CN105136675B - A kind of toxic and harmful gas concentration on-line testing method - Google Patents
A kind of toxic and harmful gas concentration on-line testing method Download PDFInfo
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Abstract
The invention discloses a kind of toxic and harmful gas concentration on-line testing method, specific testing procedure is as follows：1）Start wideband light source, broad band light beam is transmitted separately to measure gas chamber and reference gas chamber；2）The transmitted light intensity that reference gas chamber is detected by optical detector, divider is delivered to by signal；3）Broadband light is injected and measures gas chamber, light intensity is detected by optical detector, signal is delivered to divider after optical detector and digital lock-in amplifier；4）Using the frequency of sweep generator sweep oscillator, the frequency multiplication of modulating frequency is used as by frequency multiplier and refers to signal；5）The circuit of optical detector separates the AC and DC part in gas concentration electric signal, and AC portion is sent into lock-in amplifier；6）Model is resolved by gas concentration to be handled, and finally obtain the concentration value of under test gas, and gas concentration value is exported and shown.The present invention can effectively improve the measurement accuracy of toxic and harmful gas, and keep measurement more safe and reliable.
Description
Technical field
The present invention relates to a kind of gas detection method more particularly to a kind of toxic and harmful gas concentration on-line testing methods.
Background technology
It will produce more toxic and harmful gas in current industrial process, this kind of gas has seriously threatened lives and properties
Safety, needs strictly to inflammable and explosive in recovery process, toxic and harmful gas is detected and forecasts.Currently, common gas
Body detecting method mostly uses electrochemical principle, gas semiconductivity test philosophy, metal-oxide-semiconductor field effect transistor principle, heat-conduction principle, catalysis
The methods of the theory of combustion, infrared test principle, technology comparative maturity.But electrochemical principle is by characteristic electron
When carrying out work, the possibility for generating electric spark and causing explosion is had in use, this is the deadly defect of electro-chemical test,
And this kind of test method is easy because of dielectric consumption and service life reduction, often there is the shortcomings that being easy aging and being poisoned.Half
Conductor type sensor stability is poor, protected from environmental larger, and especially the selectivity of each sensor is all unique, defeated
Go out parameter to be not easy to apply the place more demanding in accurate measurement.MOS field-effects are selectively fabulous, but are only used for oxygen inspection
It surveys, there is apparent limitation.The shortcomings that thermal conductivity sensor is that applicable range is relatively narrow, and limiting factor is more.Catalysis burning
Formula principle, to gas without specific selectivity, belongs to dying fire work, there is the danger for explosion of igniting within the scope of imflammable gas
Danger, and most of organic steam has intoxication to sensor.Infrared ray test philosophy can effectively differentiate gaseous species, but
It is susceptible to the influence infrared signature absorption peak position of steam in gas, dust impurity component, measurement accuracy is not high.
Invention content
For deficiencies of the prior art, it is an object of the invention to how solve toxic and harmful gas measure it is tired
Difficulty, safety is poor, the low problem of measurement accuracy, provides a kind of toxic and harmful gas concentration on-line testing method, can effectively carry
The measurement accuracy of high toxic and harmful gas, and keep measurement more safe and reliable.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is such：A kind of toxic and harmful gas is dense
Spend on-line testing method, it is characterised in that：Including toxic harmful gas concentration test device, the toxic and harmful gas concentration is surveyed
Trial assembly sets including wideband light source, fiber coupler, measures gas chamber, reference gas chamber, optical detector, optical detector, oscillator, frequency multiplication
Device, digital lock-in amplifier, high-pass filter, divider and A/D converter and computer processing unit；Specific test step
It is rapid as follows：
1) it gives wideband light source to power by constant-current supply, starts wideband light source, and by fiber coupler by wideband light source
The light beam sent out is transmitted separately to measure gas chamber and reference gas chamber, wherein measures to be full of in gas chamber and contains the toxic of under test gas
Harmful exhaust, the interior canonical reference gas for being full of 100% concentration of reference gas chamber, ingredient and the canonical reference gas of the under test gas
Ingredient it is consistent；
2) the indoor optical fiber of reference gas and piezoelectric dielectric PZT bondings are arranged, piezoelectric dielectric PZT is supplied by oscillator
Electricity, the transmitted light intensity of reference gas chamber is detected by optical detector, and signal is delivered to division by optical detector after high-pass filter
Device；
3) broadband light is injected after laser beam emitting head and measures gas chamber, and along setting by the optical fiber being connected with measurement gas chamber
The laser pick-off end for measuring gas chamber is reached behind path, the light intensity at laser pick-off end is detected by optical detector, optical detection
Signal is delivered to divider by device after optical detector and digital lock-in amplifier；
4) oscillator makes PZT stretching vibrations in 2), when optical fiber being driven to generate grating, relies on frequency at this time by high frequency modulated
The concrete signal of rate reuses the frequency of sweep generator sweep oscillator, is then used as the frequency multiplication of modulating frequency by frequency multiplier
Reference signal；
5) when measurement gas chamber gas concentration is related to gas chamber gas concentration optical signal is measured, the signal of optical detector output
It will change；The AC and DC part in gas concentration signal is separated by optical detector, and AC portion is sent into locking phase
Amplifier；
6) direct current for the d. c. voltage signal and high-pass filter output for being exported digital lock-in amplifier by divider
Voltage signal is directly divided by, then after being converted by A/D converter, and digital signal is delivered to computer processing unit, passes through gas
Bulk concentration resolves model and is handled, and finally obtains the concentration value of under test gas, and gas concentration value is exported and shown.
