CN105180801B - A kind of contrast anti-interference stepped corner reflector laser interferometer and scaling method and measuring method - Google Patents
A kind of contrast anti-interference stepped corner reflector laser interferometer and scaling method and measuring method Download PDFInfo
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- CN105180801B CN105180801B CN201510287458.4A CN201510287458A CN105180801B CN 105180801 B CN105180801 B CN 105180801B CN 201510287458 A CN201510287458 A CN 201510287458A CN 105180801 B CN105180801 B CN 105180801B
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Abstract
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of contrast anti-interference stepped corner reflector laser interferometer and scaling method and measuring method, contrast anti-interference stepped corner reflector laser interferometer, include lasing light emitter, stepped corner reflector, interferometry photodetector group, mobile corner reflector and light splitting microscope group, the lasing light emitter projects z beam laser beams to the light splitting microscope group, also include reflection measurement photodetector group, the reflection measurement photodetector group includes z reflection measurement photodetector, the second laser beam group is also formed with reflection laser beam group after microscope group is divided as described in the mobile corner reflector directive, each laser beam difference reflection measurement photodetector of directive one of the reflection laser beam group.The laser interferometer of the application, the interference state of laser interference light beam is determined according to the intensity of reflection laser beam group, so realize the purpose of environment resistant interference.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of contrast anti-interference stepped angle
Reflector laser interference instrument and scaling method and measuring method.
Background technology
The appearance of laser, developed rapidly ancient interference technique, laser has brightness height, good directionality, list
Color and the features such as good coherence, laser interferometry techniques comparative maturity.Laser interferometry system application is very wide
It is general：The detection measured such as linear scale, grating, gauge block, precision lead screw of accurate length, angle；Detection and localization in precision instrument
Control, the correction of system such as precision optical machinery；Position detecting system in large scale integrated circuit special equipment and detecting instrument；It is micro-
Measurement of small size etc..At present, in most of laser interference length-measuring systems, Michelson's interferometer or similar is all employed
Light channel structure, such as, currently used single frequency laser interferometer.
Single frequency laser interferometer is the light beam sent from laser, is divided into two-way by spectroscope after beam-expanding collimation, and divide
Congregation is not reflected from stationary mirror and moving reflector produce interference fringe on spectroscope.When moving reflector moves
When dynamic, the light intensity of interference fringe changes is converted to electric impulse signal by the photo-electric conversion element in receiver and electronic circuit etc.,
Input forward-backward counter calculates overall pulse number N after shaped, amplification, then presses calculating formula L=N × λ/2, formula by electronic computer
Middle λ is optical maser wavelength, calculates the displacement L of moving reflector.
In actual use, inventors herein have recognized that, still there is not for above-mentioned measurement structure and measuring method
Foot：
Also there is the problem of affected by environment serious in current single frequency laser interferometer, laser interferometer moveable mirror moves
When dynamic, the light intensity of interference fringe changes is converted to electric impulse signal by the photo-electric conversion element in receiver and electronic circuit etc.,
When for most strong constructive interference when, the triggering level that signal exceedes counter is recorded, such as empty if environment changes
Gas turbulent flow, impurity increases in air, lathe mist of oil, influence of cutting swarf during processing to laser beam so that the intensity of laser beam
Reduce, now, even there is most strong constructive interference, it is also possible to which intensity is less than the triggering level of counter without being counted.
So based on above-mentioned deficiency, need badly at present it is a kind of i.e. can environment resistant interference, and can enough improves the sharp of measurement accuracy
Optical interferometer.
The content of the invention
It is an object of the invention to the deficiency for current laser interferometer environment resistant interference performance difference, there is provided one kind can
The laser interferometer of environment resistant interference.
In order to realize foregoing invention purpose, the invention provides following technical scheme：
A kind of contrast anti-interference stepped corner reflector laser interferometer, include lasing light emitter, stepped corner reflector,
Interferometry photodetector group, mobile corner reflector and light splitting microscope group, the lasing light emitter project z beams to the light splitting microscope group and swashed
Light beam, wherein z are the positive integer more than or equal to 2, and the interferometry photodetector group includes z measured interference light
Electric explorer, each interferometry photodetector is corresponding with one laser beam, and each laser beam is after the light splitting microscope group
It is divided into first laser beam group and second laser beam group, stepped corner reflector described in the first laser beam group directive, through described
Microscope group, then the measured interference light described in directive after the light splitting microscope group are divided described in directive again after the reflection of stepped corner reflector
Electric explorer group, mobile corner reflector described in the second laser beam group directive, after the mobile corner reflector reflection again
Microscope group is divided described in directive, through it is described light splitting microscope group after it is corresponding with interferometry photodetector group described in directive first
Laser beam group interferes, and forms coherence laser beam group, and each interfering beam difference directive of coherence laser beam group is each self-corresponding
The interferometry photodetector, the contrast anti-interference stepped corner reflector laser interferometer also include reflection and surveyed
Photodetector group is measured, the reflection measurement photodetector group includes z reflection measurement photodetector, and described second swashs
Light beam group is also formed with reflection laser beam group, the reflection laser after microscope group is divided as described in the mobile corner reflector directive
Each laser beam difference reflection measurement photodetector of directive one of beam group.
