CN105150120B - A kind of Roll to Roll chemical-mechanical polishing mathings rigid layer of concretion abrasive polishing roll and preparation method thereof - Google Patents
A kind of Roll to Roll chemical-mechanical polishing mathings rigid layer of concretion abrasive polishing roll and preparation method thereof Download PDFInfo
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Abstract
The invention discloses a kind of Roll to Roll chemical-mechanical polishing mathings rigid layer of concretion abrasive polishing roll and preparation method thereof, the ratio of its component and percentage by weight is as follows：Abrasive material 0.5% ~ 10%, light-cured resin 5%~45%, reactive diluent 5%~41%, light trigger 4%~7%, accelerator 0.05%~5%, surface property conditioning agent 0.05%~3%, adjuvant 0.05% ~ 5%, filler 1% ~ 4%, pigment 0.02%.Operating process of the present invention is simple, cost is cheap, is easy to industrialization and popularization and application, has wide market prospects, economic benefit and social benefit are notable.
Description
Technical field
Ultraprecision Machining in being manufactured the present invention relates to microelectronics, photoelectron, flexible display substrate, particularly one
Kind Roll-to-Roll chemical-mechanical polishing mathings rigid layer of concretion abrasive polishing roll and preparation method thereof.
Background technology
Microelectronics, photoelectron, IC manufacturing are one of important symbols for weighing a statehood and overall national strength,
It is that the world today is most hotly competitive, develops most rapid field, only grasps advanced microelectronics and optoelectronic fabrication techniques
Cost can be efficiently controlled and expanded the scale of production, could the survival and development in the market competition of fierceness.Microelectronics and photoelectricity
The advanced manufacture of son is national to China to pass through as the basic industry of national economy, guiding industry, pillar industry and strategic industry
Ji, national security, people's lives and social progress are playing more and more important effect.
Flexible display technologies are just gradually improving the life of people and exchanged, and significantly promote information visualization.In recent years,
The advantage of Flexible Displays becomes increasingly conspicuous, and flexible electronic as LCD, OLED of FPD and plasma compared with showing, tool
Have ultra-thin, light weight, durable, storage capacity be big, design freely, deflection, can wind and the performance such as impact resistance, be widely used in moving
Mobile phone, personal digital assistant PDA, notebook computer, trade mark, secure identity file, e-book, electronic poster, automobile instrument
Industrial, the civilian and military rows such as plate, RF identifying systems, sensor, environment are shown, medical treatment, general lighting, robot sense skin
Industry, flexible display can also allow display screen to be easier to turn into ornament materials, cause work using the bendability characteristics of Flexible Displays
Journey design is not limited to planarize, and the display pattern of diversification external form can be achieved.
Due to the huge market prospects of Flexible Displays, the research institution and production firm of many countries and regions put into soft
In the research and application of property Display Technique, and achieve significant achievement.Currently, flexible electronic is also in before industrialization i.e.
At night, many technical bottlenecks still also be present, be also in research and the stage explored for material, technique, design etc..Flexibility is aobvious
The technology of showing is to integrate large scale integrated circuit, precision processing technology, photoelectron technology new high-tech industry, is related to and partly leads
Numerous high-tech areas such as body, optics, microelectronics, chemical material, precision optical machinery and processing.
Flexible Displays substrate is the basis of flexibility of research and development display.Flat-panel monitor is made by substrate of glass substrate
, and flexible display be then using flexible material as substrate, its surface quality requirements to flexible substrate as glass substrate,
Surface smoothness and thickness requirement are very strict, to realize the surface quality and machining accuracy of flexible substrate, the most frequently used at present
Method is chemical Mechanical Polishing Technique.
Chemical Mechanical Polishing Technique is considered as that can take into account surface roughness and the best technique of surface smoothness requirement
Method, it has also become hard brittle crystal material, metal material and other materials realize the most practical of surface ultra-smooth not damaged processing
One of technology, and be widely used in the photoelectrons such as super large-scale integration, semiconductor lighting, optical glass, FPD,
The fields such as microelectronics, Aero-Space and mechanical engineering.It is probably by analysis most suitable with research, chemical Mechanical Polishing Technique
And be entirely capable of in the efficient Ultra-precision Turnings of Roll-to- Roll for large-size ultra-thin Flexible Displays substrate surface, to obtain
Obtain the undamaged finished surface of ultra-smooth.
Another key factor of exploitation flexible display is that its technique may be by Sheet-fed batch
processing（Individual batch production）It is converted into Roll-to-Roll manufacturing（Volume to volume produces）, efficiency is significantly
Improve, it is meant that the cost of display may substantially reduce.Therefore, the task of top priority is research large-size ultra-thin Flexible Displays substrate
Roll-to-Roll high benefit installations, equipment and technology and Ultra-precision Turning it is theoretical.
