CN105531580B - Multicomponent laser type gas analyser - Google Patents
Multicomponent laser type gas analyser Download PDFInfo
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- CN105531580B CN105531580B CN201480050816.3A CN201480050816A CN105531580B CN 105531580 B CN105531580 B CN 105531580B CN 201480050816 A CN201480050816 A CN 201480050816A CN 105531580 B CN105531580 B CN 105531580B
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- 238000001514 detection method Methods 0.000 claims abstract description 115
- 238000005286 illumination Methods 0.000 claims abstract description 68
- 239000007789 gas Substances 0.000 claims description 344
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 109
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 109
- 238000010521 absorption reaction Methods 0.000 claims description 79
- 230000003287 optical effect Effects 0.000 claims description 65
- 238000012545 processing Methods 0.000 claims description 38
- 238000004611 spectroscopical analysis Methods 0.000 claims description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 16
- 238000004868 gas analysis Methods 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- 238000001228 spectrum Methods 0.000 claims description 10
- 230000007480 spreading Effects 0.000 claims description 10
- 238000003892 spreading Methods 0.000 claims description 10
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- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
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- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
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- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
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- 229910000831 Steel Inorganic materials 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
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- 238000003763 carbonization Methods 0.000 description 1
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- 238000000041 tunable diode laser absorption spectroscopy Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
- G01N2021/399—Diode laser
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
Abstract
The present invention provide it is a kind of with a table apparatus simultaneously, high speed, high-precision, high sensitivity, high stability to O2The laser type gas analyser that gas concentration and CO gas concentrations are measured.It is proposed a kind of multicomponent laser type gas analyser, broadband photo detector receives the first detection light via the through hole with illumination region hole parabolic mirror and focused broad-band lens during some, and, broadband photo detector receives during other via the second detection light with illumination region hole parabolic mirror and focused broad-band lens, based on the first, second detection signal received from broadband photo detector during difference come separately to O2Gas concentration and CO gas concentrations are measured.
Description
Technical field
The present invention relates to the multicomponent laser analyzed the presence or absence of various measure object gases in space, concentration
Formula gas analyser.
Background technology
Laser type gas analyser such as in the heat treatment of petrochemical plant, thermal power generation in for high-temp combustion
The monitoring of the combustion state of gas.The parameter of combustion state is typically the O in exhaust gas composition2(oxygen) gas concentration and CO (one
Carbonoxide) gas concentration.This point is illustrated with reference to attached drawing.Fig. 5 is to indicate that excess air ratio in burner and gas are dense
The performance plot of relationship between degree.In addition, disclosing the Fig. 5 as Fig. 2 of aftermentioned patent document 1.Pass through the performance plot
Understand following situation.
(a) as the increase of excess air ratio, i.e. oxygen increase, the not used oxygen of burning institute increases, O2Gas is dense
Degree can also improve.And then remaining oxygen aoxidizes nitrogen, to which NOx gas concentrations can also improve.In this way, prison can be passed through
Depending on O2Gas concentration judges air excess.
(b) on the contrary, as excess air ratio reduces, i.e. oxygen is reduced, become imperfect combustion, CO gas concentrations carry
It is high.In turn, the not used fuel (hydro carbons) of burning institute increases, and the gas concentration of fuel can also improve.In this way, can be by monitoring CO
Concentration judges lack of air.
Therefore, by the O in exhaust2Gas concentration and CO gas concentrations are monitored, remain complete on one side to realize
Combustion state makes excess air become minimum most suitable Combustion System on one side.Moreover, it is achieved that smaller efficient of energy loss
Burning.In addition to this, the discharge of the Nox gases as environmental pollutants can also be mitigated.
Then, the prior art of the multi-component gas analysis in exhaust is illustrated.For example, as it is known that patent document 1,2
Technology disclosed in recorded invention, non-patent literature 1.The content of each document is summarized, and is come to this with reference to attached drawing
A little prior arts illustrate.
As the prior art 1, it is known to the invention recorded in patent document 1.Fig. 6 be comprising used the prior art swash
The overall structure figure of the combustion system of the combustion gas analysis device of light.Combustion system 100 has burning in fence/wall 101
Device 102,103.Air and fuel are supplied to these burners 102,103.Flame 104,105 from burner 120,103
Hydrocarbon in pipeline 106 is heated.
Combustion gas analysis device has comprising tunable diode laser (being expressed as TDL below) 107,109 and inspection
Survey two groups of TDL analysis systems of device 108,110.Water (H of this two groups of TDL analysis systems to carbon monoxide (CO), gas phase2O) with
And the hydrocarbon of gas phase (such as includes methane (CH4)) be measured.In addition, combustion gas analysis device is sensed comprising zirconium oxide
Device 111,112.111,112 couples of oxygen (O of zirconia sensor2) be measured.
The gas analysis is carried out using optical measurement is TDL light splitting.TDL light splitting in, with CO, H2O and carbonization
Hydrogen (CH4Deng) laser is absorbed under the wavelength of related each absorption peak.The amount of the light absorbed, which is used, passes through other sides
The function of gas concentration, pressure, temperature and the optical path length that formula is detected, measures indicates.According to following (1)~
(4) sequence carries out the gas analysis.
(1) tunable diode laser of monomer irradiates the light that wavelength is adjusted in the range of 2.0~2.5 μm.
The light is incident upon photodetector by burning gases.Photodetector generates the absorption distribution of burning gases.
(2) absorption of burning gases distribution is digitized.
(3) digital computer preserves the absorption distribution after digitlization.
(4) digital computer handles the absorption distribution after digitlization, to CO, H in burning gases2O and
Hydrocarbon (CH4Deng) concentration be measured.
Here, due to can simultaneously to CO, H2O and hydrocarbon (CH4Deng) be measured, therefore, from following multiple candidate items
Select wavelength.
It, can be from 2302.1 when the temperature of burning gases is about 1100 DEG C；2303.9；2319.1；2323.6；2325.2；
2326.8；2331.9；2333.7；2335.5；2342.8；2346.8；2348.2；2356.1；2363.1；And 2373.1 these are special
It is selected in fixed wavelength (nanometer).
In addition, when the temperature of burning gases is about 300 DEG C, it can be from 2307.8；2320.6；2323.6；2331.9；
2339.3；2353.9；2360.8；2368.0；2373.1；2389.3；And 2401.0 carry out in these specific wavelength (nanometer)
Selection.
Best wavelength selection depends on purposes, is determined by the experiment of appropriateness.In the measurement, using multivariable mould
Type, the multivariate model utilize measurement result at multiple wavelengths.The combustion gas analysis device using multiple wavelength come into
Row laser gas analysis calculates the water of the carbon monoxide in burning gases, gas phase and the carbon of gas phase using multivariate model
Change the gas concentration of hydrogen.In addition, zirconia sensor is measured the gas concentration of oxygen.That is, to the CO in burning gases
Gas concentration and O2Gas concentration is measured.Invention recorded in patent document 1 is as described above.
In addition, as the prior art 2, it is known to the invention recorded in patent document 2.The content of reference following documents is gone forward side by side
Row is summarized, with the present invention will be described.Fig. 7 is the whole knot of the gas concentration measuring apparatus for the laser for having used the prior art
Composition.The gas concentration measuring apparatus measures two kinds of gas concentrations using two laser diodes.
