CN105806414B - Optical fiber Temperature Humidity Sensor, temperature and humidity sensing system and humiture demodulation method - Google Patents
Optical fiber Temperature Humidity Sensor, temperature and humidity sensing system and humiture demodulation method Download PDFInfo
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Abstract
The invention discloses a kind of optical fiber Temperature Humidity Sensor, temperature and humidity sensing system and humiture demodulation method, optical fiber Temperature Humidity Sensor, it is mainly made up of single-mode fiber, bunge bedstraw herb microstructured optical fibers, the part of ultra-violet curing glue-line three；Bunge bedstraw herb microstructured optical fibers one end and single-mode fiber welding, weld the first reflecting surface of formation；The bunge bedstraw herb microstructured optical fibers other end prepares ultra-violet curing glue-line dispensing and by way of solidifying, the second reflecting surface is formed between bunge bedstraw herb microstructured optical fibers and ultra-violet curing glue-line, the 3rd reflecting surface is formed between ultra-violet curing glue-line and outside air, three F P cavity configurations are formed by three reflectings surface；The present invention possesses that integrated level is high, and measurement is accurate, sensitivity, fast response time, the features such as electromagnetism interference, is not only adapted to single-point temperature and humidity measurement, can also realize the quasi-distributed temperature and humidity monitor of multiple spot.
Description
Technical field
The invention belongs to sensory field of optic fibre, more particularly to a kind of optical fiber temperature based on microstructured optical fibers and uv-curable glue
Humidity sensor and its demodulation method.
Background technology
In recent years, developing rapidly for optical fiber sensing technology has obtained more and more extensive concern, is sensed with traditional electricity
Device is compared, and the parameter sensing such as sensitivity, range of dynamic measurement, response time of fibre optical sensor all has greatly improved, and this
Body small in volume, electromagnetism interference easily realizes the remote quasi-distributed sensing of low cost, thus is widely used in agriculture storehouse
The fields such as storage, machine-building, medicine production, Aero-Space and science and techniques of defence.Wherein ambient humidity, is used as most base in production and living
Sheet and important sensing parameter, accurate demodulation one of focus as Fibre Optical Sensor research field is carried out to it.
Based on different structures, there has been proposed a variety of light fibre humidity transducer schemes, such as Sens.Actuators B
Chem.147,385-391 (2010) and IEEE Sensors J, 13 (5), this two articles of 2026-2031 (2013) are proposed
, based on the Sensor Design scheme of fibre optic interferometer structure combination humidity membrane material, the change of humidity membrane material refractive index is drawn
The drift that interferometer interferes wavelength is played, so as to demodulate humidity information；And for example Appl.Opt.52 (1), 90-95 (2012) and
IEEE Photon.Tech.Lett.21 (7), what 441-443 (2009) was proposed is based respectively on the film modified long period light of humidity
The humidity sensor of grid and oblique raster structure, the change of humidity membrane material refractive index, causes the drift of long-period gratings wavelength
The either energy attenuation of oblique raster covering mode of resonance, so as to demodulate humidity information.But these schemes are all based on transmission
Spectrum, while there is larger temperature or stress cross sensitivity, limits actual application field, particularly distribution
The feasibility of sensing.On the other hand, because relative humidity is the function of temperature, the change of temperature can produce larger shadow to humidity value
Ring, in practical application, while it is just meaningful to provide temperature and humidity information.Therefore realize to the same of environment temperature and humidity
When measure, and be easy to the fibre optical sensor scheme of distributed networking and be particularly important.
The content of the invention
The purpose of the present invention is directed in existing fiber humidity sensor technology, is lacked effective humiture and is detected hand simultaneously
Section, and there is provided a kind of optical fiber temperature based on microstructured optical fibers and uv-curable glue for the indifferent deficiency of distributed networking
Humidity sensor and the sensing demodulation method using fast Fourier transform analysis.The present invention possesses integrated level height, and measurement is accurate,
The features such as sensitivity, fast response time, electromagnetism interference, it is not only adapted to single-point temperature and humidity measurement, can also realizes multiple spot quasi- distribution
Formula temperature and humidity monitor.