As further preferred scheme, the light splitting microscope group includes the first spectroscope and the second spectroscope, described to swash
The z beams laser beam that light source projects first is mapped to the first spectroscope, first laser beam group is formed through the first dichroic mirror, through first point
Light microscopic transmits to form second laser beam group, stepped corner reflector described in first laser beam group directive, after reflection directive again
First spectroscope, then again transmitted through first spectroscope, mobile corner reflection described in the second laser beam group directive
Mirror, the second spectroscope described in directive after the mobile corner reflector reflection, after second spectroscope transmission described in directive
First spectroscope, and the first laser beam group with being transmitted from first spectroscope interferes, and forms coherence laser beam
Interferometry photodetector group described in directive after group, second spectroscopical described as described in the mobile corner reflector directive
Dual-laser beam group also forms the reflection laser beam group by second dichroic mirror.
The laser interferometer of the application, swash because reflection measurement photodetector group can measure mobile corner reflector reflection
The intensity of light beam group, the interference state of laser interference light beam is determined according to the intensity of reflection laser beam group, so realizes environment resistant
The purpose of interference.
As further preferred scheme, in the lasing light emitter, stepped corner reflector, interferometry photodetector
Group, light splitting microscope group, the laser beam in reflection measurement photodetector group between any two be arranged in closing space without with
Outdoor Space contacts.In this application, lasing light emitter, stepped corner reflector, interferometry photodetector group, spectroscope
Laser beam between group and reflection measurement photodetector group these part any twos is arranged in closing space so that is being entered
During row measurement, the laser beam between these above-mentioned parts can't be effected by environmental factors, and then ensure that this
Apply for the measurement accuracy of laser interferometer.
As further preferred scheme, the laser beam between the light splitting microscope group and the mobile corner reflector is exposed to
Among surrounding air.In actual use, mobile corner reflector is arranged on testee, is moved with testee, so
In the application, among the laser beam being divided between microscope group and mobile corner reflector is exposed into surrounding air, this is so that first
Apply for that laser interferometer is simple in construction, while also facilitate the arrangement of the application laser interferometer.
Disclosed herein as well is a kind of scaling method for above-mentioned laser interferometer structure,
A kind of scaling method for above-mentioned contrast anti-interference stepped corner reflector laser interferometer, including following steps
Suddenly：
Step 1: position adjustment：Adjust lasing light emitter, stepped corner reflector, light splitting microscope group, interferometry photodetection
The position of device group, reflection measurement photodetector group and mobile corner reflector；
Step 2: adjustment light path：Start the lasing light emitter, further accurately adjust stepped corner reflector, light splitting microscope group,
The position of interferometry photodetector group, reflection measurement photodetector group and mobile corner reflector, makes laser interferometer
Light path reaches design requirement；
Step 3: generation is most capable and experienced to relate to database：Choose a measured interference light in interferometry photodetector group
Electric explorer chooses a reflection measurement light in reflection measurement photodetector group as demarcation interferometry photodetector
Electric explorer is surveyed as demarcation reflection measurement photodetector, the demarcation interferometry photodetector with the demarcation reflection
It is corresponding with the same one laser beam that the lasing light emitter projects to measure photodetector, the mobile shifting in the environment of air cleaning
Dynamic corner reflector, when the interfering beam that interferometry photodetector is demarcated described in directive is most strong constructive interference described in fixation
Mobile corner reflector, record now demarcate reflection measurement photodetector reading and demarcation interferometry photodetector reading,
Changing air ambient makes the demarcation reflection measurement photodetector reading change, while records several demarcation reflection measurement light
Electric explorer reading and corresponding demarcation interferometry photodetector reading, obtain most capable and experienced relating to database.
As further preferred scheme, repeating said steps three, different demarcation reflection measurement photoelectricity is chosen every time and is visited
Device and demarcation interferometry photodetector are surveyed, obtains that z is most capable and experienced to relate to database.Due to step 3 is repeated, z are obtained most
It is capable and experienced to relate to database, the quantity of direct increased database, the matching inquiries of data in detection process is more favorable for, also, it is real
Existing multiwavelength laser source, stepped corner reflector and z a most capable and experienced mutual collaboration related between database, improves laser interferometer
Measurement accuracy.
The laser interferometer structure and scaling method of the application, in most strong constructive interference, change measuring environment, record
Demarcation reflection measurement photodetector reading and demarcation interferometry photodetector reading formed it is most capable and experienced relate to database, in reality
In the measurement process of border, if there is causing interferometry photodetector group normally to detect most due to environmental factor
During strong constructive interference, can according to demarcation reflection measurement photodetector reading and demarcation interferometry photodetector reading and
The most capable and experienced data related in database are compared, and if there is there is matched data, then the position is most strong constructive interference, so
So that the laser interferometer of the application realizes the ability of environment resistant interference.
