CN104508469A

CN104508469A - Defect classification device, defect classification method, control program, and recording medium

Info

Publication number: CN104508469A
Application number: CN201380039119.3A
Authority: CN
Inventors: 山田荣二
Original assignee: Sharp Corp
Current assignee: Sharp Corp
Priority date: 2012-08-31
Filing date: 2013-07-30
Publication date: 2015-04-08
Also published as: JP2014048206A; WO2014034349A1

Abstract

A defect classification device (1) is provided with: a classification index calculation unit (14) for calculating a feature amount indicative of the difference between the color of pixels included in an outer peripheral region, which is a part of the defect region, and the color of pixels in a neighboring region, which is a region outside the defect region and is adjacent to the outer peripheral region; and a defect classification unit (15) for classifying, on the basis of the calculated feature amount, a defect in the defect region as being either in-film foreign matter or on-film foreign matter.

Description

Device for classifying defects, defect classification method, control program and recording medium

Technical field

The present invention relates to the defects detection of this check object thing that the image by obtaining shooting check object thing is resolved, being specifically related to the classification of the defect detected.

Background technology

In the manufacturing process of industrial products, the inspection carrying out defect, for guaranteeing that the quality of product is very important, generally all will be carried out.In addition, the self-verifying of testing fixture is used also to become practical.

Such as, following patent documentation 1 describes following technology, is used as the input picture of the image of the flat-panel monitor of check object thing to detect the defect produced in this flat-panel monitor, in addition by the defect that detects by each classification of type.

prior art document

patent documentation

Patent documentation 1: Japanese Unexamined Patent Publication " JP 2012-32369 publication (on February 16th, 2012 is open) "

Summary of the invention

the problem that invention will solve

At this, be knownly formed on surface in the product of film as the substrate being formed with distribution, defect (hereinafter referred to as foreign matter in film) can be being produced because foreign matter enters in film.In addition, as the defect similar in appearance with foreign matter in film, also notify and produced defect (hereinafter referred to as foreign matter on film) owing to being attached with foreign matter on film.This defect especially easily occurs in the product using CVD (Chemical Vapor Deposition: chemical vapor deposition) device manufacture.

In film, foreign matter is the underproof reason of product, therefore needs to utilize prosthetic device to remove.On the other hand, on film, foreign matter is by cleaning removing, therefore can not become underproof reason.Like this, in film, foreign matter is different with the disposal route needed for foreign matter on film, therefore wishes to identify these defects.

But, in prior art as above, have and to be difficult to identify in film similar in appearance foreign matter on foreign matter and film or the low problem of accuracy of identification.

The present invention completes in view of the above problems, its object is to provide to carry out the device for classifying defects etc. of discriminator to foreign matter on foreign matter in film and film.

for the scheme of dealing with problems

In order to solve the problem, the defect analysis device of an embodiment of the invention to be formed with the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that, possess: characteristic quantity calculated unit, it calculates the characteristic quantity of the size of the difference represented between the color as the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and the color as the pixel in the adjacent non-defective region of the region outside above-mentioned defect area and above-mentioned outer region, and classification of defects unit, its above-mentioned characteristic quantity calculated based on above-mentioned characteristic quantity calculated unit, be relative to above-mentioned film foreign matter defect in the film that the private side of above-mentioned check object thing exists foreign matter by the classification of defects of above-mentioned defect area, or be categorized as to there is foreign matter at the outer side of above-mentioned check object thing relative to above-mentioned film film on foreign matter defect.

In addition, the defect analysis method of an embodiment of the invention to be formed with defect analysis method involved by the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that, possess: characteristic quantity calculates step, calculate the characteristic quantity of the size of the difference represented between the color as the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and the color as the pixel in the adjacent non-defective region of the region outside above-mentioned defect area and above-mentioned outer region, and classification of defects step, based on calculating the above-mentioned characteristic quantity calculated in step at above-mentioned characteristic quantity, be relative to above-mentioned film foreign matter defect in the film that the private side of above-mentioned check object thing exists foreign matter by the classification of defects of above-mentioned defect area, or be categorized as to there is foreign matter at the outer side of above-mentioned check object thing relative to above-mentioned film film on foreign matter defect.

And, the defect analysis device of other embodiment of the present invention to be formed with the check object thing of film and defect analysis device that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that, possess: characteristic quantity calculated unit, it calculates the characteristic quantity of the difference between the color of the pixel representing region beyond as the above-mentioned outer region in the color of the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and above-mentioned defect area and interior zone, and classification of defects unit, its above-mentioned characteristic quantity calculated based on above-mentioned characteristic quantity calculated unit, be relative to above-mentioned film foreign matter defect in the film that the private side of above-mentioned check object thing exists foreign matter by the classification of defects of above-mentioned defect area, or be categorized as to there is foreign matter at the outer side of above-mentioned check object thing relative to above-mentioned film film on foreign matter defect.

In addition, the defect analysis method of other embodiment of the present invention to be formed with defect analysis method involved by the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that, possess: characteristic quantity calculates step, the characteristic quantity of the difference between the color calculating the pixel representing region beyond as the above-mentioned outer region in the color of the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and above-mentioned defect area and interior zone, and classification of defects step, based on calculating the above-mentioned characteristic quantity calculated in step at above-mentioned characteristic quantity, be relative to above-mentioned film foreign matter defect in the film that the private side of above-mentioned check object thing exists foreign matter by the classification of defects of above-mentioned defect area, or be categorized as to there is foreign matter at the outer side of above-mentioned check object thing relative to above-mentioned film film on foreign matter defect.

invention effect

According to the respective embodiments described above of the present invention, achieve and to identify in film foreign matter defect in foreign matter defect and film and the effect of classifying accurately.

Accompanying drawing explanation

Fig. 1 is the block diagram of the formation of the major part of the device for classifying defects that an embodiment of the invention are shown.

Fig. 2 is that the upside of the different figure that foreign matter on foreign matter and film in film is described, this figure represents that shooting has an example of the check image of foreign matter on foreign matter in film or film, and the downside of this figure schematically shows the cross section at the position being attached with foreign matter.

Fig. 3 illustrates defect area to be divided into outer region and interior zone, is set with the figure of an example of the state of near zone in the outside of outer region.

Fig. 4 be illustrate that the quantity of foreign matter in genuine film and above-mentioned device for classifying defects detect film in the figure of mutual relationship of quantity of foreign matter.

Fig. 5 illustrates that the process flow diagram of an example of process is extracted/classified to the defect performed by above-mentioned device for classifying defects.

Fig. 6 is the process flow diagram of the example that the classification of defects process carried out in the S6 of Fig. 5 is shown.

Fig. 7 illustrates to adopt other classification characteristic quantity to carry out the additional process flow diagram judging an example of process of classification of defects simultaneously.