The light source of laser is by first laser diode (LD1) 201 and second laser diode (LD2) 202 compositions.First swashs
Optical diode 201 and LD1Current driving circuit 203,204 is connected, and controls temperature and electric current.Two pole of second laser
Pipe 202 and LD2Current driving circuit 205,206 is connected, and controls temperature and electric current.
LD1Be applied with respectively via adder 207 on current driving circuit 203 first DC current 208, harmonic wave 209,
Tuning signal 210,211, the pulse signal 212a of timesharing unit 212 and wavelength-locking signal 213.In addition, LD2Electric current drives
Be applied with respectively via adder 214 on circuit 205 second DC current 215, harmonic wave 209, tuning signal 210,211, point
The pulse signal 212a and wavelength-locking signal 213 of Shi Danyuan 212.
First laser diode 201 replaces starting of oscillation with second laser diode 202.First laser diode 201 utilizes institute
The electric current (the first DC current 208, pulse signal 212a electric currents after being added) of application, in the absorbing wavelength of first gas ingredient
λ1Lower starting of oscillation.In addition, second laser diode 202 utilizes applied electric current (the second DC current 215 and pulse signal 212a
Electric current after being added), in the absorbing wavelength λ of second gas ingredient2Lower starting of oscillation.
In this way, using wave multiplexer 216 to from first laser diode 201 starting of oscillation laser and come from two pole of second laser
The starting of oscillation laser of pipe 202 is alternately carried out interflow, and makes it through the laser optical path of optical fiber and be incident upon channel-splitting filter 217.From point
The laser beam that wave device 217 irradiates is exported via a lens (collimator) 218 and by gas circulating area to another
A lens (condenser lens) 219.
The photoelectricity of the light receiving unit 220 near another lens 219 is configured in by the laser after gas circulating area
Diode (PD) is received.Based on the gas absorption signal received by light receiving unit 220, the demodulation process unit of rear class is utilized
221, standard signal processing unit 222, AD converter 223 and computer 224, to calculate two kinds of gas concentrations.
The wavelength X from first laser diode 201 is shown in Fig. 81Starting of oscillation and come from second laser diode 202
Wavelength X2Starting of oscillation summary.As wavelength X1During starting of oscillation with wavelength X2The laser being alternately present during starting of oscillation.It can root
According to wavelength X1The absorption signal of gas in the time of starting of oscillation measures the gas concentration of first gas, and according to wavelength X2It rises
The absorption signal of the gas in time to shake measures the gas concentration of second gas.
In addition, time segmentation (it is corresponding between the timing of Δ t) and the gas signal taken out, in computer 224 certainly
It is dynamic to be calculated.Multiple gases concentration can be simply and reliably calculated as a result,.
In this way, even if the first, second laser beam is by can be with time-sharing format alternately to light list if identical optical axis
Therefore the 220 each laser of irradiation of member is easy to take out signal corresponding with each gas.
The gas concentration measuring apparatus of such prior art with boiler, waste incinerator, burn organ combustion chamber etc.
Generated gas or the gas being discharged from the closed container to outside are used as detection object in closed container.In the prior art
In, the first, second gas componant gas is with NH3Gas and H2O gases are object, but can be by the change of wavelength come to O2Concentration
It is detected with CO concentration.Such gas concentration measuring apparatus utilizes laser to be measured these gases, so as to
Efficiently multiple gases concentration is measured.Invention recorded in patent document 2 is as described above.
In addition, having the discovery recorded in non-patent literature 1 as the prior art 3.This be the discovery that about to CO into promoting the circulation of qi
The discovery of the influence of moisture when body is analyzed.The record of reference non-patent literature 1 is directed at the discovery while being summarized and says
It is bright.
To utilizing the variable-wavelength semiconductor laser for assuming the CO gas concentrations in burning gases in the non-patent literature 1
Optical spectroscopy (being denoted as TDLAS below) and the analysis made are recorded.In addition, the wavelength tuning point to improving detection sensitivity
Light method (being denoted as WMS below) is recorded.
Quilt has been used in the performance plot of the absorption spectrum of the expression high temperature of Fig. 9, the moisture bearing gas of high concentration and CO gases
The absorption line of the CO gases of referred to as R (10), R (11).R (10), R (11) are the absorption lines positioned at 2.3 micron band of wavelength.
R (10) is in wave number 4297.7cm-1Peak value with absorption intensity at (wavelength 2326.8nm), R (11) is in wave number 4300.7cm-1
Peak value with absorption intensity at (wavelength 2325.2nm).
In the Fig. 9, further it is shown that comprising R (10), R (11) wavelength region in CO gases, moisture absorption spectrum.
The wavelength periphery of R (10), R (11) have moisture absorption intensity, therefore, high temperature, high concentration moisture environment under CO
Concentration mensuration is along with moisture interference.Even so, R (10), R (11) wavelength under moisture absorption it is also smaller.One lateral dominance
Inhibit the influence of moisture with the absorption line of these R (10) or R (11), detects the absorption of CO gases on one side.Mainly by moisture
It interferes to determine the measurement accuracy of CO gas concentrations.
Invention recorded in non-patent literature 1 is as described above.
Existing technical literature
Patent document
Patent document 1：Japanese Patent Laid 2010-519544 bulletins (denomination of invention " combustion gas analysis ")
Patent document 2：Japanese Patent Laid-Open 2012-108156 bulletins (denomination of invention " gas concentration measuring method and dress
Set ")
Non-patent literature
Non-patent literature 1：Measurement Science and Technology (measure science and technology), and 20
(2009) 115201 (9pp) (thesis topic " Absorption sensor for CO in combustion gases using
2.3 μm of tunable diode lasers (are passed using the absorption of CO in the burning gases of 2.3 μm of tunable diode lasers
Sensor) ")
Invention content
The technical problems to be solved by the invention
Recorded in patent document 1 in the prior art, right in order to carry out gas concentration analysis using multivariate model
Including the larger wavelength of the amplitude of the wavelength of multiple absorption lines is scanned.Suction is obtained therefore, it is necessary to be used to be scanned
Receive the time of light data.In addition, wavelength is not used to modulate optical spectroscopy.For these reasons, it is difficult at a high speed and right in high sensitivity
The CO gas concentrations of low concentration are detected.In addition, one group of transmission unit and detector are measured CO gases, zirconium oxide passes
Sensor is to O2Gas is measured, therefore, it is necessary to multiple transparency windows, sensor-disposed portion position are set in stove, the system in design
It is about more.
Recorded in patent document 2 in the prior art, in order to two laser diodes 201,202 are set as same laser
Light beam, using the laser optical path of wave multiplexer 216 and optical fiber.Generally, it is combined simultaneously by the laser from multiple laser diodes
When being transmitted, light quantity is set to reduce because of insertion loss and transmission loss via optical fiber.As a result, can be by photo detector institute
The light quantity of receiving reduces.Accordingly, there exist problems with：Signal strength for calculating gas concentration reduces, gas concentration measuring
Stability it is impaired.
In addition, by the laser from laser diode, when optical fiber is combined, having between laser diode and optical fiber can
Optical interference noise can be will produce.The noise that the optical interference noise can cause the detection signal for calculating gas concentration to be included increases
Add, in this case, there is also the problems that the stability of gas concentration measuring is damaged.
In addition, according to the discovery of non-patent literature 1, it is necessary to exclude the H when detection of CO gas concentrations2The shadow of O gas concentrations
It rings.
Therefore, the present invention was completed to solve the above problem, it is intended that providing a kind of same with a table apparatus
When, high speed, high-precision, high sensitivity, high stability to O2The laser type gas that gas concentration and CO gas concentrations are measured
Body analysis meter.