As further preferred scheme, also include Step 4: generating most weak interference data storehouse：In the ring of air cleaning
The mobile mobile corner reflector under border, when the interfering beam that interferometry photodetector is demarcated described in directive is most weak cancellation
The mobile corner reflector is fixed during interference, record now demarcates reflection measurement photodetector reading and demarcation measured interference light
Electric explorer reading, changing air ambient makes the demarcation reflection measurement photodetector reading change, while records several
Reflection measurement photodetector reading and corresponding demarcation interferometry photodetector reading are demarcated, obtains most weak interference number
According to storehouse.
As further preferred scheme, repeating said steps four, different demarcation reflection measurement photoelectricity is chosen every time and is visited
Device and demarcation interferometry photodetector are surveyed, obtains z most weak interference data storehouses.
As further preferred scheme, also include Step 5: generating 1/n wavelength-interferometric databases, n is to be more than or wait
2 positive integer, the mobile mobile corner reflector in the environment of air cleaning, when demarcation measured interference light electrical resistivity survey described in directive
When the interfering beam for surveying device is most strong constructive interference, it is further continued for moving the distance of 1/2n wavelength, record now demarcates reflection measurement
Photodetector reading and demarcation interferometry photodetector reading, then changing air ambient makes the demarcation reflection measurement
Photodetector reading changes, while records several demarcation reflection measurement photodetector readings and corresponding demarcation
Interferometry photodetector reading, obtain 1/n wavelength-interferometric databases.
When two beam laser interfere, the optical path difference between adjacent most strong constructive interference and most weak destructive interference is half
Individual wavelength, in the scaling method of the application, most strong constructive interference, most weak destructive interference, 1/n wavelength-interferometrics are all marked
It is fixed, that is to say, that when carrying out actual measurement using the laser interferometer of the application, can be visited according to demarcation reflection measurement photoelectricity
Survey device reading and demarcate interferometry photodetector reading with it is most capable and experienced relate to database, most weak interference data storehouse, 1/n wavelength are done
The data related in database are compared, and determine that the position is most strong constructive interference, most weak cancellation according to the match condition of data
Interference or 1/n wavelength-interferometrics.So that the laser interferometer of the application can not only environment resistant interference, and also improve measurement
Precision.
As further preferred scheme, repeating said steps five, different demarcation reflection measurement photoelectricity is chosen every time and is visited
Device and demarcation interferometry photodetector are surveyed, obtains z 1/n wavelength-interferometric database.
The invention also discloses a kind of using above-mentioned laser interferometer and the measuring method of scaling method,
It is a kind of using contrast anti-interference stepped corner reflector laser interferometer and the measuring method of scaling method：
It is described if the signal reading that the demarcation reflection measurement photodetector measures is x in actual measuring environment
The obtained signal reading of demarcation interferometry photodetector measurement be y, and x values and y values are related to database, most weak done most capable and experienced
Relate to and be compared in database, 1/n wavelength-interferometric databases, when x values and y values and the most capable and experienced a certain class value phase related in database
Matching, then it is assumed that this position is most strong constructive interference position, when x values and y values and a certain class value phase in most weak interference data storehouse
Matching, then it is assumed that this position is most weak destructive interference position, when x values and y values and a certain class value in 1/n wavelength-interferometric databases
Match, then it is assumed that this position is 1/n wavelength-interferometrics position.
The measuring method of the application, the interference situation of current interfering beam is determined by x values and y values, anti-ring is realized with this
The ability of border interference, while also improve measurement accuracy.
As further preferred scheme, the matching threshold Δ of setting y values, if most capable and experienced relate to database, most weak interference number
It is y ' according to numerical value corresponding to demarcation measured interference light electric explorer in storehouse, 1/n wavelength-interferometric databases, according to x values to most capable and experienced
The inquiry of database, most weak interference data storehouse, 1/n wavelength-interferometrics database progress y ' is related to, is made if there is y ' | y-y'|<Δ,
The database where y ' being repartitioned, if y ' is related in database most capable and experienced, then it is assumed that this position is most strong constructive interference position,
If y ' is in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference position, if y ' is in 1/n wavelength-interferometric numbers
According in storehouse, then it is assumed that this position is 1/n wavelength-interferometrics position.
As further preferred scheme, if most capable and experienced relate to database, most weak interference data storehouse, 1/n wavelength-interferometric data
Numerical value corresponding to demarcating reflection measurement photodetector in storehouse is x ', in actually measuring, is selected closest to actual measured value x's
X ' is used as matching value, and database, most weak interference data storehouse, 1/n wavelength-interferometrics database progress y ' are related to most capable and experienced according to x ' values
Inquired about, made if there is y ' | y-y'|<Δ, the database where y ' is repartitioned, if y ' is related in database most capable and experienced,
It is most strong constructive interference position then to think this position, if y ' is in most weak interference data storehouse, then it is assumed that this position is most weak phase
Disappear interference position, if y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics position.