Polishing roll is the main portion in the Roll-to-Roll chemical-mechanical polishing mathings of large-size ultra-thin Flexible Displays substrate
Part, because free abrasive chemical Mechanical Polishing Technique has many insurmountable problems, in recent years, concretion abrasive chemical machinery
Polishing technology is expected to substitute free abrasive chemically mechanical polishing due to its huge superiority；And concretion abrasive chemical machinery is thrown
The manufacture of smooth roll is a problem, and the rigid layer of polishing roll, is directly contacted with workpiece surface, its direct shadow of quality and performance
Material removing rate and surface quality of polishing production etc. are rung, but at present, also without relevant concretion abrasive Roll-to-Roll chemistry
The document report of the manufacture view of roller is mechanically polished, it is more not firm on concretion abrasive Roll-to-Roll chemically mechanical polishing rollers
The report of property layer manufacture view.
At present, particular problem existing for Roll-to-Roll free abrasives chemical Mechanical Polishing Technique is as follows：
（1）Roll-to-Roll polishing machines are using traditional free abrasive chemical Mechanical Polishing Technique to ultrathin flexible substrate
When material is polished, the inhomogeneities that causes free abrasive to be distributed between polishing roll and workpiece, make the material of workpiece each several part
Expect that clearance is inconsistent, influence surface smoothness.（2）Due to containing abrasive material in polishing fluid, polishing rear portion abrasive particle can be inlayed
In workpiece surface, not easy cleaning.（3）Due to polishing fluid complicated component, the removing of workpiece surface remaining slurry is CMP after polishing
The problem cleaned afterwards.（4）Concretion abrasive polishing roll polishing when surface be also easy to produce plastic deformation, its surface gradually become it is smooth or
Blockage of the micro orifice, the ability reduction for making it accommodate polishing fluid and exclude scrap, causes material removing rate to decline with the time.Need constantly
Ground is repaired and moistening polishing pad is to recover its surface roughness and porous, causes efficiency low.
The content of the invention：
It is an object of the invention to provide a kind of Roll-to-Roll chemical machineries throwing high in machining efficiency, abrasive material utilization rate is high
Ray machine rigid layer of concretion abrasive polishing roll and preparation method thereof.
The technical scheme is that a kind of Roll-to-Roll chemical-mechanical polishing mathings are firm with concretion abrasive polishing roll
Property layer, it is characterised in that：Its component and the ratio of percentage by weight are as follows：
Abrasive material 0.5% ~ 10%,
Light-cured resin 5%~45%,
Reactive diluent 5%~41%,
Light trigger 4%~7%,
Accelerator 0.05%~5%,
Surface property conditioning agent 0.05%~3%,
Adjuvant 0.05% ~ 5%,
Filler 1% ~ 4%,
Pigment 0.02%.
Described abrasive material be white fused alumina micro mist, silicon carbide micro-powder, ceria micro mist or one kind in diadust or
Two kinds of mixtures, the particle diameter of these micro mists is 50nm ~ 56 μm.
Described light-cured resin is the urethane acrylate of modified epoxy acrylate, degree of functionality more than 3, degree of functionality
The mixture of one or both of polyester acrylate more than 3.
Described reactive diluent is pentaerythritol triacrylate, tetramethylol methane tetraacrylate, two contracting trihydroxy methyls
The mixing of one or both of tetraacrylate, Dipentaerythritol Pentaacrylate, dipentaerythritol acrylate
Thing.
Described light trigger is 2- hydroxy-2-methyl -1- phenylacetones, 2,4,6- trimethylbenzoy-diphenies
The mixture of one or both of phosphine oxide.
Described accelerator is the mixture of one or both of polydimethyl siloxane fluid, modified polyorganosiloxane.
Described surface property conditioning agent is one or both of aluminum stearate, tung oil, Tissuemat E, polypropylene wax
Mixture.
Described adjuvant is 2,6- toluene di-tert-butyl phenols.
Described filler is the mixture of one or both of white carbon, kaolin, talcum powder, diatomite.
A kind of preparation method of the Roll-to-Roll chemical-mechanical polishing mathings rigid layer of concretion abrasive polishing roll, it is special
Sign is that it comprises the following steps：
（1）Prepare some glasswares and agitator,
（2）Selected abrasive particle, light-cured resin, reactive diluent, light trigger, promotion have been weighed by certain mass ratio
Agent, surface property conditioning agent, filler, adjuvant, pigment, it is stand-by；
（3）By rigid layer photocuring mould installion on the polishing roll of the good elastic layer of photocuring；
（4）Load weighted light-cured resin is poured into agitator first, is subsequently poured into abrasive material, is stirred, then is poured into
Reactive diluent, light trigger, accelerator, surface property conditioning agent, filler, adjuvant, pigment, it is thoroughly mixed uniformly,
As the mixture containing abrasive particle；
（5）By step（4）Manufactured mixture pours into step（3）In the mounted rigid layer photocuring mould of institute, and fill
Divide full of the space between mould inner surface and elastic layer；
（6）By step（5）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（7）The cure parameter started shooting according to following photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/
Min, mould upper surface away from light source 20mm, rotary table motor speed be 50r/min, timer set 5 minutes, carry out light consolidate
Change；
（8）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll of photocuring, you can use；
（9）When if necessary, can outside rigid layer one layer of rigid layer of resolidification.
The material of mould may be selected to be inorganic transparent glass material.
Beneficial effects of the present invention：
The present invention can be achieved：
（1）The rigid layer of the concretion abrasive polishing roll ensure that the surface smoothness of processing object, material removing rate.