Solve technological means used by technical problem
Therefore, the present invention proposes a kind of multicomponent laser type gas analyser, multicomponent laser type gas point
Analysis meter modulates optical spectroscopy, the Wavelength variable laser optical spectroscopy and wavelength modulation point using Wavelength variable laser optical spectroscopy and wavelength
Light method is the first measure object gas and another i.e. the to one kind in the oxygen and CO gas in measure object space
The concentration of two measure object gases is measured, and the multicomponent is characterised by comprising luminous with laser type gas analyser
Portion and acceptance part,
The illumination region includes：
First light-emitting component, first light-emitting component project the wavelength of the light absorption frequency spectrum comprising the first measure object gas
The laser of frequency band；
Second light-emitting component, second light-emitting component project the wavelength of the light absorption frequency spectrum comprising the second measure object gas
The laser of frequency band；
The laser for projecting and spreading from the first light-emitting component is converted into first by directional light converter section, the directional light converter section
Roughly parallel light, and projected as the first detection light；
Band illumination region hole parabolic mirror, this has the perforation for making the first detection light penetrate with illumination region hole parabolic mirror
Hole and for the laser for projecting and spreading from the second light-emitting component is reflected and is converted thereof into second substantially directional light with
The parabolic mirror projected as the second detection light, and the first, second detection light is made to travel to measure object along same optical axis
Space；And
Modulation light generating unit, after which will carry out wavelength modulation according to the first, second measure object gas
The driving current of laser be supplied to the first, second light-emitting component,
The acceptance part includes：
Focused broad-band portion, the focused broad-band portion will travel to the first, second of measure object space along same optical axis
Detection light focuses together；
Broadband photo detector, the broadband photo detector receive first, the after being focused by focused broad-band portion
Two detection lights, and export the first, second detection signal；And
Light signal processing part, the light signal processing part is based on first, second received from broadband photo detector
Signal is detected, to carry out gas analysis,
The modulation light generating unit of illumination region is synchronous with the light signal processing part of acceptance part, and in different times individually
Ground is measured the concentration of oxygen and CO gas,
The first light-emitting component of modulation light generating unit pair of illumination region or the second light-emitting component carry out length scanning, so that it is wrapped
It is contained in the absorption line of the wavelength 2326.8nm of CO gas when analyzing CO gas and is present in wavelength
2326.8nm nearby and the different moisture bearing gas of peak wavelength of absorption intensity absorption line,
The information of the absorption of absorption and moisture bearing gas of the light signal processing part of acceptance part based on CO gas come
Operation carried out to carbon monoxide gas concentration and moisture bearing gas concentration, and as the absorption information based on moisture bearing gas to by
Interference caused by moisture bearing gas be modified after carbon monoxide gas concentration.
In addition, the present invention proposes a kind of multicomponent laser type gas analyser, multicomponent laser type gas point
Analysis meter modulates optical spectroscopy, the Wavelength variable laser optical spectroscopy and wavelength modulation point using Wavelength variable laser optical spectroscopy and wavelength
Light method is the first measure object gas and another i.e. the to one kind in the oxygen and CO gas in measure object space
The concentration of two measure object gases is measured, and the multicomponent is characterised by comprising luminous with laser type gas analyser
Portion and acceptance part,
The illumination region includes：
First light-emitting component, first light-emitting component project the wavelength of the light absorption frequency spectrum comprising the first measure object gas
The laser of frequency band；
Second light-emitting component, second light-emitting component project the wavelength of the light absorption frequency spectrum comprising the second measure object gas
The laser of frequency band；
The laser for projecting and spreading from the first light-emitting component is converted into first by directional light converter section, the directional light converter section
Roughly parallel light, and projected as the first detection light；
Band illumination region hole parabolic mirror, this has the perforation for making the first detection light penetrate with illumination region hole parabolic mirror
Hole and for the laser for projecting and spreading from the second light-emitting component is reflected and is converted thereof into second substantially directional light with
The parabolic mirror projected as the second detection light, and the first, second detection light is made to travel to measure object along same optical axis
Space；And
Modulation light generating unit, the modulation light generating unit will carry out wavelength modulation according to the first, second measure object gas
The driving current of laser afterwards is supplied to the first, second light-emitting component,
The acceptance part includes：
Acceptance part parabolic mirror, the acceptance part parabolic mirror will be in same optical axis upper edge measure object spatials
First, second detection light is reflected together；
Broadband photo detector, after broadband photo detector receiving is focused and is reflected by acceptance part parabolic mirror
The first, second detection light, and export first, second detection signal；And
Light signal processing part, the light signal processing part is based on first, second received from broadband photo detector
Signal is detected, to carry out gas analysis,
The modulation light generating unit of illumination region is synchronous with the light signal processing part of acceptance part, and in different times individually
Ground is measured the concentration of oxygen and CO gas,
The first light-emitting component of modulation light generating unit pair of illumination region or the second light-emitting component carry out length scanning, so that it is wrapped
Containing the absorption line of the wavelength 2326.8nm of CO gas when analyzing CO gas and it is present in wavelength
2326.8nm nearby and the different moisture bearing gas of peak wavelength of absorption intensity absorption line,
The information of the absorption of absorption and moisture bearing gas of the light signal processing part of acceptance part based on CO gas come
Operation carried out to carbon monoxide gas concentration and moisture bearing gas concentration, and as the absorption information based on moisture bearing gas to by
Interference caused by moisture bearing gas be modified after carbon monoxide gas concentration.
Invention effect
According to the present invention, can provide it is a kind of with a table apparatus simultaneously, high speed, high-precision, highly sensitive, high stability it is right
O2The laser type gas analyser that gas concentration and CO gas concentrations are measured.
Description of the drawings
Fig. 1 is the entirety of the multicomponent laser type gas analyser involved by embodiment 1 for carrying out the present invention
Structure chart.
Fig. 2 be indicate typical InGaAs photodiodes, light reception sensitivity wavelength dependency figure line.
Fig. 3 is the figure for the waveform detection for indicating moisture bearing gas and CO gases, and Fig. 3 (a) is to indicate that there are moisture bearing gas and CO
The figure of waveform detection when gas, Fig. 3 (b) are to indicate there is only the figure of waveform detection when moisture bearing gas, and Fig. 3 (c) is to indicate
There is only the figures of waveform detection when CO gases.
Fig. 4 is the entirety of the multicomponent laser type gas analyser involved by embodiment 2 for carrying out the present invention
Structure chart.
Fig. 5 is the performance plot for indicating the excess air ratio in burner and the relationship between gas concentration.
Fig. 6 is the overall structure of the combustion system of the combustion gas analysis device comprising the laser for having used the prior art
Figure.
Fig. 7 is the overall structure figure of the gas concentration measuring apparatus of the prior art.
Fig. 8 is the definition graph of the timesharing light-emission operation of the gas concentration measuring apparatus of the prior art.
Fig. 9 is the performance plot for the absorption line for indicating high temperature, the moisture bearing gas of high concentration and CO gases.
Specific implementation mode
Then, referring to the drawings to the multicomponent laser type gas involved by embodiment 1 for carrying out the present invention
Body analysis meter illustrates.Fig. 1 is the overall structure figure of the multicomponent laser type gas analyser of present embodiment.