As further preferred scheme, the size of the matching threshold Δ ensures, when carrying out data query, to work as satisfaction |
y-y'|<During Δ, y ' is unique value.When matching threshold Δ is larger, it is possible that one group of x value and y values match two groups or
Multigroup x ' values and y ' values, make troubles to measurement, so first matching threshold Δ, makes one group of x value and y values in measurement process most
One group of x ' value and y ' values are matched, is convenient for measuring.
As further preferred scheme, the size of the matching threshold Δ is set according to the required precision actually measured
Fixed, when needing high-precision measured value, using less matching threshold, when not needing high-acruracy survey value, use is larger
Matching threshold.
As further preferred scheme, if Δ=5%.
In the measuring method of the application, by setting matching threshold Δ, according to the setting of the needs of Surveying Actual Precision
Size with threshold value Δ, during being convenient for measuring with this, the match selection of data, reduce measurement difficulty.
Compared with prior art, beneficial effects of the present invention：
The contrast anti-interference stepped corner reflector laser interferometer of the application, first by setting multiple beam, ladder
Type corner reflector and corner reflector improve the measurement accuracy of laser interferometer, while by setting reflection measurement photodetection
Device, can be by measuring after laser interferometry environment changes to mobile corner reflector reflection laser intensity, laser
Interference state no longer directly determines by the signal magnitude of interferometry photodetector group, but by reflection measurement photodetector
Together decided on interferometry photodetector group, so realize the antijamming capability of laser interferometer.
The beneficial effect of other embodiments of the application：
The laser interferometer of the application, can not only determine the position of most strong constructive interference, but also can determine most weak
The position of destructive interference, i.e. make the measurement accuracy of the laser interferometer of the application bring up to 1/n wavelength, make the laser of the application
Interferometer can not only environment resistant interference, and also improve measurement accuracy；Also, the measuring method of the application, scaling method,
Cooperated between multi-beam laser source, stepped corner reflector, further improve the measurement of the application laser interferometer
Precision.
Brief description of the drawings：
Fig. 1 is the light path schematic diagram of laser interferometer structure of the present invention；
Structural representation when Fig. 2 is mobile corner reflector movement,
Marked in figure：
1- lasing light emitters, 2- step type corner reflectors, 3- movement corner reflectors, 4- interferometry photodetector groups, 5- points
Light microscopic group, 6- reflection measurement photodetector groups, 7- first laser beam groups, 8- second laser beam groups, 9- reflection laser beam groups,
41- interferometry photodetectors, 41a- demarcation interferometry photodetectors, the spectroscopes of 51- first, the spectroscopes of 52- second,
61- reflection measurement photodetectors, 61a- demarcation reflection measurement photodetectors.
Embodiment
With reference to test example and embodiment, the present invention is described in further detail.But this should not be understood
Following embodiment is only limitted to for the scope of the above-mentioned theme of the present invention, it is all that this is belonged to based on the technology that present invention is realized
The scope of invention.
Embodiment 1, as illustrated, a kind of contrast anti-interference stepped corner reflector laser interferometer, includes laser
Source 1, stepped corner reflector 2, interferometry photodetector group 4, mobile corner reflector 3 and light splitting microscope group 5, the lasing light emitter
1 projects z beam laser beams to the light splitting microscope group 5, and wherein z is positive integer more than or equal to 2, the measured interference light electrical resistivity survey
Survey device group 4 and include z interferometry photodetector, each interferometry photodetector 41 is relative with one laser beam
Should, each laser beam is divided into first laser beam group 7 and second laser beam group 8, the first laser beam group after the light splitting microscope group 5
Stepped corner reflector 2 described in 7 directives, microscope group 5 is divided described in directive again after the stepped corner reflector 2 reflects, then
The interferometry photodetector group 4 described in directive after the light splitting microscope group 5, is moved described in the directive of second laser beam group 8
Corner reflector 3, microscope group 5 is divided described in directive again after the mobile corner reflector 3 reflects, the phase after the light splitting microscope group 5
The corresponding first laser beam group 7 with interferometry photodetector group 4 described in directive interferes, and forms coherence laser beam
Group, each interfering beam difference each self-corresponding interferometry photodetector 41 of directive of coherence laser beam group are described right
Stepped corner reflector laser interferometer more anti-interference than formula also includes reflection measurement photodetector group 6, the reflection measurement
Photodetector group 6 includes z reflection measurement photodetector 61, and the second laser beam group 8 is anti-by the traveling angle
Penetrate after microscope group 5 is divided described in the directive of mirror 3 and be also formed with reflection laser beam group 9, each laser beam difference of the reflection laser beam group 9
The reflection measurement photodetector 61 of directive one.