Further, the gas concentration resolving model is：
A, according to Beer-Lamber law formula, output intensity I (λ)=I0(λ)exp[-α(λ)LC]；
In formula：α (λ) is the medium absorption coefficient under corresponding wavelength λ；L is the length that gas absorbs path；C is that gas is dense
Degree；I (λ) is output intensity；I0(λ) is input light intensity；
B, alternating voltage is applied to PZT, drives grating periodic flexible, optical wavelength λB=λ0+bcosωt；
In formula：λ0Centered on wavelength, corresponding is the absorption peak of reference gas, and ω is PZT modulating frequencies；B is modulated amplitude
Degree, since the reflected light by fiber grating is in centre wavelength attachment Gaussian distributed, the incidence after optical grating reflection
It is reduced to the spectral concentration P (λ) for measuring gas chamber：
C, total coefficient of coup is set as η, then output intensity model is：
In formula：I (λ) is output intensity, λaTo λbFor effective wavelength range, P0For incident light spectrum density；
The transmitted light intensity in reference gas chamber detection fiber grating can be obtained from step b,
Wherein, I0For incident intensity, P0For incident intensity density, r is grating parameter；
The absorption spectra line style of gas molecule is described with Lorentz curves, then for：
r1For the rate of decay of the electric dipole elements with damping, λgFor corresponding absorption peak；
D, due to a (λ) LC ＜ ＜ 1, e-a(λ)LC≈ 1-a (λ) LC, obtains：
E, alternating voltage is applied to piezoelectric ceramics PZT, screen periods will be driven to stretch, raster center wavelength is made to be inhaled with gas
Receive peak alignment, λ0=λg, Bragg wavelength is λ at this timea=λ0+bcosωt-1.5λ,λb=λ0+ bcos ω t+1.5 λ, then step c
Formula become：
In formula：Δ λ is that Bragg reflects half value overall with FWHM, γ1For the rate of decay of the electric dipole elements with damping；λ0For
Centre wavelength, λgFor the absorption peak wavelength of under test gas；ω is PZT modulating frequencies；B is modulation amplitude；
F, to the formula of step e carry out Fourier transformation, by the fundametal compoment that the frequency for being included is ω be zero, f (λ,
φ) even function for being φ, f (λ, φ) sin φ are the odd function of φ, therefore have：
φ=ω the t, the second harmonic component amplitude of final output signal is enabled to be：
Wherein,
The second harmonic component is and gas concentration C direct ratios at this time；
G, with second harmonic component I(2ω)With IRIt is divided by, obtains following concentration and resolve model：
Wherein k is the constant unrelated with luminous intensity,
At this point, the concentration of under test gas
Further, the reference gas chamber and measurement gas chamber all have air inlet and gas outlet, pass through and replace reference gas chamber
Interior gas can measure the gas concentration of heterogeneity.
Further, during replacement reference gas indoor gas, first the indoor gas of reference gas is emptied, then
With pure N2After flushing, it is re-filled with the gas of other ingredients.
Compared with prior art, the invention has the advantages that：
1, the detecting system has stronger resistivity for interference gas, though the absorption band of interference gas be detected
Gas overlaps, but as long as there is no prodigious correlation in their absorption line structure, output signal there will not be compared with
Big variation can reach more satisfactory sensitivity to the ingredient of under test gas.