The multicomponent of present embodiment is with laser type gas analyser 1 to the gas of the internal circulation in wall 50a and wall 50b
Including the first measure object gas, that is, oxygen (be denoted as O below2Gas) gas concentration and the second measure object gas
That is the gas concentration of CO gas (being denoted as CO gases below) is measured.If in addition, gas concentration be 0 or specified value with
Under, then to detect gasless situation, it can also detect the presence or absence of gas.
Specifically, multicomponent laser type gas analyser 1 includes illumination region 10, acceptance part 20, communication line 30.
Illumination region 10 includes modulation light generating unit 11, the first light-emitting component 12a, the second light-emitting component 12b, collimator lens
13, the band illumination region hole parabolic mirror 14 equipped with through hole 14a, illumination region luffer boards 15, illumination region container 16, optical axis adjustment are convex
Edge 52a.
Acceptance part 20 includes light signal processing part 21, focused broad-band lens 22, broadband photo detector 23, acceptance part
Luffer boards 24, acceptance part container 25, optical axis adjustment flange 52b.
Communication line 30 is communicated between illumination region 10 and acceptance part 20 using electric signal, illumination region 10 and acceptance part 20
It is synchronously carried out signal processing.Although will be explained hereinafter, illumination region 10 send out to the first measure object gas into
When the laser of row analysis, acceptance part 20 carries out the processing of the first measure object gas of analysis.In addition, being sent out in illumination region 10
When the laser that two measure object gases are analyzed, acceptance part 20 carries out the processing of the second measure object gas of analysis.In addition,
Communication unit as wireless, optic communication may be used to replace communication line.It can use and these communication lines are utilized, wireless, light leads to
The communication unit of letter.
In such multicomponent in laser type gas analyser 1, illumination region 10 projects the inspections of the first detection light 40a or second
Survey light 40b.These the first detection light 40a or the second detection light 40b are projected to same optical axis 41.Moreover, the only first detection
Any one in light 40a and the second detection light 40b is projected to the measurement pair of the inside of wall 50a and wall 50b with time-sharing format
Image space.
At this point, a part for the light quantity of the first detection light 40a is by O2Gas is absorbed, alternatively, the light of the second detection light 40b
A part for amount is absorbed by CO gases.Unabsorbed remaining light, that is, transmitted light is launched into acceptance part 20, to its light quantity into
Row detection.The gas concentration of measure object is found out according to detected light quantity.
Then, the mechanicalness of multicomponent laser type gas analyser 1 construction is illustrated.
As shown in Figure 1, including O2It is opened respectively on wall 50a, 50b of the piping circulated of gas of gas, CO gases etc.
Equipped with hole.Flange 51a, 51b are fixed on this some holes by welding etc..Optical axis adjust flange 52a, 52b with can mechanicalness movement
Mode is installed on these flanges 51a, 51b.Illumination region 10, acceptance part 20 can adjust flange 52a, 52b come into line position using optical axis
Set adjustment.
Therefore, the angle of emergence of optical axis adjustment flange 52a couples of the first detection light 40a and the second detection light 40b is adjusted.Separately
Outside, the incidence angle of optical axis adjustment flange 52b couples of the first detection light 40a and the second detection light 40b is adjusted.It is adjusted using optical axis
Flange 52a, 52b receive the first detection light 40a or second projected from illumination region 10 in acceptance part 20 with maximum light quantity
Detection light 40b.In turn, both the first detection light 40a and the second detection light 40b are located at same optical axis 41, all by acceptance part 20
Received with maximum light quantity.
Illumination region container 16 and acceptance part container 25 are built-in with light-emitting component, optical element and electrical electricity in respective inside
Sub-circuit is isolated by these elements with extraneous gas, to protect these elements not influenced by wind and rain, dust and be stained etc..
Including illumination region luffer boards 15 and acceptance part luffer boards 24, wherein one of illumination region container 16 and acceptance part container 25
Hole is offered on point, and the hole is plugged.Illumination region luffer boards 15 and acceptance part luffer boards 24 are located at the inspections of the first detection light 40a and second
It surveys in the light path of light 40b, makes the first detection light 40a on one side and then the second detection light 40b is penetrated, prevent to include O on one side2Gas,
The gas of CO gases enters the inside of illumination region 10, acceptance part 20.Light-emitting component, optical element and electric and electronic circuit as a result,
It will not directly be in contact with gas, inside is protected.Mechanicalness construction is as described above.
Then, optical system is illustrated.By O2The wavelength that gas is absorbed is set as λ1。λ1From wavelength 759nm to wavelength
It is selected in the range of 770nm.In addition, the wavelength that CO gases are absorbed is set as λ2。λ2Select wavelength 2336.8nm.
Here, to having selected the specific wavelength X for detecting CO gases2The reasons why absorption line of (2336.8nm) into
Row description.
CO gases have in 1.6 micron band of wavelength, 2.3 micron band of wavelength, 4.6 micron band of wavelength absorbs frequency
Therefore spectrum can be measured CO gas concentrations according to the extinction of laser luminous at these wavelengths.
Here, for from typical case, consider that the CO gas concentrations in burning gases are 100ppm grades, moisture concentration 10%
Grade.In this case, the absorption intensity of CO gases is relatively low in 1.6 micron band of wavelength, it is difficult to 100ppm grades of CO gases
Concentration is detected.In addition, the absorption intensity of moisture is excessive in 4.6 micron band of wavelength, it is difficult to exclude moisture interference.
Therefore, in order to accurately and stably measure the CO gas concentrations in burning gases, from sensitivity and moisture interference
2.3 micron band of wavelength is the most suitable from the point of view of viewpoint.In addition, in multiple CO gas absorption spectrums positioned at 2.3 micron band of wavelength
In line, in the present embodiment especially using the absorption line with centre wavelength at wavelength 2326.8nm.Such as non-patent text
Offer 1 discovery and as being also showed that in the performance plot of Fig. 9 of the attached drawing of the application, the wavelength 2326.8nm (R of Fig. 9
(10)) even if particularly as smaller with moisture interference if among the absorption line of CO gases in 2.3 micron band of wavelength
The wavelength of absorption line and it is known.
Using laser diode so as in the state that moisture interference is relatively low compared with its absorption line to CO gas concentrations
It measures, the laser diode carries out length scanning under wavelength single-mode to the absorption line, and carries out wavelength on one side
Modulation on one side analyzes the absorption line of CO gases.However, as shown by the discovery in non-patent literature 1, by
In moisture interference and do not have non-fully, therefore, if not coped with to moisture, the measurement accuracy of CO gases by moisture suction
Caused interference is received to determine.
Therefore, in the present embodiment, the laser diode of Analysis for CO gas carries out length scanning so that can be simultaneously to existing
Near wavelength 2326.8nm and the absorption line and moisture bearing gas of the different CO gas of the peak wavelength of absorption intensity
Absorption line analyzed.Near wavelength 2326.8nm, there are moisture absorptions near the peak value of CO gas absorption spectrum lines
Spectral line can converge in the wavelength scanning range of a laser diode, therefore, can simultaneously to moisture bearing gas and CO gas concentrations into
Row measures.
Then, optics sexual function/signal processing function of illumination region 10 and acceptance part 20 is illustrated.It is luminous at these
In portion 10 and acceptance part 20, in the case where being shone simultaneously by the first light-emitting component 12a and the second light-emitting component 12b, Wu Facong
Optically detach signal.Therefore, by the first light-emitting component 12a of illumination region 10 and the second light-emitting component 12b with time-sharing format into
Action is made, and is synchronized in acceptance part 20 by communication line 30 and is alternately carried out signal processing.