Embodiment

Below, embodiments of the present invention are described in detail.

(formation of device for classifying defects)

First, the formation of the device for classifying defects of present embodiment is described based on Fig. 1.Fig. 1 is the block diagram of an example of the formation of the major part that device for classifying defects 1 is shown.

Device for classifying defects 1 resolves to the shooting image that obtains of this product and check image the defect and the device of classifying to the defect detected that detect and produce on the surface of check object thing.The principal character of device for classifying defects 1 is, can be categorized as to be formed with foreign matter in the check object thing of film on surface and to enter in film and cause foreign matter in the film of defect and on film, be attached with foreign matter and foreign matter on the film causing defect.

As shown in the figure, device for classifying defects 1 possesses control part 10, storage part 20 and check image input part 30.In addition, though this figure is not shown, device for classifying defects 1 also can possess input part, the output testing result of defect, the efferent etc. of classification results of the input operation receiving user.

Control part 10 is unified controls device for classifying defects 1, possesses aligned portions 11, defect extraction unit 12, region setting part (region setup unit) 13, classification indicators calculating section (characteristic quantity calculated unit, peak width calculated unit, the 1st difference calculated unit, the 2nd difference calculated unit) 14 and classification of defects portion (classification of defects unit) 15.

Storage part 20 is the memory storages preserving the various data that device for classifying defects 1 uses, and in the example in the figures, preserves certified products image 21, defect dipoles information 22 and classification of defects information 23.

Check image input part 30 is the interfaces of the input checking image.When the size of check object thing is large, in order to ensure the resolution needed for defects detection, by repeatedly taking the entirety covering 1 check object thing.That is, in this case, the multiple check image obtained by using the different position of shooting check object thing respectively check the entirety of check object thing.Below, the different position receiving and take 1 check object thing is respectively described and the example of the input of multiple check image that obtains.Check image also can be such as the check image of taking check object thing with digital camera etc. and obtaining.

Aligned portions 11 carries out aiming at (contraposition) of check image and certified products image 21.As described above, certified products image 21 covers check object thing in a big way compared with check image, if therefore do not carry out aligning just cannot compare certified products image 21 and check image.

Therefore, aligned portions 11, by certified products image 21 and check image contraposition, prunes certified products image 21 in the region after contraposition, the certified products image 21 that synthetic image size is equal with check image and corresponding with the identical position of check object thing.

In more detail, in the aiming at of check image and certified products image 21, aligned portions 11 known Laplce's optical filter etc. extracts edge from certified products image 21, generates borderline pass image.In addition, inspection edge image is generated similarly to check image.Next, with above-mentioned borderline pass image and above-mentioned inspection edge image, borderline pass image scans by two dimension, calculates correlation successively by each position.Such as can utilize known template matching method herein.Further, position the highest for correlation is determined as best para postion.In addition, take in check image with certified products image 21 multiplying power different, check image is amplified, reduces and scan thus try to achieve the best multiplying power, by the best multiplying power to image to check image implement adjustment size image procossing.In addition, when can find out the difference of rotational deformation in check image and certified products image 21, change the anglec of rotation and carry out scanning thus obtaining best angle, the image procossing carrying out image rotation by optimal rotation angle is implemented to check image.

Check image after aligning and the certified products image 21 after aiming at are compared the defect area extracted in check image by defect extraction unit 12.Specifically, the absolute value of the difference of the pixel value of the check image pixel corresponding with the certified products image 21 that aligned portions 11 has been pruned (pixel corresponding with the same area of check object thing) is calculated respectively.Further, the threshold value comprised in each value calculated and defect dipoles information 22 is compared, the pixel being more than or equal to threshold value is judged as the defect pixel corresponding with rejected region.Then the extracted region concentrated by defect pixel in check image is defect area.

The defect area extracted is divided into interior zone and outer region by region setting part 13, and at the outside of defect area setting near zone.In addition, the establishing method in these regions is described after in detail.

Classification indicators calculating section 14 calculates the classification characteristic quantity of the classification for defect for set each region (interior zone, outer region, near zone).Describe this classification characteristic quantity below in detail.

The classification of defects portion 15 classification characteristic quantity calculated is classified to defect.Specifically, the threshold value comprised in above-mentioned classification characteristic quantity and classification of defects information 23 compares by classification of defects portion 15, being foreign matter in film by the classification of defects being more than or equal to the defect area of threshold value, is foreign matter on film by the classification of defects being less than the defect area of threshold value.

Certified products image 21 is the images representing flawless check object thing, for the comparing of check image.Certified products image 21 such as also can generate confirming the defective multiple check image laminating of not tool.Or also can be the image of CAD (Computer Aided Design: the computer-aided design (CAD)) data creating according to the design information as product.

Defect dipoles information 22 is the information for judging the rejected region in check image, comprises the threshold value whether pixel for judging check image is defect pixel.

Classification of defects information 23 is the information of the classification for the defect detected, comprising the threshold value for defect area being divided into interior zone and outer region, using the information of which kind of characteristic quantity when representing classification of defects and for by the threshold value of classification of defects for foreign matter on foreign matter in film and film.

(in film on foreign matter and film foreign matter)

At this, to describe in film foreign matter on foreign matter and film in detail based on Fig. 2.Fig. 2 is the figure of the difference that foreign matter on foreign matter and film in film is described, the upside of this figure represents an example of the check image that have taken foreign matter on foreign matter in film or film, and the downside of this figure schematically shows the cross section at the position accompanying by foreign matter.In addition, at this, illustrate that check object thing is formed with distribution on the transparent substrate, be coated with the example of the display pannel of the liquid crystal indicator of the film of uniform thickness.

As shown in the figure, create in the check image of the display pannel of foreign matter in film in shooting, create the position of foreign matter in film light tight, therefore seem black.In addition, the color of the film in film around foreign matter there occurs change.

In more detail, in film, there is no foreign matter around foreign matter, can printing opacity, therefore paler colour compared with the position having foreign matter.But, this color is the color different from the normal portions of its more lateral.Therefore, the surrounding of foreign matter in film is also judged as defect area.In addition, as shown in the downside of this figure, infer that the change of this color is owing to there being foreign matter to cause the thickness around foreign matter to change, thus film interference there occurs change.

This display pannel creating foreign matter in film needs the prosthetic device be transplanted on except foreign matter in striping to repair.That is, in film, foreign matter can be described as the critical defect needing to repair.

On the other hand, create in the check image of the display pannel of foreign matter on film in shooting, thus the position on film accompanying by foreign matter is also light tight seems black.But different from the situation of foreign matter in film, on film, the color of the film of the surrounding of foreign matter does not change.As shown in the downside of this figure, this be due to foreign matter around thickness do not change.