2, optical fiber is bonded on piezoelectric ceramics PZT, can makes piezoelectric ceramics by applying voltage adjusting to piezoelectric ceramics
PZT, which is generated, to be stretched, and is made the refractive index of Transmission Fibers change to form grating, is modulated, obtains to LED wideband light source incidence waves
Narrowband emergent light is obtained, it is very easy.
3, the second harmonic of the output signal of detector is directly proportional to gas concentration in the invention, secondary humorous by detecting
Wave, you can realize the detection of gas concentration immediately；Using measuring gas chamber detector output signal and fiber grating in the present invention
Transmitted light intensity is divided by, and can eliminate the influence that the factors such as light source ages or optical power fluctuation are brought, detection sensitivity can be improved.
4, the present invention can test the gas of heterogeneity, and a set of detecting system is enabled to be suitable for different test environments,
After the indoor gas of reference gas is rinsed with N2, the gas for being filled with other ingredients is replaced, you can measure and contain this gas componant
Concentration value.
5, the present invention is transmitted using optical fiber, since the Frequency Power Loss window wavelength of silicon optical fiber covers 0.8um-1.7um's
Range, luminescent device and receiving device are all more satisfactory in this wavelength band, and it is harmful industrially to common are poison
Gas has absorption peak within the scope of this, can be detected.And output power loss is small, and anti-electromagnetic interference capability is strong, energy
The interference of light path is eliminated, and system noise and various interference can be effectively eliminated by harmonic detecting, can be applied to faint
The detection work of signal, measurement accuracy are higher.
Description of the drawings
Fig. 1 is the functional block diagram of toxic and harmful gas concentration determination device.
Fig. 2 is the fundamental diagram for measuring gas chamber.
Fig. 3 is the operation principle block diagram of reference gas chamber.
In figure：1-measures gas chamber, 21-optical fiber accommodating cavities, 22-air cavitys, 3-piezoelectric dielectric PZT.
Specific implementation mode
Present invention will be further explained below with reference to the attached drawings and examples.
Embodiment：Referring to Fig. 1, Fig. 2 and Fig. 3, a kind of toxic and harmful gas concentration on-line testing method, feature exists
In：Including toxic harmful gas concentration test device, the toxic and harmful gas concentration determination device includes wideband light source, optical fiber
Coupler measures gas chamber, reference gas chamber, optical detector, optical detector, oscillator, frequency multiplier, digital lock-in amplifier, high pass
Filter, divider and A/D converter and computer processing unit；Specific testing procedure is as follows：
1) it gives wideband light source to power by constant-current supply, starts wideband light source, and by fiber coupler by wideband light source
The light beam (broad band light beam) sent out is transmitted separately to measure gas chamber and reference gas chamber, wherein measures in gas chamber full of containing to be measured
The toxic harmful exhaust gas of gas, the interior canonical reference gas for being full of 100% concentration of reference gas chamber, the ingredient and mark of the under test gas
The ingredient of quasi- reference gas is consistent.The reference gas chamber and measurement gas chamber all have air inlet and gas outlet, pass through and replace reference
The indoor gas of gas can measure the gas concentration of heterogeneity；To be carried out to the toxic and harmful gas of heterogeneity
It measures.
2) the indoor optical fiber of reference gas and piezoelectric dielectric PZT bonding are arranged, the reference gas chamber is divided into front and back two sections, preceding
Section is optical fiber accommodating cavity, and back segment is air cavity, leads to calibrating gas in air cavity；After wide band optical transmission to reference gas chamber, pass through oscillator
It powers to piezoelectric dielectric PZT；Then air cavity is injected by laser beam emitting head, and is reached behind the path of setting and measures swashing for gas chamber
Optical receiving end.Piezoelectric dielectric PZT is generated under the action of electric field to be stretched, and the refractive index of Transmission Fibers is made to change to form light
Grid are modulated reflection to incidence wave and filter, obtain narrowband (outgoing) light being adapted with absorption line；Optical detector and laser
Receiving terminal is connected, and the transmitted light intensity of reference gas chamber fiber grating is detected by optical detector, optical detector is after high-pass filter
Signal is delivered to divider；Due to the light not being adapted with the absorption line of reference gas in transmitted light at this time, because
This not will produce absorption, and light intensity will not decay.