As shown in figure 8, during some, the first light-emitting component 12a of illumination region 10 shines and irradiates the first detection light
40a, light signal processing part 21 is using the detection signal that broadband photo detector 23 is received come to the first measure object gas
O2The gas concentration of gas is analyzed.In addition, during other, the second light-emitting component 12b of illumination region 10 shines and shines
The second detection light 40b is penetrated, the detection signal that light signal processing part 21 is received using broadband photo detector 23 is come to second
The gas concentration of measure object Carbon Monoxide Gaseous is analyzed.Electrical resistance separation is carried out to signal like this.It as a result, can be independently
Calculate O2Gas i.e. the first measure object gas and the CO gases i.e. gas concentration of the second measure object gas.It is several in time
Detection can be carried out at the same time.
First, to detecting O210/ acceptance part 20 of illumination region when gas illustrates.
Modulation light generating unit 11 is signal processing/current driving circuit.Irradiation and O2The extinction characteristic of gas is corresponding
First detection light.In addition, being set as the first detection light according to O2Gas carries out the modulation light of wavelength modulation.Therefore, modulation light
The driving current signal of detection light for being sent out like this using laser is supplied to the first light-emitting component by generating unit 11
12a。
First light-emitting component 12a is laser diode, e.g. DFB laser diodes (Distributed Feedback
Laser Diode：Distributed feedback laser diode), VCSEL diodes (Vertical Cavity Surface Emitting
Laser Diode：Vertical cavity surface-emitting laser diode) or DBR laser diode (Distributed Bragg
Reflector Laser Diode：Distributed Bragg reflector laser diode).First light-emitting component 12a can utilize electric current and
Temperature to emission wavelength carries out variable control.
First light-emitting component 12a is with wavelength X1And its wavelength on periphery carrys out luminous laser diode.First light-emitting component
12a is to include O2The wavelength of gas absorption spectrum line is scanned.λ1It is selected in the range of from wavelength 759nm to wavelength 770nm
It selects.
Therefore, it is controlled into trip temperature, so that the centre of luminescence wavelength of the first light-emitting component 12a becomes O2The spy of gas
The centre wavelength of fixed absorption line.In addition, controlling driving current, to O2The specific absorption line of gas
The wavelength on centre wavelength periphery carries out timeliness scanning.In addition, sine wave modulation appropriate is overlapped in driving current, so as to
It is measured in high sensitivity using wavelength modulation optical spectroscopy.
The luminous point of first light-emitting component 12a is configured at the near focal point of collimator lens 13.Make to shine from first first
The injection light of part 12a injects collimator lens 13 while spreading, and converts thereof into the first inspection as roughly parallel light
Survey light 40a.Collimator lens 13 are in wavelength X1And its transmissivity is higher at the wavelength on periphery.In addition, in the present embodiment, it is right
The structure for being used as the directional light converter section of the present invention using collimator lens 13 is illustrated, but it is not intended to be limited to
Collimator lens.For example, as directional light converter section, collimator lens can also be replaced using paraboloidal mirror.
Immediate vicinity with illumination region hole parabolic mirror 14 in its paraboloidal mirror has through hole 14a.Through hole 14a makes
First detection light 40a is penetrated.Therefore, it is intended that the size in its hole is identical as the beam diameter degree of the first detection light 40a.As big
The first detection light 40a of directional light is caused to propagate to the inside of wall 50a, 50b through illumination region luffer boards 15, include O2Gas, CO
The space that the gas of gas is circulated.
Then, acceptance part 20 is illustrated.Acceptance part 20 receives the first detection light 40a through acceptance part luffer boards 24,
The absorbed light because of the extinction characteristic of measure object gas is analyzed.It is saturating that first detection light 40a injects focused broad-band
Mirror 22.Focused broad-band lens 22 are in wavelength X1And its transmissivity is higher at the wavelength on periphery.
The focus in focused broad-band lens 22 is incident upon by the first detection light 40a that focused broad-band lens 22 are focused
Nearby it is configured with the broadband photo detector 23 of light-receiving surface.Such focused broad-band lens 22, broadband photo detector 23
Position relationship is identical as the explanation in illumination region 10, properly configures in optical axis 41, is obtained most in broadband photo detector 23
Light light quantity after bigization.
Broadband photo detector 23 is in wavelength X1At (range of wavelength 759nm to wavelength 770nm) and its wavelength on periphery
It is the photo detector with sensitivity.Included O by optical signal from broadband photo detector 232The absorption signal of gas is made
It is sent to light signal processing part 21 for electric signal.It is equipped in light signal processing part 21 modulated to having carried out wavelength
The high frequency of the modulating frequency of laser carries out the circuit of locking detection, can carry out highly sensitive gas detection.At by optical signal
In reason portion 21, the electric signal is handled, to calculate O2The gas concentration value of gas.
10/ acceptance part 20 of illumination region when then, to detection CO gases illustrates.
Modulation light generating unit 11 irradiates the second detection light corresponding with the extinction characteristic of CO gases.In addition, by the second inspection
Light is surveyed to be set as carrying out the modulation light of wavelength modulation according to CO gases.Therefore, modulation light generating unit 11 will be used to utilize like this
Laser is supplied to the second light-emitting component 12b come the driving current signal of the detection light sent out.
Second light-emitting component 12b is laser diode, DFB laser diodes e.g. as described above, VCSEL diodes,
Or DBR laser diode.Second light-emitting component 12b can carry out variable control using electric current and temperature to emission wavelength.Second
Light-emitting component 12b is with λ2And its wavelength on periphery carrys out luminous laser diode.Second light-emitting component 12b comprising CO gases to inhale
The wavelength of the absorption line of spectral line and its neighbouring moisture is received to be scanned.λ2For wavelength 2336.8nm.
It is controlled into trip temperature so that the centre of luminescence wavelength of the second light-emitting component 12b becomes the specific absorption of CO gases
The centre wavelength of spectral line.In addition, controlling driving current, to the centre wavelength of the specific absorption line to CO gases
The wavelength on periphery carries out timeliness scanning.In addition, sine wave modulation appropriate is overlapped in driving current, so as to utilize wavelength
Modulation optical spectroscopy is measured in high sensitivity.
The focus that the luminous point of second light-emitting component 12b is configured at the parabolic cylinder with illumination region hole parabolic mirror 14 is attached
Closely.The injection light from the second light-emitting component 12b is set to inject the parabolic mirror 14 with optical section hole while spreading, and will
It is converted into the second detection light 40b as roughly parallel light.Band illumination region hole parabolic mirror 14 is in wavelength X2And its periphery
Wavelength at reflectivity it is higher.In addition, in the present embodiment, using 90 degree of off-axis parabolic mirror of angle, but off-axis angle
Degree can not also be set as 90 degree.
From the light that the second light-emitting component 12b is sent out, the light quantity for injecting the part of through hole 14a is not translated to the second inspection
Light 40b is surveyed, therefore is lost.In order to inhibit smaller the loss, the opening diameter of through hole 14a is the smaller the better.It is another
Aspect, the through hole 14a with illumination region hole parabolic mirror 14 is identical as the above-mentioned beam diameter degree of first detection light 40a,
It is set as the minimum opening diameter that can allow.
In addition, the beam diameter of the first detection light 40a must be smaller than the beam diameter of the second detection light 40b.For reality
Existing above-mentioned purpose, it is desirable to which the focusing distance of collimator lens 13 is set into obtain focusing distance of the ratio with illumination region hole parabolic mirror 14
Want sufficiently small.