On film, foreign matter is by cleaning removing, and the display pannel therefore detecting foreign matter on membrane does not need to be transplanted on prosthetic device.That is, on film, foreign matter can be described as the non-lethal defect not needing to repair.

(detailed description of defect classification method)

As described above, when creating foreign matter in film, the region along the periphery of the defect area detected is called the color different from the non-defective region adjacent to this region.Therefore, if the color of the outer region of the defect area detected is different from the color in the non-defective region adjacent to this region, just can say that this defect area is that the possibility that causes due to foreign matter in film is large.

Therefore, defect area is divided into outer region and interior zone by the region setting part 13 of device for classifying defects 1.In addition, region setting part 13 setting near zone around outer region.The setting in these regions such as shown in Figure 3.Fig. 3 illustrates defect area to be divided into outer region and interior zone, is set with the figure of an example of the state of near zone in the outside of outer region.In addition, in the figure, near zone is set to by from the region within defect area distance d.

As method defect area being divided into outer region and interior zone, can adopt and calculate characteristic quantity (for area judging) by each pixel of defect area, use the discriminatory analysis of 2 grade of 1 characteristic quantity (2 grades is interior zone and outer region) of the characteristic quantity calculated.

At this, as illustrated based on Fig. 2, the outer region produced due to foreign matter in film is different from interior zone color, and brightness is also different.Therefore, above-mentioned characteristic quantity can utilize brightness value, hue value.In the present embodiment, the example of application brightness value.

When brightness value is used as area judging characteristic quantity, for each pixel of defect area, differentiate whether this area judging characteristic quantity is more than or equal to threshold value, thus defect area is divided into 2 regions (be more than or equal to the region of threshold value and be less than the region of threshold value).Further, the region being in private side in 2 regions is set to interior zone, the region being in outside is set to outer region.

In addition, the differentiation in private side and outside can be carried out according to the size of moment.That is, first obtain the center of gravity of defect area, the moment around the center of gravity then calculating 2 regions, is set to interior zone by region less for moment, larger region is set to outer region.In addition, when brightness value higher than the pixel of outer region of the brightness value of known check object thing pixel of interior zone as the situation of transparency carrier in advance, the region decision that also brightness value can be less than threshold value is interior zone.

By this process, when creating defect in film, the outer region that defect area can be divided into the region of the ring-type along its periphery and the interior zone surrounded by outer region.

And the region (region that the pixel being less than or equal to d by the distance from outer region is formed) in the non-defective region adjacent with the outside of the outer region determined with one fixed width d determines as near zone by region setting part 13.

Next, for the region determined as described above, classification indicators calculating section 14 calculates the classification characteristic quantity as the index for classification of defects.More particularly, classification indicators calculating section 14 calculates the typical value r of the chroma of the pixel comprised in the differential seat angle θ of the typical value of the hue value of the pixel comprised in the typical value of the hue value of the pixel comprised in outer region and near zone and outer region, calculates their the classification characteristic quantity of product r × θ as defect.In addition, form and aspect are that (b, a), chroma is the chroma sqrt (a*a+b*b) of the Lab color space for the form and aspect atan2 of the Lab color space.

Then, the threshold value comprised in the classification characteristic quantity calculated and classification of defects information 23 compares by classification of defects portion 15, if classification characteristic quantity is more than or equal to threshold value, is judged as foreign matter in film, if be less than threshold value, is judged as foreign matter on film.According to the result of the experiment that present inventor carries out, the value confirming the difference degree of the color of near zone and the color of outer region and above-mentioned θ is larger, is that in film, the possibility of foreign matter is higher.

In addition, as long as the value that the aberration of classification characteristic quantity and outer region and near zone is corresponding, above-mentioned example is not limited to.Such as, also above-mentioned θ can be set to classification characteristic quantity.But, carry out the result of testing according to present inventor, the chroma of outer region is lower, is that the probability of foreign matter in film is higher by the defect erroneous judgement of foreign matter in non-film, therefore with θ separately as compared with classification characteristic quantity, preferably r × θ is set to classification characteristic quantity.The chroma of outer region is lower, and r × θ is less for classification characteristic quantity, is correctly judged as that on film, the probability of foreign matter is high.In addition, this is presumably because that chroma is lower, small colour-difference more can cause the value of θ that larger variation occurs.

In addition, also consider the luminance difference of outer region and near zone to be set to classification characteristic quantity.But, carry out the result of testing according to present inventor, carry out judging to carry out more accurate classification according to aberration as above, therefore wish to use the classification characteristic quantity proportional with aberration.

(effect of classification)

At this, carry out the effect of the classification of foreign matter on foreign matter and film in film based on Fig. 4 description defect sorter 1.Fig. 4 is the figure of the mutual relationship of the quantity representing foreign matter in the quantity of foreign matter in genuine film and film detected by device for classifying defects 1.

In addition, in the figure, if the quantity quantity of the input picture of foreign matter (in the actual photographed to film) of (a+b+c+d) opening foreign matter in the genuine film in input picture is (a+b), if the quantity (device for classifying defects 1 detects the quantity of the input picture of foreign matter in membrane) of foreign matter is (b+c) in the film that detects of device for classifying defects 1.In addition, if the quantity of foreign matter is b in the genuine film in the film that detects of device for classifying defects 1 in foreign matter, in non-film, the quantity of foreign matter is c.And, if there is not foreign matter in film and the quantity that device for classifying defects 1 does not detect the input picture of foreign matter in membrane is d.

First, carry out the effect of foreign matter classification on foreign matter and film in film as device for classifying defects 1, enumerate the aspect of the classification performance that can obtain.So-called good classification performance refers to non-verification and measurement ratio and crosses verification and measurement ratio low.Such as, in film, the non-verification and measurement ratio of foreign matter can represent with the quantity of foreign matter " fail in (namely ignoring) film of the detecting "/quantity of foreign matter " in the genuine film "=a/ (a+b).

In addition, the crossing verification and measurement ratio and can represent with the quantity of foreign matter " in (i.e. in the film of the really foreign matter) film that error-detecting the goes out "/quantity of the input picture of foreign matter " in the film of non-real "=c/ (c+d) of foreign matter in film.

According to device for classifying defects 1, with the classification characteristic quantity of the difference between the color representing the pixel comprised in the color of the pixel comprised in outer region and near zone, foreign matter on foreign matter in film and film is classified, therefore the quantity b of foreign matter in the genuine film that detects can be made to increase, and in the film that error-detecting is gone out, the quantity c of foreign matter reduces.

Therefore, non-verification and measurement ratio can be reduced: a/ (a+b) and excessively verification and measurement ratio: c/ (c+d).