（2）The outer surface of concretion abrasive polishing roll rigid layer containing abrasive material, rigid layer photocuring mould can be passed through（See figure
2）It is solidified into different shapes, such as cylinder boss array configuration, square net array configuration, different boss sizes, grid
Size can be realized by mould, realize that high-efficient high performance is processed.
（3）Bonding agent is not needed between the rigid layer and elastic layer of concretion abrasive polishing pad, takes multi-shell curing just can be real
The now bonding between every layer.
（4）When the Roll-to-Roll chemically mechanical polishings of ultrathin flexible backing material are carried out with concretion abrasive polishing roll,
Abrasive material is free of in polishing fluid, polishing fluid composition becomes simple, and workpiece surface cleaning is simple after polishing, further, since in polishing fluid
There is no abrasive material, make the material removing rate of workpiece each several part consistent, surface smoothness is high.
（5）When the Roll-to-Roll chemically mechanical polishings of ultrathin flexible backing material are carried out with concretion abrasive polishing roll,
Pad interface is not likely to produce plastic deformation, and surface pore is not easily blocked, and it accommodates polishing fluid and the ability of exclusion scrap will not
Reduced with the time, material removing rate uniformity.In addition, it is not necessary that finishing polishing pad, improves polishing efficiency；
（6）The rigid layer of concretion abrasive polishing roll will not produce swelling, in continuous polishing mistake in polishing process because of water suction
Cheng Zhong, the physicochemical properties of polishing pad in itself are stable.
（7）In polishing process, the abrasive particle of abrasive grain layer is uniformly dispersed concretion abrasive polishing pad, with exposed abrasive particle
It is worn, the abrasive particle of nexine is again exposed to be always maintained at sharp mechanical removal effect outside, the characteristic with self-recision.
The present invention is innovative product that is original, having independent intellectual property right, and operating process is simple, cost is cheap,
It is easy to industrialization and popularization and application, there are wide market prospects, economic benefit and social benefit are notable.
Brief description of the drawings
Fig. 1 is concretion abrasive polishing roll structure chart of the present invention.
Fig. 2 is the rigid layer photocuring mould structure schematic diagram of concretion abrasive polishing roll of the present invention.
Embodiment
Technical scheme is further illustrated with reference to the accompanying drawings and examples.
Example 1：
The present invention foundation structure be：
Polishing roll left end support mechanism 1 and polishing roll right-hand member supporting mechanism are respectively equipped with the both sides of concretion abrasive polishing roll
5, the outside of concretion abrasive polishing roll 6 is provided with concretion abrasive polishing roll base layer 4, is set on the outside of concretion abrasive polishing roll base layer
Elasticity layer 3, the outside of elastic layer are provided with rigid layer 2, and the rigid layer photocuring mould 7 of concretion abrasive polishing roll is sleeved on elasticity
Layer outside.
The present invention manufactures and designs a kind of rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll,
For rough polishing process, rigid layer thickness 1.5mm；The concretion abrasive polishes roller diameter 300mm, width 600mm, as shown in Figure 1.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）The white fused alumina abrasive material of 36 μm of 100g particle diameters is weighed respectively, and 200g degrees of functionality are 6 urethane acrylate（Fat
Fat race）, 150g degrees of functionality be 6 urethane acrylate（Aromatic series）, 50g degrees of functionality be 4 polyester acrylate, 200g bis-
The acrylate of pentaerythrite six, the contracting trimethylolpropane tetra-acrylates of 150g bis-, 40g 2- hydroxy-2-methyl -1- phenyl third
Ketone, 20g modified polyorganosiloxanes, 30g aluminum stearates, 40g 2,6- toluene di-tert-butyl phenols, 18g, diatomite, 2g, iron oxide
It is red.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By the urethane acrylate that load weighted 200g degrees of functionality are 6（Aliphatic）, 150g degrees of functionality be 6 it is poly-
Urethane acrylate（Aromatic series）, 50g degrees of functionality be 4 polyester acrylate pour into agitator, be subsequently poured into 100g particle diameters
36 μm of white fused alumina abrasive material, stirs, then pours into reactive diluent, light trigger, accelerator, surface property conditioning agent, fills out
Material, adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 2：Manufacture and design a kind of rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll,
For rough polishing process, rigid layer thickness 1.5mm；The concretion abrasive polishes roller diameter 300mm, width 600mm, as shown in Figure 1.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）The white fused alumina abrasive material of 14 μm of 70g particle diameters is weighed respectively, and 150g degrees of functionality are 4 urethane acrylate（Fat
Race）, 150g degrees of functionality be 4 urethane acrylate（Aromatic series）, 120g degrees of functionality be 4 polyester acrylate, 360g seasons
Penta tetrol triacrylate, 40g 2- hydroxy-2-methyl -1- phenylacetones, 10g 2,4,6- trimethylbenzoy-diphenies
Phosphine oxide, 5g polydimethyl siloxane fluids, 20g modified polyorganosiloxanes, 25g Tissuemat Es, 30g 2,6- toluene di-tert-butyl phenols,
18g talcum powder, 2g pigment yellows（PY129）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By the urethane acrylate that load weighted 150g degrees of functionality are 4（Aliphatic）, 150g degrees of functionality be 4 it is poly-