In addition, through hole 14a is arranged to parallel with the optical axis of the second detection light 40b.Penetrate through hole 14a's as a result,
Although second detection light 40bs of the first detection light 40a with utilization with illumination region hole parabolic mirror 14 and as roughly parallel light
Beam diameter is different, but can also coincide in same optical axis 41.
In addition, optical axis micro-regulating mechanism (not shown) can be examined in the case where remaining unchanged roughly parallel light to first
The injection angle for surveying light 40a and the second detection light 40b is micro-adjusted.First detection light 40a and the second detection light 40b as a result,
Optical axis 41 it is consistent.
The the second detection light 40b as roughly parallel light for being laminated with optical axis 41 propagates to wall through illumination region luffer boards 15
The inside of 50a, 50b include O2The space circulated of gas of gas, CO gases.
Then, acceptance part 20 is illustrated.Acceptance part 20 receives through the second detection light after acceptance part luffer boards 24
40b analyzes the light absorbed by the extinction characteristic of measure object gas.
Second detection light 40b is incident upon focused broad-band lens 22.Focused broad-band lens 22 are in wavelength X2And its periphery
Wavelength at transmissivity it is higher.In addition, focused broad-band lens 22 also penetrate the first detection light 40a, therefore, in wavelength X1And
The wavelength and wavelength X on its periphery2And its at the wavelength on periphery, it is made of the higher material of transmissivity.
The focus in focused broad-band lens 22 is incident upon by the second detection light 40b that focused broad-band lens 22 are focused
Nearby it is configured with the broadband photo detector 23 of light-receiving surface.Such focused broad-band lens 22, broadband photo detector 23
Position relationship is identical as the explanation in illumination region 10, properly configures in optical axis 41, is obtained most in broadband photo detector 23
Light light quantity after bigization.
Broadband photo detector 23 is in wavelength X2There is sensitivity at the wavelength on (wavelength 2336.8nm) and its periphery.This
Outside, broadband photo detector 23 also carries out light to the first detection light 40a, therefore, selects in wavelength X1(wavelength 759nm to wave
The range of long 770nm) and its periphery wavelength and wavelength X2All there is spirit at the wavelength on (wavelength 2336.8nm) and its periphery
The photo detector of sensitivity.
Above-mentioned λ1、λ2All it is contained near infrared region (700nm~2500nm).Therefore, broadband photo detector 23 can be set
For photo detector corresponding with the wavelength of near infrared region, such as shown in Fig. 2, the tool 500nm~2500nm at can be used
There is InGaAs (indium gallium arsenide) photodiode of sensitivity.
In addition, in wavelength 900nm hereinafter, although light reception sensitivity as low as 0.2A/W is hereinafter, even if be such signal
Also it can detect, by suitably being amplified to detection signal, can be analyzed.InGaAs photodiodes can be in 500nm
At~2500nm there are the multiple detection object gas absorbed to be detected, signal is extracted with a photo detector.
The absorption signal for being included CO gases by optical signal from broadband photo detector 23, is sent as electric signal
To light signal processing part 21.The height of the modulating frequency to carrying out the modulated laser of wavelength is equipped in light signal processing part 21
Frequency carries out the circuit of locking detection, can carry out highly sensitive gas detection.In light signal processing part 21, to the telecommunications
It number is handled, to calculate the gas concentration value of CO gases.
In addition, in the present embodiment, in order to focus on broadband using the refraction effect of focused broad-band lens 22
Photo detector 23, will produce because of wavelength X1With λ2Between difference caused by chromatic aberation influence.Therefore, because alleviate because
Chromatic aberation and therefore the decline of light light quantity that generates can replace wideband using simple lens, doublet lens, refractor etc.
Band condenser lens 22, to mitigate the influence of chromatic aberation.In addition, the light-receiving area of broadband photo detector 23 can be increased, even if
Wavelength X1With λ2Focal position occur deviation, can also carry out light.
Then, the correction of moisture is illustrated.The light signal processing part 21 of laser type gas analyser is based on passing through
The information of the absorption for the CO gases that laser diode progress length scanning is obtained and the absorption of moisture bearing gas, to CO gas
Bulk concentration and moisture bearing gas concentration carry out operation, so in the operation of CO gas concentrations the absorption information based on moisture bearing gas come
Interference caused by moisture bearing gas is corrected.
Fig. 3 is to utilize the laser diode that wavelength modulation is carried out while carrying out length scanning on the peripheries wavelength 2326.8nm
Come the example being observed to the absorption of moisture bearing gas and CO gases.In the explanation, it is assumed that be the 2 of the frequency modulated to wavelength
Times frequency the case where carrying out locking detection, therefore, shown in Fig. 3 absorbing waveform is in and absorption when not carrying out wavelength modulation
The close shape of the second-order differential of waveform.
Fig. 3 (a) is waveform obtained from being observed to the absorption of moisture bearing gas and CO gases.Fig. 3 (b) is only to moisture
Waveform obtained from the absorption of gas is observed.Fig. 3 (c) is waveform obtained from being only observed to the absorption of CO gases.
The concentration of moisture bearing gas and CO gases carries out operation according to the amplitude between the trough and wave crest of these absorption waveforms.For example,
Operation is carried out to the concentration of moisture bearing gas according to the difference of the voltage of the VPx ' as shown in Fig. 3 (a) and Vbx '.Meanwhile such as
Operation is carried out to the concentration of CO gases according to the difference of the voltage of Vpx and Vbx.
As the feature of the absorption spectrum of gas in the wavelength region, interval between the absorption line of CO gases compared with
Width, and absorption line not adjacent with specific absorption line coincides.On the other hand, moisture bearing gas such as burning gases that
Under the high-temperature high concentration state of sample, there is the frequency spectrum for existing absorb such complexity everywhere.
The such feature of reflection, it can be seen that the wave of the moisture bearing gas on the peripheries wavelength 2326.8nm and the absorption line of CO gases
Peak detaches, but actually moisture bearing gas everywhere exist absorb, therefore, though at the absorbing wavelength of CO gases there is also
The absorption of moisture bearing gas.
Therefore, in Fig. 3 (c), there is no absorptions on the wave crest periphery of the absorption of CO gases, therefore voltage is flat, another party
Face, in Fig. 3 (b), there is also absorptions on the wave crest periphery of the absorption of moisture bearing gas, therefore voltage may not be flat, have to CO gases
There is the wavelength of absorption to will also result in influence.As a result, as shown in Fig. 3 (a), coexisted in the absorption of moisture bearing gas and CO gases
In the case of, the absorption waveform of CO gas can deform because of moisture bearing gas.This leads to the survey as CO gas concentrations
Moisture bearing gas in fixed interferes and the precision of measurement is made to deteriorate.
It will be appreciated, however, that the influence of the moisture interference is directly proportional to moisture bearing gas concentration.Therefore, in the present embodiment, exist
It is all corrected as follows when calculating every time CO gas concentrations：That is, being also measured simultaneously to moisture bearing gas concentration, to inciting somebody to action
Corrected value is calculated obtained from proportionality coefficient appropriate is multiplied by the moisture bearing gas concentration, and measured CO gas concentrations are subtracted
The corrected value is removed to mitigate the influence of moisture interference, to be set as obtained CO gas concentrations.CO can be further increased as a result,
The precision of gas concentration measuring.