And, also can improve nicety of grading.In film, the nicety of grading of foreign matter such as can represent with " in the genuine film detected the foreign matter "/quantity of foreign matter " in the film detected "=b/ (b+c).As described above, according to device for classifying defects 1, b can be made to increase, c is reduced, therefore can improve nicety of grading: b/ (b+c).In addition, improve the nicety of grading of foreign matter in film, also improve the classification performance of foreign matter on film thus.

(utilization of classification results)

The classification results of device for classifying defects 1 can carry out various applying flexibly in the manufacturing process of product.Such as can be applied to FDC (Fault Detection and Classification: fault detect and classification).That is, utilize device for classifying defects 1 to detect and monitor the quantity of foreign matter in the film that the various manufacturing installations of product produce, can the exception of early detection manufacturing installation.

And cannot accurately foreign matter on foreign matter in film and film be classified, therefore there is the problem finding that the precision of exception of manufacturing installation is low or find evening (being difficult to early detection). in the past

In addition, according to device for classifying defects 1, can improve the prosthetic device that should be transplanted on except foreign matter in striping product (or parts, assembling in half product) in the ratio with the product of foreign matter in genuine film.Therefore, the running efficiency of prosthetic device can be improved.In addition, prosthetic device can be made to remove foreign matter in whole films (yield rate raising).

And cannot foreign matter on foreign matter in film and film be classified (or nicety of grading is low), the product with foreign matter in genuine film that should repair therefore be transplanted in the substrate of prosthetic device is few. in the pastTherefore, the running efficiency step-down of prosthetic device, efficiently cannot use prosthetic device.In addition, there is the problem (yield rate reduction) that prosthetic device cannot remove foreign matter in whole film.

In addition, also by utilizing the classification results of device for classifying defects 1 to determine the position easily producing foreign matter in film, the manufacturing condition easily producing foreign matter in film.Further, the improvement of manufacturing installation, the change of manufacturing condition can also be carried out to suppress the multiple of foreign matter in film.

And cannot foreign matter on foreign matter in film and film be classified (or nicety of grading is low), be therefore difficult to be undertaken thisly determining by resolving. in the past

And, also easily produce the defective locations of foreign matter, the size of defect in film by utilizing the classification results of device for classifying defects 1 to gather.Further, create foreign matter in film also can not become the design of substandard products even if also can change to.

And cannot foreign matter on foreign matter in film and film be classified (or nicety of grading is low), be therefore difficult to carry out this parsing. in the past

(flow process of process)

Then, extract/classify the flow process of process based on the defect performed by Fig. 5 description defect sorter 1.Fig. 5 illustrates that the process flow diagram of an example of process is extracted/classified to defect.

First, in device for classifying defects 1, carry out initialization (S1).Thus, certified products image 21, defect dipoles information 22 and classification of defects information 23 is read in from storage part 20 to control part 10.Further, the circulation (L1) carrying out the extraction of defect and the process of classification for each check image is started.

In the circulation of check image, aligned portions 11 reads in one of multiple images of input checking image input unit 30 (S2).Then, for the check image of reading in, carry out and the aiming at (S3) of the certified products image 21 read in S1, certified products image 21 is carried out pruning (S4) at aligned position.The certified products image 21 pruned with together with a check image of aiming at object, be sent to defect extraction unit 12.

The absolute value of the pixel value that the defect extraction unit 12 receiving certified products the image 21 and check image of having pruned calculates each pixel of check image respectively and the difference of the pixel value of the pixel of correspondence position in the certified products image 21 pruned.In addition, the threshold value comprised in the absolute value of the difference calculated and the defect dipoles information 22 of reading in S1 is compared, the pixel that the absolute value of difference is more than or equal to threshold value is defined as defect pixel.Further, in check image, the extracted region concentrated by the defect pixel determined is defect area (S5).In addition, also multiple defect area can be extracted from 1 check image.

In addition, defect extraction unit 12, by representing that the information of defect area extracted is sent to region setting part 13 together with check image, carries out classification of defects process thus, and the defect area extracted to be classified as in film foreign matter (S6) on foreign matter or film.

On the other hand, the aligned portions 11 of aiming in S3 judges whether to finish the aligning (S7) to the whole check image being input to check image input part 30.At this, when being judged as there is the unclosed check image of aligning (S7 is no), returning S2, reading in and aim at unclosed check image, carry out the process of S3 to S6 for this check image.On the other hand, when being judged as the aligning finishing whole check image (being yes in S7), the circulation of check image terminates, and defect is extracted/classified process and also terminates.

(classification of defects process)

Next, the classification of defects process (defect classification method) carried out in the S6 of Fig. 5 is described in detail in based on Fig. 6.Fig. 6 is the process flow diagram of the example representing classification of defects process.

First, region setting part 13 calculates the area judging characteristic quantity (S10) for differentiating outer region in defect area and interior zone.Specifically, region setting part 13 calculates the brightness value of each pixel comprised the defect area notified from defect extraction unit 12 as area judging characteristic quantity.

Then, region setting part 13 uses the area judging characteristic quantity calculated to decide interior zone and outer region (S11).Specifically, for each pixel of defect area, region setting part 13 differentiates whether its area judging characteristic quantity is more than or equal to threshold value, thus defect area is divided into 2 regions (be more than or equal to the region of threshold value and be less than the region of threshold value).Further, the region being in private side in 2 regions is set to interior zone, the region being in outside is set to outer region.

Next, region setting part 13 determines near zone (S12).Specifically, and the region (region that the pixel that by distance from outer region be less than or equal to certain value formed) with one fixed width adjacent with the outside of the outer region determined in S11 determines as near zone by region setting part 13.

Then, these regions are informed to classification indicators calculating section 14 by the region setting part 13 determining interior zone, outer region and near zone as described above.

Receive the classification indicators calculating section 14 of this notice with reference to classification of defects information 23, use r × θ (r: the chroma of outer region, θ: the difference of the hue value of outer region and near zone) to determine classification characteristic quantity as classification characteristic quantity.

Then, calculate the hue value of outer region and the hue value of near zone, calculate the differential seat angle θ (S13) of these hue value.In addition, as long as the hue value of outer region represents which kind of color is outer region be, can be such as the arithmetic mean of the hue value of each pixel comprised in outer region, also can be intermediate value etc.The hue value of near zone too.

In addition, classification indicators calculating section 14 calculates the chroma r (S14) of outer region, calculates and it is multiplied by r × θ that the θ that calculates in S13 obtains as the classification characteristic quantity (S15) of defect, notify to classification of defects portion 15.In addition, the chroma r of outer region is also same with hue value, as long as which kind of chroma is expression outer region be, such as, can be the arithmetic mean of the chroma of each pixel comprised in outer region, also can be intermediate value etc.

The threshold value of the classification of defects comprised in this classification characteristic quantity and classification of defects information 23 compares by the classification of defects portion 15 receiving classification characteristic quantity, judges whether to be more than or equal to threshold value (S16).