As further preferred scheme, the light splitting microscope group 5 includes the first spectroscope 51 and the second spectroscope 52, institute
The z beams laser beam for stating the injection of lasing light emitter 1 is first mapped to the first spectroscope 51, and first laser beam group is reflected to form through the first spectroscope 51
7, form second laser beam group 8, stepped corner reflector 2 described in the directive of first laser beam group 7, warp through the transmission of the first spectroscope 51
First spectroscope 51 described in directive again after reflection, then again transmitted through first spectroscope 51, the second laser beam group 8
Mobile corner reflector 3 described in directive, the second spectroscope 52 described in directive after the mobile corner reflector 3 reflects, through described the
First spectroscope 51 described in directive after the transmission of two spectroscopes 52, and the first laser with being transmitted from first spectroscope 51
Beam group 7 interferes, and forms interferometry photodetector group 4 described in directive after coherence laser beam group, anti-by the traveling angle
Penetrate the second laser beam group 8 of the second spectroscope 52 described in the directive of mirror 3 also reflected to form by second spectroscope 52 it is described
Reflection laser beam group 9.
The laser interferometer of the application, reflected because reflection measurement photodetector group 6 can measure mobile corner reflector 3
The intensity of laser beam group 9, the interference state of laser interference light beam is determined according to the intensity of reflection laser beam group 9, so realized anti-
The purpose of environmental disturbances.
As further preferred scheme, in the lasing light emitter 1, stepped corner reflector 2, interferometry photodetector
Group 4, light splitting microscope group 5, the laser beam in reflection measurement photodetector group 6 between any two be arranged in closing space without
Contacted with Outdoor Space.In this application, lasing light emitter 1, stepped corner reflector 2, interferometry photodetector group 4,
Laser beam between light splitting microscope group 5 and reflection measurement photodetector group 6 these part any twos is arranged in closing space,
So that during measuring, the laser beam between these above-mentioned parts can't be effected by environmental factors, and then
It ensure that the measurement accuracy of the application laser interferometer.
As further preferred scheme, the laser beam between the light splitting microscope group 5 and the mobile corner reflector 3 exposes
Among surrounding air.In actual use, mobile corner reflector 3 is arranged on testee, is moved with testee, so
In this application, the laser beam being divided between microscope group 5 and mobile corner reflector 3 is made first among surrounding air
It is simple in construction to obtain the application laser interferometer, while also facilitates the arrangement of the application laser interferometer.
Embodiment 2, as illustrated, a kind of demarcation side for contrast anti-interference stepped corner reflector laser interferometer
Method, comprise the steps：
Step 1: position adjustment：Adjust lasing light emitter 1, stepped corner reflector 2, light splitting microscope group 5, interferometry photoelectricity
The position of detector group 4, reflection measurement photodetector group 6 and mobile corner reflector 3；
Step 2: adjustment light path：Start the lasing light emitter 1, further accurately adjust stepped corner reflector 2, spectroscope
The position of 5, interferometry photodetector group 4, reflection measurement photodetector group 6 and mobile corner reflector 3 is organized, does laser
The light path of interferometer reaches design requirement；
Step 3: generation is most capable and experienced to relate to database：Choose a measured interference light in interferometry photodetector group 4
Electric explorer 41 chooses a reflection in reflection measurement photodetector group 6 as demarcation interferometry photodetector 41a
Measure photodetector 61 as demarcation reflection measurement photodetector 61a, the demarcation interferometry photodetector 41a and
The demarcation reflection measurement photodetector 61a is corresponding with the same one laser beam that the lasing light emitter 1 projects, in air cleaning
In the environment of the mobile mobile corner reflector 3, when the interfering beam that interferometry photodetector 41a is demarcated described in directive is
The mobile corner reflector 3 is fixed during most strong constructive interference, record now demarcates reflection measurement photodetector 61a readings and mark
Determine interferometry photodetector 41a readings, changing air ambient becomes the demarcation reflection measurement photodetector 61a readings
Change, while record several demarcation reflection measurement photodetector 61a readings and corresponding demarcation interferometry photodetection
Device 41a readings, obtain most capable and experienced relating to database.
As further preferred scheme, repeating said steps three, different demarcation reflection measurement photoelectricity is chosen every time and is visited
Device 61a and demarcation interferometry photodetector 41a are surveyed, obtains that z is most capable and experienced to relate to database.
The laser interferometer structure and scaling method of the application, in most strong constructive interference, change measuring environment, record
Demarcate reflection measurement photodetector reading 61a and demarcation interferometry photodetector 41a readings form most strong interference data
Storehouse, in actual measurement process, if there is causing the interferometry photodetector group 4 can not be normal due to environmental factor
, can be according to demarcation reflection measurement photodetector 61a readings and demarcation interferometry photoelectricity when detecting most strong constructive interference
Detector 41a readings are compared with the most capable and experienced data related in database, and if there is there is matched data, then the position is most
Strong constructive interference, so that the laser interferometer of the application realizes the ability of environment resistant interference.