3) broadband light is injected after laser beam emitting head and measures gas chamber, and along setting by the optical fiber being connected with measurement gas chamber
The laser pick-off end for measuring gas chamber is reached behind path, wherein the light path for measuring gas chamber is identical as the indoor light path of reference gas.
Using absorption peak of the gas in optical fiber transmission window, measurement absorbs the light intensity attenuation generated due under test gas, wherein transmission
Window refers to just range of the optical fiber in low-loss propagation, such as：The Frequency Power Loss window wavelength of optical fiber covers 0.8um-
The range of 1.7um, and the absorption peak of toxic and harmful gas to be measured is also within the scope of this substantially.By optical detector to swashing
The light intensity of optical receiving end is detected, and obtained under test gas concentration optical signal, optical detector is through optical detector and digital servo-control
Signal is delivered to divider after amplifier；L is light-path diameter, and overall length is to pre-set, i.e., L length is known.
4) oscillator makes PZT stretching vibrations in 2), when optical fiber being driven to generate grating, relies on frequency at this time by high frequency modulated
The concrete signal of rate reuses the frequency of sweep generator sweep oscillator, is then used as the frequency multiplication of modulating frequency by frequency multiplier
Reference signal.
5) when measurement gas chamber gas concentration is related to gas chamber gas concentration optical signal is measured, (electricity) of optical detector output
Signal will change.By optical detector by the friendship in gas concentration (electricity) signal, direct current component is separated, and by AC portion
It is sent into lock-in amplifier.
6) direct current for the d. c. voltage signal and high-pass filter output for being exported digital lock-in amplifier by divider
Voltage signal is directly divided by, then after being converted by A/D converter, and digital signal is delivered to computer processing unit, passes through gas
Bulk concentration resolves model and is handled, and finally obtains the concentration value of under test gas, and gas concentration value is exported and shown.
The gas concentration resolves model：
A, according to Beer-Lamber law formula, output intensity I (λ)=I0(λ)exp[-α(λ)LC]；
In formula：α (λ) is the medium absorption coefficient under corresponding wavelength λ；L is the length that gas absorbs path；C is that gas is dense
Degree；I (λ) is output intensity；I0(λ) is input light intensity；
B, alternating voltage is applied to PZT, drives grating periodic flexible, optical wavelength λB=λ0+bcosωt；
In formula：λ0Centered on wavelength, corresponding is the absorption peak of reference gas, and ω is PZT modulating frequencies；B is modulated amplitude
Degree；Since the reflected light by fiber grating is in centre wavelength attachment Gaussian distributed, the incidence after optical grating reflection
It is reduced to the spectral concentration P (λ) for measuring gas chamber：
C, in view of the spectrum analysis of incident light and the interference for absorbing linear and entire light path of gas molecule and shakiness
Determine factor, if total coefficient of coup is η, then output intensity model is：
In formula：I (λ) is output intensity, λaTo λbFor effective wavelength range, P0For incident light spectrum density；
The transmitted light intensity in reference gas chamber detection fiber grating can be obtained from step b,
Wherein, I0For incident intensity, P0For incident intensity density, r is grating parameter；
Practical to measure, the working environment of system is near the mark atmospheric pressure, and infrared spectrum is widened by Doppler to be influenced not
Greatly, collision broadening plays a major role.Therefore the absorption spectra line style of gas molecule can be described with Lorentz curves, then for：
r1For the rate of decay of the electric dipole elements with damping, λgFor corresponding absorption peak；
D, due to a (λ) LC ＜ ＜ 1, e-a(λ)LC≈ 1-a (λ) LC, obtains：
E, alternating voltage is applied to piezoelectric ceramics PZT, will drives screen periods are flexible to form Bragg grating, makes in grating
Cardiac wave length is aligned with gas absorption peak, i.e. λ0=λg；The absorption peak lower limit bandwidth of Bragg wavelength is λa, absorption peak upper limit line bandwidth
For λb, work as λ0=λgWhen, λa=λ0+bcosωt-1.5λ,λb=λ0+bcosωt+1.5λ；Then the formula of step c becomes：
In formula：Δ λ is that Bragg reflects half value overall with FWHM, γ1For the rate of decay of the electric dipole elements with damping；λ0For
Centre wavelength, λgFor the absorption peak wavelength of under test gas；ω is PZT modulating frequencies；B is modulation amplitude；
F, Fourier transformation is carried out to the formula of step e, integral term includes each harmonic component that fundamental frequency is ω.Due to
Including frequency be ω fundametal compoment be zero, f (λ, φ) be φ even function, f (λ, φ) sin φ be φ odd function,
Therefore have：
φ=ω the t, the second harmonic component amplitude of final output signal is enabled to be：
Wherein,
The second harmonic component is and gas concentration C direct ratios at this time；
G, with second harmonic component I(2ω)With IRIt is divided by, obtains following concentration and resolve model：
Wherein k is the constant unrelated with luminous intensity,
At this point, the concentration of under test gas
Influence that the factors such as light source ages or optical power fluctuation are brought can be eliminated according to the formula and improves detection sensitivity.