At this, when being judged as being more than or equal to threshold value (being yes in S16), classification of defects portion 15 is judged as that the defect produced in this defect area is caused (S17) by foreign matter in film, terminates classification of defects process.

On the other hand, when being judged as being less than threshold value (being no in S16), classification of defects portion 15 is judged as that the defect produced in this defect area is caused (S18) by foreign matter on film, terminates classification of defects process.In addition, although do not illustrate in the example in the figures, judged result is stored in storage part 20 accordingly with this defect area.In addition, the judged result of storage also can export and be shown in the display device forming with device for classifying defects 1 one or be connected with device for classifying defects 1.

(add and judge process)

In the example of fig. 6, only use 1 classification characteristic quantity (r × θ) coming to carry out the classification of defect, but other classification characteristic quantity also can be adopted simultaneously to improve the nicety of grading of defect.

Based on Fig. 7, this point is described.Fig. 7 illustrates to adopt other classification characteristic quantity to carry out the additional process flow diagram judging an example of process of the classification of defect simultaneously.In addition, add judgement process and be and be judged as YES in the S16 of Fig. 6 that carries out.

Classification of defects portion 15 is (being yes in the S16 of Fig. 6) when being judged as that classification characteristic quantity (r × θ) is more than or equal to threshold value, calculates next characteristic quantity to classification indicators calculating section 14 instruction.Then, the classification indicators calculating section 14 receiving this instruction calculates the width (S20) of outer region, and the width calculated is informed to classification of defects portion 15.

In addition, the width of outer region is the numerical value of the thickness of the ring of the outer region representing ring-type, such as, also can calculate to play the width of the distance till the pixel of the position connected with near zone as outer region from the pixel of the position connected with interior zone in the pixel of outer region.In addition, also calculate the width of multiple location with can containing the complete cycle of outer region, using the typical value (arithmetic mean, intermediate value) of width that the calculates width as outer region, the width that also a position for outer region can be calculated is directly as the width of outer region.

Threshold value corresponding to the width of notified width and outer region compares by the classification of defects portion 15 receiving the notice of the width of outer region, judges whether width is more than or equal to threshold value (S21).

In addition, this judgement be in order to prevent when the width of outer region little to can not think the degree of foreign matter in film be foreign matter in film by its erroneous judgement.Therefore, above-mentioned threshold value is set to the value that can judge whether to define the outer region that foreign matter in film causes.As long as the mode that this threshold value can refer to classification of defects portion 15 is preserved, such as, also can be contained in classification of defects information 23.

At this, when being judged as that width is less than threshold value (being no in S21), this defect dipoles is foreign matter (S27) on film by classification of defects portion 15, terminates to add to judge process.On the other hand, when being judged as that width is more than or equal to threshold value (being yes in S21), classification indicators calculating section 14 instruction of 15 pairs, classification of defects portion calculates next characteristic quantity.

The classification indicators calculating section 14 receiving this instruction calculates the luminance difference (S22) of outer region and interior zone, and the value calculated is informed to classification of defects portion 15.Such as, arithmetic mean, the intermediate value of brightness value can be calculated for each pixel comprised in outer region, calculate and the arithmetic mean of brightness value of each pixel comprised in the same interior zone calculated, the absolute value of the difference of intermediate value, this value is set to above-mentioned luminance difference.

Threshold value corresponding to the luminance difference of notified luminance difference and outer region and interior zone compares by the classification of defects portion 15 receiving the notice of the luminance difference of outer region and interior zone, judges whether luminance difference is more than or equal to threshold value (S23).

In addition, this judgement for prevent when the difference of the brightness value of interior zone and outer region little and not talkative be caused forming outer region by foreign matter in film, be foreign matter in film by its erroneous judgement.Therefore, above-mentioned threshold value is the value that can judge whether to define the outer region caused by foreign matter in film.As long as the mode that this threshold value can refer to classification of defects portion 15 is preserved, such as, also can be contained in classification of defects information 23.

At this, when being judged as that luminance difference is less than threshold value (being no in S23), this defect dipoles is foreign matter (S27) on film by classification of defects portion 15, terminates to add to judge process.On the other hand, when being judged as that luminance difference is more than or equal to threshold value (being yes in S23), classification indicators calculating section 14 instruction of 15 pairs, classification of defects portion calculates next characteristic quantity.

The classification indicators calculating section 14 receiving this instruction calculates the luminance difference (S24) of outer region and near zone, and the value calculated is informed to classification of defects portion 15.Such as, arithmetic mean, the intermediate value of brightness value can be calculated for each pixel comprised in outer region, calculate and the arithmetic mean of brightness value of each pixel comprised in the same near zone calculated, the absolute value of the difference of intermediate value, this value is set to above-mentioned luminance difference.

Threshold value corresponding to the luminance difference of notified luminance difference and outer region and near zone compares by the classification of defects portion 15 receiving the notice of the luminance difference of outer region and near zone, judges whether luminance difference is less than threshold value (S25).

In addition, this judgement for prevent in the luminance difference of outer region and near zone talkative greatly and be not caused forming outer region by foreign matter in film, be foreign matter in film by its erroneous judgement.Therefore, above-mentioned threshold value is the value that can judge whether to define the outer region caused by foreign matter in film.In addition, as illustrated based on Fig. 2, when creating foreign matter in film, though outer region and near zone have luminance difference, luminance difference large like that between interior zone and near zone can not be become.As long as the mode that this threshold value can refer to classification of defects portion 15 is preserved, such as, can be contained in classification of defects information 23.

At this, when being judged as that luminance difference is less than threshold value (being yes in S25), this defect dipoles is foreign matter (S26) in film by classification of defects portion 15, terminates to add to judge process.On the other hand, when being judged as that luminance difference is more than or equal to threshold value (being no in S25), classification of defects portion 15 is judged as foreign matter on film (S27), terminates to add to judge process.

In addition, in the S11 of Fig. 6, independently set interior zone and outer region without exception with the kind of defect, therefore in the kind of defect is the situation of foreign matter on film etc., also can suppose that outer region is not ring-type.In this case, can detect the position that cannot calculate width in S20, the meaning that therefore classification indicators calculating section 14 cannot calculate width informs classification of defects portion 15.In this case, classification of defects portion 15 is judged as foreign matter on film, ends process.

In addition, in the above example, show the example that other classification characteristic quantity is also all calculated by classification indicators calculating section 14, but also can calculate different characteristic quantities by different processing modules.That is, also classification indicators calculating section 14 can be made only to calculate r × θ, and the luminance difference of the luminance difference of the width of outer region, outer region and interior zone and outer region and near zone is calculated by other processing module (Fig. 1 is not shown).Such as, the module that also can add peak width calculated unit calculates peak width to make this module, the module adding the 1st difference calculated unit makes this module calculate the luminance difference of outer region and interior zone, and the module adding the 2nd difference calculated unit makes this module calculate the luminance difference of outer region and near zone.