Urethane acrylate（Aromatic series）, 120g degrees of functionality be 4 polyester acrylate pour into agitator, be subsequently poured into 70g particle diameters
14 μm of white fused alumina abrasive material, stirs, then pours into reactive diluent, light trigger, accelerator, surface property conditioning agent, fills out
Material, adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 3：Manufacture and design a kind of rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll,
For rough polishing process, rigid layer thickness 1.5mm；The concretion abrasive polishes roller diameter 300mm, width 600mm, as shown in Figure 1.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）The white fused alumina abrasive material of 7 μm of 60g particle diameters is weighed respectively, and 150g degrees of functionality are 4 urethane acrylate（Fat
Race）, 150g degrees of functionality be 4 urethane acrylate（Aromatic series）, 120g modified epoxy acrylates, 200g pentaerythrites three
Acrylate, 170g tetramethylol methane tetraacrylates, 40g 2- hydroxy-2-methyl -1- phenylacetones, 10g 2,4,6- trimethyls
Benzoyl-diphenyl phosphine oxide, 10g polydimethyl siloxane fluids, 20g modified polyorganosiloxanes, 15g aluminum stearates, 5g tung oil, 20g
2,6- toluene di-tert-butyl phenols, 18g talcum powder, 10g kaolin, 2g phthalocyanine blues（PB15）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By the urethane acrylate that load weighted 150g degrees of functionality are 4（Aliphatic）, 150g degrees of functionality be 4 it is poly-
Urethane acrylate（Aromatic series）, 120g modified epoxy acrylates pour into agitator, be subsequently poured into the white of 7 μm of 60g particle diameters
Corundum abrasive, stir, then pour into reactive diluent, light trigger, accelerator, surface property conditioning agent, filler, auxiliary
Agent, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 4：Manufacture and design a kind of rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll,
Process, rigid layer thickness 1.5mm are thrown for essence；The concretion abrasive polishes roller diameter 300mm, width 600mm, as shown in Figure 1.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）The CeO of 3.5 μm of 50g particle diameters is weighed respectively2Abrasive material, 100g degrees of functionality are 4 urethane acrylate（Fat
Race）, 100g degrees of functionality be 4 urethane acrylate（Aromatic series）, 220g modified epoxy acrylates, 200g dipentaerythritols
Six acrylate, 170g tetramethylol methane tetraacrylates, 60g 2- hydroxy-2-methyl -1- phenylacetones, 20g poly dimethyl silicon
Oil, 10g modified polyorganosiloxanes, 5g white carbons, 5g tung oil, 20g 2,6- toluene di-tert-butyl phenols, 28g talcum powder, 2g oxidations
Chrome green.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By the urethane acrylate that load weighted 100g degrees of functionality are 4（Aliphatic）, 100g degrees of functionality be 4 it is poly-
Urethane acrylate（Aromatic series）, 220g modified epoxy acrylates pour into agitator, be subsequently poured into 3.5 μm of 50g particle diameters
CeO2Abrasive material, stir, then pour into reactive diluent, light trigger, accelerator, surface property conditioning agent, filler, auxiliary
Agent, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 5：Manufacture and design a kind of rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll,
Process, rigid layer thickness 1.5mm are thrown for essence；The concretion abrasive polishes roller diameter 300mm, width 600mm, as shown in Figure 1.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）The silicon carbide abrasive of 0.5 μm of 40g particle diameters, polyester acrylate, the 200g that 240g degrees of functionality are 4 are weighed respectively
Modified epoxy acrylate, 200g dipentaerythritol acrylates, the contracting trimethylolpropane tetra-acrylates of 180g bis-, 60g
2- hydroxy-2-methyl -1- phenylacetones, 10g polydimethyl siloxane fluids, 20g modified polyorganosiloxanes, 5g aluminum stearates, 5g tung oil,
15g 2,6- toluene di-tert-butyl phenol, 15g talcum powder, 8g diatomite, 2g forever solid oranges G（PO13）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By load weighted 240g degrees of functionality be 4 polyester acrylate, 200g modified epoxy acrylates pour into stirring
In device, the silicon carbide abrasive of 0.5 μm of 40g particle diameters is subsequently poured into, is stirred, then pours into reactive diluent, light trigger, promotion
Agent, surface property conditioning agent, filler, adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 6：Manufacture and design a kind of rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll,
Process, rigid layer thickness 1.5mm are thrown for essence；The concretion abrasive polishes roller diameter 300mm, width 600mm, as shown in Figure 1.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）The diamond abrasive of 0.05 μm of 5g particle diameters, 410g modified epoxy acrylates, the seasons penta 4 of 210g bis- are weighed respectively
The acrylate of alcohol six, 200g Dipentaerythritol Pentaacrylates, 50g 2- hydroxy-2-methyl -1- phenylacetones, 20g 2,4,6-
Trimethylbenzoy-dipheny phosphine oxide, 20g polydimethyl siloxane fluids, 20g modified polyorganosiloxanes, 5g polypropylene waxes, 25g
2,6- toluene di-tert-butyl phenols, 15g talcum powder, 18g white carbons, 2g permanent violets RL（PV23）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）Load weighted 410g modified epoxies acrylate is poured into agitator, is subsequently poured into 0.05 μm of 5g particle diameters
Diamond abrasive, stir, then pour into reactive diluent, light trigger, accelerator, surface property conditioning agent, filler, auxiliary
Agent, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 7：Manufacture and design a kind of rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll,