Multicomponent laser type gas analyser 1 is illustrated above.In addition, in multicomponent laser type gas
Various modifications mode can be used in analysis meter.For example, in the above-described embodiment, the first light-emitting component 12a is set as in wavelength
λ1And its laser diode to shine at the wavelength on periphery, the second light-emitting component 12b is set as in wavelength X2And its at the wavelength on periphery
Luminous laser diode.However, the first light-emitting component 12a can also irradiating and detecting CO gases laser, in addition, second shine member
Part 12b can also irradiating and detecting O2The laser of gas.
In this case, the first light-emitting component 12a is set as in wavelength X2And its laser to shine at the wavelength on periphery
Second light-emitting component 12b is set as in wavelength X by element1And its laser diode to shine at the wavelength on periphery.Collimator lens 13
By in wavelength X2Locate the higher material of transmissivity to constitute.Band illumination region hole parabolic mirror 14 is by wavelength X1Locate reflectivity compared with
High material is constituted.As a result, with broadband photo detector 23 come to CO gas concentrations, O2Gas concentration is detected.If
10 side of illumination region and 20 side of acceptance part are synchronously carried out signal processing, then can be carried out similarly measurement with explanation before.
Also such embodiment can be used.
Then, the multicomponent laser type gas analyser 2 of embodiment 2 is illustrated with reference to Fig. 4.In this embodiment party
In formula, the acceptance part 20 ' after being changed using the part to the structure of acceptance part 20 in embodiment 1 before.In addition,
It is identical as explanation before about illumination region 10, communication line 30, detection process, therefore repeated explanation is omitted, only to difference
Emphasis illustrates.
Acceptance part 20 ' includes light signal processing part 21, broadband photo detector 23, acceptance part luffer boards 24, acceptance part appearance
Device 25, acceptance part parabolic mirror 26, optical axis adjustment flange 52b.
In the present embodiment, be used as focus portion using non-porous acceptance part parabolic mirror 26, using broadband by
Optical element 23 is used as photo detector, to replace the focused broad-band lens 22 of embodiment 1.Acceptance part parabolic mirror 26 by
In wavelength X1And its wavelength and wavelength X on periphery2And its reflectivity all higher material is constituted at the wavelength on periphery.
In the present embodiment, the first detection light 40a and the second detection light 40b are incident upon acceptance part parabolic mirror
26, the first detection light 40a and the second detection light 40b reflected is focused and is incident upon broadband photo detector 23.By
In being focused in a reflection mode, therefore, the influence for chromatic aberation occur will not be led to because wavelength X 1 is different from λ 2 by having
Advantage.
Such acceptance part 20 ' is identical as embodiment 1 before, and during some, the first of illumination region 10 shines
Element 12a shines to irradiate the first detection light 40a, and light signal processing part 21 is received using broadband photo detector 23
Signal is detected to analyze the gas concentration of the first measure object gas.In addition, during other, the of illumination region 10
Two light emitting 12b shines to irradiate the second detection light 40b, and light signal processing part 21 is connect using broadband photo detector 23
The detection signal that is subject to analyzes the gas concentration of the second measure object gas.At this point, by communication line 30 and by
Signal processing is synchronously carried out in light portion 20 mutually.Electrical resistance separation is carried out to signal like this.Can be independently calculated as a result,
One, second detection object gas, that is, O2The gas concentration of gas, CO gases.
In addition, as mode of texturing, the first light-emitting component can also irradiating and detecting CO gases laser, in addition, the second hair
Optical element can also irradiating and detecting O2The laser of gas.In this case, the first light-emitting component 12a is set as in wavelength X2And
The laser diode to shine at the wavelength on its periphery, the second light-emitting component 12b is set as in wavelength X1And its it is sent out at the wavelength on periphery
The laser diode of light.Collimator lens 13 are by wavelength X2Locate the higher material of transmissivity to constitute.Band illumination region hole parabolic cylinder
Face mirror 14 is by wavelength X1Locate the higher material of reflectivity to constitute.If 10 side of illumination region and 20 side of acceptance part synchronously
It is handled, then can be carried out similarly measurement with explanation before.Even if using the present invention can be implemented if such structure.
It is above that the present invention is described.According to the present invention, using the easy space without using fiber optic system
Optical system will be bound in same optical axis from two the luminous of laser diode, and the light quantity of laser efficiently transmitted
To photo detector, the signal strength of measure object gas is improved, noise is reduced, so as to provide a kind of multicomponent laser type gas
Body analysis meter, the multicomponent laser type gas analyser can reduce insertion loss, transmission loss and optical interference noise, simultaneously
(moment detection is carried out to the first, second measure object gas continuously in time, it may be said that almost simultaneously) and stablize
Ground is measured multiple gas concentrations.
In addition, the present invention inhibits the loss of the first, second detection light as laser, in addition, noise is reduced, from
And a kind of multicomponent laser type gas analyser can be provided, which can improve detection object
The signal strength of gas, while and steadily multiple gas concentrations are measured.
Therefore, according to the present invention, can provide it is a kind of with a table apparatus simultaneously, high speed, high-precision, highly sensitive, high stable
Property to O2The laser type gas analyser that gas concentration and CO gas concentrations are measured.
Industrial practicability
The multicomponent of the present invention is suitably used as the burning and gas-exhaustings such as boiler, waste incineration with laser type gas analyser and surveys
Fixed, Combustion System.In addition to this, as steel gas analysis [blast furnace, converter, heat-treatment furnace, sintering (particle device), coke
Stove], vegetable and fruit storage and ripe, biochemical (microorganism) [fermentation], atmosphere pollution [cigarette desulfurization/denitration is discharged in incinerator],
The exhaust (dedusting) of the internal combustion engine of automobile, ship etc. is taken precautions against natural calamities, and [explosive gas detection, toxic gas detection, new building material fire
Burn gas analysis], plant cultivation uses, chemical analysis [petroleum refining factory, petrochemical plant, Gas Production factory], environment use
[concentration, parking lot, building management in groundlevel concentration, tunnel], Physicochemical it is various experiment with etc. analysis meter be also useful.