In addition, in the above example, employ the luminance difference of the width of outer region, outer region and interior zone and the whole of the luminance difference of outer region and near zone judge, but also can be configured to only use the part in them.

The process flow diagram of Fig. 6 and Fig. 7 separately judges that multiple classification characteristic quantity is to carry out the classification of defects process of the classification of defect successively.But classification of defects process is not limited thereto.Also can use multiple classification characteristic quantity, use support vector machine (Support VectorMachine), neural network, Bayes's classification etc. are carried out the process of foreign matter classification on foreign matter in film and film.

(variation)

Above-mentioned device for classifying defects 1 uses the classification characteristic quantity of the colour-difference representing outer region and near zone to classify, but the classification characteristic quantity of the colour-difference representing interior zone and outer region also can be used to classify.This is due to as illustrated by based on Fig. 2, in film when foreign matter, different with interior zone place color in the outer region of defect area.

In this case, as long as region setting part 13 sets outer region and interior zone, do not need to set near zone.Then, classification indicators calculating section 14 calculates the typical value of the typical value of the form and aspect of outer region and the form and aspect of interior zone, if the absolute value of their difference is classification characteristic quantity.This defect dipoles, when the colour-difference of outer region and interior zone is large, specifically when above-mentioned classification characteristic quantity is more than or equal to the threshold value of regulation, is foreign matter in film by classification of defects portion 15.

In addition, above-mentioned device for classifying defects 1 carry out defect detection and classification both, but also can carry out detection and the classification of defect with different devices.That is, device for classifying defects 1 also can not possess aligned portions 11 and defect extraction unit 12.In this case, receive the testing result of defect from the defect detecting device of the detection carrying out defect, carry out the classification of defect by this testing result.In addition, as long as the detection method of defect can determine the defect area in check image, above-mentioned example is not limited to.

And defect area is divided into interior zone and outer region by above-mentioned device for classifying defects 1, but also can change the threshold value of defect extraction, only interior zone is extracted as defect area thus.In this case, outer region and near zone is set in the non-defective region around defect area.Such as, the distance from defect area also can be set to be less than or equal to the pixel of D as near zone, and in this near zone, the discriminatory analysis carried out based on brightness value sets outer region.

In addition, as long as long as check object thing to produce in film foreign matter on foreign matter and film be namely formed with film on surface, be not particularly limited.Such as, also can be the display part of display pannel, semiconductor wafer or thin film solar cell substrate.

(summary)

The defect analysis device (1) of an embodiment of the invention to be formed with the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that, possess: characteristic quantity calculated unit (classification indicators calculating section 14), it calculates the characteristic quantity of the size of the difference represented between the color as the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and the color as the pixel in the adjacent non-defective region (near zone) of the region outside above-mentioned defect area and above-mentioned outer region, and classification of defects unit (classification of defects portion 15), its above-mentioned characteristic quantity calculated based on above-mentioned characteristic quantity calculated unit, be relative to above-mentioned film foreign matter defect in the film that the private side of above-mentioned check object thing exists foreign matter by the classification of defects of above-mentioned defect area, or be categorized as to there is foreign matter at the outer side of above-mentioned check object thing relative to above-mentioned film film on foreign matter defect.

According to above-mentioned formation, calculate the characteristic quantity of the difference between the color of pixel and the color of the pixel in the non-defective region adjacent with outer region representing and comprise in the region and outer region of the ring-type of the periphery of defect area.Then, be foreign matter defect on foreign matter defect or film in film by the classification of defects of defect area based on the characteristic quantity calculated.

Illustrated by based on Fig. 2, in film when foreign matter defect, it is poor that the color in outer region and the non-defective region (near zone) adjacent with outer region produces, therefore by using above-mentioned characteristic quantity to identify in film foreign matter defect in foreign matter defect and film, can classify accurately.

In addition, preferably in the defect analysis device of an embodiment of the invention, possess region setup unit (region setting part 13), this region setup unit (region setting part 13) sets above-mentioned outer region based on the brightness value of each pixel comprised in above-mentioned defect area.

As illustrated based on Fig. 2, in film when foreign matter defect, in the outer region and interior zone of defect area, produce luminance difference, therefore according to above-mentioned formation, suitably can set the outer region that will compare the object of color distortion with non-defective region (near zone).

In addition, preferably in the defect analysis device of an embodiment of the invention, above-mentioned characteristic quantity calculated unit calculates the value that the typical value that the difference of the typical value of the form and aspect of the pixel comprised in the typical value of the form and aspect of the pixel comprised in above-mentioned outer region and above-mentioned non-defective region is multiplied by the chroma of the pixel comprised in above-mentioned outer region obtained as above-mentioned characteristic quantity.

According to above-mentioned formation, calculate the value that the typical value that the difference of the typical value of form and aspect is multiplied by chroma obtained as characteristic quantity.The difference of the typical value of form and aspect is the difference representing color with numerical value, and the characteristic quantity therefore containing it just reflects the size of the difference of the color in outer region and non-defective region.In addition, typical value is the value representing this region, is to represent that this region is the value of which kind of form and aspect or chroma.If enumerate object lesson, the arithmetic mean, intermediate value etc. of the form and aspect (or chroma) of each pixel comprised in this region can be set to typical value.

In addition, as described above, the chroma of known outer region is lower, is that the probability of foreign matter defect in film is higher by the defect dipoles of foreign matter in non-film.Therefore, by setting the value that the difference that the chroma of outer region is multiplied by the typical value of form and aspect obtained as characteristic quantity, in fact can reduce the defect erroneous judgement of foreign matter defect in non-film is the probability of foreign matter defect in film.

In addition, the defect analysis device of preferred an embodiment of the invention possesses the peak width calculated unit (classification indicators calculating section 14) of the width of the ring calculating above-mentioned outer region, above-mentioned classification of defects unit is more than or equal to the threshold value predetermined of the classification of defects based on color at the above-mentioned characteristic quantity that above-mentioned characteristic quantity calculated unit calculates, and when the width that above-mentioned zone width calculated unit calculates is more than or equal to the threshold value predetermined based on the classification of defects of peak width, it is foreign matter defect in film by the classification of defects of above-mentioned defect area.

According to above-mentioned formation, when the characteristic quantity that characteristic quantity calculated unit calculates is more than or equal to threshold value and the width of the ring of outer region is more than or equal to threshold value, be foreign matter defect in film by the classification of defects of this defect area.

Thus, can prevent at the width of outer region little of being foreign matter defect in film by its erroneous judgement when can not think the degree of foreign matter defect in film.