For rough polishing process, rigid layer thickness 1.5mm；The concretion abrasive polishes roller diameter 300mm, width 600mm, as shown in Figure 1.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）White fused alumina abrasive material, the Ceria abrasive of 36 μm of 50g particle diameters of 36 μm of 50g particle diameters, 200g functions are weighed respectively
Spend the urethane acrylate for 6（Aliphatic）, 200g degrees of functionality be 6 urethane acrylate（Aromatic series）, 200g seasons penta
Tetrol triacrylate, the contracting trimethylolpropane tetra-acrylates of 150g bis-, 40g 2- hydroxy-2-methyl -1- phenylacetones,
20g modified polyorganosiloxanes, 15g aluminum stearates, 15g polypropylene waxes, 40g 2,6- toluene di-tert-butyl phenols, 8g white carbons, 10g
Diatomite, 2g iron oxide reds.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By urethane acrylate (aliphatic) that load weighted 200g degrees of functionality are 6,200g degrees of functionality be 6 it is poly-
Urethane acrylate (aromatic series) is poured into agitator, is subsequently poured into 36 μm of the white fused alumina abrasive material and 50g particle diameters of 36 μm of 50g particle diameters
Ceria abrasive, stir, then pour into reactive diluent, light trigger, accelerator, surface property conditioning agent, filler,
Adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 8：Manufacture and design a kind of rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll,
For rough polishing process, rigid layer thickness 1.5mm；The concretion abrasive polishes roller diameter 300mm, width 600mm, as shown in Figure 1.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）White fused alumina abrasive material, the silicon carbide abrasive of 14 μm of 35g particle diameters of 14 μm of 35g particle diameters, 420g degrees of functionality are weighed respectively
For 4 polyester acrylate, 200g pentaerythritol triacrylates, 160g Dipentaerythritol Pentaacrylates, 40g 2- hydroxyls-
2- methyl isophthalic acids-phenylacetone, 10g 2,4,6- trimethylbenzoy-dipheny phosphine oxides, 5g polydimethyl siloxane fluids, 20g change
Property polysiloxanes, 15g tung oil, 10g Tissuemat Es, 30g 2,6- toluene di-tert-butyl phenols, 10g white carbons, 8g kaolin, 2g
Pigment yellow（PY129）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By the urethane acrylate that load weighted 150g degrees of functionality are 4（Aliphatic）, 150g degrees of functionality be 4 it is poly-
Urethane acrylate（Aromatic series）, 120g degrees of functionality be 4 polyester acrylate pour into agitator, be subsequently poured into 35g particle diameters
14 μm of white fused alumina abrasive material, the silicon carbide abrasive of 14 μm of 35g particle diameters, stir, then pour into reactive diluent, light trigger,
Accelerator, surface property conditioning agent, filler, adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 9：Manufacture and design a kind of rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll,
For rough polishing process, rigid layer thickness 1.5mm；The concretion abrasive polishes roller diameter 300mm, width 600mm, as shown in Figure 1.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）White fused alumina abrasive material, the diamond abrasive of 7 μm of 10g particle diameters of 7 μm of 50g particle diameters are weighed respectively, and 150g degrees of functionality are
4 urethane acrylate（Aliphatic）, 150g degrees of functionality be 4 urethane acrylate（Aromatic series）, 120g modified epoxies
Acrylate, 200g pentaerythritol triacrylates, 170g Dipentaerythritol Pentaacrylates, 40g 2- hydroxy-2-methyls -1-
Phenylacetone, 10g 2,4,6- trimethylbenzoy-dipheny phosphine oxides, 10g polydimethyl siloxane fluids, 20g are modified poly- silica
Alkane, 15g polypropylene waxes, 5g tung oil, 20g 2,6- toluene di-tert-butyl phenols, 18g talcum powder, 10g kaolin, 2g phthalocyanine blues
（PB15）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By the urethane acrylate that load weighted 150g degrees of functionality are 4（Aliphatic）, 150g degrees of functionality be 4 it is poly-
Urethane acrylate（Aromatic series）, 120g modified epoxy acrylates pour into agitator, be subsequently poured into the white of 7 μm of 50g particle diameters
The diamond abrasive of corundum abrasive, 7 μm of 10g particle diameters, stirs, then pours into reactive diluent, light trigger, accelerator, table
Face properties modifier, filler, adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 10：Manufacture and design a kind of rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll
Layer, process, rigid layer thickness 1.5mm are thrown for essence；The concretion abrasive polishes roller diameter 300mm, width 600mm, such as Fig. 1 institutes
Show.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）Silicon carbide abrasive, the diamond abrasive of 3.5 μm of 10g particle diameters of 3.5 μm of 40g particle diameters are weighed respectively, and 420g is modified
Epoxy acrylate, the contracting trimethylolpropane tetra-acrylates of 200g bis-, 170g tetramethylol methane tetraacrylates, 60g 2- hydroxyls
Base -2- methyl isophthalic acids-phenylacetone, 20g polydimethyl siloxane fluids, 10g modified polyorganosiloxanes, 5g white carbons, 5g tung oil, 20g 2,
6- toluene di-tert-butyl phenols, 28g talcum powder, 2g chrome oxide greens.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）Load weighted 420g modified epoxies acrylate is poured into agitator, is subsequently poured into 3.5 μm of 40g particle diameters
The diamond abrasive of silicon carbide abrasive, 3.5 μm of 10g particle diameters, stirs, then pours into reactive diluent, light trigger, promotion
Agent, surface property conditioning agent, filler, adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 11：Manufacture and design a kind of rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll
Layer, process, rigid layer thickness 1.5mm are thrown for essence；The concretion abrasive polishes roller diameter 300mm, width 600mm, such as Fig. 1 institutes
Show.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）Ceria abrasive, the diamond abrasive of 0.5 μm of 10g particle diameters of 0.5 μm of 30g particle diameters, 440g official are weighed respectively
Energy degree be 4 urethane acrylate, 200g dipentaerythritol acrylates, 180g tetramethylol methane tetraacrylates, 60g
2- hydroxy-2-methyl -1- phenylacetones, 10g polydimethyl siloxane fluids, 20g modified polyorganosiloxanes, 5g Tissuemat Es, 5g polypropylene
Wax, 15g 2,6- toluene di-tert-butyl phenols, 15g talcum powder, 8g diatomite, 2g forever solid oranges G（PO13）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）The urethane acrylate that load weighted 440g degrees of functionality are 4 is poured into agitator, is subsequently poured into 30g grains
The Ceria abrasive that 0.5 μm of footpath, the diamond abrasive of 0.5 μm of 10g particle diameters, stir, then pour into reactive diluent, light draws
Agent, accelerator, surface property conditioning agent, filler, adjuvant, pigment are sent out, is thoroughly mixed uniformly, turns into the mixing containing abrasive particle
Thing；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 12：Manufacture and design a kind of rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll
Layer, for rough polishing process, rigid layer thickness 1.5mm；The concretion abrasive polishes roller diameter 300mm, width 600mm, such as Fig. 1 institutes
Show.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）Ceria abrasive, the silicon carbide abrasive of 14 μm of 35g particle diameters of 14 μm of 35g particle diameters, 420g functions are weighed respectively
Spend the polyester acrylate for 4,360g dipentaerythritol acrylates, 40g 2- hydroxy-2-methyl -1- phenylacetones,
10g 2,4,6- trimethylbenzoy-dipheny phosphine oxide, 5g polydimethyl siloxane fluids, 20g modified polyorganosiloxanes, 15g tung oil,
10g Tissuemat Es, 30g 2,6- toluene di-tert-butyl phenols, 10g white carbons, 8g kaolin, 2g pigment yellows（PY129）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By the urethane acrylate that load weighted 150g degrees of functionality are 4（Aliphatic）, 150g degrees of functionality be 4 it is poly-
Urethane acrylate（Aromatic series）, 120g degrees of functionality be 4 polyester acrylate pour into agitator, be subsequently poured into 35g particle diameters
14 μm of Ceria abrasive, the silicon carbide abrasive of 14 μm of 35g particle diameters, stir, then pour into reactive diluent, light-initiated
Agent, accelerator, surface property conditioning agent, filler, adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixing containing abrasive particle
Thing；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 13：Manufacture and design a kind of rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll
Layer, for rough polishing process, rigid layer thickness 1.5mm；The concretion abrasive polishes roller diameter 300mm, width 600mm, such as Fig. 1 institutes
Show.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）White fused alumina abrasive material, the diamond abrasive of 7 μm of 10g particle diameters of 7 μm of 50g particle diameters are weighed respectively, and 150g degrees of functionality are
4 urethane acrylate（Aliphatic）, 150g degrees of functionality be 4 urethane acrylate（Aromatic series）, 120g modified epoxies
Acrylate, 370g tetramethylol methane tetraacrylates, 40g 2- hydroxy-2-methyl -1- phenylacetones, 10g 2,4,6- trimethyls
Benzoyl-diphenyl phosphine oxide, 10g polydimethyl siloxane fluids, 20g modified polyorganosiloxanes, 15g polypropylene waxes, 5g tung oil, 20g
2,6- toluene di-tert-butyl phenols, 18g talcum powder, 10g kaolin, 2g phthalocyanine blues（PB15）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）By the urethane acrylate that load weighted 150g degrees of functionality are 4（Aliphatic）, 150g degrees of functionality be 4 it is poly-
Urethane acrylate（Aromatic series）, 120g modified epoxy acrylates pour into agitator, be subsequently poured into the white of 7 μm of 50g particle diameters
The diamond abrasive of corundum abrasive, 7 μm of 10g particle diameters, stirs, then pours into reactive diluent, light trigger, accelerator, table
Face properties modifier, filler, adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 14：Manufacture and design a kind of rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll
Layer, process, rigid layer thickness 1.5mm are thrown for essence；The concretion abrasive polishes roller diameter 300mm, width 600mm, such as Fig. 1 institutes
Show.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）Silicon carbide abrasive, the diamond abrasive of 3.5 μm of 10g particle diameters of 3.5 μm of 40g particle diameters are weighed respectively, and 420g is modified
Epoxy acrylate, the contracting trimethylolpropane tetra-acrylates of 370g bis-, 60g 2- hydroxy-2-methyl -1- phenylacetones, 20g
Polydimethyl siloxane fluid, 10g modified polyorganosiloxanes, 5g white carbons, 5g tung oil, 20g 2,6- toluene di-tert-butyl phenols, 28g are slided
Stone flour, 2g chrome oxide greens.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）Load weighted 420g modified epoxies acrylate is poured into agitator, is subsequently poured into 3.5 μm of 40g particle diameters
The diamond abrasive of silicon carbide abrasive, 3.5 μm of 10g particle diameters, stirs, then pours into reactive diluent, light trigger, promotion
Agent, surface property conditioning agent, filler, adjuvant, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
Example 15：Manufacture and design a kind of rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll
Layer, process, rigid layer thickness 1.5mm are thrown for essence；The concretion abrasive polishes roller diameter 300mm, width 600mm, such as Fig. 1 institutes
Show.