The purpose of the present invention is achieved through the following technical solutions：A kind of optical fiber Temperature Humidity Sensor, it mainly by
Single-mode fiber, bunge bedstraw herb microstructured optical fibers, the part of ultra-violet curing glue-line three composition；Bunge bedstraw herb microstructured optical fibers one end and single-mode optics
Fine welding, weld the first reflecting surface of formation；The bunge bedstraw herb microstructured optical fibers other end prepares purple dispensing and by way of solidifying
Outer solidification glue-line, forms the second reflecting surface between bunge bedstraw herb microstructured optical fibers and ultra-violet curing glue-line, ultra-violet curing glue-line with it is outer
The 3rd reflecting surface is formed between boundary's air, three F-P cavity structures are formed by three reflectings surface；Outside the bunge bedstraw herb microstructured optical fibers
Footpath is 125 microns, and the internal diameter of fiber core is 11 microns, symmetrical around fiber core to be provided with four central angles for 85 degree, half
Footpath is 64 microns of fan-shaped airport.
A kind of optical fiber temperature humidity sensing system containing above-mentioned optical fiber Temperature Humidity Sensor, in addition to wide spectrum light source, spectrum
Instrument, fiber coupler, data collection processor and temperature and humidity control box；Two branch ends of fiber coupler respectively with wide spectrum optical
Source and spectrometer are attached, and the combining end of fiber coupler is connected with optical fiber Temperature Humidity Sensor, optical fiber Temperature Humidity Sensor
It is placed in temperature and humidity control box, carries out temperature and humidity test；Data collection processor is connected with spectrometer.
A kind of humiture demodulation method based on above-mentioned optical fiber temperature humidity sensing system, this method comprises the following steps：
(1) wide spectrum light source is opened, incident light enters the double F-P chambers knot of optical fiber Temperature Humidity Sensor via fiber coupler
Structure, via three reflectings surface, after reflecting successively, fiber coupler is again passed by into spectrometer receiving terminal, interference spectrum is produced
Signal, data collection processor is collected into by data wire, completes FFT processes, the final frequency spectrum of acquisition and phase information：
The characteristic frequency of the first F-P cavity formed by the first reflecting surface and the second reflecting surface is ξ1, phase of light wave beBy second
The characteristic frequency for the second F-P cavity that reflecting surface and the 3rd reflecting surface are formed is ξ2, phase term beBy the first reflecting surface and
The characteristic frequency for the 3rd F-P cavity that three reflectings surface are formed is ξ3, phase term be
(2) because uv-curable glue has water imbibition, the change of ambient humidity can cause the expansion or shrinkage of uv-curable glue,
Refractive index is decreased or increased, so thatWithChange；And the change of environment temperature can cause optical fiber simultaneously and ultraviolet solid
Change glue expansion or shrinkage, and refractive index change, so as to causeWithChange simultaneously；Pass through data acquisition process
Device is detectedWithChange, according to below equation, the humidity and temperature information of environment can be obtained simultaneously：
In formula, kRH1And kRH3It is respectivelyWithHumidity sensitive coefficient, kT1And kT3It is respectivelyWithTemperature sensitive
Coefficient, Δ φ1With Δ φ3It is respectivelyWithVariable quantity.
The present invention compared with prior art, has the advantages that：
1st, the Temperature Humidity Sensor proposed by the present invention based on microstructured optical fibers and uv-curable glue is fiber reflection formula knot
Structure, the features such as with compact conformation, small volume, electromagnetism interference, is especially easy to real under a wide range of, remote, adverse circumstances
Existing multiple spot quasi-distributed optical fiber sensing.
2nd, humiture demodulation method proposed by the present invention is carried out based on frequency information, by carrying out Fourier to spectrum
Conversion obtains phase information, realizes that temperature and humidity sensing information is demodulated.Compared with the demodulation methods such as traditional spectral wavelength, intensity,
With higher sensitivity, and for interfering the quasi-distributed sensing of formula, formed after the reflective information superposition of multiple sensing heads
Spectrum it is mixed and disorderly, it is difficult to extract wavelength, Strength Changes information, and when being analyzed in a frequency domain, the corresponding feature of different cavity length
Frequency can be easily separated and extract, and facilitate the demodulation of heat transfer agent, with the obvious advantage.