At this point, by testing the transmitted light intensity of second harmonic component and fiber grating to get to the concentration of under test gas.
When needing to test other toxic and harmful gas, the indoor gas of reference gas is only needed to change, more
During changing the indoor gas of reference gas, first the indoor gas of reference gas is emptied, then with pure N2After flushing, it is re-filled with it
The gas of its ingredient, such as H2S、CO2、CH4、NO2、CO、C2H2、H2S、NH3, HCL etc.；Wherein, the absorption peak of part reference gas
It is shown in Table 1：
| Gaseous species | Gas absorption peak wavelength (near infrared band) |
| Carbon dioxide CO2 | 1.573um、1.538um |
| Methane CH4 | 1.65um |
| Nitrogen dioxide NO2 | 0.75um、450um |
| Carbon monoxide CO | 1.567um |
| Acetylene C2H2 | 1.53um |
| Hydrogen sulfide H2S | 1.578um |
| Ammonia NH3 | 1.515um、1.544um |
| Hydrochloric acid HCL | 1.76um |
Table 1
Finally, it should be noted that technical side the above examples are only used to illustrate the technical scheme of the present invention and are not limiting
Case, it will be understood by those of ordinary skill in the art that, those are modified or replaced equivalently technical scheme of the present invention, and
The objective and range for not departing from the technical program, are intended to be within the scope of the claims of the invention.
Claims (1)
1. a kind of toxic and harmful gas concentration on-line testing method, it is characterised in that：It tests and fills including toxic harmful gas concentration
It sets, the toxic and harmful gas concentration determination device includes wideband light source, fiber coupler, measurement gas chamber, reference gas chamber, light spy
Survey device, optical detector, oscillator, frequency multiplier, digital lock-in amplifier, high-pass filter, divider and A/D converter and
Computer processing unit；The reference gas chamber and measurement gas chamber all have air inlet and gas outlet, by replacing in reference gas chamber
Gas, the gas concentration of heterogeneity can be measured；
Specific testing procedure is as follows：
1) it is powered to wideband light source by constant-current supply, starts wideband light source, and send out wideband light source by fiber coupler
Light beam be transmitted separately to measure gas chamber and reference gas chamber, wherein measure in gas chamber full of containing the poisonous and harmful of under test gas
Exhaust gas, is full of the canonical reference gas of 100% concentration in reference gas chamber, the ingredient of the under test gas and canonical reference gas at
Divide consistent；
2) the indoor optical fiber of reference gas and piezoelectric dielectric PZT bondings are arranged, the reference gas chamber is divided into front and back two sections, and leading portion is
Optical fiber accommodating cavity, back segment are air cavity, lead to calibrating gas in air cavity；It is powered to piezoelectric dielectric PZT by oscillator, passes through optical detection
Device detects the transmitted light intensity of reference gas chamber, and signal is delivered to divider by optical detector after high-pass filter；
3) broadband light is injected after laser beam emitting head and measures gas chamber, and along the path of setting by the optical fiber being connected with measurement gas chamber
The laser pick-off end for measuring gas chamber is reached afterwards, and the light intensity at laser pick-off end is detected by optical detector, optical detector warp
Signal is delivered to divider after optical detector and digital lock-in amplifier；
4) oscillator makes PZT stretching vibrations in 2), when optical fiber being driven to generate grating, passes through high frequency modulated dependent Frequency at this time
Concrete signal reuses the frequency of sweep generator sweep oscillator, then by frequency multiplier by the frequency multiplication of modulating frequency as reference
Signal；
5) when measurement gas chamber gas concentration is related to gas chamber gas concentration optical signal is measured, the signal of optical detector output will be sent out
Changing；The AC and DC part in gas concentration signal is separated by optical detector, and AC portion is sent into locking phase amplification