Intend preparing 1000g mixture：
（1）Prepare some glasswares and agitator,
（2）The diamond abrasive of 0.05 μm of 5g particle diameters, 410g modified epoxy acrylates, the seasons penta 4 of 410g bis- are weighed respectively
The acrylate of alcohol five, 70g 2,4,6- trimethylbenzoy-dipheny phosphine oxides, 20g polydimethyl siloxane fluids, 20g are modified poly-
Siloxanes, 5g polypropylene waxes, 25g 2,6- toluene di-tert-butyl phenols, 15g talcum powder, 18g white carbons, 2g permanent violets RL
（PV23）.
（3）By rigid layer photocuring mould（See Fig. 2）Installed in the good elastic layer of photocuring（3）Polishing roll on（See figure
1）；
（4）Adjust the cure parameter of photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould upper table
Identity distance light source 20mm, rotary table motor speed are 50r/min, timer is set 5 minutes；
（5）Load weighted 410g modified epoxies acrylate is poured into agitator, is subsequently poured into 0.05 μm of 5g particle diameters
Diamond abrasive, stir, then pour into reactive diluent, light trigger, accelerator, surface property conditioning agent, filler, auxiliary
Agent, pigment, it is thoroughly mixed uniformly, turns into the mixture containing abrasive particle；
（6）By step（5）Manufactured mixture pours into step（3）The mounted rigid layer photocuring mould of institute（See Fig. 2）
It is interior, and fully full of the space between mould inner surface and elastic layer；
（7）By step（6）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；
（8）Start carries out photocuring；
（9）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll rigid layer of photocuring, you can make
With；
After rigid layer photocuring is good, polishing roll is removed, unloads rigid layer photocuring mould（See Fig. 2）.Concretion abrasive is thrown
Smooth roll just manufactures.The concretion abrasive polishing roll manufactured is installed on Roll-to-Roll chemical-mechanical polishing mathings,
According to the burnishing parameters adjusted, it can start shooting and chemically-mechanicapolish polish.
It should be appreciated that for those of ordinary skills, can according to the above description be improved or converted,
And all these modifications and variations should all belong to the protection domain of appended claims of the present invention.
Claims (8)
- A kind of 1. rigid layer of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll, it is characterised in that：Its group Divide as follows with the ratio of percentage by weight：Abrasive material 0.5% ~ 10%,Light-cured resin 40%~45%,Reactive diluent 5%~41%,Light trigger 4%~7%,Accelerator 0.05%~5%,Surface property conditioning agent 0.05%~3%,Adjuvant 0.05% ~ 5%,Filler 1% ~ 4%,Pigment 0.02%；Described light-cured resin is in urethane acrylate of the degree of functionality more than 3, polyester acrylate of the degree of functionality more than 3 One or two kinds of mixtures；Described adjuvant is 2,6- toluene di-tert-butyl phenols；The preparation method of the polishing roll rigid layer, comprises the following steps：（1）Prepare some glasswares and agitator,（2）By certain mass ratio weighed selected abrasive particle, light-cured resin, reactive diluent, light trigger, accelerator, Surface property conditioning agent, filler, adjuvant, pigment, it is stand-by；（3）By rigid layer photocuring mould installion on the polishing roll of the good elastic layer of photocuring；（4）Load weighted light-cured resin is poured into agitator first, is subsequently poured into abrasive material, is stirred, then pours into activity Diluent, light trigger, accelerator, surface property conditioning agent, filler, adjuvant, pigment, it is thoroughly mixed uniformly, turns into Mixture containing abrasive particle；（5）By step（4）Manufactured mixture pours into step（3）In the mounted rigid layer photocuring mould of institute, and fully fill Full space between mould inner surface and elastic layer；（6）By step（5）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；（7）The cure parameter started shooting according to following photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould Have upper surface away from light source 20mm, rotary table motor speed be 50r/min, timer set 5 minutes, carry out photocuring；（8）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll of photocuring, you can use.
