead;Anode indicator 3 there are one also setting up simultaneously, for pointing out sun Extreme position;Metal receive sharp battle array cathode 6 light-emitting face on edge corresponding with the first electrical lead microbonding area 1, equally set Second electrical lead microbonding area 5 there are one setting, for accessing another metal electronic lead.
First electrical lead microbonding area 1 is electrically connected with planar anode 2, and the second electrical lead microbonding area 5 and metal receive sharp battle array cathode 6 Electrical connection.
In the case where powering up state, metal receives the electric field driven that the electronics that can move freely on sharp battle array cathode is encouraged between electrode, Assemble to each pinnacle, the free electron distribution density on the flat site received between sharp bottom and adjacent cusps is even exhausted because of part Most of electronics are pumped and reduce or even drastically reduce, and are penetrated corresponding to the light having at each pinnacle of free electron dense distribution Rate will reduce and even drastically decline, and the light transmission rate of flat site will then increase and even significantly increase between tip bottom and tip. In the case where powering off state, free electron receive pinnacle distribution density be slightly above periphery and its around distribution density in flat site, Free electron distribution density on planar anode is then roughly the same;By modulation load sharp battle array cathode and planar anode are received in metal Between time-sequential voltage signal amplitude, corresponding to the freely electricity on flat site between modulation pinnacle, tip bottom and adjacent cusps Sub- distribution density executes electricity to incident light wave and adjusts transmitance operation;Pass through the duty ratio for the time-sequential voltage signal that modulation is loaded Or frequency, it controls and the duration that electricity adjusts transmitance operation is executed to incident light wave.
Fig. 4, which is the embodiment of the present invention, to be received the electricity of sharp battle array electrode based on metal and adjusts the electrode configuration schematic diagram of transmission optical thin film. As shown, metal receives the tip of receiving on sharp battle array cathode and uniformly arranged by high density, including typical metal receives sharp battle array and metal Receive line point battle array, adjacent metal receive point space interval in nanoscale, metal is received sharp battle array cathode and is coupled in opposite directions with planar anode, respectively Pinnacle between planar anode at a distance from by control filled optical media player thickness be limited in nanoscale.
With reference to Fig. 1 to 4 illustrate the present invention is based on metal receive sharp battle array electrode electricity adjust transmission optical thin film the course of work. First by a metal electronic lead pressure welding in the first electrical lead microbonding area, equally by another metal electronic lead pressure welding second In electrical lead microbonding area.By for example typical square-wave signal of time-sequential voltage signal all the way with specific amplitude, frequency and duty ratio It is adjusted on transmission optical thin film in electricity by two metal electronic lead loads, positive terminal load therein is on planar anode, negative electricity end Load is received in metal on sharp battle array cathode, and electricity is adjusted transmission optical thin film to be inducted into specific light transmission rate and penetrates light wave to pass through electricity to adjust saturating at this time Penetrate optical thin film.The time-sequential voltage signal amplitude loaded by modulation, adjustment allow by light-wave energy.By changing institute Its duty ratio of time-sequential voltage signal or frequency with specific amplitude of load, change effective operating time of Dimming operation.
It receives the electricity of sharp battle array electrode the present invention is based on metal and adjusts transmission optical thin film, using can with amplitude, frequency and duty ratio The time-sequential voltage signal of modulation, control be incident on based on metal receive sharp battle array cathode electricity adjust transmission optical thin film on light wave penetrate Rate, have the characteristics that be suitable for compared with wide range domain and compared with intense beam power, polarization insensitive, control flexibly and light modulation response it is fast.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to The limitation present invention, all within the spirits and principles of the present invention made by all any modification, equivalent and improvement etc., should all include Within protection scope of the present invention.

Claims (6)

1. the electricity of sharp battle array electrode is received a kind of based on metal transmission optical thin film, including a pair of of protective film, planar anode, metal is adjusted to receive point Battle array cathode, a pair of of basement membrane and be electrically isolated film, which is characterized in that top protective film and bottom protective film be separately positioned on electricity adjust it is saturating Penetrate the top and bottom of optical thin film, top basement membrane and lower part basement membrane are separately positioned on planar anode and metal receives the light of sharp battle array cathode On the plane of incidence and light-emitting face, planar anode is arranged on the surface of top basement membrane, and metal receives sharp battle array cathode setting in lower part basement membrane Surface, and point is received by the high-density arrangement based on nanoscale interval and is constituted, be electrically isolated film and be filled in planar anode and metal It receives between sharp battle array cathode.
2. electricity according to claim 1 adjusts transmission optical thin film, which is characterized in that planar anode is the nano thickness by light transmission Material is made.
3. electricity according to claim 1 adjusts transmission optical thin film, which is characterized in that at the edge of the light incident surface of planar anode Place is provided with the first electrical lead microbonding area, for accessing metal electronic lead.
4. electricity according to claim 3 adjusts transmission optical thin film, which is characterized in that there are one anodes for setting on planar anode Indicator, for pointing out anode end position.
5. electricity according to claim 4 adjusts transmission optical thin film, which is characterized in that receive the light-emitting face of sharp battle array cathode in metal Upper edge corresponding with the first electrical lead microbonding area, is provided with the second electrical lead microbonding area, for accessing another metal electricity Lead.
6. electricity according to claim 5 adjusts transmission optical thin film, which is characterized in that the first electrical lead microbonding area and planar anode Electrical connection, the second electrical lead microbonding area and metal are received sharp battle array cathode and are electrically connected.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102714137A (en) * 2009-10-16 2012-10-03 康奈尔大学 Method and apparatus including nanowire structure
CN103383509A (en) * 2012-05-02 2013-11-06 东南大学 Nanostructure liquid crystal phase modulator
CN103513471A (en) * 2012-06-26 2014-01-15 群康科技(深圳)有限公司 Substrate and display device provided with same
CN103645591A (en) * 2013-12-23 2014-03-19 东南大学 Method for attenuating fringing field effect of silicon-based liquid crystal
CN205691891U (en) * 2016-05-25 2016-11-16 华中科技大学 A kind of based on metal receive point battle array electrode electricity adjust transmission optical thin film

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102714137A (en) * 2009-10-16 2012-10-03 康奈尔大学 Method and apparatus including nanowire structure
CN103383509A (en) * 2012-05-02 2013-11-06 东南大学 Nanostructure liquid crystal phase modulator
CN103513471A (en) * 2012-06-26 2014-01-15 群康科技(深圳)有限公司 Substrate and display device provided with same
CN103645591A (en) * 2013-12-23 2014-03-19 东南大学 Method for attenuating fringing field effect of silicon-based liquid crystal
CN205691891U (en) * 2016-05-25 2016-11-16 华中科技大学 A kind of based on metal receive point battle array electrode electricity adjust transmission optical thin film

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