As further preferred scheme, also include Step 4: generating most weak interference data storehouse：In the ring of air cleaning
The mobile mobile corner reflector 3 under border, when the interfering beam that interferometry photodetector 41a is demarcated described in directive is most weak
The mobile corner reflector 3 is fixed during destructive interference, record now demarcates reflection measurement photodetector 61a readings and demarcation is dry
Measurement photodetector 41a readings are related to, changing air ambient changes the demarcation reflection measurement photodetector 61a readings,
Several demarcation reflection measurement photodetector 61a readings and corresponding demarcation interferometry photodetector are recorded simultaneously
41a readings, obtain most weak interference data storehouse.
As further preferred scheme, repeating said steps four, different demarcation reflection measurement photoelectricity is chosen every time and is visited
Device 61a and demarcation interferometry photodetector 41a are surveyed, obtains z most weak interference data storehouses.
As further preferred scheme, also include Step 5: generating 1/n wavelength-interferometric databases, n is to be more than or wait
2 positive integer, the mobile mobile corner reflector 3 in the environment of air cleaning, when demarcation interferometry photoelectricity described in directive
When detector 41a interfering beam is most strong constructive interference, it is further continued for moving the distance of 1/2n wavelength, record now demarcation reflection
Photodetector reading 61a and demarcation interferometry photodetector 41a readings are measured, then changing air ambient makes the mark
Determine the change of reflection measurement photodetector 61a readings, while record several described demarcation reflection measurement photodetector 61a and read
Several and corresponding demarcation interferometry photodetector 41a readings, obtain 1/n wavelength-interferometric databases.
When two beam laser interfere, the optical path difference between adjacent most strong constructive interference and most weak destructive interference is half
Individual wavelength, in the scaling method of the application, most strong constructive interference, most weak destructive interference, 1/n wavelength-interferometrics are all marked
It is fixed, that is to say, that when carrying out actual measurement using the laser interferometer of the application, can be visited according to demarcation reflection measurement photoelectricity
Survey device 61a readings and demarcation interferometry photodetector 41a readings relate to database, most weak interference data storehouse, 1/n with most capable and experienced
Data in wavelength-interferometric database are compared, and determine that the position is most strong constructive interference, most according to the match condition of data
Weak destructive interference or 1/n wavelength-interferometrics.So that the laser interferometer of the application can not only environment resistant interference, but also improve
Measurement accuracy.
As further preferred scheme, repeating said steps five, different demarcation reflection measurement photoelectricity is chosen every time and is visited
Device 61a and demarcation interferometry photodetector 41a are surveyed, obtains z 1/n wavelength-interferometric database.
Embodiment 3, as illustrated, a kind of use contrast anti-interference stepped corner reflector laser interferometer and demarcation side
The measuring method of method：
In actual measuring environment, if the signal reading that the demarcation reflection measurement photodetector 61a is measured is x,
The signal reading that the demarcation interferometry photodetector 41a measurements obtain is y, by x values and y values in most strong interference data
It is compared in storehouse, most weak interference data storehouse, 1/n wavelength-interferometric databases, when x values and y values are related in database with most capable and experienced
A certain class value matches, then it is assumed that this position is most strong constructive interference position, when in x values and y values and most weak interference data storehouse
A certain class value matches, then it is assumed that this position is most weak destructive interference position, when in x values and y values and 1/n wavelength-interferometric databases
A certain class value match, then it is assumed that this position is 1/n wavelength-interferometrics position.
The measuring method of the application, the interference situation of current interfering beam is determined by x values and y values, anti-ring is realized with this
The ability of border interference, while also improve measurement accuracy.
As further preferred scheme, the matching threshold Δ of setting y values, if most capable and experienced relate to database, most weak interference number
It is y ' according to numerical value corresponding to demarcation measured interference light electric explorer in storehouse, 1/n wavelength-interferometric databases, according to x values to most capable and experienced
The inquiry of database, most weak interference data storehouse, 1/n wavelength-interferometrics database progress y ' is related to, is made if there is y ' | y-y'|<Δ,
The database where y ' being repartitioned, if y ' is related in database most capable and experienced, then it is assumed that this position is most strong constructive interference position,
If y ' is in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference position, if y ' is in 1/n wavelength-interferometric numbers
According in storehouse, then it is assumed that this position is 1/n wavelength-interferometrics position.
As further preferred scheme, if most capable and experienced relate to database, most weak interference data storehouse, 1/n wavelength-interferometric data
Numerical value corresponding to demarcating reflection measurement photodetector 61a in storehouse is x ', in actually measuring, is selected closest to actual measured value
X x ' is used as matching value, and database, most weak interference data storehouse, the progress of 1/n wavelength-interferometrics database are related to most capable and experienced according to x ' values
Y ' is inquired about, and is made if there is y ' | y-y'|<Δ, the database where y ' is repartitioned, if y ' relates to database most capable and experienced
It is interior, then it is assumed that this position is most strong constructive interference position, if y ' is in most weak interference data storehouse, then it is assumed that this position is most weak
Destructive interference position, if y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics position.