Label declaration
1、2：Multicomponent laser type gas analyser
10：Illumination region
11：Modulation light generating unit
12a：First light-emitting component
12b：Second light-emitting component
13：Collimator lens
14：Band illumination region hole parabolic mirror
14a：Through hole
15：Illumination region luffer boards
16：Illumination region container
20、20’：Acceptance part
21：Light signal processing part
22：Focused broad-band lens
23：Broadband photo detector
24：Acceptance part luffer boards
25：Acceptance part container
26：Acceptance part parabolic mirror
30：Communication line
40a：First detection light
40b：Second detection light
41：Optical axis
50a、50b：Wall
51a、51b：Flange
52a、52b：Optical axis adjusts flange
Claims (2)
1. a kind of multicomponent laser type gas analyser, which uses Wavelength variable laser with laser type gas analyser
Optical spectroscopy and wavelength modulate optical spectroscopy, and the Wavelength variable laser optical spectroscopy and wavelength modulate optical spectroscopy to measure object space
The concentration of a kind of i.e. the first measure object gas and another i.e. the second measure object gas in oxygen and CO gas
It being measured, the multicomponent is characterised by comprising illumination region and acceptance part with laser type gas analyser,
The illumination region includes：
First light-emitting component, first light-emitting component project the wavelength band of the light absorption frequency spectrum comprising the first measure object gas
Laser；
Second light-emitting component, second light-emitting component project the wavelength band of the light absorption frequency spectrum comprising the second measure object gas
Laser；
The laser for projecting and spreading from the first light-emitting component is converted into first substantially by directional light converter section, the directional light converter section
Directional light, and projected as the first detection light；
Band illumination region hole parabolic mirror, this with illumination region hole parabolic mirror have the through hole for making the first detection light penetrate,
And for being reflected the laser for projecting and spreading from the second light-emitting component and being converted thereof into second substantially directional light to make
It is the second detection light the parabolic mirror that projects, and the first, second detection light is made to travel to measure object sky along same optical axis
Between；And
Modulation light generating unit, it is modulated which will carry out wavelength according to the first, second measure object gas
The driving current of laser is supplied to the first, second light-emitting component,
The acceptance part includes：
Focused broad-band portion, the focused broad-band portion will travel to first, second detection in measure object space along same optical axis
Light is focused together；
Broadband photo detector, the broadband photo detector receive the first, second inspection after being focused by focused broad-band portion
Light is surveyed, and exports the first, second detection signal；And
Light signal processing part, the light signal processing part is based on the first, second detection received from broadband photo detector
Signal, to carry out gas analysis,
The modulation light generating unit of illumination region is synchronous with the light signal processing part of acceptance part, and individually right in different times
The concentration of oxygen and CO gas is measured,
The first light-emitting component of modulation light generating unit pair of illumination region or the second light-emitting component carry out length scanning so that it includes
The absorption line of the wavelength 2326.8nm of CO gas and it is present in wavelength when analyzing CO gas
2326.8nm nearby and the different moisture bearing gas of peak wavelength of absorption intensity absorption line,
The light signal processing part of acceptance part is all corrected as follows when calculating every time carbon monoxide gas concentration：
That is, being also measured simultaneously to moisture bearing gas concentration, to proportionality coefficient appropriate to be multiplied by obtained from the moisture bearing gas concentration
The corrected value of interference effect is calculated caused by for mitigating due to moisture bearing gas, later, by measured carbon monoxide gas
Bulk concentration subtracts the corrected value and is used as carbon monoxide gas concentration.
2. a kind of multicomponent laser type gas analyser, which uses Wavelength variable laser with laser type gas analyser
Optical spectroscopy and wavelength modulate optical spectroscopy, and the Wavelength variable laser optical spectroscopy and wavelength modulate optical spectroscopy to measure object space
The concentration of a kind of i.e. the first measure object gas and another i.e. the second measure object gas in oxygen and CO gas
It being measured, the multicomponent is characterised by comprising illumination region and acceptance part with laser type gas analyser,
The illumination region includes：
First light-emitting component, first light-emitting component project the wavelength band of the light absorption frequency spectrum comprising the first measure object gas
Laser；
Second light-emitting component, second light-emitting component project the wavelength band of the light absorption frequency spectrum comprising the second measure object gas
Laser；
The laser for projecting and spreading from the first light-emitting component is converted into first substantially by directional light converter section, the directional light converter section
Directional light, and projected as the first detection light；
Band illumination region hole parabolic mirror, this with illumination region hole parabolic mirror have the through hole for making the first detection light penetrate,
And for being reflected the laser for projecting and spreading from the second light-emitting component and being converted thereof into second substantially directional light to make
It is the second detection light the parabolic mirror that projects, and the first, second detection light is made to travel to measure object sky along same optical axis
Between；And
Modulation light generating unit, it is modulated which will carry out wavelength according to the first, second measure object gas
The driving current of laser is supplied to the first, second light-emitting component,
The acceptance part includes：
Acceptance part parabolic mirror, the acceptance part parabolic mirror will be the of same optical axis upper edge measure object spatial
One, the second detection light is reflected together；
Broadband photo detector, the broadband photo detector receive the after being focused and reflected by acceptance part parabolic mirror
One, the second detection light, and export the first, second detection signal；And
Light signal processing part, the light signal processing part is based on the first, second detection received from broadband photo detector
Signal, to carry out gas analysis,
The modulation light generating unit of illumination region is synchronous with the light signal processing part of acceptance part, and individually right in different times
The concentration of oxygen and CO gas is measured,
The first light-emitting component of modulation light generating unit pair of illumination region or the second light-emitting component carry out length scanning so that it includes
The absorption line of the wavelength 2326.8nm of CO gas and it is present in wavelength when analyzing CO gas
2326.8nm nearby and the different moisture bearing gas of peak wavelength of absorption intensity absorption line,
The light signal processing part of acceptance part is all corrected as follows when calculating every time carbon monoxide gas concentration：
That is, being also measured simultaneously to moisture bearing gas concentration, to proportionality coefficient appropriate to be multiplied by obtained from the moisture bearing gas concentration
The corrected value of interference effect is calculated caused by for mitigating due to moisture bearing gas, later, by measured carbon monoxide gas
Bulk concentration subtracts the corrected value and is used as carbon monoxide gas concentration.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2014/064434 WO2015181956A1 (en) | 2014-05-30 | 2014-05-30 | Multicomponent laser gas analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105531580A CN105531580A (en) | 2016-04-27 |
| CN105531580B true CN105531580B (en) | 2018-09-21 |
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| CN201480050816.3A Active CN105531580B (en) | 2014-05-30 | 2014-05-30 | Multicomponent laser type gas analyser |
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| Country | Link |
|---|---|
| JP (1) | JP6128361B2 (en) |
| CN (1) | CN105531580B (en) |
| WO (1) | WO2015181956A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6624505B2 (en) * | 2015-12-07 | 2019-12-25 | 富士電機株式会社 | Laser gas analyzer |
| JP6672996B2 (en) * | 2016-04-28 | 2020-03-25 | 富士電機株式会社 | Source analysis apparatus and source analysis method |
| CN106092914B (en) * | 2016-05-30 | 2019-02-22 | 中国科学院长春光学精密机械与物理研究所 | A kind of spectroanalysis instrument and combinations thereof light source |
| CN106092964A (en) * | 2016-06-16 | 2016-11-09 | 上海莱帝科技有限公司 | A kind of portable gas detector based on tunable semiconductor laser |
| JP6766488B2 (en) * | 2016-07-13 | 2020-10-14 | 富士電機株式会社 | Gas analyzer |
| GB201700905D0 (en) | 2017-01-19 | 2017-03-08 | Cascade Tech Holdings Ltd | Close-Coupled Analyser |
| JP2018147579A (en) * | 2017-03-01 | 2018-09-20 | オムロン株式会社 | Photoelectric sensor |
| JP2019184523A (en) * | 2018-04-16 | 2019-10-24 | 横河電機株式会社 | Gas analyser |
| JP7135608B2 (en) * | 2018-09-03 | 2022-09-13 | 株式会社島津製作所 | Gas absorption spectroscopy device and gas absorption spectroscopy method |
| CN112798550B (en) * | 2021-04-14 | 2021-07-13 | 四川大学 | Wide-measurement-range laser absorption spectrum combustion diagnosis method |
| WO2022270201A1 (en) * | 2021-06-25 | 2022-12-29 | 株式会社堀場製作所 | Gas analysis device |
| CN115372264B (en) * | 2022-10-26 | 2023-05-09 | 中国科学院新疆理化技术研究所 | Method for measuring mixed gas of ammonia and sulfur dioxide |
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| WO2015181956A1 (en) | 2015-12-03 |
| CN105531580A (en) | 2016-04-27 |
| JPWO2015181956A1 (en) | 2017-04-20 |
| JP6128361B2 (en) | 2017-05-17 |
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