- A kind of 2. rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll according to claim 1 Layer, it is characterised in that：Described abrasive material is in white fused alumina micro mist, silicon carbide micro-powder, ceria micro mist or diadust A kind of or two kinds of mixtures, the particle diameter of these micro mists is 50nm ~ 56 μm.
- A kind of 3. rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll according to claim 1 Layer, it is characterised in that：Described reactive diluent is pentaerythritol triacrylate, tetramethylol methane tetraacrylate, two contractings three One or both of hydroxymethyl-propane tetraacrylate, Dipentaerythritol Pentaacrylate, dipentaerythritol acrylate Mixture.
- A kind of 4. rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll according to claim 1 Layer, it is characterised in that：Described light trigger be 2- hydroxy-2-methyl -1- phenylacetones, 2,4,6- trimethylbenzoyls - The mixture of one or both of diphenyl phosphine oxide.
- A kind of 5. rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll according to claim 1 Layer, it is characterised in that：Described accelerator is the mixture of one or both of polydimethyl siloxane fluid, modified polyorganosiloxane.
- A kind of 6. rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll according to claim 1 Layer, it is characterised in that：Described surface property conditioning agent be aluminum stearate, tung oil, Tissuemat E, one kind in polypropylene wax or Two kinds of mixture.
- A kind of 7. rigidity of Roll-to-Roll chemical-mechanical polishing mathings concretion abrasive polishing roll according to claim 1 Layer, it is characterised in that：Described filler is the mixture of one or both of white carbon, kaolin, talcum powder, diatomite.
- 8. the preparation method of polishing roll rigid layer according to claim 1, it is characterized in that it comprises the following steps：（1）Prepare some glasswares and agitator,（2）By certain mass ratio weighed selected abrasive particle, light-cured resin, reactive diluent, light trigger, accelerator, Surface property conditioning agent, filler, adjuvant, pigment, it is stand-by；（3）By rigid layer photocuring mould installion on the polishing roll of the good elastic layer of photocuring；（4）Load weighted light-cured resin is poured into agitator first, is subsequently poured into abrasive material, is stirred, then pours into activity Diluent, light trigger, accelerator, surface property conditioning agent, filler, adjuvant, pigment, it is thoroughly mixed uniformly, turns into Mixture containing abrasive particle；（5）By step（4）Manufactured mixture pours into step（3）In the mounted rigid layer photocuring mould of institute, and fully fill Full space between mould inner surface and elastic layer；（6）By step（5）Mould and polishing roll be co-mounted on concretion abrasive photo solidification machine；（7）The cure parameter started shooting according to following photo solidification machine：Adjustment polishing roll shaft motor rotating speed is 50r/min, mould Have upper surface away from light source 20mm, rotary table motor speed be 50r/min, timer set 5 minutes, carry out photocuring；（8）After photo solidification machine is out of service, wait 5 minutes, take out the good polishing roll of photocuring, you can use.
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| CN107932352A (en) * | 2017-12-13 | 2018-04-20 | 河北思瑞恩新材料科技有限公司 | A kind of soft coated substrate grinding tool and its formula and preparation method |
| CN112059931B (en) * | 2020-09-02 | 2021-10-26 | 东莞金太阳研磨股份有限公司 | Polishing grinding tool and preparation method thereof |
| CN112643559B (en) * | 2020-12-25 | 2022-02-08 | 郑州磨料磨具磨削研究所有限公司 | Composite resin binder superhard grinding wheel and preparation method thereof |
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| CN101096080A (en) * | 2007-06-29 | 2008-01-02 | 南京航空航天大学 | Solidified abrasive lapping polishing pad having self-modifying function and preparation method |
| CN101428404A (en) * | 2008-12-22 | 2009-05-13 | 南京航空航天大学 | Fixed abrasive grinding polishing pad and method of manufacturing the same |
| WO2011087737A2 (en) * | 2009-12-22 | 2011-07-21 | 3M Innovative Properties Company | Polishing pad and method of making the same |
| CN102977851A (en) * | 2012-12-21 | 2013-03-20 | 河南科技学院 | Grinding paste for 4H-SiC monocrystal wafer grinding process and preparation method thereof |
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| US20080014532A1 (en) * | 2006-07-14 | 2008-01-17 | 3M Innovative Properties Company | Laminate body, and method for manufacturing thin substrate using the laminate body |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101096080A (en) * | 2007-06-29 | 2008-01-02 | 南京航空航天大学 | Solidified abrasive lapping polishing pad having self-modifying function and preparation method |
| CN101428404A (en) * | 2008-12-22 | 2009-05-13 | 南京航空航天大学 | Fixed abrasive grinding polishing pad and method of manufacturing the same |
| WO2011087737A2 (en) * | 2009-12-22 | 2011-07-21 | 3M Innovative Properties Company | Polishing pad and method of making the same |
| CN102977851A (en) * | 2012-12-21 | 2013-03-20 | 河南科技学院 | Grinding paste for 4H-SiC monocrystal wafer grinding process and preparation method thereof |
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