As further preferred scheme, the size of the matching threshold Δ ensures, when carrying out data query, to work as satisfaction |
y-y'|<During Δ, y ' is unique value.When matching threshold Δ is larger, it is possible that one group of x value and y values match two groups or
Multigroup x ' values and y ' values, make troubles to measurement, so first matching threshold Δ, makes one group of x value and y values in measurement process most
One group of x ' value and y ' values are matched, is convenient for measuring.
As further preferred scheme, the size of the matching threshold Δ is set according to the required precision actually measured
Fixed, when needing high-precision measured value, using less matching threshold, when not needing high-acruracy survey value, use is larger
Matching threshold.
As further preferred scheme, if Δ=5%.
In the measuring method of the application, by setting matching threshold Δ, according to the setting of the needs of Surveying Actual Precision
Size with threshold value Δ, during being convenient for measuring with this, the match selection of data, reduce measurement difficulty.
Above example only not limits technical scheme described in the invention to illustrate the present invention, although this explanation
Book is with reference to above-mentioned each embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned specific implementation
Mode, therefore any the present invention is modified or equivalent substitution；And the technical side of all spirit and scope for not departing from invention
Case and its improvement, it all should cover among scope of the presently claimed invention.
Claims (8)
1. a kind of scaling method for contrast anti-interference stepped corner reflector laser interferometer, described contrast anti-interference
Stepped corner reflector laser interferometer, include lasing light emitter, stepped corner reflector, interferometry photodetector group, shifting
Corner reflector and light splitting microscope group are moved, the lasing light emitter projects z beam laser beams to the light splitting microscope group, and wherein z is to be more than or wait
In 2 positive integer, the interferometry photodetector group includes z interferometry photodetector, and each interference is surveyed
It is corresponding with one laser beam to measure photodetector, each laser beam is divided into first laser beam group and second after the light splitting microscope group
Laser beam group, stepped corner reflector described in the first laser beam group directive, after the stepped corner reflector reflection again
Microscope group, then the interferometry photodetector group described in directive after the light splitting microscope group are divided described in secondary directive, described second swashs
Mobile corner reflector described in light beam group directive, microscope group is divided described in directive again after the mobile corner reflector reflection, through institute
The corresponding first laser beam group with interferometry photodetector group described in directive interferes after stating light splitting microscope group, is formed
Coherence laser beam group, each interfering beam difference each self-corresponding interferometry photodetection of directive of coherence laser beam group
Device, it is characterised in that the contrast anti-interference stepped corner reflector laser interferometer also includes the spy of reflection measurement photoelectricity
Device group is surveyed, the reflection measurement photodetector group includes z reflection measurement photodetector, and the second laser beam group exists
Be also formed with reflection laser beam group after being divided microscope group as described in the mobile corner reflector directive, the reflection laser beam group it is each
Laser beam distinguishes the reflection measurement photodetector of directive one, and the light splitting microscope group includes the first spectroscope and second point
Light microscopic, the z beams laser beam that the lasing light emitter projects first are mapped to the first spectroscope, and first laser beam is formed through the first dichroic mirror
Group, transmit to form second laser beam group through the first spectroscope, stepped corner reflector described in first laser beam group directive, through reflection
First spectroscope described in directive again afterwards, then again transmitted through first spectroscope, described in the second laser beam group directive
Mobile corner reflector, the second spectroscope described in directive after the mobile corner reflector reflection, is transmitted through second spectroscope
First spectroscope described in directive afterwards, and the first laser beam group with being transmitted from first spectroscope interferes, and is formed
Interferometry photodetector group described in directive after coherence laser beam group, the second light splitting as described in the mobile corner reflector directive
The second laser beam group of mirror also forms the reflection laser beam group by second dichroic mirror,
Characterized in that, the scaling method comprises the steps：
Step 1: position adjustment：Adjust lasing light emitter, stepped corner reflector, light splitting microscope group, interferometry photodetector
The position of group, reflection measurement photodetector group and mobile corner reflector；
Step 2: adjustment light path：Start the lasing light emitter, further accurately adjust stepped corner reflector, light splitting microscope group, interference
The position of photodetector group, reflection measurement photodetector group and mobile corner reflector is measured, makes the light path of laser interferometer
Reach design requirement；
Step 3: generation is most capable and experienced to relate to database：Choose a measured interference light electrical resistivity survey in interferometry photodetector group
Device is surveyed as demarcation interferometry photodetector, the reflection measurement photoelectricity chosen in reflection measurement photodetector group is visited
Device is surveyed as demarcation reflection measurement photodetector, the demarcation interferometry photodetector and the demarcation reflection measurement light
Electric explorer is corresponding with the same one laser beam that the lasing light emitter projects, the mobile traveling angle in the environment of air cleaning
Speculum, the movement is fixed when the interfering beam that interferometry photodetector is demarcated described in directive is most strong constructive interference
Corner reflector, record are now demarcated reflection measurement photodetector reading and demarcation interferometry photodetector reading, changed
Air ambient makes the demarcation reflection measurement photodetector reading change, while records several demarcation reflection measurement photoelectricity and visit
Device reading and corresponding demarcation interferometry photodetector reading are surveyed, obtains most capable and experienced relating to database.