In addition, the defect analysis device of preferred an embodiment of the invention possesses the 1st difference calculated unit (classification indicators calculating section 14), above-mentioned 1st difference calculated unit (classification indicators calculating section 14) calculates the difference of the typical value of the brightness value of the pixel comprised in region beyond the above-mentioned outer region in the typical value of the brightness value of the pixel comprised in above-mentioned outer region and above-mentioned defect area and interior zone, above-mentioned classification of defects unit is more than or equal to the threshold value predetermined of the classification of defects based on color at the above-mentioned characteristic quantity that above-mentioned characteristic quantity calculated unit calculates, and when the difference of brightness value that above-mentioned 1st difference calculated unit calculates is more than or equal to the threshold value predetermined of the classification of defects of the luminance difference based on above-mentioned outer region and interior zone, it is foreign matter defect in film by the classification of defects of above-mentioned defect area.

According to above-mentioned formation, the characteristic quantity calculated in characteristic quantity calculated unit is more than or equal to threshold value, and when the difference of the typical value of the brightness value of the pixel comprised in the typical value of the brightness value of the pixel comprised in outer region and interior zone is more than or equal to threshold value, be foreign matter defect in film by the classification of defects of this defect area.

Thus, can prevent when the difference of the brightness value of interior zone and outer region little and not talkative be by film, foreign matter defect causes forming outer region, be foreign matter defect in film by its erroneous judgement.

In addition, the defect analysis device of preferred an embodiment of the invention possesses the 2nd difference calculated unit (classification indicators calculating section 14), above-mentioned 2nd difference calculated unit (classification indicators calculating section 14) calculates the difference of the typical value of the brightness value of the pixel comprised in the typical value of the brightness value of the pixel comprised in above-mentioned outer region and above-mentioned non-defective region, above-mentioned classification of defects unit is more than or equal to the threshold value predetermined of the classification of defects based on color at the above-mentioned characteristic quantity that above-mentioned characteristic quantity calculated unit calculates, and when the difference of brightness value that above-mentioned 2nd difference calculated unit calculates is less than the threshold value predetermined of the classification of defects of the luminance difference based on above-mentioned outer region and non-defective region, it is foreign matter defect in film by the classification of defects of above-mentioned defect area.

According to above-mentioned formation, the characteristic quantity calculated in characteristic quantity calculated unit is more than or equal to threshold value, and when the difference of the typical value of the brightness value of the pixel comprised in the typical value of the brightness value of the pixel comprised in outer region and non-defective region is less than threshold value, be foreign matter defect in film by the classification of defects of this defect area.

Thus, can prevent talkative greatly and not in the luminance difference in outer region and non-defective region is by film, foreign matter defect causes forming outer region, is foreign matter defect in film by its erroneous judgement.

In addition, the defect analysis device of other embodiment of the present invention to be formed with the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that, possess: characteristic quantity calculated unit, it calculates the characteristic quantity of the difference between the color of the pixel representing region beyond as the above-mentioned outer region in the color of the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and above-mentioned defect area and interior zone, and classification of defects unit, its above-mentioned characteristic quantity calculated based on above-mentioned characteristic quantity calculated unit, be relative to above-mentioned film foreign matter defect in the film that the private side of above-mentioned check object thing exists foreign matter by the classification of defects of above-mentioned defect area, or be categorized as to there is foreign matter at the outer side of above-mentioned check object thing relative to above-mentioned film film on foreign matter defect.

And, the defect analysis method of other embodiment of the present invention to be formed with defect analysis method involved by the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that, possess: characteristic quantity calculates step, the characteristic quantity of the difference between the color calculating the pixel representing region beyond as the above-mentioned outer region in the color of the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and above-mentioned defect area and interior zone, and classification of defects step, it is based on calculating the above-mentioned characteristic quantity calculated in step at above-mentioned characteristic quantity, be relative to above-mentioned film foreign matter defect in the film that the private side of above-mentioned check object thing exists foreign matter by the classification of defects of above-mentioned defect area, or be categorized as to there is foreign matter at the outer side of above-mentioned check object thing relative to above-mentioned film film on foreign matter defect.

According to above-mentioned formation, the characteristic quantity of the difference between the color calculating the pixel of the interior zone that namely region beyond the above-mentioned outer region in the color of pixel and defect area that represent and comprise in the region and outer region of the ring-type of the periphery of defect area is surrounded by outer region.Then, be foreign matter defect on foreign matter defect or film in film by the classification of defects of defect area based on the characteristic quantity calculated.

As illustrated based on Fig. 2, in film when foreign matter defect, in the outer region and interior zone of defect area, producing color distortion, therefore by using above-mentioned characteristic quantity to identify in film foreign matter defect in foreign matter defect and film, can classify accurately.

In addition, above-mentioned device for classifying defects also can utilize computing machine to realize, in this case, make computing machine as each unit of above-mentioned device for classifying defects to carry out action, the recording medium of the control program realizing above-mentioned device for classifying defects with computing machine thus and the embodied on computer readable that records this program is also contained in category of the present invention.

The invention is not restricted to the respective embodiments described above, various change can be carried out in the scope shown in claim, by different embodiments respectively disclosed technical scheme suitably to combine and the embodiment that obtains is also contained in the scope of technology of the present invention.

(the realization example of software)

Finally, each module of device for classifying defects 1 particularly control part 10 also can utilize to realize with hardware mode at the upper logical circuit formed of integrated circuit (IC chip), and CPU (Central Processing Unit: central processing unit) also can be used to realize with software mode.

In the latter case, device for classifying defects 1 possess perform the CPU realizing the order of the program of each function, the ROM (Read Only Memory: ROM (read-only memory)) preserving said procedure, the RAM (Random Access Memory: random access memory) that launches said procedure, the memory storage (recording medium) etc. such as storer of preserving said procedure and various data.And, the recording medium of the program code (execute form program, intermediate code program, source program) recording the control program of the device for classifying defects 1 as the software realizing above-mentioned functions in the mode of embodied on computer readable also can be provided device for classifying defects 1, this computing machine (or CPU, MPU) reads and performs the program code being recorded in recording medium, realizes object of the present invention thus.

As aforementioned recording medium, the tangible medium (non-transitorytangible medium) of nonvolatile can be adopted, such as tape, the band such as tape class, comprise the disks such as soft (registered trademark) dish/hard disk, the dish class of the CDs such as CD-ROM/MO/MD/DVD/CD-R, the card classes such as IC-card (comprising storage card)/light-card, semiconductor memory class or the PLD (Programmable logicdevice: programmable logic device (PLD)) such as mask rom/EPROM/EEPROM (registered trademark)/flash rom, the logical circuit classes etc. such as FPGA (Field Programmable Gate Array: field programmable gate array).