3rd, because relative humidity is the function of temperature, the humidity information that practical application will provide at a temperature of some just has
Meaning.Optical fiber Temperature Humidity Sensor proposed by the present invention based on microstructured optical fibers and uv-curable glue is double F-P chambers structure, can
To demodulate temperature and humidity information simultaneously, so as to meet accurate sensing requirements of the practical application aspect to humidity.
Brief description of the drawings
Fig. 1 is the bunge bedstraw herb microstructured optical fibers schematic cross-section used in the present invention；
Fig. 2 is the structure of the optical fiber Temperature Humidity Sensor based on bunge bedstraw herb microstructured optical fibers and uv-curable glue of the present invention
Schematic diagram；
Fig. 3 is the temperature and humidity sensing system schematic of the present invention；
Fig. 4 is to be based on sensor of the invention sample test spectrogram；
Fig. 5 is the humidity response measurement result figure based on the temperature and humidity sensing system of sample sensor used in Fig. 4；
Fig. 6 is the temperature-responsive measurement result figure based on the temperature and humidity sensing system of sample sensor used in Fig. 4.
Embodiment
The present invention is based on one section of bunge bedstraw herb microstructured optical fibers of welding on general single mode fiber and prepared behind ultraviolet
Solidification glue-line forms the structure of compound F-P cavity.Its principle is due to that different humidity and temperature can change effective chamber of corresponding F-P cavity
It is long, cause the change of wherein phase of light wave, by the change for detecting phase of light wave under multiple different cavity length character pair frequencies simultaneously
Change amount, simultaneous solution can demodulate temperature and humidity many reference amounts information.
Specifically, there is uv-curable glue used in the present invention refractive index after water imbibition, water suction to diminish, therefore when outer
When boundary's humidity changes, F-P cavity, uv-curable glue and the common shape of bunge bedstraw herb microstructured optical fibers that uv-curable glue is independently formed
Into the effective cavity length of compound F-P cavity can all change, after spectrum Fourier transformation, the phase mass meeting of individual features frequency
Change as humidity changes；And the F-P cavity that bunge bedstraw herb microstructured optical fibers are formed is not by effects of humidity change, therefore Fourier
The phase mass of its character pair frequency will keep constant after conversion.For temperature change, by material thermal expansion effects and
Thermo-optic effect is acted on, and the effective cavity length of three F-P cavities can be influenceed by temperature, therefore its character pair frequency after Fourier transformation
The phase mass of rate can all change with the change of temperature.Because the thermal coefficient of expansion and thermo-optical coeffecient of different materials are in the presence of poor
Different, the temperature-responsive of different F-P cavities also differs widely.Therefore optional two F-P cavities, pass through phase under corresponding two characteristic frequencies
Position is responded to the difference of temperature and humidity, is monitored while can just being realized to environment epidemic disaster using matrix method.
Theoretical according to multiple-beam interference, the total light intensity that three reflectings surface 1,2 and 3 reflect can be expressed as：
In formula (1), I1, I2, I3For the reflective light intensity of three reflectings surface, n1, n2Respectively bunge bedstraw herb microstructured optical fibers sandwich layer
The refractive index of pattern effective refractive index and uv-curable glue,Respectively three reflection line position light waves it is initial
Phase.FFT is carried out to spectrogram, frequency domain information can be obtained.Due to there are three reflectings surface, therefore three FP can be formed
Chamber, three characteristic frequencies of correspondence frequency domain spectra：ξ1=2n1L, ξ2=2n2T, ξ3=ξ1+ξ2=2 (n1l+n2t).If using wave numberTo be replaced, then the phase term corresponding to three characteristic frequencies can be expressed as：
Fourier transformation is carried out to (1) formula, F (ξ can be obtainedi)=∑ An(ξi)δ(ξi), i=1,2,3.Due toUnderstandScope be (- π, π), therefore can be sent out when phase reaches-π or π
Raw 2 π saltus step, can pass through(m is integer) carries out phase unwrapping (phase-unwrapped), it is ensured that phase
The monotone variation that position is measured with sensing.