2. scaling method as claimed in claim 1, it is characterised in that also include Step 4: generating most weak interference data storehouse：
The mobile mobile corner reflector in the environment of air cleaning, when the interference that interferometry photodetector is demarcated described in directive
Light beam fixes the mobile corner reflector when being most weak destructive interference, record now demarcate reflection measurement photodetector reading and
Interferometry photodetector reading is demarcated, changing air ambient makes the demarcation reflection measurement photodetector reading change,
Several demarcation reflection measurement photodetector readings and corresponding demarcation interferometry photodetector reading are recorded simultaneously,
Obtain most weak interference data storehouse.
3. scaling method as claimed in claim 2, it is characterised in that also include Step 5: generating 1/n wavelength-interferometric data
Storehouse, n are the positive integer for being more than or waiting 2, the mobile mobile corner reflector in the environment of air cleaning, when demarcation described in directive
When the interfering beam of interferometry photodetector is most strong constructive interference, it is further continued for moving the distance of 1/2n wavelength, records this
When demarcate reflection measurement photodetector reading and demarcation interferometry photodetector reading, then change air ambient make institute
The reading change of demarcation reflection measurement photodetector is stated, while records several demarcation reflection measurement photodetector readings
And corresponding demarcation interferometry photodetector reading, obtain 1/n wavelength-interferometric databases.
A kind of 4. measuring method of scaling method using described in claim 3, it is characterised in that in actual measuring environment,
If the signal reading that the demarcation reflection measurement photodetector measures is x, the demarcation interferometry photodetector is surveyed
The signal reading measured is y, and x values and y values are related into database, most weak interference data storehouse, 1/n wavelength-interferometric data most capable and experienced
It is compared in storehouse, when x values and y values match with the most capable and experienced a certain class value related in database, then it is assumed that this position is most strong
Constructive interference position, when x values and y values match with a certain class value in most weak interference data storehouse, then it is assumed that this position is most weak
Destructive interference position, when x values and y values match with a certain class value in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/
N wavelength-interferometrics position.
5. measuring method as claimed in claim 4, it is characterised in that the matching threshold Δ of setting y values, if most strong interference data
Numerical value corresponding to demarcating measured interference light electric explorer in storehouse, most weak interference data storehouse, 1/n wavelength-interferometric databases is y ', root
According to x values to the most capable and experienced inquiry for relating to database, most weak interference data storehouse, 1/n wavelength-interferometrics database progress y ', if there is y '
Make | y-y ' |<Δ, the database where y ' is repartitioned, if y ' is related in database most capable and experienced, then it is assumed that this position is
Most strong constructive interference position, if y ' is in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference position, if
Y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics position.
6. measuring method as claimed in claim 5, it is characterised in that set and most capable and experienced relate to database, most weak interference data storehouse, 1/
Numerical value corresponding to demarcating reflection measurement photodetector in n wavelength-interferometric databases is x ', in actually measuring, is selected closest
Actual measured value x x ' is used as matching value, and database, most weak interference data storehouse, 1/n wavelength-interferometrics are related to most capable and experienced according to x ' values
Database carries out y ' and inquired about, and makes if there is y ' | y-y ' |<Δ, the database where y ' is repartitioned, if y ' exists
It is most capable and experienced to relate in database, then it is assumed that this position is most strong constructive interference position, if y ' recognizes in most weak interference data storehouse
It is most weak destructive interference position for this position, if y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength
Interference position.
7. the measuring method as described in claim 5 or 6, it is characterised in that the size of the matching threshold Δ ensures carrying out
During data query, work as satisfaction | y-y ' |<During Δ, y ' is unique value.
8. measuring method as claimed in claim 7, it is characterised in that the size of the matching threshold Δ is according to actually measuring
Required precision is set, when needing high-precision measured value, using less matching threshold, when not needing high-acruracy survey
During value, using larger matching threshold.
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| CN204757921U (en) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | Anti -interference notch cuttype corner reflection mirror laser interferometer of comparison type |
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| JP2002174504A (en) * | 2000-12-05 | 2002-06-21 | Tokyo Seimitsu Co Ltd | Multi-beam laser interferometer |
| WO2005067579A2 (en) * | 2004-01-06 | 2005-07-28 | Zygo Corporation | Multi-axis interferometers and methods and systems using multi-axis interferometers |
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