In addition, also device for classifying defects 1 can be configured to can be connected with communication network, provide said procedure code through communication network.As long as this communication network energy convey program code, is not particularly limited.Such as, internet, Intranet, extranet, LAN, ISDN, VAN, CATV communication network, Virtual Private Network (Virtual Private Network), telephone wire road network, mobile communicating net, satellite communication link etc. can be utilized.In addition, as long as form the transmission medium also energy convey program code of this communication network, specific formation or kind is not limited to.Such as, IEEE1394 can be utilized, USB, power line transmission, cable tv circuit, telephone wire, the wired modes such as ADSL (Asymmetric Digital Subscriber Line: Asymmetrical Digital Subscriber Line) circuit, also IrDA can be utilized, the infrared ray of remote control, Bluetooth (bluetooth) (registered trademark), IEEE802.11 is wireless, HDR (HighData Rate: high data rate), NFC (Near Field Communication: near-field communication), DLNA (Digital Living Network Alliance: DLNA), portable phone net, satellite circuit, the wireless modes such as terrestrial-wave digital net.In addition, the present invention also can realize in the mode of the computer data signal of the embedding carrier wave transmitted for electronics by said procedure code instantiated.

industrial utilizability

The present invention can be applied to the defect inspection of industrial products.

description of reference numerals:

1: device for classifying defects

13: region setting part (region setup unit)

14: classification indicators calculating section (characteristic quantity calculated unit, peak width calculated unit, the 1st difference calculated unit, the 2nd difference calculated unit)

15: classification of defects portion (classification of defects unit)

Claims

1. a device for classifying defects, is to be formed with the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that possessing:

Characteristic quantity calculated unit, it calculates the characteristic quantity of the size of the difference represented between the color as the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and the color as the pixel in the adjacent non-defective region of the region outside above-mentioned defect area and above-mentioned outer region; And

Classification of defects unit, its above-mentioned characteristic quantity calculated based on above-mentioned characteristic quantity calculated unit, be relative to above-mentioned film foreign matter defect in the film that the private side of above-mentioned check object thing exists foreign matter by the classification of defects of above-mentioned defect area, or be categorized as to there is foreign matter at the outer side of above-mentioned check object thing relative to above-mentioned film film on foreign matter defect.

2. device for classifying defects according to claim 1, is characterized in that,

Possess region setup unit, above-mentioned zone setup unit sets above-mentioned outer region based on the brightness value of each pixel comprised in above-mentioned defect area.

3. the device for classifying defects according to claims 1 or 2, is characterized in that,

The difference that above-mentioned characteristic quantity calculated unit calculates the typical value of the form and aspect to the pixel comprised in the typical value of the form and aspect of the pixel comprised in above-mentioned outer region and above-mentioned non-defective region be multiplied by the typical value of the chroma of the pixel comprised in above-mentioned outer region and the value obtained as above-mentioned characteristic quantity.

4. the device for classifying defects according to any one in claims 1 to 3, is characterized in that,

Possess peak width calculated unit, above-mentioned zone width calculated unit calculates the width of the ring of above-mentioned outer region,

The classification of defects of above-mentioned defect area, when the above-mentioned characteristic quantity that above-mentioned characteristic quantity calculated unit calculates is more than or equal to the threshold value predetermined based on the classification of defects of color and the width that above-mentioned zone width calculated unit calculates is more than or equal to the threshold value predetermined based on the classification of defects of peak width, is foreign matter defect in film by above-mentioned classification of defects unit.

5. the device for classifying defects according to any one in Claims 1-4, is characterized in that,

Possesses the 1st difference calculated unit, the difference of the typical value of the brightness value of the pixel comprised in the typical value that above-mentioned 1st difference calculated unit calculates the brightness value of the pixel comprised in above-mentioned outer region and the interior zone as the region beyond the above-mentioned outer region in above-mentioned defect area

The classification of defects of above-mentioned defect area, when the above-mentioned characteristic quantity that above-mentioned characteristic quantity calculated unit calculates is more than or equal to the threshold value predetermined based on the classification of defects of color and the difference of brightness value that above-mentioned 1st difference calculated unit calculates is more than or equal to the threshold value predetermined of the classification of defects of the luminance difference based on above-mentioned outer region and interior zone, is foreign matter defect in film by above-mentioned classification of defects unit.

6. the device for classifying defects according to any one in claim 1 to 5, is characterized in that,

Possess the 2nd difference calculated unit, above-mentioned 2nd difference calculated unit calculates the difference of the typical value of the brightness value of the pixel comprised in the typical value of the brightness value of the pixel comprised in above-mentioned outer region and above-mentioned non-defective region,

The classification of defects of above-mentioned defect area, when the above-mentioned characteristic quantity that above-mentioned characteristic quantity calculated unit calculates is more than or equal to the threshold value predetermined based on the classification of defects of color and the difference of brightness value that above-mentioned 2nd difference calculated unit calculates is less than the threshold value predetermined of the classification of defects of the luminance difference based on above-mentioned outer region and non-defective region, is foreign matter defect in film by above-mentioned classification of defects unit.

7. a device for classifying defects, is to be formed with the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that possessing:

Characteristic quantity calculated unit, it calculates the characteristic quantity of the difference between the color of the pixel representing region beyond as the above-mentioned outer region in the color of the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and above-mentioned defect area and interior zone; And

8. a defect analysis method, adopts and to be formed with the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that possessing:

Characteristic quantity calculates step, calculates the characteristic quantity of the size of the difference represented between the color as the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and the color as the pixel in the adjacent non-defective region of the region outside above-mentioned defect area and above-mentioned outer region; And

Classification of defects step, based on calculating the above-mentioned characteristic quantity calculated in step at above-mentioned characteristic quantity, be relative to above-mentioned film foreign matter defect in the film that the private side of above-mentioned check object thing exists foreign matter by the classification of defects of above-mentioned defect area, or be categorized as to there is foreign matter at the outer side of above-mentioned check object thing relative to above-mentioned film film on foreign matter defect.

9. a defect analysis method, adopts and to be formed with the check object thing of film and device for classifying defects that the defect of defect area that detects in the check image that obtains is classified on surface to shooting, it is characterized in that possessing:

Characteristic quantity calculates step, the characteristic quantity of the difference between the color calculating the pixel representing region beyond as the above-mentioned outer region in the color of the pixel comprised in the region of the ring-type of the periphery along this defect area of a part for above-mentioned defect area and outer region and above-mentioned defect area and interior zone; And

10. a control program, being the control program of the device for classifying defects action described in any one for making in claim 1 to 7, it is characterized in that,

Computing machine is made to play the function of above-mentioned each unit.

The recording medium of 11. 1 kinds of embodied on computer readable, is characterized in that,

Record control program according to claim 10.