Because uv-curable glue and the length and refractive index of bunge bedstraw herb microstructured optical fibers can all change with temperature, work as temperature
During degree change, there is relationship below：
Φ thus can be respectively obtained1, Φ2, Φ3Temperature control kT1, kT2, kT3。
Because uv-curable glue has water imbibition, to humidity sensitive, when external environment humidity changes, the chamber of uv-curable glue
Long, refractive index changes；And bunge bedstraw herb optical fiber is insensitive to humidity, chamber length and refractive index do not change with humidity, i.e.,Then when humidity changes, there is relationship below：
Therefore, from relation above formula, Φ1It is insensitive to humidity, i.e. kRH1≈ 0, can demodulate environment temperature using it
Information；Φ2, Φ3All to humidity sensitive, and Humidity Sensitivity is identical, i.e. kRH2=kRH3, both optional one can be adopted to demodulation
Ambient humidity information.
With Φ1, Φ3Exemplified by, there is following matrix relationship with humidity and temperature change in two phase changing capacities：
By the way that corresponding humidity and temperature change can be obtained to above-mentioned Matrix Solving：
So as to be monitored while realization to ambient humidity and temperature.
With reference to embodiment and accompanying drawing, the present invention is described in further detail, but embodiments of the present invention are not limited
In this.
Accompanying drawing 1 gives bunge bedstraw herb microstructured optical fibers schematic cross-section used in the present invention.The external diameter of such a optical fiber with
General single mode fiber is identical, is 125 microns, and the internal diameter of fiber core is 11 microns.Due to symmetrical around fibre core 4
Four 85 degree of central angles, the fan-shaped airport 5 of 64 microns of radius, therefore name such a special microstructured optical fibers micro- for bunge bedstraw herb
Structured optical fiber.
Accompanying drawing 2 gives the optical fiber Temperature Humidity Sensor based on bunge bedstraw herb microstructured optical fibers and uv-curable glue of the present invention
Structural representation, it is mainly made up of single-mode fiber 1, bunge bedstraw herb microstructured optical fibers 2, the part of ultra-violet curing glue-line 3 three.Single mode
Optical fiber 1 and bunge bedstraw herb optical fiber 2 carry out welding using optical fiber splicer, due to a diameter of the 11 of bunge bedstraw herb microstructured optical fibers fibre core 4
Micron, and single-mode fiber sandwich layer diameter mismatch, therefore it is here formed as first reflecting surface 6.Under microscope, pass through side for dispensing glue
Formula prepares ultra-violet curing glue-line 3 in the rear end of bunge bedstraw herb microstructured optical fibers 2, and is solidified under ultraviolet curing lamp, forms four leaves
The second reflecting surface 7 between careless microstructured optical fibers 2 and ultra-violet curing glue-line 3, and between ultra-violet curing glue-line 3 and air
Three reflectings surface 8.By three F-P cavity structures of three formation of reflecting surface 6,7,8, the fiber F-P type for finally constituting the present invention is warm and humid
Spend sensor.
As shown in Figure 3, using above-mentioned optical fiber Temperature Humidity Sensor 13 temperature and humidity sensing system include wide spectrum light source 10,
Fiber coupler 12, spectrometer 11, data collection processor 15 and temperature and humidity control box 14.First by fiber coupler 12
Two branch ends 12-1,12-2 are attached with wide spectrum light source 10 and spectrometer 11 respectively, then by the combining of fiber coupler 12
End 12-3 is connected with optical fiber Temperature Humidity Sensor 13, and finally optical fiber Temperature Humidity Sensor 13 is put into temperature and humidity control box 14,
Temperature and humidity test is carried out, then the transfer spectral information that spectrometer 11 is received carries out data point into data collection processor 15
Analysis obtains the humiture sensitivity of each F-P cavity.