Device；
6) DC voltage for the d. c. voltage signal and high-pass filter output for being exported digital lock-in amplifier by divider
Signal is directly divided by, then after being converted by A/D converter, and digital signal is delivered to computer processing unit, dense by gas
Degree resolves model and is handled, and finally obtains the concentration value of under test gas, and gas concentration value is exported and shown；
The gas concentration resolves model：
A, according to Beer-Lamber law formula, output intensity I (λ)=I0(λ)exp[-α(λ)LC]；
In formula：α (λ) is the medium absorption coefficient under corresponding wavelength λ；L is the length that gas absorbs path；C is gas concentration；I
(λ) is output intensity；I0(λ) is input light intensity；
B, alternating voltage is applied to PZT, drives grating periodic flexible, optical wavelength λB=λ0+b cosωt；
In formula：λ0Centered on wavelength, corresponding is the absorption peak of reference gas, and ω is PZT modulating frequencies；B is modulation amplitude, by
In the reflected light by fiber grating in centre wavelength attachment Gaussian distributed, therefore measurement is incident on after optical grating reflection
The spectral concentration P (λ) of gas chamber is reduced to：
C, total coefficient of coup is set as η, then output intensity model is：
In formula：I (λ) is output intensity, λaTo λbFor effective wavelength range, P0For incident light spectrum density；
The transmitted light intensity in reference gas chamber detection fiber grating can be obtained from step b,
Wherein, I0For incident intensity, P0For incident intensity density, r is grating parameter；
The absorption spectra line style of gas molecule is described with Lorentz curves, then for：
r1For the rate of decay of the electric dipole elements with damping, λgFor corresponding absorption peak；
D, due to a (λ) LC ＜ ＜ 1, e-a(λ)LC≈ 1-a (λ) LC, obtains：
E, alternating voltage is applied to piezoelectric ceramics PZT, screen periods will be driven to stretch, make raster center wavelength and gas absorption peak
Alignment, λ0=λg, Bragg wavelength is λ at this timea=λ0+b cosωt-1.5λ,λb=λ0+ b cos ω t+1.5 λ, then step c
Formula becomes：
In formula：Δ λ is that Bragg reflects half value overall with FWHM, γ1For the rate of decay of the electric dipole elements with damping；λ0Centered on
Wavelength, λgFor the absorption peak wavelength of under test gas；ω is PZT modulating frequencies；B is modulation amplitude；
F, Fourier transformation is carried out to the formula of step e, since the fundametal compoment that the frequency for being included is ω is zero, f (λ, φ)
For the even function of φ, f (λ, φ) sin φ are the odd function of φ, therefore have：
φ=ω the t, the second harmonic component amplitude of final output signal is enabled to be：
Wherein,
The second harmonic component is and gas concentration C direct ratios at this time；
G, with second harmonic component I(2ω)With IRIt is divided by, obtains following concentration and resolve model：
Wherein k is the constant unrelated with luminous intensity,
At this point, the concentration of under test gas
Finally, during replacement reference gas indoor gas, first the indoor gas of reference gas is emptied, then with pure N2Punching
After washing, it is re-filled with the gas of other ingredients.
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| CN106855506A (en) * | 2017-01-25 | 2017-06-16 | 青岛大学附属医院 | A kind of condition discriminating apparatus of medical gas and discriminating conduct |
| CN107490560A (en) * | 2017-04-19 | 2017-12-19 | 安徽华脉科技发展有限公司 | A kind of Near-infrared Spectral Absorption formula gas detecting system |
| CN109900648A (en) * | 2019-03-20 | 2019-06-18 | 重庆梅安森科技股份有限公司 | Distributed optical fiber sensor applied to underground pipe gallery |
| CN110031155B (en) * | 2019-04-01 | 2020-12-22 | 浙江工商大学 | Laboratory gas leakage detection device and method |
| CN110320178B (en) * | 2019-07-17 | 2021-12-10 | 电子科技大学 | Gas detection system based on wavelength modulation spectrum technology and detection method thereof |
| CN114018853B (en) * | 2021-11-24 | 2024-03-26 | 青岛崂应海纳光电环保集团有限公司 | Photometer air chamber and gas analysis module |
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