By above-mentioned optical fiber Temperature Humidity Sensor, the length of bunge bedstraw herb microstructured optical fibers 2 is in 150 microns, ultra-violet curing
The thickness of glue-line 3, specifically can be according to the compound F-P cavity reflectance spectrum Fast Fourier Transform (FFT) to formation in tens micron dimensions
(FFT) actual requirement of spatial frequency afterwards, by the length and ultra-violet curing glue-line 3 that adjust the micro, slight structured optical fiber 2 of bunge bedstraw herb
Dispensing thickness, to design the different cavity length ratio of compound F-P cavity.
Embodiment：
Temperature and humidity test is carried out to a certain sensing sample, obtains attached by carrying out Fourier transformation to obtained reflectance spectrum
Frequency domain spectrum information shown in Fig. 4, three F-P cavity three characteristic frequencies of correspondence, because the size of characteristic frequency is proportional to F-P cavity
It is long, therefore three spectral peaks are from left to right corresponding in turn to ultra-violet curing glue-line 3, bunge bedstraw herb microstructured optical fibers 2 and compound F-P cavity (purple
The length of outer solidification glue-line 3 is less than the length of bunge bedstraw herb microstructured optical fibers 2).The phase information at optional two peaks is used as humiture
The foundation of demodulation, herein by taking latter two peak as an example.
Using temperature and humidity control box keep environment temperature at 21 DEG C, with 5% for regulation unit, by relative humidity from 15% by
Gradually improve to 90%, the spectral information under each humidity is recorded respectively, and carry out Fourier transformation, obtain two shown in accompanying drawing 5
The phase place change of individual F-P cavity, carries out fitting a straight line by the phase to drafting-temperature curve, and calculates straight slope to understand four
The Humidity Sensitivity k of leaf grass microstructured optical fibers F-P cavity phaseRH1≈ 0, is combined the Humidity Sensitivity k of F-P cavity phaseRH3=
0.025rad/%RH.
Keep ambient humidity 30% using temperature and humidity control box, be regulation unit with 5 DEG C, temperature is gradually carried from 30 DEG C
Up to 55 DEG C, the spectral information at each temperature is recorded respectively, and carries out Fourier transformation, obtains two F-P shown in accompanying drawing 6
The phase place change of chamber, carries out fitting a straight line by the phase to drafting-temperature curve, and calculates straight slope to understand that bunge bedstraw herb is micro-
The temperature control k of structured optical fiber F-P cavity phaseT1=0.018rad/ DEG C, it is combined the temperature control k of F-P cavity phaseT3=
0.065rad/℃。
Finally, four humiture sensitivity of the two F-P cavities are substituted into (12) formula, by phase place change, solved such as
Lower matrix form (13) demodulates while can just realizing to ambient humidity and temperature：
Claims (1)
1. a kind of humiture demodulation method of optical fiber temperature humidity sensing system, the temperature and humidity sensing system includes wide spectrum light source
(10), spectrometer (11), fiber coupler (12), data collection processor (15) and temperature and humidity control box (14)；Fiber coupling
Two branch ends (12-1,12-2) of device (12) are attached with wide spectrum light source (10) and spectrometer (11) respectively, fiber coupling
The combining end (12-3) of device (12) is connected with optical fiber Temperature Humidity Sensor (13), and optical fiber Temperature Humidity Sensor (13) is placed in humiture
In control cabinet (14), temperature and humidity test is carried out；Data collection processor (15) is connected with spectrometer (11)；
Described optical fiber Temperature Humidity Sensor (13) is by single-mode fiber (1), bunge bedstraw herb microstructured optical fibers (2), ultra-violet curing glue-line
(3) three parts are constituted；Bunge bedstraw herb microstructured optical fibers (2) one end and single-mode fiber (1) welding, weld the first reflecting surface of formation
(6)；Bunge bedstraw herb microstructured optical fibers (2) other end prepares ultra-violet curing glue-line (3) dispensing and by way of solidifying, and bunge bedstraw herb is micro-
Form the second reflecting surface (7) between structured optical fiber (2) and ultra-violet curing glue-line (3), ultra-violet curing glue-line (3) and outside air it
Between form the 3rd reflecting surface (8), form three F-P cavity structures by three reflectings surface (6,7,8)；The bunge bedstraw herb microstructured optical fibers
External diameter is 125 microns, and the internal diameter of fiber core is 11 microns, symmetrical around fiber core to be provided with four central angles for 85 degree,
Radius is 64 microns of fan-shaped airport (5)；
Described humiture demodulation method comprises the following steps：
(1) wide spectrum light source (10) is opened, incident light enters the double of optical fiber Temperature Humidity Sensor (13) via fiber coupler (12)
F-P cavity structure, after being reflected successively via three reflectings surface (6,7,8), again passes by fiber coupler (12) and enters spectrometer
(11) receiving terminal, produces interference spectrum signal, and data collection processor (15) is collected into by data wire, completes FFT mistakes
Journey, the final frequency spectrum of acquisition and phase information：The first F-P cavity formed by the first reflecting surface (6) and the second reflecting surface (7)
Characteristic frequency is ξ1, phase of light wave beThe second F-P cavity formed by the second reflecting surface (7) and the 3rd reflecting surface (8)
Characteristic frequency is ξ2, phase term beThe feature of the 3rd F-P cavity formed by the first reflecting surface (1) and the 3rd reflecting surface (8)
Frequency is ξ3, phase term be
(2) because uv-curable glue has water imbibition, the change of ambient humidity can cause the expansion or shrinkage of uv-curable glue, refraction
Rate is decreased or increased, so thatWithChange；And the change of environment temperature can cause optical fiber and uv-curable glue simultaneously
Expansion or shrinkage, and refractive index change, so as to causeWithChange simultaneously；Pass through data collection processor 1
DetectionWithChange, according to below equation, the humidity and temperature information of environment can be obtained simultaneously：
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In formula, kRH1And kRH3It is respectivelyWithHumidity sensitive coefficient, kT1And kT3It is respectivelyWithTemperature sensitive coefficient,
Δφ1With Δ φ3It is respectivelyWithVariable quantity.
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| CN109142277B (en) * | 2018-07-16 | 2021-05-14 | 哈尔滨工程大学 | Optical fiber humidity sensor combined with spider egg-wrapped silk and manufacturing method |
| CN109580035B (en) * | 2018-12-05 | 2020-08-18 | 天津大学 | Sapphire optical fiber high-temperature sensor with high fringe visibility and temperature measuring method thereof |
| DE202019004415U1 (en) * | 2019-10-28 | 2019-11-06 | K.W.H. Ciclosport Vertriebs GmbH | sensor device |
| CN111999263B (en) * | 2020-07-10 | 2022-10-04 | 之江实验室 | Mesoscale micro-nano optical fiber humidity sensor |
| CN114705229A (en) * | 2022-03-29 | 2022-07-05 | 深圳市联创杰科技有限公司 | Substrate-adjustable optical fiber FP composite temperature and humidity sensor chip based on sensitive material |
| CN117433587B (en) * | 2023-12-14 | 2024-03-19 | 江苏南方通信科技有限公司 | Symmetrical-structure multi-parameter weak grating sensing optical cable, sensing system and measuring method |
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| CN102262062B (en) * | 2011-04-26 | 2012-11-14 | 浙江大学 | Microstructure fiber Bragg grating gas sensor and detection device |
| CN104345046A (en) * | 2013-08-03 | 2015-02-11 | 重庆绿色智能技术研究院 | Optical fiber interferometer, optical fiber sensor and production method thereof |
| JP6470762B2 (en) * | 2014-03-31 | 2019-02-13 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | Optical connector for aseptic applications |
| CN104596559B (en) * | 2015-01-21 | 2017-08-01 | 哈尔滨工业大学深圳研究生院 | A kind of optical fiber F P Multifunction Sensors based on micropore optical reflection barrier film |
| CN205067340U (en) * | 2015-10-27 | 2016-03-02 | 中国计量学院 | Sensing system of detection ring border humidity |
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